JP2007093846A - Electro-optic device and electronic equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electro-optic device in which yield is improved and electronic equipment. <P>SOLUTION: The electro-optic device 1 has an element substrate 60 having scanning lines, data lines which cross the scanning lines, pixel circuits provided corresponding to intersection of the scanning lines and the data lines and a driving circuit which drives the pixel circuits, an opposite substrate 70 arranged opposite to the element substrate 60 and an electro-optic substance sandwiched between the element substrate 60 and the opposite substrate 70. The element substrate 60 is provided with a TEG 40 including a pixel inspection circuit with the same structure as that of the pixel circuits and an external terminal 92 for the TEG electrically connected to the TEG 40 and the TEG 40 further includes a booster circuit which is a part of the driving circuit. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an electro-optical device and an electronic apparatus.

  2. Description of the Related Art Conventionally, electro-optical devices such as liquid crystal devices that display images are known. As this electro-optical device, there is a total reflection type electro-optical device capable of reflective display using reflected light of ambient light such as natural light and room light.

  Such an electro-optical device includes a liquid crystal panel as an electro-optical panel. The liquid crystal panel includes a display area having a plurality of pixels, and a liquid crystal driving circuit that is provided around the display area and drives a pixel circuit included in the pixels.

A liquid crystal panel is sandwiched between an element substrate on which a thin film transistor (hereinafter referred to as TFT) as a switching element is disposed corresponding to a pixel, a counter substrate disposed opposite to the element substrate, and the element substrate and the counter substrate. And a liquid crystal as an electro-optical material.
Here, the element substrate is formed larger than the counter substrate, and the above-described liquid crystal driving circuit is provided on the element substrate. Further, the liquid crystal is sealed by a seal portion formed between the element substrate and the counter substrate along the outer periphery of the counter substrate.

The element substrate includes a plurality of scanning lines provided at predetermined intervals, a plurality of data lines substantially orthogonal to the scanning lines and provided at predetermined intervals, and intersections between the scanning lines and the data lines. Correspondingly provided TFT and pixel electrode.
The counter substrate includes a common electrode provided to face the pixel electrode.

Each pixel circuit includes the above-described TFT, pixel electrode, and a storage capacitor having one end electrically connected to the pixel electrode.
A scanning line is connected to the gate of the TFT, a data line is connected to the source of the TFT, and a pixel electrode and a storage capacitor are connected to the drain of the TFT.

The liquid crystal driving circuit includes a scanning line driving circuit, a data line driving circuit, and a liquid crystal driving power supply circuit.
The scanning line driving circuit includes a decoder circuit that selects a plurality of scanning lines line-sequentially, a level shifter that boosts an input voltage to generate a selection voltage, and supplies the selection voltage to the scanning line selected by the decoder circuit; It is equipped with.
The data line driving circuit includes a decoder circuit that selects a plurality of data lines in a line sequential manner, a level shifter that boosts an input signal to generate an image signal, and supplies the image signal to the data line selected by the decoder circuit; It is equipped with.
The liquid crystal driving power supply circuit includes a boosting circuit that boosts the input reference voltage to generate a driving voltage for the pixel circuit.

The above electro-optical device operates as follows. That is, by supplying a driving voltage from the liquid crystal driving power supply circuit to the liquid crystal panel and supplying a selection voltage from the scanning line driving circuit to the scanning lines in a line-sequential manner, all TFTs related to a certain scanning line are turned on. The data line and the pixel electrode are brought into conduction. Then, in synchronization with the timing at which the data lines and the pixel electrodes become conductive, image signals are supplied line-sequentially from the data line driving circuit to the data lines. As a result, an image signal is supplied from the data line via the TFT to all the pixels selected by the scanning line driving circuit and the data line driving circuit, and the image data is written into the pixel electrode.
That is, a pixel circuit composed of TFTs and pixel electrodes is driven by a liquid crystal driving circuit formed on the same element substrate.

  When image data is written to the pixel electrode, a driving voltage is applied to the liquid crystal due to the potential difference between the voltages applied to the pixel electrode and the common electrode. Therefore, by changing the voltage level of the image signal, the orientation and order of the liquid crystal are changed, and gradation display is performed by light modulation of each pixel.

  In the element substrate described above, the pixel circuit is driven by the liquid crystal driving circuit, thereby performing an inspection for confirming the operation of the pixel circuit and the liquid crystal driving circuit. Only element substrates that pass this inspection are used as components of the electro-optical device.

By the way, in the element substrate, since the liquid crystal driving circuit is formed after the pixel circuit is formed, if only the operation of the pixel circuit is confirmed and the pixel circuit can be formed only on the element substrate in which the pixel circuit operates normally. Thus, the yield of the element substrate can be improved.
However, as described above, in order to confirm the operation of the pixel circuit, it is necessary to form a liquid crystal driving circuit on the element substrate, and thus it is difficult to improve the yield of the element substrate.

