JP2007127572A - Apparatus for detecting state on specular surface, and moisture detector - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for detecting the state of a specular surface for promoting miniaturization and improving working efficiency in assembly work, and to provide a moisture detector. <P>SOLUTION: A column-shaped heat sink 18 is mounted on a heating surface 2-2 of a thermoelectric cooling element 2, and a stainless-steel tube 17 whose upper end section is bent to be J-shaped, is disposed along the heat sink 18. The tube 17 is fixed to the heat sink (body section) 18 at its straight section 17B coupled with the J-shaped bent end 17A. The tube 17 contains an optical fiber 17-1 for emitting light and an optical fiber 17-2 for receiving light. The head planes of the J-shaped bent ends (light emitting section, light receiving section) of the optical fiber 17-1 for emitting light and the optical fiber 17-2 for receiving light are brought to face the specular surface 10-1 of a mirror 10 so as to be tilted to the specular surface 10-1 at prescribed tilt angles. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an on-mirror state detection device that detects a state on a mirror surface and a moisture detection device that detects moisture contained in a gas to be measured generated on the mirror surface.

  Conventionally, as a humidity measurement method, a dew point detection method is known in which a dew point is detected by measuring the temperature when the temperature of a gas to be measured is reduced and a part of water vapor contained in the gas to be measured is condensed. ing. For example, in Non-Patent Document 1, a mirror is cooled using a cryogen, a refrigerator, an electronic cooler, or the like, a change in the intensity of reflected light on the mirror surface of the cooled mirror is detected, and the temperature of the mirror surface at this time is detected. A mirror-cooled dew point meter that detects the dew point of the moisture in the gas to be measured is described.

  There are two types of mirror-cooled dew point meters depending on the type of reflected light used. One is a specularly reflected light detection method that uses specularly reflected light (see, for example, Patent Document 1), and the other is a scattered light detection method that uses scattered light (see, for example, Patent Document 2).

[Specular reflection detection method]
FIG. 7 shows a main part of a conventional mirror-cooled dew point meter that employs a regular reflection light detection method. The specular cooling dew point meter 101 includes a chamber 1 into which a gas to be measured is introduced and a thermoelectric cooling element (Peltier element) 2 provided inside the chamber 1. Bolts 4 are attached to the cooling surface 2-1 of the thermoelectric cooling element 2 via copper blocks 3, and radiating fins 5 are attached to the heating surface 2-2 of the thermoelectric cooling element 2. An upper surface 4-1 of the bolt 4 attached to the copper block 3 is a mirror surface. A winding type resistance temperature detector (temperature detection element) 6 is embedded in a side portion of the copper block 3 (see FIG. 9). Further, on the upper portion of the chamber 1, a light emitting element 7 that irradiates light obliquely to the upper surface (mirror surface) 4-1 of the bolt 4, and light emitted from the light emitting element 7 to the mirror surface 4-1. A light receiving element 8 for receiving the specularly reflected light is provided. A heat insulating material 9 is provided around the thermoelectric cooling element 2.

  In this mirror-cooled dew point meter 101, the mirror surface 4-1 in the chamber 1 is exposed to the gas to be measured that flows into the chamber 1. If there is no condensation on the mirror surface 4-1, almost all of the light emitted from the light emitting element 7 is regularly reflected and received by the light receiving element 8. Therefore, when there is no condensation on the mirror surface 4-1, the intensity of the reflected light received by the light receiving element 8 is high.

  When the current to the thermoelectric cooling element 2 is increased and the temperature of the cooling surface 2-1 of the thermoelectric cooling element 2 is lowered, water vapor contained in the gas to be measured condenses on the mirror surface 4-1, and the water molecules Part of the light emitted from the light emitting element 7 is absorbed or diffusely reflected. Thereby, the intensity of the reflected light (regular reflected light) received by the light receiving element 8 is reduced. By detecting the change in the specularly reflected light on the mirror surface 4-1, it is possible to know the change in the state on the mirror surface 4-1, that is, that moisture (water droplets) has adhered to the mirror surface 4-1. Further, by indirectly measuring the temperature of the mirror surface 4-1 at this time with the temperature detecting element 6, it is possible to know the dew point of moisture in the gas to be measured.

