JP2007146224A - Drawing method, reading method, drawing device, reading device, and object - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a drawing method for easily drawing a sufficiently small picture on various objects to be drawn. <P>SOLUTION: This drawing method comprises the steps of; spraying a drawing gas on one side of the object to be drawn thereon (object: substrate 10); irradiating each of predetermined positions (positions Pb10 and Pc10 to be picture-drawn) on the one side corresponding to each of pixels composing a picture Ga (astral picture) to be drawn, with a drawing beam; and forming points (marks 4a) having electric resistivity different from that of the one side of the object to be drawn, at the predetermined positions to draw a picture Ga, by depositing a drawing material in the drawing gas on the irradiated region with the drawing beam. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  A drawing method and drawing apparatus for drawing a drawing by forming a plurality of points corresponding to each pixel constituting the drawing to be drawn on a drawing target, an object on which the drawing is drawn according to the drawing method, and the object The present invention relates to a reading method and a reading device for reading a drawing.

As this type of drawing method, Japanese Patent Application Laid-Open No. 2004-82493 discloses a drawing method for drawing a pattern (drawing) or the like in multiple colors by irradiating a drawing object such as a stainless steel plate with a laser beam. . In this drawing method, first, a stainless steel plate (hereinafter also referred to as “metal plate”) is immersed in a solution containing chromic acid and sulfuric acid. In this case, depending on the immersion time of the metal plate in the solution, first, an amber oxide film is formed on the surface of the metal plate, and then a blue oxide film is formed on the amber oxide film, followed by Then, a gold oxide film, a red oxide film, a green oxide film, and a super black oxide film are sequentially formed on each oxide film. Next, the desired oxide film is partially (dotted) removed from the metal plate by irradiating the metal plate (oxide film) with a laser beam according to the drawing to be drawn. The color point (concave portion) is formed. Specifically, for example, when forming a green spot on a metal plate, a laser beam is irradiated so that only the super black oxide film is removed from the metal plate. Further, when the red dots are formed on the metal plate, the laser beam is irradiated so that the super black oxide film and the green oxide film are removed from the metal plate. Thus, the drawing process on the metal plate is completed by forming any one of amber, blue, gold, red and green on the metal plate according to the drawing to be drawn.
JP 2004-82493 A (page 3-4, Fig. 1-4)

  However, the conventional drawing method has the following problems. That is, in the conventional drawing method, an oxide film having a different color is formed on a metal plate by being immersed in an oxidation treatment solution, and a desired color point is obtained by exposing the oxide film of a desired color. Form and draw a drawing. Therefore, the conventional drawing method has a problem that a drawing cannot be drawn on various objects (for example, a resin molded product, a glass product, etc.) where it is difficult to form an oxide film. When, for example, a drawing of 256 colors is to be drawn according to a conventional drawing method, it is necessary to form an oxide film of 256 layers having different colors on a metal plate. For this reason, in the conventional drawing method, when the number of colors constituting the drawing to be drawn is large (when drawing a multicolor drawing), the process of forming a large number of oxide films is very complicated. There is also a problem that there is. On the other hand, it is a common practice today to draw a manufacturer, a product logo, etc. on an electronic component, a mechanical component, or the like. In this case, with the rapid development of nanotechnology, with the miniaturization of electronic parts, mechanical parts, etc., the drawing object for which a manufacturer's logo should be drawn is very small. Even when the drawing target is sufficiently large, for example, there is a case where it is desired to draw a drawing sufficiently small to the extent that recognition with the naked eye is difficult. However, in the conventional drawing method, since the drawing is drawn by removing the portion irradiated with the laser beam from the metal plate, a point having a diameter smaller than the beam waist diameter of the laser beam cannot be formed. Therefore, since it is difficult to draw extremely small drawings with the conventional drawing method, it is difficult to draw logos and other drawings on various parts that are becoming finer, and sufficiently small drawings. There is also a problem that drawing is difficult.

  The present invention has been made in view of such a problem, and a drawing method and a drawing apparatus capable of easily drawing sufficiently small drawings on various drawing objects, and drawings drawn according to the drawing method are surely obtained. It is a main object of the present invention to provide a reading method and a reading apparatus that can be read by the user, and an object on which a drawing is drawn.

  In order to achieve the above object, a drawing method according to the present invention sprays a drawing gas onto one surface of a drawing object and applies a drawing beam to each predetermined position on the one surface corresponding to each pixel constituting the drawing to be drawn. By irradiating and depositing a drawing material in the drawing gas in an irradiation region of the drawing beam, a point having an electric resistance value different from that of the one surface of the drawing object is formed at the predetermined position. Draw a drawing.

  In the drawing method according to the present invention, the point of the electrical resistance value corresponding to the color information or gradation information for each pixel in the drawing to be drawn is formed for each predetermined position.

  In the reading method according to the present invention, when reading the drawing from the object on which the drawing is drawn according to the drawing method, each part on one surface of the object is different from each part on the object. While applying a voltage between the parts, the current value that conducts between the parts and the predetermined part is measured for each part, and based on the current value measured for each part, the one surface The drawing is read by specifying the point formation position.

  In the reading method according to the present invention, when reading the drawing from the object on which the drawing is drawn according to the drawing method, each part on one surface of the object is different from each part on the object. While applying a voltage between the parts, the current value that conducts between the parts and the predetermined part is measured for each part, and based on the current value measured for each part, the one surface The drawing position is read by specifying the formation position of the point and specifying the color information or the gradation information associated with the point based on the measured current value.

  In addition, the drawing apparatus according to the present invention includes a gas blowing unit that blows a drawing gas onto one surface of a drawing target, a beam irradiation unit that irradiates the drawing target with a drawing beam, the gas blowing unit, and the beam irradiation. A control unit for controlling the unit, the control unit controls the gas spraying unit to spray the drawing gas onto the one surface, and the one surface corresponding to each pixel constituting the drawing to be drawn By controlling the beam irradiation unit at each predetermined position to irradiate the drawing beam and depositing a drawing material in the drawing gas in an irradiation region of the drawing beam, the one surface of the drawing object Draws the drawing by forming points with different electrical resistance values at the predetermined positions.