In order to solve such a problem, an inspection circuit (hereinafter referred to as a TEG (Test Element Group)) having the same structure as the pixel circuit is formed at the end of the element substrate, and the TEG is inspected. Then, there is a method for confirming the operation of the pixel circuit (see Patent Document 1).
According to this method, when the TEG does not operate normally, it is presumed that the pixel circuit does not operate normally, and the element substrate on which the TEG is formed is discarded without forming the liquid crystal driving circuit. Therefore, the yield of the element substrate can be improved.
JP 2004-214638 A

  By the way, in recent years, it has been demanded to further improve the yield. However, since the above-described TEG does not include a liquid crystal driving circuit, an element substrate in which the pixel circuit does not operate normally even when the TEG is inspected is discovered. Although it is possible, an element substrate in which the liquid crystal driving circuit does not operate normally cannot be found. For this reason, there is a limit to the inspection by TEG, and it has been difficult to improve the yield.

  SUMMARY An advantage of some aspects of the invention is to provide an electro-optical device and an electronic apparatus that can improve yield.

  The electro-optical device of the present invention includes a scanning line, a data line intersecting with the scanning line, a pixel circuit provided corresponding to the intersection of the scanning line and the data line, and a driving circuit for driving the pixel circuit. An electro-optical device, comprising: a first substrate having a second substrate disposed opposite to the first substrate; and an electro-optical material sandwiched between the first substrate and the second substrate. The first substrate is provided with an evaluation circuit including a pixel inspection circuit having the same structure as the pixel circuit, and an external terminal electrically connected to the evaluation circuit. And a part of the driving circuit.

  According to this invention, the first substrate is provided with the evaluation circuit including the pixel inspection circuit having the same structure as the pixel circuit, and the external terminal electrically connected to the evaluation circuit. Therefore, the operation of the pixel circuit can be confirmed by inspecting the evaluation circuit via the external terminal.

In addition, a part of a driving circuit for driving the pixel circuit is further formed in the evaluation circuit including the pixel inspection circuit. For this reason, when the evaluation circuit is inspected and this evaluation circuit operates normally, a part of the drive circuit is also operating normally, so the probability that the entire drive circuit operates normally increases.
Therefore, it is possible to estimate whether or not the drive circuit operates normally by inspecting the evaluation circuit, so that the yield can be improved.

  In the electro-optical device according to the aspect of the invention, it is preferable that the evaluation circuit is formed in a region of the first substrate where the second substrate is not opposed to the second substrate.

By the way, for example, the first substrate and the second substrate are respectively formed integrally on the first mother substrate and the second mother substrate, and these mother substrates are bonded to each other through a sealing material. And cut according to the size of each electro-optic panel. Here, when the second substrate is cut, stress acts in the vicinity of a region of the first substrate that faces the cut surface of the second substrate.
Further, for example, when a sealing material is provided along the outer periphery of the second substrate to seal the electro-optical material, the first substrate or the region of the second substrate where the sealing material is provided However, stress due to external force tends to concentrate.
However, according to the present invention, since the evaluation circuit is formed in the region of the first substrate where the second substrate is not disposed oppositely, it is possible to avoid the stress from being applied to the evaluation circuit, and to prevent damage or malfunction. Can be prevented.

  In the electro-optical device according to the aspect of the invention, it is preferable that the external terminal is formed in a region of the first substrate where the second substrate is not opposed to the external substrate.

  According to the present invention, since the external terminal is formed in a region of the first substrate where the second substrate is not opposed to the external substrate, the external terminal is not concealed by the second substrate, and is placed on the external terminal. An external board can be easily mounted.

  In the electro-optical device according to the aspect of the invention, the first substrate is provided with an evaluation circuit signal line that electrically connects the evaluation circuit and the external terminal, and at least a part of the evaluation circuit signal line includes the evaluation circuit signal line. It is preferable that the second substrate is provided in a region where the second substrate is disposed opposite to the first substrate.

  According to the present invention, the evaluation circuit signal line for electrically connecting the evaluation circuit and the external terminal is provided on the first substrate, and at least a part of the evaluation circuit signal line is connected to the second of the first substrate. It provided in the area | region where the board | substrate was opposingly arranged. For this reason, the portion of the evaluation circuit signal line that is not covered by the second substrate is reduced, and it is possible to prevent static electricity from being applied to the evaluation circuit signal line from the outside.

  In the electro-optical device according to the aspect of the invention, it is preferable that there are a plurality of the evaluation circuit signal lines, and the evaluation circuit signal line located closest to the pixel circuit and the drive circuit is a ground potential.

