JP2007138764A - Micropump - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a novel micropump capable of efficiently delivering fluid. <P>SOLUTION: Two cover parts 2, 4 are lapped on both surfaces of a film part 3 having film-shaped electromagnets 34, two flow paths are provided between the two cover parts 2, 4 and separated from each other by the film part 3 and these members are held by block members at opposite ends in a direction vertical to a direction in which the flow paths extend. The three electromagnets 34 are disposed on the film part 3 along the flow paths and electromagnets 24, 44 are also provided at corresponding positions of the respective cover parts 2, 4. Portions of each electromagnet 34 on the film part 3 are bent toward a cover part 2 side or a cover part 4 side by magnetic force and two flow path elements contained in the two flow paths are alternately blocked. The central electromagnet 34 blocks one of the flow path elements to compress liquid and synchronously with this motion, the other electromagnets 34 alternately block the two flow paths on an upstream side and a downstream side of the central flow path element, so that the liquid is efficiently delivered. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a micropump that delivers a minute amount of fluid.

  2. Description of the Related Art Conventionally, various structures are known as small-sized pumps (micro pumps) that deliver a minute amount of fluid. For example, in Patent Document 1, the expansion and compression of the diaphragm chamber between the frame body and the diaphragm are repeated by the magnetic action generated between the magnet provided in the frame body and the coil provided in the diaphragm, A small-sized diaphragm pump that performs the delivery is disclosed. In Patent Document 2, a plurality of solenoids arranged along the flow path on the outside of the flow path correspond to each of a pair of flexible members that form inner surfaces facing each other of the flow path. A pump is disclosed in which fluid is delivered by peristaltic movement of an inner surface of a flow path by sequentially pressing a portion toward the flow path.

In Patent Document 3, two substrates facing each other provided with a piezoelectric element, an electrostrictive vibrator, or a magnetostrictive vibrator are vibrated so that their displacement directions are opposite to each other, thereby providing them between these boards. There has been proposed a micropump for delivering fluid by repeatedly expanding and compressing the back pressure chamber. In Patent Document 4, a substrate on which an elastic film that forms one inner surface of a flow path and an array magnetic coil element that generates a magnetic field along the flow path on the opposite side of the flow path of the elastic film is formed. The magnetic fluid filled between the elastic film and the substrate is gathered by the array magnetic coil element, the elastic film is bent toward the flow path side, and the gathered magnetic fluid is moved along the flow path. A micropump that moves fluid in a flow path is disclosed.
JP 2004-60641 A JP 2004-316445 A JP 2004-353638 A JP-A-9-287571

  By the way, in the methods of the above-mentioned patent documents 1 to 3, one-time delivery of fluid in the pump is substantially achieved by expansion and compression of a part of the flow path or the diaphragm chamber or the back pressure chamber (that is, the reciprocating motion of the movable part). However, in such a pump, if an attempt is made to reduce the pulsation (pressure fluctuation) by using a very small amount of fluid delivered by one reciprocation of the movable part, the liquid feeding efficiency is lowered. In recent years, there has been a demand for a micropump that can efficiently deliver fluid even in such a case.

  The present invention has been made in view of the above problems, and an object thereof is to provide a novel micropump capable of efficiently delivering a fluid.

  The invention according to claim 1 is a micro pump, in which two cover parts are overlapped on both surfaces of the film part, so that two minute parts separated from each other by the film part between the two cover parts. A flow path element is provided, and a compression section that alternately compresses the two flow path elements, and two flow paths that are connected to one end side of the two flow path elements and that respectively include the two flow path elements An introduction valve portion that is closed at the same time, a derivation valve portion that is connected to the other end side of the two flow path elements and alternately closes the two flow paths, the compression portion, the introduction valve portion, and the derivation valve portion A control unit that controls the film, the film unit includes an electromagnet that generates magnetic poles on both sides, and each of the two cover units generates a magnet or magnetic pole that has a magnetic pole on the surface facing the film unit. The electromagnet, or the film portion includes a magnet having magnetic poles on both surfaces, and each of the two cover portions includes an electromagnet in which a magnetic pole is generated on a surface facing the film portion, and the introduction valve In a state where the part opens one flow path and closes the other flow path, and the outlet valve part closes the one flow path and opens the other flow path, The fluid is introduced into the compression section by expanding the flow path element of one flow path, the introduction valve section closes the one flow path and opens the other flow path, and the derivation In a state where the valve portion opens the one flow path and closes the other flow path, the compression section compresses the flow path element of the one flow path, thereby the fluid from the compression section. Is derived.

  Invention of Claim 2 is a micropump of Claim 1, Comprising: Each of the said film part and the said two cover parts is equipped with an electromagnet.

  Invention of Claim 3 is a micropump of Claim 1 or 2, Comprising: The said film part is equipped with an electromagnet, The said electromagnet is formed using a photolithographic technique on a film-form base material. And a film-like or plate-like magnetic body provided inside the coil.

  A fourth aspect of the present invention is the micropump according to any one of the first to third aspects, wherein each of the two cover portions is in the form of a film.

  Invention of Claim 5 is a micropump of Claim 4, Comprising: The bending amount restriction | limiting part which restrict | limits the bending amount to the opposite side to the said film part of each of these two cover parts so that change is possible Is further provided.

  The invention according to claim 6 is the micropump according to any one of claims 1 to 5, wherein each of the film portion or the two cover portions includes an electromagnet, and the electromagnet is A plurality of electromagnet elements are arranged along two flow path elements, and partial expansion and compression of the flow path elements in the compression section are sequentially performed by the plurality of electromagnet elements.

  The invention according to claim 7 is the micropump according to claim 4 or 5, wherein each of the introduction valve part and the lead-out valve part is the same as the combination of the film part and the two cover parts. A combination of the base of the film part of the compression part, the base of the film part of the introduction valve part, and the base of the film part of the lead-out valve part, and the compression part The base material of each of the two cover parts, the base material of the cover part corresponding to the introduction valve part, and the base material of the cover part corresponding to the lead-out valve part are integral members, and the introduction valve The two flow paths are formed by the continuous flow path elements of the compression section, the corresponding flow path elements of the compression section, and the corresponding flow path elements of the outlet valve section.

  The invention according to claim 8 is the micropump according to claim 7, wherein the suction force generated between the film part and the cover part when the flow path element is closed or compressed is applied to the film part and the film part. The value divided by the contact area with the cover part is the highest in the introduction valve part among the introduction valve part, the compression part, and the lead-out valve part, and the lowest in the lead-out valve part.

  The invention according to claim 9 is the micropump according to claim 7 or 8, wherein a contact area between the film portion and the cover portion when the flow path element is compressed in the compression portion is the introduction valve. The contact area between the film part and the cover part when the flow path element is closed in each of the part and the outlet valve part is larger.

  A tenth aspect of the present invention is the micropump according to any one of the first to ninth aspects, wherein the introduction valve portion, the compression portion, and the discharge valve portion are arranged in a non-linear manner.

  The invention according to claim 11 is the micropump according to any one of claims 1 to 10, having the same structure as the introduction valve portion, and the compression at a position different from the introduction valve portion. Another introduction valve part connected to the part or another lead-out valve part having the same structure as the lead-out valve part and connected to the compression part at a position different from the lead-out valve part Further prepare.

  A twelfth aspect of the present invention is the micropump according to any one of the first to eleventh aspects, wherein two different fluids are respectively introduced into the two flow paths.

  A thirteenth aspect of the present invention is the micropump according to any one of the first to twelfth aspects, wherein the control unit controls the derivation valve unit instead of the derivation valve unit in the introduction valve unit. The control is performed on the lead-out valve portion instead of the lead-in valve portion so that the fluid is sent from the lead-out valve portion side to the lead-in valve portion side.

