JP2007123811A - Method of manufacturing solid electrolytic capacitor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a solid electrolytic capacitor which can allow conductive paste to sufficiently adhere to the corner of a predetermined part of an element intermediate. <P>SOLUTION: In this solid electrolytic capacitor manufacturing method, air blow processing for blowing air A is performed for a predetermined portion 27a of a comb tooth portion 27 while pulling up the comb tooth portion 27 from silver paste 25 in a paste tank 26. In this way, the silver paste 25 can be circulated toward the corner of the predetermined portion 27a of the comb tooth portion 27 to which the silver paste 25 hardly adhere. Accordingly, the sufficient adhesion of the silver paste 25 to the corner of the predetermined portion 27a of the comb tooth 27, i.e. wrap-around can be positively achieved. As a result, the film thickness of the silver paste 25 in the predetermined portion 27a can be made uniform. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a method for manufacturing a solid electrolytic capacitor.

As a conventional method for producing a solid electrolytic capacitor, an element intermediate comprising a valve metal substrate, a dielectric layer formed on the valve metal substrate, and a solid electrolyte layer formed on the dielectric layer is obtained as a predetermined intermediate body. What includes a step of immersing in a conductive paste so that the conductive paste adheres to the portion is known (for example, see Patent Document 1).
JP-A-6-77097

  However, in the above-described conventional technique, the thickness of the conductive paste attached to the corner portion may be extremely thin at a predetermined portion of the element intermediate immersed in the conductive paste. In such a case, since the conductive paste becomes a conductor layer that forms a counter electrode with the valve metal substrate in the solid electrolytic capacitor, the electrical resistance of the conductor layer at the corners becomes high. As a result, the ESR (Equivalent Series Resistance) of the solid electrolytic capacitor varies, or the frequency characteristic of the solid electrolytic capacitor capacity deteriorates.

  Therefore, the present invention has been made in view of such circumstances, and provides a method for manufacturing a solid electrolytic capacitor capable of sufficiently attaching a conductive paste to a corner of a predetermined portion of an element intermediate. For the purpose.

  In order to achieve the above object, a method of manufacturing a solid electrolytic capacitor according to the present invention includes a valve metal base, a dielectric layer formed on the valve metal base, a solid electrolyte layer formed on the dielectric layer, A method of manufacturing a solid electrolytic capacitor including a step of immersing an element intermediate including the element intermediate in a conductive paste so that the conductive paste adheres to a predetermined portion thereof, wherein the conductive paste adhered to the element intermediate is fixed Before performing, a gas is blown onto a predetermined portion of the element intermediate.

  In this method of manufacturing a solid electrolytic capacitor, gas is blown onto a predetermined portion of the element intermediate before the conductive paste attached to the element intermediate is fixed. Thereby, the conductive paste can be made to flow toward the corners of the predetermined portion of the element intermediate to which the conductive paste is difficult to adhere. Therefore, according to the method for manufacturing the solid electrolytic capacitor, it is possible to reliably achieve the so-called wraparound by sufficiently attaching the conductive paste to the corners of the predetermined portion of the element intermediate. As a result, the film thickness of the conductive paste in the part can be made uniform.

  In addition, the gas is preferably sprayed so that the conductive paste fits in a predetermined portion of the element intermediate. In this case, it is possible to prevent the conductive paste from protruding from a predetermined portion of the element intermediate body by the blown gas, and it is possible to attach the conductive paste to the predetermined portion with high accuracy.

  Furthermore, it is preferable that the gas is sprayed while the immersed element intermediate is removed from the conductive paste. Thereby, the manufacturing time of the solid electrolytic capacitor can be further shortened, and the productivity of the solid electrolytic capacitor can be improved. In addition, since the change in the viscosity of the conductive paste over time is suppressed, the viscosity of the conductive paste can be easily controlled, and the conductive paste can be attached to a predetermined portion of the element intermediate with high accuracy. It becomes possible.

