JP2007127137A - Liquid transfer device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid transfer device for transferring liquid by driving a diaphragm with a piezoelectric material element which has an uncomplicated construction permitting efficient deformation of the diaphragm and effective amplification of the deformation of the diaphragm. <P>SOLUTION: In the liquid transfer device 1, a piezoelectric actuator plate 10 is arranged so as to close a pressure chamber 21a storing liquid therein. The piezoelectric actuator plate 10 is equipped with a piezoelectric material layer 13 constructed so as to be contractible in the planar direction by the application of an electric field and with the diaphragm 14 adhering to the piezoelectric material layer 13 so as to be superimposed thereon. The piezoelectric material layer 13 is arranged at least at the peripheral edge of the pressure chamber 21a. In an internal region closer to the center than to the peripheral edge, however, the piezoelectric material layer 13 is not arranged or arranged thinner than that arranged at the peripheral edge. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a liquid transfer device, and more particularly to a liquid transfer device driven by a piezoelectric material element.

2. Description of the Related Art Conventionally, as a liquid transfer device, for example, there is provided an ejection device that deflects a diaphragm that closes a plurality of pressure chambers containing liquid by a piezoelectric material element bonded thereto and ejects the liquid droplets from a nozzle. . In such a liquid transfer device, since the pressurization of the pressure chamber can be amplified as the amount of deformation of the diaphragm increases, a configuration in which the diaphragm is more easily deformed is desired.
JP-A-9-104109

  Incidentally, as a technique for amplifying the deformation of the diaphragm, for example, a technique as described in Patent Document 1 is provided. This document describes a technology that includes a unimorph type piezoelectric element formed on a plurality of projecting pieces projecting from the outer peripheral side to the center side of a pressure chamber that is circular in plan view, and that presses the central portion of the diaphragm constituting the pressure chamber. ing. According to this technique, the bulge amount of the diaphragm can be increased, but on the other hand, the configuration is not simple, and the piezoelectric element is deformed by the deformation of the piezoelectric element during driving. Since it is necessary to deform both the projecting pieces and the diaphragm provided on the upper and lower sides, it is difficult to say that the structure has good deformation efficiency.

  The present invention has been made based on the above circumstances, and in a liquid transfer device that transfers a liquid by driving a vibration plate by a piezoelectric material element, the vibration plate can be efficiently used without using a complicated configuration. It is an object of the present invention to provide a structure that can be deformed to effectively amplify the deformation amount of the diaphragm.

As means for achieving the above object, the invention of claim 1 is characterized in that a piezoelectric actuator plate is disposed so as to close a pressure chamber in which the liquid is accommodated, and the piezoelectric actuator plate is bent and deformed to deform the liquid. In the liquid transfer device for transferring from the opening connected to the pressure chamber, the piezoelectric actuator plate is polarized in the thickness direction so as to contract in the surface direction by application of an electric field in the thickness direction, and at least a peripheral edge of the pressure chamber On the other hand, in the inner region closer to the center than the peripheral portion, a piezoelectric material layer that is not disposed or is thinner than the portion disposed in the peripheral portion, and a plate shape deflection and layers which are joined to be formed overlapping with respect to the piezoelectric material layer, and then name the laminated structure having the piezoelectric material layer Is intended to be laminated on a side opposite to the pressure chamber with respect to serial deflection layer, the contraction in the surface direction of the piezoelectric material layer, and wherein the deflecting said flexure layer on the opposite side of the pressure chamber .

  According to a second aspect of the present invention, in the liquid transfer device according to the first aspect, the flexible layer is formed of a conductive material, and the piezoelectric material layer is sandwiched between both sides to apply an electric field to the piezoelectric material layer. It is also used as one of the arranged electrodes.

  According to a third aspect of the present invention, in the liquid transfer device according to the first aspect, the flexible layer is formed of a non-conductive material, and at least the pressure chamber is provided between the piezoelectric material layer and the flexible layer. An electrode for applying an electric field to the piezoelectric material layer is formed at the periphery.

