JP2007080715A - Electromagnetic induction fluid heating device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electromagnetic induction fluid heating device capable of substantially enhancing heat exchange efficiency for fluid to be heated which circulates in a heating tube. <P>SOLUTION: In this electromagnetic induction fluid heating device having a heating tube 2 of a conductive material in which fluid to be heated circulates, a heating coil 4 disposed so as to surround the heating tube, and a high frequency power supply part 5 for supplying high frequency power to this heating coil, electromagnetic induction power is generated in the heating tube by lines of magnetic flux which is generated if high frequency power is supplied to the heating coil, and the heating tube is heated by this electromagnetic induction power. The heating tube is composed of a first heating bent tube 10A and a second heating bent tube 10B, the almost center part of the first heating bent tube is spirally twisted to form a first spiral part 11A, and the almost center part of the second heating bent tube is spirally twisted to form a second spiral part 11B. The first heating bent tube and the second heating bent tube are mounted to the heating coil so that the lines of magnetic flux generated in the heating coil interlink with the first heating bent tube and the second heating bent tube. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an electromagnetic induction fluid heating apparatus used in, for example, a semiconductor manufacturing apparatus that electromagnetically heats a heated fluid such as a liquid such as water or alcohol, or a gas such as nitrogen gas or argon gas.

  Conventionally, the present applicant has supplied a high-frequency power to a heating tube of a conductive material through which a fluid to be heated circulates, a heating coil that is spirally wound so as to surround the heating tube, and the heating coil. A high-frequency power supply unit that electrically connects both ends of the heat generating tube, and electromagnetic induction power is supplied to the heat generating tube by magnetic flux lines generated by supplying high-frequency power to the heating coil. An electromagnetic induction fluid heating device that generates and heats the heat generating tube with this electromagnetic induction power has been proposed (see, for example, Patent Document 1).

  FIG. 7 is an explanatory view simply showing the electrical relationship between the heating coil, the heat generating tube, and the short-circuit portion inside the electromagnetic induction fluid heating apparatus of Patent Document 1, and FIG. It is explanatory drawing which shows directly the electrical relationship of a heat generating tube and a short circuit part from a DC resistance standpoint.

  The electromagnetic induction fluid heating apparatus 100 shown in FIG. 7 includes a high-frequency power supply unit 101, a coil L1A corresponding to a heating coil, a coil L2A corresponding to a heating tube, and a short-circuit unit 102 that electrically connects both ends of the heating tube. And the coil L2A and the short circuit portion 102 form a closed circuit.

  When the high frequency power is supplied from the high frequency power supply unit 101, the coil L1A generates a magnetic flux line 120, and the magnetic flux line 120 generates electromagnetic induction power in the coil L2A.

  The electromagnetic induction fluid heating apparatus 100 shown in FIG. 8 includes a high-frequency power supply unit 101, a resistor R1A corresponding to a heat generating tube, and a short-circuit resistor r2A corresponding to a short-circuit unit 102, and is closed by the resistor R1A and the short-circuit resistor r2A. A circuit is formed, and Joule heat is generated by the resistor R1A and the short-circuit resistor r1A according to the electromagnetic induction power generated in the heating tube.

Therefore, according to the electromagnetic induction fluid heating apparatus 100 of Patent Document 1, when high-frequency power is supplied to the heating coil, magnetic flux is generated in the heating coil, and the heating tube in the magnetic field disposed inside the heating coil. Electromagnetic induction power is generated, current flows through the closed circuit formed by the heat generating tube and the short circuit, Joule heat is generated, and the heated fluid flowing through the heat generating tube is heated and heated by this Joule heat. For example, the heating efficiency for the fluid to be heated can be greatly improved as compared with a method using a short-circuit rod in which heat generation is wasted (see, for example, Patent Document 2).
JP 2003-317915 A (see abstract and FIG. 1) JP 2001-235228 A (see abstract and FIG. 1)

  However, according to the electromagnetic induction fluid heating apparatus 100 of Patent Document 1, a short-circuit portion that electrically connects both ends of one heat generating tube is provided, and electromagnetic induction is applied to the heat generating tube in response to high-frequency power supply to the heating coil. Electric power was generated, and current was passed through the closed circuit formed by the heat generating tube and the short-circuited part so that the connection point of the heat-generating tube to the shorted part generated Joule heat as the main heat generating part. Since parts other than the pipe connection part do not directly contribute to the heat exchange, there is room for improvement in the heat exchange efficiency with respect to the heated fluid flowing through the heat generating pipe.