  According to the present invention, among the plurality of evaluation circuit signal lines, the one closest to the pixel circuit and the drive circuit is set as the ground potential. Since the evaluation circuit signal line, which is the ground potential, is located between the remaining evaluation circuit signal lines and the signal lines electrically connected to the drive circuit, the influence of noise between these signal lines is reduced. By reducing it, crosstalk can be reduced.

  In the electro-optical device according to the aspect of the invention, it is preferable that the drive circuit formed in the evaluation circuit is a drive circuit with a low yield.

  According to the present invention, a drive circuit with a low yield is formed in the evaluation circuit. Therefore, when the evaluation circuit is inspected and this evaluation circuit operates normally, the drive circuit with a low yield is also operating normally, so the probability that the entire drive circuit operates normally is high. Become. Therefore, the yield can be further improved.

  The electro-optical device of the present invention includes a scanning line, a data line intersecting with the scanning line, a pixel circuit provided corresponding to the intersection of the scanning line and the data line, and a driving circuit for driving the pixel circuit. An electro-optical device, comprising: a first substrate having a second substrate disposed opposite to the first substrate; and an electro-optical material sandwiched between the first substrate and the second substrate. The first substrate includes an evaluation circuit including the same structure as a part of the drive circuit.

  According to this invention, the evaluation circuit including the same structure as a part of the drive circuit is provided on the first substrate. For this reason, the operation of a part of the drive circuit can be confirmed by inspecting the evaluation circuit.

An electronic apparatus according to an aspect of the invention includes the above-described electro-optical device.
According to the present invention, there are effects similar to those described above.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description of embodiments and modifications, the same constituent elements are denoted by the same reference numerals, and the description thereof is omitted or simplified.
<Embodiment>
FIG. 1 is a block diagram showing a configuration of an electro-optical device 1 according to an embodiment of the present invention. FIG. 2 is a plan view of the electro-optical device 1.

The electro-optical device 1 includes a liquid crystal panel AA having a display area A composed of a plurality of pixels.
The liquid crystal panel AA is sandwiched between the element substrate 60 as the first substrate, the counter substrate 70 as the second substrate disposed opposite to the element substrate 60, and the element substrate 60 and the counter substrate 70. Liquid crystal as an electro-optical material (see FIG. 4).

  The element substrate 60 is formed larger than the counter substrate 70. A plurality of scanning lines 10 and common lines (capacitance lines) 30 that are alternately provided at predetermined intervals in a region corresponding to the display region A in the element substrate 60 and intersecting these scanning lines 10 at predetermined intervals. A plurality of data lines 20 provided and pixel circuits 50 provided corresponding to the intersections of the scanning lines 10 and the data lines 20 are provided.

A scanning line driving circuit 11 serving as a driving circuit for driving the pixel circuit 50 via the scanning line 10 surrounds a region corresponding to the display area A in a region of the element substrate 60 where the counter substrate 70 is opposed. A data line driving circuit 21 as a driving circuit for driving the pixel circuit 50 via the data line 20, an inspection circuit 12 for inspecting the scanning line driving circuit 11, an inspection circuit 22 for inspecting the data line driving circuit 21, Is provided.
Specifically, the scanning line drive circuit 11 and the inspection circuit 12 are provided with the display area A sandwiched from the horizontal direction in FIG. 2, and the data line drive circuit 21 and the inspection circuit 22 provide the display area A in FIG. It is sandwiched from the middle and up and down directions.

The element substrate 60 is electrically connected to the scanning line driving circuit 11, the data line driving circuit 21, and the inspection circuits 12 and 22 through the general-purpose signal line 96 along the lower edge in FIG. A plurality of general-purpose external terminals 97 are arranged.
These general-purpose external terminals 97 are provided in a region of the element substrate 60 where the counter substrate 70 is not disposed so as to face the element substrate 60, and are exposed to the outside.
The general-purpose signal line 96 extends from the general-purpose external terminal 97 perpendicularly to the edge of the element substrate 60 provided with the general-purpose external terminal 97, and is drawn in a region of the element substrate 60 facing the counter substrate 70. Rotated to be electrically connected to the scanning line driving circuit 11, the data line driving circuit 21, and the inspection circuits 12 and 22 described above.

  The pixel circuit 50 includes a pixel transistor 51, a pixel electrode 55, and a storage capacitor 53 having one end electrically connected to the pixel electrode 55 and the other end electrically connected to the common line 30, and corresponds to the pixel. Is provided.

  The counter substrate 70 includes a common electrode 56 provided to face the pixel electrode 55.

  The scanning line 10 is connected to the gate electrode of the pixel transistor 51, the data line 20 is connected to the source electrode of the pixel transistor 51, and the pixel electrode 55 and the storage capacitor 53 are connected to the drain electrode of the pixel transistor 51. Has been. A liquid crystal is sandwiched between the pixel electrode 55 and the common electrode 56. Accordingly, when a selection voltage is applied from the scanning line 10, the pixel transistor 51 brings the data line 20, the pixel electrode 55, and the storage capacitor 53 into a conductive state.