  Further, the gas is in a direction having an angle of 20 ° to 80 ° with respect to the surface of the predetermined portion so that the conductive paste flows on the surface of the predetermined portion toward the predetermined corner portion of the predetermined portion. It is preferable to spray, and it is more preferable to spray in a direction having an angle of 40 ° to 60 ° with respect to the surface of the predetermined portion. In this case, since the conductive paste easily flows to the corners of the predetermined part of the element intermediate, the conductive paste is more sufficiently adhered to the corners of the predetermined part of the element intermediate, that is, the wraparound is more reliably performed. The film thickness of the conductive paste in the part can be made more uniform.

  Moreover, it is preferable that gas is sprayed on a predetermined part with the pressure of 1 Mpa or less. In this case, the conductive paste is prevented from flowing too much by blowing the gas, and the conductive paste is more sufficiently adhered to the corner of the predetermined part of the element intermediate, that is, the wraparound is more reliably achieved. It is possible to make the film thickness of the conductive paste in that portion even more uniform.

  According to the present invention, the conductive paste can be sufficiently adhered to the corners of the predetermined portion of the element intermediate.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In the present embodiment, terms such as “upper” and “lower” are based on the state shown in the drawings and are for convenience.

  As shown in FIG. 1, the solid electrolytic capacitor 1 includes a printed circuit board 2. The printed circuit board 2 has a substrate 3 made of an epoxy resin or the like. On the upper surface of the substrate 3, anode wiring 4 and cathode wiring 5 are patterned with copper or the like, and on the lower surface of the substrate 3, anode terminals 6 are formed. The cathode terminal 7 is patterned with copper or the like. The anode wiring 4 and the anode terminal 6 are electrically connected by a plating layer 9 formed on the inner wall surface of the through hole 8 provided in the substrate 3. Similarly, the cathode wiring 5 and the cathode terminal 7 are connected to the substrate. 3 are electrically connected by a plating layer 9 formed on the inner wall surface of a through hole 8 provided in 3.

  A capacitor element laminate 10 is fixed on the printed board 2. The capacitor element laminate 10 is configured by laminating four layers of capacitor elements 11.

  The capacitor element 11 has a foil-like valve metal substrate 12 made of a valve metal such as aluminum, tantalum, or niobium. The valve metal base 12 includes a capacitor portion 12 a located on the cathode wiring 5 of the printed board 2 and an electrode portion 12 b extending from the capacitor section 12 a to the anode wiring 4 of the printed board 2. A resist layer 13 made of an epoxy resin or the like is formed on the outer surface of a portion of the valve metal base 12 located between the capacitor portion 12a and the electrode portion 12b. The valve metal base 12 functions as an anode in the capacitor element 11.

As shown in FIG. 2, the outer surface of the valve metal base 12 is roughened and widened by etching. A dielectric layer 15 made of a valve metal oxide is formed on the outer surface of the capacitor portion 12a of the valve metal base 12, and a solid electrolyte layer made of a conductive polymer is formed on the outer surface of the dielectric layer 15. 16 is formed. Furthermore, an inner conductor layer 17 made of a conductive material containing carbon having a viscosity of, for example, 200 mPa · s or less is formed on the outer surface of the solid electrolyte layer 16, and on the outer surface of the inner conductor layer 17, For example, the outer conductor layer 18 made of a conductive material containing silver having a viscosity of 100 mPa · s or more is formed.
The solid electrolyte layer 16, the inner conductor layer 17, and the outer conductor layer 18 function as a cathode in the capacitor element 11.

  As shown in FIG. 1, in the capacitor element laminated body 10, the outer conductor layers 18 and 18 of adjacent capacitor elements 11 and 11 are bonded to each other with a conductive adhesive 21, and the capacitor element 11 in the lowermost layer is bonded. The outer conductor layer 18 is bonded to the cathode wiring 5 of the printed circuit board 2 with a conductive adhesive 21. Further, in the capacitor element laminate 10, the electrode portions 12 b of the valve metal base 12 of each capacitor element 11 are laminated on the anode wiring 4 of the printed circuit board 2 and welded to the anode wiring 4 by laser light irradiation. . Note that the capacitor element laminate 10 fixed on the printed circuit board 2 is covered with a resin mold 22.