(Scattered light detection method)
FIG. 8 shows a main part of a conventional mirror-cooled dew point meter employing the scattered light detection method. This mirror-cooled dew point meter 102 has substantially the same configuration as the mirror-cooled dew point meter 101 employing the specular reflection light detection method, but the mounting position of the light receiving element 8 is different. In this mirror-cooled dew point meter 102, the light receiving element 8 is provided at a position for receiving scattered light, not at a position for receiving regular reflection light of light emitted from the light emitting element 7 to the mirror surface 4-1. Yes.

  In this mirror-cooled dew point meter 102, the mirror surface 4-1 is exposed to the gas to be measured that flows into the chamber 1. If there is no condensation on the mirror surface 4-1, almost all of the light emitted from the light emitting element 7 is regularly reflected, and the amount of light received by the light receiving element 8 is extremely small. Therefore, when no condensation occurs on the mirror surface 4-1, the intensity of the reflected light received by the light receiving element 8 is small.

  When the current to the thermoelectric cooling element 2 is increased and the temperature of the cooling surface 2-1 of the thermoelectric cooling element 2 is lowered, water vapor contained in the gas to be measured condenses on the mirror surface 4-1, and the water molecules Part of the light emitted from the light emitting element 7 is absorbed or diffusely reflected. Thereby, the intensity of the irregularly reflected light (scattered light) received by the light receiving element 8 increases. By detecting the change in the scattered light on the mirror surface 4-1, it is possible to know a change in the state on the mirror surface 4-1, that is, that moisture (water droplets) has adhered to the mirror surface 4-1. Further, by indirectly measuring the temperature of the mirror surface 4-1 at this time with the temperature detecting element 6, it is possible to know the dew point of moisture in the gas to be measured.

  In addition, in the dew point meter mentioned above, it demonstrated by the example which detects the dew condensation (water | moisture content) which arises on the mirror surface 4-1, but it is also possible to detect the frost (water | moisture content) which arises on the mirror surface 4-1 with the same structure. is there.

  10 and FIG. 11, that is, the thermoelectric cooling element 2 and the temperature detection element 6 are eliminated, only the mirror 4 is provided in the chamber 1, and the opening is provided on the upper surface of the chamber 1. Then, it can be used as an on-mirror state detection device (weather meter) that detects moisture adhering to the mirror surface 4-1 at the beginning of rain or snow. In the weather gauges 103 and 104, when rain or snow is drawn into the chamber 1 and adheres to the mirror surface 4-1 of the mirror 4, the adhesion is detected based on the intensity of the reflected light received by the light receiving element 8. The

JP-A-61-75235 Japanese Examined Patent Publication No. 7-104304 Industrial Measurement Handbook, Showa 51.9.30, Asakura Shoten, P297.

  However, according to the above-described conventional mirror-cooled dew point meters 101 and 102 and weather meters 103 and 104, the light emitting element 7 and the light receiving element 8 are installed separately with different inclination angles so as to maintain a predetermined positional relationship. Therefore, the increase in size of the chamber 1 is inevitable, and the reduction in size cannot be promoted. In addition, since the light emitting element 7 and the light receiving element 8 are separated from each other and arranged at different angles, it is difficult to position the light emitting element 7 and the light receiving element 8 during assembly, and workability is poor.

  The present invention has been made to solve such a problem, and the object of the present invention is to detect a state on the mirror surface that can promote downsizing and improve workability during assembly. It is in providing an apparatus and a moisture detection apparatus.

  In order to achieve such an object, the present invention provides a light emitting means for irradiating light obliquely to a mirror surface of a mirror, an optical axis of the light emitting means and the optical axis thereof being substantially parallel, and adjacent to each other. A light receiving means for receiving scattered light of light emitted from the light emitting means to the mirror surface, and a means for detecting a state on the mirror surface based on the scattered light received by the light receiving means; The optical fiber is provided with a body portion for supporting the mirror, and the light emitting means and the light receiving means are arranged in an optical fiber with the tip surface of the end curved in a J shape facing the mirror surface, and the optical fiber is curved in the J shape. It is fixed to the trunk with a straight line connected to the end.

