JP2007111680A - Drawing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a drawing device which can draw a pattern with excellent quality even when sizes of land diameters vary widely. <P>SOLUTION: The drawing device comprises a first position controller 104 for moving a substrate 10A in a first scanning direction, a second position controller 108 mounting a droplet discharge head 114 for discharging droplets to a reference area on the substrate 10A, and moving the droplet discharge head 114 in a second scanning direction almost perpendicularly intersecting the first scanning direction, a measuring part 140 for measuring the land diameter of the droplet discharged from the droplet discharge head 114, an operation part 206 for calculating a grid size M for determining the width of the reference area, based on the measurement result of the land diameter measured by the measuring part 140, and a control part 112 for controlling the first position controller 104, the second position controller 108, the measuring part 140, and the operation part 206. After the grid size M is determined by the control part 112, drawing is started. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a drawing apparatus that draws a pattern by discharging droplets onto a substrate.

  2. Description of the Related Art Conventionally, an ink jet type droplet discharge device is known as a device for discharging droplets to a substrate. For example, a droplet discharge device disclosed in Patent Document 1 includes a multi-nozzle type droplet discharge head including a plurality of discharge nozzles and a stage, and droplets are applied to a substrate placed on the stage. To draw a pattern.

JP 2004-932 A

  However, in this droplet discharge device, there is a drawing method in which droplets are dropped while keeping an interval so that the droplets to be dropped do not come into contact with each other, and then the droplets are dropped at a gap to form a pattern. Adopted. For this reason, if the amount of droplets to be dropped is large, the first droplets come into contact with each other (large landing diameter), and the droplets concentrate locally, resulting in non-uniform film thickness distribution. was there. In addition, when the amount of droplets to be dropped is small, the interval between the droplets becomes too wide (the landing diameter is too small), and there may be places where the droplets are absent, which may cause disconnection or the like. It was. When variations occur in the size of the landing diameter, it is difficult to form a pattern with stable quality. Therefore, there has been a demand for a drawing apparatus capable of drawing a pattern having a stable quality even if the landing diameter varies.

  An object of the present invention is to provide a drawing apparatus capable of drawing a pattern having a good quality even if the size of the landing diameter varies.

  The drawing device of the present invention is a drawing device for drawing a pattern in a reference region on a substrate, the first position control device for moving the substrate in a first scanning direction, and the liquid for discharging droplets on the substrate. A second position control device that mounts a droplet discharge head and moves the droplet discharge head in a second scanning direction substantially orthogonal to the first scanning direction; and A measurement unit for measuring a landing diameter, a calculation unit for calculating the width of the reference region based on a measurement result of the landing diameter measured by the measurement unit, the first position control device, and the second A position control device, a control unit that controls the measurement unit, and the calculation unit are provided, and the control unit starts drawing after determining the size of the reference region.

  According to the present invention, since the drawing diameter of the droplet is measured and the drawing is started after calculating the width of the reference area based on the measurement result of the landing diameter, the size of the landing diameter of the droplet is determined. The size of the reference area can be determined according to the above. Since the width of the reference region is determined in advance, it is possible to reduce the overlapping of the dropped droplets and the lack of the droplets. Therefore, it is possible to provide a drawing apparatus capable of drawing a pattern with stable quality.

  The drawing apparatus of the present invention is characterized in that the control unit includes a data storage unit for storing drawing data of the landing diameter.

  According to the present invention, since the control unit includes the drawing data storage unit, it is possible to take out the impact diameter data from the drawing data storage unit. By using the drawing data stored in the drawing data storage unit in real time, it is possible to select and determine the optimum drawing data necessary for drawing a pattern in a short time, so that drawing can be performed efficiently. It is possible to provide a drawing apparatus capable of performing the above.

  The drawing apparatus of the present invention is characterized in that the control unit includes a detection unit that detects timing when the landing diameter is measured.

  According to the present invention, since the control unit is provided with the detection unit that detects the timing when the landing diameter is measured, the size of the landing diameter at the time of landing can be accurately measured. By calculating the size by the calculation unit, the size of the reference region according to the size of the landing diameter can be set with high accuracy. In addition, the timing for measuring the impact diameter can be set arbitrarily. In addition, since it can be set in a short time, it is possible to provide a drawing apparatus capable of drawing efficiently and with high accuracy.

  The drawing apparatus of the present invention is characterized in that the control unit includes a drive voltage adjustment unit that adjusts the ejection amount of the droplets.

  According to this invention, if the control unit includes a drive voltage adjustment unit that adjusts the droplet discharge amount, the droplet discharge amount can be adjusted according to the width of the reference region. Variations in the landing diameter can be reduced. Therefore, it is possible to provide a drawing apparatus that can draw a pattern of stable quality.

  The circuit board of the present invention is a circuit board having a substrate and a pattern formed on the substrate, and is characterized by being formed using any of the drawing apparatuses described above.

  According to the present invention, since the pattern is formed by using the drawing apparatus capable of drawing a stable quality pattern, a circuit board having a stable quality can be provided.

Hereinafter, embodiments of the drawing apparatus of the present invention and a circuit board formed using the drawing apparatus will be described in detail with reference to the accompanying drawings.
(Embodiment)
<Configuration of drawing apparatus>

  FIG. 1 is a schematic diagram illustrating a configuration of a drawing apparatus according to the present embodiment.

  As shown in FIG. 1, the drawing apparatus 100 is basically a droplet discharge device. More specifically, the droplet discharge device (drawing device) 100 includes a tank 101 that holds the functional liquid 111, a tube 110, a ground stage GS, a discharge head unit 103, a stage 106, and a first position control. The apparatus 104, the second position control device 108, the measurement unit 140, the control unit 112, and the support unit 109 are configured.

  The discharge head unit 103 holds a head 114 (see FIG. 2). The head 114 ejects droplets of the functional liquid 111 in response to a signal from the control unit 112. The head 114 in the discharge head unit 103 is connected to the tank 101 by a tube 110, and the functional liquid 111 is supplied from the tank 101 to the head 114.

  The stage 106 has a flat surface for fixing the substrate 10A. Furthermore, the stage 106 also has a function of fixing the position of the substrate 10A using a suction force. Here, the substrate 10A is a flexible substrate made of polyimide, and the shape thereof is a tape shape. Further, both ends of the substrate 10A are fixed to a pair of reels (not shown).

  The first position control device 104 moves the stage 106 in the Y-axis direction on the ground stage GS in accordance with a signal from the control unit 112. Here, the Y-axis direction is a direction orthogonal to both the X-axis direction and the Z-axis direction.

  The second position control device 108 is fixed at a predetermined height from the ground stage GS by the support portion 109. The second position control device 108 has a function of moving the ejection head unit 103 along the X-axis direction and the Z-axis direction orthogonal to the X-axis direction in accordance with a signal from the control unit 112. Further, the second position control device 108 also has a function of rotating the ejection head unit 103 in the rotation direction of an axis parallel to the Z axis. Here, the Z-axis direction is a direction parallel to the vertical direction (that is, the direction of gravitational acceleration).

  The configuration of the first position control device 104 and the configuration of the second position control device 108 having the above functions can be realized by using a known XY robot using a linear motor or a servo motor. For this reason, description of those detailed structures is abbreviate | omitted here. The first position control device 104 and the second position control device 108 are also referred to as “robot” or “scanning unit”.

