JP2007100573A - Micro pump - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microscopic very small-shaped micro pump easy in manufacture, with high transport efficiency, and capable of transporting a large flow rate. <P>SOLUTION: This micro pump comprises a first member 1 having a first electrode part 4 with at least a plurality of electrodes 5 concentrically formed, a second member 2 having a second electrode part 6 oppositely arranged to at least the first electrode part 4, a sealing part 3 having a suction port/delivery port 9 of fluid for maintaining and sealing the periphery between at least the oppositely arranged first member 1 and second member 2 in a predetermined clearance, and a delivery port/suction port 8 formed in any one of a central part surrounded by the first electrode part 4 of the first member 1 and a central part surrounded by the second electrode part 6 of the second member 2. In this case, a voltage signal is impressed between the first electrode part 4 and the second electrode part 6 opposed to its part, and the fluid is transported in a concentric shape by generating electrostatic force. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a micropump that is used for controlling a minute flow rate of liquid or other applications in a coating apparatus or a liquid dropping apparatus.

  Currently, development and analysis of chemical substances used in fields such as medicine, food, and biotechnology, and genetic analysis systems require considerable personnel and time for development and evaluation. Therefore, if an automatic synthesis or automatic evaluation system is realized, significant improvement in development efficiency can be expected.

  On the other hand, conditions required for an automatic synthesis / evaluation system include the following. First, the flow rate is very small. Second, the well (reaction vessel) can be made ultra-small and high-density. Third, the dispenser with multiple nozzles (multi-heads) allows chemicals or specimen materials to be in a matrix. In other words, it can be injected into the wells arranged at a high speed, and fourthly, there is no mechanical sliding part in the entire flow path from the pump part to the discharge nozzle, and it is clean.

  As a micropump that satisfies these conditions, a diaphragm-type microdispenser using a plate-like piezoelectric element as a drive source has been proposed and developed (see Non-Patent Document 1, for example).

  According to this, a piezoelectric element is attached to a diaphragm formed by etching silicon or the like, and this diaphragm is caused to bend and move to function as a pump.

  As another micropump, a polyimide resin is used as the main structural material on the substrate, and the flow path, the gap, and the flow path wall sandwiching the gap are configured. The flow path wall narrows the flow path wall by electrostatic force. A micropump that is displaced so as to expand is disclosed (for example, see Patent Document 1).

According to this, first, a plurality of layers of polyimide resin are deposited on a substrate, and sacrificial layer etching is performed to form a channel having a predetermined shape. And the some metal layer which generate | occur | produces an electrostatic force was formed in the polyimide resin layer of a flow-path wall.
IEEJ Proceedings E, Vol. 121, No. 9, 2001 JP-A-6-264870

  However, in the micropump shown in Non-Patent Document 1, silicon is processed for forming a gap, a channel, an inflow port, an outflow port, a diaphragm, and the like. Therefore, a semiconductor processing apparatus, semiconductor process technology, and the like are necessary, and there is a problem that processing cannot be performed easily. In addition, since the drive source is a piezoelectric element, there is a problem that it is difficult to reduce the size.

  Moreover, since the micropump disclosed in Patent Document 1 can be manufactured with a small number of processing apparatuses, the apparatus configuration can be reduced in size. However, there is a problem that a polyimide resin sacrificial layer etching or the like is similarly required to deposit a plurality of layers of polyimide resin on a substrate and form a flow path for flowing a liquid in one direction from the left side to the right side, for example. was there. Further, since the pump is an elongated pump that opens and closes one flow path by electrostatic force to transfer the fluid in one direction, the transport flow rate is small for the space occupied by the pump. For this reason, there are problems that the fluid transportation efficiency is low and it is difficult to cope with the miniaturization and high density of the pump.

  The present invention has been made to solve the above problems, and an object of the present invention is to provide a micropump that is easy to manufacture and that can be miniaturized and transport a large flow rate of fluid or the like.

  In order to solve the above-described problems, the micropump of the present invention is opposed to the first member having the first electrode portion in which at least a plurality of electrodes are concentrically formed, and the first electrode portion. And a second member having a second electrode portion provided at the same time, and a fluid suction port for maintaining and sealing the periphery between the first member and the second member disposed at least facing each other at a predetermined interval / A sealing portion having a discharge port, and a central portion surrounded by the first electrode portion of the first member and a central portion surrounded by the second electrode portion of the second member. The discharge port / suction port are provided, and a fluid is transported concentrically by an electrostatic force generated by applying a voltage signal between the first electrode portion and the second electrode portion facing the first electrode portion.

  According to such a configuration, a configuration in which the gap between the first member and the second member facing each other is used as a flow path for opening and closing, the gap is opened and closed concentrically by electrostatic force, and the fluid is transported concentrically. Therefore, it is possible to realize an ultra-small and micro-shaped micropump that does not require processing such as sacrificial layer etching, has high transport efficiency, and can transport a large flow rate. In addition, when the first electrode portion is an electrode formed concentrically, a large flow rate of fluid can be efficiently transported without distortion.

  Furthermore, at least one of the first member and the second member may be a resin film.

  Thereby, the resin film can be flexibly deformed by electrostatic force, and fluid transportation can be smoothly performed with good response.

  Further, the plurality of electrodes of the first electrode portion may be formed so as to be gradually wider toward the concentric center.

  Thereby, the fluid of the same volume can be sequentially conveyed to radial direction by making the electrode area of the inner side from the outer side which forms a concentric electrode into substantially the same area.

  Furthermore, at least one of the first electrode portion of the first member and the second electrode portion of the second member is formed on the inner surface side or the outer surface side of the first member facing the second member. May be.

  Thereby, a micropump with a small applied voltage or a micropump that is easy to manufacture can be realized.

  Further, the second electrode portion may have a plurality of concentrically formed electrodes so as to be paired with the plurality of electrodes of the first electrode portion.

  Thereby, since an electrostatic force is generated by a plurality of electrodes facing each other, an electric field between the electrodes does not spread, so that a predetermined amount of fluid can be transported efficiently.

  Furthermore, a plurality of suction ports / discharge ports may be provided in the sealing portion.

  Thereby, different fluids can be sucked from a plurality of suction ports, mixed and discharged, or the same fluid can be distributed and discharged from a plurality of discharge ports.

  Furthermore, the first member and the second member may be provided with a gate electrode that opens and closes the suction port / discharge port of the sealing portion.

  Thereby, the inflow and outflow of the fluid can be selectively controlled.

  Furthermore, the suction port / discharge port of the sealing portion may be provided at the interface between the sealing portion and the first member or the second member.

  Accordingly, the suction port / discharge port can be opened and closed by deformation of the first member or the second member due to electrostatic force.

  Further, the cross-sectional shape of the suction port / discharge port of the sealing portion may be a curved surface shape.

  Thereby, opening / closing of the suction port / discharge port can be ensured.

