JP2007121085A - X-ray inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent collision by estimating the collision of a measuring target moved across measuring points with an X-ray measuring optical system. <P>SOLUTION: This X-ray inspection device 1 is equipped with a stage 14 for placing the measuring target S so that the measuring target is positioned between an X-ray source 11 and an X-ray detector 12 and a drive mechanism 15 to perform X-ray inspection with respect to a plurality of the measuring points of the measuring target placed on the stage and equipped with three-dimensional shape extraction part 36 for extracting the three-dimensional shape of the measuring target on the basis of the image of an optical camera, a measuring point data input part 37 for receiving the input of the position data related to the measuring points, a passage range extraction part 38 for extracting the passing range of the measuring target during movement when the measuring target is moved between the measuring points through the shortest route, a collision judging part 41 for judging collision possibility on the basis of the positional relation of the X-ray measuring optical system with the passing range of the measuring target and an avoidance route calculation part 42 for calculating an avoidance route in a case that there is collision possibility. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an X-ray inspection apparatus for performing a fluoroscopic inspection or a CT inspection on an object to be measured such as an industrial product having a three-dimensional shape.

In X-ray inspection equipment that performs fluoroscopic inspection of industrial products and the like, X-ray detection is performed by combining an image intensifier (hereinafter abbreviated as II) and a CCD camera so as to face the X-ray source of the X-ray generator. A vessel is arranged. Recently, an X-ray inspection apparatus using a flat panel X-ray detector is used instead of an X-ray detector composed of II and CCD cameras.
In these X-ray inspection apparatuses, a stage is disposed between an X-ray source and an X-ray detector, and an object to be measured is placed on the stage to photograph a fluoroscopic X-ray image.

  In the inspection by the X-ray inspection apparatus, the visual field is usually moved for alignment, measurement magnification adjustment, and measurement angle adjustment. The field of view moves while moving the stage by controlling the drive mechanism by operation using an input device such as a mouse, joystick, or keyboard (if there is a tilt mechanism, move the arm using the tilt mechanism). A fluoroscopic X-ray moving image is taken, thereby searching for the inspection position of the object to be measured. When the inspection position is found, the visual field movement is stopped and the moving image is observed in that state.

  In the X-ray inspection, the same position may be inspected one after another for a large number of objects to be measured having the same shape. In such a case, a plurality of inspection positions included in the first object to be measured (object to be positioned as a reference for positioning) are taught (teaching) to the apparatus as a sequence, and the X-ray measurement optical system is in accordance with the sequence. The measurement visual field is changed one after another, and an apparatus having a so-called teaching function is used to perform inspection efficiently by sequentially reproducing X-ray images at each inspection position on a display screen.

As an X-ray inspection apparatus equipped with a teaching function, it is disclosed to move (measure) (observe) an arbitrary point of an object to be measured, which has been previously taught, using a transport means such as an industrial robot. (For example, refer to Patent Document 1).
JP 2004-117214 A

  When X-ray inspection is performed on a plurality of objects to be measured having the same shape one after another, the object to be measured is placed on the stage and the measurement position (teaching point) is designated by the teaching function as in the conventional example described above. . When rotating or tilting, the rotation angle and tilt angle are specified.

  However, when the object to be measured has a three-dimensional shape, there is a possibility of colliding with an X-ray measurement optical system (X-ray source or X-ray detector) when moving between teaching measurement positions. In general, the processing program stored by the teaching function stores the stage position at the measurement point, the X-ray dose, the image processing method, etc. as information, but moves the measurement point from one measurement point to the next measurement point. Therefore, no consideration is given to the movement path of the object to be measured when moving the stage, and the stage drive mechanism simply moves linearly between two points.

If the object to be measured and the X-ray measurement optical system collide with each other, they are destroyed and damaged, which is very dangerous.
Therefore, the present invention provides an X-ray inspection apparatus capable of measuring safely without collision between an object to be measured and an X-ray measurement optical system when moving between measurement points by a teaching function or the like. For the purpose.