  Then, the first position controller 104 moves the substrate 10 </ b> A along with the stage 106 in the Y-axis direction. The ejection head unit 103 is moved in the X-axis direction by the second position control device 108. As a result, the relative position of the head 114 with respect to the substrate 10A changes. More specifically, by these operations, the ejection head unit 103, the head 114, or the nozzle 118 (see FIG. 2) maintains a predetermined distance in the Z-axis direction with respect to the substrate 10A, and the X-axis direction and Move relatively in the Y-axis direction, that is, scan relatively. “Relative movement” or “relative scanning” means that at least one of the side on which the functional liquid 111 is discharged and the side on which the discharged functional liquid 111 is landed is moved relative to the other.

  Here, in the present embodiment, the Y-axis direction is the “first scanning direction”. The X-axis direction substantially orthogonal to the “first scanning direction” is the “second scanning direction”.

  The measurement unit 140 includes a support unit 141 fixed to the ground stage GS and a measurement device 142. The measuring device 142 is fixed to a position at a predetermined height from the ground stage GS by the support part 141, and can measure the size of the landing diameter of the droplet dropped on the substrate 10A. Note that the measuring device 142 is a camera that can recognize an image. The measuring device 142 can transmit the measured landing diameter data to the measuring unit 203 (see FIG. 4).

  The control unit 112 is configured to receive ejection data representing a relative position at which the droplet D of the functional liquid 111 is to be ejected from the external information processing apparatus. The control unit 112 stores the received discharge data in an internal storage device, and according to the stored discharge data, the first position control device 104, the second position control device 108, the head 114, and a measurement unit. 140 is controlled. In the present embodiment, the ejection data has the form of bitmap data.

The droplet discharge device 100 having the above configuration moves the nozzle 118 (see FIG. 2) of the head 114 relative to the substrate 10A in accordance with the discharge data, and the functional liquid 111 from the nozzle 118 toward the substrate 10A. Discharge. Then, the landing diameter of the droplet dropped on the substrate 10A is measured by the measuring unit 140. Based on the measurement result, if the landing diameter is within the standard, the droplet discharge device 100 is driven to draw. Has the function to start. Further, the droplet discharge device 100 also has a function of changing the grid size to a required size if the measured landing diameter is not within the standard. Further, the droplet discharge device 100 has a function of adjusting the amount of droplets according to the size of the grid size. The relative movement of the head 114 by the droplet discharge device 100 and the discharge of the functional liquid 111 from the head 114 may be collectively referred to as “discharge scan”.
<Head>

  FIG. 2 is a schematic diagram illustrating nozzle rows in the head of the drawing apparatus.

  As shown in FIG. 2, the head 114 is one of a plurality of heads 114 included in the discharge head unit 103 (see FIG. 1). FIG. 2 is a view of the head 114 as viewed from the stage 106 side, and shows the bottom surface of the head 114. The head 114 has a nozzle row 116 extending in the X-axis direction. The nozzle row 116 is composed of a plurality of nozzles 118 arranged substantially evenly in the X-axis direction. The plurality of nozzles 118 are arranged such that the nozzle pitch HXP in the X-axis direction is about 70 μm. Here, the “nozzle pitch HXP in the X-axis direction” is a pitch between a plurality of nozzle images obtained by projecting all of the nozzles 118 in the head 114 onto the X-axis from a direction orthogonal to the X-axis direction. Equivalent to.

  Here, the direction in which the nozzle row 116 extends is referred to as “nozzle row direction ND”. In this embodiment, the nozzle row direction ND is parallel to the X-axis direction, and is thus orthogonal to the Y-axis direction. However, in some cases, the nozzle row direction ND may be different from the X-axis direction and the Y-axis direction. The number of nozzles 118 in the nozzle row 116 is 180. However, the number of nozzles 118 in one head 114 is not limited to 180. For example, one head 114 may be provided with 360 nozzles.

  FIG. 3 is a schematic diagram showing the structure of the head. (A) is a schematic perspective view, (b) is a schematic sectional drawing.

  As shown in FIGS. 3A and 3B, each head 114 is an inkjet head. More specifically, each head 114 includes a vibration plate 126, a nozzle plate 128 provided with a plurality of nozzles, a liquid pool 129, a plurality of partition walls 122, a plurality of cavities 120, and a plurality of vibrators. 124. The liquid pool 129 is located between the diaphragm 126 and the nozzle plate 128, and is always filled with the functional liquid 111 supplied from the tank 101 (see FIG. 1) through the hole 131.

  As shown in FIG. 3A, the plurality of partition walls 122 are located between the diaphragm 126 and the nozzle plate 128. A portion surrounded by the pair of partition walls 122, the diaphragm 126, and the nozzle plate 128 is the cavity 120. Since the cavities 120 are provided corresponding to the nozzles 118, the number of the cavities 120 and the number of the nozzles 118 are the same. The functional liquid 111 is supplied to the cavity 120 from the liquid pool 129 through the supply port 130 positioned between the pair of partition walls 122.

  As shown in FIG. 3B, the vibrator 124 is positioned on the diaphragm 126 so as to correspond to each cavity 120. The vibrator 124 includes a piezo element 124C, and a pair of electrodes 124A and 124B sandwiching the piezo element 124C. Then, by applying a drive voltage between the pair of electrodes 124A and 124B, the functional liquid 111 is discharged from the corresponding nozzle 118. The shape of the nozzle 118 is adjusted so that the functional liquid 111 is discharged from the nozzle 118 in the Z-axis direction.

A portion including one nozzle 118, a cavity 120 corresponding to the nozzle 118, and a vibrator 124 corresponding to the cavity 120 may be referred to as “ejection unit 127”. According to this notation, one head 114 has the same number of ejection units 127 as the number of nozzles 118. The discharge unit 127 may include an electrothermal conversion element instead of the piezo element. That is, the discharge unit 127 may have a configuration for discharging the functional liquid 111 using thermal expansion of the material by the electrothermal conversion element.
<Control unit>

  FIG. 4 is a block diagram illustrating a control unit of the droplet discharge device.

  Next, the configuration of the control unit 112 will be described with reference to FIG. The control unit 112 includes a processing unit 201, a storage device 202, a measurement unit 203, an input buffer memory 204, a scan driving unit 208, and a head driving unit 209. The processing unit 201, the storage device 202, the measurement unit 203, the input buffer memory 204, the scan driving unit 208, and the head driving unit 209 are connected to each other via a bus (not shown) so as to communicate with each other. The scan driver 208 is connected to the first position control device 104 and the second position control device 108 so as to communicate with each other. Similarly, the head driving unit 209 is connected to each of the plurality of heads 114 so as to be able to communicate with each other. Similarly, the measurement unit 203 is connected to a camera 142 capable of image recognition so as to communicate with each other.