  The micropump of the present invention is provided with a first member having a plurality of first electrode portions each having at least a plurality of electrodes formed concentrically and at least a plurality of the first electrode portions. A second member having a plurality of second electrode portions formed, and a fluid suction port for maintaining and sealing the periphery between the first member and the second member disposed opposite to each other at a predetermined interval And a discharge port provided at one of the center part of the plurality of first electrode parts of the first member and the center part of the plurality of second electrode parts of the second member The fluid sucked from the suction port by the electrostatic force generated by applying a voltage signal between the first electrode part and the second electrode part opposite to the first electrode part is transported concentrically to the plurality of discharge ports. The configuration is

  Thereby, a plurality of micro pumps having a small shape equivalently having discharge ports can be arranged, so that it is possible to realize a high-density micro pump that supplies a liquid to a plurality of wells arranged.

  Further, the sealing part may be provided with a plurality of suction ports.

  Thereby, a large amount of fluid can be supplied.

  Furthermore, a plurality of pairs of first electrode portions and second electrode portions may be arranged one-dimensionally.

  Furthermore, a plurality of pairs of the first electrode portion and the second electrode portion may be two-dimensionally arranged.

  Accordingly, by arranging the pair of the first electrode portion and the second electrode portion in a one-dimensional or two-dimensional manner, a fluid can be supplied to a large number of wells arranged in a one-dimensional or two-dimensional manner. .

  Furthermore, the fluid may be discharged simultaneously from a plurality of discharge ports.

  Further, a plurality of discharge ports may be selected to discharge the fluid.

  As a result, a plurality of first electrode portions can be simultaneously or selectively driven, so that a plurality of wells at predetermined positions can be selected simultaneously or in a predetermined time and order according to the application. In particular, a micropump for supplying fluid can be realized.

  Note that the configurations described above can be combined with each other without departing from the spirit of the present invention.

  According to the micropump of the present invention, it is possible to realize an ultra-small and micro-shaped micropump that is easy to manufacture, has high transport efficiency, and can transport a large flow rate.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings, the description is enlarged for easy understanding.

(First embodiment)
FIG. 1A is a perspective plan view of the micropump according to the first embodiment of the present invention, and FIG. 1B is a cross-sectional view taken along line AA in FIG.

  As shown in FIG.1 (b), the micropump in the 1st Embodiment of this invention is a flexible, for example, circular-shaped 1st member which consists of resin films, such as a polyimide, for example which has a film thickness of 20 micrometers, for example. 1 and a second member 2, such as an insulating resin substrate or an insulating silicon substrate, which is, for example, circular and includes a discharge port / suction port 8 at the center thereof are disposed to face each other. Further, at least the peripheral portion of the first member 1 and the second member 2 arranged opposite to each other is provided with a sealing portion 3 having a suction port / discharge port 9 while maintaining an interval of, for example, 100 μm. ing. Here, the discharge port / suction port 8 of the second member 2 and the suction port / discharge port 9 of the sealing portion 3 mean that when one functions as a suction port, the other functions as a discharge port. To do.

  Further, as shown in FIG. 1A, the first member 1 has an outermost periphery on the inner surface side of the opposing second member 2 by a metal such as Al (aluminum) or a transparent electrode such as ITO. A first electrode portion 4 having a plurality of electrodes 5 that are concentrically formed toward the inner periphery with a diameter of approximately 300 μm, for example, is provided. Similarly, on the inner surface of the second member 2, the second electrode portion 6 having a plurality of concentrically formed electrodes 7 faces the concentric electrodes 5 of the first electrode portion 4. Is formed.

  Although not shown, it is preferable to form an insulating film on the surfaces of the first electrode portion 4 and the second electrode portion 6. Thereby, while preventing the short circuit between the electrodes which oppose, fluid other than an insulating fluid can also be transported.

  Further, as shown in FIG. 1A, the first electrode portion 4 and the second electrode portion 6 are formed by a plurality of concentric electrodes 5 and 7 that are gradually widened toward the center of the concentric circle. It is preferable that the areas of the adjacent electrodes 5 and 7 are particularly equal. Thereby, the same volume of fluid can be sequentially transported from the suction port to the discharge port.

  And the micropump which has the said structure applies a predetermined voltage signal to the concentric electrode 5 of the 1st electrode part 4, and the concentric electrode 7 of the 2nd electrode part 6 facing it. An electrostatic force is generated between the opposing electrodes 5 and 7. At this time, a repulsive force is generated when the voltages between the opposing electrodes have the same polarity, and an electrostatic attractive force is generated when the voltages have different polarities. As a result, the first member 1 made of, for example, a flexible material is displaced concentrically by the electrostatic force.

  As a result, the fluid sucked from the suction port / discharge port 9 causes the gap 10 serving as a fluid flow path formed between the first member 1 and the second member 2 by the sealing portion 3 to be static. By opening and closing concentrically with electric power, it is transported in the concentric radial direction and discharged from the discharge port / suction port 8. The fluid sucked from the discharge port / suction port 8 can be similarly discharged from the suction port / discharge port 9 of the sealing portion 3.

  The micropump of the present invention is a concentrically opened and closed gap portion partitioned by the sealing portion 3 without performing sacrificial layer etching for forming a flow path in a polyimide resin or silicon substrate as in a conventional micropump. 10 is configured to be a flow path that opens and closes.

  According to the first embodiment of the present invention, since the fluid can be transported in the concentric direction, a micro pump with a small and large flow rate can be obtained.

  Further, by forming the first electrode portion 4 and the second electrode portion 6 on the inner surfaces of the first member 1 and the second member 2, a large electrostatic force that is inversely proportional to the square of the electrode interval is obtained. Therefore, the applied voltage can be reduced. As a result, it is possible to use a control element with a low withstand voltage and to realize an inexpensive micropump.

  The shapes of the electrodes 5 and 7 are not limited to concentric circles. For example, you may form by the elliptical shape which has concentricity, and polygons, such as a rectangular shape.

  Hereinafter, the operation of the micropump according to the first embodiment of the present invention will be described in detail with reference to FIG.

  FIG. 2 is a schematic cross-sectional view for schematically explaining the operation of the micropump according to the first embodiment of the present invention. In FIG. 2, the same components as those in FIG.

  In FIG. 2, the first electrode portion 4 of the first member 1 has a plurality of electrodes 5, and the second electrode portion 6 of the second member 2 has, for example, one electrode. As will be described, a plurality of concentric electrodes may be configured as the same potential.

  Moreover, although the example which formed the 1st electrode part 4 and the 2nd electrode part 6 in the outer surface of the 1st member 1 and the 2nd member 2 is demonstrated, like FIG. Even if it is formed on the surface, the operation is the same.

  First, as shown in FIG. 2A, for example, +50 V is applied to the concentric electrodes 251 and 252 of the first electrode unit 4, and −50 V is applied to the second electrode unit 6, for example. As a result, an electrostatic attractive force acts between the concentric electrodes 251 and 252 facing each other and the second electrode portion 6, and the gap portion 10 is closed and closed.

  Next, as shown in FIG. 2B, for example, −50 V is applied to the concentric electrode 251 of the first electrode portion 4, and −50 V is applied to the second electrode portion 6, for example. As a result, a repulsive force acts between the electrode 251 and the second electrode portion 6, and a region corresponding to the electrode 251 opens concentrically and expands into the concentric gap portion 10 and the suction of the sealing portion 3. Fluid flows from the mouth / discharge port 9 as indicated by an arrow. At this time, the voltage of the electrode 251 may be set to 0 V (voltage is cut off), and the gap 10 may be opened by the elasticity of the first member 1.