  Accordingly, the present invention has been made in view of the above points, and an object of the present invention is to provide an electromagnetic induction fluid heating apparatus capable of greatly improving the heat exchange efficiency with respect to the heated fluid flowing through the heat generating pipe. Is to provide.

  In order to achieve the above object, an electromagnetic induction fluid heating apparatus of the present invention includes a heat generating tube made of a conductive material through which a fluid to be heated flows, a heating coil that is spirally wound and arranged to surround the heat generating tube, A high-frequency power supply unit that supplies high-frequency power to the heating coil, and generates electromagnetic induction power in the heating tube by magnetic flux lines generated by supplying high-frequency power to the heating coil. An electromagnetic induction fluid heating apparatus for heating the heat generating tube with induced power, wherein the heat generating tube is composed of at least two heat generating bent tubes, and a substantially central portion of one of the heat generating bent tubes is spirally wound to form a first one. Forming one spiral portion and spirally twisting the substantially central portion of the other heat generating bent tube to form a second spiral portion, and supplying high frequency power to the heating coil, The generated magnetic flux lines are the two heat generations. As interlinked with the tube, it said is obtained by arranging at least two heat-generating bent tube with respect to the heating coil.

  In the electromagnetic induction fluid heating device of the present invention, the power direction of the electromagnetic induction power generated in the one heat generating bent tube and the power direction of the electromagnetic induction power generated in the other heat generating bent tube are in phase. The at least two exothermic bent tubes are arranged with respect to the heating coil.

  In the electromagnetic induction fluid heating device of the present invention, the at least two heat generating bent tubes are arranged with respect to the heating coil so that the second spiral portion is interposed between the first spiral portions. is there.

  In the electromagnetic induction fluid heating device of the present invention, the at least two heat generating bent tubes are arranged with respect to the heating coil so that the second spiral portion is inserted into an insertion hole formed by the first spiral portion. It is a thing.

  The electromagnetic induction fluid heating device of the present invention has a short-circuit portion that electrically connects both end portions of the heat generating tube.

  In the electromagnetic induction fluid heating device of the present invention, the short-circuit portion is electrically connected between the first short-circuit portion that electrically connects both end portions of the one exothermic bent tube and the other end portion of the other exothermic bent tube. And a second short-circuit portion connected to the.

  According to the electromagnetic induction fluid heating apparatus of the present invention configured as described above, the heat generating tube is configured by at least two heat generating bent tubes, and a substantially central portion of one heat generating bent tube is spirally wound. When the first spiral portion is formed and the second spiral portion is formed by spirally twisting the substantially central portion of the other exothermic bent tube, and the high frequency power is supplied to the heating coil, the heating coil Since the at least two heat generating bent tubes are arranged with respect to the heating coil so that the magnetic flux lines generated in the above are linked to the two heat generating bent tubes, the magnetic flux lines generated in the heating coil In order to generate electromagnetic induction power in the one exothermic bent tube and the other exothermic bent tube, and further to generate electromagnetic induction power between the exothermic bent tubes with magnetic flux lines generated in these exothermic bent tubes, Of one exothermic bent tube and the other exothermic bent tube in a magnetic field. It contributes to heat exchange at the site of the portion, so that it is possible to significantly improve the heat exchange efficiency with respect to the heated fluid.

  Further, according to the electromagnetic induction fluid heating device of the present invention, the power direction of the electromagnetic induction power generated in the one heat generating bent tube and the power direction of the electromagnetic induction power generated in the other heat generating bent tube are in phase. As described above, since the at least two heat generating bent tubes are arranged with respect to the heating coil, electromagnetic induction power is generated in the one heat generating bent tube and the other heat generating bent tube by the magnetic flux generated by the heating coil. In addition, electromagnetic induction power is generated between the heat generating bent tubes without canceling with the magnetic flux lines generated by these heat generating bent tubes, so that one of the heat generating bent tubes and the other heat generating bent tube in the magnetic field It contributes to heat exchange in most parts, and as a result, the heat exchange efficiency for the fluid to be heated can be greatly improved.

  Further, according to the electromagnetic induction fluid heating device of the present invention, the at least two heat generating bent pipes are arranged with respect to the heating coil so that the second spiral portion is interposed between the first spiral portions. Because of the arrangement, electromagnetic induction power is generated in the one exothermic bent tube and the other exothermic bent tube by the magnetic flux lines generated in the heating coil, and further, the exothermic bent tubes are formed by the magnetic flux lines generated in these exothermic bent tubes. Because it generates electromagnetic induction power, it contributes to heat exchange in the most part of one exothermic bent tube and the other exothermic bent tube in the magnetic field. As a result, the heat exchange efficiency for the heated fluid is greatly increased. Can be improved.