  The processing unit 201 includes a recording unit 205 that records the landing diameter data of the droplet D, a calculation unit 206 that calculates the grid size, a head drive voltage adjustment unit 207 that adjusts the discharge amount of the functional liquid, It consists of

The measurement unit 203 can measure the landing diameter of the droplet D by detecting the arrangement position of the droplet D arranged on the substrate 10A. Then, the measurement unit 203 supplies the measurement data of the landing diameter of the droplet D to the processing unit 201, and the processing unit 201 stores the measurement data of the landing diameter in the recording unit 205.
The recording unit 205 can store and record the impact diameter data measured by the measurement unit 203. The calculation unit 206 can calculate and determine the size of the grid size according to the size of the landing diameter measured by the measurement unit 203. Further, the head drive voltage adjustment unit 207 can change the discharge amount of the functional liquid according to the grid size calculated by the calculation unit 206. Then, the control unit 112 can store the obtained data in the storage device 202.

  The input buffer memory 204 receives ejection data for ejecting the droplets D of the functional liquid 111 from a computer (not shown) located outside the droplet ejection apparatus 100. The input buffer memory 204 supplies the ejection data to the processing unit 201, and the processing unit 201 stores the ejection data in the storage device 202. The storage device 202 is a RAM.

  The processing unit 201 gives data indicating the relative position of the nozzle 118 to the substrate 10 </ b> A to the scan driving unit 208 based on the ejection data in the storage device 202. The scan driver 208 gives the second position controller 108 a stage drive signal corresponding to this data and the ejection cycle EP (see FIG. 5B). As a result, the head 114 scans relative to the substrate 10A. On the other hand, the processing unit 201 gives a selection signal SC (i) (see FIG. 5B) to the head driving unit 209 based on the ejection data stored in the storage device 202. Then, the droplet D of the functional liquid 111 is ejected from the corresponding nozzle 118 in the head 114.

  The control unit 112 is a computer including a CPU, a ROM, a RAM, an external interface unit, and a bus that connects these components so as to communicate with each other. Therefore, the function of the control unit 112 is realized by the CPU executing a software program stored in the ROM or RAM. Of course, the control unit 112 may be realized by a dedicated circuit (hardware).

  FIG. 5A is a schematic diagram illustrating a head driving unit in the control unit, and FIG. 5B is a timing chart illustrating a selection signal, a driving signal, and an ejection signal.

  Next, the configuration and function of the head drive unit 209 in the control unit 112 will be described with reference to FIGS.

  As shown in FIG. 5A, the head drive unit 209 includes one drive signal generation unit 211 and a plurality of analog switches AS. The drive signal generation unit 211 generates a drive signal DS. The potential of the drive signal DS changes with respect to the reference potential L over time. Specifically, the drive signal DS includes a plurality of ejection waveforms P that are repeated at the ejection cycle EP. Here, the ejection waveform P corresponds to the waveform of the drive voltage to be applied to the corresponding vibrator 124 (see FIG. 3) in order to eject one droplet D from the nozzle 118.

  The drive signal DS is supplied to each input terminal of the analog switch AS. Here, each of the analog switches AS is provided corresponding to each of the ejection units 127.

  The processing unit 201 (see FIG. 4) supplies a selection signal SC (i) indicating ON / OFF of the nozzle 118 to each analog switch AS. Here, the selection signal SC (i) can take either a high level or a low level independently for each analog switch AS. On the other hand, the analog switch AS supplies the ejection signal ES (i) to the electrode 124A of the vibrator 124 in accordance with the drive signal DS and the selection signal SC (i). Specifically, when the selection signal SC (i) is at a high level, the analog switch AS propagates the drive signal DS as the ejection signal ES (i) to the electrode 124A. On the other hand, when the selection signal SC (i) is at a low level, the potential of the ejection signal ES (i) output from the analog switch AS is the reference potential L. When the drive signal DS is given to the electrode 124A of the vibrator 124, the functional liquid 111 is discharged from the nozzle 118 corresponding to the vibrator 124. A reference potential L is applied to the electrode 124B of each vibrator 124.

  As shown in FIG. 5B, in each of the two ejection signals ES (1) and ES (2), the two selection signals SC so that the ejection waveform P appears in a cycle 2EP that is twice the ejection cycle EP. In each of (1) and SC (2), a high level period and a low level period are set. As a result, the functional liquid 111 is discharged from each of the two corresponding nozzles 118 at a period of 2EP. Here, a common drive signal DS from the common drive signal generator 211 is given to each of the vibrators 124 corresponding to these two nozzles 118. For this reason, the functional liquid 111 is discharged from the two nozzles 118 at substantially the same timing. Note that the corresponding selection signal SC (3) is maintained at a low level so that the drive waveform P does not appear in the ejection signal ES (3) in FIG. 5B.

  With the above configuration, the droplet discharge device 100 arranges the droplet D made of the functional liquid 111 on the surface of the substrate 10A in accordance with the discharge data given to the control unit 112.

  Next, a method for detecting a droplet and measuring a landing diameter and a method for changing a grid size will be described.

  FIG. 6 is a flowchart showing a method for changing the grid size. FIG. 7 is an explanatory diagram for explaining a method of measuring the landing diameter and a method of changing the grid size.

  In step S1 of FIG. 6, as shown in FIG. 7A, the functional liquid 111 is discharged from all nozzles of the head 114 toward the substrate 10A. Here, the Y direction is a first scanning direction scanned by the substrate 10A, and the X direction is a second scanning direction scanned by the head 114 (see FIG. 1).

  Next, in step S2 of FIG. 6, as shown in FIG. 7B, the landing diameter of the droplet D dropped on the substrate 10A is measured, and it is determined whether or not the landing diameter is within the standard. . In addition, the measuring method of a landing diameter is measured using the camera 142 which can recognize an image. The landing diameters of the plurality of droplets D ejected from the nozzles 118 included in the head 114 are measured. Here, if the size of the measured landing diameter is within a predetermined standard range, drawing is started. If it is not within the standard, the process proceeds to the next step S3.

  Next, in step S3 of FIG. 6, as shown in FIG. 7C, the grid size M for determining the width of the reference region is changed. The grid size M is changed by sending the measurement data of the landing diameter measured in step S2 to the processing unit 201. The processing unit 201 causes the recording unit 205 to record the measurement data, and the calculation unit 206 calculates the recorded measurement data. To do. Then, the processing unit 201 changes the grid size M based on the data obtained by calculation.

  Next, in step S4 of FIG. 6, it is determined whether or not the changed grid size M is within the standard. If the changed grid size M is within the standard, the process proceeds to step S6. If the grid size M is not within the standard, the process proceeds to step S5.

  Next, in step S <b> 5 in FIG. 6, the head drive voltage applied to the head 114 is adjusted to adjust the ejection amount of the functional liquid 111 ejected from the head 114. For example, if the landing diameter of the droplet D is small, the applied voltage is increased to increase the discharge amount of the functional liquid 111. On the contrary, if the landing diameter of the droplet D is large, the applied voltage is decreased to reduce the discharge amount of the functional liquid 111.

  Next, in step S6 of FIG. 6, the functional liquid 111 is discharged again from all the nozzles of the head 114 toward the substrate 10A. Note that the method of discharging the functional liquid 111 is the same as the method shown in step S1, and thus the description thereof is omitted.

  Finally, in step S7 of FIG. 6, the landing diameter of the droplet dropped on the substrate 10A is measured again to determine whether the landing diameter is within the standard. The method for measuring the landing diameter is the same as the method shown in step S2, and a description thereof will be omitted. If the landing diameter is within the standard, the droplet discharge device 100 starts drawing. If the landing diameter is not within the standard, the process returns to step S3.