According to a fourth aspect of the present invention, in the liquid transfer device according to any one of the first to third aspects, the pressure chamber has an elliptical region in which the piezoelectric actuator plate is disposed, and the piezoelectric material layer Are arranged in a strip shape in the longitudinal direction of the pressure chamber.

According to a fifth aspect of the present invention, in the liquid transfer device according to the first aspect, at least one of the electrodes disposed on both sides of the piezoelectric material layer in order to apply an electric field to the piezoelectric material layer is It is arrange | positioned at the peripheral part of the said pressure chamber, It is characterized by the above-mentioned.

According to a sixth aspect of the present invention, in the liquid transfer device according to the fifth aspect , the at least one electrode is annularly arranged over the entire circumference of the peripheral edge of the pressure chamber.

A seventh aspect of the present invention is the liquid transfer device according to any one of the first to sixth aspects, wherein a plurality of the pressure chambers are arranged, and the piezoelectric actuator plates are connected across the plurality of pressure chambers. It is arranged.

According to an eighth aspect of the present invention, in the liquid transfer device according to any one of the first to seventh aspects, the pressure chamber has an elliptical area in which the piezoelectric actuator plate is disposed, and the internal area is The elliptical shape is formed to have a length of 1/3 or more of the short direction.

<Invention of Claim 1>
According to the configuration of claim 1, the piezoelectric material layer configured to be contractible in the surface direction by application of an electric field is configured to be disposed at least at the peripheral portion of the pressure chamber, and on the other hand, more central than the peripheral portion. The piezoelectric material layer is not disposed in the inner region closer to the inner region, or the thinner one is disposed than the portion disposed in the peripheral portion, so that the rigidity of the piezoelectric actuator plate is lowered in the inner region. Therefore, the deformation of the flexible layer can be effectively amplified.

<Invention of Claim 2>
According to the configuration of claim 2, since the flexible layer is also used as one electrode for applying an electric field to the piezoelectric material layer, it is not necessary to provide one electrode specially, which is advantageous in terms of manufacturing cost. Become.

<Invention of Claim 3>
According to the configuration of the third aspect, when the flexible layer is formed of a non-conductive material, an electric field can be applied to the piezoelectric material layer disposed at the peripheral portion of the pressure chamber .

<Invention of Claim 4 >
According to the configuration of the fourth aspect , the pressure chamber is configured so that the region where the piezoelectric actuator plate is disposed is elliptical, and the piezoelectric material layer is linearly arranged in the longitudinal direction of the pressure chamber. While the piezoelectric material layer has a simple arrangement configuration, the flexible layer can be efficiently deformed by the piezoelectric material layer.

<Invention of Claim 5 >
As in the structure of claim 5 , if at least one of the electrodes disposed on both sides of the piezoelectric material layer is disposed at the peripheral portion of the pressure chamber and not disposed in the inner region, the peripheral portion The piezoelectric material layer can be driven while the rigidity of the inner region can be suppressed.

<Invention of Claim 6 >
If at least one of the electrodes is arranged in an annular shape over the entire periphery of the periphery of the pressure chamber as in the configuration of the sixth aspect , it is a preferable configuration for preventing one of the electrodes from being arranged in the internal region.

<Invention of Claim 7 >
According to the configuration of claim 7 , in the case where a plurality of pressure chambers are arranged, the piezoelectric material layer is connected and arranged across the plurality of pressure chambers. This is an advantageous configuration for improving the manufacturing efficiency.
<Invention of Claim 8 >
If the area where the piezoelectric actuator plate is arranged in the pressure chamber is configured in an elliptical shape as in the configuration of claim 8 , and the internal region is formed in a length of 1/3 or more in the short direction of the elliptical shape, The flexible layer will be deformed more efficiently.

<First Embodiment>
A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a vertical cross-sectional view of the liquid transfer device according to the present embodiment when cut along the longitudinal direction of the pressure chamber. FIG. 2 relates to the liquid transfer device shown in FIG. It is a longitudinal cross-sectional view at the time of cutting along the arrangement direction. FIG. 3 shows a plan view of FIG. Further, FIG. 4 is an explanatory view for explaining the operating state of the liquid transfer device.

