JP2007107906A - X-ray inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an X-ray inspection device capable of adjusting a visual field to a desired measuring position by simple operation when measuring objects same in shape are successively replaced. <P>SOLUTION: The X-ray inspection device is equipped with a feature point indicating and receiving part 36 for receiving the indication of the feature point of a reference measuring target in a state that the reference measuring target is placed on a stage 14, a reference point coordinates memory region 41 for storing the reference point coordinates on the stage corresponding to the feature point, a reference point indicating receiving part 37 for receiving the indication of the reference feature point of the measuring object being the position corresponding to the feature point of the reference measuring target in a state the measuring object is placed on the stage, a reference point coordinates memory region 42 for storing the reference point coordinates on the stage corresponding to the reference feature point, a displacement quantity calculation part 38 for detecting the displacement quantity of the measuring object on the basis of the coordinates difference between the reference point coordinates and the reference point coordinates, and a correction signal producing part 39 for sending a displacement correcting signal for correcting the calculated displacement quantity to a drive mechanism and constituted so as to sent a displacement correcting signal to a stage drive mechanism. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an X-ray inspection apparatus for performing fluoroscopic inspection or CT inspection of industrial products and the like. More specifically, an object having the same shape is sequentially placed on the stage of the X-ray inspection apparatus. The present invention relates to an X-ray inspection apparatus that performs repeated measurement.

  In X-ray inspection equipment that performs fluoroscopic inspection of industrial products and the like, X-ray detection is performed by combining an image intensifier (hereinafter abbreviated as II) and a CCD camera so as to face the X-ray source of the X-ray generator. A movable stage is disposed between the X-ray source and the X-ray detector, and the object to be measured is placed on the stage. Then, the stage is moved to move the object to be measured within the measurement visual field (X-ray passage region), and X-ray measurement is performed. Recently, an X-ray inspection apparatus using a flat panel X-ray detector is used instead of an X-ray detector composed of II and CCD cameras.

In the X-ray inspection, the same position may be inspected one after another for a large number of objects to be measured having the same shape. In such a case, a plurality of inspection positions included in one object to be measured are stored as a sequence, the measurement field of view of the X-ray measurement optical system is changed according to the sequence, and each inspection position is displayed in turn. An apparatus having a so-called teaching function for efficiently inspecting by reproducing is commercially available.
As an X-ray inspection apparatus equipped with a teaching function, an arbitrary point of an object to be measured, which has been taught in advance, is moved into a measurement field of view by using a conveying means having excellent position reproducibility such as an industrial robot. (See, for example, Patent Document 1).
JP 2004-117214 A

  When a plurality of objects to be measured having the same shape are placed on the stage one by one and each of the same positions is inspected one after another, in the method of performing measurement while changing the measurement field of view based on the stored sequence, one When one object to be measured is placed on the stage, it is necessary to position it accurately with respect to the stage, which requires considerable effort. If the measurement is performed without accurate positioning, the X-ray image of the object to be measured is different from that at the time of sequence recording due to the positional deviation, even though the stage position is the same as that at the time of sequence recording. turn into.

  As in the conventional example described above, when the object to be measured is moved directly using an industrial robot, or when the object to be measured is placed on the stage with high positional accuracy using an industrial robot, Since accurate positioning can be performed, efficient measurement can be performed. However, it is necessary to prepare such an industrial robot separately, which is very expensive.

  Therefore, the present invention can perform accurate positioning without using an industrial robot with high positioning accuracy when inspecting the same shape one after another for the same shape to be measured. An object of the present invention is to provide an X-ray inspection apparatus capable of performing measurements one after another efficiently.

  The X-ray inspection apparatus of the present invention made to solve the above problems comprises a stage that can be positioned by designating coordinates, and an X-ray source and an X-ray detector that are opposed to each other so as to sandwich the stage. An X-ray measurement optical system, and a display device that displays an X-ray image created based on a video signal imaged by the X-ray measurement optical system, teach teaching feature points using a reference measurement object in advance Thus, the reference point coordinates on the stage corresponding to the feature points of the reference measurement object are stored, and stored in a state of being placed on the stage so as to replace the measurement object having the same shape as the reference measurement object. An X-ray inspection apparatus that displays an X-ray image of an object to be measured placed on a stage by driving a stage drive mechanism based on the reference point coordinates of the stage, wherein the reference measurement object is placed on the stage. Put A feature point designation receiving unit for accepting designation of a feature point of a reference measurement object in a state, a reference point coordinate storage area for storing reference point coordinates on the stage corresponding to the designated feature point, and a measurement object on the stage A reference point designation receiving unit that receives designation of a reference feature point of the measurement object that is a position corresponding to the feature point of the reference measurement object in a mounted state, and a reference point on the stage that corresponds to the designated reference feature point A reference point coordinate storage area for storing coordinates, a displacement calculation unit for detecting a displacement amount of the object to be measured based on a coordinate difference between the reference point coordinates and the reference point coordinates, and a displacement for correcting the calculated displacement amount A displacement correction signal generator for generating a correction signal.