  Next, a layer forming method using the droplet discharge device of the present invention will be described.

FIG. 8 is a schematic diagram showing blocks associated with the surface of the substrate. FIG. 9 is a diagram illustrating the order in which droplets are arranged in a block.
(Layer formation method)

  The layer forming method of this embodiment will be specifically described. According to the layer forming method described below, the droplets D are arranged on the surface of the substrate 10A, and the solid pattern 7 (see FIG. 16) is provided. Further, the solid pattern 7 is activated to finally obtain a solid conductive layer 8 (see FIG. 17). Here, the method of arranging the droplets D in the layer forming method is executed by the droplet discharge device 100 described above.

(1. Block)
As shown in FIG. 8, a plurality of virtual blocks 1 are associated with at least a range where the conductive layer 8 (see FIG. 17) is formed on the surface of the substrate 10 </ b> A. The plurality of blocks 1 are arranged in an array determined by the X-axis direction and the Y-axis direction. Here, each of the plurality of blocks 1 has a length along the X-axis direction of 11 μm, and each of the lengths along the Y-axis direction is 15 μm. Hereinafter, a range in which the conductive layer 8 is to be formed is also referred to as a “layer formation range”.

  Each of the plurality of blocks 1 is an area where a droplet D can be disposed. In the present embodiment, when the droplet D is arranged in one block 1, the droplet D is arranged so that the center of the block 1 and the center of the arranged droplet D substantially coincide with each other. Is done. Here, the pitch in the X-axis direction of the plurality of blocks 1 corresponds to the distance between the centers of two droplets D adjacent in the X-axis direction. Similarly, the pitch in the Y-axis direction of the plurality of blocks 1 corresponds to the minimum center distance between two droplets D adjacent in the Y-axis direction. In FIG. 8, for convenience of explanation, 144 (12 × 12) blocks 1 are drawn, but the actual number of blocks 1 is not limited to this number.

  A block group 1G is defined for each set of 16 blocks 1 determined by 4 blocks × 4 blocks. For the purpose of identifying each of the 16 blocks 1 in one block group 1G, each of the 16 blocks 1 is represented by a code (for example, C11) including a letter “C” and a two-digit suffix. Has been. Here, the numerical value on the right side of the suffix represents a position along the Y-axis direction in the block group 1G, and is an integer from 1 to 4. On the other hand, the numerical value on the left side of the suffix represents the position in the X-axis direction in the block group 1G, and is an integer from 1 to 4.

  When attention is paid to the plurality of C11, the plurality of C11 are arranged in an array determined by the X-axis direction and the Y-axis direction on the surface of the substrate 10A. That is, a plurality of C11 constitutes an array. Specifically, a plurality of C11 are periodically located in the X-axis direction, the Y-axis direction, and their combined direction U. In the present embodiment, the distance between the centers of any two adjacent C11 is 44.0 μm in the X-axis direction. Similarly, it is 60.0 μm in the Y-axis direction. Furthermore, in the synthetic | combination direction U of an X-axis direction and a Y-axis direction, it is 74.4 micrometers. Note that the composite direction U of the X-axis direction and the Y-axis direction is a diagonal direction of the block 1.

The plurality of C31 are also arranged in an array determined by the X-axis direction and the Y-axis direction, like the plurality of C11. Other types of blocks 1 (that is, C13 and C33) are the same as C11. In short, the layer formation range includes an array composed of a plurality of C11, an array composed of a plurality of C31, an array composed of a plurality of C13, and an array composed of a plurality of C33.
(2. Functional fluid)

  Here, the method of providing the conductive layer 8 includes a step of arranging the droplet D of the functional liquid 111. The “functional liquid” refers to a liquid material having a viscosity that can be discharged as the droplet D from the nozzle 118 of the droplet discharge device 100. It does not matter whether the “functional liquid” is aqueous or oily. It is sufficient if it has fluidity (viscosity) that can be discharged from the nozzle 118, and even if a solid substance is mixed, it is sufficient if it is a fluid as a whole. The viscosity of the “functional liquid” is preferably 1 mPa · s or more and 50 mPa · s or less. When the viscosity is 1 mPa · s or more, the peripheral portion of the nozzle 118 is hardly contaminated with the “functional liquid” when the droplet D of the “functional liquid” is ejected. On the other hand, when the viscosity is 50 mPa · s or less, the clogging frequency in the nozzle 118 is small, and thus smooth discharge of the droplet D can be realized.

  The functional liquid 111 of this embodiment contains a dispersion medium and silver as a conductive material. Here, the silver in the functional liquid 111 is in the form of silver particles, and the average particle size of the silver particles is about 10 nm. In the functional liquid, the silver particles are coated with a coating agent, and the silver particles coated with the coating agent are stably dispersed in the dispersion medium. Note that particles having an average particle diameter of about 1 nm to several hundreds of nm are also referred to as “nanoparticles”. According to this notation, the functional liquid contains silver nanoparticles.

  The dispersion medium (or solvent) is not particularly limited as long as it can disperse conductive fine particles such as silver particles and does not cause aggregation. For example, in addition to water, alcohols such as methanol, ethanol, propanol, butanol, n-heptane, n-octane, decane, dodecane, tetradecane, toluene, xylene, cymene, durene, indene, dipentene, tetrahydronaphthalene, decahydro Hydrocarbon compounds such as naphthalene and cyclohexylbenzene, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, ethylene glycol methyl ethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol methyl ethyl ether, 1,2-dimethoxyethane, bis (2- Methoxyethyl) ether, ether compounds such as p-dioxane, propylene carbonate, γ- Butyrolactone, N- methyl-2-pyrrolidone, dimethylformamide, dimethyl sulfoxide, can be exemplified polar compounds such as cyclohexanone. Of these, water, alcohols, hydrocarbon compounds, and ether compounds are preferred and more preferred dispersion media in terms of the dispersibility of the conductive fine particles, the stability of the dispersion, and the ease of application to the inkjet process. Examples thereof include water and hydrocarbon compounds.

Moreover, the above-mentioned coating agent is a compound which can be coordinated to a silver atom. As coating agents, amines, alcohols, thiols and the like are known. More specifically, as coating agents, amine compounds such as 2-methylaminoethanol, diethanolamine, diethylmethylamine, 2-dimethylaminoethanol, methyldiethanolamine, alkylamines, ethylenediamine, alkyl alcohols, ethylene glycol, propylene glycol , Alkylthiols, ethanedithiol and the like. Silver nanoparticles coated with a coating agent can be more stably dispersed in a dispersion medium.
(3. Droplet arrangement order)

  In the following, a solid pattern is provided in a layer formation range (shaded area in FIG. 9) corresponding to 9 blocks × 9 blocks with reference to block 1 in the upper right of FIG. Here, the “solid pattern” is a layer that becomes the conductive layer 8 through an activation process described later. Since the arranged droplets slightly wet and spread on the surface, the area of the layer formation range corresponding to 9 blocks × 9 blocks is slightly larger than the area of 9 blocks × 9 blocks.