  As illustrated in FIGS. 1 and 2, the liquid transfer device 1 according to the present embodiment is configured as a liquid ejecting apparatus that ejects liquid (here, an ink jet head that functions as a liquid ejecting apparatus is illustrated). And a cavity plate 20 having a plurality of pressure chambers 21a in which ejected liquid (specifically ink) is accommodated, and a piezoelectric actuator plate 10 joined on the cavity plate 20 so as to close the pressure chambers 21a. Has been.

The cavity plate 20 is configured as an ink flow path and has a multilayer structure, and a nozzle plate 24 in which a plurality of ink ejection nozzles 24a (the nozzles 24a correspond to the apertures of the present invention) are arranged in parallel. A manifold plate 23 formed on the nozzle plate 24, a flow path plate 22 formed on the manifold plate 23, and a pressure chamber plate 21 formed on the flow path plate 22 are each formed in a substantially flat plate shape and arranged. Yes. The pressure chamber plate 21, the flow path plate 22, the manifold plate 23, and the nozzle plate 24 are joined to each other by an epoxy thermosetting adhesive.

  The pressure chamber plate 21 is formed of a metal material such as stainless steel, and a plurality of pressure chambers 21a for accommodating ink for selectively ejecting based on the operation of the piezoelectric actuator plate 10 described later are juxtaposed inside. Similarly, the flow path plate 22 is made of a metal material such as stainless steel, and has a pressure flow path 22a and a manifold flow path 22b communicating with both ends of the pressure chamber 21a. The manifold plate 23 is also formed of a metal material such as stainless steel, and a manifold channel 23a communicating with a liquid tank (not shown) and a nozzle channel 23b connected to the pressure channel 22a are formed therein. . Among these, as shown in FIG. 3, the manifold 23a is extended in the arrangement direction of the pressure chambers 21a so as to straddle the plurality of pressure chambers 21a.

  Further, the nozzle plate 24 is formed of a polyimide-based synthetic resin material, and a plurality of nozzles 24a connected to the nozzle flow path 23b are formed as shown in FIG. From the configuration described above, the liquid (ink) stored in the liquid tank is supplied to the nozzle 24a via the manifold 23a, the manifold channel 22b, the pressure chamber 21a, the pressure channel 22a, and the nozzle channel 23b.

Next, the piezoelectric actuator plate 10 will be described.
As shown in FIGS. 1 and 2, the piezoelectric actuator plate 10 has a laminated structure, is formed in a substantially flat plate shape from a conductive metal material such as stainless steel, and has a diaphragm 14 corresponding to the flexible layer of the present invention. ing. Further, a piezoelectric material layer 13 is disposed above the diaphragm 14, and the upper electrode 11 is provided on the piezoelectric material layer 13 so as to face the diaphragm 14. The diaphragm 14 is used as a lower electrode among electrodes disposed on both upper and lower sides of the piezoelectric material layer 13 in order to apply an electric field to the piezoelectric material layer 13.

  The upper electrode 11 is a thin film-like conductor that is affixed or printed on the piezoelectric material layer 13 and is electrically connected to a positive (+) power source of the drive circuit via a switch element (not shown). The configuration is made. On the other hand, the diaphragm 14 corresponding to the lower electrode is connected to the ground of the drive circuit.

  As shown in FIGS. 1, 2, and 3, the piezoelectric material layer 13 is annularly arranged over the entire periphery of the peripheral edge of the pressure chamber 21a. The upper electrode 11 has the same planar shape as the piezoelectric material layer 13 and is disposed on the upper layer of the piezoelectric material layer 13. Like the piezoelectric material layer 13, the upper electrode 11 has an annular shape over the entire circumference of the pressure chamber 21. Is arranged. The pressure chamber 21a has an elliptical shape (specifically, a substantially oval shape) when viewed from above, and the region where the piezoelectric material layer 13 is disposed is an elliptical region smaller than this. Here, the piezoelectric material layer 13 is formed in an annular shape with a substantially constant width, and a hole 13a penetrating the piezoelectric material layer 13 in the thickness direction is formed in a region corresponding to the central portion of the pressure chamber 21a. The

