JP2007149213A - Data recording method, data reproducing method, data recording apparatus, data reproducing apparatus, and information recording medium - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a data recording method capable of recording a large amount of recording data at high density, moreover, with reliability and ease. <P>SOLUTION: Recording data are recorded on a base material for an information recording medium by carrying out: a recess forming processing to form recesses 4 at first recording positions Pb1, Pd1, specified corresponding to a data content of the recording data to be recorded from among a plurality of recording positions Pa1, Pb1, on one surface of the base material (base material 10) for the information recording medium; and a mark forming processing to form recording marks 5 differing in electric resistance onto the surface at second recording positions Pa1, Pb1, by blowing a recording mark forming gas and also depositing a recording material in the recording mark forming gas on an irradiation area of a recording beam by irradiating second recording positions Pa1, Pb1, specified corresponding to the data content from among each recording position Pa1, Pb1, with the recording beam. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  Data recording method and data recording apparatus for recording recording data by forming recording marks on base material for information recording medium, information recording medium on which recording data is recorded according to the recording method, and recording data from the information recording medium The present invention relates to a data reproduction method and data reproduction apparatus for reproducing data.

As a data recording method and a data reproducing method of this type, a recording / reproducing method using a scanning probe is disclosed in Japanese Patent Laid-Open No. 9-17047. In this recording / reproducing method, a disk having concentric lands formed on one surface thereof and an AFM probe head (hereinafter also referred to as “probe”) whose tip is coated with gold are used. When recording the recording data, a plurality of gold dots are formed at predetermined intervals on the information track defined on the land of the disc according to the data content. Specifically, in a state where the probe is moved to a predetermined position defined according to the data content, gold on the probe surface is transferred onto the disk by the field evaporation method to form gold dots. Thereby, as an example, a plurality of gold dots having a diameter of 50 nm are formed on the information track at intervals of 125 nm. On the other hand, when reproducing recorded data, the disk is rotated while the tip of the probe is in contact with the land (information track) of the disk, thereby detecting the unevenness of the information track via the cantilever in the probe. In this case, on the disc on which the recording data is recorded according to the recording method described above, the portion where the gold dot is formed protrudes from the land surface. Therefore, it is possible to specify the formation position of the gold dot on the information track by specifying the position of the convex portion protruding from the land surface, and to reproduce the recording data based on the specified position information.
Japanese Patent Laid-Open No. 9-17047 (page 3-7, FIG. 1-16)

  However, the conventional recording / reproducing method (apparatus) has the following problems. That is, in the conventional recording / reproducing method, recording data is recorded by forming gold dots (recording marks) by transferring gold at the tip of the probe to a disk by the field evaporation method. For this reason, when recording data is recorded according to the conventional recording method, the gold coating the tip of the probe is reduced by the amount of the recording mark formed on the disk. Therefore, when a large number of recording marks are formed in order to record a large amount of recording data, it is necessary to periodically replace the probe before gold disappears from the tip of the probe. For this reason, the conventional recording method has a problem that the replacement work of the probe when recording a large amount of recording data is complicated. Further, in the conventional recording / reproducing method, the recording data is recorded by binary recording with or without gold dots (the presence or absence of convex portions). Formation pitch (interval between adjacent recording marks on the disk) must be further reduced, and the size of each recording mark must be further reduced. Therefore, when recording data is recorded at a higher density, it is difficult to accurately detect the presence or absence of extremely small recording marks formed at a narrow pitch when reproducing the recording data, which may lead to a reproduction error. is there. As described above, the conventional recording / reproducing method has a problem that it is difficult to record the recording data at a higher density.

  The present invention has been made in view of such problems, a data recording method and a data recording apparatus capable of recording a large amount of recording data with high density and surely and easily, and recording data without causing a reproduction error. Main object is to provide a data reproducing method and data reproducing apparatus capable of reproducing data, and an information recording medium on which recorded data is recorded at a high density.

  In order to achieve the above object, a data recording method according to the present invention includes a first recording position defined in accordance with the data content of recording data to be recorded from among a plurality of recording positions on one surface of an information recording medium substrate. A recess forming process for forming a recess on the recording medium, and a recording mark forming gas is sprayed on the one surface, and a recording beam is irradiated to a second recording position defined in accordance with the data contents from among the recording positions. A mark forming process for forming a recording mark having an electric resistance value different from that of the one surface by depositing a recording material in the recording mark forming gas in an irradiation region of the recording beam at the second recording position; By executing, the recording data is recorded on the information recording medium substrate. Note that “data content of recorded data” in this specification means, for example, information itself that is digitized (encoded) in binary numbers (“0” and “1”).

  In the data recording method according to the present invention, the concave portion having the depth corresponding to the data content is formed for each of the first recording positions in the concave portion forming process.

  Furthermore, in the data recording method according to the present invention, the plurality of types of the concave portions having different depths are formed by adjusting the irradiation amount of the recording beam.

  In the data recording method according to the present invention, the concave portion is formed by irradiating the first recording position with the recording beam with a power exceeding a predetermined power in the concave portion forming process, and the mark forming processing is performed. The recording mark is formed by irradiating the second recording position with the recording beam at a power lower than the predetermined power.

  Furthermore, in the data recording method according to the present invention, the recording mark having an electric resistance value corresponding to the data content is formed for each of the second recording positions.

  In the data recording method according to the present invention, a plurality of types of recording marks having different electrical resistance values are formed by adjusting the irradiation amount of the recording beam and changing the thickness of the recording material.

  Furthermore, the data recording method according to the present invention provides a plurality of types of the electrical resistance values different from each other in the types of the recording mark forming gases that differ in the types of the recording materials. A recording mark is formed.

  Further, the data reproducing method according to the present invention provides the one surface of the information recording medium substrate when reproducing the recorded data from the information recording medium on which the recorded data is recorded according to any one of the data recording methods described above. A distance measurement process for measuring the distance from the reference plane is performed for each part, and a voltage is applied between each part and a predetermined part different from each part in the base material for the information recording medium. On the other hand, a current value measurement process for measuring a current value that conducts between each part and the predetermined part is measured for each part, the distance measured for each part by the distance measurement process, and the current The recorded data is reproduced based on the current value measured for each part by the value measurement process.

  Further, the data recording apparatus according to the present invention includes a beam irradiation unit that irradiates a recording beam on one surface of an information recording medium substrate, a gas spraying unit that sprays a recording mark forming gas on the one surface, and the beam irradiation unit. And a control unit for controlling the gas blowing unit, the control unit controlling the beam irradiation unit to define the data corresponding to the data content of the recording data to be recorded from among a plurality of recording positions on the one surface. The first recording position is irradiated with the recording beam at a power exceeding a predetermined power, thereby forming a concave portion at the first recording position, and controlling the gas spraying portion to the one surface. A second recording position defined according to the data content from among the recording positions by blowing a recording mark forming gas and controlling the beam irradiation unit. By irradiating the recording beam at a power lower than the predetermined power to deposit the recording material in the recording mark forming gas, a recording mark having an electric resistance value different from that of the one surface is applied to the second recording position. The recording data is recorded on the information recording medium substrate by executing a mark forming process to be formed on the information recording medium.