  Of course, in other embodiments, the layer formation range may correspond to other than 9 blocks × 9 blocks. For example, the layer formation range may be a range corresponding to 100 blocks × 100 blocks, or may be a range corresponding to 1 block × 5 blocks. However, the layer formation range is set so that 1) the row or column containing C11 corresponds to the outermost side of the layer formation range, and / or 2) C11 corresponds to the corner of the layer formation range. Here, “row” means a set of blocks 1 arranged in a line in the X-axis direction, and “column” means a set of blocks 1 arranged in a line in the Y-axis direction.

  With reference to FIG. 9, a method of arranging the droplets D in the layer formation range will be described. Here, in any of the plurality of block groups 1G (see FIG. 8), the order in which the droplets D are arranged is the same. Specifically, as shown in FIG. 9, the order in which the droplets D are arranged in each of the plurality of block groups 1G is the order of C11, C31, C13, and C33.

However, in the block group 1G located in the upper left of FIG. 9 and the block group 1G located in the left center, C11 and C13 correspond to the layer formation range, but C31 and C33 do not correspond to the layer formation range. For this reason, in these block groups 1G, arrangement | positioning of the droplet to C31 and C33 is skipped. Similarly, in the block group 1G in the lower left of FIG. 9, C11 corresponds to the layer formation range, but C31, C13, and C33 do not correspond to the layer formation range. For this reason, for this block group 1G, the placement of droplets on C31, C13, C33 is skipped. Further, in the block group 1G located at the lower center of FIG. 9 and the block group 1G located at the lower right, C11 and C31 correspond to the layer formation range, but C13 and C33 do not correspond to the layer formation range. For this reason, with respect to these block groups 1G, the arrangement of droplets on C13 and C33 is skipped.
(3A. Basic dot placement process)

  First, the size of the block 1 and the block group 1G are included so that the arranged droplets D are connected in a direction orthogonal to the scanning direction (X-axis direction) to obtain a line pattern 5 (see FIG. 12). At least one of the number of blocks 1 and the landing diameter of the droplet D is adjusted. In this embodiment, as a result of this adjustment, as described above, the horizontal × vertical size of the block 1 is set to 11 μm × 15 μm, and the number of blocks 1 included in one block group 1G is 16. It is set to pieces.

  For such block 1 and block group 1G, the landing diameter of the droplet D is set to 30 μm. The landing diameter can be said to be a diameter in a range in which the droplet D arranged on the substrate 10A wets and spreads on the substrate 10A. Here, since the functional liquid 11 ejected from the nozzle 118 is substantially axially symmetric with respect to the ejection direction, the shape of the droplet D after landing on the substrate 10A is substantially circular. The droplet D that has landed on the substrate 10A is also referred to as “dot”.

  FIG. 10 is an explanatory diagram for explaining a method of arranging droplets.

  As shown in FIG. 10, one droplet D is arranged in each of a plurality of C11 within the layer formation range. That is, in each of the plurality of block groups 1G, the droplet D is arranged in one of the four blocks 1 corresponding to the four corners. At this time, the droplet D is arranged so that the center of the droplet D is positioned at the center of C11. In addition, in the range corresponding to one block group 1G, the first placed droplet D is also referred to as “basic dot”.

  The details of the step of placing the droplet D on C11 are as follows.

  In the present embodiment, the plurality of nozzles 118 in the nozzle row 116 are used to arrange the droplets D at C11 within the layer formation range. More specifically, the head 114 is positioned with respect to the stage 106 so that the X coordinate of one nozzle 118 matches the X coordinate of C11 in one column. For example, as shown in FIG. 8, the X coordinate of the rightmost nozzle 118 on the paper surface is matched with the X coordinate of C11 of the rightmost column. Then, the stage 106 is relatively moved in the scanning direction (Y-axis direction) while maintaining the X coordinate of the head 114. Then, the one nozzle 118 faces each of the plurality of C11 in the column. Therefore, when the droplet D is ejected from the nozzle 118 at an appropriate timing, the droplet D is arranged in a plurality of C11 in the column. Here, the “column” is a set of blocks 1 arranged in a line in the scanning direction (Y-axis direction).

  Next, the head 114 is relatively moved in the X-axis direction so that the X coordinate of the other nozzle 118 matches the X coordinate of C11 in the other column. For example, the X coordinate of the second nozzle 118 from the right shown in FIG. 8 and the X coordinate of C11 in the fourth column from the left are matched (in FIG. 8, they are not yet matched). Then, similarly to the previous column, the stage 106 is relatively moved in the scanning direction (Y-axis direction) while maintaining the X coordinate of the head 114. Then, the one nozzle 118 faces each of the plurality of C11 in the column. Therefore, when the droplet D is ejected from the nozzle 118 at an appropriate timing, the droplet D is arranged in a plurality of C11 in the column.

  As is clear from the above description, when the droplet D is arranged on C11, the same nozzle 118 is assigned to all of the plurality of C11 belonging to the same column in the array composed of C11. However, if the column changes, the assigned nozzle 118 may change.

  Returning to FIG. 10, as described above, since the landing diameter of the droplet D is 30 μm, when the droplet D is disposed on C11, the droplet D spreads in a range of 15 μm from the center of C11. As a result, a dot pattern 4 is obtained. Here, the distance between the centers of two C11 adjacent to each other in the X-axis direction is 44 μm, and the distance between the centers of two C11 adjacent to each other in the Y-axis direction is 60 μm. Furthermore, the distance between the centers of two C11 adjacent to each other in the synthesis direction U of the X-axis direction and the Y-axis direction is about 74.4 μm. Therefore, any dot-like pattern 4 on any C11 does not touch the dot-like pattern 4 on the adjacent C11. That is, any dot pattern 4 on any C11 is isolated from the dot pattern 4 on the adjacent C11.

  As a result, a plurality of dot-like patterns 4 are arranged in an array determined by the X-axis direction and the Y-axis direction in isolation on the surface of the substrate 10A. Since the plurality of C11 and the plurality of dot patterns 4 correspond to each other, the number of C11 and the number of dot patterns 4 are the same.

C11 is an example of the “reference area”.
(3B. Basic dot fixing process)

After the droplet D is arranged on C11, the droplet D arranged on each of the plurality of C11 is fixed. Specifically, the dot pattern 4 is dried to such an extent that the solvent (or dispersion medium) is vaporized from the functional liquid 111 constituting the dot pattern 4. In the present embodiment, hot air is blown from the dryer to the dot pattern 4. Usually, the functional liquid 111 easily moves on the surface having liquid repellency. However, in this embodiment, since the dot pattern 4 made of the functional liquid 111 is dried in this way, the dot pattern 4 loses fluidity. Therefore, the dot pattern 4 is fixed to C11. As a result, the possibility that the dot-like pattern 4 on C11 will be attracted to C31, C13, or C33 even if it comes into contact with the respective droplets D arranged on C31, C13, and C33 later is reduced. For this reason, possibility that a hole will open in the conductive layer 8 (refer FIG. 17) finally obtained becomes low.
(3C. Lyophilic)

  Next, although not shown, the surface of the substrate 10A is made lyophilic. In this embodiment, the droplet D is arranged on the fixed dot pattern 4. That is, one droplet D is again arranged on each of the plurality of C11. If it does so, C31 will come to show lyophilicity with respect to the droplet D arrange | positioned to C31 later. As a result, even if the droplet D arranged in C31 contacts the dot pattern 4 on C11, the possibility that the droplet D arranged in C31 is attracted to C11 is reduced. For this reason, the possibility of opening a hole in the finally obtained conductive layer 8 is reduced. Note that the mechanism by which the surface (C31) of the substrate 10A exhibits lyophilicity by arranging the droplet D again on C11 is not fully understood. However, at the present time, the inventors presume that the solvent atmosphere caused by the repositioned droplet D contributes to the lyophilic expression in the substrate 10A or C31.