  As shown in FIGS. 1 and 2, in the piezoelectric actuator plate 10, only the diaphragm 14 is disposed in the inner region C of the piezoelectric material layer 13 corresponding to the central portion of the pressure chamber 21a. The upper electrode 11 is not disposed, and the inner region C is configured to have low rigidity. Since the piezoelectric material layer 13 is not disposed in the inner region C, the piezoelectric material layer 13 does not directly act on the vibration plate 14, and the piezoelectric material layer 13 is not in the portion other than the inner region C (that is, the peripheral portion). It is configured to bend based on the deformation of the part that acts on the part (the part to which the piezoelectric material layer 13 is joined in the vibration plate 14). The operation during driving will be described later.

  Further, as shown in FIG. 3, when viewed in plan, the peripheral shape of the inner region C inside the piezoelectric material layer 13 (that is, the opening shape of the hole 13a) is an elliptical shape that is slightly smaller than the shape of the pressure chamber 21a. Configured as an area. Specifically, a hole 13 a that opens in an elliptical shape is formed near the center of the piezoelectric material layer 13, and a region where the hole 13 a is formed in the plane direction is an internal region C. Here, the hole 13a is arranged in the external region of the pressure channel 22a in the surface direction so that the hole 13a does not reach the region of the pressure channel 22a. In addition, the piezoelectric material layer 13 as a whole is configured in an external region of the manifold channel 22b. Such a hole 13a can be formed by performing, for example, etching, machining, or the like on the plate-like material to be the piezoelectric material layer 13. Further, in the present embodiment, as shown in FIG. 3, the inner region C is located at substantially the center of the pressure chamber 21a, and the width of the pressure chamber 21a in the short direction is about the extra width of the pressure chamber 21a. It has a length of 1/3. That is, when the pressure chamber 21a is cut in the short direction, the piezoelectric material layer 13 is disposed on both side edges of the pressure chamber 21a and has a length of about 1/3 of the width of the pressure chamber 21a. An internal region C having a length of about 1/3 of the width of the pressure chamber 21a is disposed so as to be sandwiched between the two piezoelectric material layers 13. This enables efficient deformation.

  Further, the piezoelectric material layer 13 is formed of a piezoelectric ceramic material made of lead zirconate titanate (PZT), but is not limited to this, and any piezoelectric material such as barium titanate, lead titanate, and Rochelle salt. Can be used. Further, the piezoelectric material layer 13 is formed in a layer shape with a uniform thickness on the vibration plate 14 as shown in FIGS. In order to join the piezoelectric material layer 13 and the vibration plate 14, for example, the upper electrode 11 is disposed on the piezoelectric material layer 13 formed in a layer shape in advance, and this is connected to the vibration plate 14 with a conductive adhesive. For example, it can be formed by bonding. Note that the forming method is not limited to this.

Next, the driving operation of the liquid transfer apparatus 1 will be described with reference to FIGS.
In the liquid transfer device 1 according to the present embodiment, no voltage is applied between the electrodes at all times, and the piezoelectric actuator plate 10 is not bent as shown in FIG. When the liquid needs to be transferred (here, when a droplet needs to be ejected from one nozzle 24a of the liquid transfer device 1), the power supply voltage is applied to the upper electrode 11 by switching the switch element. As a result, a potential difference is generated between the upper electrode 11 and the diaphragm 14, and an electric field is applied to the piezoelectric material layer 13. When the piezoelectric material layer 13 is polarized in the electric field application direction, the piezoelectric material layer 13 expands in the thickness direction (vertical direction in FIG. 2) and contracts in the surface direction (horizontal direction in FIG. 2).