  The invention according to claim 14 is a micropump, wherein two cover portions are overlapped on both sides in a stacking direction of the plurality of film portions to be stacked, whereby the plurality of films are interposed between the two cover portions. A plurality of flow path elements separated from each other by a portion, and a second flow path element other than the first flow path element group and a first flow path element group that exists every other one of the plurality of flow path elements A compression unit that alternately compresses the group, and a first unit that includes the first channel element group among a plurality of channels that are connected to one end side of the plurality of channel elements and respectively include the plurality of channel elements. An introduction valve portion for alternately closing a flow path group and a second flow path group including the second flow path element group; and connected to the other end side of the plurality of flow path elements; A lead-out valve portion for alternately closing the second flow path group, the compression portion, and the introduction Each of the plurality of film portions is provided with an electromagnet generating magnetic poles on both sides, and each of the two cover portions is opposed to the plurality of film portions. A magnet having a magnetic pole on the surface to be operated or an electromagnet in which a magnetic pole is generated, and the introduction valve portion opens one of the first flow path group and the second flow path group and opens the other flow path. The compression unit is configured to block the flow path element group of the one flow path group in a state where the discharge valve section closes the one flow path group and opens the other flow path group. By expanding, the fluid is introduced into the compression section, the introduction valve section closes the one flow path group to open the other flow path group, and the outlet valve section opens the one flow path. A state in which the other passage group is closed by opening the passage group , The derivation of the fluid from the compression unit is carried out by the compressing unit compresses the flow channel element group of one flow path group said.

  According to the first to thirteenth aspects, the fluid can be efficiently delivered through the two flow path elements.

  In the invention of claim 2, the flow path element can be freely compressed and expanded, and in the invention of claim 3, a lightweight electromagnet can be easily produced.

  In the invention of claim 5, it is possible to prevent the cover portion from being excessively bent and damaged, and in the invention of claim 6, the liquid can be fed with low pulsation.

  In the invention of claim 7, the micropump can be thinned, and in the invention of claim 8, the fluid can be reliably delivered from the introduction valve portion side to the discharge valve portion side.

  According to the ninth aspect of the invention, the amount of fluid to be delivered can be increased by the operation of one cycle of the micropump. In the tenth aspect of the invention, the fluid can be delivered in a desired direction.

  Further, in the invention of claim 11, the fluid can be delivered while being mixed, or the fluid can be delivered to a desired derivation valve portion side of the two derivation valve portions. Two fluids can be delivered simultaneously, and according to the invention of claim 13, the fluid can be easily delivered in the opposite direction.

  In the invention of claim 14, the fluid can be efficiently delivered through three or more flow path elements.

  FIG. 1 is a plan view showing a micropump 1 according to a first embodiment of the present invention, and FIG. 2 is a longitudinal sectional view of the micropump 1 at a position indicated by an arrow II-II in FIG. The micropump 1 is for sending a liquid in a microfeeding amount into a microreactor that is a microcontainer for processing a very small amount of sample liquid. FIG. 1 shows a state in which a lid member 52 (see FIG. 2) described later is removed (however, the lid member 52 is virtually illustrated by a two-dot chain line).

  As shown in FIG. 2, the micropump 1 includes a film-like film part 3, and two film-like cover parts 2 and 4 are stacked on both surfaces of the film part 3. In FIG. 2, illustration of parallel oblique lines in the cross section of the film portion 3 and the two cover portions 2 and 4 is omitted. The film part 3 and the two cover parts 2 and 4 are block members 51 that are long in the Y direction from both sides in the stacking direction (Z direction in FIG. 2) at both ends in the X direction in FIG. ) Is held between. The film part 3 and the two cover parts 2 and 4 have the same size in the X direction and the Y direction. In the following description, the (−Z) side cover portion 2 in FIG. 2 is also referred to as the lower cover portion 2, and the (+ Z) side cover portion 4 is also referred to as the upper cover portion 4. Details of the structure of the film part 3 and the two cover parts 2 and 4 will be described later.

  Two plate-shaped lid members 52 are provided on the (−Z) side of the lower cover portion 2 and the (+ Z) side of the upper cover portion 4, respectively. Each lid member 52 has a protruding portion 521 that protrudes toward the cover portions 2 and 4 between two block members 51 arranged in the X direction, and the surface of the protruding portion 521 on the cover portions 2 and 4 side, The width of the gap between the surfaces of the cover portions 2 and 4 facing the protruding portion 521 (the width indicated by the arrow G1 in FIG. 2 and hereinafter referred to as “gap width”) is approximately constant. . The lid member 52 is provided with a gap width adjusting mechanism 522 such as a screw, and the gap width is variable by the gap width adjusting mechanism 522. The protruding portion 521 is formed in a range substantially overlapping with electromagnets 44A, 44B, and 44C (see FIG. 1), which will be described later, and the end on the (+ Y) side and the end on the (−Y) side of the lid member 52. Is not formed.

  3 is a longitudinal sectional view of the end of the micropump 1 at the position of arrows III-III in FIG. 1, and the upper side of FIG. 1 corresponds to the right side of FIG. 3, the illustration of the lid member 52 is omitted, and the illustration of the parallel oblique lines in the cross section of the film portion 3 and the two cover portions 2 and 4 is omitted. As shown in FIG. 3, the (+ Y) side ends of the two cover portions 2 and 4 are separated from the film portion 3 in the Z direction by two holding members 531 and 532 of the cover holding portion 53. The (+ Y) side end of the film part 3 is sandwiched between the two cover holding parts 53 by the two holding members 541 and 542 of the film holding part 54. Two holding members 531 on the film holding portion 54 side of the two cover holding portions 53 extend toward the (+ Y) side, and the liquid inside the micropump 1 is transferred to the outside (microreactor) by the two holding members 531. And a part of the discharge outlet. In the micropump 1, the (−Y) side end also has the same structure as in FIG. 3, and an inflow port is formed through which liquid flows from the outside into the micropump 1. The inlet is connected to an external tank that stores liquid.

  FIG. 4 is a perspective view showing the configuration of the film part 3. As shown in FIG. 4, the film part 3 has a film-like base material 31 having insulating properties, and three film-like magnetic bodies 32 are arranged on the base material 31 along the Y direction in FIG. 4. They are formed in substantially the same size by spraying iron powder toward the base material 31. In addition, the magnetic body 32 may be plate-shaped when formed by other methods. Each magnetic body 32 has a substantially rectangular shape, and a coil 33 is formed of copper or the like around it. The coil 33 forms a fine photoresist pattern by using a photolithography technique, and further, a cross section of the conducting wire is formed in a fine shape by performing sputtering or plating. Thus, the base material 31 is provided with three film-like electromagnets 34 each having the magnetic body 32 provided inside the coil 33 and the coil 33 on the main surface along the Y direction. The film part 3 further has a film-like protective material 35 having insulating properties, and the three electromagnets 34 on the base material 31 are covered by the protective material 35 being bonded to the base material 31. As the base material 31 and the protective material 35, a polyimide resin or the like having excellent electrical insulation and chemical resistance is used. In the film portion 3, a light electromagnet 34 is easily formed by using a photolithography technique, although the number of turns of the coil 33 is relatively large, but the magnetic body 32 is also formed by a similar method. Also good.

  FIG. 5 is a perspective view showing the configuration of the film part 3 and the two cover parts 2 and 4. As shown in FIG. 5, each of the two cover portions 2 and 4 is actually structured similarly to the film portion 3. That is, similarly to the film part 3, the lower cover part 2 includes a base material 21, three electromagnets 24 each having a magnetic body and a coil and formed on the base material 21, and a protective material 25. Similarly to the film part 3, the upper cover part 4 also includes a base material 41, three electromagnets 44 each having a magnetic body and a coil and formed on the base material 41, and a protective material 45. With respect to the X direction and the Y direction, the (−Y) side electromagnets 24 and 44 of the two cover portions 2 and 4 and the (−Y) side electromagnet 34 of the film portion 3 are arranged at the same position, and the two cover portions. The electromagnets 24 and 44 at the center of 2 and 4 and the electromagnet 34 at the center of the film part 3 are arranged at the same position, and the electromagnets 24 and 44 on the (+ Y) side of the two cover parts 2 and 4 and the ( The + Y) electromagnet 34 is arranged at the same position. In the state where the film part 3 and the two cover parts 2 and 4 are overlapped, the lead wire of the coil 33 (see FIG. 4) of the film part 3 is drawn to the opposite side to the two cover parts 2 and 4. .