  The common electrode 56 is connected to the common line 30 via a conductive portion 31 provided at a corner of the liquid crystal panel AA and a common wiring 32 that connects the conductive portions 31 to each other.

  The scanning line driving circuit 11 generates a selection voltage by boosting the input voltage and a decoder circuit 15 that selects a plurality of scanning lines 10 in line sequence, and applies the selection voltage to the scanning line 10 selected by the decoder circuit 15. And a level shifter 16 to be supplied. The scanning line driving circuit 11 supplies a selection voltage for turning on the pixel transistor 51 to each scanning line 10 line-sequentially. For example, when a selection voltage is supplied to a certain scanning line 10, all the pixel transistors 51 connected to the scanning line 10 are turned on, and all the pixels related to the scanning line 10 are selected.

  The data line driving circuit 21 generates a video signal by boosting an input signal and a decoder circuit 25 that selects a plurality of data lines 20 in a line-sequential manner. The data signal is applied to the data line 20 selected by the decoder circuit 25. A level shifter 26 to be supplied. The data line driving circuit 21 supplies image signals to the data lines 20 line-sequentially, and sequentially writes the image data to the pixel electrodes 55 of the pixels via the pixel transistors 51 in the on state. Here, the data line driving circuit 21 uses the voltage of the common electrode 56 as a reference voltage, positive writing for supplying an image signal to the data line 20 at a voltage higher than the voltage of the common electrode 56, The negative polarity writing for supplying the image signal to the data line 20 at a voltage lower than the voltage is alternately performed.

Further, the element substrate 60 is provided with a TEG 40 as an evaluation circuit for inspecting the pixel circuit 50 in a region where the counter substrate 70 is not formed along the lower edge in FIG. A plurality of TEG external terminals 92 that are electrically connected to the TEG 40 via TEG signal lines 91 as evaluation circuit signal lines are arranged on the element substrate 60.
These TEG external terminals 92 are provided adjacent to the general-purpose external terminals 97, and similarly to the general-purpose external terminals 97, the TEG external terminals 92 are provided in a region of the element substrate 60 where the counter substrate 70 is not disposed so as to face the outside. Exposed.

The TEG signal line 91 extends from the TEG external terminal 92 to a region of the element substrate 60 in which the counter substrate 70 is disposed so as to be substantially parallel to the general-purpose signal line 96. Then, after being routed in a region of the element substrate 60 in which the counter substrate 70 is disposed opposite to the element substrate 60, the element substrate 60 extends again to a region in which the counter substrate 70 is not disposed to be opposed, and is connected to the TEG 40. ing.
That is, a part of the TEG signal line 91 is formed in a region of the element substrate 60 in which the counter substrate 70 is arranged to face.
If the TEG signal line 91 located closest to the pixel circuit 50, the scanning line drive circuit 11, and the data line drive circuit 21 is the TEG specific signal line 91A, the TEG specific signal line 91A is: Ground potential.

FIG. 3 is a block diagram showing a configuration of the TEG 40.
The TEG 40 includes a pixel inspection circuit 41 having the same structure as the pixel circuit 50, and a part of the scanning line driving circuit 11 and the data line driving circuit 21.
The scanning line driving circuit 11 and a part of the data line driving circuit 21 are circuits having a low yield. Specifically, the driving voltage for driving the pixel circuit 50 is increased by boosting the input reference voltage. The charge pump circuit 46 is generated.

  The charge pump circuit 46 includes input terminals P and Q and output terminals R and S connected to the TEG signal line 91, and the input terminal Q and the output terminal S have the same potential. The charge pump circuit 46 adds the potential difference between the input terminals P and Q to the voltage at the input terminal P and outputs the voltage from the output terminal R. That is, the charge pump circuit 46 substantially doubles the voltage at the input terminal P and outputs it from the output terminal R.

  Specifically, the charge pump circuit 46 includes a capacitor 461, a switching element 462 that electrically connects one end side of the capacitor 461 to the input terminal P or the output terminal R, and the other end side of the capacitor 461 as the input terminal P. Alternatively, a switching element 463 that is electrically connected to the input terminal Q and a capacitor 464 that has one end side electrically connected to the input terminal P and the other end side electrically connected to the output terminal R are provided.

  The switching elements 462 and 463 are switched in conjunction with each other. That is, when the switching element 462 electrically connects one end side of the capacitor 461 to the input terminal P, the switching element 463 electrically connects the other end side of the capacitor 461 to the input terminal Q. On the other hand, when the switching element 462 electrically connects one end side of the capacitor 461 to the output terminal R, the switching element 463 electrically connects the other end side of the capacitor 461 to the input terminal P.