  As shown on the left side of FIG. 4, the piezoelectric material layer 13 disposed in the peripheral portion of the pressure chamber 21 a has a vibration plate 14 having rigidity on the lower surface thereof, so that the piezoelectric material layer 13 faces in the plane direction. Due to this contraction, the region of the piezoelectric actuator plate 10 where the piezoelectric material layer 13 is disposed tends to bend toward the pressure chamber 21a (downward in FIG. 4). Here, the outer peripheral portion of the piezoelectric material layer 13 is fixed to the cavity plate 20 via the diaphragm 14, and the displacement thereof is regulated. Therefore, a displacement similar to a cantilever is caused. And the site | part arrange | positioned in the internal area | region C of the piezoelectric actuator plate 10 (namely, site | part arrange | positioned in the internal area | region C of the diaphragm 14) receives the influence of the bending of the piezoelectric material layer 13 as mentioned above, and the pressure chamber 21a. It bends further to the opposite side. As a result, the volume of the pressure chamber 21a increases and the inside of the pressure chamber 21a becomes negative pressure, and the liquid is filled into the pressure chamber 21a from the liquid tank through the communicating manifold 23a and manifold flow path 22b.

  After the liquid is supplied into the pressure chamber 21a, the switch element is switched again, and when the application of the power supply voltage from the drive circuit to the upper electrode 11 is stopped, the piezoelectric material layer 13 is not contracted in the surface direction. As shown in FIG. 2, the piezoelectric actuator plate 10 returns again to a position without bending. As a result, the volume of the pressure chamber 21a decreases, the pressure in the pressure chamber 21a increases, and droplets are ejected from the nozzle 24a via the pressure channel 22a and the nozzle channel 23b.

Second Embodiment
Next, a second embodiment will be described with reference to FIG.
In the second embodiment, most of the configuration is the same as that of the first embodiment, and only a part of the configuration is different. Therefore, the difference will be described, and the same portions are denoted by the same reference numerals and detailed description will be omitted. . In the liquid transfer device 1 according to the second embodiment, as shown in FIG. 5, the vibration plate 14 corresponding to the bending layer is formed of a non-conductive material, and at least between the piezoelectric material layer 13 and the vibration plate 14. A lower electrode 12 for applying an electric field to the piezoelectric material layer 13 is formed at the peripheral edge of the pressure chamber. In the configuration of FIG. 5, the lower electrode 12 is formed so as to straddle the plurality of pressure chambers 21a, but a lower electrode may be disposed for each pressure chamber.

<Third Embodiment>
Next, a third embodiment will be described with reference to FIG.
In the third embodiment, most of the configuration is the same as that of the first embodiment, and only a part of the configuration is different. Therefore, the difference will be described, and the same portions are denoted by the same reference numerals and detailed description will be omitted. . In the first and second embodiments, the hole 13a is formed so as to penetrate the piezoelectric material layer in the inner region C, but in the third embodiment, the inner region C does not penetrate the piezoelectric material layer 13. As shown in FIG. 6, the liquid transfer device 1 according to the third embodiment has a configuration in which the thin portion 13 b configured to be thinner than the portion disposed in the peripheral portion in the piezoelectric material layer 13 is disposed in the inner region C. Is shown. The thin portion 13b formed in the inner region C has a configuration in which no electrode is disposed on the upper portion and no contraction action occurs. In addition, as long as it is electrically insulated from the upper electrode 11 arrange | positioned on the peripheral part of the piezoelectric material layer 13, the electrode may be formed also on this thin part 13b. Alternatively, when the thin portion 13b is covered with a low dielectric, the upper electrode 11 can be formed on the piezoelectric material layer 13 regardless of whether it is the thin portion 13a. In such a configuration, even when a voltage is applied, an electric field is hardly generated in the thin portion 13b, and the piezoelectric material layer 13 constituting the thin portion 13a is practically not displaced by the piezoelectric effect. That is, even if the upper electrode 11 is formed over the entire piezoelectric material layer 13 formed corresponding to the pressure chamber 21a, the piezoelectric material layer is formed in the thin portion 13a that is a region where the low dielectric is formed. 13 hardly generates an electric field. An electric field is applied to the piezoelectric material layer 13 only in the region where the low dielectric is not formed. Here, as the low dielectric, insulating ceramic materials such as silicon nitride (relative dielectric constant 7.5), silicon oxide (relative dielectric 3.9), alumina (relative dielectric constant 9.6), and photocurability Resin materials such as low dielectric resin (relative dielectric constant 3.2) and low dielectric constant organic interlayer insulating film (relative dielectric constant 2.8) are preferably used and formed by sputtering, vapor deposition or coating, respectively. The When the driving voltage is 20 V to 30 V, the film thickness of these low dielectrics is 1 micron to 3 microns, and no electric field is generated in the piezoelectric material layer coated with the low dielectric.