  Next, as shown in FIG. 2 (c), the concentric electrode 251 of the first electrode portion 4 is, for example, + 50V, the electrode 252 is, for example, -50V, and the second electrode portion 6 is, for example, -50V. Is applied. As a result, the gap 10 in the region of the electrode 251 is closed and the gap 10 in the region of the electrode 252 is opened. As a result, the fluid in the region of the electrode 251 is moved concentrically in the direction of the discharge port / suction port 8 of the second member 2 and discharged from the discharge port / suction port 8.

  As shown in FIG. 2D, when the voltage applied to the concentric electrode 252 is changed from −50 V to +50 V, for example, the gap portion 10 of the flow path between the second electrode portion 6 and the electrode 251 is The fluid confined concentrically and finished in the flow path is completely discharged from the discharge port / suction port 8. As a result, the initial state shown in FIG. Then, the fluid can be transported sequentially by repeating the above series of operations.

  Note that while the micropump is in operation, the voltage applied to each of the electrodes is always applied with a predetermined voltage except that the voltage changes from a positive voltage to a negative voltage, for example.

  In addition, the voltage value applied to the electrodes of each electrode portion is optimally set depending on the viscosity of the fluid, the electrode shape, the distance between the opposing electrodes, and the like. For example, in the above description, the electrodes are formed on the outer surfaces of the first member and the second member and a voltage of +/− 50 V is applied. However, the electrodes are formed on the inner surface, and the electrode interval is 1 If it is / 2, it can be driven at about +/− 10V to +/− 20V.

  By the above operation, the micropump in which at least one of the first electrode portion and the second electrode portion has a plurality of concentric electrodes is provided between the electrode of the first electrode portion and the electrode of the second electrode portion. Depending on the polarity of the applied voltage, the gaps open and close sequentially in the radial direction. By opening and closing the gap, the flow paths are opened and closed sequentially, and the fluid sucked from the suction port is transported concentrically in the direction of the discharge port, and finally discharged from the discharge port.

  In the first embodiment of the present invention, the concentric electrodes of the second electrode portion provided on the second member are described as having the same potential. However, the present invention is not limited to this. For example, a plurality of first electrode portions or one concentric electrode may be set to the same potential, and the polarity of the applied voltage of concentric adjacent electrodes formed on the plurality of second electrode portions may be changed. Good. Thereby, similarly to the above, the flexible first member can be displaced and the fluid can be transported.

  In the first embodiment of the present invention, the case where there are two electrodes of the first electrode unit has been described as an example, but the present invention is not limited to this. For example, by providing three or more electrodes and applying a voltage having a different polarity to at least adjacent concentric electrodes, the fluid is confined in the electrode region of the open gap, and the fluid is intermittently provided at predetermined time intervals. It can also be transported.

  According to the micropump of the first embodiment of the present invention, the gap portion is used as a fluid flow path, and the gap between the gap portions is opened and closed concentrically in the radial direction by electrostatic force so that the sucked fluid is concentrically formed. It is the structure transported to radial direction. Therefore, processing such as sacrificial layer etching is not required, and it is possible to realize a micro pump with a very small shape and capable of transporting a large flow rate of fluid and having excellent transport efficiency.

  In addition, since the first member is formed of a thin resin film such as polyimide, it can be flexibly displaced with a small electrostatic force (small applied voltage).

  Further, by forming the electrodes of the first electrode portion concentrically, the entire gap portion is used as a flow path, and the fluid is concentrically transported in the radial direction. Therefore, it is possible to realize an ultra-small micro pump that can efficiently transport a large flow rate of fluid compared to a pump that transports fluid in one direction as in the conventional example.

  In addition, a certain amount of fluid can be sequentially transported with high accuracy by forming the first electrode portion so as to be equal in width toward the concentric center so that the area of each electrode is equal. This is because when the electrode areas are different, the gap is changed in order to accommodate a certain amount of fluid, and irregularities are generated between the first member and the second member between the electrodes. Further, when the electrode areas are different, the electrostatic force generated in proportion to the area is different even with the same applied voltage, so that the opening and closing of the gap portion is non-uniform, and the fluid cannot be transported with high accuracy.

  Below, the modification of the micropump in the 1st Embodiment of this invention is demonstrated using FIG.

  FIG. 3A is a perspective plan view of a modification of the micropump according to the first embodiment of the present invention, and FIG. 3B is a cross-sectional view taken along line AA of FIG. In FIG. 3, the same components as those in FIG.

  In FIG. 3, the first electrode portion 4 and the second electrode portion 6 are different from the micropump in FIG. 1 in that a plurality of concentric electrodes 35 and 37 having the same width are formed. It is. In FIG. 3, four electrodes 35 and 37 having the same width are schematically shown. However, although it basically depends on the external shape of the micropump, it is preferable that the first electrode portion 4 is composed of 10 to several tens of electrodes 35.

  Then, from the outer peripheral side of the first electrode portion 4, the electrodes are grouped into a set having a predetermined number so that the areas of the electrodes driven with the same polarity voltage sequentially become equal. For example, when one electrode is selected on the outer peripheral side, for example, two or three electrodes are combined as a set in accordance with the inner side and driven with a voltage of the same polarity.

  Thereby, the fluid is taken in from the suction port / discharge port 9 of the sealing portion 3 in the same operation as that of the first electrode portion 4 of the micropump shown in FIG. 1A, and concentrically toward the inner peripheral side. It can be transported and discharged from the discharge port / suction port 8.

  Moreover, since the number of the electrodes 35 of the first electrode unit 4 included in the set driven with the same voltage polarity can be arbitrarily set, the amount of fluid transport can be varied by freely combining the number of electrodes. A micropump is obtained.

  In the first embodiment of the present invention, the first electrode portion and the second electrode portion are described as examples formed on the inner surfaces of the first member and the second member. Not limited to. For example, the first electrode portion and the second electrode portion may be formed on the outer surface sides of the first member and the second member, respectively. In this case, when the same electrostatic force is obtained, the voltage applied to the first electrode portion and the second electrode portion is increased, but it is not necessary to form an insulating film. The micropump can be manufactured with high productivity.

  Furthermore, the first electrode portion may be formed on the inner surface side of the first member, and the second electrode portion may be formed on the outer surface side of the second member, or vice versa. Thereby, compared with the case where each electrode part is formed in the outer surface side, the applied voltage for obtaining the same electrostatic force can be made small. And since it is not necessary to form an insulating film on the surface of the electrode part formed in the inner surface side, productivity is also excellent.

  The second electrode portion of the second member may be a solid electrode having a diameter or shape that is equal to or larger than the outer shape of the first electrode portion of the first member. Thereby, since fine processing is not required, formation of the 2nd electrode part becomes easy. Furthermore, since the number of wiring electrodes for driving the electrodes of the second electrode portion can be reduced, a simple drive circuit configuration can be achieved.

  When the second electrode portion is formed of a solid electrode, it may be formed using a thin metal plate, and may also be used as the second member. Thereby, a micropump can be produced at low cost.