  Further, according to the electromagnetic induction fluid heating device of the present invention, the at least two heat generations with respect to the heating coil such that the second spiral portion is inserted through the insertion hole formed by the first spiral portion. Since the bent tube is arranged, electromagnetic induction power is generated in the one exothermic bent tube and the other exothermic bent tube by the magnetic flux lines generated by the heating coil, and further, heat is generated by the magnetic flux lines generated by these exothermic bent tubes. Since electromagnetic induction power is generated between the curved pipes, it contributes to heat exchange in most parts of the one exothermic bent pipe and the other exothermic bent pipe in the magnetic field, and as a result, heat exchange for the heated fluid Efficiency can be greatly improved.

  In addition, according to the electromagnetic induction fluid heating device of the present invention, since the short-circuit portion that electrically connects both ends of the heat generating tube is provided, the one heat generation curve is generated by the magnetic flux lines generated in the heating coil. Electromagnetic induction power is generated in the tube and the other heat generating bent tube, and further, electromagnetic induction power is generated between the heat generating bent tubes by the magnetic flux lines generated in these heat generating bent tubes. This contributes to heat exchange in most of the heat generating bent tube and the other heat generating bent tube, and as a result, the heat exchange efficiency for the fluid to be heated can be greatly improved.

  According to the electromagnetic induction fluid heating device of the present invention, the short-circuit portion includes a first short-circuit portion that electrically connects both end portions of the one exothermic bent tube, and both end portions of the other exothermic bent tube. Since the second short-circuit portion that electrically connects each other is configured, electromagnetic induction power is generated in the one exothermic bent tube and the other exothermic bent tube by the magnetic flux generated in the heating coil, Furthermore, since electromagnetic induction power is generated between the heat generating bent tubes by the magnetic flux lines generated by these heat generating bent tubes, one of the heat generating bent tubes and the other of the heat generating bent tubes in the magnetic field are passed through the first short circuit portion and the second short circuit portion. It contributes to heat exchange in the most part of the heat generating bent tube, and as a result, the heat exchange efficiency for the fluid to be heated can be greatly improved.

  Hereinafter, an electromagnetic induction fluid heating apparatus showing an embodiment of the present invention will be described with reference to the drawings.

(Embodiment 1)
FIG. 1 is an explanatory view simply showing the internal structure of the electromagnetic induction fluid heating apparatus according to the first embodiment, and FIG. 2 is an explanatory view showing a part of the internal structure of the electromagnetic induction fluid heating apparatus in cross section.

  The electromagnetic induction fluid heating apparatus 1 shown in FIGS. 1 and 2 is provided on a heat generating tube 2 made of a conductive material in which a fluid to be heated flows from one end 2A side to the other end 2B side, and outside the heat generating tube 2. A cylindrical coil bobbin 3 surrounding the heat generating tube 2, a heating coil 4 spirally wound around the coil bobbin 3, and a high-frequency power supply unit 5 for supplying high-frequency power to the heating coil 4; Electromagnetic induction power is generated in the heat generating tube 2 by magnetic flux lines generated by supplying high frequency power to the heating coil 4, and the heat generating tube 2 is heated by this electromagnetic induction power.

  The high frequency power supply unit 5 includes a high frequency power supply 5A, a power supply controller 5B that controls high frequency power output from the high frequency power supply 5A, a current temperature of a fluid to be heated obtained by a temperature sensor (not shown), a current temperature of the heating pipe 2, and the like. And a controller 5C for controlling the power supply controller 5B so that the current temperature of the fluid to be heated reaches the target temperature.

  The coil bobbin 3 is formed in a cylindrical shape with an electrically insulating material such as glass or ceramic.

  The heat generating tube 2 is composed of two first heat generating bent tubes 10A and a second heat generating bent tube 10B, and a first spiral portion 11A is formed by spirally twisting a substantially central portion of the first heat generating bent tube 10A. At the same time, a substantially central portion of the second heat generating bent tube 10B is spirally twisted to form a second helical portion 11B, and a second heat generating bent portion is formed between the first helical portions 11A of the first heat generating bent tube 10A. When high frequency power is supplied to the heating coil 4 through the second spiral portion 11B of the tube 10B, the magnetic flux lines generated in the heating coil 4 are chained to the first heat generating bent tube 10A and the second heat generating bent tube 10B, respectively. These first heat generating bent tube 10A and second heat generating bent tube 10B are arranged in a coil bobbin 3 around which the heating coil 4 is wound so as to intersect. The first exothermic bent tube 10A and the second exothermic bent tube 10B have a power direction of electromagnetic induction power generated in the first exothermic bent tube 10A and a power direction of electromagnetic induction power generated in the second exothermic bent tube 10B. Are arranged so as to be in phase.

