JP2007112021A - Method and apparatus for micro-processing of photocuring resin - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a novel method and a novel apparatus for micro-processing of a photocuring resin by utilizing a scanning shear-force microscope and a micro-pipette probe. <P>SOLUTION: The method uses a scanning shear-force microscope equipped with a hollow micro-pipette probe 12 having an opened tip. It comprises filling the micro-pipette probe 12 with a liquid photocuring resin, bringing the tip of the micro-pipette probe 12 into contact with a specified point of the surface of a transparent substrate 18, allowing the liquid photocuring resin to drop on the surface of the transparent substrate 18 in a specified amount and illuminating the dropped resin with a laser beam 54 for excitation to cure the resin in order to form a deposit of the resin on the surface of the transparent substrate 18. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

The present invention relates to a micromachining method and apparatus using a scanning shear force microscope, and more particularly to a micromachining method and apparatus for a photocurable resin.

The scanning probe microscope is a microscope that can detect various physical quantities acting between the tip and the sample surface using a fine probe and can image the surface distribution of the physical quantities with high resolution at a nanoscale. This scanning probe microscope is known not only for observing the surface of a sample but also as a fine processing tool for the surface. The micro surface processing technology using the scanning probe microscope is relatively low cost and simple, has high processing accuracy from the atomic scale to the micro scale, and is expected as the next generation micro surface processing technology.

Such a fine surface processing technique is described in Non-Patent Document 1 below, for example. Non-Patent Document 1 below employs a micropipette probe as a probe of a scanning shear force microscope which is a kind of scanning probe microscope. Then, the micropipette is filled with a sample processing reagent solution (1,4-dioxane), the reagent is brought close to the polycarbonate substrate to be processed, and the substrate is processed with the vapor of the reagent. ing.
F. Iwata, et al. , “Submicrometer-scale fabrication of polycarbonate surface using a scanning micropipe probe microscope”, Nanotechnology 15 (2004) p. 422-426

  However, in such a conventional technique, a photocurable resin in a liquid state is dropped at a predetermined position on the surface of the substrate, and a portion of the dropped photocurable resin liquid is cured to a resin state, thereby A very small amount of resin could not be deposited on the surface.

  The present invention has been made in view of such circumstances, and a micropipette probe is filled with a photocurable resin in a liquid state using a combination of a scanning shear force microscope and a micropipette probe. Is dripped at a predetermined position on the surface of the transparent substrate from the tip of the substrate, and then the portion of the dripped photocurable resin liquid is cured with a laser beam to be cured into a resin state, on the surface of the transparent substrate. It is an object of the present invention to provide a fine processing method and apparatus capable of forming a photocurable resin deposit having a desired shape as appropriate.

  In order to achieve such an object, the microfabrication method for a photocurable resin according to the first invention of the present application includes a step of preparing a scanning shear force microscope provided with a hollow micropipette probe having an open tip, and the micropipette. Filling the interior of the probe with a photocurable resin liquid, contacting the tip of the micropipette probe with a predetermined position on the surface of the transparent substrate, and curing the photocuring on the surface of the transparent substrate A step of dripping a predetermined amount of the curable resin liquid, and a step of irradiating a portion of the dripped photocurable resin liquid with laser light to cure the dripped photocurable resin liquid part. Features.

  Further, in the microfabrication method for the photocurable resin according to the second invention of the present application, in the first invention, the angle at which the laser beam is totally reflected from the lower side with respect to the portion of the dropped photocurable resin liquid. The portion of the dropped photocurable resin liquid is excited by the evanescent light generated in the portion of the dropped photocurable resin liquid and cured.

  Furthermore, the microfabrication method of the photocurable resin of the third invention of the present application is the first and second inventions, wherein the micropipette probe is not contacted with the surface of the transparent substrate on which microfabrication has been performed. By scanning in a state, the processing state of the surface of the transparent substrate is observed using the scanning shear force microscope.