  Further, in the drawing apparatus according to the present invention, the control unit controls the gas spraying unit and the beam irradiation unit, and the electric resistance corresponding to the color information or gradation information for each pixel in the drawing to be drawn The point of value is formed for each predetermined position.

  The reading device according to the present invention is configured to be able to read the drawing from the object on which the previous drawing is drawn according to the drawing method described above, and is different from each part on one surface of the object and each part on the object. A voltage applying unit that applies a voltage between predetermined parts; a current measuring part that measures a current value that conducts between each part and the predetermined part; and a control part that controls the voltage applying part and the current measuring part And the control unit controls the voltage application unit to apply the voltage and controls the current measurement unit to measure the current value, and based on the current value measured for each part Then, the drawing is read by specifying the formation position of each point on the one surface.

  The reading device according to the present invention is configured to be able to read the drawing from the object on which the previous drawing is drawn according to the drawing method described above, and is different from each part on one surface of the object and each part on the object. A voltage applying unit that applies a voltage between predetermined parts; a current measuring part that measures a current value that conducts between each part and the predetermined part; and a control part that controls the voltage applying part and the current measuring part And the control unit controls the voltage application unit to apply the voltage and controls the current measurement unit to measure the current value, and based on the current value measured for each part Then, the formation position of each point on the one surface is specified, and the color information or the gradation information associated with the point is specified based on the measured current value, and the drawing is read.

  Furthermore, the reading device according to the present invention includes a display unit that displays the drawing read from the object, and the control unit displays a point for drawing display corresponding to the specified formation position on the display unit. Display.

  In the object according to the present invention, the drawing is drawn on the one surface in accordance with the drawing method described above.

  According to the drawing method and the drawing device of the present invention, the drawing gas containing the drawing material is sprayed on one surface of the drawing object, and the drawing is performed at each predetermined position on the one surface corresponding to each pixel constituting the drawing to be drawn. By drawing the beam and depositing the drawing material in the drawing gas in the irradiation area of the drawing beam, a point where the electrical resistance value is different from that of one surface of the drawing object is formed at a predetermined position, and the drawing is drawn. Thus, it is possible to draw a drawing by directly forming points corresponding to each pixel on the surface of the drawing object without forming an oxide film for drawing the drawing on the surface of the drawing object. Therefore, it is possible to draw a desired drawing on various drawing objects in which formation of the oxide film itself is difficult. Further, by using a beam having a sufficiently small beam waist diameter as a drawing beam in the present invention, a sufficiently small drawing formed by a plurality of points having a sufficiently small size can be drawn reliably and easily. it can.

  Further, according to the drawing method and drawing apparatus of the present invention, drawing is performed by forming points of electrical resistance values corresponding to color information or gradation information for each pixel in a drawing to be drawn for each predetermined position. Unlike conventional drawing methods that require a large number of oxide films to be formed according to the number of colors used in the drawing to be drawn, a large number of points can be obtained simply by forming points of electrical resistance values defined in advance on the surface of the drawing object. Color drawings can be drawn reliably and easily.

  Further, according to the reading method and the reading apparatus according to the present invention, when reading a drawing from the object on which the drawing is drawn according to the drawing method described above, each part on one surface of the object is different from each part on the object. While applying a voltage between each part, the current value that conducts between each part and the predetermined part is measured for each part, and the formation position of the point on one surface is determined based on the current value measured for each part. By specifically reading the drawing, even if the drawing is drawn so that the size thereof is sufficiently small, the drawing drawn on the object can be read reliably and easily.

  Further, according to the reading method and the reading apparatus according to the present invention, when reading a drawing from the object on which the drawing is drawn according to the drawing method described above, each part on one surface of the object is different from each part on the object. While applying a voltage between each part, the current value that conducts between each part and the predetermined part is measured for each part, and the formation position of the point on one surface is determined based on the current value measured for each part. By specifying the color information or gradation information associated with the points based on the measured current value and reading the drawing, the multicolor drawing is drawn so that the size is sufficiently small Even so, the formation position and color information for each pixel constituting the drawing drawn on the object can be read reliably and easily.

  In addition, according to the reading device according to the present invention, the control unit causes the display unit to display a point for graphic display corresponding to the specified formation position, so that the reading result (the read graphic) by the control unit can be easily performed. Can be recognized.

  Furthermore, according to the object according to the present invention, by drawing a drawing on one side according to the above drawing method, a point corresponding to each pixel is formed without forming an oxide film for drawing drawing. Therefore, it is excellent in aesthetics, and it is possible to avoid a situation in which the drawing cannot be read due to peeling of the oxide film on which the drawing is drawn.

  DESCRIPTION OF THE PREFERRED EMBODIMENTS The best mode of a drawing method, a reading method, a drawing device, a reading device, and an object according to the present invention will be described below with reference to the accompanying drawings.

  First, a drawing method, a drawing apparatus, and an object according to the present invention will be described with reference to the drawings.

  A drawing apparatus 1 shown in FIG. 1 is an apparatus that draws various drawings according to a drawing method according to the present invention. As an example, the drawing apparatus 1 is connected to an external device such as a personal computer and outputs image data Dg output from the external device. The corresponding drawing can be drawn on the drawing object. In this case, the drawing apparatus 1 is configured to draw a drawing on various drawing objects formed of various materials such as a metal material, a resin material, glass, and ceramic. In order to facilitate understanding of the above, as an example, an example will be described below in which a drawing is drawn using a substrate 10 formed of silicon in a flat plate shape as a drawing target. On the other hand, the drawing apparatus 1 includes a drawing processing unit 11, an exhaust pump 12, a gas supply unit 13, an ion beam irradiation unit 14, an operation unit 15, a display unit 16, a control unit 17, and a storage unit 18. The drawing processing unit 11 includes a vacuum container 21, a mounting table 22, and a moving mechanism 23. The vacuum container 21 is configured to be capable of accommodating the mounting table 22, the moving mechanism 23, and the drawing target body (in this example, the base material 10), and the drawing target is obtained by exhausting the air in the internal space by the exhaust pump 12. Maintain a vacuum around the body. The mounting table 22 is formed so that a drawing object such as the substrate 10 can be mounted. The moving mechanism 23 moves the drawing object on the mounting table 22 by moving the mounting table 22 along the mounting surface (the upper surface in the figure) according to the control of the control unit 17. The exhaust pump 12 exhausts the air in the vacuum vessel 21 according to the control of the control unit 17.