Here, the volume of the droplet D again disposed on C11 may be smaller than the volume of the droplet D initially disposed on C11. Specifically, the droplet D having such a volume that C31 exhibits lyophilicity and the dot pattern 4 on C11 continues to be isolated from the dot pattern 4 of the adjacent C11 may be disposed again on C11. . Of course, the volume of the droplet D placed again on C11 may be greater than or equal to the volume of the droplet D first placed on C11.
(3D. First connecting dot arrangement step)

  Next, the landing diameter of the droplet D ejected from the droplet ejection apparatus 100 is set to 32 μm. That is, the drive signal DS (see FIG. 5B) of the droplet discharge device 100 is changed so that the droplet D having a volume larger than the volume of the droplet D arranged in C11 is discharged. Note that details of the technology for changing the drive signal DS (a technology for realizing so-called variable dots) are described in FIGS. 5 to 8 of Japanese Patent Application Laid-Open No. 2001-58433, and the description thereof is omitted here.

  FIG. 11 is an explanatory diagram for explaining a method of arranging droplets.

  As shown in FIG. 11, one droplet D is arranged on each of the plurality of C31. At this time, the droplet D is arranged so that the center of the droplet D is positioned at the center of C31. Here, C31 is in the middle of two adjacent C11 in the X-axis direction. For this reason, the distance between C31 and C11 closest to C31 is 22 μm. The dot-like pattern 4 on C11 extends from the center of C11 to a range of 15 μm. On the other hand, on C31, since the droplet D spreads in the range of 16 μm from the center of C31, the droplet D arranged on C31 contacts the dot pattern 4 on C11. In the present specification, the droplets D disposed on C31, C13, and C33 are also referred to as “connection dots”.

  The details of the step of placing the droplet D on C31 are as follows.

  In the present embodiment, the droplets D are arranged in C31 using the plurality of nozzles 118 in the nozzle row 116. More specifically, the head 114 is staged so that the X coordinate of a certain nozzle 118 and the X coordinate of C31 in a column coincide with each other in the same manner as in the method of placing a droplet on C11 described above. Position with respect to 106. Then, the stage 106 is relatively moved in the scanning direction (Y-axis direction) while maintaining the X coordinate of the head 114. Then, the one nozzle 118 faces each of the plurality of C31 in the column. Therefore, when the droplet D is ejected from the nozzle 118 at an appropriate timing, the droplet D is arranged in each of the plurality of C31 in the column.

  Next, the head 114 is relatively moved in the X-axis direction so that the X coordinate of the other nozzle 118 matches the X coordinate of C31 in the other column. Then, as in the previous column, the stage 106 is moved relative to the scanning direction (Y-axis direction) while maintaining the X coordinate of the head 114, and each droplet D is applied to each of the plurality of C31 in the column. Deploy.

  As is clear from the above description, when the droplet D is arranged in C31, the same nozzle 118 is assigned to all of the plurality of C31 belonging to the same column in the array composed of C31. However, if the column changes, the assigned nozzle 118 may change.

  In this way, the droplet D is arranged in C31 located in the X-axis direction with respect to C11. The dot pattern 4 extends in the X-axis direction. Further, a plurality of dot patterns 4 arranged in the X-axis direction are connected in the X-axis direction.

  FIG. 12 is a diagram showing a line pattern.

When the droplets D are arranged on C31, as shown in FIG. 12, a plurality of line-shaped patterns 5 composed of the droplets D arranged on C11 and the droplets D arranged on C31 appear. Each of the plurality of line-shaped patterns 5 is formed in the X-axis direction and is formed in isolation.
(3E. Second connecting dot arrangement step)

  FIG. 13 is an explanatory diagram for explaining a method of arranging droplets.

  After the droplets D are arranged in all the C31 within the layer formation range, the landing diameter of the droplets D ejected from the droplet ejection device 100 is set to 32 μm. Then, as shown in FIG. 13, one droplet D is arranged in each of the plurality of C13. At this time, the droplet D is arranged so that the center of the droplet D is positioned at the center of C13. Here, C13 is in the middle of two adjacent C11 in the Y-axis direction. For this reason, the distance between C13 and C11 closest to C13 is 30 μm. And the droplet D arrange | positioned at C11 has spread in the range of 15 micrometers from the center of C11. On the other hand, on C13, since the droplet D spreads in the range of 16 μm from the center of C13, the droplet D arranged on C13 contacts the line pattern 5.

  The details of the step of placing the droplet D on C13 are as follows.

  In the present embodiment, the droplets D are arranged in C13 using the plurality of nozzles 118 in the nozzle row 116. More specifically, the head 114 is moved so that the X coordinate of one nozzle 118 coincides with the X coordinate of C13 in a column in the same manner as the method of arranging the droplet D on C11 described above. Position with respect to the stage 106. Then, the stage 106 is relatively moved in the scanning direction (Y-axis direction) while maintaining the X coordinate of the head 114. Then, the one nozzle 118 faces each of the plurality of C13 in the column. Therefore, when the droplet D is ejected from the nozzle 118 at an appropriate timing, the droplet D is arranged in each of the plurality of C13 in the column.

  Next, the head 114 is relatively moved in the X-axis direction so that the X coordinate of the other nozzle 118 matches the X coordinate of C13 in the other column. Then, as in the previous column, the stage 106 is moved relative to the scanning direction (Y-axis direction) while maintaining the X coordinate of the head 114, and each droplet D is applied to each of the plurality of C13 in the column. Deploy.

  As is clear from the above description, when the droplet D is arranged in C13, the same nozzle 118 is assigned to all of the plurality of C13 belonging to the same column in the array composed of C13. However, if the column changes, the assigned nozzle 118 may change.

  In this way, the droplet D is arranged on C13 located in the Y-axis direction with respect to C11. Each of the plurality of line patterns 5 is formed in the Y-axis direction.

  FIG. 14 is a diagram showing a lattice pattern.

As shown in FIG. 14, when the droplet D is arranged on C13, the droplet D is arranged on C11, the droplet D is arranged on C31, and the droplet D is arranged on C13. The lattice pattern 6 to be displayed appears.
(3F. Third connection dot arrangement step)

  FIG. 15 is an explanatory diagram for explaining a method of arranging droplets.

  After placing the droplet D on C13, the landing diameter of the droplet D ejected from the droplet ejection apparatus 100 is set to 32 μm. And as shown in FIG. 15, one droplet D is each arrange | positioned to each of several C33. At this time, the droplet D is arranged so that the center of the droplet D is positioned at the center of C33. Here, C33 is in the middle of two C11 adjacent to the combined direction U of the X-axis direction and the Y-axis direction. And the droplet D arrange | positioned at C33 fills the hole of the grid | lattice-like pattern 6 comprised from the already arrange | positioned droplet D. FIG. For this reason, the lattice pattern 6 composed of the droplets D already arranged extends in the synthesis direction U by the arrangement of the droplets D on C33.