First, the switching element 462 electrically connects one end side of the capacitor 461 to the input terminal P, and the switching element 463 electrically connects the other end side of the capacitor 461 to the input terminal Q. In this state, the digital input voltage VDD is supplied to the input terminal P, and the digital GND is supplied to the input terminal Q.
Then, the capacitor 461 is charged with the digital voltage VDD.

Next, the switching elements 462 and 463 are respectively switched so that the switching element 462 connects one end side of the capacitor 461 to the output terminal R and the switching element 463 connects the other end side of the capacitor 461 to the input terminal P.
Then, the capacitor 464 is charged with a digital voltage 2VDD that is the sum of the digital voltage VDD charged in the capacitor 461 and the digital input voltage VDD supplied from the input terminal P.

  As described above, the charge pump circuit 46 boosts the digital input voltage VDD input from the input terminal P to the digital voltage 2VDD that is approximately doubled, and outputs the boosted voltage from the output terminal R.

The above element substrate 60 is manufactured by the following procedure.
First, a plurality of pixel circuits 50 are formed in a region corresponding to the display region A in the element substrate 60, and the pixel inspection circuit 41 having the same structure as the pixel circuit 50 is formed in the TEG 40 through the same process as the pixel circuit 50. Form. Further, in the above-described process, the TEG signal line 91, the TEG external terminal 92, the general-purpose signal line 96, and the general-purpose external terminal 97 are formed as described above, and the scanning line driving circuit 11 and the data are provided in the TEG 40. A charge pump circuit 46 which is a part of the line driving circuit 21 is also formed.

Next, the TEG 40 is inspected using the TEG external terminal 92.
Specifically, the operation of the pixel inspection circuit 41 formed in the TEG 40 is confirmed. If the pixel inspection circuit 41 does not operate normally, it is assumed that the pixel circuit 50 does not operate normally, and the element substrate 60 on which the TEG 40 is formed is discarded.
On the other hand, when the pixel inspection circuit 41 operates normally, it is estimated that the pixel circuit 50 also operates normally, and the operation of the charge pump circuit 46 formed in the TEG 40 is confirmed. Then, regardless of whether or not the charge pump circuit 46 operates, the process proceeds to the next procedure.

  Next, the remaining scanning line driving circuit 11 and data line driving circuit 21 excluding the above-described charge pump circuit 46 are formed on the element substrate 60. Further, in the above process, an inspection circuit 12 for inspecting the scanning line driving circuit 11 and an inspection circuit 22 for inspecting the data line driving circuit 21 are formed.

  Next, using the general-purpose external terminal 97, the scanning line driving circuit 11 is inspected using the inspection circuit 12, and the data line driving circuit 21 is inspected using the inspection circuit 22. If at least a part of the scanning line driving circuit 11 and the data line driving circuit 21 except the above-described charge pump circuit 46 does not operate normally, the element substrate 60 on which these are formed is discarded.

The element substrate 60 manufactured as described above is used as a component of the electro-optical device 1.
Here, in the electro-optical device 1 in which the charge pump circuit 46 operates normally, as shown in FIG. 2, a TEG external terminal 92 is generally used via an FPC (Flexible Printed Circuit) 95 as an external substrate. Electrically connected to the external terminal 97, the drive voltage generated by the charge pump circuit 46 is supplied to the liquid crystal panel AA.
On the other hand, in the electro-optical device 1 in which the charge pump circuit 46 does not operate normally, the FPC 95 is not electrically connected to the TEG external terminal 92, and the drive voltage generated by the charge pump circuit formed in the FPC 95 is used. The liquid crystal panel AA is supplied via the general-purpose external terminal 97.

The above electro-optical device 1 operates as follows.
That is, by supplying a driving voltage to the liquid crystal panel AA and simultaneously supplying a selection voltage from the scanning line driving circuit 11 to the scanning line 10, all the pixel transistors 51 related to the certain scanning line 10 are turned on. The data line 20 and the pixel electrode 55 are brought into conduction. Then, in synchronization with the timing at which the data lines 20 and the pixel electrodes 55 become conductive, image signals are supplied from the data line driving circuit 21 to the data lines 20 in a line sequential manner. As a result, an image signal is supplied from the data line 20 to the pixels selected by the scanning line driving circuit 11 and the data line driving circuit 21 via the pixel transistor 51, and the image data is written to the pixel electrode 55.

When image data is written to the pixel electrode 55 of the pixel, a driving voltage is applied to the liquid crystal due to a potential difference between the pixel electrode 55 and the common electrode 56. Therefore, by changing the voltage level of the image signal, the orientation and order of the liquid crystal are changed, and gradation display is performed by light modulation of each pixel.
Note that the drive voltage applied to the liquid crystal is held by the storage capacitor 53 for a period that is three orders of magnitude longer than the period during which image data is written.