  The coils of the electromagnets 24, 34, 44 of the film unit 3 and the two cover units 2, 4 are connected to the current supply unit 101 of the control unit 10 in FIG. 1, and a direct current is supplied from the current supply unit 101 to the coil. As a result, the magnetic material is magnetized. Thereby, in each of the film part 3 and the two cover parts 2 and 4, a magnetic pole arises on both surfaces of the position of each electromagnet 24,34,44 (or it can be considered that a magnetic pole arises). In the micropump 1, the direction of magnetization of the magnetic material of each electromagnet 24, 34, 44 is controlled by the direction of the direct current supplied from the current supply unit 101 to the coil. A minute space is formed between the corresponding electromagnets 24 and 44 of the cover part 2 or the upper cover part 4 as necessary.

  FIG. A and FIG. B is a figure for demonstrating a mode that space is formed between the film part 3 and the cover parts 2 and 4, and the film part 3 and the cover parts 2 and 4 in the position of a certain electromagnet 24,34,44 are shown. The cross section of is shown. In addition, FIG. A and FIG. In B, the electromagnets 24, 34, 44 and their wirings are indicated by thick lines.

  For example, the direction of magnetization of the electromagnet 44 of the upper cover 4 and the electromagnet 34 of the film 3 (ie, the vertical arrangement of the N pole and the S pole) is the same, and the lower cover 2 When only the electromagnet 24 has the opposite magnetization direction, FIG. As shown in A, the portion of the electromagnet 44 of the upper cover portion 4 and the portion of the electromagnet 34 of the film portion 3 are bent in the (+ Z) direction, and the portion of the electromagnet 24 of the lower cover portion 2 is bent in the (−Z) direction. As a result, a minute space is formed between the film portion 3 and the lower cover portion 2. In the case where the magnetization directions of the electromagnet 24 of the lower cover portion 2 and the electromagnet 34 of the film portion 3 are the same, and only the magnetization direction of the electromagnet 44 of the upper cover portion 4 is opposite, FIG. B, the portion of the electromagnet 44 of the upper cover portion 4 bends in the (+ Z) direction, and the portion of the electromagnet 34 of the film portion 3 and the portion of the electromagnet 24 of the lower cover portion 2 bends in the (−Z) direction. As a result, a minute space is formed between the film portion 3 and the upper cover portion 4.

  FIG. A and FIG. In any case of B, each of the lower cover portion 2 and the upper cover portion 4 abuts against the protruding portion 521 of the lid member 52 and the amount of bending is limited. A gap width G1 (see FIG. 2), which is an interval between each projecting portion 521 and the facing cover portions 2 and 4, is adjusted in advance by the gap width adjusting mechanism 522, and the cover portions 2 and 4 are excessively bent. Damage is prevented. Thus, in the micropump 1, the two lid members 52 serve as bending amount limiting portions that limit the amount of bending of the two cover portions 2 and 4 to the opposite sides of the film portions 3 in a changeable manner. Yes.

  In the micropump 1, since the magnetization directions of the electromagnets 24, 34, 44 can be individually changed in the film unit 3 and the two cover units 2, 4, the (−Y) side, the center, and ( + Y) At the position of the set of three electromagnets on the (Y) side (three electromagnets 24, 34, 44 arranged in the Z direction in FIG. 5), between the film part 3 and the lower cover part 2, or A minute space can be formed between the film part 3 and the upper cover part 4. In other words, in the micropump 1, between the two cover portions 2, 4 at the positions of the (−Y) side electromagnet group, the central electromagnet group and the (+ Y) side electromagnet group, respectively. Two minute flow path elements separated from each other by the film part 3 are provided, and the control of the control part 10 makes it possible to close one while opening one of the two flow path elements. Yes. Actually, between the film part 3 and the lower cover part 2, the (−Y) side flow path element, the central flow path element and the (+ Y) side flow path element are connected to each other to form one flow. A channel (hereinafter referred to as “lower channel”), and three channel elements between the film portion 3 and the upper cover portion 4 are also connected to each other to form one channel (hereinafter referred to as “upper channel”). .)

  As will be described later, in the film part 3 and the two cover parts 2 and 4, the part including the assembly of the electromagnets 24, 34 and 44 on the (−Y) side introduces liquid into the central flow path element. Hereinafter, the part including the set of the electromagnets 24, 34, 44 on the (−Y) side is collectively referred to as an introduction valve portion, and the part including the set of the electromagnets 24, 34, 44 on the (+ Y) side is from the central flow path element. In the following, the portion including the set of the (+ Y) electromagnets 24, 34, 44 is collectively referred to as the lead-out valve portion, and the portion including the set of the central electromagnets 24, 34, 44 is the center. In order to perform an operation of compressing the liquid introduced into the flow path element (that is, compressing the liquid by closing the flow path element), a portion including a set of central electromagnets 24, 34, and 44 is hereinafter referred to as a compression unit. Collectively. In the following description, the operation of the compression unit closing the flow path element is called compression, and the operation of opening the flow path element is called expansion.

  Next, the flow of the operation in which the micropump 1 delivers the liquid will be described. FIG. 7 is a diagram illustrating a flow of an operation in which the micropump 1 delivers a liquid. In the micropump 1, the operations for the lower flow path and the upper flow path are performed in parallel, and steps S11 to S13 in FIG. 7 are performed for one of the lower flow path and the upper flow path. 7 is a process performed in steps S21 to S23 in FIG. 7 on the other flow path in parallel with steps S11 to S13.

  FIG. A thru | or FIG. G is a figure for demonstrating a mode that the micropump 1 sends out a liquid. FIG. A thru | or FIG. In G, the electromagnet is abstractly shown as a rectangle, and the magnetization direction of the electromagnet is indicated by attaching “N” and “S” inside. FIG. A thru | or FIG. In G, reference symbol A is assigned to the introduction valve portion, reference symbol B is assigned to the compression portion, reference symbol C is assigned to the lead-out valve portion, the electromagnet of the lower cover portion 2 of the introduction valve portion A, the electromagnet of the film portion 3 and the upper cover portion 4. The electromagnets are denoted by reference numerals 24A, 34A and 44A, respectively, the electromagnets of the lower cover part 2 of the compression part B, the electromagnets of the film part 3 and the electromagnets of the upper cover part 4 are denoted by reference numerals 24B, 34B and 44B, respectively. Reference numerals 24C, 34C, and 44C are attached to the electromagnet of the lower cover portion 2 of the valve portion C, the electromagnet of the film portion 3, and the electromagnet of the upper cover portion 4, respectively.

  First, FIG. In the state shown in A, the direction of magnetization of the electromagnets 24A and 34A is the same in the introduction valve portion A, the direction of magnetization of only the electromagnet 44A is opposite, and the direction of magnetization of the electromagnets 24B and 34B is the same in the compression portion B. Thus, only the electromagnet 44B has the opposite magnetization direction, and in the lead-out valve portion C, the magnetization directions of the electromagnets 34C and 44C are the same, and only the electromagnet 24C has the opposite magnetization direction. Therefore, the introduction valve section A closes the flow path element of the lower flow path 61 (that is, the portion sandwiched between the two electromagnets 24A and 34A) to open the flow path element 62A of the upper flow path 62, and the compression section. B closes (or compresses) the flow path element of the lower flow path 61 (that is, the portion sandwiched between the two electromagnets 24B and 34B) and opens (or expands) the flow path element 62B of the upper flow path 62. And the outlet valve portion C opens the flow path element 61C of the lower flow path 61 and closes the flow path element of the upper flow path 62 (that is, the portion sandwiched between the two electromagnets 34C and 44C). It has become. Actually, the entire lower flow path 61 and upper flow path 62 except for the blocking portion are filled with liquid. In the state of A, only a part of the liquid existing on the upstream side ((−Y) side in FIG. 8.A) from the outlet valve portion C is shown in FIG. A thru | or FIG. In G, parallel diagonal lines are given.

