JP2007114547A - Microscope apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microscope apparatus capable of efficiently measuring an inspection object. <P>SOLUTION: The microscope apparatus 1 includes: an imager 7 for imaging the inspection object 12 through an objective lens 5 of prescribed magnification; a variable magnification optical system 6 for varying the projection magnification of the inspection object image from the objective lens 5 to the imager 7; a controller 8 for controlling the variable magnification optical system 6 and controlling the imager 7 while varying the projection magnification so as to continuously image the inspection object image; an image processor 9 for joining the inspection object images while distorting the inspection object images so that the visual field center part may have the highest projection magnification and the projection magnification becomes lower as it comes closer to the peripheral visual field from the center part, and forming one synthesized image; and a monitor apparatus 10 for displaying the synthesized image. The monitor apparatus 10 is configured to distort respective inspection object images so that the projection magnification may become nearly the same on the vicinity of the joint in the case of joining the inspection object images of different projection magnifications. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a microscope apparatus having a variable magnification optical system such as a zoom type or a turret type.

As a microscope apparatus that performs image processing of an image displayed by irradiating light from a light source onto a test object and measures the surface height and shape of the test object, for example, a test object displayed on a monitor device There is a technique in which coordinate data is input by superimposing a coordinate input screen on the surface, and information on the height of the test site indicated by the coordinates is acquired (for example, see Patent Document 1).
JP 7-159128 A

  By the way, in the measurement microscope apparatus as described above, since observation is generally performed at a high magnification at the time of measurement, an imaging field of view obtained by one imaging is small, and a wide range of test sites to be measured on the test object surface is scattered. It was difficult to find the measurement position. For this reason, in a conventional microscope apparatus, the measurer first selects a low-magnification objective lens, and after adjusting the stage and the specimen under this low magnification to obtain the optimum field of view of the specimen, The objective lens must be switched to a high magnification to measure the height and shape of the test object, which requires a lot of labor and time for measurement work, and is not easy to use.

  The present invention has been made in view of such problems, and an object of the present invention is to provide a microscope apparatus that can efficiently measure a test object.

  In order to achieve such an object, the present invention provides an image sensor that captures an object image through an objective lens having a predetermined magnification, and a projection of the object image from the objective lens onto the image sensor. A variable magnification optical system that changes the magnification, and a control unit that controls the image pickup element and continuously captures an object image while changing the projection magnification by controlling the variable magnification optical system (for example, the present embodiment) The control device 8) in the embodiment and the central portion of the field of view have the highest projection magnification, and the projection magnification decreases from the center portion toward the peripheral portion of the field of view. Are combined to create one composite image (for example, the image processing device 9 in the present embodiment) and display means for displaying the composite image (for example, the monitor device 10 in the present embodiment). And comprising Forming means, when joining the test object images having different projection magnification, so that the projection magnification is substantially coincident with the joint near configured to apply the distortion to each of said test object image.

  The synthesizing means adds a distortion to the test object image concentrically so that the central portion of the visual field has the highest projection magnification and the projection magnification decreases from the central portion toward the peripheral portion of the visual field. It is desirable to connect these to create a single composite image.

  Further, the synthesizing unit adds distortion to the test object image in a concentric quadrangular shape so that the projection magnification is highest at the center of the visual field and the projection magnification decreases from the central portion toward the peripheral portion of the visual field. It is desirable to connect them together to create a single composite image.

  Further, it is desirable that the synthesizing means does not add distortion to the test object image arranged at the center of the visual field and having the highest projection magnification.

  As described above, according to the present invention, the measurer can easily grasp the entire state of the test object by looking at the periphery of the visual field from one screen display, and can quickly find the measurement location. At the same time, if the center of the visual field is viewed, the microscope can be focused with high accuracy, and a microscope apparatus capable of measuring the test object efficiently can be realized.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. As shown in FIG. 1, a microscope apparatus 1 of the present invention includes a lamp light source 2, an illumination optical system 3 composed of a collector lens, a half mirror 4, an imaging optical system 5 composed of an objective lens having a predetermined magnification, The zoom lens system includes a zooming optical system 6 having a zooming mechanism, an imaging device 7 such as a CCD, a control device 8, an image processing device 9, a monitor device 10, and an XY stage 11.

  The variable magnification optical system 6 is for varying the projection magnification of the image of the test object 12 (hereinafter referred to as test object image) from the imaging optical system 5 (objective lens) onto the image sensor 7. The imaging lens system 5 and the variable magnification optical system 6 constitute a telecentric optical system.

  The control device 8 controls the imaging element 7 while continuously changing the projection magnification from low magnification to high magnification by controlling the variable magnification optical system 6 so as to continuously capture the image of the test object 12. is there.