  Next, a method for manufacturing the above-described solid electrolytic capacitor 1 will be described.

  First, a valve metal foil having an enlarged outer surface is prepared and punched into a comb shape. Each comb tooth portion of the valve metal foil corresponds to the valve metal base 12 of the capacitor element 11. Subsequently, a resist layer 13 is formed on a predetermined portion on the outer surface of the comb tooth portion by screen printing. As a result, in the comb tooth portion, the portion on the distal end side from the resist layer 13 corresponds to the capacitor portion 12a, and the portion on the proximal end side from the resist layer 13 corresponds to the electrode portion 12b.

  Subsequently, the dielectric layer 15 is formed on the outer surface of the comb tooth portion by anodizing. Then, the solid electrolyte layer 16 is formed on the outer surface of the dielectric layer 15 so as not to exceed the resist layer 13 by chemical oxidation polymerization treatment or electrolytic oxidation polymerization treatment. Thereafter, an inner conductor layer 17 is formed on the outer surface of the solid electrolyte layer 16 by an immersion method (dip method) so as not to exceed the resist layer 13, and further, an outer conductor is formed on the outer surface of the inner conductor layer 17. Layer 18 is formed.

  Subsequently, four pieces of valve metal foil punched out in a comb shape are overlapped, and the outer conductor layers 18 and 18 of the comb tooth portions adjacent to each other in the stacking direction are bonded to each other by the conductive adhesive 21. And the comb-tooth part is cut out from the laminated valve metal foil, and the capacitor | condenser element laminated body 10 is obtained.

  Subsequently, the capacitor element laminate 10 is fixed on the printed circuit board 2. Specifically, the outer conductor layer 18 of the lowermost capacitor element 11 is bonded to the cathode wiring 5 of the printed circuit board 2 by the conductive adhesive 21, and the electrode portion 12 b of the valve metal base 12 of each capacitor element 11 is attached. It is laminated on the anode wiring 4 of the printed circuit board 2 and welded to the anode wiring 4 by laser light irradiation.

  Finally, the resin mold 22 is formed by casting mold, injection or transformer mold, and the solid electrolytic capacitor 1 is completed.

  Next, the immersion method for forming the outer conductor layer 18 on the outer surface of the inner conductor layer 17 will be described in more detail.

  First, as shown in FIGS. 3 and 4, a paste tank 26 storing a silver paste (conductive paste) 25 is prepared. The silver paste 25 is a mixture of silver particles, a resin and a solvent, and has a viscosity of 100 mPa · s or more as described above.

  Subsequently, as shown in FIG. 3 and FIG. 4A, a comb tooth portion (element intermediate) 27 on which the resist layer 13, the dielectric layer 15, the solid electrolyte layer 16, and the inner conductor layer 17 are formed is formed. The plurality of valve metal foils 28 are lowered, and each comb tooth portion 27 is placed in a paste tank 26 so that the silver paste 25 is applied to a predetermined portion 27a on the tip side from the upper end 13a of the resist layer 13 in each comb tooth portion 27. It is immersed in the silver paste 25 inside. The silver paste 25 applied to the predetermined portion 27 a of the comb tooth portion 27 becomes the outer conductor layer 18.

  Subsequently, the valve metal foil 28 is raised, and the comb teeth 27 are pulled up (extracted) from the silver paste 25 in the paste tank 26. At this time, as shown in FIGS. 4 (a) to 4 (c), air A is applied to a predetermined portion 27 a of each comb tooth portion 27 while pulling up each comb tooth portion 27 from the silver paste 25 in the paste tank 26. Air blow treatment is applied. As a result, the silver paste 25 can be caused to flow toward the corner portion 27b (see FIG. 3) of the predetermined portion 27a of the comb tooth portion 27, and the silver paste 25 is sufficiently applied to the corner portion 27b of the predetermined portion 27a. In other words, the wraparound can be reliably achieved, and the film thickness of the silver paste 25 in the portion 27a can be made uniform. Note that other gases may be blown instead of air.