  The gas supply unit 13 corresponds to a gas blowing unit in the present invention, and includes a gas source storage unit 31, a heater 32, an exhaust pump 33, and a nozzle 34. The gas source accommodating unit 31 accommodates a gas generating material (for example, an organic metal material such as hexacarbonyl tungsten or an aromatic hydrocarbon such as phenanthrene) for generating the drawing gas in the present invention. The heater 32 generates a drawing gas in the gas source housing 31 by heating and evaporating or sublimating the gas generating material through the gas source housing 31 under the control of the controller 17. In this case, when hexacarbonyl tungsten or phenanthrene is used as a gas generating material, a hydrocarbon gas G is generated as a drawing gas. In this specification, an example is described in which phenanthrene is used to generate hydrocarbon gas G as a drawing gas. The exhaust pump 33 feeds the hydrocarbon gas G generated in the gas source housing 31 to the nozzle 34 via the pipe 34a. The nozzle 34 blows the hydrocarbon gas G, which is disposed in the vacuum vessel 21 and is supplied by the exhaust pump 33, toward the base material 10 on the mounting table 22.

  The ion beam irradiation unit 14 corresponds to the beam irradiation unit in the present invention, and includes an ion source 41, a blanking control unit 42, focusing lenses 43 and 45, an astigmatism correction electrode unit 44, and a deflection electrode unit 46. According to the control, the ion beam IB can be irradiated toward the drawing object (base material 10) on the mounting table 22. Specifically, the ion source (ion generator) 41 is configured so that the tip of the emitter and the extraction electrode (not shown) are supplied in a state where liquid metal (gallium as an example) is supplied to the tip of the metal emitter (not shown). ) To generate an ion (gallium ion in this example) at the tip of the emitter and accelerate the ion toward the extraction electrode, thereby causing the ion beam IB ( An example of a drawing beam in the present invention is output. Instead of gallium, various liquid metals such as gold, gold cluster, and bismuth can be used. The blanking control unit 42 performs blanking control (on / off control) for the ion beam IB output from the ion source 41 in accordance with the control of the control unit 17. The focusing lenses (beam shaping lenses) 43 and 45 shape (thinn diameter) the ion beam IB. The astigmatism correction electrode unit 44 shapes the ion beam IB so that the beam spot shape is a perfect circle. The deflection electrode unit 46 deflects the ion beam IB formed by the focusing lens 45 according to the control of the control unit 17 and changes the irradiation position on the drawing object (base material 10).

  The operation unit 15 includes a plurality of operation switches (not shown) for setting and operating the operation state of the drawing apparatus 1. The display unit 16 displays information related to the progress of the drawing process, various types of error information, and the like. The control unit 17 controls the respective parts of the drawing apparatus 1 in a comprehensive manner, and thereby, according to the drawing method according to the present invention, a plurality of marks 4a to 4c (FIG. 4) corresponding to the data content of the image data Dg output from the external device. 2) is formed on the surface of the drawing object (on the substrate 10). In this case, the image data Dg is composed of data in which the color information or gradation information of each pixel constituting the graphic to be drawn, the size to draw the graphic, and the like are recorded. The storage unit 18 stores drawing procedure data Dp in which a drawing procedure for drawing processing is drawn.

  In the drawing apparatus 1, as shown in FIG. 2, one of the three types of marks 4a to 4c having different heights (thicknesses) according to the data content of the image data Dg (hereinafter referred to as “ Drawings Ga and Gb (see FIGS. 3 and 4) are drawn by forming the mark 4 ”at each formation position P, P... Specifically, when the drawing apparatus 1 draws a graphic Ga (see FIG. 3) or the like based on the image data Dg for a monochrome image, the drawing apparatus 1 marks, for example, each formation position P specified based on the image data Dg. Only 4a is formed. Further, when drawing a graphic Gb (see FIG. 4) or the like based on the image data Dg for a color image, any one of the marks 4a to 4c is placed at each formation position P specified based on the image data Dg. Form. In this case, as shown in FIG. 2, the mark 4a is formed, for example, so that the height H1 is in the range of 1 nm to 3 nm (for example, 2 nm). For example, the mark 4b is formed so that the height H2 is within a range of 4 nm to 6 nm (for example, 5 nm). Further, as an example, the mark 4c is formed so that the height H3 is within a range of 11 nm to 13 nm (for example, 12 nm). Thereby, each mark 4a-4c is formed in the state from which an electrical resistance value differs mutually from the difference in the height (thickness).

Further, in the drawing apparatus 1, the marks 4 are formed on the base material 10 at a plurality of formation positions P defined in a grid shape, for example, 8 × 10 ¹⁰ locations / square inch according to the data content of the image data Dg. Then, the drawings Ga, Gb and the like are drawn on the substrate 10. In this case, if the adjacent marks 4, 4 on the base material 10 are separated too much, a small-size drawing is drawn because the number of marks 4 that can be formed in the unit area on the base material 10 is reduced. It becomes difficult to do. Therefore, in order to draw a sufficiently small drawing, it is preferable that the adjacent marks 4 and 4 on the substrate 10 be as close as possible. Specifically, when the diameter L1 of the mark 4 is set to 100 nm, as an example, the distance between the centers of the adjacent formation positions P and P is set to 200 nm or less (200% or less with respect to the diameter L1 of the mark 4). Is preferred. On the other hand, when the adjacent marks 4, 4 are formed too close to each other on the substrate 10 and the adjacent marks 4, 4 are overlapped, each mark 4 is individually identified when reading the drawing from the substrate 10. It becomes difficult. Therefore, in order to avoid the situation where the adjacent marks 4, 4 are formed on the base material 10 so as to overlap each other, the distance between the centers of the adjacent formation positions P, P is set to be sufficiently larger than the diameter L 1 of the mark 4. There is a need to. Specifically, when the diameter L1 of the mark 4 is 100 nm, as an example, the distance between the centers of the adjacent formation positions P and P is defined to be 110 nm or more (110% or more with respect to the diameter L1 of the mark 4). Is preferred. In this example, the distance between the centers of the adjacent formation positions P and P is set to 150 nm.