  Further, the data reproducing apparatus according to the present invention is configured to be able to reproduce the recorded data from an information recording medium in which the recorded data is recorded on the base material for the information recording medium according to any one of the data recording methods described above, A distance measuring unit that measures a distance from a reference surface for each part of the one surface in the substrate for information recording medium, and a predetermined part that is different from each part and each part in the substrate for information recording medium A current value measuring unit that measures a current value that conducts between each part and the predetermined part while applying a voltage for each part; a control unit that controls the distance measuring unit and the current value measuring part; The control unit controls the distance measurement unit to execute a distance measurement process for measuring the distance from the reference plane for each part, and controls the current value measurement unit to Run the current value measurement process to measure the current value for each site, to reproduce the recorded data on the basis of the on and the current value and said measured distance for each site.

  Further, the information recording medium according to the present invention has a concave portion at the first recording position defined corresponding to the data content of the recording data to be recorded from among a plurality of recording positions on one surface of the substrate for information recording medium. The recording data is formed by forming a recording mark having an electric resistance value different from that of the one surface at a second recording position defined corresponding to the data content from among the recording positions. It is recorded.

  Furthermore, in the information recording medium according to the present invention, each of the recesses is formed at a depth corresponding to the data content.

  In the information recording medium according to the present invention, each recording mark is formed so as to have an electric resistance value corresponding to the data content.

  According to the data recording method and the data recording apparatus according to the present invention, the concave portion forming process for forming the concave portion at the first recording position defined corresponding to the data content of the recording data to be recorded, and the recording mark including the recording material By spraying the forming gas over the entire surface and irradiating the recording beam to the second recording position defined in accordance with the data content, and depositing the recording material in the recording mark forming gas in the irradiation region of the recording beam. By performing a mark forming process for forming a recording mark having an electric resistance value different from that of the first surface at the second recording position and recording the recording data on the information recording medium substrate, the gold at the tip of the probe is recorded on the disk. Unlike the conventional recording / reproducing method in which gold dots (recording marks) are formed by transferring, a gas generating material for generating a recording mark forming gas is supplied to a gas supply unit (gas source storage). A large number of recording marks can be formed continuously without replacing recording parts (probes used in the conventional recording method) during the data recording process. . Therefore, a large amount of recording data can be recorded reliably and easily. In addition, since the recording data can be multi-valued recorded on the information recording medium base material by the combination of the presence / absence of a recess and the presence / absence of a recording mark at each recording position, the recording data is recorded only by the presence / absence of a recording mark (gold dot). Unlike conventional recording / reproducing methods, the recording density of recording data that can be recorded per unit area of the substrate for information recording media is reduced without forming recesses or recording marks at a narrow pitch that may cause a reproduction error. It can be raised enough.

  Further, according to the data recording method of the present invention, the concave portion having a depth corresponding to the data content is formed at each first recording position in the concave portion forming process, thereby recording by forming one type of concave portion. Compared to the data recording method for recording data (a method for recording data by combining the presence / absence of a recess and the presence / absence of a recording mark), information recording is performed to the extent that multi-value recording according to the type of recess is possible. Recording data can be recorded at a higher density on the medium substrate.

  Furthermore, according to the data recording method of the present invention, by forming a plurality of types of recesses having different depths by adjusting the irradiation amount of the recording beam, a desired depth can be achieved with a relatively simple configuration. The concave portion can be reliably formed at the recording position.

  According to the data recording method of the present invention, the concave portion is formed by irradiating the first recording position with the recording beam at a power exceeding the predetermined power in the concave portion forming process, and the predetermined power or less in the mark forming processing. By forming the recording mark by irradiating the recording beam to the second recording position with this power, it is possible to form the concave portion at a desired recording position with high accuracy while having a relatively simple configuration.

  Further, according to the data recording method of the present invention, the recording data having the electric resistance value corresponding to the data content is formed at each second recording position, thereby forming the recording data by forming one type of recording mark. Compared with the data recording method (recording data is recorded by combining the presence / absence of a recess and the presence / absence of a recording mark), information recording is performed to the extent that multi-value recording corresponding to the type of recording mark is possible. Recording data can be recorded at a higher density on the medium substrate.

  Further, according to the data recording method of the present invention, by comparing the irradiation amount of the recording beam and changing the thickness of the recording material, a plurality of types of recording marks having different electrical resistance values are formed, thereby making a comparison. It is possible to reliably form a recording mark having a desired height (recording mark having a desired electric resistance value) at a recording position while having a simple structure.

  Furthermore, according to the data recording method of the present invention, a plurality of types of recording marks having different electrical resistance values as defined in any one of a plurality of types of recording mark forming gases having different types of recording materials. By forming the recording mark, it is possible to form a recording mark having a desired electric resistance value and perform multi-value recording on the recording data without greatly changing the height of the recording mark for each recording position.

  Further, according to the data reproducing method and data reproducing apparatus of the present invention, when reproducing recorded data from the information recording medium on which the recorded data is recorded according to any one of the above data recording methods, the information recording medium substrate The distance measurement process for measuring the distance from the reference surface is performed for each part of the one surface in FIG. 5 and a voltage is applied between each part and a predetermined part different from each part in the information recording medium substrate. The current value measurement process for measuring the current value that conducts between each part and the predetermined part is performed for each part, the distance measured for each part by the distance measurement process, and the current value measurement process for each part. By reproducing the recorded data based on the measured current value, the combination of the presence / absence of a recess and the distance from the reference surface, the presence / absence of a recording mark, and the current value at each recording position Recording data from an information recording medium in which recorded data is multi-valued recording I can be read reliably and accurately.

  According to the information recording medium of the present invention, the concave portion is formed at the first recording position defined corresponding to the data content of the recording data, and the information is recorded at the second recording position defined corresponding to the data content. The recording data is recorded by forming a recording mark having an electric resistance value different from that of one surface of the substrate for the recording medium, so that the recording data is multi-valued by a combination of the presence / absence of a recess and the presence / absence of the recording mark at each recording position. Since it can be recorded, the unit area of the base material for the information recording medium as compared with the information recording medium on which the recording data is recorded according to the conventional recording / reproducing method of recording the recording data only by the presence or absence of the recording mark (gold dot) It is possible to provide an information recording medium in which the recording density of the recording data recorded per hit is sufficiently high.

  Furthermore, according to the information recording medium according to the present invention, since each recess is formed at a depth corresponding to the data content, an information recording medium (recording of the recess) on which the recording data is recorded by forming one type of recess. The unit area of the base material for the information recording medium is as much as multi-value recording according to the type of the recess is possible compared to the information recording medium in which the recording data is recorded by the combination of the presence and absence of the recording mark) It is possible to provide an information recording medium in which the recording density of the recording data recorded per hit is higher.

  Further, according to the information recording medium of the present invention, the information recording medium in which the recording data is recorded by forming one type of recording mark by forming each recording mark with the electric resistance value corresponding to the data content. Compared to (information recording medium on which recording data is recorded by a combination of the presence or absence of a recess and the presence or absence of a recording mark), the information recording medium base is as much as multi-level recording according to the type of recording mark is possible. An information recording medium having a higher recording density of recording data recorded per unit area of the material can be provided.

  DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a data recording method, a data reproducing method, a data recording device, a data reproducing device, and an information recording medium according to the present invention will be described below with reference to the accompanying drawings.

  First, a data recording method, a data recording apparatus, and an information recording medium according to the present invention will be described with reference to the drawings.