  However, when the air A is blown, the silver paste 25 may protrude from the predetermined portion 27 a of the comb tooth portion 27. In this case, the solid electrolytic capacitor 1 may be short-circuited and the outer conductor layer 18 may be peeled off. Therefore, air A is blown so that the silver paste 25 is accommodated in a predetermined portion 27 a of the comb tooth portion 27. For example, a nozzle (not shown) is disposed at a position where air A can be sprayed from above the upper end 13 a of the resist layer 13, and air A is sprayed from the nozzle toward a predetermined portion 27 a of the comb tooth portion 27. Thereby, the sprayed air A flows from the upper end 13a of the resist layer 13 toward the front end side on the outer surface of the comb tooth portion 27, so that the silver paste 25 can be attached to the predetermined portion 27a with high accuracy. it can. The air A may flow from the upper end 13a of the resist layer 13 toward the front end side depending on the nozzle shape. In addition, nozzles that can move in the vertical and horizontal directions (so-called variable nozzles) may be arranged.

  Here, in the air blowing process, if the angle of the air A to be blown is too small (for example, smaller than 20 °) with respect to the surface of the predetermined portion 27a in the comb tooth portion 27, the silver paste 25 will flow too much and the comb. In some cases, the silver paste adheres insufficiently at the corners 27b of the teeth 27. On the other hand, if the angle of the air A is too large with respect to the surface of the predetermined portion 27a (for example, larger than 80 °), the silver paste hardly flows to the corner portion 27b of the comb tooth portion 27, and the comb tooth portion 27 There is a case where the adhesion of the silver paste at the corner portion 27b becomes insufficient.

  Therefore, the air A is 20 ° to the surface of the predetermined portion 27a so that the silver paste 25 flows toward the corner portion 27b of the predetermined portion 27a on the surface of the predetermined portion 27a in the comb tooth portion 27. It is preferably sprayed in a direction having an angle of 80 °, and more preferably sprayed in a direction having an angle of 40 ° to 60 °. Here, air A is sprayed at an angle of 45 ° with respect to the surface of the predetermined portion 27a of the comb tooth portion 27 from the upper end 13a of the resist layer 13 toward the front end side. Thereby, when the air A is sprayed, the silver paste 25 easily flows to the corner portion (predetermined corner portion) 27b on the front end side of the predetermined portion 27a. Therefore, by performing this air blowing process, not only the excess silver paste 25 is caused to flow (blow away), but also the silver paste 25 is more sufficiently adhered to the corner 27b on the tip side, that is, the wraparound is more reliably performed. And the film thickness of the silver paste 25 in the portion 27a can be made more uniform. Thereby, the variation in the frequency characteristics and ESR of the solid electrolytic capacitor 1 is improved, and the occurrence of a short circuit and leakage current of the solid electrolytic capacitor 1 is also suppressed.

  Furthermore, if the pressure of the air A to be sprayed is too large (for example, greater than 1 MPa), the silver paste 25 may flow too much, and the adhesion of the silver paste 25 on the corners 27b of the comb teeth 27 may be insufficient. is there. Therefore, the air A is preferably blown to the predetermined portion 27a of the comb tooth portion 27 with a pressure of 1 MPa or less, and the air A here is blown to the predetermined portion 27a with a pressure of 0.05 MPa. Thereby, since the pressure of the air A sprayed is large, it is suppressed that the silver paste 25 flows too much, for example, it is prevented that the silver paste 25 adhering to the corner | angular part 27b of the comb-tooth part 27 flows. . Therefore, the silver paste 25 can be more sufficiently adhered to the corners 27b of the comb teeth 27, that is, the wraparound can be achieved more reliably, and the film thickness of the silver paste 25 in the portion 27a can be made more uniform. It becomes possible. As a result, the frequency characteristics of the solid electrolytic capacitor 1 are also improved. Further, in this case, it is possible to prevent the film thickness from becoming too thin by blowing the air A.