  Next, a drawing method for drawing a monochrome image on the substrate 10 by the drawing apparatus 1 (monochrome drawing drawing method) will be described with reference to the drawings.

  In drawing processing by the drawing apparatus 1, as shown in FIG. 1, first, the base material 10 is set on the mounting table 22 with the surface on which the drawing is to be drawn facing upward. Next, the control unit 17 controls the exhaust pump 12 to exhaust the air in the vacuum vessel 21 and also controls the heater 32 to heat the phenanthrene in the gas source storage unit 31 to thereby heat the gas source storage unit 31. To generate hydrocarbon gas G. Subsequently, the control unit 17 controls the exhaust pump 33 to supply the hydrocarbon gas G from the gas source housing unit 31 to the nozzle 34 via the pipe 34a, and based on the image data Dg output from the external device, The moving mechanism 23 is controlled to move the mounting table 22 so that, for example, the formation position Pb10 (see FIG. 3) on the base material 10 is positioned below the ion beam irradiation unit 14. Next, the control unit 17 controls the ion beam irradiation unit 14 based on the image data Dg and the drawing procedure data Dp stored in the storage unit 18 to irradiate a predetermined position on the substrate 10 with the ion beam IB. Let

  In this case, as shown in FIG. 3, as an example, when the “star picture (drawing)” is drawn by a plurality of points based on the image data Dg, the control unit 17 sets the “star” to the position where the star is to be drawn. In order to form the mark 4a at the corresponding formation position P, first, for example, the ion beam IB is irradiated toward the formation position Pb10 on the substrate 10. At this time, secondary electrons are generated from the base material 10 by the ion beam IB irradiated toward the formation position Pb10, and the hydrocarbon gas G sprayed from the nozzle 34 toward the base material 10 becomes secondary electrons. The gas component and the solid component (carbon) are separated by the influence. Further, the separated gas component is exhausted to the outside of the vacuum vessel 21 by the exhaust pump 12, and carbon that is a solid component is deposited on the substrate 10 (formation position Pb10). As a result, as shown in the figure, a mark 4a, which is a carbon deposit, is formed at the formation position Pb10 (formation process of the mark 4 by the vapor phase growth method). At this time, the blanking control unit 42 changes the amount of carbon deposited on the substrate 10 by adjusting the irradiation time for irradiating the ion beam IB toward the substrate 10 according to the control of the control unit 17. Any one of the recording marks 4a to 4c having different heights H1 to H3 (in this example, the mark 4a) is formed at the formation position Pb10 (mark formation processing in the present invention).

  Next, the control unit 17 controls the deflection electrode unit 46 of the ion beam irradiation unit 14 to irradiate the ion beam IB in a state where the irradiation destination of the ion beam IB is changed to the formation position Pc10 on the substrate 10. At this time, the hydrocarbon gas G is separated into a gas component and a solid component by the ion beam IB irradiated toward the formation position Pc10, and carbon which is a solid component is deposited on the substrate 10. Thereby, the mark 4a which is a carbon deposit is formed in the formation position Pc10. Next, the control unit 17 also irradiates the ion beam IB at the formation position Pd10 and the like in the same manner as the mark formation process for the formation positions Pb10 and Pc10. At this time, when the mark 4a is formed at the formation position P out of the deflectable range of the ion beam IB by the deflection electrode unit 46, the control unit 17 controls the moving mechanism 23 so that the formation position P is the ion beam. The mounting table 22 is moved so as to be positioned below the irradiation unit 14. Thereby, a plurality of marks 4a (points) are formed at each formation position P on the base material 10, and drawing of the drawing Ga (star picture) in a single color is completed. FIG. 4 and FIG. 4 show an example in which a drawing of 19 dots horizontally and 19 dots vertically (drawing 361 pixels) is drawn in order to facilitate understanding of the drawing method according to the present invention. Actually, based on the image data Dg for the drawing to be drawn, for example, when drawing a drawing (300,000 pixels) of 640 dots wide and 480 dots high, a formation position P of 640 places in the horizontal direction. And 480 formation positions P are defined in the vertical direction, and the mark 4a is formed at the formation position P specified based on the image data Dg.

  Next, a drawing method for drawing a color image on the base material 10 by the drawing device 1 (a drawing method for drawing in multiple colors) will be described with reference to the drawings. Note that the description of the same procedure as the monochrome image drawing method is omitted. In the following description, as an example, it is assumed that the mark 4a is associated with black, the mark 4b is associated with white, and the mark 4c is associated with blue.

  First, the control unit 17 corresponds to each pixel constituting the graphic Gb based on the drawing procedure data Dp stored in the storage unit 18 and the image data Dg for the graphic Gb to be drawn (see FIG. 4). Which of the marks 4a to 4c is to be formed at each formation position P is specified. Next, the control unit 17 controls the gas supply unit 13 to supply the hydrocarbon gas G and also controls the moving mechanism 23 so that, for example, the formation position Pa1 (see FIG. 4) on the substrate 10 is an ion beam irradiation unit. 14 to move the mounting table 22 so as to be positioned below 14. Subsequently, the control unit 17 controls the ion beam irradiation unit 14 based on the specified information to irradiate each formation position P on the substrate 10 with a predetermined amount of the ion beam IB. In this case, as shown in FIG. 4, as an example, when the “star picture (drawing)” is drawn by a plurality of points based on the image data Dg, the control unit 17 sets each of “star” and “background”. A mark 4 associated with the color designated by the image data Dg is formed on the part. Specifically, the control unit 17 first controls the ion beam irradiation unit 14 to irradiate the ion beam IB toward the formation position Pa1 constituting a part of the background. At this time, the blanking control unit 42 adjusts the irradiation time for irradiating the ion beam IB toward the substrate 10 in accordance with the control of the control unit 17 (adjustment of the irradiation amount of the drawing beam). The amount of carbon to be deposited on is adjusted to form a mark 4b having a height H2 at the formation position Pa1 (mark formation process in the present invention).