  In the first embodiment of the present invention, an example in which a rigid substrate is used as the second member has been described. However, the present invention is not limited to this. For example, similarly to the first member, a polyimide resin film can be used as the second member. Thereby, the micropump excellent in the flexibility which can open and close a gap part with a smaller applied voltage is obtained.

  The voltage signal applied to the plurality of concentric electrodes formed in the first electrode portion and the second electrode portion is driven by a pulse voltage or an alternating voltage composed of two or more phases having different phases. Also good. Thereby, for example, continuous and smooth fluid transport such as a peristaltic motion is possible.

(Second Embodiment)
Hereinafter, a micropump according to the second embodiment of the present invention will be described with reference to FIG.

  FIG. 4A is a perspective plan view of the micropump according to the second embodiment of the present invention, and FIG. 4B is a cross-sectional view taken along the line AA of FIG. In FIG. 4, the same components as those in FIG.

  4 is that a plurality of suction ports / discharge ports are provided in the sealing portion, and a gate electrode is provided with the sealing portion sandwiched between the plurality of suction ports / discharge ports. Is different.

  That is, as shown in FIG. 4 (a), for example, at four locations of the sealing portion 3, for example, suction ports / discharge ports 491 provided with intake ports on the formation surface side of the first electrode portion 4 are provided. ing.

  Further, for example, a gate electrode 41 is formed on the first member 1 at each position of the suction port / discharge port 491 of the sealing portion 3 with the sealing portion 3 interposed therebetween. Then, by applying a voltage to the predetermined gate electrode 41, the corresponding suction port / discharge port 491 can be opened and closed independently. Thereby, for example, different fluids can be sucked from the respective suction ports / discharge ports 491.

  One gate electrode 41 formed on the second member 2 is the same as the second electrode portion 6 when the electrode 7 of the second electrode portion 6 formed on the second member 2 is a solid electrode. You may form in common.

  Further, by providing an intake port of the suction port / discharge port 491 on the first electrode portion 4 side, for example, a pipe or the like can be inserted to facilitate the injection of different fluid materials. Note that an intake port of the suction port / discharge port 491 may be provided on the side surface of the sealing portion 3.

  According to the micropump in the second embodiment of the present invention, by controlling the voltage of the gate electrode 41, the plurality of suction ports / discharge ports 491 are independently controlled to open and close, for example, selectively or simultaneously sucking different fluids. And can be transported with mixing. Note that the gate electrode 41 may be omitted when fluid is sucked from a plurality of suction ports / discharge ports 491 simultaneously.

  Hereinafter, the operation of the micropump according to the second embodiment of the present invention will be described in detail with reference to FIG.

  FIG. 5 is a schematic cross-sectional view for schematically explaining the operation of the micropump according to the second embodiment of the present invention. In FIG. 5, the same components as those in FIG. Further, for ease of explanation, the number of electrodes shown in FIG. 5 is small, so that it does not correspond to the number of electrodes in FIG.

  In FIG. 5, similarly to FIG. 2, the first electrode portion of the first member has a plurality of electrodes, and the second electrode portion of the second member has, for example, one solid electrode. However, all of the concentric electrodes may be configured to have the same potential.

  First, as shown in FIG. 5A, the concentric electrodes 451 and 452 of the first electrode portion 4 are, for example, +50 V, and the electrode 7 that is a solid electrode of the second electrode portion 6 is, for example, −50 V. Is applied. As a result, an electrostatic attractive force acts between the concentric electrodes 451 and 452 facing each other and the electrode 7, and the gap portion 10 is closed and closed. In this state, a voltage is applied to the gate electrode 41 to open the suction port / discharge port 491 provided in the sealing portion 3. In this case, the plurality of suction ports / discharge ports 491 may be opened at the same time, or may be selected and opened in terms of time or for each suction port / discharge port 491.

  Next, as shown in FIG. 5B, for example, −50 V is applied to the concentric electrode 451 of the first electrode portion 4, and −50 V is applied to the electrode 7, for example. As a result, a repulsive force acts between the electrode 451 and the electrode 7, and a region corresponding to the electrode 451 opens concentrically and expands in the concentric gap portion 10, and the suction port / discharge port of the sealing portion 3. Fluid flows from 491 as indicated by arrows. Then, each suction port / discharge port 491 is closed as necessary.

  Next, as shown in FIG. 5C, for example, +50 V is applied to the concentric electrode 451 of the first electrode unit 4, −50 V is applied to the electrode 452, and −50 V is applied to the electrode 7, for example. As a result, the gap 10 in the region of the electrode 451 is closed and the gap 10 in the region of the electrode 452 is opened. As a result, the fluid in the region of the electrode 451 is pushed and moved concentrically toward the discharge port / suction port 8 of the second member 2 and discharged from the discharge port / suction port 8.

  As shown in FIG. 5D, when the polarity of the voltage applied to the concentric electrode 452 is changed from −50 V to +50 V, for example, the gap 10 of the flow path between the electrode 7 and the electrode 451 is concentric. The fluid in the flow path is completely discharged from the discharge port / suction port 8. As a result, the initial state shown in FIG.

  Then, the fluid can be transported sequentially by repeating the above series of operations.

  Note that while the micropump is in operation, the voltage applied to each of the electrodes is always applied with a predetermined voltage except that the voltage changes from a positive voltage to a negative voltage, for example.

  According to the second embodiment of the present invention, a micropump that selectively sucks different fluid materials from a plurality of suction ports / discharge ports 491, mixes different fluids, and discharges them from the discharge ports / suction ports 8. Can be realized. Further, by changing the opening / closing time of the plurality of suction ports / discharge ports 491, different fluid materials can be discharged by changing the mixing ratio. Needless to say, different fluid materials are not necessary.

  In the second embodiment, the discharge port / suction port is described as being provided in the central portion surrounded by the second electrode portion where no electrode is formed. However, the present invention is not limited to this. For example, the discharge port / suction port may be provided in a central portion surrounded by the first electrode portion where no electrode is formed, and the same effect can be obtained.

(Third embodiment)
Below, the micro pump in the 3rd Embodiment of this invention is demonstrated using FIG.

  FIG. 6A is a perspective plan view of the micropump according to the third embodiment of the present invention. 6B is a cross-sectional view taken along the line AA in FIG. 6A, and FIG. 6C is a cross-sectional view taken along the line BB in FIG. 6A. In FIG. 6, the same components as those in FIG.

  FIG. 6 is different from FIG. 4 in that a plurality of suction ports / discharge ports 581 are provided in the sealing portion 3 and are provided at the interface with the first member 1 in the sealing portion 3. Is different.

  That is, as shown in FIG. 6A, there are suction ports / discharge ports 581 provided with suction ports / discharge port take-out ports on the side surface side of the seal portion 3 at, for example, four positions of the seal portion 3. Is provided.

  A gate electrode 51 is formed at each position of the suction port / discharge port 581 of the sealing unit 3 with the sealing unit 3 interposed therebetween. Then, by applying a voltage to a predetermined gate electrode 51, the corresponding suction port / discharge port 581 can be opened and closed independently. At this time, as shown in FIG. 6C, the cross-sectional shape of the suction port / discharge port 581 is a curved surface shape such as a semicircular shape, so that the first voltage is applied to the gate electrode 51. The member 1 is deformed along the cross-sectional shape of the suction port / discharge port 581. As a result, the inlet / outlet 581 can be completely opened and closed.