  Further, the photo-curable resin microfabrication apparatus of the fourth invention of the present application is a three-dimensional relative to the micropipette probe, a hollow micropipette probe having an open end, a sample stage, and the sample stage. A scanning shear force microscope having a moving mechanism for moving in the direction, a photocurable resin liquid filled in the micropipette probe, a transparent substrate placed on the sample stage, and a laser The photocurable resin liquid filled in the micropipette probe is dropped on the surface of the transparent substrate by a predetermined amount, and the dripped photocurable resin liquid is added to the portion of the dropped photocurable resin liquid. It is characterized by irradiating a laser beam from a laser irradiation device and curing the dripped portion of the photocurable resin liquid.

  Furthermore, in the microfabrication apparatus for photocurable resin according to the fifth invention of the present application, in the fourth invention, the angle at which the laser beam is totally reflected from the lower side with respect to the dropped photocurable resin liquid portion. The portion of the dropped photocurable resin liquid is excited by the evanescent light generated in the portion of the dropped photocurable resin liquid and cured.

  By providing a microfabrication method and apparatus for a photocurable resin according to the present invention, a photocurable resin in a liquid state is filled in a micropipette probe, and the tip of the micropipette probe is placed on a predetermined surface of a transparent substrate. A liquid photo-curing resin is dropped in contact with the position, and a portion of the dripped photo-curing resin liquid is irradiated with laser light to be cured in a resin state, so that a desired surface is appropriately formed on the surface of the transparent substrate. It becomes possible to form a deposit of a photocurable resin having a shape.

  In addition, by providing a microfabrication method and apparatus for the photo-curable resin of the present invention, by irradiating with laser light and irradiating it at an angle that causes total reflection when cured into a resin state, transmitted light and scattered light can be obtained. At the same time, it is possible to cure the dropped photocurable resin liquid by utilizing the generated evanescent light.

  Furthermore, by providing the micro-processing method and apparatus for the photocurable resin of the present invention, it is possible to observe the formation status of the photocurable resin deposited on the surface of the transparent substrate.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a block diagram of a scanning shear force microscope equipped with a micropipette probe for microfabrication of the photocurable resin of the present invention. The configuration of a scanning shear force microscope equipped with a micropipette probe is already known. Here, the configuration will be briefly described, but FIG. 1 illustrates the micro-processing of the photocurable resin of the present invention. A laser beam curing device for excitation is newly added and incorporated.

  In FIG. 1, a micropipette probe 12 is fixed on the central axis of a cylindrical probe support 10. An excitation piezoelectric element is incorporated in the probe support 10. The material of this piezoelectric element is PZT. Due to the vibration of the excitation piezoelectric element, the micropipette probe 12 vibrates in a direction perpendicular to the paper surface of FIG. The sample stage 14 can be moved within a predetermined moving distance in the XY direction (two-dimensional direction in a horizontal plane) and the Z direction (vertical direction) by a three-dimensional actuator driven by a piezoelectric element.

  A substrate support 16 is fixed to the upper surface of the sample stage 14. A transparent substrate 18 can be placed on the upper surface of the substrate support 16. The transparent substrate 18 may be a substrate made of glass, plastic, mica, or the like. Further, the transparent substrate 18 can be placed on the upper surface of the substrate support 16, but it is desirable that the transparent substrate 18 be fixed rather than simply placed. The micropipette probe 12 vibrates in the horizontal direction by the excitation piezoelectric element, and its amplitude is detected by an amplitude detector. The amplitude detection device includes a displacement detection laser diode 20, a condenser lens 22, and a two-divided photodiode 24. The displacement detection laser diode 20 emits a displacement detection laser beam having a wavelength of 670 nm, and this displacement detection laser beam 26 is condensed by the condenser lens 22 near the micropipette probe 12 and passed therethrough. The light is collected by the two-divided photodiode 24. The output of the two-divided photodiode 24 depends on the vibration amplitude of the micropipette probe 12.

  An excitation laser diode 50, reflectors 51 and 52, and a prism 53 are newly added for fine processing of the photocurable resin of the present invention, and are incorporated as an excitation laser light curing device. This excitation laser beam curing device is used for curing and depositing a liquid photocurable resin dropped on the surface of the transparent substrate 18 from the tip of the micropipette probe 12.