  In addition, as the conductive material forming the first exothermic bent tube 10A and the second exothermic bent tube 10B, for example, ferritic stainless steel suitable for electromagnetic induction heating of a corrosion resistant material, or suitable for electromagnetic induction heating. It is desirable to use an austenitic stainless steel such as SUS316L or SUS304, or one that has been subjected to electropolishing or oxidation passivation film treatment.

  Moreover, the heat generating tube 2 has a short-circuit portion 6 that electrically connects both end portions 2A and 2B, and the short-circuit portion 6 electrically connects the one end portion 2A and the other end portion 2B of the first heat generating bent tube 10A. The first short-circuit portion 6A that is electrically connected, and the second short-circuit portion 6B that electrically connects the one end portion 2A and the other end portion 2B of the second heat-generating bent tube 10B, A closed circuit is formed between the first short-circuit portion 6A, the second heat generating bent tube 10B, and the second short-circuit portion 2B.

  FIG. 3 simply illustrates the electrical relationship among the heating coil 4, the first heat generating bent tube 10A, the second heat generating bent tube 10B, the first short circuit portion 6A, and the second short circuit portion 6B in the electromagnetic induction fluid heating apparatus 1. 4 and FIG. 4 briefly show the electrical relationship among the first exothermic bent tube 10A, the second exothermic bent tube 10B, the first short circuit portion 6A, and the second short circuit portion 6B in the electromagnetic induction fluid heating apparatus 1 from the viewpoint of DC resistance. It is explanatory drawing shown.

  The electromagnetic induction fluid heating device 1 shown in FIG. 3 corresponds to the high-frequency power source 5, the coil L1 corresponding to the heating coil 4, the coil L2 corresponding to the first heat generating bent tube 10A, and the second heat generating bent tube 10B. The coil L3 has a first short-circuit portion 6A that electrically connects both ends of the coil L2, and a second short-circuit portion 6B that electrically connects both ends of the coil L3. Closed circuits are formed between the short-circuit portions 6A and between the coil L3 and the second short-circuit portion 6B.

  When the high frequency power is supplied from the high frequency power supply unit 5, the coil L1 generates a magnetic flux line 20A interlinking with the coil L2 and a magnetic flux line 20B interlinking with the coil L3, and the coil L2 and the magnetic flux line 20B Electromagnetic induction power is generated in the coil L3, and further electromagnetic induction power is generated between the coils L2 and L3 with the magnetic flux lines 20C generated in the coils L2 and L3.

  The electromagnetic induction fluid heating device 1 shown in FIG. 4 includes a high frequency power supply unit 5, a resistor R1 corresponding to the first heat generating bent tube 10A, and a first closed circuit 50A configured by a short circuit resistor r1 corresponding to the first short circuit unit 6A. , A high-frequency power supply unit 5, a resistor R2 corresponding to the second heat generating bent tube 10B, and a second closed circuit 50B formed of a short circuit resistor r2 corresponding to the second short-circuiting unit 6B, the first heat generating bent tube 10A, According to the electromagnetic induction power generated in the second heat generating bent tube 10B, Joule heat is generated by the resistor R1 and the short circuit resistor r1 in the first closed circuit 50A, the resistor R2 and the short circuit resistor r2 in the second closed circuit 50B. Become.

  Accordingly, when Joule heat is generated by the resistor R1, the resistor R2, the short-circuit resistor r1, and the short-circuit resistor r2, the covered heat pipes 10A and 2B corresponding to the resistor R1 and the resistor R2 are circulated. The heating fluid will heat up.

  The electromagnetic induction fluid heating device according to the claims is the electromagnetic induction fluid heating device 1, the heating tube is the heating tube 2, the heating coil is the heating coil 4, the high-frequency power source is the high-frequency power source 5, and one heating bent tube is the first. The exothermic bent tube 10A, the other exothermic bent tube is the second exothermic bent tube 10B, the first spiral portion is the first spiral portion 11A, the second spiral portion is the second spiral portion 11B, and the short-circuit portion is the short-circuit portion 6. These correspond to the first short-circuit portion 6A and the second short-circuit portion 6B.

  Next, operation | movement of the electromagnetic induction fluid heating apparatus 1 which shows 1st Embodiment is demonstrated.

  First, when the heating coil 4 supplies high-frequency power from the high-frequency power source 5A, magnetic flux lines are generated, and an electromagnetic wave of eddy current is placed on the first heating bent tube 10A disposed inside the heating coil 4 and in the magnetic field 20A. Inductive power is generated, Joule heat is generated by this electromagnetic induction power, and the first heat generating bent tube 10A generates heat.