  One gate electrode 51 formed on the second member 2 is common to the second electrode portion when the electrode 7 of the second electrode portion 6 formed on the second member 2 is a solid electrode. You may form in. In addition, although the suction port / discharge port take-out port is provided on the side surface of the sealing portion, the suction port / discharge port take-out port may be provided on the first electrode portion surface side.

  According to the micropump in the third embodiment of the present invention, the fluid sucked from the discharge port / suction port 8 is opened and closed independently by the voltage control of the gate electrode 51. By controlling the fluid, the fluid can be discharged from a plurality of suction ports / discharge ports 581 selectively or simultaneously.

  Further, by making the cross-sectional shape of the suction port / discharge port 581 a curved surface shape, a more complete opening / closing operation can be realized.

  Hereinafter, the operation of the micropump according to the third embodiment of the present invention will be described in detail with reference to FIG.

  FIG. 7 is a schematic cross-sectional view for schematically explaining the operation of the micropump according to the third embodiment of the present invention. In FIG. 7, the same components as those in FIG. Further, for ease of explanation, since the number of electrodes shown in FIG. 7 is small, it does not correspond to the number of electrodes in FIG.

  In FIG. 7, similarly to FIG. 5, the first electrode portion of the first member has a plurality of electrodes, and the second electrode portion of the second member has, for example, one solid electrode. However, all of the concentric electrodes may be configured to have the same potential.

  First, as shown in FIG. 7A, the concentric electrodes 551 and 552 of the first electrode portion 4 are, for example, + 50V, and the electrode 7 that is the solid electrode of the second electrode portion 6 is, for example, −50V. Are applied respectively. As a result, an electrostatic attractive force acts between the concentric electrodes 551 and 552 and the electrode 7 facing each other, and the gap portion 10 is closed and closed. At this time, a voltage of, for example, −50 V is applied to the gate electrode 51, and the suction port / discharge port 581 is closed.

  Next, as shown in FIG. 7B, when, for example, −50 V is applied to the concentric electrodes 552 and 7 facing each other, a repulsive force acts between the electrodes 552 and 7. Therefore, a region corresponding to the electrode 552 opens concentrically and expands, and fluid flows into the concentric gap 10 from the discharge port / suction port 8 of the second member 2 as indicated by an arrow.

  Next, as shown in FIG. 7C, for example, +50 V is applied to the concentric electrode 552 of the first electrode portion 4, −50 V is applied to the electrode 551, and −50 V is applied to the electrode 7, for example. As a result, the gap 10 in the region of the electrode 552 is closed and the gap 10 in the region of the electrode 451 is opened. As a result, the fluid in the region of the electrode 552 is pushed and moved concentrically in the direction of the suction port / discharge port 581 of the sealing portion 3.

  Next, as shown in FIG. 7D, the applied voltage of the concentric electrode 551 of the first electrode portion 4 is changed from −50 V to +50 V, and the gate electrode 51 of the suction port / discharge port 581 is changed. For example, when it is selectively opened by applying −50 V, the fluid is selectively discharged from a plurality of suction ports / discharge ports 581. At this time, the plurality of suction ports / discharge ports 581 may be opened at the same time, or may be selectively opened over time or for each suction port / discharge port 581.

  Next, after discharging the fluid, a voltage of +50 V, for example, is applied to each gate electrode 51 of the suction port / discharge port 581 to return to the initial state shown in FIG.

  Then, the fluid can be transported sequentially by repeating the above series of operations.

  According to the third embodiment of the present invention, it is possible to obtain a micro pump capable of sucking fluid from the discharge port / suction port 8 and discharging it from a plurality of suction ports / discharge ports 581 simultaneously or selectively.

  In the third embodiment, the discharge port / suction port 8 is described as being provided in the central portion surrounded by the second electrode portion 6 where the electrode 7 is not formed. However, the present invention is not limited to this. For example, the discharge port / suction port 8 may be provided in a central portion surrounded by the first electrode portion 4 where no electrode is formed, and the same effect can be obtained. Further, as described in the second embodiment, it goes without saying that fluid may be sucked from the suction port / discharge port 581 and discharged from the discharge port / suction port 8.

(Fourth embodiment)
Hereinafter, a micropump according to a fourth embodiment of the present invention will be described with reference to FIG.

  FIG. 8A is a perspective plan view illustrating the configuration of the first electrode portion of the micropump according to the fourth embodiment of the present invention. FIG. 8B is a perspective plan view illustrating the configuration of the second electrode portion facing the first electrode portion of FIG. In FIG. 8, the same components as those in FIG.

  As shown in FIG. 8, in the micropump according to the fourth embodiment of the present invention, a plurality of micropumps formed by pairs of a first electrode portion and a second electrode portion are arranged one-dimensionally. 1 is different from FIG. 1 in that it has a plurality of discharge ports.

  That is, as shown in FIG. 8A, on the outer surface of the first member 1, for example, three first electrode portions 641, 642, 643 are arranged one-dimensionally. Each first electrode section has, for example, four concentric electrodes 651, 652, 653, 654. The same concentric electrodes of the first electrode portions are connected to each other and connected to a drive circuit 61 made of, for example, a multiplexer.

  On the other hand, as shown in FIG. 8B, on the outer surface of the second member 2, for example, three second electrode portions 661, 662, and 663 facing the first electrode portion are arranged one-dimensionally. Has been. Each second electrode part has, for example, four concentric electrodes 671, 672, 673, 674. The same concentric electrodes of the second electrode portions are connected to each other and connected to a drive circuit 62 made of, for example, a multiplexer. Further, a discharge port 68 is provided in a central portion surrounded by the electrodes of each second electrode portion.

  The first member 1 and the second member 2 are sealed opposite to each other with the sealing portion 3 provided with one suction port 69 interposed therebetween, for example.

  Thereby, for example, a micropump having three micropumps is obtained.

  The micropump in which the micropumps are arranged one-dimensionally selects the respective electrodes 651, 652, 653, 654 of the first electrode portions 641, 642, 643 sequentially by the drive circuit 61, and applies a predetermined voltage. Apply. In addition, the electrodes 671, 672, 673, and 674 of the second electrode portions 661, 662, and 663 corresponding to the first electrode portion are also sequentially selected and applied with a predetermined voltage by the drive circuit 62. At this time, the gap between the first member and the second member is expanded by applying a voltage of the same kind between the electrode of the first electrode portion and the electrode of the second electrode portion corresponding to the electrode, In contrast, the gap can be closed by applying a voltage of a different code.

  As a result, the fluid sucked from the suction port 69 is taken into the micro pump, and the electrodes are sequentially selected by the polarity of the voltage applied to the electrodes facing the first electrode portion and the second electrode portion and the drive circuit. And the fluid is simultaneously discharged from each discharge port 68 of the micro pump.

  According to the micropump of the fourth embodiment of the present invention, a plurality of micropumps each having a discharge port are formed by arranging a plurality of first electrode portions. Thereby, for example, a high-density micropump capable of supplying a fluid to wells arranged in a large number can be realized.