  In the micropump 1, FIG. In the state shown in A, the magnetization direction of the electromagnet 34A of the film portion 3 of the introduction valve portion A is reversed, and the magnetization directions of the other electromagnets are as shown in FIG. The state of A is maintained. As a result, FIG. As shown in FIG. B, the introduction valve section A opens the flow path element 61A of the lower flow path 61 and the flow path element 62A of the upper flow path 62 (the reference numerals for the closed flow path elements are omitted in FIG. 8B). (The same applies hereinafter) (steps S11 and S21), the liquid flows into the flow path element 61A in the lower flow path 61, and the liquid in the flow path element 62B is separated in the upper flow path 62. The

  When the inflow of the liquid into the flow path element 61A and the separation of the liquid in the flow path element 62B are completed, the magnetization direction of the electromagnet 34C of the film part 3 of the outlet valve part C is reversed, and the magnetization direction of the other electromagnets FIG. The state of B is maintained. As a result, FIG. As shown in C, the flow path element 61C (see FIG. 8.B) of the lower flow path 61 is closed by the lead-out valve portion C, and the flow path element 62C of the upper flow path 62 is opened (steps S12, S22). ).

  Then, in the state where the introduction valve part A opens the lower flow path 61 and closes the upper flow path 62, and the outlet valve part C closes the lower flow path 61 and opens the upper flow path 62, The direction of magnetization of the electromagnet 34B of the compression section B is reversed. As a result, FIG. As shown in D, the compression section B expands the flow path element 61B of the lower flow path 61 to introduce (or fill) the liquid from the flow path element 61A side to the compression section B, and the upper flow The flow path element 62B (see FIG. 8.C) of the path 62 is compressed, and liquid is led out from the compression section B to the flow path element 62C (steps S13 and S23).

  Here, for example, the length L1 in the Y direction of the magnetic body of the electromagnet 44B of the compression section B in FIG. 1 is 10 mm, and the width W1 in the X direction of the gap between the two block members 51 is 15 mm. 2 is 50 μm, the volume of the flow path element 61B when expanded is about 15 microliters (μL) ((10 [mm] × 15 [mm] × 0.05 [mm ] × 2).)) When the compression section B expands the flow path element 61B, 15 microliters of liquid is introduced into the flow path element 61B of the compression section B. In this case, the width W2 in the X direction of the main body of the micropump 1 in FIG. 1 (that is, the portion excluding the control unit 10) is 35 mm, and the film part 3 and the two cover parts 2 and 4 in FIG. The thickness H1 is set to 300 μm.

  When the introduction of the liquid in the lower flow path 61 into the compression section B and the derivation of the liquid in the upper flow path 62 from the compression section B are completed, FIG. D. When the direction of magnetization of the electromagnet 34A of the introduction valve portion A is reversed from the state shown in FIG. As shown in E, the introduction valve section A closes the flow path element 61A (see FIG. 8.D) of the lower flow path 61 and opens the flow path element 62A of the upper flow path 62 (steps S21 and S11). In the lower flow path 61, the liquid in the flow path element 61B is separated, and in the upper flow path 62, the liquid flows into the flow path element 62A. Subsequently, when the direction of magnetization of the electromagnet 34C of the lead-out valve portion C is reversed, FIG. As shown in F, the flow path element 61C of the lower flow path 61 is opened by the lead-out valve section C, and the flow path element 62C (see FIG. 8E) of the upper flow path 62 is closed (steps S22 and S12). ).

  Then, in the state where the introduction valve part A closes the lower flow path 61 and opens the upper flow path 62, and the outlet valve part C opens the lower flow path 61 and closes the upper flow path 62, The direction of magnetization of the electromagnet 34B of the compression section B is reversed, and FIG. As shown in G, the compression section B compresses the flow path element 61B (see FIG. 8.F) of the lower flow path 61, and the liquid is led out from the compression section B to the flow path element 61C, and the upper side The flow path element 62B of the flow path 62 is expanded, and the liquid is introduced from the flow path element 62A side to the compression section B (steps S23 and S13). With the above operation, FIG. G in FIG. 8 in each of the upper flow path 62 and the lower flow path 61 as shown with cross hatching. An amount of liquid corresponding to the volume of the flow path elements 61B and 62B is sent from the state A to the downstream side from the outlet valve portion C, and one cycle in the micropump 1 is completed.

  Here, in the micropump 1, when the lower flow path 61 or the upper flow path 62 is closed or compressed in each of the introduction valve section A, the compression section B, and the outlet valve section C, the lower cover section 2 or the upper cover The magnetic force per unit area (adhesion force) generated by the action of the electromagnet at the site where the part 4 and the film part 3 are in contact with each other so as to satisfy the relationship of (introducing valve part A> compressing part B> leading valve part C). In addition, the magnitude of the current supplied to the coils of the electromagnets 24, 34, 44 is adjusted. That is, the value obtained by dividing the suction force generated between the cover portions 2 and 4 and the film portion 3 by the contact area between the cover portions 2 and 4 and the film portion 3 is the introduction valve portion A, the compression portion B, and Among the lead-out valve portions C, it is the highest in the introduction valve portion A and the lowest in the lead-out valve portion C. Therefore, during the processing of steps S11 to S13 and S21 to S23, the liquid is prevented from flowing back from the outlet valve portion C side to the inlet valve portion A side, and from the inlet valve portion A side to the outlet valve portion C side. This ensures that the liquid is delivered. In this embodiment, since the structure and material of both the magnetic body and the coil of each electromagnet are the same, the magnetic force generated is adjusted by the amount of current to be supplied. The magnitude of the magnetic force generated while supplying the same amount of current may be adjusted by using different magnetic materials.

  In the micro pump 1, the processes of steps S <b> 11 to S <b> 13 and S <b> 21 to S <b> 23 are repeated for one of the lower flow path 61 and the upper flow path 62, and in parallel with this, steps S <b> 21 to S <b> 23 are performed. , S11 to S13 are repeated with respect to the other flow path, so that the liquid is continuously sent out with a minute liquid feeding amount.

  Since the liquid is derivated twice during one cycle in the micropump 1 with a half-cycle deviation, as described above, the compression section B expands one flow path element 61B, 62B, When 15 microliters of liquid is introduced into the flow path elements 61B and 62B, the amount of liquid delivered in one cycle is 30 microliters. Therefore, if the cycle of one cycle in the micropump 1 is 1 second (that is, if the operation of one cycle of the micropump 1 is repeated at a frequency of 1 hertz [Hz]), the micropump 1 is 1.8 milliliters per minute. (It is obtained in (30 [microliter] × 60 [seconds]).) Depending on the design of the micropump 1, it is possible to supply a maximum of 100 microliters of liquid per cycle.

  As described above, the compression portion B of the micropump 1 includes the two flow path elements 61B, the flexible portions where the magnetic poles are generated on both surfaces of the film portion 3 between the two cover portions 2, 4. 62B is provided, and the inlet valve portion A and the outlet valve portion C are connected to one end side and the other end side of the two flow path elements 61B and 62B, respectively. Then, the introduction valve unit A, the compression unit B, and the derivation valve unit C are controlled by the control unit 10, whereby each of the introduction valve unit A and the derivation valve unit C includes two flow path elements 61B and 62B. While the two flow passages 61 and 62 are alternately closed, the flexible portion of the film portion 3 is bent toward the lower cover portion 2 side or the upper cover portion 4 side by a magnetic force, whereby two flow passage elements 61B. , 62B are alternately compressed. In this manner, in the micropump 1, the compression unit B compresses one of the two flow path elements 61B and 62B, and draws a small amount of liquid from the flow path element while the other flow path element 61B and 62B is compressed. By introducing the liquid into the flow path element and suppressing the pulsation (pressure fluctuation), the liquid can be efficiently delivered through the two flow path elements 61B and 62B.

  Further, in the micropump 1, each of the introduction valve portion A, the compression portion B, and the lead-out valve portion C is the same as a part of the film-like film portion 3 having the base material 31 that extends integrally between these configurations. A part of the film-like lower cover part 2 having the base material 21 that extends integrally with the film and a part of the film-like upper cover part 4 having the base material 41 that also extends integrally, The micro pump 1 can be thinned. Since the main body of the micropump 1 (that is, the part excluding the control unit 10) is configured as one unit, the micropump 1 can be arranged in various postures.

  Furthermore, since a light electromagnet is formed using photolithography technology in the film part 3 and the two cover parts 2 and 4, the micropump 1 can open and close each flow path element at a high speed. It is possible to increase the number of times the liquid is led out (that is, to improve the pumping amount per unit time). In the micropump 1 of FIG. 1, the electromagnet is provided with a magnetic material such as iron, but a ferromagnetic material capable of forming a stronger magnetic field is provided so that the current supplied to the coil is reduced, and the micromagnet 1 The energy required for driving the pump 1 may be reduced.