According to this invention, light is obliquely applied to the mirror surface of the mirror from the end surface of the end portion of the optical fiber bent in a J-shape, and the light irradiated by the scattered light from the mirror surface of the irradiated light The light is received at substantially the same position as that, and the state on the mirror surface (for example, attachment of rain or snow) is detected based on the received scattered light.
In addition, if the optical fiber used as the light emitting means and the light receiving means is fixed to the trunk portion so as to be slidable in the axial direction of the linear portion, the end face of the end portion of the optical fiber curved in a J-shape is in relation to the mirror surface. Fine adjustment of the vertical position and rotational position is possible.

  Further, the moisture detection device of the present invention includes a mirror whose mirror surface is exposed to the gas to be measured, a cooling means for cooling the mirror, a light emitting means for irradiating light obliquely with respect to the mirror surface, and an optical axis of the light emitting means. A light receiving means for receiving the scattered light of the light irradiated from the light emitting means to the mirror surface, and the light receiving means for receiving the light. A means for detecting moisture generated on the mirror surface of the mirror cooled by the cooling means based on the scattered light and a body portion for supporting the mirror via the cooling means are provided, and the light emitting means and the light receiving means are curved in a J-shape. The optical fiber is arranged with the end surface of the end portion facing the mirror surface, and this optical fiber is fixed to the trunk portion with a straight portion connected to the end portion bent in a J-shape.

According to this invention, light is obliquely applied to the mirror surface of the mirror from the end surface of the end portion of the optical fiber bent in a J-shape, and the light irradiated by the scattered light from the mirror surface of the irradiated light Based on the received scattered light, moisture (for example, condensation or frost) generated on the mirror surface of the mirror cooled by the cooling means is detected.
In addition, if the optical fiber used as the light emitting means and the light receiving means is fixed to the trunk portion (for example, a heat sink) so as to be slidable in the axial direction of the linear portion, the end portion of the optical fiber curved in a J-shape Fine adjustment of the position in the vertical direction and the position in the rotation direction with respect to the mirror surface of the tip surface is possible.

  In the present invention, the configuration in which the optical axis of the light receiving means is adjacent to the optical axis of the light emitting means and substantially parallel to each other at the same inclination angle, the end of the light emitting side optical fiber and the optical fiber of the light receiving side are arranged. In addition to the configuration in which the end portions are simply arranged in parallel, the light-emitting side optical fiber and the light-receiving side optical fiber are accommodated in a tube, and the end of the light-emitting side optical fiber and the light-receiving side optical fiber are accommodated in the tube. A configuration in which the end portion is arranged in parallel is also included.

According to the present invention, the light emitting means and the light receiving means are arranged at the end of the J-shaped curve so that the optical axis of the light receiving means is substantially parallel to the optical axis of the light emitting means and adjacent to each other at substantially the same inclination angle. Since the optical fiber is arranged with the tip surface facing the mirror surface, and this optical fiber is fixed to the body portion with a straight portion connected to the end portion curved in the J-shape, the light emitting means and the light receiving means mounting portion Can be integrated into one place to promote downsizing. Further, it is only necessary to arrange the light-emitting side optical fiber and the light-receiving side optical fiber in parallel, positioning becomes easy, and workability during assembly is improved.
In addition, by fixing the optical fiber as the light emitting means and the light receiving means to the trunk portion so as to be slidable in the axial direction of the linear portion, the mirror surface of the tip surface of the end portion of the optical fiber curved in a J-shape It is possible to finely adjust the position in the vertical direction and the position in the rotation direction with respect to the optical fiber, and it is possible to exchange the optical fiber.

Hereinafter, the present invention will be described in detail with reference to the drawings.
[Embodiment 1: Mirror surface cooling type dew point meter]
FIG. 1 is a schematic configuration diagram of a mirror-cooled dew point meter showing an embodiment of a moisture detection apparatus according to the present invention. The mirror-cooled dew point meter 201 has a sensor unit 201A and a control unit 201B.