Next, the control system of the scanning shear force microscope will be described. In FIG. 1, an oscillation output signal 29 is supplied from an oscillator 28 to the excitation piezoelectric element incorporated in the probe support 10, and the probe support 10 vibrates in the horizontal direction at a predetermined resonance frequency. The output signal of the two-divided photodiode 24 depends on the vibration amplitude of the micropipette probe 12. This output signal passes through the IV converter 30, the arithmetic circuit 32, and the lock-in amplifier 34, and the vibration of the micropipette probe 12. Converted to amplitude. The lock-in amplifier 34 receives the signal of the oscillator 28 as the reference signal 33, and noise is removed by the lock-in amplifier 34. Vibration amplitude 35 of the micropipette probe 12 output from the lock-in amplifier 34
Is input to the control circuit 36.

  The control circuit 36 compares the vibration amplitude of the micropipette probe 12 with a predetermined reference value, and outputs a Z direction command signal 37 so that the vibration amplitude becomes equal to the reference value. That is, the Z direction command signal 37 is output so that the sample stage 14 is raised if the vibration amplitude is larger than the reference value, and conversely, if the vibration amplitude is smaller than the reference value, the sample stage 14 is lowered. To do. The Z direction drive signal is input to the Z direction drive circuit 40 of the PZT driver 38. The Z direction drive circuit 40 outputs a Z direction drive signal 41 to the Z direction PZT actuator.

  As a result, the sample stage 14 moves up and down by a minute distance, and the vibration amplitude of the micropipette probe 12 is always kept constant. The vibration amplitude of the micropipette probe 12 depends on the distance between the tip of the probe and the surface of the transparent substrate 18 as will be described later. The distance to the surface of the substrate 18 is kept constant.

The personal computer 44 outputs an XY direction command signal 45 to the XY direction drive circuit 42 of the PZT driver 38. The XY direction drive circuit 42 accordingly outputs an XY direction drive signal 43 to the XY direction actuator, and the sample stage 14 moves in the XY direction. Thus, a desired position on the surface of the transparent substrate 18 can be made to face the tip of the microprobe pipette 12. From the Z direction drive circuit 40, a Z direction command signal (this corresponds to the height signal of the surface of the substrate) is input to the personal computer 44. Therefore, the personal computer 44 can acquire the value of the Z direction command signal corresponding to the XY direction command signal, that is, the height signal at each position on the substrate surface, and based on this, the height of the substrate surface can be obtained. You can make an image.

FIG. 2 is an explanatory diagram showing the operation principle of the scanning shear force microscope. The upper state A is a state in which the distance d between the tip of the probe 57 and the surface of the sample 56 is sufficiently separated. At this time, the probe 57 vibrates at a predetermined resonance frequency, and the amplitude thereof is the maximum value Wmax. The upper B state is a state where the tip of the probe 57 approaches the surface of the sample 56 and the vibration amplitude of the probe 57 is affected by the sample 56.

  That is, when the probe 57 that vibrates near the resonance frequency approaches the sample 56, the probe 57 receives a lateral force called shear force. The vibration amplitude at this time becomes smaller than the state of A. When the probe 57 further approaches the sample 56, the vibration amplitude is rapidly attenuated. When the tip of the probe 57 comes into contact with the surface of the sample 56 as shown in the upper part C, the vibration amplitude becomes zero.

  The lower graph shows the distance d between the tip of the probe 57 and the surface of the sample 56 on the horizontal axis, and the vibration amplitude of the probe 57 on the vertical axis. When the distance d is larger than d1, it corresponds to the upper state A, and the vibration amplitude of the probe is Wmax. As the distance d becomes smaller than d1, the vibration amplitude decreases, and this intermediate state corresponds to the upper B state. When the distance d is further reduced and approaches zero, the vibration amplitude becomes zero. This corresponds to the upper C state. A region where the distance d is smaller than d1 is a control region, and this control region is defined as a region where the vibration amplitude changes according to the distance d.