According to the present invention, a reference measurement object and a measurement object are placed one after another on a stage, and an X-ray image created by photographing them with an X-ray measurement optical system is displayed on a display device for measurement (observation). ) When performing measurement, a reference measurement object is placed on the stage in advance, and teaching is performed to teach feature points that are in the reference measurement object and can be distinguished from other parts in the reference measurement object.
The feature point designation accepting unit accepts designation of feature points of the reference measurement object in a state where the reference measurement object is placed on the stage during teaching. The designation of the feature point is performed by instructing the position of the feature point with, for example, a pointing device on the X-ray image including the feature point displayed on the display device.
When the feature point is designated, the coordinates on the stage immediately below the feature point are accumulated in the reference point coordinate storage area as the reference point coordinate corresponding to the feature point.
After the above operation, the object to be measured is placed on the stage so that the operator can exchange the reference object. The reference point designation accepting unit accepts designation of a reference feature point of the measurement object that is a position corresponding to the feature point of the reference measurement object in a state where the measurement object is placed on the stage. The designation of the reference feature point is also performed by instructing the position of the reference feature point with, for example, a pointing device on the X-ray image including the reference feature point displayed on the display device.
When the reference feature point is designated, the coordinates on the stage immediately below the reference feature point are accumulated in the reference point coordinate storage area as the reference point coordinate corresponding to the reference feature point.
The displacement calculation unit detects a displacement amount of the object to be measured (a displacement amount from a position where the reference measurement object is placed) based on the coordinate difference between the accumulated reference point coordinates and the reference point coordinates.
The displacement correction signal generation unit sends a displacement correction signal for correcting the calculated displacement amount to the drive mechanism. The drive mechanism cancels the displacement by driving the stage by a necessary amount based on the displacement correction signal.

  According to the present invention, when the object to be measured is placed on the stage, the reference feature point of the object to be measured is detected even if a displacement from the position where the standard object to be measured is placed (position at the time of teaching) occurs. The displacement can be corrected simply by specifying it, so that the same position as the reference measurement object can be measured. If this operation is repeated every time a new object to be measured is exchanged, the same position can be measured (observed) for a plurality of objects to be measured.

(Means and effects for solving other problems)
In the above invention, the stage may have a rotational drive mechanism, and each of the reference point coordinates and the reference point coordinates may be included.
According to this, not only the translational displacement but also the rotational displacement can be corrected.

In the above invention, three or more reference point coordinates and reference point coordinates may be included.
According to this, when calculating the amount of displacement, the displacement can be corrected by statistical processing.

In the above invention, an optical camera image captured by an optical camera that captures a wider range than the X-ray image with a fixed position relative to the X-ray measurement optical system is displayed on a display device, and a feature point designation receiving unit and a reference point designation The accepting unit may receive designation of feature points and reference feature points on the optical camera image.
According to this, since the feature point and the reference feature point can be determined by the optical camera image captured by the optical camera that captures a wider range than the X-ray image, it is easy to find the feature point and the reference feature point.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the present invention is not limited to the embodiments described below, and it goes without saying that various aspects are included without departing from the spirit of the present invention.

  FIG. 1 is a block diagram showing a configuration of an X-ray inspection apparatus according to an embodiment of the present invention. This X-ray inspection apparatus 1 includes an X-ray measurement optical system 13 composed of an X-ray generator 11 and an X-ray detector 12, a stage 14 on which a measurement object S is placed, and XYZ orthogonal to the stage 14. It comprises a stage drive mechanism 16 for translational driving in the direction (stage surface as XY plane) and rotational driving along the Z axis, and a control system 20 for controlling the entire apparatus.