  In the sensor unit 201 </ b> A, the mirror 10 is attached to the cooling surface 2-1 of the thermoelectric cooling element (Peltier element) 2. The mirror 10 is a silicon chip, for example, and the surface 10-1 is a mirror surface. Further, a thin film resistance temperature detector (temperature detection element) 11 made of, for example, platinum is formed on the joint surface between the mirror 10 and the cooling surface 2-1 of the thermoelectric cooling element 2. A cylindrical heat sink 18 is attached to the heating surface 2-2 of the thermoelectric cooling element 2, and a stainless steel tube 17 whose upper end is curved in a J shape is provided along the heat sink 18. The tube 17 is fixed to a heat sink (body portion) 18 by a straight portion 17B connected to an end portion 17A curved in a J-shape.

  As the tube 17, various tubes P accommodating optical fibers as shown in FIG. 2 can be used. In FIG. 2A, in the tube P, the light-emitting side optical fiber F1 and the light-receiving side optical fiber F2 are arranged side by side. In the tube P, the periphery of the light-emitting side optical fiber F1 and the light-receiving side optical fiber F2 is filled with a potting agent. In FIG. 2 (b), the light emitting side (or light receiving side) optical fiber F1 and the light receiving side (or light emitting side) optical fibers F21 to F24 are provided in the tube P in parallel. In FIG. 2C, the left half of the tube P is the light-emitting side optical fiber F1, and the right half is the light-receiving side optical fiber F2. In FIG. 2D, the light emission side optical fiber F <b> 1 and the light reception side optical fiber F <b> 2 are mixed in the tube P. In FIG. 2E, the central portion in the tube P is the light-emitting side (or light-receiving side) optical fiber F1, and the periphery of the optical fiber F1 is the light-receiving side (or light-emitting side) optical fiber F2.

  In the mirror-cooled dew point meter 201 shown in FIG. 1, the tube P of the type shown in FIG. 2 (a) is used as the tube 17, and an optical fiber 17-1 on the light emitting side and a light receiving side on the inside thereof. The optical fiber 17-2 is accommodated. The distal end surfaces of the light-emitting side optical fiber 17-1 and the light-receiving side optical fiber 17-2 curved in a J shape (light emitting part, light receiving part) are directed to the mirror surface 10-1 of the mirror 10. It is inclined at a predetermined inclination angle with respect to the mirror surface 10-1. As a result, the irradiation direction (optical axis) of the light from the optical fiber 17-1 and the light receiving direction (optical axis) of the light from the optical fiber 17-2 are made parallel, and the same inclination angle is set adjacently. The

  The control unit 201B is provided with a dew point temperature display unit 12, a dew condensation detection unit 13, a Peltier output control unit 14, and a signal conversion unit 15. The dew point temperature display unit 12 displays the temperature of the mirror 10 detected by the temperature detection element 11. The dew condensation detector 13 irradiates the mirror surface 10-1 of the mirror 10 obliquely with a predetermined period from the front end surface of the optical fiber 17-1 at a predetermined period, and receives light reflected through the optical fiber 17-2. The difference between the upper limit value and the lower limit value of the pulsed light (scattered light) is obtained as the intensity of the reflected pulsed light, and a signal S 1 corresponding to the intensity of the reflected pulsed light is sent to the Peltier output control unit 14. The Peltier output control unit 14 receives the signal S1 from the dew condensation detection unit 13, compares the intensity of the reflected pulse light with a predetermined threshold value, and if the intensity of the reflected pulse light has not reached the threshold value. The control signal S2 for increasing the current to the thermoelectric cooling element 2 according to the value of the signal S1, and when the intensity of the reflected pulse light exceeds the threshold value, the current to the thermoelectric cooling element 2 is set to the value of the signal S1. The control signal S <b> 2 that decreases in response to the signal is output to the signal converter 15. The signal conversion unit 15 supplies the thermoelectric cooling element 2 with a current S3 indicated by the control signal S2 from the Peltier output control unit 14.

