JP2007101392A - X-ray inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an X-ray inspection device capable of adjusting a visual field to a desired measuring position at a desired measuring angle by a simple operation using a pointing device. <P>SOLUTION: This device is equipped with an operation screen display control part for displaying appearance image display domains 24b, 24c for displaying an appearance image of a measuring object, and urging instruction of translation movement of a stage by the pointing device 23; and an observation azimuth chart display domain 24d for displaying an observation azimuth chart enabling designation of a rotation angle and a tilt angle of an X-ray optical axis, and urging instruction of rotational movement of the stage and tilting of the optical axis of an X-ray measuring optical system by the pointing device 23. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an X-ray inspection apparatus for performing fluoroscopic inspection or CT inspection of industrial products and the like, and more specifically, adjusts the field of view of an X-ray measurement optical system for an object to be measured by an instruction using a pointing device. The present invention relates to an X-ray inspection apparatus.

In X-ray inspection equipment that performs fluoroscopic inspection of industrial products and the like, X-ray detection is performed by combining an image intensifier (hereinafter abbreviated as II) and a CCD camera so as to face the X-ray source of the X-ray generator. A vessel is arranged. Recently, an X-ray inspection apparatus using a flat panel X-ray detector is used instead of an X-ray detector composed of II and CCD cameras.
In these X-ray inspection apparatuses, a stage on which an object to be measured is placed is arranged between an X-ray source and an X-ray detector, and a fluoroscopic X-ray image is taken of the object to be measured placed on the stage. To do.

  In the inspection by the X-ray inspection apparatus, the visual field is usually moved for alignment, measurement magnification adjustment, and measurement angle adjustment. In the visual field movement, a fluoroscopic X-ray image of the object to be measured is photographed while moving the stage by the stage driving mechanism, thereby searching for the inspection position of the object to be measured.

  In general, the stage driving mechanism defines an X axis and a Y axis that are orthogonal to each other on the stage mounting surface direction of the stage, and defines a Z axis in a direction perpendicular to the stage mounting surface, as shown in FIG. The stage 51 is provided with a drive mechanism for moving in a total of four axes including translational movements in the directions of the X, Y, and Z axes of the stage 51 and rotational movement with respect to the Z axis.

  Further, in the X-ray inspection apparatus, the X-ray measurement optical system tilts while keeping the X-ray source 53 and the X-ray detector 54 facing each other, so that X-rays with respect to the measurement object mounting surface of the stage can be obtained. Some have a tilting mechanism that tilts in the direction of the optical axis. For example, as shown in FIG. 1, the arm 52 tilts around the X axis (that is, in the YZ plane) so that a fluoroscopic X-ray image can be taken from an oblique direction in the YZ plane.

  Then, while viewing the fluoroscopic X-ray image, the stage 51 and the arm 52 are driven by performing an input operation for controlling the measurement position and the measurement angle using an input device such as a mouse, a joystick, or a keyboard, and the visual field is moved. Like to do. When the inspection position is found, the visual field movement is stopped, and in that state, a fluoroscopic X-ray image is taken and measurement (observation) is performed.

It is desirable to improve the work efficiency of the X-ray inspection by enabling the input for the translation operation and rotation operation of the stage and the tilting operation of the X-ray optical axis to be performed with the simplest possible operation. Therefore, an operation unit display area is set in which each operation unit for driving the X-axis, Y-axis, Z-axis direction translation drive mechanism, rotation mechanism, and tilt mechanism of the stage is collectively displayed on the screen of the display device. An apparatus is disclosed in which a drive signal for a corresponding drive mechanism is given by operating each operation unit in a part display area with a pointing device such as a mouse (see Patent Document 1).
Further, according to this document, a simulated subject is displayed in the operation unit display area, and the displayed simulated subject itself is simulated to move, rotate, zoom out, or zoom in, It is disclosed that the same movement can be performed qualitatively so that positioning and the like can be performed like a game.
JP 2003-114201 A

  In the conventional input operation, as described above, a drive control signal for the drive mechanism is given by operating each operation unit displayed on the screen of the display device with a pointing device such as a mouse. The operator must perform an input operation using a pointing device while viewing the fluoroscopic X-ray image to turn on and off the drive signal and make an adjustment that gradually approaches the desired state. However, since the displayed fluoroscopic X-ray image is usually a local image, the whole image cannot be grasped. For this reason, the operation of the pointing device for each operation unit must rely on the intuition and experience of the operator. Therefore, in some cases, it may take a long time to reach the target state.