The control system 20 is configured by a general-purpose computer device. The hardware of the control system 20 is further described. The control system 20 includes a CPU 21, a keyboard 22, a mouse 23, a display device 24 such as a liquid crystal panel, and a memory 25. Is done.
Further, the functions processed by the CPU 21 will be described as a block. An X-ray image creation unit 31, an X-ray image display control unit 32, an optical camera image creation unit 33, an optical camera image display control unit 34, a drive signal generation unit 35, It is divided into a feature point designation receiving unit 36, a reference point designation receiving unit 37, a displacement calculating unit 38, and a correction signal generating unit 39.
The memory 25 includes a reference point coordinate storage area 41, a reference point coordinate storage area 42, an optical camera image storage area 43, and a fluoroscopic X-ray image storage area 44.

  The X-ray generator 11 constituting the X-ray measurement optical system 13 includes an X-ray tube for fluoroscopic X-ray irradiation. The X-ray detector 12 includes II arranged so as to face the X-ray tube, and a CCD camera integrally attached to the rear side of the II, and is formed by II detecting fluoroscopic X-rays. An image signal of a fluoroscopic X-ray image is output by photographing the fluorescent image obtained with a CCD camera.

The stage 14 can be rotated by a lower stage that can slide in a three-dimensional direction of an XY direction that is a direction in the stage surface and a Z direction that is perpendicular to the stage surface, and a rotation axis in the Z-axis direction relative to the lower stage The measurement object S (or the reference measurement object) is placed on the upper stage.
The drive mechanism 16 is equipped with an XYZ direction triaxial drive motor and a rotational drive motor, and translates or rotationally moves the stage 14 based on a drive control signal for driving the stage from the CPU 21. .
The optical camera 18 is adjacent to the X-ray detector 12 and is fixed at a position away from the X-ray measurement field so as not to interfere with the fluoroscopic X-ray image measurement, and the object S on the stage 14 is imaged. To do. The optical camera 18 has a field of view that can capture the entire stage.

Next, each functional block of the CPU 21 will be described.
The X-ray image creation unit 31 performs control to convert the video signals of the fluoroscopic X-ray images sent from the X-ray detector 12 into digital images one after another and create frame image data.
The X-ray image display control unit 32 controls to display the fluoroscopic X-ray image 24a by sequentially sending the created frame image data to the display device 24 and displaying it. The image displayed on the monitor screen is an image (usually a local image) used for X-ray measurement (observation).

  The optical camera image creation unit 33 digitally converts a video signal photographed by the optical camera 18 to create optical camera image data. This optical camera image data is a reference for making the stage 14 the origin position (the initial position of the stage 14 and moving the stage 14 from this initial position so that the position and coordinates of the subsequent stage 14 can always be grasped. The stage surface is photographed in a state of being positioned at a position. The captured optical camera image data is stored in the optical camera image storage area 43.

The optical camera image display control unit 34 performs control to display the optical camera image 24b on the display device 24 based on the accumulated optical camera image data.
The position on the optical camera image 24 b displayed on the monitor screen of the display device 24 is associated with the position on the stage 14.
That is, the position of each point on the stage 14 can be expressed by coordinates. When an optical camera image of the stage 14 is created with the stage 14 returned to the origin, an image of each point of the stage 14 is displayed on the monitor screen of the display device 24. Thereby, it is possible to associate each point on the actual stage 14 with each point on the stage on the optical camera image 24b displayed on the monitor screen. By storing this correspondence in the optical camera image storage area 43, when the position is designated with the mouse 23 on the monitor screen, the stage coordinates corresponding to the designated position in the origin return state can be read. It becomes like this.

Before starting the measurement, a reference measurement object is placed on the stage 14 in a state where it has been returned to the origin in advance, and optical camera image data of the reference measurement object on the stage 14 is created by photographing with the optical camera 18. Display on the monitor screen.
When the position of the feature point in the reference measurement object is designated with the cursor by the mouse 23 on the optical camera image of the reference measurement object, the stage coordinates (reference point coordinates) corresponding to the feature point can be extracted.

In addition, since the positional relationship between the X-ray measurement optical system 13 and the stage 14 is fixed in the state where the origin is returned, the coordinates of the stage 14 and the fluoroscopic X-ray image range when the stage 14 is returned to the origin. Are previously associated with each other, and the corresponding relationship (coordinates of a range in which a fluoroscopic X-ray image is obtained when the stage 14 is in the origin return state) is accumulated in the fluoroscopic X-ray image range storage area 44.
As a result, when the position is designated with the mouse 23 on the X-ray image 24 a displayed on the monitor screen of the display device 24 while the stage 14 is returning to the origin, the position is accumulated in the fluoroscopic X-ray image range storage area 44. The coordinates of the corresponding stage 14 can be read by referring to the data of the corresponding relationship. Thereafter, when the stage 14 is moved from the origin position and the fluoroscopic X-ray image range of another place is displayed on the monitor screen, the movement amount and the position information on the monitor screen designated by the mouse 23 are added, Stage coordinates corresponding to the designated fluoroscopic X-ray image position are extracted.