  Here, in the conventional micropump using an actuator or the like that mechanically deflects a member that forms the side wall of the flow channel from the outside of the flow channel, liquid feeding failure due to mechanical malfunction is likely to occur. Since the film portion 3 and the cover portions 2 and 4 forming the side walls of the flow path are bent by the magnetic force in the vertical direction, liquid feeding is performed, so liquid feeding defects are reduced.

  In the micro pump 1, the gap width adjusting mechanism 522 shown in FIG. 2 can increase the liquid feed amount by increasing the gap width G1 within a range where the cover portions 2 and 4 are not damaged, and the gap width G1 can be reduced. Accordingly, it is possible to shorten the time required for the deformation operation of each part of the cover parts 2 and 4 and the film part 3 and to increase the number of times the liquid is led out per unit time. When actually adjusting the liquid supply amount, after setting the gap width G1 to the maximum width within the range in which the cover portions 2 and 4 are not damaged, the gap width G1 is gradually reduced to adjust the liquid supply amount. It is preferable to do.

  In the micropump 1, the magnetization directions of the three electromagnets of the lower cover portion 2, the film portion 3, and the upper cover portion 4 in the introduction valve portion A, the compression portion B, and the lead-out valve portion C are the same. Both the upper flow path element (flow path element of the upper flow path) and the lower flow path element (flow path element of the lower flow path) can be closed, and all the flow path elements are closed to make the micropump 1 By preliminarily removing the liquid remaining inside, maintenance of the micropump 1 can be easily performed.

  Furthermore, in the micropump 1, it is also possible to send the liquid from the outlet valve portion C side to the introduction valve portion A side. Specifically, the lead-out valve section C opens the lower flow path 61 and closes the upper flow path 62, and the introduction valve section A closes the lower flow path 61 and opens the upper flow path 62. In this state, the compression section B expands the flow path element of the lower flow path 61, so that liquid is introduced from the outlet valve section C side to the lower flow path element of the compression section B, and the compression section B The liquid is led out from the upper flow path element to the introduction valve portion A side. Subsequently, in a state where the outlet valve portion C closes the lower flow path and opens the upper flow passage, and the introduction valve portion A opens the lower flow passage and closes the upper flow passage, Compresses the flow path element of the lower flow path, so that liquid is led out from the lower flow path element of the compression section B to the introduction valve section A side and from the discharge valve section C side to the upper side of the compression section B Liquid is introduced into the flow path element.

  As described above, the control unit 10 controls the lead-in valve unit C in the operation example of FIG. 7 instead of the lead-out valve unit C, and controls the lead-in valve unit A to the lead-in valve unit A. Instead, by performing the operation on the outlet valve portion C, it is possible to easily deliver the liquid in the opposite direction from the outlet valve portion C side to the inlet valve portion A side. 9 to 13 and FIG. Similarly, in the micropumps 1 and 1a of A, the liquid may be sent in the opposite direction from the outlet valve portion side to the inlet valve portion side.

  FIG. 9 is a diagram showing another example of the micropump 1. 9 shows a state where the lid member 52 is removed as in FIG. 1 (the same applies to FIGS. 11 to 13). The micropump 1 in FIG. 9 differs from the micropump 1 in FIG. 1 only in that the length in the Y direction of the electromagnet (magnetic body and coil thereof) in the compression section B is different. Is the same as in FIG. Also in the micropump 1 of FIG. 9, in each of the introduction valve part A, the compression part B, and the lead-out valve part C, the electromagnets of the upper cover part 4, the corresponding electromagnets of the film part 3, and the lower cover part 2 correspond. The electromagnets are the same size and overlap with each other accurately. In the following description, unless otherwise specified, the electromagnet group 46A and the compression unit B three electromagnets are referred to as the electromagnet group 46A and the compression part B. The three electromagnets of the electromagnet group 46B and the lead-out valve portion C are collectively referred to as an electromagnet group 46C. In FIG. 9, the electromagnet of the upper cover portion 4 is representatively illustrated by broken lines (in FIGS. 11 to 13 and the description thereof). The same applies except for the sign.)

  In the micropump 1 of FIG. 9, the contact area between the film part 3 and the cover parts 2 and 4 when the flow path element is compressed in the compression part B is the flow path in each of the introduction valve part A and the discharge valve part C. The contact area between the film part 3 and the cover parts 2 and 4 when the element is closed is larger than that of the micropump 1 shown in FIG. And more liquid is led out from the flow path element of the compression section B. 9, the area of the magnetic body of the electromagnet group 46B in the compression section B is made larger than the electromagnet group 46A in the introduction valve section A and the electromagnet group 46C in the lead-out valve section C. As a result, the amount of liquid delivered in one cycle operation of the micropump 1 can be easily increased. 10 to 13 and FIG. Similarly, in the micro pumps 1 and 1a of A, the contact area between the film part 3 and the cover parts 2 and 4 in the compression part B may be made larger than that in each of the introduction valve part A and the lead-out valve part C. .

  FIG. 10 is a cross-sectional view of a micropump 1 according to yet another example. FIG. 10 is a view corresponding to FIG. 3, and in FIG. 10, illustration of parallel oblique lines in the cross section of the film portion 3 and the two cover portions 2 and 4 is omitted.

  In the micropump 1 shown in FIG. 10, the two holding members 541a and 542a of the film holding part 54 that sandwich the end part on the (+ Y) side of the film part 3 are on the (+ Y) side of the micropump 1 in FIG. Longer towards. Further, the (−Z) side cover holding portion 53 that holds the end portion of the lower cover portion 2 is connected only to the lower flow path 61 by the holding member 531 and the holding member 541a on the film holding portion 54 side. A part of the discharge port is configured, and the holding member 531 on the film holding portion 54 side of the (+ Z) side holding portion 53 that holds the end portion of the upper cover portion 4 and the holding member 542a make the upper flow path 62 only. Some of the other outlets to be connected are configured.

  In the micropump 1, the end portion on the (−Y) side has the same structure as that in FIG. 10, and two inflow ports connected to the lower flow path 61 and the upper flow path 62 are formed. Then, two different liquids are respectively introduced into the two flow paths from the two inlets, and these liquids are sent to the two outlets without being mixed. At this time, in the micropump 1, since the portion of the film part 3 in the compression part B bends by approximately the same amount toward the lower cover part 2 and the upper cover part 4, two different liquids are almost simultaneously (accurately). Can be sent out by the same amount (with a half-cycle shift). 11 to 13 and FIG. Similarly, in the micropumps 1 and 1a of A, a plurality of different liquids may be introduced into the plurality of flow paths, respectively.

  FIG. 11 is a diagram showing still another example of the micropump 1. In the micropump 1 of FIG. 11, the shape of the magnetic body of the electromagnet group 47B of the compression part B is substantially triangular, and the direction perpendicular to the (−Y) side of this triangle from the electromagnet group 47B (( The electromagnet group 47A of the introduction valve section A is arranged at a position slightly separated in the (Y) direction), and the direction perpendicular to the (+ X) side of the triangle from the electromagnet group 47B (the (+ X) direction in FIG. 11). ), The electromagnet group 47C of the lead-out valve portion C is disposed at a position slightly apart. As described above, in the micropump 1 of FIG. 11, the introduction valve portion A, the compression portion B, and the lead-out valve portion C are arranged in a non-linear manner, and from the lead-in valve portion A to the lead-out valve portion C via the compression portion B. A substantially L-shaped flow path is formed, and the liquid is sent from the introduction valve section A side to the discharge valve section C side along this flow path. Of course, the introduction valve part A, the compression part B, and the lead-out valve part C may be arranged in a non-linear manner other than the L-shape, and such a micropump 1 delivers liquid in a desired direction. Thus, the usability and convenience of the micropump 1 are improved. The electromagnet of the compression unit B may be a polygon other than a triangle or a rectangle. Further, FIG. 12, FIG. 13 and FIG. Similarly, in the micropumps 1 and 1a of A, the introduction valve portion A, the compression portion B, and the lead-out valve portion C may be arranged in a non-linear manner.