FIG. 4 is a partial cross-sectional view of the liquid crystal panel AA including cross sections of the pixel transistor 51 and the pixel electrode 55.
In the present embodiment, the pixel transistor 51 is a planar polysilicon TFT, and each pixel includes a plurality of TFTs 51.

First, the element substrate 60 will be described.
As shown in FIG. 4, the element substrate 60 includes a glass substrate 68, and a region where TFTs are formed on the glass substrate 68 is made of p-Si (polycrystalline silicon) and n ⁺ p-Si. A semiconductor layer 61 is formed.
A gate insulating film 62 is formed over the entire surface of the display region A on the semiconductor layer 61 and the glass substrate 68.

A gate electrode 511 is formed on the gate insulating film 62 so as to face the semiconductor layer 61. Further, the scanning line 10 and the common line 30 are formed on the gate insulating film 62.
An interlayer insulating film 63 is covered on the gate electrode 511, the scanning line 10, and the common line 30.

  A contact hole 621 for electrically connecting the semiconductor layer 61 and a source electrode 512 to be described later is electrically connected to the gate insulating film 62 and the interlayer insulating film 63, and a semiconductor layer 61 and a drain electrode 513 to be described later are electrically connected. Contact holes 622 are formed.

A source electrode 512 and a drain electrode 513 are formed on the interlayer insulating film 63.
The drain electrode 513 is extended to a position where a contact hole 641 described later is formed. A data line 20 is formed on the interlayer insulating film 63.

A planarization film 64 as an insulating film is formed on the source electrode 512, the drain electrode 513, the data line 20, and the interlayer insulating film 63.
A contact hole 641 for electrically connecting the drain electrode 513 and a pixel electrode 55 described later is formed in the planarization film 64.

On the planarizing film 64, a reflective film 65 that reflects incident light is formed over the entire area where the pixel electrode 55 is formed except for the area where the contact hole 641 is formed.
On the reflective film 65, the above-described pixel electrode 55 made of a transparent electrode such as ITO (Indium Tin Oxide) or IZO (Indium Zinc Oxide) is formed. The pixel electrode 55 also covers the inside of the contact hole 641, and is thereby electrically connected to the drain electrode 513.
An alignment film (not shown) made of an organic film such as a polyimide film is formed on the pixel electrode 55.

Next, the counter substrate 70 will be described.
The counter substrate 70 has a glass substrate 74, and a light shielding film 71 that forms a black matrix is formed in a position of the glass substrate 74 that faces the boundary of the pixel electrode 55.
On the glass substrate 74 and the light shielding film 71, a colored layer 72 of a color filter is formed.
A common electrode 56 made of a transparent conductive film such as ITO (Indium Tin Oxide) or IZO (Indium Zinc Oxide) is formed on the colored layer 72 of the color filter so as to face the pixel electrode 55. An alignment film (not shown) is formed on the common electrode 56.

  A liquid crystal layer is formed between the element substrate 60 and the counter substrate 70, and this liquid crystal layer is sealed with a sealing material (not shown) formed around the element substrate 60 and the counter substrate 70.

  A phase difference plate and a polarizing plate (not shown) are provided on the surfaces of the element substrate 60 and the counter substrate 70.

FIG. 5 is a partial cross-sectional view of the element substrate 60 including cross sections of the TEG external terminal 92 and the general-purpose external terminal 97.
A gate insulating film 62 is formed on the glass substrate 68 in a region of the element substrate 60 where the counter substrate 70 is not disposed to face the element substrate 60.
An interlayer insulating film 63 is formed on the gate insulating film 62, and the TEG signal line 91 and the general-purpose signal line 96 are formed on the gate insulating film 62 with the same material as the source electrode 512 and the drain electrode 513 described above. It is formed with.
A planarizing film 64 is formed on the TEG signal line 91, the general-purpose signal line 96, and the interlayer insulating film 63, and a contact hole 642 is formed in the planarizing film 64.
In the vicinity and inside of the contact hole 642, a TEG external terminal 92 and a general-purpose external terminal 97 made of a transparent electrode made of the same material as the pixel electrode 55 are formed. Thereby, the TEG external terminal 92 and the general-purpose external terminal 97 are electrically connected to the TEG signal line 91 and the general-purpose signal line 96.

  Therefore, in the element substrate 60, the region where the TEG external terminal 92 and the general-purpose external terminal 97 are formed and the region where the pixel transistor 51 and the pixel electrode 55 are formed are manufactured in the same process. The TEG external terminal 92 and the general-purpose external terminal 97 are provided in substantially the same shape in a region of the element substrate 60 where the counter substrate 70 is not disposed opposite to the element substrate 60, and are exposed to the outside. Therefore, the FPC 95 can be easily mounted on the exposed TEG external terminal 92 and the general-purpose external terminal 97.