  A data recording apparatus 1 shown in FIG. 1 is an apparatus that records recording data in accordance with a data recording method according to the present invention. As an example, recording data Dre connected to an external apparatus such as a personal computer and output from the external apparatus Can be recorded on the substrate 10. In this case, the base material 10 corresponds to the base material for an information recording medium in the present invention, and is made of flat silicon having a flat data recording surface on which recording data Dre is recorded as an example. In addition, the base material for information recording media in the present invention is not limited to a silicon plate material such as the base material 10, and includes those formed in a plate shape from various materials such as metal materials, resin materials, glass and ceramics. It is. Further, this includes not only a plate shape but also a substrate formed into a tape shape or a film shape by sufficiently reducing its thickness.

  On the other hand, the data recording apparatus 1 includes a recording processing unit 11, an exhaust pump 12, a gas supply unit 13, an ion beam irradiation unit 14, an operation unit 15, a display unit 16, a control unit 17, and a storage unit 18. The recording processing unit 11 includes a vacuum container 21, a substrate mounting table 22, and a moving mechanism 23. The vacuum container 21 is configured to be able to accommodate the substrate mounting table 22, the moving mechanism 23, and the substrate 10, and the air around the substrate 10 is evacuated by exhausting air in the internal space by the exhaust pump 12. maintain. The substrate mounting table 22 is formed so that the substrate 10 can be mounted. The movement mechanism 23 moves the base material 10 on the base material mounting table 22 by moving the base material mounting table 22 along its mounting surface (upper surface in the figure) according to the control of the control unit 17. The exhaust pump 12 exhausts the air in the vacuum vessel 21 according to the control of the control unit 17.

  The gas supply unit 13 corresponds to a gas blowing unit in the present invention, and includes a gas source storage unit 31, a heater 32, an exhaust pump 33, and a nozzle 34. The gas source storage unit 31 stores a gas generating material (for example, an organic metal material such as hexacarbonyl tungsten or an aromatic hydrocarbon such as phenanthrene) for generating the recording mark forming gas in the present invention. . The heater 32 generates a recording mark forming gas in the gas source housing 31 by heating and evaporating or sublimating the gas generating material through the gas source housing 31 under the control of the control unit 17. In this case, when hexacarbonyl tungsten or phenanthrene is used as a gas generating material, a hydrocarbon gas G is generated as a recording mark forming gas. In this specification, an example is described in which phenanthrene is used to generate hydrocarbon gas G as a recording mark forming gas. The exhaust pump 33 feeds the hydrocarbon gas G generated in the gas source housing 31 to the nozzle 34 via the pipe 34a. The nozzle 34 blows the hydrocarbon gas G, which is disposed in the vacuum vessel 21 and is supplied by the exhaust pump 33, toward the substrate 10 on the substrate mounting table 22.

  The ion beam irradiation unit 14 corresponds to the beam irradiation unit in the present invention, and includes an ion source 41, a blanking control unit 42, focusing lenses 43 and 45, an astigmatism correction electrode unit 44, and a deflection electrode unit 46. According to this control, the ion beam IB of various powers (beam intensity) can be irradiated toward the substrate 10 on the substrate mounting table 22. Specifically, the ion source (ion generator) 41 is configured so that the tip of the emitter and the extraction electrode (not shown) are supplied in a state where liquid metal (gallium as an example) is supplied to the tip of the metal emitter (not shown). ) To generate an ion (gallium ion in this example) at the tip of the emitter and accelerate the ion toward the extraction electrode, thereby causing the ion beam IB ( An example of a recording mark forming beam in the present invention is output. Instead of gallium, various liquid metals such as gold, gold cluster, and bismuth can be used. The blanking control unit 42 performs blanking control (on / off control) for the ion beam IB output from the ion source 41 in accordance with the control of the control unit 17. The focusing lenses (beam shaping lenses) 43 and 45 shape (thinn diameter) the ion beam IB. The astigmatism correction electrode unit 44 shapes the ion beam IB so that the beam spot shape is a perfect circle. The deflection electrode unit 46 deflects the ion beam IB formed by the focusing lens 45 according to the control of the control unit 17 to change the irradiation position on the substrate 10.

  The operation unit 15 includes a plurality of operation switches (not shown) for setting and operating the operation state of the data recording apparatus 1. The display unit 16 displays information regarding the progress of the recording process, various error information, and the like. The control unit 17 comprehensively controls each unit of the data recording apparatus 1, so that a plurality of concave portions 4 (see FIG. 2) and a plurality of recording marks 5 corresponding to the data content of the recording data Dre output from the external device are obtained. Is formed on the substrate 10 (execution of the data recording method according to the present invention). The storage unit 18 stores recording procedure data Dp in which a recording procedure for data recording processing is recorded.

In the data recording apparatus 1, when recording of the recording data Dre, as shown in FIG. 2, a number of recording position defined for example 8 × 10 ¹⁰ sites / square inch in a grid on the substrate 10 Pa1, Pb1 · A concave portion at a recording position P (first recording position in the present invention) defined according to the data content of the recording data Dre from Pa2, Pb2 (hereinafter also referred to as “recording position P” when not distinguished) 4 and the recording mark 5 is formed at the recording position P (second recording position in the present invention) defined in accordance with the data content of the recording data Dre among the recording positions P. In the following description, the substrate 10 in which a plurality of recesses 4 and a plurality of recording marks 5 are formed is also referred to as an information recording medium 3.

  In this case, if the diameter L1 of the concave portion 4 with respect to the diameter L2 of the recording mark 5 is too small, it is difficult to form the recording mark 5 in the concave portion 4 (bottom surface of the concave portion 4) in the recording process of the recording data Dre described later. There is a risk. Therefore, it is preferable to define the diameter L1 of the recess 4 and the diameter L2 of the recording mark 5 so that the diameter L1 of the recess 4 with respect to the diameter L2 of the recording mark 5 is 110% or more. In this example, the diameter L1 of the concave portion 4 is set to 125 nm, and the diameter L2 of the recording mark 5 is set to 100 nm so that the diameter L1 of the concave portion 4 with respect to the diameter L2 of the recording mark 5 is 125%. Further, if the adjacent recording positions P, P on the base material 10 are separated too much (if the pitch of the recording positions P is excessively widened), the recesses 4 and the recording marks 5 that can be formed within the unit area on the base material 10. This makes it difficult to record the recording data Dre at high density. Therefore, in order to realize high-density recording, it is preferable that the adjacent recording positions P and P on the substrate 10 be defined as close as possible. Specifically, when the diameter L1 of the concave portion 4 is set to 125 nm and the diameter L2 of the recording mark 5 is set to 100 nm, the distances L3 and L4 between the centers of the adjacent recording positions P and P are set to 200 nm or less (recessed portion). 4 or less of the diameter L1 of the recording mark 5 or 200% or less of the diameter L2 of the recording mark 5).

  On the other hand, when the adjacent recording positions P, P on the base material 10 are too close, the concave portions 4 respectively formed at the adjacent recording positions P, P are continuous in the plane direction of the base material 10 and are adjacent to each other. When P and P are brought closer, the recording marks 5 formed at the adjacent recording positions P and P overlap each other. As a result, it is difficult to individually identify the recesses 4 and the recording marks 5 when reproducing the recording data Dre, which may cause a reproduction error. Therefore, in order to avoid the situation where the concave portions 4 formed at the adjacent recording positions P, P on the base material 10 are continuous or the situation where the recording marks 5 formed at the adjacent recording positions P, P overlap, the base material 10 is used. It is necessary to define the distances L3 and L4 between the adjacent recording positions P and P that are sufficiently larger than the diameter L1 of the concave portion 4 and the diameter L2 of the recording mark 5 above. Specifically, when the diameter L1 of the recess 4 is 125 nm and the diameter L2 of the recording mark 5 is 100 nm, as an example, the distances L3 and L4 between the centers of adjacent recording positions P and P are 150 nm or more (recesses). Preferably, it is set to 120% or more with respect to the diameter L1 of 4, or 150% or more with respect to the diameter L2 of the recording mark 5. In this example, the center-to-center distances L3 and L4 of the adjacent recording positions P and P are 150 nm. In the figure, in order to facilitate understanding of the present invention, the distances L3 and L4 between the recording positions P and P are exaggerated and enlarged.