  The X-ray inspection apparatus of the present invention made to solve the above-mentioned problems is an X-ray measurement comprising an X-ray source that irradiates fluoroscopic X-rays and an X-ray detector that captures a fluoroscopic X-ray image of an object to be measured. An optical system; a stage for placing the object to be measured so that the object to be measured is positioned between the X-ray source and the X-ray detector; and a drive mechanism for driving the stage at least in translation. In an X-ray inspection apparatus that performs an X-ray inspection on a plurality of measurement points of a measurement object placed on a stage so that the positional relationship of the measurement object is determined, based on an optical camera image taken by an optical camera Moves between measurement points by the shortest path, and a three-dimensional shape extraction unit that extracts a three-dimensional shape that forms the appearance of the object to be measured or a three-dimensional shape that includes the appearance, a measurement point information input unit that receives position information related to measurement points Extracted when letting Based on the body shape, the possibility of collision is determined based on a passing range extracting unit that extracts a passing range of the moving object to be measured and a positional relationship between the X-ray measuring optical system and the passing range of the object to be measured. A collision determination unit and an avoidance route calculation unit that calculates an avoidance route when there is a possibility of collision are provided.

According to the present invention, when the X-ray inspection is performed on a plurality of measurement points of the measurement object placed on the stage, the measurement object is placed so that the positional relationship of the measurement object with respect to the stage is determined. Keep it.
Specifically, for example, the stage is set to the origin position (the initial position of the stage, which is a reference position for making it possible to always grasp the position and coordinates of the subsequent stage by moving the stage from this initial position). By placing the object to be measured on the stage in the positioned state, the positional relationship of the object to be measured with respect to the stage is determined.
When the stage is at the origin position, the positional relationship of the stage with respect to the X-ray measurement optical system is also constant. Therefore, by designating coordinates on the stage, the amount and direction of movement of the stage for photographing the designated position from the origin are uniquely determined (in addition, the tilting mechanism is included in the X-ray measurement optical system). ), The arm moved by the tilt mechanism is also returned to the predetermined origin).
The three-dimensional shape extraction unit extracts a three-dimensional shape that forms the appearance of the object to be measured or a three-dimensional shape that includes the appearance based on the optical camera image captured by the optical camera. That is, the three-dimensional shape extracted here may be the outer shape as it is, or may be a three-dimensional shape including the outer appearance (for example, a cylinder, a sphere, a spheroid, or the like covering the outer appearance). Extraction is performed, for example, by rotating the stage when it can be rotationally driven, or by using optical cameras provided at two locations, photographing optical camera images from two directions, and performing image processing such as pattern recognition and binarization. A three-dimensional shape can be extracted by extracting an image representing the three-dimensional shape. When the stage can be rotated, a stereoscopic image may be extracted by photographing from all directions like a CT image.
When the measurement point information input unit receives the position information related to the measurement point and performs teaching, the passing range extraction unit extracts the three-dimensional object extracted when moving between the two measurement points to be moved along the shortest path. A range through which the moving object to be measured passes is extracted based on the shape. That is, the passing range is specified by calculating a trajectory through which the three-dimensional shape (a three-dimensional shape of the appearance shape itself or a three-dimensional shape including the appearance shape) obtained by the three-dimensional shape extraction unit passes.
The collision determination unit determines the possibility of collision based on the obtained passing range of the object to be measured and the positional relationship with the X-ray measurement optical system in which the positional relationship with respect to the stage is determined in the origin return state.
When it is determined that there is a possibility of collision, the avoidance route calculation unit calculates an avoidance route other than the shortest route.
The method for determining the avoidance route is not particularly limited. For example, a region where the measurement object passes and the region where the X-ray measurement optical system intersects is specified, and a two-step or three-step straight line is used to bypass this region. An avoidance route can be determined by determining a movement route by movement.

  According to the present invention, the collision between the object to be measured and the X-ray measurement optical system in the movement path between the measurement points is determined, and when there is a possibility of collision, the stage is moved by the avoidance route. When moving between the measurement points of the object to be measured by the teaching function or the like, a safe movement without collision can be realized.