  The drive signal generator 35 performs control to generate a drive signal corresponding to the control amount when an operation for translating or rotating the stage 14 is performed by the keyboard 22 or the mouse 23. Do. The generated drive signal is sent to the drive mechanism 16, and the stage 14 is moved to a desired position by operating the translation drive motor and the rotation drive motor concerned.

The feature point designation receiving unit 36 displays the X-ray image 24a and the optical camera image 24b of the reference measurement object on the monitor screen of the display device 24, and displays the X-ray image 24a or the optical camera image 24b on the monitor screen. Then, control for receiving an input for designating a feature point by the mouse 23 is performed.
In order to specify the feature point, a cross cursor or the like is displayed on the monitor screen, and the feature point (four corner points of the reference measurement object) is clicked by operating the mouse 23. As a result, the stage coordinates immediately below the feature point are read as reference point coordinates and stored in the reference point coordinate storage area 41.
The number of feature points to be specified (that is, the number of reference point coordinates stored in the reference point coordinate storage area 41) need only be one when only the translational displacement is corrected. When correcting the displacement in the rotational direction, two are sufficient. In addition, the accuracy may be improved by designating three or more feature points and statistically correcting translational or rotational displacement.

In the reference point designation receiving unit 37, the object to be measured is placed so as to be exchanged for the standard object, and at least one of the X-ray image 24a and the optical camera image 24b is displayed on the monitor screen of the display device 24. Then, on the X-ray image 24a and the optical camera image 24b, control for receiving an input for designating a reference feature point (a position of the measurement object corresponding to the feature point of the standard measurement object) by the mouse 23 is performed.
As for input when designating the reference feature point, a cross cursor or the like is displayed on the monitor screen, and the mouse is clicked on the reference feature point by operating the mouse 23. Thereby, the stage coordinates immediately below the reference feature point are read as reference point coordinates and stored in the reference point coordinate storage area 42.
The number of reference feature points to be specified (that is, the number of reference point coordinates accumulated in the reference point coordinate storage area 42) is one when correcting the translational displacement and two when correcting the rotational displacement. To. When there are three or more feature points, the number of reference points is also three or more and the same number as the feature points.

The displacement calculation unit 38 calculates a displacement amount (a positional deviation amount) by calculating a coordinate difference between the reference point coordinates and the reference point coordinates corresponding to each other.
Here, when only one pair of the reference point coordinates and the reference point coordinates is designated, the translational displacement (positional deviation) is calculated by the coordinate difference in the XYZ directions.
If the number of pairs of reference point coordinates and reference point coordinates is two, the displacement in the Z-axis rotation direction (angle deviation) and the translation direction displacement (position deviation) so that the direction of the line segment connecting the two points matches. ) Is calculated.
When the number of pairs of reference point coordinates and reference point coordinates is three, theoretically, it is possible to calculate a three-dimensional displacement, that is, a displacement in a plane direction in which a plane including three points coincides. However, since the object to be measured is originally placed on a flat stage surface, the displacement in the plane direction hardly poses a problem.
Rather, when the number of pairs of reference point coordinates and reference point coordinates is three or more, the displacement of each point is calculated by statistical processing so that the standard deviation of the displacement of each point is minimized. .

  The correction signal generation unit 39 generates a correction signal for correcting this based on the calculated displacement in the triaxial direction and the angular displacement, and performs control to send the correction signal to the drive mechanism 16.

Next, an operation when the present invention is executed by the X-ray inspection apparatus will be described.
In the following, a case will be described in which a feature point (standard measurement object) and a reference feature point (measurement object) are specified by the mouse 23 using the optical camera image 24b. However, the X-ray image 24a is used. The only difference is the image used, and the procedure is the same. The use of the optical camera image 24b is advantageous in that the field of view of the image is wide, and it is advantageous in that it is easy to search for feature points and the like. This is disadvantageous in terms of accuracy. On the other hand, when the X-ray image 24a is used, it is difficult to search for a feature point or the like because the field of view is narrow. However, since the magnification of the image is high, it is advantageous in that the position coordinates can be easily matched with high accuracy.
2 to 8 are diagrams showing an optical camera image 24 b displayed on the monitor screen of the display device 24. In addition, the visual field L in the figure indicates a range where the X-ray image 24a is captured.