  Moreover, in this data recording device 1, as shown in FIGS. 3 and 4, three types of concave portions 4a to 4c having different depths D and three types of recording marks 5a to 5c having different heights H are recorded. The recording data Dre is recorded in multiple values by forming it at each recording position P in an arbitrary combination according to the data content of the data Dre. In this case, as an example, the recess 4a is formed so that the depth D1 is in the range of 1 nm to 3 nm (for example, 2 nm). Moreover, the recessed part 4b is formed so that the depth D2 may become in the range of 4 nm or more and 6 nm or less (for example, 5 nm) as an example. Furthermore, as an example, the recess 4c is formed so that the depth D3 is within a range of 11 nm to 13 nm (for example, 12 nm). Further, as an example, the recording mark 5a is formed so that the height H1 is within a range of 1 nm to 3 nm (for example, 2 nm). Furthermore, as an example, the recording mark 5b is formed so that the height H2 is in the range of 4 nm to 6 nm (for example, 5 nm). Further, as an example, the recording mark 5c is formed so that the height H3 is within a range of 11 nm to 13 nm (for example, 12 nm). The recording marks 5a to 5c are formed so that their electric resistance values are different from each other due to the difference in the height H (thickness of the recording material).

  In the recording process of the recording data Dre by the data recording apparatus 1, as shown in FIG. 1, first, the substrate 10 is set on the substrate mounting table 22 with the data recording surface facing upward. Next, the control unit 17 controls the exhaust pump 12 to exhaust the air in the vacuum vessel 21 and also controls the heater 32 to heat the phenanthrene in the gas source storage unit 31 to thereby heat the gas source storage unit 31. To generate hydrocarbon gas G. Subsequently, when the recording data Dre is output from the external device, the control unit 17 controls the exhaust pump 33 to supply the hydrocarbon gas G from the gas source housing unit 31 to the nozzle 34 via the pipe 34a. Then, the moving mechanism 23 is controlled to move the substrate mounting table 22 so that, for example, the recording position Pa1 on the substrate 10 is positioned below the ion beam irradiation unit 14. Next, the control unit 17 controls the ion beam irradiation unit 14 on the basis of the recording data Dre and the recording procedure data Dp stored in the storage unit 18 so that the mark forming power is set at the recording position Pa1 on the substrate 10. The ion beam IB adjusted to (a power equal to or lower than a predetermined power in the present invention) is irradiated. Specifically, the recording position Pa1 is irradiated with an ion beam IB having a weaker power than the recess formation power irradiated when forming any one of the recesses 4a to 4c as described later.

  At this time, secondary electrons are generated from the base material 10 by the ion beam IB irradiated toward the recording position Pa1, and the hydrocarbon gas G sprayed from the nozzle 34 toward the base material 10 becomes secondary electrons. The gas component and the solid component (carbon) are separated by the influence. The separated gas component is exhausted to the outside of the vacuum vessel 21 by the exhaust pump 12, and carbon as a solid component is deposited on the substrate 10 (recording position Pa1). Thereby, as shown in FIG. 2, the recording mark 5 which is a carbon deposit is formed in the recording position Pa1 (formation process of the recording mark 5 by the vapor phase growth method). At this time, the blanking control unit 42 adjusts the irradiation time for irradiating the ion beam IB toward the substrate 10 according to the control of the control unit 17 (adjustment of the irradiation amount of the recording beam). The amount of carbon to be deposited is changed, and any one of the recording marks 5a to 5c having different heights H1 to H3 is formed at the recording position Pa1 (mark forming process in the present invention).

  Next, the control unit 17 controls the deflection electrode unit 46 of the ion beam irradiation unit 14 to change the irradiation destination of the ion beam IB to the recording position Pb1 on the substrate 10, and thereby the recess forming power (in the present invention). The ion beam IB adjusted to a power exceeding a predetermined power is irradiated. Specifically, the recording position Pb1 is irradiated with an ion beam IB having a stronger power than that of the mark forming word irradiated when forming any one of the recording marks 5a to 5c described above. At this time, the surface of the substrate 10 is scraped off by the irradiated high-power ion beam IB to form the recess 4 at the recording position Pb1. At this time, the blanking control unit 42 adjusts the irradiation time for irradiating the ion beam IB toward the substrate 10 according to the control of the control unit 17 (adjustment of the irradiation amount of the recording beam). The depth D of the recess 4 to be formed is changed, and any one of the recesses 4a to 4c having different depths D1 to D3 is formed at the recording position Pb1 (recess formation processing in the present invention). Subsequently, the control unit 17 controls the ion beam irradiation unit 14 to reduce the power to the mark formation power while continuing the irradiation of the ion beam IB to the base material 10. At this time, the hydrocarbon gas G is separated into a gas component and a solid component by the ion beam IB irradiated toward the recording position Pb1 (the bottom surface of the concave portion 4), and carbon as a solid component is formed on the substrate 10. Deposits on the bottom surface of the recess 4 formed at the recording position Pb1. As a result, as shown in FIG. 2, a recording mark 5 that is a carbon deposit is formed on the bottom surface of the recess 4 at the recording position Pb1. At this time, the blanking control unit 42 changes the amount of carbon deposited on the substrate 10 by adjusting the irradiation time for irradiating the ion beam IB toward the substrate 10 according to the control of the control unit 17. Any one of the recording marks 5a to 5c having different heights H1 to H3 is formed at the recording position Pb1.

  In addition, when the concave portion 4 or the recording mark 5 is formed at the recording position P outside the deflection range of the ion beam IB by the deflection electrode unit 46, the control unit 17 controls the moving mechanism 23 so that the recording position P is set. The substrate mounting table 22 is moved so as to be positioned below the ion beam irradiation unit 14. Further, when the formation of the concave portion 4 and the recording mark 5 for the first row (recording positions Pa1, Pb1,...) Of the recording positions P defined in the grid shape is completed, the control unit 17 moves the moving mechanism. 23, and the substrate mounting table 22 is moved so that the recording position Pa <b> 2 in the second row of the recording positions P on the substrate 10 is positioned below the ion beam irradiation unit 14. Then, the ion beam irradiating unit 14 is controlled to irradiate the ion beam IB to form the concave portion 4 and the recording mark 5 at the recording position Pa2.