Next, display of the electro-optical device 1 will be described.
The electro-optical device 1 performs total reflection display. That is, as indicated by arrows in FIG. 4, ambient light incident from the outside becomes linearly polarized light by the polarizing plate (not shown) of the counter substrate 70, and is transmitted through the glass substrate 74, the colored layer 72 of the color filter, and the common electrode 56. Then, it enters the liquid crystal layer. The light incident on the liquid crystal layer passes through the pixel electrode 55, is reflected by the reflective film 65, passes through the pixel electrode 55 again, and passes through the liquid crystal layer. While passing through the liquid crystal layer, the polarization direction is rotated according to the applied voltage. The light that has passed through the liquid crystal layer again passes through the common electrode 56, the colored layer 72 of the color filter, and the glass substrate 74, and reaches the polarizing plate of the counter substrate 70. The light that has reached the polarizing plate is transmitted through the polarizing plate according to the amount of rotation in the polarization direction by the liquid crystal.

  Since the total reflection type electro-optical device 1 can form the pixel electrode 55 on a circuit such as the pixel transistor 51, the effective area of the pixel electrode 55 is affected by the area of the pixel transistor 51 and its wiring. In addition, since a sufficiently wide space can be secured and a light source such as a backlight is not required, high-luminance display can be realized with low power consumption.

According to this embodiment, there are the following effects.
(1) The TEG 40 including the pixel inspection circuit 41 having the same structure as the pixel circuit 50 and the TEG external terminal 92 electrically connected to the TEG 40 are provided on the element substrate 60. Therefore, the operation of the pixel circuit 50 can be confirmed by inspecting the TEG 40 through the TEG external terminal 92.
Further, a charge pump circuit 46 is further formed in the TEG 40 including the pixel inspection circuit 41. The charge pump circuit 46 is a part of the scanning line driving circuit 11 and the data line driving circuit 21 that drive the pixel circuit 50, and has a low yield. Therefore, when the TEG 40 is inspected and the TEG 40 operates normally, the charge pump circuit 46 that is a part of the scanning line driving circuit 11 and the data line driving circuit 21 is also operating normally. The probability that the line drive circuit 11 and the data line drive circuit 21 operate normally increases.
Therefore, by inspecting the TEG 40, it can be estimated whether or not the scanning line driving circuit 11 and the data line driving circuit 21 operate normally, so that the yield can be improved.

(2) Stress is applied to the vicinity of the region of the element substrate 60 facing the end of the counter substrate 70 when the liquid crystal panel AA is manufactured. In addition, stress due to an external force is easily concentrated on the element substrate 60 and the counter substrate 70 in the region where the seal material is provided.
However, since the TEG 40 is formed in a region of the element substrate 60 where the counter substrate 70 is not disposed oppositely, stress can be avoided from acting on the TEG 40, and damage or malfunction can be prevented.

  (3) The TEG external terminal 92 and the general-purpose external terminal 97 are formed in a region of the element substrate 60 where the counter substrate 70 is not disposed to face. For this reason, since the TEG external terminal 92 and the general-purpose external terminal 97 are not concealed by the counter substrate 70, the FPC 95 can be easily mounted on the TEG external terminal 92 and the general-purpose external terminal 97.

  (4) The TEG signal line 91 is used to electrically connect the TEG 40 and the TEG external terminal 92, and a part of the TEG signal line 91 is disposed in a region where the counter substrate 70 of the element substrate 60 is opposed to the TEG signal line 91. Formed. Therefore, the portion of the TEG signal line 91 that is not covered by the counter substrate 70 is reduced, and external static electricity can be prevented from being applied to the TEG signal line 91.

  (5) The TEG specific signal line 91A that is closest to the pixel circuit 50, the scanning line driving circuit 11, and the data line driving circuit 21 among the plurality of TEG signal lines 91 is set to the ground potential. Since the TEG specific signal line 91A, which is the ground potential, is positioned between the remaining TEG signal line 91 and the general-purpose signal line 96, the influence of noise between these signal lines is reduced to reduce the crossing. Talk can be reduced.

<Modification>
It should be noted that the present invention is not limited to the above-described embodiment, and modifications, improvements, etc. within a scope that can achieve the object of the present invention are included in the present invention.
For example, in the present embodiment, the electro-optical device 1 is configured to perform total reflection display, but is not limited thereto, and may be configured to perform transmissive display, or may be a transflective type for both transmission and reflection. It is good also as a structure which displays.

  In the present embodiment, the TEG 40 as the evaluation circuit includes the charge pump circuit 46. However, the present invention is not limited to this. For example, the TEG 40 may include a level shifter or a decoder circuit.