<Fourth embodiment>
Next, a fourth embodiment will be described with reference to FIG.
In the liquid transfer device 1 according to the fourth embodiment, a configuration is shown in which a plurality of pressure chambers 21a are arranged so that the piezoelectric actuator plates 10 are connected across the plurality of pressure chambers 21a. Specifically, in the upper part of the diaphragm 14 straddling the plurality of pressure chambers 21a, the piezoelectric material layer 13 that similarly straddles the plurality of pressure chambers 21a is disposed. As in the third embodiment, the piezoelectric material layer 13 is formed with a thin portion 13b in the inner region C of each pressure chamber, and the periphery of the thin portion 13b is formed thick, and the upper electrode 11 is formed above the thin portion 13b. Is arranged. A portion where the upper electrode 11 is provided (that is, a contractible portion) is configured in a ring shape in plan view like the piezoelectric material layer in the first embodiment or the like. On the other hand, the connection part 13c is comprised thinly by the structure which connects the shrinkable parts arrange | positioned for every pressure chamber. The thin portion 13b and the connecting portion 13c are configured such that the upper electrode 11 is not disposed and the contraction is impossible. In the present embodiment, since the adjacent pressure chambers 21a are arranged via the connecting portion 13c configured in a thin state, the displacement of the piezoelectric actuator plate 10 that occurs when the pressure chambers 21a are driven is It is difficult to reach the pressure chamber 21a adjacent to this, which is effective in reducing crosstalk. If the upper electrode 11 is not provided, the connecting portion 13c does not spontaneously move due to the piezoelectric effect, and does not contribute to the amount of displacement in the region corresponding to the pressure chamber 21a. Accordingly, the connecting portion 13c is not necessarily formed in a thin state, and may be formed with the same thickness as the piezoelectric material layer 13 in the portion where the upper electrode 11 is provided.

<Fifth Embodiment>
Next, a fifth embodiment will be described with reference to FIG.
In the first embodiment and the like, the piezoelectric material layer configured to have an annular shape in plan view is illustrated, but may not be in an annular shape as long as the piezoelectric material layer is disposed on the peripheral portion of the pressure chamber 21a. In the present embodiment, an example is shown in which the piezoelectric material layer is arranged in a band shape in the longitudinal direction of the pressure chamber 21a in the pressure chamber 21a where the piezoelectric actuator plate 10 is disposed in an elliptical shape. Here, the upper electrode 11 has substantially the same shape as the piezoelectric material layer, and is disposed on the upper portion of the piezoelectric material layer. The piezoelectric material layer is disposed over a large area in the longitudinal direction of the pressure chamber 21a.

<Sixth Embodiment>
FIG. 9 shows an embodiment in which the liquid transfer device 1 according to the present invention is applied to a micropump 100. The micropump 100 is configured by joining a pump adapter AP to the lower surface of the liquid transfer apparatus 1 according to the first embodiment of the present invention, and the pump adapter AP has its lower part immersed in a liquid source. The operation of the liquid transfer device 1 is the same as that of the first embodiment, but the volume of the pressure chamber 21a is increased by bending the piezoelectric actuator plate 10 to the side opposite to the pressure chamber 21a, and the inlet IP is supplied from the liquid source. The liquid is sucked through, and the liquid is transferred from the outlet OP to the outside through the pressure chamber 21a.

<Other embodiments>
The present invention is not limited to the embodiments described with reference to the above description and the drawings. For example, the following embodiments are also included in the technical scope of the present invention, and further depart from the gist other than the following descriptions. Various modifications can be made without departing from the scope.
(1) The upper electrode may be connected to the ground of the drive circuit, and the lower electrode may be connected to the plus (+) power source of the drive circuit.
(2) The liquid transfer device according to the present invention includes a device for transferring liquid in any state including droplets and mists from the opening connected to the pressure chamber to the outside. All forms such as injection are included.
(3) In the above embodiment, an ink jet head for ejecting ink from a printer has been described as an example.
(4) In the third embodiment, it is necessary to form the upper electrode 11 while avoiding the thin portion 13b by forming the low dielectric layer in the inner region C where the piezoelectric material layer 13 is formed in a thin state. Disappear. Such application of the low dielectric layer to the inner region C is also possible for other embodiments. That is, the thin portion 13a may or may not be provided as long as it has a dielectric strength that does not cause breakdown with respect to the drive voltage to which the low dielectric is applied. Alternatively, the diaphragm may be made of a conductive material or a non-conductive material.