  In the fourth embodiment, the electrode of the second electrode portion has been described by taking a plurality of concentric electrodes as an example. However, the present invention is not limited to this. For example, as shown in FIG. 8C, the electrode of the second electrode portion may be formed of a solid electrode having the same or larger outer shape as the first electrode portion. Thereby, electrode formation becomes easy by making the electrode of a 2nd electrode part into a common electrode. Furthermore, since the configuration of the drive circuit 62 can be simplified, a low-cost micropump excellent in productivity can be obtained.

  Below, the modification of the micro pump in the 4th Embodiment of this invention is demonstrated using FIG.

  FIG. 9A is a perspective plan view illustrating the configuration of the first electrode portion of a modification of the micropump according to the fourth embodiment of the present invention. FIG. 9B is a perspective plan view illustrating the configuration of the second electrode portion that faces the first electrode portion of FIG. In FIG. 9, the same components as those in FIG.

  As shown in FIG. 9, the present embodiment is different from FIG. 8 in that a selection circuit 63 for individually controlling the innermost electrodes of the plurality of first electrode portions and second electrode portions is provided.

  That is, as shown in FIG. 9A, for example, three first electrode portions 641, 642, 643 are arranged one-dimensionally on the outer surface of the first member 1. Each first electrode section has, for example, four concentric electrodes 651, 652, 653, 654. In addition, the same electrodes of, for example, three concentric electrodes 651, 652, and 653 in each first electrode portion are connected to each other and connected to a drive circuit 61 including, for example, a multiplexer. Furthermore, for example, the concentric innermost electrode 654 of each first electrode portion is connected to a selection circuit 63 that is individually connected and selectively controls opening and closing.

  On the other hand, as shown in FIG. 9B, on the outer surface of the second member 2, for example, three second electrode portions 661, 662, and 663 facing the first electrode portion are arranged one-dimensionally. Has been. Each second electrode part has, for example, four concentric electrodes 671, 672, 673, 674. Then, the same electrodes of, for example, three concentric electrodes 651, 652, and 653 of each second electrode portion are connected to each other and connected to a drive circuit 62 made of, for example, a multiplexer. Further, a selection circuit 64 that is individually connected to, for example, a concentric innermost electrode 674 of each second electrode portion and selectively controls opening and closing is connected. Further, a discharge port 68 is provided in a central portion surrounded by the electrodes of each second electrode portion.

  The first member 1 and the second member 2 are sealed opposite to each other with the sealing portion 3 provided with one suction port 69 interposed therebetween, for example.

  Thereby, for example, a micropump having three micropumps is obtained.

  The micropump in which the micropumps are arranged one-dimensionally selects the electrodes 651, 652, and 653 of the first electrode portions 641, 642, and 643 sequentially by the drive circuit 61, and applies a predetermined voltage. To do. In addition, the electrodes 671, 672, and 673 of the second electrode portions 661, 662, and 663 corresponding to the first electrode portion are also sequentially selected and applied with a predetermined voltage by the drive circuit 62. At this time, the gap between the first member and the second member is expanded by applying a voltage of the same kind between the electrode of the first electrode portion and the electrode of the second electrode portion corresponding to the electrode, In contrast, the gap can be closed by applying a voltage of a different code.

  As a result, the fluid sucked from the suction port 69 is taken into the micro pump, and the electrodes are sequentially selected by the polarity of the voltage applied to the electrodes facing the first electrode portion and the second electrode portion and the drive circuit. To transport.

  Then, each micro pump closed by the electrode 654 of the first electrode part and the electrode 674 of the second electrode part is connected to the electrodes 654 of the first electrode part and the second electrode part by the selection circuits 63 and 64, respectively. By applying a voltage having the same polarity to the electrode 674 and opening it, a fluid can be selectively or simultaneously discharged from the discharge port 68 of any micro pump.

  According to the micro pump of the modification of the fourth embodiment of the present invention, the fluid can be discharged from any micro pump simultaneously or selectively by the selection circuit. Furthermore, by adjusting the opening / closing time by the selection circuit, the amount of fluid to be discharged can be individually and arbitrarily adjusted. Thereby, for example, it is possible to realize a high-density micropump that can supply fluid individually or in an arbitrary amount to arbitrary wells arranged in a large number.

  In the modification of the fourth embodiment, the electrode of the second electrode unit has been described as an example of a plurality of concentric electrodes. However, the present invention is not limited to this. For example, as shown in FIG. 9C, the electrode of the second electrode portion may be formed of a solid electrode having the same or larger outer shape as the first electrode portion.

  Thereby, electrode formation becomes easy by making the electrode of a 2nd electrode part into a common electrode. Furthermore, since the selection circuit 64 can be omitted and the configuration of the drive circuit 62 can be simplified, a low-cost micropump excellent in productivity can be obtained.

  In the fourth embodiment of the present invention, the first electrode portion and the second electrode portion have been described as being formed on the outer surfaces of the first member and the second member. Not exclusively. For example, it may be formed on at least one inner surface of the first member and the second member. Thereby, since the distance between electrodes can be shortened, in order to obtain the same electrostatic force, the applied voltage can be lowered, or a large electrostatic force can be obtained in the case of the same applied voltage.

  In the micro pump according to the fourth embodiment of the present invention, the case where there is one suction port has been described as an example. However, the present invention is not limited to this. For example, a plurality of suction ports may be provided in the sealing part.

  In the micro pump according to the fourth embodiment of the present invention, the example in which the plurality of micro pumps share the gap is described, but the present invention is not limited to this. For example, it is good also as a structure which isolate | separates in a sealing part for every micro pump, and provides an inlet individually corresponding to it. This improves the mechanical strength of the micropump and allows different fluids to be transported individually.

  In the micropump of the fourth embodiment of the present invention, the electrode of the first electrode portion and the electrode of the second electrode portion are described as electrodes having the same width. Needless to say, an electrode structure can be applied.

(Fifth embodiment)
Hereinafter, a micro pump according to a fifth embodiment of the present invention will be described with reference to FIG.

  FIG. 10A is a perspective plan view illustrating the configuration of the first electrode portion of the micropump according to the fifth embodiment of the present invention. FIG. 10B is a perspective plan view illustrating the configuration of the second electrode portion facing the first electrode portion of FIG. In FIG. 10, the same components as those in FIG.

  As shown in FIG. 10, in the micro pump according to the fifth embodiment of the present invention, a plurality of micro pumps formed by pairs of a first electrode portion and a second electrode portion are arranged two-dimensionally. 8 is different from FIG.

  As shown in FIG. 10A, on the outer surface of the first member 1, for example, nine first electrode portions are two-dimensionally arranged, for example, in a 3 × 3 matrix shape in the X direction and the Y direction. Is formed. Each first electrode portion has, for example, four concentric electrodes 751, 752, 753, and 754. For example, the first concentric electrodes 741, 742, and 743 in the Y direction are paired, and the same concentric electrodes (for example, the electrodes 751) are connected to each other and connected to the drive circuit 71 including, for example, a multiplexer. ing. The other sets of first electrode portions in the X direction are also connected in the same manner.