(Means and effects for solving other problems)
In the above invention, the drive mechanism is further configured to rotationally drive the stage, the measurement point information input unit receives the rotation angle information together with the position information related to the measurement point, and the passing range extraction unit rotates between the measurement points. You may make it extract the passage range of the to-be-measured object in the case of moving.
According to this, when performing teaching including rotational movement of the stage, the measurement point information input unit receives input of rotation angle information together with position information. The passing range extracting unit extracts the passing range of the object to be measured when it is rotationally moved. Then, the possibility of collision is determined based on the positional relationship between the passing range of the object to be measured and the X-ray measurement optical system obtained by the collision determination unit. When it is determined that there is a possibility of collision, the avoidance route calculation unit calculates an avoidance route.
For example, the avoidance route may be determined in the case where a collision can be avoided by reversing the rotation direction (for example, changing the clockwise rotation to the counterclockwise rotation). In addition, the region where the extracted three-dimensional shape passes and the region where the X-ray measurement optical system intersects are specified, and the rotational motion is performed after temporarily performing translation so as to bypass this region before the rotational motion. After that, a collision avoidance route can be determined by executing a translation operation for returning to the original state again.

  In the above invention, an arm that integrally supports the X-ray measurement optical system, a tilt mechanism that tilts the arm, a tilt angle information input unit that receives input of information related to the tilt angle, and an X-ray measurement optical system that tilts the arm An X-ray measurement optical system passage range extraction unit that extracts a range through which the X-ray passes, and the collision determination unit may collide based on the positional relationship between the range through which the X-ray measurement optical system passes and the position of the object to be measured May be determined.

According to this, when tilt teaching is performed in an X-ray inspection apparatus including an arm that integrally supports the X-ray measurement optical system and a tilt mechanism that tilts the arm, the tilt angle information input unit tilts together with the position information. Accepts input of corner information. The X-ray measurement optical system passage range extraction unit extracts a range through which the X-ray measurement optical system passes when the arm is tilted. Then, the possibility of collision is determined based on the positional relationship between the passing range of the object to be measured and the passing range of the X-ray measurement optical system obtained by the collision determination unit. The avoidance route calculation unit calculates an avoidance route when it is determined that there is a possibility of collision.
The avoidance route is determined by, for example, specifying a region where the range through which the X-ray measurement optical system passes and the range through which the object is passed, and temporarily setting the stage to bypass this region before the tilting operation. The collision avoidance route can be determined by performing the tilting operation after performing the translational movement, and then performing the translational operation for returning the stage again.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the present invention is not limited to the embodiments described below, and it goes without saying that various aspects are included without departing from the spirit of the present invention.

  FIG. 1 is a block diagram showing a configuration of an X-ray inspection apparatus according to an embodiment of the present invention. The X-ray inspection apparatus 1 includes an X-ray measurement optical system 13 including an X-ray generator 11 and an X-ray detector 12, a stage 14 on which an object S is placed, and the stage 14 in XYZ directions ( A driving mechanism 15 for translational driving and rotational driving along the Z-axis on the stage surface (XY plane), and an overall image of the object S to be measured that is mounted adjacent to the X-ray detector 12 and placed on the stage An optical camera 16 for photographing the X-ray with visible light, a C-arm 17 that integrally supports the X-ray generator 11 and the X-ray detector 12 so as to be tiltable, and a tilting mechanism 18 that tilts and drives the C-arm 17. And a control system 20 that controls the entire apparatus.

The control system 20 is constituted by a general-purpose computer device. The hardware of the control system 20 is further explained. The control system 20 is described as a block. An input device including a CPU 21, a keyboard 22 and a mouse 23, a display device 24 such as a liquid crystal panel, and a memory 25 It consists of.
Further, the functions processed by the CPU 21 will be described as a block. An X-ray image creation unit 31, an X-ray image display control unit 32, an optical camera image creation unit 33, an optical camera image display control unit 34, a drive signal generation unit 35, Solid shape extraction unit 36, measurement point information input unit 37, passage range extraction unit 38, tilt angle information input unit 39, X-ray measurement optical system passage range extraction unit 40, collision determination unit 41, avoidance route calculation unit 42, travel route The determination unit 43 is divided.

  Further, the memory 25 will be described in blocks for each storage content. The optical camera image data storage area 51, the three-dimensional shape data storage area 52, the measurement point information storage area 53, the tilt angle information storage area 54, and the passing range storage area 55 will be described. , And the movement route storage area 56.