(1) As shown in the optical camera image 24b in FIG. 2, initially placing the reference measurement object S ₀ to the stage 14, look for characteristic points on the optical camera image 24b. Here, since the reference measurement object S ₀ is is a square, and the corner feature points. When the stage 14 on set as a reference measurement object S feature points B ₁ corner of the first lower right of _0, specifying on specifying the feature point B ₁ (X-ray image 24a by the mouse 23, X-rays optical the lower right portion within the field of view L of the measuring system moves the stage 14 to enter, to specify a feature point B ₁ in the field of view L).
Thereby, the stage coordinates (reference point coordinates b ₁ ) immediately below the feature point B ₁ are read and stored in the reference point coordinate storage area 41.
When correcting only the translational displacement, the following operation is skipped and the process proceeds to (4).

(2) Subsequently, as shown in FIG. 3, the upper right corner of the reference measurement object S ₀ is set as the second feature point B ₂ and the feature point B ₂ is designated by the mouse 23 (on the X-ray image 24a). If specified, moves the stage 14 to enter the upper right portion in the X-ray optical measurement system within the field of view L, specifies the feature point B ₂ in the field of view L).
As a result, the coordinates (reference point coordinates b ₂ ) immediately below the feature point B ₂ are read and stored in the reference point coordinate storage area 41. When correcting translational displacement and rotational displacement, the following operation is skipped and the process proceeds to (4).
Usually, two points are sufficient. However, in order to improve accuracy, statistical processing is performed so that the standard deviation of the displacement becomes the smallest.

(3) When performing statistical processing, as shown in FIG. 4, the lower left corner of the reference measurement object S ₀ defined as a third feature point B _3, specifies the feature point B ₃ by the same procedure ( when specifying on X-ray images 24a moves the stage 14 to enter the lower left portion in the X-ray optical measurement system within the field of view L, specifies the feature point B ₃ in the field of view L).
As a result, the coordinates (reference point coordinates b ₃ ) immediately below the feature point B ₃ are read and stored in the reference point coordinate storage area 41. Further, the fourth and subsequent feature points B ₄ ,... May be determined, but here, statistical processing is performed with three points.

(4) Subsequently, as shown in FIG. 5, the reference measurement object S ₀ is removed from the stage 14, and the measurement object S ₁ is placed on the stage 14 instead. At this time, the point (reference feature point) to be designated with the mouse 23 is easily found by aligning to some extent with the position where the reference measurement object S ₀ has been placed. Here, for the sake of convenience, it is assumed that the object to be measured S ₁ is placed slightly rotated and translated from the locus position of S ₀ .

(5) As shown in FIG. 5, the lower right corner of the object S ₁ on the stage 14 becomes the reference feature point R ₁ corresponding to the first feature point B _1. when specifying on _{which one} of designating (X-ray image 24a moves the stage 14 to enter the lower right portion within the field of view L of the X-ray optical measuring system 13, the reference feature points R ₁ in the field of view L specify).
As a result, the coordinates (reference point coordinates r ₁ ) immediately below the reference point R ₁ are read and stored in the reference point coordinate storage area 42.
Here, when only the feature point B ₁ is designated for the reference measurement object S ₀ , the following operation is skipped and the process proceeds to (8).

(6) Subsequently, as shown in FIG. 6, the upper right corner of the object S ₁ on the stage 14 becomes the reference feature point R ₂ corresponding to the second feature point B ₂ , so that the mouse 23 performs the feature. Point R ₂ is designated (when designated on the X-ray image 24 a, the stage 14 is moved so that the upper right part is within the field of view L of the X-ray optical measurement system 13, and the reference feature point R _{2 is} within the field of view L. Is specified).
As a result, the coordinates (reference point coordinates r ₂ ) immediately below the reference point R ₂ are read out and stored in the reference point coordinate storage area 42.
Here, when only the feature points B ₁ and B ₂ are designated for the reference measurement object S ₀ , the following operation is skipped and the process proceeds to (8).

(7) Subsequently, as shown in FIG. 7, since the lower left corner on the stage 14 becomes the reference feature point R ₃ corresponding to the third feature point B ₃ , the feature point R ₃ is designated by the mouse 23. (when specified by the X-ray image 24a moves the stage 14 to enter the lower left portion in the field of view L of the X-ray optical measuring system 13, specifying the reference feature points R ₃ in the field of view L).
As a result, the coordinates immediately below the reference point R ₃ (reference point coordinates r ₃ ) are read and stored in the reference point coordinate storage area 42.