  As shown in FIG. 2A, the image processing device 9 has the highest projection magnification in the visual field center portion 10a (of the display screen of the monitor device 10), and extends from the central portion 10a toward the visual field peripheral portions 10b and 10c. This is for creating a single composite image by adding distortion to the test object image and connecting them so that the projection magnification is low. More specifically, the image processing device 9 periodically collects test object images whose projection magnification changes constantly from low to high on the imaging surface of the image sensor 7 by the control device 8, and includes several discrete types. An object image having a projection magnification is obtained. Then, when connecting the object images with different projection magnifications collected as described above, the respective object images are distorted and connected so that the projection magnifications are almost the same in the vicinity of each joint. Together, one composite image is created. In the present embodiment, distortion is not applied to the test object image 10a arranged at the center of the visual field and having the highest projection magnification.

  Here, in the present embodiment, the image processing apparatus 9 is concentrically arranged so that the central field of view 10a has the highest projection magnification, and the projection magnification decreases from the central part 10a toward the visual field peripheral parts 10b and 10c. Although a single composite image is created by adding distortion to the object image and joining them together (see FIG. 2 (A)), the present invention is not limited to this. There may be.

  The monitor device 10 is for displaying the composite image created by the image processing device 9. A lamp light source 2, an illumination optical system (collector lens) 3, a half mirror 4, an imaging optical system (objective lens) 5, a variable magnification optical system 6, and an image sensor 7 are provided in a lens barrel 1 a of the microscope 1. And is movable in the Z direction (the direction indicated by the arrow C (the height direction)) with respect to the base portion 1b.

  In the microscope apparatus 1 having such a configuration, epi-illumination is used, and illumination light emitted from the lamp light source 2 is applied to the half mirror 4 via the illumination optical system 3 including a collector lens. The half mirror 4 transmits about half of the incident irradiation light and reflects the remaining light. The illumination light reflected by the half mirror 4 is an imaging optical system including an objective lens. 5, the light is condensed and irradiated on the field of view of the test object 12 placed on the XY stage 11 (so-called Koehler illumination).

  The light focused and irradiated on the test object 12 is reflected by the surface of the test object 12, is incident again on the imaging optical system (objective lens) 5, is collected, passes through the half mirror 4, and is changed. The image passes through the double optical system 6 to the image pickup device 7 and forms an image on the image pickup surface of the device 7. The image sensor 7 detects the intensity (brightness) of light and outputs an image signal to the image processing device 9 according to the intensity of the light.

  The test object 12 is placed on the XY stage 11 and disposed below the imaging optical system (objective lens) 5, and the X direction (direction indicated by the arrow A) and Y direction (shown by the arrow B) of the stage 11. By adjusting the (direction) position, the region to be measured is brought into the field of view.

  Here, the image composition processing of the image processing device 9 (microprocessor) will be described with reference to FIG. First, the variable magnification optical system 6 is set in a low magnification optical system and driven toward a high magnification (step S1). Next, it is detected that a plurality of predetermined magnifications are set in advance, and the image sensor 7 acquires an image at a predetermined rate (step S2). When the zoom optical system 6 is a zoom lens system, a sensor is provided in the zoom mechanism so that a predetermined magnification can be detected. In the case of the turret method, a sensor is provided at a position corresponding to each magnification lens of the switching mechanism 31 so that a predetermined magnification can be detected.

  Subsequently, the image data acquired in step S2 is sequentially stored in the storage device of the image processing device 9 (step S3), and it is determined whether or not the variable magnification optical system 6 has a predetermined high magnification (step S4). ). Here, if it is determined that the variable magnification optical system 6 does not have a predetermined high magnification, the process returns to step S2. On the other hand, if it is determined that the variable magnification optical system 6 has reached a predetermined high magnification, the process proceeds to step S5, and one sheet is obtained based on the low-magnification to high-magnification image data stored in the storage device of the image processing device 9. Are synthesized (step S5). Step S5 will be described in more detail. In the image processing device 9, as shown in FIG. 2A, the visual field center portion 10a has the highest projection magnification, and from the central portion 10a toward the visual field peripheral portions 10b and 10c. In order to reduce the projection magnification, the test object images are distorted and joined together so that the projection magnifications are concentric and substantially coincide with each other in the vicinity of the joint, thereby creating one composite image. The composite image created in this way is repeatedly subjected to the processing from step S1 to step S5 and is sequentially displayed on the monitor device 10 (step S6), and this processing ends.

  The variable magnification optical system 6 of the present embodiment has a low NA (numerical aperture NA) optical performance when set to a low magnification optical system, and when set to a high magnification optical system. The lens system is configured to have a relatively high optical performance compared to that at the time of low magnification. For this reason, the synthesized image on the monitor device 10 corresponds to an image having a low-magnification (low-magnification optical system 6 magnification) in the periphery of the visual field of the synthesized image. As a result, the visual field peripheral portions 10b and 10c of the composite image have a low depth of focus, and thus the depth of focus is deep, and the peripheral image plays the role of a focus indicator. ) Is easy to adjust. The focus adjustment in the Z-axis direction in the lens barrel 1a may be performed manually by the measurer or electrically.