  The X-ray generator 11 constituting the X-ray measurement optical system 13 includes an X-ray tube for fluoroscopic X-ray irradiation. The X-ray detector 12 includes II arranged so as to face the X-ray tube, and a CCD camera integrally attached to the rear side of the II, and is formed by II detecting fluoroscopic X-rays. An image signal of a fluoroscopic X-ray image is output by photographing the fluorescent image obtained with a CCD camera.

The stage 14 is supported by a lower stage that can slide in a three-dimensional direction of an XY direction that is a stage surface direction and a Z direction that is perpendicular to the stage surface, and a lower stage that is rotatable by a rotation axis in the Z-axis direction. The object to be measured S is placed on the upper stage.
The drive mechanism 15 is equipped with a motor, and is driven to rotate or translate based on a drive signal from the drive signal generator 35.

  The optical camera 16 is mounted at a position where the appearance of the object S can be photographed at a position away from the X-ray field of view so as not to hinder the fluoroscopic X-ray image measurement by the X-ray measurement optical system 13. The object to be measured S placed on 14 is photographed. The captured video signal is digitized and transmitted to the CPU 21.

The C-arm 17 supports the X-ray generator 11 and the X-ray detector 12 so as to be able to tilt and move together while facing each other.
The tilt mechanism 18 tilts and drives the C-arm 17 by a drive signal from the drive signal generator 35.

Next, each functional block of the CPU 21 will be described.
The X-ray image creation unit 31 performs control to convert the video signals of the fluoroscopic X-ray images sent from the X-ray detector 12 into digital images one after another and create X-ray frame image data.
The X-ray image display control unit 32 sequentially transmits the generated X-ray frame image data to the display device 24 and displays the fluoroscopic X-ray image on the monitor screen. This X-ray image is an image for observing an object to be measured.

The optical camera image creation unit 33 converts the visible light video signal of the measurement object S sent from the optical camera 16 into a digital image, and stores the optical camera image data in the memory 25 as the optical camera image data of the measurement object S. Control to accumulate in the area 51 is performed. The optical camera image data is acquired from at least two orthogonal directions of the object to be measured S before starting X-ray measurement. For example, in one of the two directions, the arm 17 and the stage 15 are photographed in an initial state (origin return state), that is, in a state where the tilt angle is 0 degree and the rotation angle is 0 degree, and the front direction of the object S is photographed. To do. The other one is that the stage 14 is rotated 90 degrees so that the tilt angle is 0 degree and the rotation angle is 90 degrees, and the right side direction of the object S is photographed. The optical camera image data in the two directions acquired in this way is optical camera image data storage area as optical camera image data 51a in the front direction (XZ plane) and optical camera image data 51b in the right side direction (YZ plane). 51 is accumulated.
Since the image obtained by displaying the optical camera image data on the monitor screen includes the entire image of the object to be measured, it is used for designating the position of the measurement point when designating the measurement position. When specifying measurement points on an optical camera image, if the object to be measured is measured from multiple directions, it may not be possible to specify only with the optical camera image data in the above two directions. Optical camera image data (which may be omnidirectional optical camera image data) is stored.
The optical camera image display control unit 34 performs control to display necessary optical camera image data on the monitor screen according to a display instruction when the optical camera image needs to be displayed by teaching or the like. You may always display by setting.

  The drive signal generator 35 generates drive control signals for the drive mechanism 15 and the tilt mechanism 18 by operating the keyboard 22 and mouse 23 or based on sequence control during automatic operation.

  Based on the optical camera image data 51a and the optical camera image data 51b stored in the optical camera image data storage area 51, the three-dimensional shape extraction unit 36 includes a three-dimensional shape that completely includes the appearance shape of the measurement object S (for example, (Cylinder, sphere). That is, a three-dimensional shape in which the object to be measured S does not exist outside the three-dimensional shape is extracted. This increases the safety factor for collision avoidance and simplifies the trajectory calculation process described later. If it is not necessary to increase the safety factor or simplify the calculation process, the appearance shape itself may be extracted as a three-dimensional shape. In the extraction, for example, the optical camera image is binarized, and the background image and the object to be measured are identified and extracted. The extracted three-dimensional shape data is stored in the three-dimensional shape data storage area 52.