As another input operation method, in an X-ray inspection apparatus capable of two-dimensional translation without a rotational drive mechanism or tilting mechanism, an external appearance image of the entire object to be measured is previously measured with an optical camera. The translation drive mechanism operates so that the coordinates of the specified position are within the measurement field of view by specifying the measurement position with a pointing device on the displayed appearance image after shooting and displaying it on the screen. There is something to do.
This input operation method is excellent because it is easy to operate for two-dimensional translational movement, but it is difficult for input operation with a pointing device in the case of three-dimensional movement including rotational movement and tilting movement. It remains.

  Accordingly, the present invention provides an X-ray inspection apparatus using a drive mechanism group capable of three-dimensional movement including translational movement, rotational movement, and tilting in a desired measurement position and measurement by a simple operation using a pointing device. An object of the present invention is to provide an X-ray inspection apparatus capable of adjusting the visual field to an angle.

  In order to solve the above-mentioned problems, in the X-ray inspection apparatus of the present invention, an X-ray measurement optical system comprising a stage on which an object to be measured is placed, an X-ray source and an X-ray detector arranged to face each other across the stage. A translation drive mechanism that performs translational movement in the XYZ axis directions that are perpendicular to each other, including the Z axis direction that is perpendicular to the surface of the stage to be measured, a rotational drive mechanism that performs rotational movement with respect to the Z axis, and mounting A drive mechanism group including a tilt drive mechanism that tilts the optical axis direction of the X-ray measurement optical system with respect to the surface, and an operation screen for receiving an instruction input to the drive mechanism group are displayed on the screen of the display device. An operation screen display control unit for controlling the display, a pointing device for inputting an instruction on the operation screen, and a visual field adjustment for adjusting the visual field by sending a drive control signal to the drive mechanism group based on the instruction input by the pointing device. And an optical camera that captures an appearance image of the entire object to be measured, and an operation screen display control unit An appearance image display area that displays an appearance image and prompts the pointing device to instruct the translation of the object to be measured, and an observation azimuth map that allows specification of the rotation angle with respect to the Z axis and the tilt angle of the X-ray optical axis are displayed. The observation azimuth map display area that prompts instructions for rotational movement of the stage by the pointing device and tilting of the optical axis of the X-ray measurement optical system is displayed.

  Here, the pointing device is specifically a mouse, a trackpad, a trackball, etc., and a cursor (crosshair cursor, box cursor, etc.) indicating the current position is displayed on the screen of the display device, and the cursor position is moved. An input device that designates the position coordinates of the position by performing an input operation (for example, a click operation for a mouse) at a desired position.

  That is, according to the X-ray inspection apparatus of the present invention, the operation screen display control unit displays an operation screen for receiving an instruction input to the drive mechanism group on the screen of the display device. This operation screen includes a display of the appearance image of the entire object to be measured photographed by the optical camera, and an observation azimuth map for indicating the rotation angle and the tilt angle and inputting these. Then, the input operation for the translation movement by the translation drive mechanism is performed by instructing the position coordinate of the movement destination on the appearance image with the pointing device, and the input operation for the rotation movement and the tilt is performed by using the observation azimuth map. By specifying the tilt angle, the input operation is performed, and by specifying the desired measurement position and measurement direction on the appearance image and the observation azimuth map, the drive mechanism moves in the specified position and angle direction. Measure.

According to the present invention, not only translational movement but also three-dimensional movement including rotational movement and tilting can be performed easily with respect to a desired measurement position and measurement angle by a simple input operation using a pointing device. X-ray measurements can be performed.
In addition, according to the present invention, it is not necessary to adjust the measurement position and the measurement angle while viewing the local fluoroscopic X-ray image, and it is possible to automatically input a desired measurement position and measurement angle in advance with a pointing device. It can be adjusted to the desired setting.

(Means and effects for solving other problems)
In the above invention, a vector mark may be displayed on the observation azimuth map, and the rotation angle may be indicated by the direction of the vector mark, and the tilt angle may be indicated by the length of the vector mark.
This allows the rotation angle and tilt angle to be specified individually by designating the direction and length of the vector mark with a pointing device, and visually confirming and inputting the direction and length of the vector. Therefore, the input operation of the rotation angle and the tilt angle can be facilitated.