  As described above, the control unit 17 sets the concave portion 4 at the recording position P (first recording position in the present invention) defined in accordance with the data content of the recording data Dre among the recording positions P on the substrate 10. A recess forming process to be formed, and a mark forming process for forming the recording mark 5 at a recording position P (second recording position in the present invention) defined in accordance with the data content of the recording data Dre among the recording positions P. Are executed sequentially. As a result, as shown in FIG. 2, the base material 10 has, for example, a recording position P in which only the recording mark 5 is formed without forming the recess 4 as in the recording position Pa1, and a recess in the recording position Pb1. 4 and the recording position P in which the recording mark 5 is formed on the bottom surface, and the recording position P in which neither the concave portion 4 nor the recording mark 5 is formed, such as the recording position Pc1, and the recording position Pd1. The recording position P in which only the concave portion 4 is formed exists. Further, each recess 4 formed at each recording position P has a depth D corresponding to the data content of the recording data Dre, and each recording mark 5 formed at each recording position P has its height. H is different corresponding to the data content of the recording data Dre. Therefore, at each recording position P on the substrate 10, four types of recesses 4 having different depths D (parts where the depth D is zero, that is, portions where the recesses 4 are not formed) are different in height H. The recording data Dre is recorded in any one of 16 patterns (16 values) in combination with the type of recording marks 5 (parts where the recording marks 5 are not formed).

  As described above, according to the data recording method by the data recording apparatus 1, the recording position P (corresponding to the recording positions Pb1, Pd1, etc. in this example: the recording position Dre corresponding to the data content of the recording data Dre to be recorded in the present invention). A recess forming process for forming the recess 4 at the first recording position), and a hydrocarbon gas G (recording mark forming gas) is sprayed on one surface of the base material 10 and a recording position P (corresponding to the data content) In the example, the recording position Pa1, Pb1, etc .: the second recording position in the present invention) is irradiated with the ion beam IB (recording beam), and the irradiation region of the ion beam IB is carbon in the hydrocarbon gas G (recording material). To record the recording data Dre on the substrate 10 by executing a mark forming process for forming the recording mark 5 having an electric resistance value different from that of one surface of the substrate 10. Thus, unlike the conventional recording / reproducing method in which gold at the tip of the probe is transferred to a disk to form gold dots (recording marks 5), a gas generating material for generating hydrocarbon gas G (in this example, phenanthrene). ) Is stored in the gas supply unit 13 (gas source storage unit 31), so that a large amount of data can be stored without replacing recording components (probes used in the conventional recording method) during the data recording process. The recording marks 5 can be formed continuously. Therefore, a large amount of recording data can be recorded reliably and easily. Further, since the recording data Dre can be multi-valued recorded on the substrate 10 by the combination of the presence / absence of the recess 4 and the presence / absence of the recording mark 5 for each recording position P, the recording data can be recorded only by the presence / absence of the recording mark (gold dot). Unlike the conventional recording / reproducing method for recording, the recording density of the recording data Dre that can be recorded per unit area of the substrate 10 without forming the recesses 4 and the recording marks 5 at a narrow pitch that may cause a reproduction error. Can be increased sufficiently.

  Further, according to the data recording method by the data recording apparatus 1, the concave portion 4 (in this example, the three types of concave portions 4a to 4c) having a depth D corresponding to the data content is formed at each recording position P in the formation processing of the concave portion 4. A data recording method for recording the recording data Dre by forming one type of concave portion 4 (a method for recording the recording data Dre by a combination of the presence / absence of the concave portion 4 and the presence / absence of the recording mark 5). In comparison, the recording data Dre can be recorded on the base material 10 at a higher density as much as multi-value recording according to the type of the recess 4 is possible.

  Further, according to the data recording method by the data recording apparatus 1, the plurality of types of recesses 4 having different depths are formed by adjusting the irradiation amount of the ion beam IB. The recess 4 having a desired depth D can be reliably formed at the recording position P.

  Further, according to the data recording method by the data recording apparatus 1, the concave portion 4 is formed by irradiating the recording position P with the ion beam IB with a power exceeding the predetermined power (the concave portion forming power) in the concave portion forming process in the present invention. At the same time, by forming the recording mark 5 by irradiating the recording position P with the ion beam IB at a power (mark forming power) equal to or lower than a predetermined power in the mark forming process according to the present invention, the recording mark 5 is formed with a relatively simple configuration. The concave portion 4 can be formed with high accuracy at the recording position P.

  Further, according to the data recording method by the data recording apparatus 1, one type of recording mark 5 is formed by forming the recording mark 5 having an electrical resistance value corresponding to the data content at each second recording position. Compared with the data recording method for recording the recording data Dre (a method for recording the recording data Dre by the combination of the presence / absence of the recess 4 and the presence / absence of the recording mark 5), the multi-value recording corresponding to the type of the recording mark 5 is performed. Therefore, the recording data Dre can be recorded at a higher density on the substrate 10 as much as possible.

  Further, according to the data recording method by the data recording apparatus 1, a plurality of types of recording marks 5 having different electric resistance values are formed by adjusting the irradiation amount of the ion beam IB and changing the thickness of the recording material. Thus, the recording mark 5 having a desired height H (recording mark 5 having a desired electric resistance value) can be reliably formed at the recording position P with a relatively simple configuration.

  Further, according to the information recording medium 3 on which the recording data Dre is recorded according to the data recording method described above, the recess 4 is formed at the recording position P (first recording position) defined in accordance with the data content of the recording data Dre. The recording data Dre is recorded by forming a recording mark 5 having an electric resistance value different from that of one surface of the base material 10 at a recording position P (second recording position) defined in accordance with the data content. Since the recording data Dre can be recorded in multiple values by a combination of the presence / absence of the recess 4 and the presence / absence of the recording mark 5 for each recording position P, conventional recording / reproducing is performed by recording the recording data only by the presence / absence of the recording mark (gold dot). The recording density of the recording data Dre recorded per unit area of the substrate 10 as compared with the information recording medium on which the recording data is recorded according to the method It is possible to provide a sufficiently high information recording medium 3.

  Furthermore, according to the information recording medium 3 on which the recording data Dre is recorded according to the data recording method described above, at the depth D corresponding to the data content (in this example, one of the three types of depths D1 to D3). By forming each concave portion 4, the information recording medium 3 on which the recording data Dre is recorded by forming one type of concave portion 4 (the recording data Dre is recorded by a combination of the presence or absence of the concave portion 4 and the presence or absence of the recording mark 5). Compared with the recorded information recording medium 3), the recording density of the recording data Dre recorded per unit area of the base material 10 is higher than the information recording medium 3) by which multi-level recording according to the type of the recess 4 is possible. The recording medium 3 can be provided.

  In addition, according to the information recording medium 3 on which the recording data Dre is recorded according to the data recording method described above, each recording mark 5 is formed so as to have an electric resistance value corresponding to the data content. Compared to the information recording medium 3 on which the recording data Dre is recorded (the information recording medium 3 on which the recording data Dre is recorded by the combination of the presence or absence of the recess 4 and the presence or absence of the recording mark 5). The information recording medium 3 having a higher recording density of the recording data Dre recorded per unit area of the substrate 10 can be provided by the amount that multi-value recording corresponding to the five types is possible.

  The present invention is not limited to the configuration and method described above. For example, in the data recording apparatus 1 described above, the ion beam IB is irradiated onto the base material 10 to form the recesses 4 and the recording marks 5 in the data recording process, but various types of electron beams or the like are used instead of the ion beam IB. A configuration in which the concave portion 4 is formed on the substrate 10 by irradiating the charged particle beam, or a configuration in which the recording material 5 is deposited by irradiating various charged particle beams to form the recording mark 5 can also be adopted. In this case, a configuration using different types of beams as the charged particle beam for forming the recess 4 and the charged particle beam for forming the recording mark 5 may be employed. Further, in the data recording apparatus 1, the blanking control unit 42 adjusts the irradiation time of the ion beam IB to change the irradiation amount with respect to the recording position P, so that the depths D1 to D3 are different. A configuration is employed in which recording marks 5a to 5c having different heights H1 to H3 are formed. By adjusting the power of the ion beam IB output from the ion beam irradiation unit 14, the irradiation amount of the ion beam IB is changed. It is also possible to adopt a configuration in which the recesses 4a to 4c having different depths D1 to D3 and the recording marks 5a to 5c having different heights H1 to H3 are formed.