The measurement point information input unit 37 performs processing for designating measurement points on the object to be measured based on an operation with the keyboard 22 or the mouse 23. The measurement point can be specified on the optical camera image displayed on the monitor screen, or can be specified on the X-ray image displayed on the monitor screen.
Furthermore, the coordinates on the stage can be designated by directly inputting from the keyboard 22. In addition, when performing a rotational movement, it specifies including a rotation angle. The measurement point information of each designated measurement point is accumulated in the measurement point information storage area 53. The accumulated information becomes teaching information about the measurement point.

Based on the extracted solid shape data and measurement point information, the passing range extraction unit 38 performs an operation for calculating a movement path of the solid shape when moving the measurement point in the measurement visual field by driving the stage. Processing to extract the movement trajectory of the object is performed.
When the movement path is only translational movement but not rotational movement, the passage range when moving linearly between the measurement points of the movement destination and the movement destination is calculated. When performing rotational movement, a passing range at the time of rotational movement from the measurement point before the movement to the measurement point of the movement destination is calculated based on the information on the designated rotation angle. The calculated passing range is accumulated in the passing range storage area 55.

  The tilt angle information input unit 39 receives this input when a tilt angle necessary for tilting is designated. The input operation is performed by an operation on an input screen (not shown) using the arrow keys of the keyboard 22, the mouse 23, or by directly inputting a numerical value from the keyboard. The tilt angle is stored in the tilt angle information storage area 54.

  When the X-ray measurement optical system passage range extraction unit 40 performs a tilting operation, the X-ray measuring optical system passage range extracting unit 40 tilts and moves based on the specified tilt angle, the shape of the C arm 17, the X-ray generator 11, and the X-ray detector 12. The calculation for calculating the passing range of the X-ray measuring optical system 13 is performed.

  The collision determination unit 41 determines the possibility of a collision depending on whether or not they intersect based on the three-dimensionally shaped passage range (passage range during linear movement, passage range during rotational movement) and the position of the X-ray measurement optical system 13. In the case of tilting, the calculation of the possibility of collision is similarly performed based on the tilting movement path of the X-ray measurement optical system and the position of the three-dimensional shape.

The avoidance route calculation unit 42 performs an operation to calculate an avoidance route for avoiding a collision when it is determined that there is a possibility of a collision in the collision determination.
The travel route determination unit 43 determines either the travel on the normal shortest route (normal route) when there is no possibility of collision or the travel on the avoidance route when there is a possibility of collision, and determines the travel route. Determine.

Next, the teaching operation by the X-ray inspection apparatus 1 will be described using the flowchart of FIG.
First, the X-ray measurement optical system 13 and the stage 14 are returned to the origin (S101). Thereby, the positional relationship between the X-ray measurement optical system 13 and the optical camera 16 with respect to the stage coordinates is uniquely determined. Thereafter, when an object to be measured is placed on the stage 14, an arbitrary position can be designated by specifying the position by operating the mouse 23 on the X-ray image and the optical camera image and inputting the stage coordinates by the keyboard 22. Become.

  Subsequently, the object to be measured S is placed on the stage 14, photographed by the optical camera 16, and a three-dimensional shape including an appearance shape is extracted from the photographed optical camera image (S102). Here, it is assumed that the measurement object S is a star-shaped three-dimensional object (see S1 in FIG. 3). In addition, although it can also be calculated as a cylindrical solid object including this star-shaped three-dimensional object, here, the external shape of the star-shaped three-dimensional object is directly adopted as the three-dimensional shape of the object to be measured.

Subsequently, an optical camera image (optical camera image from two directions or all directions) is displayed on the monitor screen together with the X-ray image, and each measurement point of the object S to be measured is designated by the mouse 23 in the order of measurement. Teaching is performed (S103).
When the specification of the measurement point is completed, the shortest path between the measurement point before the movement and the measurement point of the movement destination is extracted, and further, the passing range which is the trajectory of the object to be measured when the stage 14 is moved along the path is extracted. (S104).
Subsequently, the possibility of a collision when moved by the shortest distance is determined (S105). If the result of the determination is that there is a possibility of a collision, an avoidance route is calculated (S106).