  In this mirror-cooled dew point meter 201, the sensor unit 201A is placed in the gas to be measured. Further, the dew condensation detection unit 13 irradiates the mirror surface 10-1 of the mirror 10 with pulsed light obliquely at a predetermined cycle from the tip surface of the optical fiber 17-1 (see FIG. 3A). When the mirror surface 10-1 is exposed to the gas to be measured and no condensation occurs on the mirror surface 10-1, almost all of the pulsed light irradiated from the tip surface of the optical fiber 17-1 is regularly reflected. The amount of reflected pulsed light (scattered light) from the mirror surface 10-1 received through the optical fiber 17-2 is extremely small. Accordingly, when no condensation occurs on the mirror surface 10-1, the intensity of the reflected pulse light received through the optical fiber 17-2 is small.

  In the dew condensation detection unit 13, the difference between the upper limit value and the lower limit value of the reflected pulse light received through the optical fiber 17-2 is obtained as the intensity of the reflected pulse light, and the signal S1 corresponding to the intensity of the reflected pulse light is obtained from the Peltier. This is sent to the output control unit 14. In this case, since the intensity of the reflected pulse light is almost zero and has not reached the threshold value, the Peltier output control unit 14 sends a control signal S2 for increasing the current to the thermoelectric cooling element 2 to the signal conversion unit 15. Thereby, the current S3 from the signal converter 15 to the thermoelectric cooling element 2 increases, and the temperature of the cooling surface 2-1 of the thermoelectric cooling element 2 is lowered.

  When the temperature of the cooling surface 2-1 of the thermoelectric cooling element 2 is lowered, that is, the temperature of the mirror 10, the water vapor contained in the gas to be measured is condensed on the mirror surface 10-1 of the mirror 10, and the water molecules are optical fiber. Part of the pulsed light irradiated from the tip surface of 17-1 is absorbed or irregularly reflected. Thereby, the intensity | strength of the reflected pulsed light (scattered light) from the mirror surface 10-1 light-received via the optical fiber 17-2 increases.

  The dew condensation detection unit 13 obtains the difference between the upper limit value and the lower limit value of each pulse of the received reflected pulse light, and uses this difference as the intensity of the reflected pulse light. That is, as shown in FIG. 3B, a difference ΔL between the upper limit value Lmax and the lower limit value Lmin of one pulse of the reflected pulse light is obtained, and this ΔL is used as the intensity of the reflected pulse light. By the process in the dew condensation detection unit 13, the disturbance light ΔX included in the reflected pulse light is removed, and malfunction due to the disturbance light is prevented. A processing method for preventing malfunction by disturbance light using pulsed light in the dew condensation detection unit 13 is referred to as a pulse modulation method. With this process, the mirror cooled dew point meter 201 can eliminate the chamber from the sensor unit 201A.

  Here, when the intensity of the reflected pulse light received through the optical fiber 17-2 exceeds the threshold value, the Peltier output control unit 14 transmits the control signal S2 for reducing the current to the thermoelectric cooling element 2 to the signal conversion unit 15. Send to. Thereby, the fall of the temperature of the cooling surface 2-1 of the thermoelectric cooling element 2 is suppressed, and generation | occurrence | production of dew condensation is suppressed. By suppressing the condensation, the intensity of the reflected pulse light received through the optical fiber 17-2 is reduced, and when the intensity falls below the threshold, the control signal S2 increases the current from the Peltier output control unit 14 to the thermoelectric cooling element 2. Is sent to the signal converter 15. By repeating this operation, the temperature of the cooling surface 2-1 of the thermoelectric cooling element 2 is adjusted so that the intensity of the reflected pulse light received through the optical fiber 17-2 is approximately equal to the threshold value. The adjusted temperature, that is, the temperature at which the dew condensation that has occurred on the mirror surface 10-1 has reached an equilibrium state (dew point temperature) is displayed on the dew point temperature display unit 12 as the dew point temperature.

  In this mirror-cooled dew point meter 201, the attachment portions of the light-emitting side optical fiber 17-1 and the light-receiving side optical fiber 17-2 are gathered in one place, which contributes to the downsizing of the detection unit 201A. Further, since the light-emitting side optical fiber 17-1 and the light-receiving side optical fiber 17-2 are accommodated in the tube 17, the space between the light-emitting side optical fiber 17-1 and the light-receiving side optical fiber 17-2. There is no need for positioning at this point, and the workability during assembly is improved.