  In the above invention, as the appearance image, appearance images from two directions orthogonal to each other in a direction parallel to the measurement object mounting surface of the stage may be displayed. For example, appearance images of the front side (ZX plane) and the right side plane (YZ plane) are displayed with the plane perpendicular to the Y axis as the front direction. As a result, if a desired position is designated with a pointing device on at least one of the two external appearance images orthogonal to each other, any three-dimensional translational movement can be designated.

In the above invention, an X-ray transmission range marker indicating the X-ray transmission range may be displayed on the appearance image in an overlapping manner.
Thereby, a measurement location and a measurement condition can be easily grasped by comparing the X-ray transmission range marker portion with the fluoroscopic X-ray image.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the present invention is not limited to the embodiments described below, and it goes without saying that various aspects are included without departing from the spirit of the present invention.

  FIG. 2 is a block diagram showing a configuration of an X-ray inspection apparatus according to an embodiment of the present invention. The X-ray inspection apparatus 1 supports an X-ray measurement optical system 13 including an X-ray generation apparatus 11 and an X-ray detector 12 and an X-ray measurement optical system 13 that can be tilted about a rotation shaft 14a. Arm 14, stage 15 for placing the object S to be measured on a horizontal placement surface, and XYZ directions orthogonal to each other (the placement surface is assumed to be the XY plane, and the direction perpendicular to the placement surface is Z A stage driving mechanism 16 for rotating the stage 15 around the Z axis, an arm tilting mechanism 17 for tilting the arm 14, and an arm adjacent to the X-ray detector 12. 14 and an optical camera 18 attached to 14 and a control system 20 for controlling the entire apparatus.

  The X-ray generator 11 constituting the X-ray measurement optical system 13 includes an X-ray tube for fluoroscopic X-ray irradiation. The X-ray detector 12 includes II arranged so as to face the X-ray tube, and a CCD camera integrally attached to the rear side of the II, and is formed by II detecting fluoroscopic X-rays. An image signal of a fluoroscopic X-ray image is output by photographing the fluorescent image obtained with a CCD camera.

The arm 14 has a rotating shaft 14a directed in the X-axis direction, and can be tilted in the YZ plane. In the initial state (that is, the origin return state before performing translational movement, rotational movement, and tilting movement), the X-ray optical axis of the X-ray measurement optical system 13 and the optical axis of the optical camera 18 are in the Y direction (horizontal). Direction).
The stage 15 includes an upper stage and a lower stage. The upper stage rotates around the Z axis, and the lower stage can be translated in the X axis, Y axis, and Z axis directions.

The stage drive mechanism 16 is equipped with respective drive shaft motors for moving in a total of four axial directions including translational movements in the respective directions of the X axis, the Y axis, and the Z axis, and rotational movements with respect to the Z axis. The stage 14 is translated and rotated on the basis of the control signal from.
The arm tilting mechanism 17 is equipped with a tilting motor, and tilts the arm 14 based on a control signal from the CPU 21.

The optical camera 18 has an optical axis that is substantially parallel to the optical axis of the X-ray measurement optical system 13, and the entire stage can be included in the field of view.
Since the positional relationship between the optical camera 18 and the X-ray measurement optical system 13 is fixed, the visible light image by the optical camera 18 and the fluoroscopic X-ray image by the X-ray detector 12 have a corresponding relationship. Therefore, the arm 14 and the stage 15 are not moved, and a visible X-ray image and a visible light image of the entire object to be measured are photographed, and the correspondence relationship is stored in a transmission X-ray range storage area 42 of the memory 25 described later. Thus, a partial region in the visible light image can be specified as the fluoroscopic X-ray image measurement range. And when you want to shoot a fluoroscopic X-ray image for an arbitrary region of the visible light image, if you specify the position you want to shoot on the visible light image, you can know the distance and angle to the current fluoroscopic X-ray image measurement range, How much the arm 14 and stage 15 should be moved can be calculated by coordinate conversion calculation.

  Next, the control system 20 will be described. The control system 20 is constituted by a computer device. The hardware of the control system 20 is further described. The CPU 21, the keyboard 22, a mouse 23 that is one of pointing devices, a display device 24 such as a liquid crystal panel, a memory, and the like. 25.

Further, the functions processed by the CPU 21 will be described in the form of blocks. The functions are divided into an X-ray image creation unit 31, an X-ray image display unit 32, an optical camera image creation unit 33, an operation screen display control unit 34, and a visual field adjustment unit 35. .
In addition, the memory 25 has an appearance image accumulation area 41 and a transmission X-ray range accumulation area 42 formed therein.