  The details of the step of placing the droplet D on C33 are as follows.

  In the present embodiment, the droplets D are arranged in C33 using a plurality of nozzles 118 in the nozzle row 116. Specifically, in the same manner as the method of disposing the droplet D on C11 described above, the head 114 is staged so that the X coordinate of a certain nozzle 118 and the X coordinate of C33 in a column match. Position with respect to 106. Then, the stage 106 is relatively moved in the scanning direction (Y-axis direction) while maintaining the X coordinate of the head 114. Then, the one nozzle 118 faces each of the plurality of C33 in the column. Therefore, when the droplet D is ejected from the nozzle 118 at an appropriate timing, the droplet D is arranged in each of the plurality of C33 in the column.

  Next, the head 114 is relatively moved in the X-axis direction so that the X coordinate of the other nozzle 118 matches the X coordinate of C33 in the other column. Then, as in the previous column, the stage 106 is moved relative to the scanning direction (Y-axis direction) while maintaining the X coordinate of the head 114, and each droplet D is applied to each of the plurality of C33 in the column. Deploy.

  As is clear from the above description, when the droplet D is arranged in C33, the same nozzle 118 is assigned to all of the plurality of C33 belonging to the same column in the array composed of C33. However, if the column changes, the assigned nozzle 118 may change.

  FIG. 16 is a diagram showing a solid pattern.

  When the droplet D is arranged on C33, as shown in FIG. 16, the droplet D arranged on C11, the droplet D arranged on C31, the droplet D arranged on C13, and the C33 A solid pattern 7 composed of the arranged droplets D appears. In this embodiment, the layer formation range corresponding to 9 blocks × 9 blocks on the surface of the substrate 10A is covered with the solid pattern 7 without any gap. As described above, since the droplet D spreads on the surface, the area covered by the solid pattern 7 (area of the layer formation range) is slightly larger than the area of 9 blocks × 9 blocks.

Thus, in each of the plurality of block groups 1G, the respective droplets D are arranged in the order of C11, C31, C13, and C33. Then, even if the surface of the substrate 10A has liquid repellency, each of the X axis direction, the Y axis direction, and the synthesis direction U from C11 is caused by the droplets D arranged in these four blocks 1. A continuous solid pattern 7 can be formed. That is, a solid pattern 7 without holes is formed.
(3G. Activation process)

  FIG. 17 is a diagram showing a conductive layer.

  Next, the solid pattern 7 is activated. Specifically, the solid pattern 7 is heated so that the silver particles in the solid pattern 7 are sintered or fused. If it does so, electroconductivity will express in the solid pattern 7 by the silver particle by which it sintered or fuse | melted, As a result, the conductive layer 8 as shown in FIG. 17 will be obtained.

  FIG. 18 is an explanatory diagram for explaining another method of arranging droplets in a block.

  Here, when the thickness uniformity of the conductive layer 8 obtained is not sufficient, prior to activation, as shown in FIG. 18, in each block group 1G, 12 more droplets D are added. You may arrange. Specifically, in addition to the four blocks 1 of C11, C31, C13, C33, 12 blocks 1 of C21, C41, C23, C43, C12, C32, C14, C34, C22, C42, C24, C44 The droplets D may be arranged in this order in each of the above. That is, the droplets D may be arranged on all the blocks 1 in the block group 1G. Then, the conductive layer 8 having a more uniform thickness can be obtained. It should be noted that the volume of the 12 droplets D additionally arranged may be smaller than the volume of the four droplets D previously arranged.

  Thus, according to the present embodiment, first, the plurality of dot patterns 4 are arranged on the substrate 10A. Thereafter, a plurality of line-shaped patterns 5 are formed in the X-axis direction. Next, a plurality of line patterns 5 are connected in the Y-axis direction, and a lattice pattern 6 appears. Finally, the droplets D are arranged in the remaining space, and a two-dimensional continuous solid pattern 7 is formed. And the conductive layer 8 without a hole is obtained by activating the solid pattern 7.

  As long as the arrangement order of the droplets D in the block group 1G is the order described above, there is no limitation on the order between the plurality of block groups 1G. For example, in the X-axis direction, a plurality of block groups 1G constituting one column may be processed almost simultaneously. Similarly, in the Y-axis direction, a plurality of block groups 1G constituting one column may be processed almost simultaneously. Moreover, one block group 1G may be processed in order.

  As is clear from the above description, in the layer forming method of the present embodiment, when the droplets D have been arranged in the first two types of blocks 1, a plurality of isolated line patterns 5 are formed in the X-axis direction. It is formed. Specifically, in order to obtain such a line pattern 5, 1) the order of arrangement of the droplets D, 2) the size of the block 1, and 3) the number of blocks 1 included in the block group 1G 4) At least one of the landing diameter of the droplet D is set. Thus, if a plurality of isolated line patterns 5 extending in the direction orthogonal to the scanning direction (X-axis direction) are obtained, there is a high possibility that a good solid pattern 7 will be obtained. In the present embodiment, the first two types of blocks 1 are C11 and C31.

  As described above, when the droplets D are arranged in a plurality of blocks 1 in one column, one nozzle 118 is assigned to one column. For this reason, even if there are variations in flight paths among the plurality of nozzles 118, the intervals along the scanning direction of the arranged droplets D are constant. In this case, the interval along the scanning direction of the arranged droplets D is determined by an integral multiple of the product of the ejection period EP (see FIG. 5B) and the relative movement speed of the stage 106.

  On the other hand, when the droplets D are arranged in a plurality of blocks 1 in one row, a plurality of nozzles 118 are assigned to one row. The “row” here is a set of blocks 1 arranged in a line in the X-axis direction. Since the plurality of nozzles 118 are assigned in this way, if the flight path varies between the plurality of nozzles 118, the interval in the X-axis direction of the arranged droplets D may not be constant. Of course, the head 114 is adjusted so that the variation in the flight path in the X-axis direction is within an allowable range. However, the variation in the flight path in the X-axis direction can change with time due to the adhesion of the functional liquid 111 in the nozzle 118, and an accidental flight path curve may occur. If there is such a variation in the flight path in the X-axis direction, the dots obtained by the arranged droplets D may not be connected in the X-axis direction, and thus the line pattern 5 may not be obtained.

  Therefore, in the process of forming the solid pattern 7, it is better to confirm that a plurality of isolated line patterns 5 are formed in the X-axis direction. According to the layer forming method of the present embodiment, the line-shaped pattern 5 can be obtained in the X-axis direction when the droplets D have been arranged in the first two types of blocks 1. If the line-shaped pattern 5 cannot be obtained when the droplets D have been arranged in the first two types of blocks 1, the substrate 10A is labeled as a defective product. However, even when the line pattern 5 is not obtained, even if it becomes a defective product, the liquid droplets D are not arranged in the remaining two types of blocks 1, so that wasteful consumption of the functional liquid 111 can be suppressed.

  In the above embodiment, the following effects are obtained.