  As described above, in the method of manufacturing the solid electrolytic capacitor 1, the air blowing process is performed while pulling up each comb tooth portion 27 from the silver paste 25 in the paste tank 26. Thereby, the silver paste 25 can be made to flow toward the corner | angular part 27b of the predetermined part 27a of the comb-tooth part 27 to which the silver paste 25 cannot adhere easily. Accordingly, the silver paste 25 can be sufficiently adhered to the corners 27b of the predetermined portion 27a of the comb tooth portion 27, that is, the wraparound can be reliably achieved, and the film thickness of the silver paste 25 in the portion 27a can be made uniform. It becomes. As a result, it is possible to ensure the conduction of the solid electrolytic capacitor 1 and to suppress variations in ESR of the solid electrolytic capacitor 1 and to improve the frequency characteristics of the capacitance of the solid electrolytic capacitor 1. As a result, the yield of the solid electrolytic capacitor 1 can be improved.

  Further, since the air blowing process is performed while pulling up each comb tooth portion 27 from the silver paste 25 in the paste tank 26, the manufacturing efficiency of the solid electrolytic capacitor 1 may deteriorate due to the air blowing process. Absent. Rather, by blowing air A, drying of the adhered silver paste 25 is promoted, and the productivity of the solid electrolytic capacitor 1 can be improved.

  Further, for example, when the air blowing process is performed after the comb tooth portion 27 is pulled up, the silver paste 25 attached to the comb tooth portion 27 is fixed and the viscosity changes depending on the time from when the comb tooth portion 27 is pulled up until the air blowing process is performed. May end up. This change in viscosity is irregular due to, for example, the atmospheric temperature or humidity. Therefore, by blowing the air A while pulling up the comb teeth 27 from the silver paste 25 in this way, the viscosity change of the silver paste 25 due to the passage of time is suppressed, and the viscosity control of the silver paste 25 can be facilitated. it can. As a result, the silver paste 25 can be attached to the predetermined portion 27a of the comb tooth portion 27 with high accuracy.

  Furthermore, the air blow process is performed before the silver paste 25 is fixed, so that the thickness of the silver paste 25 attached to a portion other than the predetermined portion 27a of the comb tooth portion 27 is reduced. As a result, the thickness of the solid electrolytic capacitor 1 can be reduced, and the height of the product on which the solid electrolytic capacitor 1 is mounted can be reduced. Here, by lowering the paste viscosity, the thickness of the silver paste adhering to the portions other than the predetermined portion 27a of the comb tooth portion 27 can be reduced. However, when the paste viscosity is low, the settling rate of silver particles is high. In order to reduce the thickness of the adhered silver paste 25, it is preferable to perform an air blowing process, because this causes problems in dispersibility and the like.

  FIG. 5 is a partial cross-sectional view showing a coating state of the silver paste 25. If the manufacturing method of the solid electrolytic capacitor 1 described above is used, the silver paste 25 can be sufficiently adhered to the corner portions 27b of the predetermined portions 27a of the comb-tooth portions 27 as shown in FIG. On the other hand, if the air blow treatment is not performed after the comb tooth portion 27 is immersed in the silver paste 25, the silver in the corner portion 27b of the predetermined portion 27a of the comb tooth portion 27 as shown in FIG. The thickness of the paste 25 becomes extremely thin.

  The present invention is not limited to the embodiment described above.

  For example, in the above embodiment, the solid electrolytic capacitor 1 has the four-layer capacitor element 11, but is not limited thereto. In the present invention, the solid electrolytic capacitor may have one layer or a plurality of layers of capacitor elements other than four layers.

  Moreover, in the said embodiment, although the capacitor | condenser element laminated body 10 was fixed on the printed circuit board 2, it is not limited to this, For example, you may fix on a lead frame.