  Assuming that a specific vibration amplitude value in this control area is a reference value Wref, if the distance d is controlled so that the vibration amplitude is always equal to the reference value Wref by scanning the sample relative to the probe. A change in the height of the sample surface can be expressed by a change in the distance d. In this way, the surface shape of the sample can be acquired. In the embodiment of the present invention, the reference value Wref is set to 80% of Wmax.

When the probe is gradually separated from the state in contact with the sample, the vibration amplitude of the probe increases, but its rising curve 58 is different from the falling curve 60 when the distance is reduced. That is, there is a hysteresis characteristic. The slope of the descending curve 60 is distance control (height control)
Shows the sensitivity.

FIG. 3 is a plan sectional view showing a method for manufacturing a micropipette probe. The micropipette probe is manufactured by a micropipette enlarger. The stretcher includes a first chuck 62, a second chuck 64, and a heating device 66. First chuck 6
Reference numeral 2 designates one end of the glass tube 68 to apply a pulling force 70 in the left direction of the drawing. The second chuck 64 grasps the other end of the glass tube 68 and applies a pulling force 72 in the right direction of the drawing.

  The heating device 66 includes a heating coil 74 that surrounds the periphery of the glass tube 68, and a heating power source 76 that supplies power to the heating coil 74. When a tensile force is applied to the glass tube 68 by the two chucks 62 and 64, power is supplied from the heating power source 76 to the heating coil 74 to heat the center of the glass tube 68, and the center of the glass tube 68 is softened. As it grows, its diameter becomes smaller and finally it is separated at the center.

  This produces a micropipette probe with a tapered tip. By adjusting the strength of the tensile force applied to the two chucks 62 and 64 and the power supplied by the heating power source 76, the opening diameter of the tip of the micropipette probe to be completed can be changed. The higher the temperature, the smaller the opening diameter tends to be. In the embodiment, the one having an opening diameter of about 200 nm is used. Note that the heating device is not limited to the above-described means, and for example, a heating means using a laser can be used.

  FIG. 4 is a plan view showing a schematic shape of the completed micropipette probe. In FIG. 4, a first tapered portion 77 and a second tapered portion 78 are formed near the tip of the micropipette probe 12.

  FIG. 5 is an explanatory view showing the structure of the micropipette probe. In FIG. 5, the tip vicinity 82 of the hollow micropipette probe 12 has a tapered shape, and the tip is open. The opening diameter is about 200 nm. The inside of the micropipette probe 12 is filled with a photocurable resin liquid 80.

  In this example, a photocurable resin stock solution having a photosensitive wavelength of 500 nm and a viscosity of 100 mPa · s (25 ° C.) was diluted 1.5 times with acetone as the photocurable resin solution 80. I am using something. By bringing the tip of the micropipette probe 12 filled with the photocurable resin liquid 80 into contact with the transparent substrate 18, the photocurable resin liquid 80 is dropped onto the surface of the transparent substrate 18 and cured. As a result, a photocurable resin deposit 84 is formed. In addition, the photocurable resin liquid is not limited to the above, and by adjusting the types and composition ratios of monomers, oligomers, photoinitiators, etc., the solvent can be added to the probe as in this example. It is also possible to use a photocurable resin liquid adjusted to a viscosity that can be filled.

  FIG. 6 is an explanatory diagram showing the principle for curing the photocurable resin liquid dropped on the surface of the transparent substrate. In FIG. 6, the excitation laser beam 54 is applied to the portion of the photocurable resin liquid dropped on the surface of the transparent substrate 18 through the prism 53 and the transparent substrate 18. Further, the excitation laser beam 54 to be irradiated is incident on the dropped portion of the photocurable resin liquid at an angle that totally reflects from below. In this case, evanescent light 86 that exudes from the reflecting surface is generated. The photocurable resin liquid is excited and cured by the evanescent light 86, and a photocurable resin deposit 84 is formed. The irradiated excitation laser beam 54 is incident on the dropped photocurable resin liquid at an angle that totally reflects from below, so that no light enters the micropipette probe 12. Moreover, the photocurable resin liquid 80 filled in the micropipette probe 12 is kept in a liquid state, and continuous processing is possible.