  FIG. 12 is a diagram showing still another example of the micropump 1. In the micropump 1 of FIG. 12, another derivation valve portion D having the same structure as the derivation valve portion C is further provided. Specifically, the shape of the electromagnet group 48B of the compression section B is substantially triangular (right triangle), and the direction perpendicular to the hypotenuse of this triangle from the electromagnet group 48B ((−Y) and (−X) in FIG. 12). The electromagnet group 48A of the introduction valve portion A is arranged at a position slightly away from the direction (direction), and slightly from the electromagnet group 48B in the direction perpendicular to the (+ Y) side of this triangle (the (+ Y) direction in FIG. 12). The electromagnet group 48C of the lead-out valve section C is disposed at a position away from the electromagnet group 48B, and is slightly separated from the electromagnet group 48B in the direction perpendicular to the remaining (+ X) side of the triangle (the (+ X) direction in FIG. 12). The electromagnet group 48D of the lead-out valve portion D is arranged at the above position.

  In the micropump 1 of FIG. 12, the flow path is branched at the compression part B, and when the liquid is sent from the introduction valve part A side to the derivation valve part D side, the lower cover in the derivation valve part C The magnetization directions of the three electromagnet groups 48C of the part 2, the film part 3, and the upper cover part 4 are the same. Thereby, the film part 3 and the lower cover part 2 in the outlet valve part C, and the film part 3 and the upper cover part 4 come into contact with each other, so that the flow path element of the lower flow path and the flow path element of the upper flow path Are blocked together. As a result, liquid can be delivered from the introduction valve portion A side to the discharge valve portion D side along the flow path from the introduction valve portion A to the discharge valve portion D via the compression portion B. Further, when the liquid is sent from the introduction valve portion A side to the derivation valve portion C side, the lower flow path and the upper flow path in the derivation valve portion D are closed, and the compression valve B is moved from the introduction valve portion A. The liquid is delivered along a flow path leading to the outlet valve portion C.

  In this way, the lower flow path and the upper flow path in one lead-out valve portion are closed in this way, and the electromagnet and film of the lower cover portion 2 in each of the introduction valve portion A, the compression portion B, and the other lead-out valve portion. Both the lower flow path and the upper flow path are opened with the direction of magnetization of the electromagnet of the part 3 being opposite and the direction of magnetization of the electromagnet of the film part 3 and the electromagnet of the upper cover part 4 being also opposite. Therefore, the micropump 1 in FIG. 12 can be used as a switching valve.

  Further, in the micropump 1, the two lead-out valve portions C and D in FIG. 12 are regarded as two introduction valve portions, respectively, and the one introduction valve portion A in FIG. 12 is regarded as one lead-out valve portion. By simultaneously performing the same control in the introduction valve unit, the liquid may be simultaneously introduced and mixed from the two introduction valve units to the compression unit B, and the mixed liquid may be led out to the discharge valve unit C side. Thus, the micropump having one introduction valve portion, one compression portion, and one lead-out valve portion has a structure similar to that of the introduction valve portion, and is at a position different from the introduction valve portion. Another introduction valve portion connected to the compression portion or another lead valve portion having the same structure as the lead-out valve portion and connected to the compression portion at a position different from the lead-out valve portion By adding the two liquids, it is possible to deliver the liquids while mixing them, or to deliver the liquids to the desired outlet valve part side of the two outlet valve parts. Note that FIG. 13 and FIG. Similarly, in the micropumps 1 and 1a of A, a plurality of introduction valve portions or a plurality of lead-out valve portions may be provided.

  FIG. 13 is a diagram showing still another example of the micropump 1. The micropump 1 of FIG. 13 is different from the micropump 1 of FIG. 1 in that the electromagnet group 49B in the compression section B is a set of a plurality of electromagnet element groups 491B to 498B. Other configurations are the same as those in FIG. 1, and are denoted by the same reference numerals.

  Regarding the electromagnet group of the compression unit B, in detail, an electromagnet that is an array of a plurality of electromagnet elements along the flow path element is provided at the site of the compression unit B of the upper cover unit 4. An electromagnet that is an array of a plurality of electromagnet elements along the flow path element is also provided at the site, and an electromagnet that is an array of a plurality of electromagnet elements along the flow path element is also provided at the site of the compression portion B of the lower cover portion 2. It is done. Each electromagnet element of the upper cover portion 4 has the same size as the corresponding electromagnet element of the film portion 3 and the corresponding electromagnet element of the lower cover portion 2 and accurately overlaps each other.

  At the time of liquid delivery in the micropump 1 of FIG. 13, the introduction valve section A opens the lower flow path and closes the upper flow path (FIG. 7: Steps S11 and S21), and the derivation valve section C is the lower flow path. And the upper flow path is opened (steps S12 and S22). In this state (however, the electromagnet group 49B closes the entire flow path element of the lower flow path), a plurality of compression sections B are provided. Among the electromagnet element groups 491B to 498B, one electromagnet element group 491B closest to the introduction valve portion A side partially expands the flow path element of the lower flow path, so that liquid is introduced into the expanded space. Is done. At this time, the flow path element of the upper flow path is partially compressed, so that the liquid corresponding to the amount previously present in the compressed space is led out from the compression section B to the lead-out valve section C. The Subsequently, the electromagnetic element group 492B adjacent to the electromagnetic element group 491B in the X direction partially expands the lower flow path element and partially compresses the upper flow path element. Similarly, the electromagnetic element group 493B adjacent in the direction performs partial expansion of the lower flow path element and partial compression of the upper flow path element. In this way, partial expansion of the lower flow path element and partial compression of the upper flow path element in the compression part B are sequentially performed by the plurality of electromagnet element groups 491B to 498B, and the lower flow of the compression part B The liquid is introduced into the entire path element, and the liquid is led out from the entire upper flow path element (steps S13 and S23).

  When the entire flow path element of the lower flow path in the compression section B is expanded, the introduction valve section A closes the lower flow path and opens the upper flow path (steps S21 and S11), and the derivation valve section C Opens the lower flow path and closes the upper flow path (steps S22 and S12). In this state, the electromagnetic element group 491B closest to the introduction valve section A of the compression section B partially covers the lower flow path element. And the liquid corresponding to the amount existing in the compressed space of the lower flow path element is led out from the compression section B to the outlet valve section C, Liquid is introduced into the expanded space of the upper channel element. Subsequently, the electromagnetic element group 492B adjacent to the electromagnetic element group 491B in the X direction partially compresses the lower flow path element and partially expands the upper flow path element. Similarly, the electromagnetic element group 493B adjacent in the direction performs partial compression of the lower flow path element and partial expansion of the upper flow path element. In this way, partial compression of the lower flow path element and partial expansion of the upper flow path element in the compression part B are sequentially performed by the plurality of electromagnet element groups 491B to 498B, and the lower flow of the compression part B A small amount of liquid is led out from the flow path element of the path, and the liquid is introduced into the entire upper flow path element of the compression section B (steps S23 and S13).

  In the micropump 1 of FIG. 13, the processes of steps S11 to S13 and S21 to S23 are repeated for one of the lower channel and the upper channel, and in parallel with this, steps S21 to S21 are performed. The processes of S23 and S11 to S13 are repeated for the other channel. As a result, in the micropump 1 of FIG. 13, a very small amount of liquid is sent by one derivation operation by the electromagnet element groups 491B to 498B while sequentially switching the magnetization directions of the electromagnet element groups 491B to 498B at high speed. Perform liquid feeding (that is, deliver liquid with high liquid feeding resolution), and perform liquid feeding with extremely low pulsation that is close to no pulsation as compared with a micro pump in which the compression section B has only a single electromagnet. Can do. In addition, when reducing the pulsation which arises when the derivation | leading-out valve part C obstruct | occludes a flow path, the derivation | leading-out valve part C may be made into the same magnitude | size as one electromagnet element group 491B-498B.

  In the micropump 1 of FIG. 13, it is also possible to send out the same liquid as that of the micropump 1 of FIG. 1 by operating the plurality of electromagnet element groups 491B to 498B integrally. Moreover, as long as it arranges along a flow path element, the arrangement | sequence of the some electromagnet element of the compression part B may be other than the thing of FIG. Note that FIG. Similarly, in the micropump 1 of A, the electromagnet of the compression section B may be a set of a plurality of electromagnet elements.