It is a longitudinal cross-sectional view at the time of cut | disconnecting along the longitudinal direction of a pressure chamber about the liquid transfer apparatus which concerns on 1st Embodiment. FIG. 2 is a longitudinal sectional view of the liquid transfer device shown in FIG. 1 when cut along the arrangement direction of a plurality of pressure chambers. It is a top view of the liquid transfer apparatus shown in FIG. It is sectional drawing which showed the operation state of the liquid transfer apparatus shown in FIG. It is a principal part enlarged view of the liquid transfer apparatus by 2nd Embodiment. It is a principal part enlarged view of the liquid transfer apparatus by 3rd Embodiment. It is a principal part enlarged view of the liquid transfer apparatus by 4th Embodiment. It is a top view of the liquid transfer apparatus by 5th Embodiment. It is a principal part enlarged view of the liquid transfer apparatus by 6th Embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Liquid transfer apparatus 10 ... Piezoelectric actuator plate 11 ... Upper electrode 13 ... Piezoelectric material layer 14 ... Vibrating plate (flexing layer)
21a ... Pressure chamber 24a ... Nozzle (open hole)
C ... Internal area

Claims (9)

In a liquid transfer device in which a piezoelectric actuator plate is arranged so as to close a pressure chamber in which liquid is stored, and the piezoelectric actuator plate is bent and deformed to transfer the liquid from an opening connected to the pressure chamber.
The piezoelectric actuator plate is
It is configured to be contractible in the surface direction by application of an electric field, and is disposed at least in the peripheral portion of the pressure chamber, and on the other hand, in the inner region closer to the center than the peripheral portion, or not disposed in the peripheral portion. A piezoelectric material layer in which a thinner one than the portion to be disposed is disposed;
A flexible layer formed in a plate shape and joined to overlap with the piezoelectric material layer;
A liquid transfer apparatus having a laminated structure having The flexible layer is formed of a conductive material, and is used as one of electrodes disposed on both sides of the piezoelectric material layer in order to apply an electric field to the piezoelectric material layer. The liquid transfer apparatus according to claim 1, wherein the liquid transfer apparatus is a liquid transfer apparatus. The flexible layer is formed of a non-conductive material, and an electrode for applying an electric field to the piezoelectric material layer is formed between the piezoelectric material layer and the flexible layer at least at the peripheral edge of the pressure chamber. The liquid transfer apparatus according to claim 1, wherein the liquid transfer apparatus is provided. 4. The liquid transfer device according to claim 1, wherein the piezoelectric material layer is annularly arranged over the entire periphery of the peripheral edge of the pressure chamber. 5. The pressure chamber has an elliptical area where the piezoelectric actuator plate is disposed,
4. The liquid transfer device according to claim 1, wherein the piezoelectric material layer is disposed in a band shape in a longitudinal direction of the pressure chamber. 5. The at least one of electrodes disposed on both sides of the piezoelectric material layer in order to apply an electric field to the piezoelectric material layer is disposed on a peripheral portion of the pressure chamber. 2. The liquid transfer device according to 1. The liquid transfer device according to claim 6, wherein the at least one electrode is arranged in an annular shape over the entire periphery of the peripheral edge of the pressure chamber. A plurality of the pressure chambers are arranged,
The liquid transfer device according to claim 1, wherein the piezoelectric actuator plate is connected and disposed across the plurality of pressure chambers. The pressure chamber has an elliptical area where the piezoelectric actuator plate is disposed,
The liquid transfer device according to any one of claims 1 to 8, wherein the inner region is formed to have a length of 1/3 or more of the elliptical short direction.