  Next, the control unit 17 controls the deflection electrode unit 46 of the ion beam irradiation unit 14 to irradiate the ion beam IB in a state where the irradiation destination of the ion beam IB is changed to the formation position Pa2 on the base material 10, A mark 4b is formed at the formation position Pa2. Subsequently, the control unit 17 also forms the mark 4b by irradiating the formation positions Pa3 to Pa19 and the formation positions Pb1 to Pb9 with the ion beam IB similarly to the mark formation process for the formation positions Pa1 and Pa2. At this time, when the mark 4b is formed at the formation position P outside the range in which the ion beam IB can be deflected by the deflection electrode unit 46, the control unit 17 controls the moving mechanism 23 so that the formation position P is the ion beam. The mounting table 22 is moved so as to be positioned below the irradiation unit 14. Next, the control unit 17 controls the deflection electrode unit 46 of the ion beam irradiation unit 14 to irradiate the ion beam IB in a state where the irradiation destination of the ion beam IB is changed to the formation position Pb10 on the base material 10, A mark 4a having a height H1 is formed at the formation position Pb10. Subsequently, the control unit 17 similarly executes mark formation processing for the formation positions Pb11 to Po9, and forms one of the marks 4a and 4b according to the image data Dg. Next, the control unit 17 controls the deflection electrode unit 46 of the ion beam irradiation unit 14 to irradiate the ion beam IB in a state where the irradiation destination of the ion beam IB is changed to the formation position Po10 on the base material 10, A mark 4c having a height H3 is formed at the formation position Po10. Thereafter, the control unit 17 similarly executes the mark formation process for the formation positions Po11 to Pr19, and forms any one of the marks 4a to 4c according to the image data Dg. As a result, a plurality of marks 4a to 4c (points) are formed at each formation position P on the base material 10, and the drawing of “star picture” in multiple colors is completed.

  As described above, according to the drawing method by the drawing apparatus 1, the hydrocarbon gas G is sprayed on one surface of the drawing object (in this example, the base material 10) and the drawing Ga (monochromatic “star picture”) to be drawn. ) The ion beam IB is irradiated to each predetermined position on one surface corresponding to each pixel constituting the pixel), and the drawing material (carbon in this example) in the hydrocarbon gas G is deposited in the irradiation region of the ion beam IB. A drawing (drawing) is drawn on the surface of the drawing object (in this example, the base material 10) by forming a drawing (mark 4a) at a predetermined position where the electrical resistance value is different from that of one surface of the object. Without forming an oxide film, a point (mark 4) corresponding to each pixel can be directly formed on the surface of the drawing object to draw a drawing. Therefore, it is possible to draw a desired drawing on various drawing objects in which formation of the oxide film itself is difficult. Further, by using a beam having a sufficiently small beam waist diameter (in this example, the ion beam IB) as a drawing beam in the present invention, a sufficiently small image formed by a plurality of sufficiently small points. Can be reliably and easily drawn.

  Further, according to the drawing method by the drawing apparatus 1, the points (marks 4a to 4c) of the electrical resistance value corresponding to the color information for each pixel in the drawing Gb (multicolored "star picture") to be drawn are obtained. Unlike a conventional drawing method in which a large number of oxide films need to be formed according to the number of colors used for a drawing to be drawn by forming each predetermined position, a drawing object (in this example, a base material 10). ), It is possible to draw a multicolor drawing reliably and easily only by forming a point having a predetermined electrical resistance value on the surface.

  Further, according to the object (base material 10) on which the drawing is drawn according to the drawing method described above, the drawing is drawn on one side according to the drawing method, so that each pixel is formed without forming an oxide film for drawing drawing. Since the corresponding point (mark 4) is formed and the drawing is drawn, it is excellent in aesthetics, and avoids a situation where the drawing cannot be read due to peeling of the oxide film on which the drawing is drawn. Can do.

  The present invention is not limited to the configuration and method described above. For example, the drawing object in the present invention is not limited to a plate body such as the base material 10, and includes various objects such as tapes or films, and various parts such as pipes, wires, pins, and gears. It is. In the drawing apparatus 1 described above, the mark 10 is formed by irradiating the base material 10 with the ion beam IB during the drawing process of the drawing. Instead of the ion beam IB, various charged particle beams such as an electron beam are used. It is also possible to adopt a configuration in which the mark 4 is formed by depositing a drawing material on the surface of the drawing object (base material 10 or the like) by irradiation. In the drawing apparatus 1, the blanking control unit 42 adjusts the irradiation time of the ion beam IB to change the irradiation amount with respect to each formation position P to form marks 4 a to 4 c having desired heights (thicknesses). Although the configuration is adopted, marks 4a to 4c having a desired height (thickness) are formed by changing the irradiation amount of the ion beam IB by adjusting the power of the ion beam IB output from the ion beam irradiation unit 14. It is also possible to adopt a configuration that does this.

  Further, the number of types of the marks 4 is not limited to three, and a configuration in which two or more types of various marks 4 are formed and a graphic is recorded in multiple colors or gray scales may be employed. In this case, when drawing a gray scale drawing, the thickness (electric resistance value) of the mark 4 formed at each formation position P is defined based on the gradation information for each pixel specified by the image data Dg. That's fine. Further, the method of changing the electric resistance value of the mark 4 formed at each formation position P is not limited to the above drawing method of changing the height (thickness) of carbon deposited on the base material 10. For example, two or more kinds of drawing gases having different electric resistance values of solid components separated by irradiation of the ion beam IB can be sprayed toward the base material 10 to be formed at each forming position P. By irradiating a drawing beam while spraying a desired drawing gas on the substrate 10 so that the resistance mark 4 is formed, various marks 4 made of solid components having different electric resistance values are applied to the substrate 10. It is also possible to adopt the method of forming above.

  Next, a reading method and a reading apparatus according to the present invention will be described with reference to the drawings.

  The reading device 2 shown in FIG. 5 is a device that reads drawings from various objects according to the reading method according to the present invention. As an example, the reading device 2 is connected to an external device such as a personal computer and the object (mark 4 is drawn). A graphic image read from the formed base material 10 or the like) is displayed, and image data Dg in which the read result is recorded can be output to an external device. The reading device 2 includes a mounting table 51, a moving mechanism 52, a probe 53, electrodes 54 and 54, a measurement unit 55, an operation unit 56, a display unit 57, a control unit 58, and a storage unit 59. The mounting table 51 is formed so that an object (base material 10) on which a drawing is drawn can be mounted. The moving mechanism 52 moves the probe 53 along the surface of the substrate 10 on the mounting table 51 according to the control of the control unit 58. The probe 53 is a contact-type contact probe, and its base end is fixed to the moving mechanism 52 and is electrically connected to the measuring unit 55 via a signal cable. As an example, the reading device 2 uses a probe 53 that is made conductive by coating PtIr on the surface of a single crystal silicon probe having a curvature radius of about 10 nm at the tip.