  Furthermore, in the said embodiment, although the air blow process was performed, raising the comb-tooth part 27 from the silver paste 25, it is not limited to this. The present invention is also applicable to cathode pastes such as copper pastes. In addition, the air blowing process may be performed after the comb tooth portion 27 is completely lifted from the silver paste, without being pulled up.

  Examples of the present invention will be described below.

Example 1
First, an aluminum valve metal foil having an enlarged outer surface was prepared, and punched into a comb shape to form six rectangular comb teeth of 3.5 mm × 6.5 mm. And the resist layer was formed in the predetermined part in the outer surface of a comb-tooth part by screen printing.

  Subsequently, after a predetermined portion of the valve metal foil is immersed in an aqueous solution of ammonium adipate as a chemical conversion solution, a voltage of 6 V is applied to the valve metal foil to advance an anodic oxidation reaction, and a dielectric made of aluminum oxide The layer was formed on the surface layer of the valve metal foil.

  Subsequently, a mixed solution consisting of 0.9 g of 3,4-ethylenedioxythiophene (BAYTRON M manufactured by Bayel), 10.81 g of iron paratoluenesulfonate (BAYTRON CB 50 manufactured by Bayel) and 2.63 g of butanol was prepared. did. Then, a predetermined portion of the valve metal foil was immersed in this mixed solution and pulled up, and after heat treatment in a furnace at a temperature of 150 ° C. for about 5 minutes, it was washed with water and dried. This process was repeated several times to form a solid electrolyte layer made of 3,4-ethylenedioxythiophene on the outer surface of the dielectric layer.

  Subsequently, carbon paste was applied to the outer surface of the solid electrolyte layer by an immersion method to form an inner conductor layer having a thickness of about 3 μm. Further, a silver paste was applied to the outer surface of the inner conductor layer by an immersion method to form an outer conductor layer having a thickness of about 20 μm. At this time, after the comb tooth portion was pulled up from the paste tank in which the silver paste was stored, the formed outer conductor layer was subjected to an air blowing process.

  Subsequently, the comb tooth portion on which the dielectric layer, the solid electrolyte layer, the inner conductor layer, and the outer conductor layer were formed was cut from the valve metal foil to obtain a capacitor element. Then, after connecting the iron anode lead and cathode lead to the capacitor element, the capacitor element is covered with epoxy resin so that the anode lead and cathode lead are partially exposed, and a resin mold is formed to complete the solid electrolytic capacitor. It was.

  Each of the solid electrolytic capacitors according to the example manufactured as described above and the solid electrolytic capacitor according to the comparative example manufactured without performing the air blowing process after the comb tooth portion is immersed in the silver paste, each has a frequency of 100 capacitors. Characteristics were measured. As a result, the solid electrolytic capacitor according to the comparative example was 71% within the standard range, whereas the solid electrolytic capacitor according to the example was 98% within the standard range. The ESR at 100 kHz was also within the standard range. From this result, the effect of the manufacturing method of the solid electrolytic capacitor according to the present invention that the yield of the solid electrolytic capacitor can be improved was confirmed.

(Example 2)
Solid electrolysis according to Example 2 manufactured as described above, except that the outer conductor layer was formed by performing an air blowing process in which the direction and pressure of the air to be sprayed were changed while pulling up the comb teeth portion from the paste tank. A capacitor evaluation test was performed on the capacitor. Specifically, in this capacitor evaluation test, ESR at 100 kHz and wraparound thickness were measured. The direction of the air to be blown is 0 ° when blown in parallel to the surface of the predetermined portion toward the tip side on the side where the outer conductor layer is formed, and blown perpendicularly to the surface of the predetermined portion. The direction at that time was 90 °. Further, the wraparound thickness was the thickness of the corner at the tip of the predetermined portion.