  In this embodiment, a glass substrate having a refractive index of 1.52 is used as the transparent substrate 18, and a prism having a refractive index of 1.52 is used as the prism 53. Further, a matching oil 88 is used to temporarily fix the glass substrate and the prism and prevent air from entering between them. The matching oil 88 is a matching oil having a refractive index of 1.52 which is the same as that of the glass substrate and the prism, thereby preventing total reflection between the glass substrate and the prism.

  Further, the excitation laser beam 54 is emitted from the excitation laser diode 50 of FIG. 1 through a nozzle (not shown), and passes through the reflection plate 51, the reflection plate 52, the prism 53, the matching oil 88, and the glass substrate which is the transparent substrate 18. Then, it is controlled so as to be incident on the portion of the photocurable resin liquid dropped on the surface of the glass substrate at an angle that totally reflects from the lower side. In addition, since the irradiation spot diameter of the excitation laser beam 54 can be set to, for example, about 0.2 to 2 mm, the processing area by the probe is sufficiently covered and irradiated without changing the laser irradiation position. Is possible. In FIG. 6, the excitation laser beam 54 drawn by hatching is a part of the irradiation spot diameter.

  Further, as the excitation laser beam 54, an argon ion laser having a wavelength of 488 nm and an output of 12 mW is used. However, the present invention is not limited to this, as long as the wavelength matches the photosensitive wavelength of the photocurable resin. On the contrary, the photocurable resin to be used may be any resin as long as its photosensitive wavelength matches the wavelength of the laser. In general, since an ultraviolet curable resin is widely used as the photocurable resin, it is desirable to use an ultraviolet laser instead of a visible light laser in that case. In addition, the laser irradiation time may be a time sufficient for the photocurable resin dropped on the surface of the substrate to be cured, and is determined in consideration of the photocurability of the photocurable resin, the intensity of the laser, and the like. It ’s fine.

  Next, the processing procedure of the photocurable resin will be described collectively. First, the inside of the micropipette probe 12 is filled with the photocurable resin liquid 80 described with reference to FIG. In FIG. 1, an XY direction command signal 45 is output from the personal computer 44 to move the sample table 14 in the XY direction, and a desired point on the glass substrate which is the transparent substrate 18 (a point where the photocurable resin is to be deposited). ) Is brought directly under the micropipette probe 12.

  Next, the control circuit 36 is set to the processing mode, and the Z direction command signal 37 is output until the glass substrate is sufficiently close to the tip of the micropipette probe 12. When the vibration amplitude of the micropipette probe 12 becomes near zero, it is determined that the tip of the micropipette probe 12 is in contact with the glass substrate. When the tip of the micropipette probe 12 comes into contact with the glass substrate, the photocurable resin liquid 80 is dropped from the tip of the micropipette probe 12 to a desired point on the surface of the glass substrate. In addition, this dripping is performed so that the photocurable resin liquid that has exuded from the tip of the probe contacts the glass substrate and is transferred in the form of wrinkles.

  Note that the amount of the photocurable resin liquid to be dropped depends on the length of time (hereinafter referred to as processing time) in which the tip of the micropipette probe 12 is kept in contact with the glass substrate. Then, as described with reference to FIG. 6, the excitation laser beam 54 is incident from the lower side with respect to the portion of the photocurable resin liquid dripped at a desired point on the surface of the glass substrate at an angle at which it is totally reflected. The photocurable resin liquid dropped by the generation of the evanescent light 86 is cured to form a photocurable resin deposit 84.

  FIG. 7 is an image of an acquired image and a line in the image obtained by depositing 1 dot on a glass substrate by microfabrication of the photocurable resin of the present invention based on the embodiment of FIGS. The height change of the dot along is shown.