  FIG. A is a figure which shows the structure of the micropump 1a which concerns on 2nd Embodiment, FIG. In A, the electromagnet and its wiring are illustrated by thick lines. FIG. The micropump 1a of A is different from the micropump 1 of FIG. 1 only in that two film parts 3a and 3b are provided between the two cover parts 2 and 4. Other configurations relating to the delivery of the liquid are the same as those in FIG.

  FIG. The structure of each film part 3a, 3b shown to A is the same as that of the film part 3 of FIG. That is, each film part 3a, 3b has three electromagnets included in the introduction valve part A, the compression part B, and the lead-out valve part C, respectively, and magnetic poles are generated on both surfaces of the film parts 3a, 3b by each electromagnet. FIG. In the micropump 1a of A, the two cover portions 2 and 4 are overlapped on both sides in the stacking direction of the two film portions 3a and 3b to be stacked, so that two film portions are interposed between the two cover portions 2 and 4. Three flow path elements separated from each other by 3a and 3b are provided in each of the introduction valve portion A, the compression portion B, and the outlet valve portion C. One end side of the three flow path elements of the compression section B is connected to each of the three flow path elements of the introduction valve section A, and the other end side of the three flow path elements of the compression section B is connected to the three flow paths of the outlet valve section C. The micropump 1 is formed with three flow paths each including the three flow path elements of the compression section B, which are respectively connected to the path elements.

  In the micropump 1a, in each of the introduction valve portion A, the compression portion B, and the outlet valve portion C, FIG. As shown in B, a flow path element (hereinafter referred to as “lower flow path element”) between the lower cover part 2 and the lower film part 3a under the control of the control unit 10 (see FIG. 1). The flow path element (hereinafter referred to as “upper flow path element”) between the upper film portion 3b and the upper cover portion 4 is simultaneously closed (or compressed), and in this state, the lower film portion 3a. The channel element (hereinafter referred to as “intermediate channel element”) between the upper film portion 3b and the upper film portion 3b is opened (or expanded). FIG. As shown in C, the lower flow path element and the upper flow path element are opened simultaneously, and in this state, the intermediate flow path element is closed. As described above, in the micro pump 1a, the lower flow path element, the upper flow path element, and the intermediate flow path element are alternately closed in the introduction valve portion A, the compression portion B, and the lead-out valve portion C, respectively.

  FIG. 15 is a diagram for explaining an operation in which the micropump 1a delivers a liquid. The upper part of FIG. 15 abstractly shows changes with time in the open / closed states of the lower flow path element 71A, the intermediate flow path element 72A, and the upper flow path element 73A in the introduction valve section A, and the middle stage of FIG. FIG. 15 abstractly shows changes with time in the open / closed states of the lower flow path element 71B, the intermediate flow path element 72B, and the upper flow path element 73B in B. In the lower part of FIG. The change with time of the open / closed state of 71C, the middle flow path element 72C, and the upper flow path element 73C is shown abstractly. In each of the upper, middle, and lower stages in FIG. 15, four solid lines extending in the horizontal direction correspond to the lower cover part 2, the lower film part 3a, the upper film part 3b, and the upper cover part 4, respectively (in FIG. 15). In FIG. 15, each flow path element is sandwiched between two solid lines adjacent to each other in the vertical direction in FIG. 15, and the width between the two solid lines. Indicates that the corresponding flow path element is open (or expanded) in the wide part, and is closed (or compressed) in the narrow part.

  At time T0 in FIG. 15, the lower flow path element 71A and the upper flow path element 73A are closed by the introduction valve portion A to open the intermediate flow path element 72A, and the lower flow path element 71B and the upper flow path element are opened by the compression portion B. The flow path element 73B is closed and the intermediate flow path element 72B is opened, and the lower flow path element 71C and the upper flow path element 73C are opened by the outlet valve portion C, and the intermediate flow path element 72C is closed. At time T1, the lower flow path element 71A and the upper flow path element 73A are opened by the introduction valve section A and the intermediate flow path element 72A is closed (FIG. 7: steps S11 and S21), and at time T2, the derivation valve section. The lower flow path element 71C and the upper flow path element 73C are closed by C, and the intermediate flow path element 72C is opened (steps S12 and S22). In this state, at time T3, the compression section B expands the lower flow path element 71B and the upper flow path element 73B, and liquid is introduced into the lower flow path element 71B and the upper flow path element 73B. Then, the intermediate flow path element 72B is compressed and the liquid is led out from the intermediate flow path element 72B (steps S13 and S23).

  When the introduction of the liquid into the lower flow path element 71B and the upper flow path element 73B is completed, at time T4, the lower flow path element 71A and the upper flow path element 73A are closed by the introduction valve portion A, and the intermediate flow path element 72A is opened (steps S21 and S11), and at time T5, the lower flow path element 71C and the upper flow path element 73C are opened by the derivation valve portion C, and the intermediate flow path element 72C is closed (steps S22 and S12). ). In this state, at time T6, the compression section B compresses the lower flow path element 71B and the upper flow path element 73B, and liquid is led out from the lower flow path element 71B and the upper flow path element 73B. Then, the intermediate flow path element 72B is expanded to introduce the liquid into the intermediate flow path element 72B (steps S23 and S13).

  In the micropump 1a, the processes in steps S11 to S13 and S21 to S23 are performed on one of two flow paths each including a lower flow path element and an upper flow path element and a flow path including an intermediate flow path element. In parallel with this, the processes of steps S21 to S23, S11 to S13 are repeated for the other flow path (one or two flow paths), so that the three flow paths of the compression section B Liquid is delivered efficiently through the element.

  FIG. In the micropump 1a of A, three film parts laminated between the two cover parts 2 and 4 may be arranged. In this case, each of the introduction valve part A, the compression part B, and the lead-out valve part C 4 channel elements separated from each other by three film portions, two channel elements existing every other one of the four channel elements, and the other two channel elements Are alternately closed and liquid is delivered.

  As described above, in the micropump, there are a plurality of flow paths that are separated from each other by the plurality of film portions between the two cover portions 2 and 4, and are present every other one of the plurality of flow paths. Compression section B, compression section B for alternately compressing the first flow path element group corresponding to the first flow path group and the corresponding second flow path element group of the second flow path group other than the first flow path group An inlet valve portion A that alternately closes the first flow path group and the second flow path group on one end side of the flow path element group, and a first flow path on the other end side of the flow path element group of the compression section B A lead-out valve portion C for alternately closing the group and the second flow path group is provided. Of the first channel group and the second channel group, the introduction valve unit A opens one channel group to close the other channel group, and the lead-out valve unit C includes the one channel group. In a state where the other flow path group is opened and the compression section B expands the flow path element group of the one flow path group, the liquid is introduced into the compression section B. The introduction valve unit A closes the one channel group and opens the other channel group, and the lead-out valve unit C opens the one channel group and closes the other channel group. In the state, the compression part B compresses the flow path element group of the one flow path group, whereby the liquid is led out from the compression part B. Then, by repeating the operation while exchanging the one channel group and the other channel group, the liquid is efficiently delivered through the plurality of (three or more) channel elements of the compression section B in the micropump. The

  Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various modifications can be made.

  In the first embodiment, an electromagnet is provided in the film part 3 and the two cover parts 2 and 4 in each of the introduction valve part A, the compression part B, and the lead-out valve part C. If it is possible to compress (or close) alternately, some electromagnets may be replaced with magnets. That is, in the micropump 1, when the film unit 3 includes electromagnets that generate magnetic poles on both surfaces thereof, a magnet or a magnetic pole in which each of the two cover units 2 and 4 has a magnetic pole on the surface facing the film unit 3 is provided. In the case where the electromagnet is generated and the film unit 3 includes a magnet having magnetic poles on both sides thereof, the two cover units 2 and 4 each include an electromagnet in which a magnetic pole is generated on the surface facing the film unit 3. This is a necessary condition for performing the pumping operation. However, in order to freely compress and expand (or close and open) the two flow path elements such as compressing the two flow path elements at the same time, each of the film part 3 and the two cover parts 2 and 4 is An electromagnet is preferably provided.