  As a result, as shown in FIG. 6, when the angle was 20 ° to 80 °, the ESR was 20 mΩ to 23 mΩ and the wraparound thickness was 3 μm to 6 μm, which satisfied the standard value. Furthermore, when the angle was 40 ° to 60 °, the ESR was further reduced to 20 mΩ to 20.5 mΩ, and the wraparound thickness was 5 μm to 6 μm, and the silver paste could be more sufficiently adhered to the corners. . When the pressure was 1 MPa or less, the ESR was 21 mΩ to 24 mΩ and the wraparound thickness was 3 μm to 6 μm, which satisfied the standard value.

  Therefore, when the air is blown in a direction having an angle of 20 ° to 80 ° with respect to the surface of the predetermined portion, the silver paste is more sufficiently adhered to the corner portion of the predetermined portion of the comb tooth portion, that is, wraparound. It was possible to confirm the above-described effect of more reliably achieving the above and improving the frequency characteristics. Further, when air is blown in a direction having an angle of 40 ° to 60 ° with respect to the surface of the predetermined portion, the silver paste is more sufficiently adhered to the corner portion of the predetermined portion of the comb tooth portion. That is, it was possible to confirm the above-mentioned effect of achieving the wraparound more reliably and improving the frequency characteristics.

  Furthermore, from this result, when the air is blown at a pressure of 1 MPa or less, the silver paste is more sufficiently adhered to the corner portion of the predetermined portion of the comb tooth portion, that is, the wraparound is more reliably achieved, and the frequency characteristics It was also possible to confirm the above effect of improving the ESR variation.

It is sectional drawing of the solid electrolytic capacitor manufactured by one Embodiment of the manufacturing method of the solid electrolytic capacitor which concerns on this invention. It is an expanded sectional view of the capacitor | condenser element of the solid electrolytic capacitor shown by FIG. It is a figure which shows the one part process of one Embodiment of the manufacturing method of the solid electrolytic capacitor which concerns on this invention. FIG. 4 is a sectional view taken along line IV-IV shown in FIG. 3. It is a fragmentary sectional view along the VV line shown by FIG. It is a graph which shows the result of a capacitor evaluation test.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Solid electrolytic capacitor, 12 ... Valve metal base | substrate, 15 ... Dielectric layer, 16 ... Solid electrolyte layer, 25 ... Silver paste (electroconductive paste), 27 ... Comb-tooth part (element intermediate body), 27a ... Predetermined part , 27b... Corners (predetermined corners) on the front end side, A... Air (gas).

Claims (6)

A conductive paste adheres to a predetermined portion of an element intermediate comprising a valve metal substrate, a dielectric layer formed on the valve metal substrate, and a solid electrolyte layer formed on the dielectric layer. A method of manufacturing a solid electrolytic capacitor including a step of immersing in the conductive paste,
A method for producing a solid electrolytic capacitor, wherein a gas is blown onto the predetermined portion of the element intermediate before the conductive paste attached to the element intermediate is fixed.   The method of manufacturing a solid electrolytic capacitor according to claim 1, wherein the gas is sprayed so that the conductive paste fits in the predetermined portion of the element intermediate.   The method of manufacturing a solid electrolytic capacitor according to claim 1, wherein the gas is sprayed while the immersed element intermediate is removed from the conductive paste.   The gas has an angle of 20 ° to 80 ° with respect to the surface of the predetermined portion so that the conductive paste flows toward the predetermined corner portion of the predetermined portion on the surface of the predetermined portion. The method for producing a solid electrolytic capacitor according to claim 1, wherein the solid electrolytic capacitor is sprayed in a direction in which the solid electrolytic capacitor is present.   The gas has an angle of 40 ° to 60 ° with respect to the surface of the predetermined portion so that the conductive paste flows toward the predetermined corner portion of the predetermined portion on the surface of the predetermined portion. The method for producing a solid electrolytic capacitor according to claim 4, wherein the solid electrolytic capacitor is sprayed in a direction in which the solid electrolytic capacitor is present. The method for producing a solid electrolytic capacitor according to claim 1, wherein the gas is blown onto the predetermined portion at a pressure of 1 MPa or less.

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