(1) Since the drawing apparatus 100 measures the landing diameter of the droplet D and calculates the grid size M for determining the size of the reference area based on the measurement result of the landing diameter, the drawing apparatus 100 starts drawing. The grid size M can be determined according to the size of the landing diameter of D. Since the grid size M is determined in advance, it is possible to reduce the overlapping of the dropped liquid droplets D and the lack of the liquid droplets D. Therefore, it is possible to provide the drawing apparatus 100 capable of drawing the conductive layer 8 with stable quality.
(2) Since the control unit 112 includes the recording unit 205 as a drawing data storage unit, it is possible to extract the impact diameter data from the recording unit 205. Then, by using drawing data stored in the recording unit 205 in real time, drawing data necessary for drawing the conductive layer 8 can be selected and determined in a short time, so that drawing can be performed efficiently. It is possible to provide a drawing apparatus 100 that can do this.
(3) Since the control unit 112 includes the measurement unit 203 as a detection unit that detects timing when the landing diameter is measured, it is necessary to accurately measure the size of the landing diameter at the time of landing. By calculating the correct grid size M by the calculation unit 206, the size corresponding to the size of the landing diameter can be set with high accuracy. In addition, the timing for measuring the impact diameter can be set arbitrarily. In addition, since the setting can be performed in a short time, the drawing apparatus 100 capable of drawing efficiently and with high accuracy can be provided.
(4) Since the control unit 112 includes the driving voltage adjustment unit 207 that adjusts the discharge amount of the droplet, the discharge amount of the functional liquid 111 to be dropped can be adjusted according to the grid size M. Variation in diameter can be reduced. If the variation in the landing diameter can be reduced, it is possible to provide the drawing apparatus 100 capable of drawing the conductive layer 8 having a stable quality.
(5) Since the pattern is formed using the drawing apparatus 100 capable of drawing the conductive layer 8 with stable quality, the circuit board 80 with stable quality can be provided.

  As described above, the present invention has been described with reference to preferred embodiments, but the present invention is not limited to the above-described embodiments, and includes modifications as described below, as long as the object of the present invention can be achieved. It can be set to any other specific structure and shape.

  (Modification 1) The functional liquid of the above embodiment contains silver nanoparticles. However, instead of silver nanoparticles, other metal nanoparticles may be used. Here, as the other metal, for example, any one of gold, platinum, copper, palladium, rhodium, osmium, ruthenium, iridium, iron, tin, zinc, cobalt, nickel, chromium, titanium, tantalum, tungsten, and indium is used. An alloy in which any two or more are combined may be used. However, since silver can be reduced at a relatively low temperature, it is easy to handle. In this regard, when using a droplet discharge device, it is preferable to use a functional liquid containing silver nanoparticles. .

  Further, the functional liquid may contain an organometallic compound instead of the metal nanoparticles. An organometallic compound here is a compound in which a metal precipitates by decomposition by heating. Such organometallic compounds include chlorotriethylphosphine gold (I), chlorotrimethylphosphine gold (I), chlorotriphenylphosphine gold (I), silver (I) 2,4-pentanedionate complex, trimethylphosphine (hexa Fluoroacetylacetonato) silver (I) complex, copper (I) hexafluoropentanedionate cyclooctadiene complex, and the like.

  Thus, the form of the metal contained in the functional liquid may be a form of particles represented by nanoparticles or a form of a compound such as an organometallic compound.

  Further, the functional liquid may contain a conductive polymer soluble material such as polyaniline, polythiophene, polyphenylene vinylene, poly (3,4 ethylenedioxythiophene) (PEDOT) instead of metal.

  (Modification 2) In the above embodiment, the droplet D is arranged on the substrate 10A made of polyimide. However, the present invention is not limited to this. For example, instead of polyimide, a ceramic substrate, a glass substrate, an epoxy substrate, a glass epoxy substrate, a silicon substrate, or the like may be used. In this way, the same effect as that obtained in the above embodiment can be obtained. Further, the surface on which the droplets D are arranged is not limited to the surface of the substrate. It may be a substantially flat insulating layer surface or a substantially flat conductive layer surface.

Schematic which shows the structure of the drawing apparatus of this embodiment. The schematic diagram which shows the nozzle row | line | column in the head of a drawing apparatus. It is a schematic diagram which shows the structure of a head, (a) is a schematic perspective view, (b) is a schematic sectional drawing. The block diagram which shows the control part of a droplet discharge apparatus. (A) is a schematic diagram which shows the head drive part in a control part, (b) is a timing chart which shows a selection signal, a drive signal, and an ejection signal. The flowchart which shows the change method of a grid size. Explanatory drawing for demonstrating the measuring method of a landing diameter, and the change method of a grid size. The schematic diagram which shows the block matched with the surface of the board | substrate. The figure which shows the order which arrange | positions a droplet to a block. Explanatory drawing for demonstrating the method to arrange | position a droplet. Explanatory drawing for demonstrating the method to arrange | position a droplet. The schematic diagram which shows the line-shaped pattern obtained after a droplet is arrange | positioned. Explanatory drawing for demonstrating the method to arrange | position a droplet. The schematic diagram which shows the grid | lattice-like pattern obtained after a droplet is arrange | positioned. Explanatory drawing for demonstrating the method to arrange | position a droplet. The schematic diagram which shows the solid pattern obtained after a droplet is arrange | positioned. The schematic diagram which shows the conductive layer obtained by activating the solid pattern of FIG. Explanatory drawing for demonstrating the other method of arrange | positioning a droplet to a block.

Explanation of symbols

  D: Droplet, U: Composition direction, 1 ... Block, 1G ... Block group, 4 ... Dot pattern, 5 ... Line pattern, 6 ... Grid pattern, 7 ... Solid pattern, 8 ... Conductive layer, 10A ... Substrate, 80 ... Circuit board, 100 ... Droplet ejection device, 104 ... First position control device, 106 ... Stage, 108 ... Second position control device, 111 ... Functional liquid, 112 ... Control unit, 114 ... Head, 116 ... Nozzle array, 118... Nozzle, 140... Measuring unit, 142... Image recognizable camera as a measuring apparatus, 201... Processing unit, 203 ... Measuring unit as detecting unit, 205. Calculation unit, 207... Head drive voltage adjustment unit, 208... Scanning drive unit, 209... Head drive unit, C11... Reference region, M ... Grid size for determining the width of the reference region.

Claims (5)

A drawing device for drawing a pattern in a reference area on a substrate,
A first position control device for moving the substrate in a first scanning direction;
A second position control device that mounts a droplet discharge head that discharges droplets on the substrate and moves the droplet discharge head in a second scanning direction substantially orthogonal to the first scanning direction;
A measurement unit for measuring the landing diameter of the droplets ejected from the droplet ejection head;
Based on the measurement result of the landing diameter measured by the measurement unit, a calculation unit that calculates the width of the reference region;
A control unit that controls the first position control device, the second position control device, the measurement unit, and the calculation unit;
The drawing apparatus, wherein the controller starts drawing after determining the size of the reference area. The drawing apparatus according to claim 1,
The drawing apparatus, wherein the control unit includes a data storage unit that stores drawing data of the landing diameter. The drawing apparatus according to claim 1 or 2,
The drawing apparatus, wherein the control unit includes a detection unit that detects timing when the landing diameter is measured. The drawing apparatus according to any one of claims 1 to 3,
The drawing apparatus, wherein the control unit includes a drive voltage adjusting unit that adjusts an ejection amount of the droplet. A substrate,
A circuit board having a pattern formed on the substrate,
A circuit board formed using the drawing apparatus according to claim 1.

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