  The electrode 54 is formed in a plate shape with a conductive material such as aluminum as an example, and is electrically connected to the measurement unit 55 via a signal cable. As shown in FIG. 6, the electrodes 54 are disposed so as to be electrically connected to opposite ends (predetermined portions in the present invention) of the base material 10, for example. If the object on which the drawing is drawn is extremely small, various shapes of electrodes 54 that can be electrically connected to the object can be used. The measuring unit 55 corresponds to a current value measuring unit in the present invention, and applies a voltage of about 1.5 V between the probe 53 and the electrode 54 according to the control of the control unit 58, and between the probe 53 and the electrode 54. The conducting current value is measured, and measurement data Dm regarding the measurement result is output to the control unit 58. The operation unit 56 includes a plurality of operation switches (not shown) for setting and operating the operation state of the reading device 2.

  The display unit 57 displays information related to the progress of the reproduction process, various types of error information, and the like, and a display screen representing a graphic read from the base material 10 based on the image data Dg output from the control unit 58. 61a and 61b (see FIGS. 7 and 8) are displayed. The control unit 58 comprehensively controls each part of the reading device 2 and also measures current values (each measurement) measured for each part (each formation position P described above) on the substrate 10 measured by the measurement unit 55. The drawing is read from the base material 10 by specifying which part of the base material 10 the mark 4 is formed based on the data Dm) and which of the marks 4a to 4c is the mark 4 (book) Execution of the reading method according to the invention). In addition, the control unit 58 generates image data Dg for the graphic read from the base material 10 and outputs the image data Dg to the display unit 57 and the external device. The storage unit 59 stores reference data Dr for reading a drawing from the base material 10 based on the current value measured by the measurement unit 55, measurement data Dm output from the measurement unit 55, and the like.

  Next, a method for reading a monochrome image by the reading device 2 (a method for reading a monochrome image) will be described with reference to the drawings.

  When reading the drawing by the reading device 2, first, as shown in FIG. 6, the base 10 is set on the mounting table 51 with the surface on which the drawing Ga is drawn facing upward, and both ends of the base 10 are set. Electrodes 54 and 54 are disposed on the surface. Next, when a predetermined operation button of the operation unit 56 is operated to instruct to start reading a drawing, the control unit 58 controls the moving mechanism 52 to, for example, the formation position Pa1 on the surface of the substrate 10 (see FIG. 3). In addition, the probe 53 is brought into contact, and the measurement unit 55 is controlled to start measurement of the current value for each part on the substrate 10. Next, the control unit 58 controls the moving mechanism 52 to maintain the state in which the probe 53 is in contact with the surface of the base material 10 while maintaining the probe 53 in the direction of the arrow B toward the formation position Pa19 (see FIG. 3). Move. At this time, the measurement unit 55 generates measurement data Dm representing measurement results (current values) measured at the respective positions from the formation position Pa1 to the formation position Pa19 and outputs the measurement data Dm to the control unit 58. The output measurement data Dm is stored in the storage unit 59. In this case, as shown in FIG. 3, since the mark 4a does not exist between the formation position Pa1 and the formation position Pa19 on the substrate 10, the measurement is performed while the probe 53 moves from the formation position Pa1 to the formation position Pa19. The current value measured by the unit 55 is a very small value (as an example, about 0.2 pA) according to the electric resistance value of the substrate 10.

  Next, the control unit 58 controls the moving mechanism 52 to bring the probe 53 into contact with the formation position Pb1 on the surface of the base material 10 and maintain the state in which the probe 53 is in contact with the surface of the base material 10 while maintaining the formation position. The probe 53 is moved in the direction of arrow B toward Pb19. In this case, between the formation position Pb1 and the formation position Pb19 on the base material 10, the mark 4a is formed at the formation position Pb10 by the drawing device 1 described above. Accordingly, the electrical resistance value of the formation position Pb10 is smaller by the amount of carbon constituting the mark 4a than in the portion where the mark 4a is not formed. For this reason, the formation position Pb10 (the mark 4a is formed) than the current value measured in a state where the probe 53 is in contact with the part where the mark 4a is not formed (for example, the formation positions Pb1 to Pb9, Pb11 to Pb19). The current value measured when the probe 53 is in contact with the portion) is large (for example, about 1 pA ± 0.5 pA).

  Subsequently, the control unit 58 controls the moving mechanism 52 to bring the probe 53 into contact with the formation position Pc1 on the surface of the base material 10 while maintaining the state in which the probe 53 is in contact with the surface of the base material 10. The probe 53 is moved in the direction of arrow B toward the position Pc19. In this case, between the formation position Pc1 and the formation position Pc19 on the base material 10, the mark 4a is formed at the formation position Pc10 by the drawing apparatus 1 described above. Therefore, when the probe 53 is moved from the formation position Pc1 toward the formation position Pc19, the current value measured when the probe 53 comes into contact with the formation position Pc10 is larger than the current value measured at other sites. Large value. Thereafter, the control unit 58 similarly measures the current value from the formation position Pd1 to the formation position Pd19, and when the measurement of the current value up to the formation position Pr19 is completed, the measurement process is terminated and the mark 4a The formation position specifying process is executed.