  FIG. 3 is a schematic diagram for explaining a state in which an object to be measured collides with the translation of the stage. As shown in FIG. 3 (a), two points of the star-shaped tip portions A1 and A2 are designated in this order as measurement points, and set so that A2 is measured after A1 measurement. As a result, since the shortest movement path is a straight line, the stage 14 translates from B1 to B2, and the workpiece S on the stage moves from the first position (S1) to the second position (S2) in conjunction with this. It shall be moved. The trajectory at this time becomes the passing range.

When the passage range by linear movement which is the shortest path is calculated, a part of the star shape clearly collides with the X-ray detector 12.
At this time, in order to avoid a collision, for example, an avoidance route as shown in FIG. 3B is calculated. That is, move by a distance that can avoid a collision in the direction perpendicular to the shortest path (move in the first stage), move from there in a direction parallel to the shortest distance (move in the second stage), and return to the original destination Moves the same distance as the first stage movement in the direction perpendicular to the shortest path (third stage movement). Depending on the positional relationship between the movement destination and the movement destination, instead of such a three-stage movement, a movement that avoids a collision may be performed by a two-stage linear movement orthogonal to each other.
If it is determined in S105 that there is no possibility of collision, there is no need to take an avoidance route, so S106 is skipped and the process proceeds to S107.

  Subsequently, a movement route based on a straight route or an avoidance route is determined (S107), and it is determined whether or not the designation has been completed for all measurement points to be taught (S108). If teaching of all measurement points has not been completed, the process returns to S103 and the process is repeated. When teaching of all measurement points is completed, the teaching operation is terminated.

  Although the above has described the case of translation of the stage, the same applies to the case of rotating the stage 14. FIG. 4 is a schematic diagram for explaining a state in which the object to be measured S collides with the rotational movement of the stage. As shown in FIG. 4 (a), two points of the star-shaped tip portions A1 and A2 are designated in this order as measurement points, and A2 is set to be measured by rotational movement after A1 measurement. If the stage is rotated in the state shown in FIG. 4A, it collides with the X-ray detector 12, so that an avoidance route is calculated. In this case, for example, as shown in FIG. 4B, the stage 14 is translated (moved in the first stage). Subsequently, as shown in FIG. 4C, the stage 14 is rotationally moved (second stage movement), and the DUT S is also rotated. Further, as shown in FIG. 4D, by performing a translational movement (third movement) in the direction opposite to the first movement, it is possible to rotate the object S to be measured without colliding.

Next, a case where tilting is performed will be described. FIG. 5 is a flowchart for explaining a tilt teaching operation by the X-ray inspection apparatus 1. Here, originally, it is possible to specify and measure both the tilt angle of the C arm 17 and the measurement point of the object S to be measured, but for the sake of simplicity, only the C arm 17 is tilted for convenience. Move and measure.
First, the X-ray measurement optical system 13 and the stage 14 are returned to the origin (S201). Thereby, similarly to FIG. 2 and the flowchart, the positional relationship between the X-ray measurement optical system 13 and the optical camera 16 with respect to the stage coordinates can be uniquely determined.

  Subsequently, the object to be measured S is placed on the stage 14, a whole image is taken by the optical camera 16, and a three-dimensional shape including an appearance shape is extracted from the taken optical camera image (S202). Here, it is assumed that the object to be measured S is a composite three-dimensional object (referred to as a composite three-dimensional object) in which a laterally long cylindrical jaw portion is formed on an upper part of a vertically long cylindrical object as shown in FIG. In addition, although it can also be calculated as a cylindrical three-dimensional object including this composite three-dimensional object, here, the external shape of the composite three-dimensional object is directly adopted as the three-dimensional shape of the object to be measured.

  Subsequently, the tilt angle is input in the order of measurement (S203). Using the tilt angle input screen (not shown) with the mouse 23, teaching for designating the orientation of the C-arm 17 is performed in the order of measurement (S203).

  Subsequently, the passing range of the tilting X-ray measurement optical system 13 is extracted (S204). Then, the possibility of collision is determined (S205). If the result of determination is that there is a possibility of collision, an avoidance route is calculated (S206).