  Further, the number of types of recesses 4 (types of depth D) is not limited to three, and a configuration in which two or more types of recesses 4 are formed and recording data Dre is recorded in multiple values may be employed. it can. Furthermore, the number of types of the recording marks 5 is not limited to three, and a configuration in which two or more types of recording marks 5 are formed and the recording data Dre is recorded in multiple values may be employed. In addition, the recording data Dre is recorded by forming one type of concave portion 4 having the same depth D in the entire area of the base material 10, and one type of recording mark 5 having the same height H in the entire area of the base material 10. It is also possible to adopt a configuration in which the recording data Dre is recorded by forming the. In this case, the pitch of the recording positions P (center-to-center distances L3 and L4) is defined as 200 nm, and recording is performed by combining the three types of recesses 4a to 4c and the three types of recording marks 5a to 5c as in the above-described example. When the data Dre is recorded in multiple values, high density recording of about 190 Gbit / in 2 is possible. Further, under the same conditions, for example, when the recording data Dre is multi-valued recorded with 200 types of recesses 4 and 200 types of recording marks 5, high-density recording of about 840 Tbit / square inch is possible. When multi-value recording is not performed (when recording data Dre is recorded by a combination of the presence / absence of the recess 4 and the presence / absence of the recording mark 5), high-density recording of about 85 Gbit / square inch is possible.

  Furthermore, the method of changing the electrical resistance value of the recording mark 5 formed at each recording position P is not limited to the above data recording method of changing the height (thickness) H of carbon deposited on the base material 10. For example, two or more kinds of recording mark forming gases having different electric resistance values of solid components separated by irradiation with the ion beam IB can be sprayed toward the base material 10, and according to the data content of the recording data Dre. A method of forming various recording marks 5 made of solid components having different electric resistance values on the substrate 10 by irradiating the recording mark forming beam while blowing any recording mark forming gas to the substrate 10. It can also be adopted. As described above, in the mark forming process according to the present invention, a plurality of types of recording marks 5 having different electric resistance values by defining any one of a plurality of types of recording mark forming gases having different types of recording materials. By forming the recording mark 5, the recording mark D having a desired electric resistance value can be formed and the recording data Dre can be recorded in a multivalued manner without greatly changing the height H of the recording mark 5 for each recording position P.

  Further, the method of forming the recess 4 by irradiating the recording position P on the substrate 10 with the ion beam IB adjusted to the recess forming power has been described. However, the recess forming process in the data recording method according to the present invention is described below. The method is not limited to this. For example, a method of forming the recess 4 at an arbitrary recording position P of the substrate 10 by imprinting and etching can be employed. Specifically, in this method, as shown in FIG. 5, first, a stamper having a concavo-convex pattern 62 in which a plurality of cylindrical convex portions 62a are formed according to the position of the recording position P where the concave portion 4 is to be formed. 61 is manufactured. In addition, it does not specifically limit about the manufacturing method of the stamper 61, It can manufacture according to well-known various stamper manufacturing methods. Next, as shown in FIG. 6, a resist layer 63 is formed by applying a resist on the substrate 10. Subsequently, as shown in FIG. 7, each convex portion 62 a of the stamper 61 is pushed into the resist layer 63 by pressing the concave / convex pattern 62 of the stamper 61 against the resist layer 63 on the substrate 10 using, for example, a press machine. At this time, the resist (resist layer 63) moves from the pressed portion of the convex portion 62a into the concave portion 62b around the convex portion 62a by the pressing of each convex portion 62a. Thereafter, the stamper 61 is peeled off from the resist layer 63, whereby the concave / convex pattern 62 of the stamper 61 is transferred to the resist layer 63, and the concave / convex pattern 64 is formed on the substrate 10, as shown in FIG. In this case, the concave / convex pattern 64 has concave portions 64 b corresponding to the convex portions 62 a of the stamper 61 and convex portions 64 a corresponding to the concave portions 62 b of the stamper 61.

  Subsequently, the etching process with respect to the base material 10 is performed using the uneven | corrugated pattern 64 (resist layer 63) formed on the base material 10 as a mask. At this time, the base material 10 (the bottom surface of each concave portion 64b) exposed from the convex portions 64a of the concave / convex pattern 64 is etched, and a plurality of concave portions 4 are formed on the surface of the base material 10 as shown in FIG. It is formed. Thus, the concave portion forming process in the present invention is completed. Subsequently, the base material 10 in which the formation of each concave portion 4 is completed is set in the data recording apparatus 1 described above, and the recording position 5 where the hydrocarbon gas G is blown onto the base material 10 in the vacuum vessel 21 and the recording mark 5 is to be formed. By irradiating P with an ion beam IB adjusted to the mark forming power, a recording mark 5 is formed on the surface of the substrate 10 or the bottom surface of the recess 4 as shown in FIG. Thereby, the mark formation process is completed, and the information recording medium 3A on which the recording data Dre is recorded in multiple values is completed in the same manner as the data recording method described above. Thus, according to the method of forming each recess 4 in the base material 10 by the combination of the imprint process and the etching process, the recess 4 is formed in the base material 10 by irradiating the ion beam IB adjusted to the recess forming power. Compared with the recessed part formation process to form, the several recessed part 4 can be formed in the base material 10 in a short time. Therefore, a large number of information recording media 3A can be manufactured in a short time. Further, for example, a desired pattern (for example, a planar pattern corresponding to each concave portion 4) is drawn on the resist layer 63 on the base material 10 by an electron beam lithography apparatus, and then subjected to a development process so as to be uneven on the base material 10. Compared with the method of forming the pattern 64, the concave / convex pattern 64 can be formed by simply pressing the stamper 61 (the concave / convex pattern 62) against the resist layer 63. Can be formed.

  In addition, the method of forming each recess 4 in the base material 10 prior to the formation of the recording mark 5 is not limited to the formation method by the imprint process and the etching process, but a plurality of recesses 4 are formed by injection molding, for example. A forming method for forming a base material, and a forming method for forming a base material in which a plurality of recesses 4 are formed by applying and curing various resin materials such as an ultraviolet curable resin on the concave / convex pattern 62 of the stamper 61. Can be adopted.

  Next, a data reproduction method and a data reproduction apparatus according to the present invention will be described with reference to the drawings.

  A data reproducing apparatus 2 shown in FIG. 11 is an apparatus that reproduces (reads) recorded data in accordance with the data reproducing method according to the present invention. As an example, the data reproducing apparatus 2 is connected to an external device such as a personal computer, and the recorded data Dre is The recording data Dre is reproduced (read) from the recorded information recording media 3 and 3A (the base material 10 on which the concave portions 4 and the recording marks 5 are formed) and can be output to an external device. The data reproducing apparatus 2 includes a substrate mounting table 51, a moving mechanism 52, a probe 53, electrodes 54 and 54, a measurement unit 55, an operation unit 56, a display unit 57, a control unit 58, and a storage unit 59.