  Further, in this mirror-cooled dew point meter 201, the chamber is eliminated from the sensor unit 201A, and the suction pump, the suction tube, the exhaust tube, the flow meter, and the like can be omitted. Further downsizing of 201A is achieved, the assembling property is improved, and the cost is also reduced. Further, since it is not necessary to attach a suction pump, a suction tube, an exhaust tube, a flow meter, etc., installation in a measurement atmosphere is facilitated. The sensor unit 201A is not accompanied by a suction pump, a suction tube, an exhaust tube, a flow meter, or the like, and has two configurations of the sensor unit 201A and the control unit 201B.

  In this mirror-cooled dew point meter 201, the tube 17 containing the light-emitting side optical fiber 17-1 and the light-receiving side optical fiber 17-2 is used in the sensor unit 201A, but the light-emitting side optical fiber 17- 1 and the optical fiber 17-2 on the light receiving side may be fixed in parallel with the heat sink 18 without being accommodated in the tube 17. Fixing the tube 17 containing the light-emitting side optical fiber 17-1 and the light-receiving side optical fiber 17-2 to the heat sink 18 substantially means that the light-emitting side optical fiber 17-1 and the light-receiving side optical fiber 17. -2 is fixed to the heat sink 18.

  Further, as shown in FIG. 4, the straight portion 17B of the tube 17 accommodating the light-emitting side optical fiber 17-1 and the light-receiving side optical fiber 17-2 is sandwiched between the heat sink 18 and the bracket 19 and tightened with the screws 20. May be fixed. As a result, the tube 17 is fixed to the heat sink 18 so as to be slidable in the axial direction of the linear portion 17B, and the end surfaces of the end portions of the optical fibers 17-1 and 17-2 that are curved in a J-shape. Fine adjustment of the position in the vertical direction and the rotational direction with respect to the mirror surface 10-1 becomes possible, and the optical fibers 17-1 and 17-2 can be exchanged.

In the above-described embodiment, the condensation (moisture) generated on the mirror surface 10-1 is detected. However, it is also possible to detect the frost (water) generated on the mirror surface 10-1 with the same configuration. .
In the embodiment described above, the thermoelectric cooling element (Peltier element) 2 is used as the cooling means for cooling the mirror 10, but a helium refrigerator or the like may be used.

[Embodiment 2: Weather meter]
FIG. 5 is a schematic block diagram of a weather meter showing another embodiment of the on-mirror state detection device according to the present invention. The weather meter 202 includes a sensor unit 202A and a rain detection unit 202B. The sensor unit 202A includes a mirror 10 and a body part 21 that supports the mirror 10, and in the same manner as in the first embodiment, a tube 17 whose upper end is curved in a J-shape is formed in the body part 21. It is fixed.

  In this weather meter 202, the rain detection unit 202B irradiates the mirror surface 10-1 of the mirror 10 obliquely with a predetermined cycle from the light-emitting optical fiber 17-1 at a predetermined cycle, and the light-receiving optical fiber 17. The difference between the upper limit value and lower limit value of the reflected pulse light received via -2 is obtained as the intensity of the reflected pulse light, the intensity of this reflected pulse light is compared with a predetermined threshold value, and the reflected pulse light When the intensity exceeds the threshold, it is determined that it has started to rain (rain has been attached to the mirror surface 10-1).

  In this example, rain attached on the mirror surface 10-1 is detected, but snow attached on the mirror surface 10-1 can also be detected by the same configuration. In addition, with the same configuration, it is possible to detect not only rain and snow but also dust and the like.

  Also in the second embodiment, as in the first embodiment, as shown in FIG. 6, as shown in FIG. 6, the straight portion of the tube 17 that houses the light-emitting side optical fiber 17-1 and the light-receiving side optical fiber 17-2. 17B may be sandwiched between the body portion 21 and the bracket 19 and fastened with screws 20 to be fixed. Alternatively, the light-emitting side optical fiber 17-1 and the light-receiving side optical fiber 17-2 may be separately juxtaposed and attached without being accommodated in the tube 17.