For example, as shown in FIG. 6A, it is assumed that the object to be measured S collides with an arcuate trajectory through which the C arm 17 passes due to tilting. In this case, the stage 14 is translated from the position S3 to the position S4 as shown in FIG. 6 (b) as an avoidance route (first stage movement), and then tilted (second stage movement). Then, as shown in FIG. 6C, a route for performing a translational movement (third stage movement) for returning the stage from the position S4 to the position S3 is calculated.
If it is determined in S205 that there is no possibility of a collision, there is no need to take an avoidance route, so S206 is skipped.

  Subsequently, the calculated avoidance route is determined as a movement route at the time of tilting (S207), and it is determined whether or not the designation has been completed for all tilting operations for performing teaching (S208). If teaching of all the tilt processes has not been completed, the process returns to S203 and the process is repeated. When teaching of all tilt processes is completed, the teaching operation is terminated.

  In the present embodiment, the case where only the tilt movement of the C arm 17 is described has been described. However, when the stage 14 for moving the measurement point is accompanied with the tilt, the above avoidance process may be combined and calculated. Good.

  The present invention can be used for an X-ray inspection apparatus having a teaching function.

The block diagram which shows the structure of the X-ray inspection apparatus which is one Embodiment of this invention. The flowchart explaining the collision dangerous area setting operation | movement by the X-ray inspection apparatus of FIG. The figure explaining a collision avoidance route (in the case of parallel movement). The figure explaining a collision avoidance route (in the case of rotational movement). The flowchart in the case of performing tilting operation by the X-ray inspection apparatus of FIG. The figure explaining the collision avoidance route in the case of tilting.

Explanation of symbols

1: X-ray inspection apparatus 11: X-ray source 12: X-ray detector 13: X-ray measurement optical system 14: Stage 15: Drive mechanism 16: Optical camera 17: C-arm 18: Tilt mechanism 20: Control system 21: CPU
22: Keyboard 23: Mouse 24: Display device 31: X-ray image creation unit 32: X-ray image display control unit 33: Optical camera image creation unit 34: Optical camera image display control unit 36: Three-dimensional shape extraction unit 37: Measurement point Information input unit 38: Passing range extracting unit 39: Tilt upward input unit 40: X-ray measurement optical system passing range extracting unit 41: Collision determining unit 42: Avoidance route calculating unit 43: Moving route determining unit

Claims (3)

An X-ray measurement optical system composed of an X-ray source that irradiates fluoroscopic X-rays and an X-ray detector that captures a fluoroscopic X-ray image of the object to be measured, and an object to be measured between the X-ray source and the X-ray detector A stage for placing the object to be measured so that the object is positioned, and a drive mechanism for driving at least the stage in translation,
In an X-ray inspection apparatus that performs an X-ray inspection on a plurality of measurement points of a measurement object placed on the stage so that the positional relationship of the measurement object with respect to the stage is determined,
A three-dimensional shape extraction unit that extracts a three-dimensional shape that forms the appearance of the object to be measured or a three-dimensional shape that includes the appearance based on an optical camera image photographed by the optical camera;
A measurement point information input unit for receiving position information related to the measurement point;
A passing range extracting unit that extracts a range through which the moving object to be measured passes based on the three-dimensional shape extracted when moving between measurement points by the shortest path;
A collision determination unit that determines the possibility of collision based on the positional relationship between the X-ray measurement optical system and the passing range of the object to be measured;
An X-ray inspection apparatus comprising: an avoidance route calculation unit that calculates an avoidance route when there is a possibility of collision. The drive mechanism is further configured to rotationally drive the stage, the measurement point information input unit receives the rotation angle information together with the position information regarding the measurement point, and the passing range extraction unit rotates between the measurement points. The X-ray inspection apparatus according to claim 1, wherein a passing range of the object to be measured is extracted. An arm that integrally supports the X-ray measurement optical system, a tilt mechanism that tilts the arm, a tilt angle information input unit that receives input of information regarding the tilt angle, and a range through which the X-ray measurement optical system passes when tilting the arm An X-ray measurement optical system passage range extraction unit for extracting the collision, and the collision determination unit determines the possibility of collision based on the positional relationship between the range through which the X-ray measurement optical system passes and the position of the object to be measured The X-ray inspection apparatus according to claim 1.

Images