  The substrate mounting table 51 is formed so that the information recording medium 3 can be mounted thereon. The moving mechanism 52 moves the probe 53 along the data recording surface of the information recording medium 3 on the substrate mounting table 51 under the control of the control unit 58. The moving mechanism 52 moves the probe 53 relative to the moving mechanism 52 due to the unevenness of the surface of the measuring object when the probe 53 is moved in contact with the measuring object (such as the information recording medium 3). The amount of up / down movement (contact / separation movement) is detected, and the detection result is output as an unevenness detection signal. The probe 53 is a contact-type contact probe, and its base end is fixed to the moving mechanism 52 and is electrically connected to the measuring unit 55 via a signal cable. In this data reproducing apparatus 2, as an example, a probe 53 that is made conductive by coating PtIr on the surface of a single crystal silicon probe having a radius of curvature of the tip of about 10 nm is used. In the data reproducing apparatus 2, the moving mechanism 52, the probe 53, and the control unit 58 together constitute a distance measuring unit in the present invention, and the unevenness of the base material 10 detected by the control unit 58 via the probe 53. Based on the above, the depth (distance) from the reference surface for each recording position P is measured. In this case, in this data reproducing apparatus 2, as an example, the following reproducing process is executed with the surface of the base material 10 (the portion where the concave portion 4 and the recording mark 5 are not formed) as the reference surface in the present invention.

  The electrode 54 is formed in a plate shape with a conductive material such as aluminum as an example, and is electrically connected to the measurement unit 55 via a signal cable. As shown in FIG. 12, the electrodes 54 are disposed so as to be electrically connected to opposite ends (predetermined portions in the present invention) of the base material 10 in the information recording media 3 and 3A. The measuring unit 55 corresponds to a current value measuring unit in the present invention, and applies a voltage of about 1.5 V between the probe 53 and the electrode 54 according to the control of the control unit 58, and between the probe 53 and the electrode 54. The conducting current value is measured, and measurement data Dmi about the measurement result is output to the control unit 58. The operation unit 56 includes a plurality of operation switches (not shown) for setting and operating the operation state of the data reproducing device 2. The display unit 57 displays information regarding the progress of the reproduction process, various error information, and the like. The control unit 58 comprehensively controls each unit of the data reproducing apparatus 2, and the unevenness (distance from the reference surface) of the base material 10 detected through the probe 53 and the information recording medium measured by the measurement unit 55. 3 is reproduced (read) from the information recording medium 3 based on the current values (measurement data Dmi, Dmi...) Measured for each part (each recording position P described above) 3. Execution of the data reproduction method). Further, the control unit 58 outputs the reproduced recording data Dre to the external device. The storage unit 59 detects the reproduction data Dre for reproducing the recording data Dre based on the current value measured by the measurement unit 55, the measurement data Dmi output from the measurement unit 55, and the probe 53. Measurement data Dml that can specify the unevenness (distance from the reference surface) of the substrate 10 is stored.

  When reproducing the recording data Dre by the data reproducing device 2, first, for example, the information recording medium 3 is set on the substrate mounting table 51 with the data recording surface facing upward, and electrodes 54, 54 is disposed. Next, when a predetermined operation button of the operation unit 56 is operated to start the reproduction of the recording data Dre, the control unit 58 controls the moving mechanism 52 to bring the probe 53 into contact with the surface of the substrate 10. To move the probe 53 along the surface. In addition, the control unit 58 detects irregularities on the surface of the substrate 10 via the probe 53 and controls the measurement unit 55 to start measuring the current value for each part on the substrate 10. At this time, the measurement unit 55 is in contact with the end of the base material 10 (the part where the electrode 54 is in contact: a predetermined part in the present invention) and the probe 53 on the base material 10 via the probe 53 and the electrode 54. Measure the current value that conducts between each part.

  In this case, the recording mark 5 is formed in the recording position Pa1 on the base material 10 without forming the concave portion 4 by the data recording apparatus 1 described above. Therefore, the electrical resistance value of the recording position Pa1 is smaller by an amount corresponding to the carbon constituting the recording mark 5 than the portion where the recording mark 5 is not formed. For this reason, the current value measured at the recording position Pa1 (the part where the recording mark 5 is formed) is larger than the current value measured when the probe 53 is in contact with the part where the recording mark 5 is not formed. growing. Further, since the information recording medium 3 is formed with the three types of recording marks 5a to 5c having different heights H1 to H3 at the respective recording positions P as described above, the height of the formed recording marks 5 is increased. Due to the difference in electrical resistance value according to the difference in H (thickness), the current value measured by the measurement unit 55 is different. Specifically, for example, when the recording mark 5a is formed, a current value of about 1 pA is measured, and when the recording mark 5b is formed, a current value of about 3 pA is measured and recorded. When the mark 5c is formed, a current value of about 8 pA is measured. When the recording mark 5 is not formed, a very small current value of about 0.2 pA is measured. Therefore, the measurement unit 55 generates measurement data Dmi representing the measurement result (current value) and outputs the measurement data Dmi to the control unit 58.

  Further, the control unit 58 determines the tip and the reference surface of the probe 53 in contact with the recording position Pa1 based on the unevenness of the base material 10 detected via the probe 53 (in this example, the portion where the recess 4 is not formed). And the calculation result is stored in the storage unit 59 as measurement data Dml. In this case, as an example, the control unit 58 determines the amount of movement of the probe 53 in the vertical direction with respect to the movement mechanism 52 (the direction in which the probe 53 contacts and separates from the base material 10) based on the unevenness detection signal output from the movement mechanism 52. The tip of the probe 53 and the reference plane are calculated based on the calculation result.

  Next, the control unit 58 controls the moving mechanism 23 to move the probe 53 while maintaining the state in which the probe 53 is in contact with the surface of the base material 10, thereby positioning the probe 53 at the recording position Pb <b> 1 on the base material 10. Subsequently, the control unit 58 calculates the distance between the tip portion of the probe 53 in contact with the recording position Pb1 and the reference surface based on the irregularities on the surface of the substrate 10 detected through the probe 53. Then, the measurement data Dml is stored in the storage unit 59 (distance measurement processing in the present invention), the measurement unit 55 is controlled to start measurement of the current value at the recording position Pb1, and the measurement data output from the measurement unit 55 Dmi is stored in the storage unit 59 (current value measurement processing in the present invention). In this way, each time the probe 53 is moved, the control unit 58 calculates the distance from the reference surface of the probe 53 at the recording position P and causes the measurement unit 55 to measure the current value. In addition, when the measurement process of the distance from the reference plane and the measurement process of the current value for each recording position P are completed, the control unit 58 performs the above-described process for each recording position P stored in the storage unit 59. The values recorded at the respective recording positions P of the information recording medium 3 are specified based on the measured data Dmi, Dml and the reference data for reproduction Drr.