  On the other hand, as shown in FIG. 10B, on the outer surface of the second member 2, for example, nine first electrode portions facing the first electrode portion are two-dimensionally arranged, for example, in the X direction and In the Y direction, it is formed in a 3 × 3 matrix. Each second electrode section has, for example, four concentric electrodes 771, 772, 773, and 774. For example, the second concentric electrodes 761, 762, 763 in the Y direction are paired, and the same concentric electrodes (for example, the electrodes 771) are connected to each other and connected to the drive circuit 72 including, for example, a multiplexer. ing. The other sets of second electrode portions in the X direction are also connected in the same manner. Further, a discharge port 78 is provided in a central portion surrounded by the electrodes of each second electrode portion.

  The first member 1 and the second member 2 are sealed opposite to each other with the sealing portion 3 provided with one suction port 79 interposed therebetween, for example.

  Thereby, for example, a micropump having nine micropumps is obtained.

  The micropump in which the micropumps are arranged in a two-dimensional matrix shape causes the drive circuit 71 to connect the electrodes 751, 752, 753, and 754 of the first electrode portions 741, 742, and 743 in the X direction. Select one by one and apply a predetermined voltage. The electrodes 771, 772, 773, and 774 of the second electrode portions 761, 762, and 763 corresponding to the first electrode portion are also sequentially selected by the drive circuit 72 and a predetermined voltage is applied thereto. At this time, a gap between the first member and the second member is opened by applying a voltage of the same kind between the electrode of the first electrode portion and the electrode of the second electrode portion corresponding to the electrode, In addition, the gap can be closed by applying a voltage of a different code.

  As a result, the fluid sucked from the suction port 79 is taken into the micro pump, and the electrodes are sequentially selected by the polarity of the voltage applied to the opposing electrodes of the first electrode portion and the second electrode portion and the drive circuit. And the fluid is simultaneously discharged from each discharge port 78 of the micro pump. Further, the fluid can be discharged for each set of the first electrode portions.

  According to the micropump of the fifth embodiment of the present invention, a plurality of micropumps each having discharge ports are formed in a two-dimensional matrix by arranging a plurality of first electrode portions. The As a result, for example, it is possible to realize a high-density micropump that can supply fluids at a high speed in a batch to wells that are arranged two-dimensionally.

  In the fifth embodiment, the electrode of the second electrode portion has been described by taking a plurality of concentric electrodes as an example. However, the present invention is not limited to this. For example, as shown in FIG. 11, the electrodes 761, 762, 763 of the second electrode portion may be formed and connected with a solid electrode having the same or larger outer shape as the first electrode portion. Good. Thereby, since the electrode of the 2nd electrode part can be made into a common electrode, electrode formation becomes easy. Furthermore, since the configuration of the drive circuit 72 can be simplified, a low-cost micropump excellent in productivity can be obtained.

  Below, the modification of the micro pump in the 5th Embodiment of this invention is demonstrated using FIG.

  FIG. 12A is a perspective plan view illustrating the configuration of the first electrode portion of a modification of the micropump according to the fifth embodiment of the present invention. FIG. 12B is a perspective plan view illustrating the configuration of the second electrode portion facing the first electrode portion in FIG. In FIG. 12, the same components as those in FIG.

  As shown in FIG. 12, in each set of a plurality of first electrode portions and second electrode portions in the X direction, a selection circuit 73 for individually controlling the innermost electrode is provided. Is different.

  That is, as shown in FIG. 12A, on the outer surface of the first member 1, for example, nine first electrode portions are two-dimensionally arranged, for example, 3 × 3 in the X direction and the Y direction. It is formed in a matrix. Each first electrode portion has, for example, four concentric electrodes 751, 752, 753, and 754. For example, the first concentric electrodes 741, 742, and 743 in the Y direction are paired, and the same concentric electrodes (for example, the electrodes 751) are connected to each other and connected to the drive circuit 71 including, for example, a multiplexer. ing. Furthermore, for example, the concentric innermost electrode 754 of each first electrode portion is connected to a selection circuit 73 that is individually connected and selectively controls opening and closing. The other sets of first electrode portions in the X direction are also connected in the same manner.

  On the other hand, as shown in FIG. 12B, on the outer surface of the second member 2, the second electrode portion is a solid electrode having an outer shape at least equal to or larger than the outer shape of the first electrode portion. The electrodes 761, 762, and 763 are connected in common. The electrodes of the second electrode section are connected to a drive circuit 72 made of, for example, a multiplexer.

  The first member 1 and the second member 2 are sealed opposite to each other with the sealing portion 3 provided with one suction port 79 interposed therebetween, for example.

  Thereby, for example, a micropump having nine micropumps is obtained.

  The micro pump in which the micro pumps are arranged in a two-dimensional matrix sequentially selects the electrodes 751, 752, and 753 of the first electrode portions 741, 742, and 743 in the X direction by the driving circuit 71. Then, a predetermined voltage is applied. In addition, a voltage having a predetermined polarity is applied by the drive circuit 72 to the electrodes of the second electrode portions 761, 762, and 763 having a size corresponding to at least the first electrode portion. At this time, a gap between the first member and the second member is opened by applying a voltage of the same kind between each electrode of the first electrode part and the corresponding second electrode part, and on the contrary, a different kind of sign The gap can be closed by applying a voltage of.

  Thus, the fluid sucked from the suction port 79 is taken into the micro pump, and the fluid is transported by sequentially selecting the electrodes according to the polarity of the voltage applied to the first electrode portion and the second electrode portion and the drive circuit.

  Then, each micro pump closed by the electrode 754 of the first electrode portion and the second electrode portions 761, 762, 763 is converted by the selection circuit 73 into the electrode 754 of the first electrode portion and the second electrode portion 761. , 762, 763 by applying a voltage having the same polarity and opening it, fluid can be selectively or simultaneously discharged from the discharge port 78 of any micro pump.

  In this way, for example, 100 micropumps having a micro shape with a diameter of about 300 μm are arranged in a matrix, for example, with 100 columns in 10 columns in the X direction and 10 rows in the Y direction. The fluid can be selectively discharged to the wells or gene chips.

  Thereby, an evaluation system or a development system with high efficiency or labor saving can be realized by a low-cost and high-efficiency micro pump.

  In the micropump according to the modification of the fifth embodiment of the present invention, the electrode of the second electrode portion of the second member has been described as a common electrode made of a solid electrode. However, the present invention is not limited to this. Absent. For example, the electrode of the second electrode portion is a common electrode in each X direction, but may be configured to be driven in each Y direction as an independent electrode in the Y direction. In this case, the second member requires a selection circuit that sequentially selects the second electrode portion in the Y direction, for example, but the micropumps arranged in two dimensions are at least sequentially in each Y direction. One-dimensional selection can be performed.

  Needless to say, the electrode connection of the second electrode portion may be driven between the corresponding electrodes by adopting the same configuration as the electrode connection of the first electrode portion.

  According to the micropump of the fifth embodiment of the present invention, a plurality of first electrode parts having a plurality of minute shapes are arranged in a two-dimensional matrix, thereby forming a large number of two-dimensionally arranged electrodes. A high-density micropump that supplies fluid to wells and the like in two dimensions can be realized.

  In addition, according to the micropump of the fifth embodiment of the present invention, a plurality of wells at predetermined positions can be selected depending on the application by the configuration in which the plurality of first electrode portions are driven simultaneously or selectively. In addition, it is possible to realize a micropump that selectively supplies fluids simultaneously or in sequence for a predetermined time.