1 is a schematic configuration diagram of a mirror-cooled dew point meter showing an embodiment (Embodiment 1) of a moisture detection device according to the present invention. It is a figure which illustrates the structure which provides the optical fiber by the side of light emission, and the optical fiber by the side of light reception in parallel in one tube. It is a figure which shows the pulsed light irradiated with respect to a detection surface back surface, and the reflected pulse light received from a detection surface back surface. It is a figure which shows the structure of the sensor part of the mirror surface dew-type dew point meter which clamped and fixed the linear part of the tube which accommodated the optical fiber with the heat sink and the bracket. It is a schematic block diagram of the weather meter which shows other embodiment (Embodiment 2) of the on-mirror surface state detection apparatus which concerns on this invention. It is a figure which shows the structure of the sensor part of the weather meter which clamped and fixed the linear part of the tube which accommodated the optical fiber with the trunk | drum and the bracket with the screw | thread. It is a figure which shows the principal part of the conventional mirror surface cooling-type dew point meter which employ | adopted the regular reflection light detection system. It is a figure which shows the principal part of the conventional mirror surface cooling-type dew point meter which employ | adopted the scattered light detection system. It is a perspective view which shows the attachment structure of the mirror and temperature detection element in the conventional mirror surface cooling dew point meter. It is a figure which shows the principal part of the conventional weather meter which employ | adopted the regular reflection light detection system. It is a figure which shows the principal part of the conventional weather meter which employ | adopted the scattered light detection system.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 2 ... Thermoelectric cooling element (Peltier element), 2-1 ... Cooling surface, 2-2 ... Heating surface, 10 ... Mirror, 10-1 ... Mirror surface, 11 ... Temperature detection element (thin film resistance thermometer), 12 ... Dew point Temperature display unit, 13 ... dew condensation detection unit, 14 ... Peltier output control unit, 15 ... signal conversion unit, 17 ... tube, 17-1 ... light-emitting side optical fiber, 17-2 ... light-receiving side optical fiber, 18 ... heat sink (Torso), 19 ... Bracket, 20 ... Screw, 21 ... Trunk, 201 ... Mirror surface dew point meter, 201A ... Sensor unit, 201B ... Control unit, 202 ... Weather meter, 202A ... Sensor unit, 202B ... Rain detection Department.

Claims (4)

A light emitting means for irradiating light obliquely to the mirror surface of the mirror;
The optical axis of the light emitting means and the optical axis thereof are substantially parallel, and are adjacent to each other with substantially the same inclination angle, and receive the scattered light of the light emitted from the light emitting means to the mirror surface. Means,
Means for detecting a state on the mirror surface based on scattered light received by the light receiving means;
A state detection device on a mirror surface provided with a body portion for supporting the mirror,
The light emitting means and the light receiving means are optical fibers arranged with a tip surface of an end curved in a J-shape facing the mirror surface,
The optical fiber is a straight portion connected to the end portion bent in the J-shape, and is fixed to the trunk portion. In the on-mirror state detection device according to claim 1,
The on-mirror surface state detection device, wherein the optical fiber is fixed to the body portion so as to be slidable in the axial direction of the linear portion. A mirror whose mirror surface is exposed to the gas to be measured;
Cooling means for cooling the mirror;
A light emitting means for irradiating light obliquely with respect to the mirror surface;
The optical axis of the light emitting means and the optical axis thereof are substantially parallel, and are adjacent to each other with substantially the same inclination angle, and receive the scattered light of the light emitted from the light emitting means to the mirror surface. Means,
Means for detecting moisture generated on the mirror surface of the mirror cooled by the cooling means based on scattered light received by the light receiving means;
A moisture detecting device comprising a body portion for supporting the mirror via the cooling means,
The light emitting means and the light receiving means are optical fibers arranged with a tip surface of an end curved in a J-shape facing the mirror surface,
The said optical fiber is being fixed to the said trunk | drum by the linear part connected to the edge part curved by the said J shape. The moisture detection apparatus characterized by the above-mentioned. In the moisture detection apparatus according to claim 3,
The said optical fiber is being fixed to the said trunk | drum so that sliding in the axial direction of the said linear part is a moisture detection apparatus characterized by the above-mentioned.

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