  Specifically, when the control unit 58 determines that the distance from the reference surface is substantially zero based on the measurement data Dml (that is, the tip of the probe 53 brought into contact with the recording position P and the reference surface are When the concave portion 4 is not formed at the recording position P, it is determined. When the distance from the reference plane is in the range of 1 nm to 3 nm, it is determined that the concave portion 4a is formed at the recording position P. When the distance from the reference surface is in the range of 4 nm to 6 nm, the concave portion is formed at the recording position P. It is determined that 4b is formed, and if it is in the range of 11 nm to 13 nm (for example, 12 nm), it is determined that the concave portion 4c is formed at the recording position P. Further, based on the measurement data Dmi, the control unit 58 determines that the recording mark 5 is not formed at the recording position P when the current value is 0.2 pA or less, and when the current value is 1 pA ± 0.5 pA. It is determined that the recording mark 5a is formed at the recording position P. When the current value is 3 pA ± 1 pA, it is determined that the recording mark 5b is formed at the recording position P, and the current value is 8 pA ± 2 pA. In this case, it is determined that the recording mark 5c is formed at the recording position P. Next, the control unit 58 generates recording data Dre by decoding the identified result according to a predetermined algorithm, and outputs it to the external device. Thereby, a series of data reproduction processing by the data reproduction apparatus 2 is completed.

  As described above, according to the data reproducing method by the data reproducing apparatus 2, when the recording data Dre is reproduced from the information recording medium on which the recording data Dre is recorded according to any one of the data recording methods described above, A distance measurement process for measuring the distance from the reference surface is performed for each part of one surface, and a voltage is applied between each part of the one surface of the base material 10 and a predetermined part different from each part of the base material 10 However, the current value measurement process for measuring the current value that conducts between each part and the predetermined part is measured for each part, the distance measured for each part by the distance measurement process, and the current value measurement process By reproducing the recording data Dre based on the current value measured for each part, the presence / absence of the recess 4 and the distance from the reference surface for each recording position P and the presence / absence of the recording mark 5 are determined. Recording data Dre from the recording data Dre information is multi-valued recording recording medium 3,3A in combination with the fine current value can be read out reliably and accurately.

1 is a configuration diagram showing a configuration of a data recording device 1. FIG. FIG. 3 is a plan view of the information recording medium 3 in a state where a recess 4 and a recording mark 5 are formed. It is sectional drawing of the information recording medium 3 in the state in which the recessed parts 4a-4c were formed. It is sectional drawing of the information recording medium 3 in the state in which the recording marks 5a-5c were formed. 3 is a cross-sectional view of a stamper 61. FIG. It is sectional drawing of the base material 10 in the state in which the resist layer 63 was formed. FIG. 4 is a cross-sectional view of the base material 10 in a state in which the uneven pattern 62 of the stamper 61 is pressed against a resist layer 63. It is sectional drawing of the base material 10 of the state which peeled the stamper 61 from the resist layer 63 of the state shown in FIG. It is sectional drawing of the base material 10 of the state which etched using the uneven | corrugated pattern 64 shown in FIG. 8 as a mask. FIG. 10 is a cross-sectional view of an information recording medium 3A in which recording marks 5 are formed at each recording position P of the substrate 10 shown in FIG. 2 is a configuration diagram showing a configuration of a data reproduction device 2. FIG. It is another top view of the information recording media 3 and 3A in the state in which the recessed part 4 and the recording mark 5 were formed.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Data recording device 2 Data reproducing | regenerating apparatus 3,3A Information recording medium 10 Base material 4a-4c Recessed part 5a-5c Recording mark 13 Gas supply part 14 Ion beam irradiation part 17 Control part 53 Probe 54 Electrode 55 Measuring part 58 Control part Dre recording Data D1 to D3 Depth G Hydrocarbon gas H1 to H3 Height IB Ion beam Pa1, Pa2 ... Recording position

Claims (13)

A recess forming process for forming a recess at a first recording position defined in accordance with the data content of recording data to be recorded from among a plurality of recording positions on one surface of the substrate for information recording medium;
A recording mark forming gas is blown onto the one surface, and a recording beam is irradiated to a second recording position defined according to the data content from among the recording positions, and the recording beam is irradiated onto the recording beam. By depositing a recording material in a mark forming gas, a mark forming process is performed in which a recording mark having an electric resistance value different from that of the one surface is formed at the second recording position. A data recording method for recording the recording data on a material.   The data recording method according to claim 1, wherein the concave portion having the depth corresponding to the data content is formed for each of the first recording positions in the concave portion forming process.   The data recording method according to claim 2, wherein the plurality of types of concave portions having different depths are formed by adjusting an irradiation amount of the recording beam.   The concave portion is formed by irradiating the first recording position with the recording beam with a power exceeding a predetermined power in the concave portion forming process, and the recording beam with a power equal to or lower than the predetermined power in the mark forming processing. The data recording method according to claim 1, wherein the recording mark is formed by irradiating the second recording position.   5. The data recording method according to claim 1, wherein the recording mark having an electric resistance value corresponding to the data content is formed at each of the second recording positions.   6. The data recording method according to claim 5, wherein a plurality of types of the recording marks having different electric resistance values are formed by adjusting a dose of the recording beam and changing a thickness of the recording material.   7. The plurality of types of recording marks having different electrical resistance values are defined by defining any one of the plurality of types of recording mark forming gases having different types of recording materials. Data recording method. When reproducing the recording data from the information recording medium on which the recording data is recorded according to the data recording method according to claim 1,
While performing the distance measurement process which measures the distance from a reference plane about each site | part of the said one surface in the said base material for information recording media, each said site | part differs from each said site | part in the said base material for information recording media While applying a voltage between the predetermined part, a current value measurement process is performed to measure a current value that conducts between the respective part and the predetermined part for each part, and A data reproduction method for reproducing the recorded data based on a distance measured for each part and the current value measured for each part by the current value measurement process. A beam irradiating unit that irradiates a recording beam onto one surface of the information recording medium substrate, a gas spraying unit that sprays a recording mark forming gas onto the one surface, and a control unit that controls the beam irradiating unit and the gas spraying unit; With
The control unit controls the beam irradiating unit so that the first recording position defined in accordance with the data content of the recording data to be recorded out of a plurality of recording positions on the one surface with a power exceeding a predetermined power is used. A recess forming process for forming a recess at the first recording position by irradiating the recording beam, and controlling the gas spraying part to spray the recording mark forming gas on the one surface and the beam irradiating part. A recording material in the recording mark forming gas by controlling to irradiate the recording beam with a power equal to or lower than the predetermined power to a second recording position defined according to the data content from among the recording positions. The information recording medium is executed by executing a mark forming process for forming a recording mark having an electric resistance value different from that of the one surface at the second recording position. Data recording apparatus for recording the recording data on the use substrate. According to the data recording method according to any one of claims 1 to 7, the recording data is configured to be reproducible from an information recording medium in which the recording data is recorded on the information recording medium base material.
A distance measuring unit that measures a distance from a reference surface for each part of the one surface of the information recording medium substrate, and a predetermined part that is different from the parts and the parts of the information recording medium substrate A current value measuring unit that measures a current value that conducts between each part and the predetermined part while applying a voltage to each part, and a control unit that controls the distance measuring part and the current value measuring part And
The control unit controls the distance measurement unit to execute a distance measurement process for measuring the distance from the reference plane for each part, and controls the current value measurement unit for each part. A data reproducing apparatus that executes a current value measurement process for measuring the current value, and reproduces the recorded data based on the distance and the current value measured for each part.   A recess is formed at a first recording position defined corresponding to the data content of the recording data to be recorded from among a plurality of recording positions on one surface of the information recording medium base material, An information recording medium on which the recording data is recorded by forming a recording mark having an electric resistance value different from that of the one surface at a second recording position defined corresponding to the data content.   The information recording medium according to claim 11, wherein each of the recesses is formed with a depth corresponding to the data content.   13. The information recording medium according to claim 11, wherein each recording mark is formed to have an electric resistance value corresponding to the data content.

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