Next, each functional block of the CPU 21 will be described.
The X-ray image creation unit 31 performs control to convert the video signals of the fluoroscopic X-ray images sent from the X-ray detector 12 into digital images one after another and create frame image data.
The X-ray image display unit 32 displays the created X-ray image 24a as a moving image by sending the created frame image data to the display device 24 and displaying it. This fluoroscopic X-ray image 24a is mainly a local fluoroscopic X-ray image of the object to be measured, and is an image used for inspection of the object to be measured.

The optical camera image creation unit 33 converts the visible light video signal of the measurement object S sent from the optical camera 18 into a digital image, and stores it in the external image storage area 41 of the memory 25 as external image data of the measurement object S. Perform accumulation control. This appearance image data is acquired in advance from two orthogonal directions before starting X-ray measurement. In one of the two directions, the arm 14 and the stage 15 are photographed in an initial state (origin return state), that is, in a state where the tilt angle is 0 degree and the rotation angle is 0 degree, and the front direction of the object S is photographed. . The other one is that the stage 15 is rotated 90 degrees so that the tilt angle is 0 degree and the rotation angle is 90 degrees, and the right side surface direction of the object S is photographed. Note that the omnidirectional appearance image data may be acquired while rotating the stage 15, and two orthogonal images may be selected from these. In this case, the coordinate system is reset so that the two selected directions are the front direction (tilt angle 0 degree, rotation angle 0 degree) and the right side direction (tilt angle 0 degree, rotation angle 90 degrees).
The two-direction appearance image data acquired in this way is accumulated in the appearance image accumulation area 41 as appearance image data 41a in the front direction (XZ plane) and appearance image data 41b in the right side direction (YZ plane). .

The operation screen display control unit 34 forms appearance image display areas 24b and 24c on the screen of the display device 24, and displays the appearance images U ₁ and U ₂ based on the appearance image data 41a and 41b. FIG. 3 is a diagram illustrating an example of the appearance images U ₁ and U ₂ displayed in the appearance image display areas 24b and 24c. When the mouse 23 is operated while the appearance display areas 24b and 24c are displayed on the screen, the pointer P is displayed. By specifying the position of an arbitrary destination in the appearance image display areas 24b and 24c by clicking operation, An input instruction for the position coordinates of the movement destination can be made.
In addition, the operation screen display control unit 34 refers to the transmission X-ray range storage area 42, so that the transmission X-ray range markers 45 and 46 indicating the current transmission X-ray range are displayed on the appearance images U ₁ and U _2. Is displayed.
Furthermore, the operation screen display control unit 34 forms an observation direction map display area 24d and displays the observation direction map V on the screen. FIG. 4 is a diagram showing an example of the observation direction diagram. The vector mark 47 in the figure represents the rotation angle with respect to the Z-axis (the rotation angle is displayed from 0 to 360 degrees with respect to the + Y-axis direction), and the length of the vector mark 47 is tilted on the YZ plane. An angle (inclination angle is displayed at 0 to 60 degrees with respect to the + Y-axis direction) is expressed. In the drawing, a cross-shaped straight mark is drawn as a rotation angle scale, and a concentric ellipse mark is drawn as a tilt angle scale. When the mouse 23 is operated with the observation azimuth map display area 24d formed, the pointer P is displayed, and a click operation is performed on the end of the vector mark 47, the values of the angle A and the length B of the vector mark 47 are changed. Thus, the rotation angle and the tilt angle can be input.

  The visual field adjustment unit 35 is instructed to input position coordinates by the appearance image display areas 24b and 24c, and when the rotation direction and tilt angle are input by the observation azimuth map display area 24d, drive control corresponding to the input is performed. A signal is sent to the stage drive mechanism 16 and the arm drive mechanism 17 to control the stage 15 and the arm 14 to move.

As the stage 15 and the arm 14 move, the transmission X-ray range also changes. Therefore, the operation screen display control unit 34 refers to the transmission X-ray range storage area 42 again, and the movement distance of the stage 15 and the arm 14 Based on the movement angle, the current transmission X-ray range is calculated, and the new range is displayed with the transmission X-ray range markers 45 and 46 on the appearance images U ₁ and U ₂ .