  Specifically, the control unit 58 specifies in which part on the base material 10 the mark 4 a is formed based on each measurement data Dm and reference data Dr stored in the storage unit 59. At this time, as described above, a larger current value is measured at the site where the mark 4a is formed compared to the site where the mark 4a is not formed (the surface of the substrate 10). Therefore, the control unit 58 specifies the formation position on the assumption that the mark 4a (point) is formed at a portion where a large current value is measured among the respective portions on the base material 10. Specifically, based on the measurement data Dm, the control unit 58 determines that the mark 4a is not formed at the formation position P when the current value is 0.2 pA or less, and the current value is 1 pA ± 0.5 pA. In the above case, it is determined that the mark 4a is formed at the formation position P. Next, the control unit 58 represents, as an example, a part corresponding to the formation position of each mark 4a (part where a large current value is measured) in black based on the identified formation position, and a part where the mark 4a is not formed. Image data Dg of an image representing (a portion where a small current value is measured) in white is generated, and the generated image data Dg is output to the display unit 57. Thereby, as shown in FIG. 7, a display screen 61a in which “stars” are drawn at a plurality of black points 64a (an example of “points for drawing display” in the present invention) corresponding to each mark 4a is displayed on the display unit. 57. On the other hand, the control unit 58 outputs the image data Dg (monochromatic image data of “star picture”) to the external device in parallel with the process of displaying the display screen 61 a on the display unit 57. Thereby, a “star picture (drawing)” is displayed on the display unit of the external device (not shown). Thus, a series of data reading processing by the reading device 2 is completed.

  Next, a method for reading a color image by the reading device 2 (a method for reading a multicolor drawing) will be described with reference to the drawings. Note that the description of the same procedure as the above-described monochrome image reading method is omitted.

  First, the base material 10 is set on the mounting table 51 with the surface on which the graphic Gb is drawn facing upward, and electrodes 54 and 54 are disposed on both ends of the base material 10. Next, when a predetermined operation button of the operation unit 56 is operated to instruct the start of drawing reading, the control unit 58 controls the moving mechanism 52 to, for example, the formation position Pa1 on the surface of the substrate 10 (see FIG. 4). In addition, the probe 53 is brought into contact, and the measurement unit 55 is controlled to start measurement of the current value for each part on the substrate 10. Next, the control unit 58 controls the moving mechanism 52 to maintain the state in which the probe 53 is in contact with the surface of the base material 10 while maintaining the probe 53 in the direction of the arrow B toward the formation position Pa19 (see FIG. 4). Move. In this case, as shown in FIG. 4, since 19 marks 4b are formed between the formation position Pa1 and the formation position Pa19 on the substrate 10, the probe 53 is formed from the formation position Pa1 to the formation position Pa19. During the movement, the current value measured by the measurement unit 55 at each formation position P is a value larger than the electrical resistance value of the substrate 10 (as an example, about 3 pA ± 1 pA).

  Next, the control unit 58 controls the moving mechanism 52 to bring the probe 53 into contact with the formation position Pb1 on the surface of the base material 10 and maintain the state in which the probe 53 is in contact with the surface of the base material 10 while maintaining the formation position. The probe 53 is moved in the direction of arrow B toward Pb19. In this case, between the formation position Pb1 and the formation position Pb19 on the base material 10, the mark 4b is formed at the formation positions Pb1 to Pb9 and Pb11 to Pb19 by the drawing device 1 described above, and the mark 4a is formed at the formation position Pb10. Is formed. Therefore, in the formation positions Pb1 to Pb19, the electrical resistance value is smaller by the amount of carbon constituting the mark 4b than in the part where the mark 4 is not formed. Therefore, when the probe 53 is in contact with the formation positions Pb1 to Pb9 and Pb11 to Pb19, a current value of about 3 pA ± 1 pA is measured, and at the formation position Pb11, a current value of about 1 pA ± 0.5 pA is measured. Subsequently, the control unit 58 similarly measures the current value from the formation position Pc1 to the formation position Pc19, and when the measurement of the current value up to the formation position Pr19 is completed, the measurement process is terminated and the mark 4 The formation position specifying process is executed. In this case, the mark 4c is formed at the formation position Po10 and the like by the drawing apparatus 1 described above. Therefore, a current value of 8 pA ± 2 pA is measured in a state where the probe 53 is in contact with the formation position Po10 or the like.

  On the other hand, the controller 58 determines in which part on the base material 10 the mark 4 is formed based on each measurement data Dm stored in the storage unit 59 during the formation position specifying process. -4c is specified. At this time, as described above, since the three types of marks 4a to 4c having different heights H1 to H3 are formed on the base material 10, the height of the mark 4 formed at each formation position P is determined. The current values measured at the respective formation positions P are different depending on the difference in thickness (thickness). Specifically, for example, when the mark 4a is formed, a current value of about 1 pA is measured, and when the mark 4b is formed, a current value of about 3 pA is measured, and the mark 4c is If formed, a current value of about 8 pA is measured. Further, a very small current value of about 0.2 pA is measured between the adjacent formation positions P and P (part where the mark 4 is not formed). Therefore, the control unit 58 forms the mark 4a when the current value is 1 pA ± 0.5 pA based on the measurement data Dm and the reference data Dr for each formation position P stored in the storage unit 59. When the current value is 3 pA ± 1 pA, it is specified that the mark 4b is formed, and when the current value is 8 pA ± 2 pA, it is specified that the mark 4c is formed.

  Next, the control unit 58 represents the portion corresponding to the formation position of each mark 4a in black based on the information on the formation position of the specified mark 4 and the information on which of the marks 4a to 4c is formed, Image data Dg of an image in which a portion corresponding to the formation position of each mark 4b is represented in white and a portion corresponding to the formation position of each mark 4a is represented in blue is generated, and the generated image data Dg is displayed on the display unit 57. Output. As a result, as shown in FIG. 8, "stars" are drawn at a plurality of black points 64a corresponding to each mark 4a (an example of "points for drawing display" in the present invention), and also corresponding to each mark 4b. A display screen 61b on which a "background" is drawn with a plurality of white points 64b and a plurality of blue points 64c corresponding to the respective marks 4c (another example of "points for drawing display" in the present invention) is displayed on the display unit 57. On the other hand, in parallel with the process of displaying the display screen 61b on the display unit 57, the control unit 58 outputs the image data Dg (multicolored image data of “star picture”) to the external device. Thereby, a “star picture (drawing)” is displayed on the display unit of the external device (not shown). Thus, a series of data reading processing by the reading device 2 is completed.

  As described above, according to the reading method by the reading device 2, when the drawing Ga is read from the object (in this example, the base material 10) on which the monochrome drawing Ga is drawn by the drawing device 1 described above, While applying a voltage between each part in and the predetermined part different from each part in the object, the current value that conducts between each part and the predetermined part is measured for each part. Even if the drawing is drawn so that the size is sufficiently small by reading the drawing Ga by identifying the formation position of the point (mark 4a) on one surface based on the measured current value, the drawing is performed on the object The drawn drawings can be read reliably and easily.