  Moreover, according to the micro pump of the fifth embodiment of the present invention, the discharge port is described as being provided in the central portion surrounded by the first electrode portion of the first member, but the present invention is not limited to this. For example, the discharge port may be provided at the center of the second electrode portion of the second member, and the same operation is possible.

  In the micro pump according to the fifth embodiment of the present invention, the first electrode portion and the second electrode portion are formed on the outer surfaces of the first member and the second member. Not limited to this. For example, it may be formed on at least one inner surface of the first member and the second member. Thereby, since the distance between electrodes can be shortened, in order to obtain the same electrostatic force, the applied voltage can be lowered, or a large electrostatic force can be obtained in the case of the same applied voltage.

  In the micro pump according to the fifth embodiment of the present invention, the case where there is one suction port has been described as an example. However, the present invention is not limited to this. For example, a plurality of suction ports may be provided in the sealing part.

  In the micro pump according to the fifth embodiment of the present invention, the example in which the plurality of micro pumps share the gap is described, but the present invention is not limited to this. For example, it is good also as a structure which isolate | separates in a sealing part for every micro pump, and provides an inlet individually corresponding to it. Thereby, the mechanical strength of the micropump can be improved and different fluids can be transported individually.

  In the micro pump of the fifth embodiment of the present invention, the electrode of the first electrode portion and the electrode of the second electrode portion are described as electrodes having the same width. Needless to say, an electrode structure can be applied.

  The micropump according to the present invention is useful as a micropump used for fine flow rate control of a fluid, a dispenser, and other applications because it has a high transport efficiency and can be transported at a large flow rate and can be miniaturized.

(A) Perspective plan view of the micropump in the first embodiment of the present invention (b) AA line sectional view of FIG. Schematic sectional view for schematically explaining the operation of the micropump in the first embodiment of the present invention (A) Perspective plan view of a modification of the micropump in the first embodiment of the present invention (b) AA line sectional view of FIG. (A) Perspective plan view of a micropump in the second embodiment of the present invention (b) AA line sectional view of FIG. Schematic cross-sectional view schematically explaining the operation of the micropump in the second embodiment of the present invention (A) Perspective plan view of a micropump according to the third embodiment of the present invention (b) AA line cross-sectional view of the same figure (a) (c) BB line cross-sectional view of the same figure (a) Schematic cross-sectional view schematically explaining the operation of the micropump in the third embodiment of the present invention The perspective plan view explaining the configuration of the first electrode portion of the micropump in the fourth embodiment of the present invention (b) The configuration of the second electrode portion facing the first electrode portion of FIG. (C) Perspective plan view for explaining another example of the second electrode portion in FIG. (A) Perspective plan view for explaining the configuration of the first electrode part of the modified example of the micropump according to the fourth embodiment of the present invention (b) The first electrode part facing the first electrode part of FIG. FIG. 2 is a perspective plan view for explaining the configuration of the second electrode part (c) and a perspective plan view for explaining another example of the second electrode part in FIG. The perspective plan view explaining the structure of the 1st electrode part of the micropump in the 5th Embodiment of this invention (b) The structure of the 2nd electrode part facing the 1st electrode part of the same figure (a) Perspective plan view explaining The perspective top view explaining another example of the 2nd electrode part of the micropump in the 5th Embodiment of this invention The perspective plan view explaining the structure of the 1st electrode part of the modification of the micropump in the 5th Embodiment of this invention (b) The 2nd electrode facing the 1st electrode part of the same figure (a) Perspective plan view for explaining the configuration of the part

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 1st member 2 2nd member 3 Sealing part 4,641,642,643,741,742,743 First electrode part 5,7,35,37,251,252,451,452,551 552,651,652,653,654,671,672,673,674,751,752,753,754,771,772,773,774 electrode 6,661,662,663,761,762,763 second Electrode unit 8 Discharge port / suction port 9, 491, 581 Suction port / discharge port 10 Gap 41, 51 Gate electrode 61, 62, 71, 72 Drive circuit 63, 64, 73 Select circuit 68, 78 Discharge port 69, 79 Inlet

Claims (15)

A first member having a first electrode portion in which at least a plurality of electrodes are formed concentrically;
A second member having at least a second electrode portion provided relative to the first electrode portion;
A sealing portion having a fluid suction port / discharge port for maintaining and sealing the periphery between the first member and the second member arranged opposite to each other at a predetermined interval;
The discharge port / suction port formed in one of the central portion surrounded by the first electrode portion of the first member and the central portion surrounded by the second electrode portion of the second member And
A micropump that transports the fluid in a concentric direction by an electrostatic force generated by applying a voltage signal between the first electrode portion and the second electrode portion facing the first electrode portion. The micropump according to claim 1, wherein at least one of the first member and the second member is a resin film. 3. The micropump according to claim 1, wherein the plurality of electrodes of the first electrode portion are formed so as to be gradually wider toward a concentric center. 4. At least one of the first electrode portion of the first member and the second electrode portion of the second member is an inner surface side or an outer surface side of the first member and the second member facing each other. The micropump according to any one of claims 1 to 3, wherein the micropump is formed as follows. The second electrode portion has a plurality of electrodes formed concentrically so as to be paired with the plurality of electrodes of the first electrode portion. The micropump according to any one of the above. The micropump according to any one of claims 1 to 5, wherein the sealing portion is provided with a plurality of the suction ports / discharge ports. The gate electrode which opens and closes the said inlet / outlet of the said sealing part is provided in the said 1st member and the said 2nd member, The Claim 1 or Claim 6 characterized by the above-mentioned. Micro pump. The suction port / discharge port of the sealing portion is provided at an interface between the sealing portion and the first member or the second member. The micropump according to claim 7. The micropump according to claim 8, wherein a cross-sectional shape of the suction port / discharge port of the sealing portion is a curved surface shape. A first member including a plurality of first electrode portions each having at least a plurality of electrodes formed concentrically;
A second member having a plurality of second electrode portions provided opposite to at least a plurality of the first electrode portions;
A sealing portion having a fluid inlet for maintaining and sealing the periphery between the first member and the second member disposed opposite to each other at a predetermined interval;
A plurality of discharge ports provided in any one of a central portion of the plurality of first electrode portions of the first member and a central portion of the plurality of second electrode portions of the second member. Have
The fluid sucked from the suction port is transported concentrically to the plurality of discharge ports by an electrostatic force generated by applying a voltage signal between the first electrode unit and the second electrode unit facing the first electrode unit. A micropump characterized by that. The micropump according to claim 10, wherein the sealing part is provided with a plurality of the suction ports. The micropump according to claim 10 or 11, wherein a plurality of pairs of the first electrode portion and the second electrode portion are arranged one-dimensionally. The micropump according to claim 10 or 11, wherein a plurality of pairs of the first electrode portion and the second electrode portion are two-dimensionally arranged. The micropump according to any one of claims 10 to 13, wherein the fluid is discharged simultaneously from a plurality of the discharge ports. The micropump according to any one of claims 10 to 13, wherein a plurality of the discharge ports are selected to discharge the fluid.

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