Next, the relationship between the display of the appearance image display areas 24b and 24c and the observation azimuth map display area 24d when various input operations (translation operation, rotation operation, tilting operation) are performed and the fluoroscopic X-ray image 24a will be described. To do.
5-8 is a figure explaining the state when the arm 14 or the stage 15 is moved, respectively. In each figure, (a) is a plan view showing the positional relationship between the X-ray measurement optical system 13 and the object S to be measured, (b) is a diagram showing appearance image display areas 24b and 24c, and (c) is an observation orientation diagram. The figure which shows the display area 24d, (d) is a figure which shows the fluoroscopic X-ray image 24a.
Here, the object to be measured S placed on the stage 15 uses a plate-like member having a square hole formed in the center portion, and in the initial state (origin return state), the X-ray measurement optics. The optical axis of the system 13 is arranged so as to penetrate the square hole vertically from the front of the plate-like member.

(1) FIG. 5 shows an initial state (origin return state), that is, a state where the rotation angle of the stage 15 is 0 degree and the tilt angle of the arm is 0 degree. As seen in FIG. 5B, most of the transmitted X-ray ranges 45 and 46 pass through the square hole, and only the upper side of the square hole passes through the object S to be measured. Further, as seen in FIG. 5C, in the initial state, the vector mark 47 shows a rotation angle of 0 degree in the observation azimuth map. The fluoroscopic X-ray image 24a at this time has a shape in which the transmitted X-ray range 45 is enlarged as shown in FIG.

(2) FIG. 6 shows a state rotated 30 degrees from the state of FIG. To enter this state, as shown in FIG. 6C, the end of the vector mark 47 is dragged to the position rotated 30 degrees in the state clicked by the mouse 23 in the observation direction map display area 24d. By this operation, a drive control signal is sent to the stage drive mechanism 16 and the stage 15 rotates.
As the stage 15 rotates 30 degrees, the transmission X-ray ranges 45 and 46 for the object S to be measured are calculated again. Since the optical axis of the X-ray measurement optical system 13 with respect to the object to be measured S is inclined rightward, the transmitted X-ray range 45 is expanded in the left-right direction as seen in FIG. The fluoroscopic X-ray image at this time also passes through the object S to be measured on the left and right sides of the square hole as shown in FIG.

(3) FIG. 7 shows a state tilted 60 degrees further from the state of FIG. In order to make this state, as shown in FIG. 7C, in the observation direction map display area 24d, the end of the vector mark 47 is extended in the radial direction while being clicked with the mouse 23 to show a tilt angle of 60 degrees. To reach the concentric ellipse. By this operation, a drive control signal is sent to the arm drive mechanism 17 and the arm 14 tilts 60 degrees.
As the arm 14 tilts 60 degrees, the transmitted X-ray ranges 45 and 46 for the object S to be measured are calculated again. Since the optical axis of the X-ray measurement optical system 13 is inclined in the vertical direction, the transmitted X-ray range of the measurement object S is expanded in the vertical direction as seen in FIG. 7B. The fluoroscopic X-ray image at this time passes through the object S to be measured on the upper, lower, left and right sides of the square hole as seen in FIG.

(4) FIG. 8 shows a state translated from the state of FIG. 7 in the left direction. To make this state, as shown in FIG. 8B, the pointer P is displayed on the appearance image display area 24b by the operation of the mouse 23, and the pointer P is clicked at the destination position. By this operation, a drive control signal is sent to the stage drive mechanism 16, and the stage 15 moves rightward.
As the stage 15 moves, the transmission / transmission X-ray range with respect to the object S to be measured is calculated again. As the optical axis of the X-ray measurement optical system 13 moves to the left with respect to the measurement object S, the transmission X-ray range marker 45 of the measurement object S is moved as seen in FIG. . The fluoroscopic X-ray image at this time is transmitted through the object S to be measured on the left part of the square hole as shown in FIG.

Although the translation is performed in the left direction in FIG. 8, when the translation is performed in the front-rear direction, the pointer P is displayed on the appearance image display area 24 c by operating the mouse 23, and the pointer P is clicked at the destination position. To do. Further, in the case of translation in the vertical direction, the pointer P is displayed in either the appearance display area 24b or the appearance display area 24c, and is clicked at the movement destination.
Even when translation is performed in any of the up / down / left / right / front / rear directions, the transmitted X-ray range is recalculated, and the transmitted X-ray range markers 45 and 46 are updated.