  FIG. 7A shows a case where the processing time is 0.4 seconds and the irradiation time of the excitation laser light is about 2 seconds. The upper part of FIG. 7A is a line drawing from the acquired image, and a deposit 90-1 having a size of about 180 nm is formed at the center thereof. The line drawing is drawn by dropping a photo-curable resin liquid onto a glass substrate and irradiating it with an excitation laser beam. Then, the micropipette probe is scanned in a non-contact state on the glass substrate in the observation mode. It is obtained from the acquired image. Only where there is sediment is high, and the high part is shown separately from other parts (hatched).

  The lower part of FIG. 7A shows the height change along the line 94 in the upper image. The horizontal axis is the position along the line 94, and the vertical axis is the height of the glass substrate surface. In the vicinity of the center, a high portion is observed with a dot width of 180 nm, and this portion corresponds to a deposit. The deposition amount is 0.09 aL.

  FIG. 7B shows a case where the processing time is 6 seconds and the excitation laser light irradiation time is about 2 seconds. The upper part of FIG. 7B is a line drawing from the acquired image, and a deposit 92-1 having a size of about 230 nm is formed at the center thereof. Only where there is sediment is high, and the high part is shown separately from other parts (hatched). The lower part of FIG. 7A shows the height change along the line 96 in the upper image. The horizontal axis is the position along the line 96, and the vertical axis is the height of the glass substrate surface. In the vicinity of the center, a high portion is observed with a dot width of 230 nm, and this portion corresponds to a deposit. The deposition amount is 0.37 aL.

  FIG. 8 is a graph showing the relationship between processing time, dot width, and dot height in a one-dot deposition process of a photocurable resin. FIG. 8A shows the relationship between processing time and dot width, and FIG. 8B shows the relationship between processing time and dot height.

  In FIG. 8A, the horizontal axis is the processing time, and the vertical axis is the dot width. Plot 90-2 shows the case of FIG. 7A, and plot 92-2 shows the case of FIG. 7B. The other plots are plotted based on the same procedure and method as in FIGS. 7A and 7B. In FIG. 8B, the horizontal axis is the processing time, and the vertical axis is the dot height. Plots 90-3 and 92-3 show the cases of FIGS. 7A and 7B, respectively. The other plots are plotted based on the same procedure and method as in FIGS. 7A and 7B. As the processing time increases, both the dot width and the dot height tend to increase.

  7 and 8 are line drawings from acquired images obtained by forming a 1-dot deposit on a glass substrate by microfabrication of the photocurable resin of the present invention based on the examples of FIGS. Although the plotted data, dot width, dot height, and other data are shown, a plurality of dots can be continuously deposited on the glass substrate. 4 shows a method for manufacturing a micropipette probe, and FIG. 5 shows a schematic shape of the micropipette probe. By replacing the micropipette probe with a micropipette probe having a smaller opening diameter at the tip of the micropipette probe, FIG. It is also possible to form deposits that are even smaller than the deposits shown in a).

  Furthermore, it is also possible to form dots by further overlapping the dots formed, and to form other dots etc. in close contact with the periphery of the dots, and can be formed into a desired shape as appropriate. In addition, by devising the surface treatment of the substrate, it is possible to form the photocurable resin by firmly adhering to the substrate, or to peel the photocurable resin formed on the substrate from the substrate. . For example, the finely processed product of the peeled photocurable resin can be used as a micropart.

  Therefore, by providing the micro-processing method and apparatus for the photo-curable resin of this example, the photo-curable resin liquid is filled in the micro-pipette probe, and the tip of the micro-pipette probe is set on the surface of the transparent substrate. The photocurable resin liquid is dropped by contact with the position of the substrate, and a portion of the dropped photocurable resin liquid is irradiated with laser light to be cured from the liquid state to the resin state, so that a small amount of the liquid is cured on the substrate surface. It becomes possible to deposit a photocurable resin.

  It is also possible to observe the deposition state of the photocurable resin deposited on the surface of the substrate. Furthermore, by arbitrarily selecting the processing conditions such as the processing time, the opening diameter of the tip of the micropipette probe, etc., it becomes possible to adjust the amount and shape of the photocurable resin deposited on the surface of a transparent substrate such as a glass substrate. A deposit having a desired shape can be formed as appropriate.