  In this embodiment, liquid crystal is used as the electro-optical material. However, the present invention is not limited to this, and the present invention can also be applied to an electro-optical device using an electro-optical material other than liquid crystal. For example, an electrophoretic display panel using a microcapsule containing a colored liquid and white particles dispersed in the liquid as an electro-optical material, and a twist ball that is separately applied to different colors for areas of different polarity Various electro-optical devices such as a twist ball display panel used as an electro-optical material, a toner display panel using black toner as an electro-optical material, or a plasma display panel using a high-pressure gas such as helium or neon as an electro-optical material. In contrast, the present invention can be applied similarly to the above embodiment.

  In this embodiment, a polysilicon TFT is used as the pixel transistor 51. However, the present invention is not limited to this, and an amorphous silicon TFT may be used.

<Application example>
Next, an electronic apparatus to which the electro-optical device 1 according to the above-described embodiment is applied will be described.
FIG. 6 is a perspective view illustrating a configuration of a mobile phone to which the electro-optical device 1 is applied. The cellular phone 3000 includes a plurality of operation buttons 3001, scroll buttons 3002, and the electro-optical device 1. By operating the scroll button 3002, the screen displayed on the electro-optical device 1 is scrolled.

  The electronic apparatus to which the electro-optical device 1 is applied includes a personal computer, an information portable terminal, a digital still camera, a liquid crystal television, a viewfinder type, a monitor direct view type video tape recorder, a car navigation system as well as those shown in FIG. Examples of the apparatus include a device, a pager, an electronic notebook, a calculator, a word processor, a workstation, a video phone, a POS terminal, and a touch panel. The electro-optical device described above can be applied as a display unit of these various electronic devices.

1 is a block diagram illustrating a configuration of an electro-optical device according to an embodiment of the invention. FIG. FIG. 3 is a plan view of the electro-optical device. It is a block diagram which shows the structure of TEG. It is a fragmentary sectional view of a liquid crystal panel including the section of a pixel transistor and a pixel electrode. It is a fragmentary sectional view of an element substrate including a section of a TEG external terminal and a general-purpose external terminal. It is a perspective view which shows the structure of the mobile telephone to which the electro-optical device mentioned above is applied.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Electro-optical apparatus, 10 ... Scan line, 11 ... Scan line drive circuit (drive circuit), 20 ... Data line, 21 ... Data line drive circuit (drive circuit), 40 ... TEG (evaluation circuit), 41 ... Pixel inspection Circuits 46: Charge pump circuit (drive circuit) 50 ... Pixel circuit 51 ... Pixel transistor 60 ... Element substrate (first substrate) 70 ... Counter substrate (second substrate) 91 ... Signal line for TEG (Evaluation circuit signal line), 92... TEG external terminal, 96. General purpose signal line, 97. General purpose external terminal (external terminal) 3000... Mobile phone (electronic device).

Claims (8)

A first substrate having a scanning line, a data line intersecting with the scanning line, a pixel circuit provided corresponding to the intersection of the scanning line and the data line, and a driving circuit for driving the pixel circuit;
A second substrate disposed opposite to the first substrate;
An electro-optic device comprising: an electro-optic material sandwiched between the first substrate and the second substrate,
The first substrate is provided with an evaluation circuit including a pixel inspection circuit having the same structure as the pixel circuit, and an external terminal electrically connected to the evaluation circuit,
The electro-optical device, wherein the evaluation circuit further includes a part of the drive circuit. The electro-optical device according to claim 1.
The electro-optical device, wherein the evaluation circuit is formed in a region of the first substrate where the second substrate is not opposed to the second substrate. The electro-optical device according to claim 1,
2. The electro-optical device according to claim 1, wherein the external terminal is formed in a region of the first substrate where the second substrate is not opposed. The electro-optical device according to any one of claims 1 to 3,
The first substrate is provided with an evaluation circuit signal line for electrically connecting the evaluation circuit and the external terminal,
At least a part of the evaluation circuit signal line is provided in a region of the first substrate in which the second substrate is opposed to the electro-optical device. The electro-optical device according to claim 4.
The evaluation circuit signal lines are plural,
An electro-optical device characterized in that the evaluation circuit signal line located closest to the pixel circuit and the drive circuit is a ground potential. The electro-optical device according to any one of claims 1 to 5,
2. The electro-optical device according to claim 1, wherein the driver circuit formed in the evaluation circuit is a driver circuit having a low yield. A first substrate having a scanning line, a data line intersecting with the scanning line, a pixel circuit provided corresponding to the intersection of the scanning line and the data line, and a driving circuit for driving the pixel circuit;
A second substrate disposed opposite to the first substrate;
An electro-optic device comprising: an electro-optic material sandwiched between the first substrate and the second substrate,
The electro-optical device, wherein the first substrate includes an evaluation circuit having the same structure as a part of the drive circuit.   An electronic apparatus comprising the electro-optical device according to claim 1.

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