In the above embodiment, in the initial state, the optical axis of the X-ray measurement optical system is set to a horizontal direction on the measurement object mounting surface of the stage. However, the optical axis direction in the initial state is not limited to this, Good.
Moreover, in the said embodiment, although it tilted within the YZ plane, you may make it tilt on other surfaces, such as an XZ plane.
In the above embodiment, the front direction (XZ plane) and the right side direction (YZ plane) are used as the two-way appearance image data. However, if the appearance image data is from two orthogonal directions, However, the direction may be other directions.

  INDUSTRIAL APPLICABILITY The present invention can be used for an X-ray inspection apparatus that adjusts the field of view of an X-ray measurement optical system for an object to be measured by an instruction using a pointing device.

The figure explaining the translation, rotation, and tilting movement in an X-ray inspection apparatus. The block diagram which shows the structure of the X-ray inspection apparatus which is one Embodiment of this invention. The figure explaining the external appearance image display area displayed on the screen of a display apparatus. The figure explaining the observation direction map display area displayed on the screen of a display apparatus. The figure explaining the relationship with arrangement | positioning of an X-ray measurement optical system in an initial state, a screen display, and a fluoroscopic X-ray image. The figure explaining the relationship of arrangement | positioning of an X-ray measurement optical system, a screen display, and a fluoroscopic X-ray image when rotating from the state of FIG. The figure explaining the relationship of arrangement | positioning of a X-ray measurement optical system, a screen display, and a fluoroscopic X-ray image when it tilts from the state of FIG. FIG. 8 is a diagram for explaining the relationship among the arrangement of the X-ray measurement optical system, screen display, and fluoroscopic X-ray image when a translation operation is performed from the state of FIG.

Explanation of symbols

1: X-ray inspection device 11: X-ray generator (X-ray source)
12: X-ray detector 13: X-ray measurement optical system 14: Arm 15: Stage 16: Stage drive mechanism 17: Arm drive mechanism 18: Optical camera 20: Control system 21: CPU
23: Mouse 24: Display device 24a: Perspective X-ray image display area 24b: External image display area (front)
24c: Appearance image display area (right side)
24d: Observation direction map display area 25: Memory 31: X-ray image creation unit 32: X-ray image display control unit 33: Optical camera image creation unit 34: Operation screen display control unit 35: Field adjustment unit 41: Appearance image storage area 42: Transparent X-ray range storage area 45, 46: Transparent X-ray range marker 47: Vector mark P: Pointer

Claims (4)

A stage for placing an object to be measured;
An X-ray measurement optical system comprising an X-ray source and an X-ray detector arranged opposite to each other with a stage interposed therebetween;
A translation drive mechanism that performs translational movement in the XYZ axis directions that are perpendicular to each other, including the Z axis direction that is perpendicular to the measurement object placement surface of the stage, a rotational drive mechanism that performs rotational movement relative to the Z axis, and a placement surface A drive mechanism group including a tilt drive mechanism that tilts to tilt the optical axis direction of the X-ray measurement optical system;
An operation screen display control unit for displaying an operation screen for receiving an instruction input to the drive mechanism group on the screen of the display device;
A pointing device for inputting instructions on the operation screen;
A visual field adjustment unit that adjusts the visual field by sending a drive control signal to the drive mechanism group based on an instruction input by a pointing device;
An X-ray inspection apparatus including an optical camera that is associated with a position with respect to an X-ray measurement optical system and that captures an appearance image of the entire object to be measured,
The operation screen display control unit displays an appearance image of the object to be measured and prompts an instruction for translational movement of the object to be measured by a pointing device, a rotation angle with respect to the Z axis, and a tilt angle of the X-ray optical axis. X is characterized in that an observable azimuth map that can be specified is displayed, and an observation azimuth map display area that prompts instructions for rotational movement of the stage by a pointing device and tilting of the optical axis of the X-ray measurement optical system is displayed. Line inspection device. 2. The X-ray inspection apparatus according to claim 1, wherein a vector mark is displayed on the observation azimuth map, the rotation angle is indicated by the direction of the vector mark, and the tilt angle is indicated by the length of the vector mark. The X-ray inspection apparatus according to claim 1, wherein appearance images from two directions orthogonal to each other in a direction parallel to the measurement object placement surface of the stage are displayed as appearance images. 2. The X-ray inspection apparatus according to claim 1, wherein an X-ray transmission range marker indicating the X-ray transmission range is superimposed on the appearance image and displayed.

Images