  The photo-curable resin microfabrication method and apparatus of the present invention uses a scanning shear force microscope and a micropipette probe to drop a photo-curable resin liquid onto the surface of a transparent substrate. A microfabrication method and apparatus for forming a minute amount of deposits by irradiating a resin liquid portion with an excitation laser beam, which is a photocurable resin widely used in industry today. In addition, it can be used for manufacturing fine devices such as optical waveguides, micromachines, and nanomachines.

FIG. 1 is a block diagram of a scanning shear force microscope equipped with a micropipette probe for microfabrication of the photocurable resin of the present invention. It is explanatory drawing which shows the operating principle of a scanning shear force microscope. It is plane sectional drawing which shows the manufacturing method of a micropipette probe. It is a top view which shows schematic shape of a micropipette probe. It is explanatory drawing which shows the structure of a micropipette probe. It is explanatory drawing which shows the principle for hardening | curing a photocurable resin liquid. It is a figure which shows the height change of the dot along the image figure of the acquired image of 1 dot deposition processing of photocurable resin, and the line in an image. It is a graph which shows the relationship between the processing time, dot width, and dot height in 1 dot deposition processing of photocurable resin.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Probe support body 12 Micropipette probe 14 Sample stage 16 Substrate support body 18 Transparent substrate 20 Displacement detection laser diode 24 Divided photodiode 28 Oscillator 30 IV converter 32 Calculation circuit 34 Lock-in amplifier 36 Control circuit 38 PZT Driver 40 Z direction drive circuit 42 XY direction drive circuit 44 Personal computer 50 Excitation laser diode 51 Reflection plate 52 Reflection plate 53 Prism 54 Excitation laser light 80 Photocurable resin liquid 84 Photocurable resin deposit 86 Evanescent light 88 Matching oil

Claims (5)

Preparing a scanning shear force microscope having a hollow micropipette probe with an open tip, filling a photocurable resin liquid inside the micropipette probe, and clearing the tip of the micropipette probe A step of bringing the photocurable resin liquid into contact with a predetermined position on the surface of the transparent substrate, a step of dropping the photocurable resin liquid by a predetermined amount on the surface of the transparent substrate, and a portion of the dropped photocurable resin liquid Irradiating a laser beam to cure the dripped portion of the photocurable resin liquid, and a method for finely processing the photocurable resin.   The laser beam is irradiated at an angle that totally reflects the lower part of the dropped photocurable resin liquid from the lower side, and the dropped photocurable resin is generated by evanescent light generated in the dropped photocurable resin liquid part. The method for microfabricating a photocurable resin according to claim 1, wherein the resin liquid portion is excited and cured.   Observe the processing state of the surface of the transparent substrate using the scanning shear force microscope by scanning the micropipette probe in a non-contact state on the surface of the transparent substrate subjected to microfabrication. The method for microfabrication of a photocurable resin according to claim 1 or 2, wherein:   A scanning shear force microscope comprising: a hollow micropipette probe having an open end; a sample stage; and a moving mechanism for moving the sample stage in a three-dimensional direction relative to the micropipette probe; A photocurable resin liquid filled in the micropipette probe, a transparent substrate placed on the sample stage, and a laser irradiation device, and the micropipette probe on the surface of the transparent substrate. A predetermined amount of the photocurable resin liquid filled therein is dropped, and a portion of the dropped photocurable resin liquid is irradiated with a laser beam from the laser irradiation device to drop the photocurable resin liquid. A micro-processing apparatus for photo-curing resin, characterized in that the part of the resin is cured.   The laser beam is irradiated at an angle that totally reflects the lower part of the dropped photocurable resin liquid from the lower side, and the dropped photocurable resin is generated by evanescent light generated in the dropped photocurable resin liquid part. The micro-processing apparatus for photocurable resin according to claim 4, wherein a portion of the resin liquid is excited and cured.

Images