  The measurer looks at the screen of the monitor device 10 on which the composite image created as described above appears, and easily grasps the entire state of the test object 12 from the periphery of the visual field, and moves the XY stage 11 in the XY directions. Thus, the measurement location can be quickly found. Furthermore, it is possible to focus with high accuracy by moving the lens barrel 1a in the Z direction from the center of the visual field on the same screen. And in the visual field center part 10a of the to-be-tested object 12, data, such as a pattern width and coordinate position information, are acquired, and well-known shape measurements, such as a shape, can be performed. Thus, in the microscope apparatus 1 of the present invention, the test object 12 can be measured efficiently.

  The present invention as described above is not limited to the above embodiment, and can be improved as appropriate without departing from the gist of the present invention. Hereinafter, those having the same functions as those of the above-described embodiment are denoted by the same reference numerals and description thereof is omitted.

  For example, the zoom optical system 6 of the present embodiment is configured to have a zoom lens type zoom mechanism (see FIG. 2A), but the present invention is not limited to this. As shown, the turret type switching mechanism 31 may be provided.

  Also, as shown in FIG. 4, two half mirrors 32 and 33 are arranged to provide a first image sensor 34 for high magnification (portion indicated by “× 10 region” in FIG. 4) and a low magnification. The second image sensor 35 in the portion (indicated by “× 8 region” to “× 1 region” in FIG. 4) may be configured separately. That is, the light emitted from the lamp light source (not shown) is condensed by the imaging optical system (objective lens) 5 on the field of view of the test object 12 and is reflected by the surface of the test object 12. Is incident on the imaging optical system 5 again and collected, and is transmitted through or reflected by the first half mirror 32. Here, the light transmitted through the first half mirror 32 passes through the optical system 36 for setting the projection magnification to a predetermined high magnification, and then to the first image sensor 34 for obtaining an image to be displayed at the center of the visual field. Configure to proceed. On the other hand, the light reflected by the first half mirror 32 is transmitted through the second half mirror 33 and enters the variable magnification optical system 37 whose projection magnification is variable to a predetermined low magnification. You may comprise so that it may progress to the 2nd image pick-up element 35 for obtaining the image for displaying. With this configuration, the mechanism can be more complicated than the above embodiment, but can further improve the accuracy in a region with a high projection magnification.

  In the embodiment shown in FIG. 4, the zoom optical system 37 is configured to have a zoom type zoom mechanism, but the present invention is not limited to this. For example, as shown in FIG. A turret type switching mechanism 38 may be provided. With such a configuration, vibration can be suppressed as compared with the microscope apparatus of FIG. 4, and the accuracy in a region with a higher projection magnification can be further improved.

It is a block diagram of the microscope apparatus which concerns on embodiment of this invention. It is an example of a screen displayed on the monitor apparatus of the microscope apparatus which concerns on embodiment of this invention. It is a control flowchart concerning the image composition processing of the image processing apparatus according to the embodiment of the present invention. It is a block diagram of the microscope apparatus which concerns on other embodiment of this invention. It is a block diagram of the microscope apparatus which concerns on other embodiment of this invention. It is a block diagram of the microscope apparatus which concerns on other embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Microscope apparatus 2 Lamp light source 3 Illumination optical system 4 Half mirror 5 Imaging optical system (objective lens)
6 Variable magnification optical system 7 Image sensor 8 Control device (control means)
9 Image processing device (compositing means)
10 Monitor device (display means)
11 XY stage 12 Test object

Claims (4)

An image sensor that captures an image of a test object via an objective lens having a predetermined magnification;
A variable power optical system that varies the projection magnification of the object image from the objective lens onto the image sensor,
Control means for controlling the imaging optical element and continuously imaging the test object image while changing the projection magnification by controlling the zoom optical system;
The central part of the visual field has the highest projection magnification, and the projection magnification is lowered from the central part toward the peripheral part of the visual field. A compositing means for creating one composite image;
Display means for displaying the composite image,
The synthesizing unit adds distortion to each of the test object images so that the projection magnifications substantially match in the vicinity of the joint when connecting the test object images having different projection magnifications. Microscope device.   The synthesizing means adds the distortion to the test object image concentrically so that the projection magnification is the highest at the center of the field of view and the projection magnification decreases from the center to the periphery of the field of view. The microscope apparatus according to claim 1, wherein a single composite image is created by joining together.   The synthesizing means applies a distortion to the test object image in a concentric quadrangular shape so that the projection magnification is the highest in the central part of the visual field and the projection magnification is reduced from the central part toward the peripheral part of the visual field. The microscope apparatus according to claim 1, wherein a single composite image is created by joining together.   The microscope apparatus according to any one of claims 1 to 3, wherein the synthesizing unit does not add distortion to the object image having the highest projection magnification arranged in the center of the visual field.

Images