(8) Subsequently, the reference point coordinates storage area 41 and the reference point coordinate storage area 42 are accumulated, and the corresponding reference point coordinates b ₁ , b ₂ , b ₃ and the reference point coordinates r ₁ , r ₂ , r ₃ , respectively. The displacement of each point is calculated so that the standard deviation is minimized.
Then, position correction is performed by rotating and translating the stage 14 in accordance with the calculated displacement amount. For example, as shown in FIG. 8, the stage 14 rotates and translates, so that the displacement of the object to be measured is reduced. Correction is made, and measurement in the same state as the reference measurement object becomes possible.

  When the number of pairs of reference point coordinates and reference point coordinates is two, the rotation angle is calculated so that the direction of the line segment connecting the two points coincides, and then the translation distance is calculated to calculate the rotation distance. And translational displacement can be corrected.

  Further, when the number of pairs of the reference point coordinates and the reference point coordinates is one, the rotational movement cannot be corrected, and only the translational movement can be corrected by calculating the translational distance.

  The present invention can be used in an X-ray inspection apparatus that successively performs X-ray inspections of objects having the same shape.

The block diagram which shows the structure of the X-ray inspection apparatus which is one Embodiment of this invention. The figure explaining the procedure which designates the 1st feature point in this invention. The figure explaining the procedure which designates the 2nd feature point in this invention. The figure explaining the procedure which designates the 3rd feature point in this invention. The figure explaining the procedure which designates the 1st reference point in this invention. The figure explaining the procedure which designates the 2nd reference point in this invention. The figure explaining the procedure which designates the 3rd reference point in this invention. The figure explaining the state which corrected the stage.

Explanation of symbols

1: X-ray inspection device 11: X-ray generator (X-ray source)
12: X-ray detector 13: X-ray measurement optical system 14: Stage 16: Drive mechanism 20: Control system 21: CPU
22: Keyboard 23: Mouse 24: Display device 25: Memory 31: X-ray image creation unit 32: X-ray image display control unit 33: Optical camera image creation unit 34: Optical camera image display control unit 35: Drive signal generation unit 36 : Feature point designation receiving unit 37: Reference point designation receiving unit 38: Displacement calculating unit 39: Correction signal generating unit 41: Reference point coordinate storage area 42: Reference point coordinate storage area 43: Optical camera image storage area 44: Perspective X-ray Image storage area

Claims (4)

An X-ray measurement optical system composed of a stage that can be positioned by designating coordinates, an X-ray source and an X-ray detector that are arranged so as to sandwich the stage, and an image signal captured by the X-ray measurement optical system And a display device for displaying the X-ray image created based on the reference point coordinates on the stage corresponding to the feature points of the reference measurement object by teaching the feature points in advance using the reference measurement object. By storing and driving the stage drive mechanism based on the stored reference point coordinates of the stage in a state of being placed on the stage so as to replace the object to be measured having the same shape as the reference measurement object An X-ray inspection apparatus that displays an X-ray image of an object to be measured placed on a stage,
A feature point designation accepting unit that accepts designation of a feature point of the reference measurement object in a state where the reference measurement object is placed on the stage;
A reference point coordinate storage area for storing reference point coordinates on the stage corresponding to the specified feature point;
A reference point designation accepting unit for accepting designation of a reference feature point of the measurement object which is a position corresponding to the feature point of the reference measurement object in a state where the measurement object is placed on the stage;
A reference point coordinate storage area for storing reference point coordinates on the stage corresponding to the designated reference feature point;
A displacement amount calculation unit for detecting a displacement amount of the object to be measured based on a coordinate difference between the reference point coordinates and the reference point coordinates;
An X-ray inspection apparatus comprising: a correction signal generation unit that sends a displacement correction signal for correcting the calculated displacement amount to a drive mechanism. The X-ray inspection apparatus according to claim 1, wherein the stage has a rotational drive mechanism and includes two reference point coordinates and two reference point coordinates. The X-ray inspection apparatus according to claim 1, wherein three reference point coordinates and three reference point coordinates are included. An optical camera image captured by an optical camera that captures a wider range than the X-ray image with a fixed position relative to the X-ray measurement optical system is displayed on a display device, and a feature point designation receiving unit and a reference point designation receiving unit are: The X-ray inspection apparatus according to claim 1, wherein the feature point and the reference feature point are designated on the optical camera image.

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