  Further, according to the reading method by the reading device 2, when the drawing Gb is read from the object (in this example, the base material 10) on which the multicolor drawing Gb is drawn by the drawing device 1 described above, While applying a voltage between each part in and the predetermined part different from each part in the object, the current value that conducts between each part and the predetermined part is measured for each part. By identifying the formation position of the points (marks 4a to 4c) on one surface based on the measured current value and identifying the color information associated with each point based on the measured current value, and reading the drawing Gb, Even if a multicolor drawing is drawn so that its size is sufficiently small, the formation position and color information for each pixel constituting the drawing drawn on the object can be read reliably and easily.

  Further, according to the reading device 2, the control unit 58 causes the display unit 57 to display the point 64 for graphic display corresponding to the formation position specified based on the measured current value. The result (the read drawing) can be easily recognized.

  The present invention is not limited to the configuration and method described above. For example, the point 64a corresponding to the mark 4a is displayed in black, the point 64b corresponding to the mark 4b is displayed in white, and the point 64c corresponding to the mark 4c is displayed in blue. If the drawing drawn in gray is a gray scale, the drawing may be displayed at the point of gradation associated with each of the marks 4a to 4c (the point for drawing display with a single color and different gradation).

1 is a configuration diagram showing a configuration of a drawing apparatus 1. FIG. It is sectional drawing of the base material 10 in which the marks 4a-4c were formed. It is a top view of the base material 10 by which drawing Ga was drawn by formation of the mark 4a with respect to each formation position P. FIG. It is a top view of the base material 10 by which the drawing Gb was drawn by formation of the marks 4a-4c with respect to each formation position P. 2 is a configuration diagram illustrating a configuration of a reading device 2. FIG. It is another top view of the base material 10 by which drawing Ga (Gb) was drawn by formation of the mark 4a. FIG. 4 is a display screen diagram in a state in which a display screen 61a representing a reading result of the graphic Ga shown in FIG. FIG. 6 is a display screen diagram in a state in which a display screen 61b representing a reading result for the graphic Gb shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Drawing apparatus 2 Reading apparatus 4a, 4b, 4c Mark 10 Base material 11 Drawing process part 12 Exhaust pump 13 Gas supply part 14 Ion beam irradiation part 17 Control part 53 Probe 54 Electrode 55 Measuring part 57 Display part 58 Control part 61a, 61b Display screen 64a to 64c Point G Hydrocarbon gas IB Ion beam P1 to P13, P21 to P24, Pa1 to Pr19 Formation position

Claims (10)

  The drawing gas is blown onto one surface of the drawing object, and the drawing beam is irradiated to each predetermined position on the one surface corresponding to each pixel constituting the drawing to be drawn, and the drawing beam is irradiated onto the drawing beam irradiation region. A drawing method for drawing the drawing by depositing a drawing material in gas to form a point having an electric resistance value different from that of the one surface of the drawing object at the predetermined position.   The drawing method according to claim 1, wherein the point of the electrical resistance value corresponding to the color information or gradation information for each pixel in the drawing to be drawn is formed for each predetermined position. When reading the drawing from the object on which the drawing is drawn according to the drawing method according to claim 1,
While applying a voltage between each part on one surface of the object and a predetermined part different from each part in the object, a current value that conducts between the part and the predetermined part is set to each part. A reading method in which the image is read by measuring each point and specifying the formation position of the point on the one surface based on the current value measured for each part. When reading the drawing from the object on which the drawing is drawn according to the drawing method according to claim 2,
While applying a voltage between each part on one surface of the object and a predetermined part different from each part in the object, a current value that conducts between the part and the predetermined part is set to each part. And measuring the color information or the floor associated with the point based on the measured current value while specifying the formation position of the point on the one surface based on the current value measured for each part. A reading method for specifying the key information and reading the drawing. A gas blowing unit that blows a drawing gas onto one surface of the drawing target, a beam irradiation unit that irradiates the drawing target with a drawing beam, and a control unit that controls the gas blowing unit and the beam irradiation unit.
The control unit controls the gas blowing unit to spray the drawing gas onto the one surface and controls the beam irradiation unit to each predetermined position on the one surface corresponding to each pixel constituting the drawing to be drawn. Then, by irradiating the drawing beam and depositing the drawing material in the drawing gas in the irradiation region of the drawing beam, the electrical resistance value is different from the one surface of the drawing object. A drawing apparatus that draws the drawing by forming it at a predetermined position.   The control unit controls the gas blowing unit and the beam irradiation unit to set the point of the electrical resistance value corresponding to the color information or gradation information for each pixel in the drawing to be drawn for each predetermined position. 6. The drawing apparatus according to claim 5, wherein the drawing apparatus is formed. The drawing is configured to be readable from an object on which the previous drawing is drawn according to the drawing method according to claim 1,
A voltage applying unit for applying a voltage between each part on one surface of the object and a predetermined part different from the part on the object; and a current for measuring a current value that conducts between the part and the predetermined part A measurement unit, and a control unit that controls the voltage application unit and the current measurement unit,
The control unit controls the voltage application unit to apply the voltage and controls the current measurement unit to measure the current value, and based on the current value measured for each part, the one surface A reading device that reads the drawing by specifying the formation position of each point. The drawing is configured to be readable from an object on which the previous drawing is drawn according to the drawing method according to claim 2,
A voltage applying unit for applying a voltage between each part on one surface of the object and a predetermined part different from the part on the object; and a current for measuring a current value that conducts between the part and the predetermined part A measurement unit, and a control unit that controls the voltage application unit and the current measurement unit,
The control unit controls the voltage application unit to apply the voltage and controls the current measurement unit to measure the current value, and based on the current value measured for each part, the one surface A reading device that identifies the formation position of each point and identifies the color information or the gradation information associated with the point based on the measured current value and reads the drawing. A display unit for displaying the drawing read from the object;
The reading device according to claim 7, wherein the control unit causes the display unit to display a point for displaying a graphic corresponding to the identified formation position.   An object in which the drawing is drawn on the one surface according to the drawing method according to claim 1.

Images