  Also in the second embodiment, each of the two cover portions 2 and 4 of the micropump 1a is provided with a magnet having magnetic poles on the surface facing the plurality of film portions instead of the electromagnet. Road element compression and expansion may be implemented.

  In the micropumps 1 and 1a, the fluid to be delivered may be a gas. In this case, the micropumps 1 and 1a can be used as a compressor or a suction pump. Further, the micropumps 1 and 1a may be used for purposes other than the application of sending liquid into the microreactor.

It is a top view which shows the micropump which concerns on 1st Embodiment. It is a longitudinal cross-sectional view of the micropump in the position of the arrow II-II in FIG. It is a longitudinal cross-sectional view of the micropump in the position of the arrow III-III in FIG. It is a perspective view which shows the structure of a film part. It is a perspective view which shows the structure of a film part and two cover parts. It is a figure for demonstrating a mode that space is formed between a film part and a cover part. It is a figure for demonstrating a mode that space is formed between a film part and a cover part. It is a figure which shows the flow of the operation | movement which a micropump sends out the liquid. It is a figure for demonstrating a mode that a micropump delivers a liquid. It is a figure for demonstrating a mode that a micropump delivers a liquid. It is a figure for demonstrating a mode that a micropump delivers a liquid. It is a figure for demonstrating a mode that a micropump delivers a liquid. It is a figure for demonstrating a mode that a micropump delivers a liquid. It is a figure for demonstrating a mode that a micropump delivers a liquid. It is a figure for demonstrating a mode that a micropump delivers a liquid. It is a figure which shows the other example of a micropump. It is a figure which shows the further another example of a micropump. It is a figure which shows the further another example of a micropump. It is a figure which shows the further another example of a micropump. It is a figure which shows the further another example of a micropump. It is a figure which shows the structure of the micropump which concerns on 2nd Embodiment. It is a figure which shows the flow-path element of a micro pump. It is a figure which shows the flow-path element of a micro pump. It is a figure for demonstrating the operation | movement which a micropump sends out the liquid.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,1a Micropump 2,4 Cover part 3,3a, 3b Film part 10 Control part 21,31,41 Base material 24,34,44,24A-24C, 34A-34C, 44A-44C Electromagnet 32 Magnetic body 33 Coil 46A-46C, 47A-47C, 48A-48D, 49B Electromagnet group 52 Lid member 61, 62 Channel 61A-61C, 62A-62C, 71A-71C, 72A-72C, 73A-73C Channel element 491B-498B Electromagnet element Group A Introduction valve part B Compression part C, D Outlet valve part

Claims (14)

A micropump,
By superimposing two cover parts on both sides of the film part, two minute flow path elements separated from each other by the film part are provided between the two cover parts, and the two flow path elements are alternately arranged. A compression unit that compresses
An introduction valve portion connected to one end side of the two flow path elements, and alternately closing two flow paths each including the two flow path elements;
A lead-out valve portion connected to the other end side of the two flow path elements, and alternately closing the two flow paths;
A control unit for controlling the compression unit, the introduction valve unit, and the lead-out valve unit;
With
The film portion includes an electromagnet in which magnetic poles are generated on both surfaces, and each of the two cover portions includes a magnet having a magnetic pole on a surface facing the film portion or an electromagnet in which a magnetic pole is generated, or the film portion Is provided with a magnet having magnetic poles on both sides, and each of the two cover parts is provided with an electromagnet in which a magnetic pole is generated on the surface facing the film part,
In the state where the introduction valve section opens one flow path and closes the other flow path, and the derivation valve section closes the one flow path and opens the other flow path, the compression The fluid is introduced into the compression section by expanding the flow path element of the one flow path,
In the state where the introduction valve part closes the one flow path and opens the other flow path, and the lead-out valve part opens the one flow path and closes the other flow path, The micropump is characterized in that the fluid is led out from the compression section by compressing the flow path element of the one flow path by the compression section. The micropump according to claim 1,
Each of the film part and the two cover parts includes an electromagnet. The micropump according to claim 1 or 2,
The film part comprises an electromagnet;
The electromagnet
A coil formed using a photolithographic technique on a film-like substrate;
A film-like or plate-like magnetic body provided inside the coil;
A micropump characterized by comprising: The micropump according to any one of claims 1 to 3,
Each of said two cover parts is a film form, The micropump characterized by the above-mentioned. The micropump according to claim 4,
The micropump further comprising a bending amount limiting portion that limits the amount of bending of each of the two cover portions to the opposite side to the film portion in a changeable manner. A micropump according to any one of claims 1 to 5,
Each of the film part or the two cover parts includes an electromagnet,
The electromagnet is an array of a plurality of electromagnet elements along the two flow path elements;
The micropump characterized in that partial expansion and compression of the flow path element in the compression section are sequentially performed by the plurality of electromagnet elements. The micropump according to claim 4 or 5, wherein
Each of the introduction valve part and the lead-out valve part has a combination similar to the combination of the film part and the two cover parts,
The base material of the film portion of the compression portion, the base material of the film portion of the introduction valve portion, and the base material of the film portion of the lead-out valve portion are integral members,
The base material of each of the two cover parts of the compression part, the base material of the cover part corresponding to the introduction valve part, and the base material of the cover part corresponding to the lead-out valve part are integral members,
Each flow path element of the introduction valve section, a corresponding flow path element of the compression section, and a corresponding flow path element of the derivation valve section are continuous to form the two flow paths. Micro pump. The micropump according to claim 7,
The value obtained by dividing the suction force generated between the film portion and the cover portion when the flow path element is closed or compressed by the contact area between the film portion and the cover portion is the introduction valve portion and the compression portion. A micropump characterized by being highest in the lead-in valve portion and lowest in the lead-out valve portion among the lead-out valve portions. The micropump according to claim 7 or 8, wherein
The contact area between the film part and the cover part when the flow path element is compressed in the compression part is the film part and the cover part when the flow path element is closed in each of the introduction valve part and the lead-out valve part. Micropump characterized by being larger than the contact area. A micropump according to any one of claims 1 to 9,
The micropump characterized in that the introduction valve portion, the compression portion, and the lead-out valve portion are arranged in a non-linear manner. The micropump according to any one of claims 1 to 10,
Having the same structure as the introduction valve part, having another structure connected to the compression part at a position different from the introduction valve part, or the same structure as the lead-out valve part, The micropump further comprising another derivation valve unit connected to the compression unit at a position different from the derivation valve unit. The micropump according to any one of claims 1 to 11,
A micropump characterized in that two different fluids are respectively introduced into the two flow paths. The micropump according to any one of claims 1 to 12,
The control unit performs control on the lead-out valve unit instead of the lead-out valve unit, and performs control on the lead-in valve unit instead of the lead-in valve unit. Thereby, the fluid is sent from the outlet valve portion side to the introduction valve portion side. A micropump,
A plurality of flow path elements separated from each other by the plurality of film portions are provided between the two cover portions by overlapping two cover portions on both sides in the stacking direction of the plurality of film portions to be stacked, A compression section that alternately compresses a first flow path element group that exists every other one of the plurality of flow path elements and a second flow path element group other than the first flow path element group;
A first flow path group including the first flow path element group and a second flow path element group among a plurality of flow paths which are connected to one end side of the plurality of flow path elements and respectively include the plurality of flow path elements. An introduction valve portion that alternately closes the second flow path group including:
A lead-out valve portion connected to the other end side of the plurality of flow path elements, and alternately closing the first flow path group and the second flow path group;
A control unit for controlling the compression unit, the introduction valve unit, and the lead-out valve unit;
With
Each of the plurality of film portions includes an electromagnet that generates magnetic poles on both surfaces, and each of the two cover portions includes a magnet that has a magnetic pole on a surface facing the plurality of film portions or an electromagnet that generates magnetic poles,
Of the first flow path group and the second flow path group, the introduction valve section opens one flow path group to close the other flow path group, and the derivation valve section forms the one flow path group. In the state where the other flow path group is opened and the compression section expands the flow path element group of the one flow path group, the fluid is introduced into the compression section. The introduction valve unit closes the one channel group and opens the other channel group, and the lead-out valve unit opens the one channel group and closes the other channel group. The micropump is characterized in that the fluid is led out from the compression section by compressing the flow path element group of the one flow path group in the state where the compression section is in the state.

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