  Similarly, since the second heat generating bent tube 10B is disposed inside the heating coil 4 and is in the magnetic field 20B, electromagnetic induction power of eddy current is generated, and Joule heat is generated by this electromagnetic induction power. The second heat generating bent tube 10B generates heat.

  Further, the first heat generating bent tube 10A and the second heat generating bent tube 10B generate magnetic flux in response to the generation of electromagnetic induction power, and the first heat generating bent tube 10A and the second heat generating bent tube 10B are within the magnetic field 20C of the first heat generating bent tube 10A and the second heat generating bent tube 10B. In the first heat generating bent tube 10A and the second heat generating bent tube 10B, further electromagnetic induction power is generated, and further, between the first short circuit portion 6A and the first heat generating bent tube 10A, the second short circuit portion 2B and the second heat generating bent tube. When a current flows through a closed circuit formed between 10B, the first heat generating bent tube 10A and the second heat generating bent tube 10B also generate heat.

  The heated fluid circulates in the first heat generating bent tube 10A and the second heat generating bent tube 10B that generate heat in this way, so that heat is generated from the inner wall surfaces of the first heat generating bent tube 10A and the second heat generating bent tube 10B. The fluid to be heated is heated by the transmission.

  Therefore, according to the first embodiment, the heat generating tube 2 is constituted by the first heat generating bent tube 10A and the second heat generating bent tube 10B, and the substantially central portion of the first heat generating bent tube 10A is spirally twisted. The first spiral portion 11A is formed, and the second spiral portion 11B is formed by spirally twisting the substantially central portion of the second exothermic curved tube 10B to form the first spiral portion of the first exothermic bent tube 10A. When the second spiral portion 11B of the second heat generating bent tube 10B is interposed between 11A and high frequency power is supplied to the heating coil 4, the magnetic flux lines generated in the heating coil 4 are changed to the first heat generating bent tube 10A and the first heat generating bent tube 10A. Since the first exothermic bent tube 10A and the second exothermic bent tube 10B are arranged in the coil bobbin 3 around which the heating coil 4 is wound so as to interlink with the two exothermic bent tubes 10B, the heating coil 4 Electromagnetic induction to the first heat generating bent tube 10A and the second heat generating bent tube 10B by the generated magnetic flux lines Electric power is generated, and further, electromagnetic induction power is generated between the first heat generating bent tube 10A and the second heat generating bent tube 10B with the magnetic flux lines generated in the first heat generating bent tube 10A and the second heat generating bent tube 10B. Therefore, it contributes to heat exchange in most of the first heat generating bent tube 10A and the second heat generating bent tube 10B in the magnetic field, and as a result, the heat exchange efficiency for the fluid to be heated can be significantly improved.

  Further, according to the first embodiment, the power direction of electromagnetic induction power generated in the first heat generating bent tube 10A and the power direction of electromagnetic induction power generated in the second heat generating bent tube 10B are in phase. Since the first heat generating bent tube 10A and the second heat generating bent tube 10B are arranged with respect to the heating coil 4, the magnetic flux lines generated by electromagnetic induction power cancel each other in the first heat generating bent tube 10A and the second heat generating bent tube 10B. Therefore, electromagnetic induction power is generated between the first heat generating bent tube 10A and the second heat generating bent tube 10B, so that most of the first heat generating bent tube 10A and the second heat generating bent tube 10B in the magnetic field. This contributes to heat exchange, and as a result, the heat exchange efficiency for the fluid to be heated can be greatly improved.

  In addition, according to the first embodiment, the short-circuit portion 6 includes the first short-circuit portion 6A that electrically connects the one end portion 2A and the other end portion 2B of the first exothermic bent tube 10A, and the second exothermic curve. The first end 2A and the second end 2B of the tube 10B are electrically connected to each other, and the second short circuit 6B is electrically connected to each other. The first exothermic bent tube 10A and the first short circuit 6A, the second exothermic bent tube 10B and the second Since the closed circuit is formed between the two short-circuit portions 6B, the first heat generating bent tube 10A and the second heat generating bent tube 10B also generate heat, so that the heat exchange efficiency can be greatly improved. .

(Embodiment 2)
Next, an electromagnetic induction fluid heating apparatus showing a second embodiment will be described. FIG. 5 is an explanatory view simply showing the internal structure of the electromagnetic induction fluid heating apparatus according to the second embodiment, and FIG. 6 is an explanatory view showing a part of the internal structure of the electromagnetic induction fluid heating apparatus in cross section. In addition, about the structure same as the electromagnetic induction fluid heating apparatus 1 which shows 1st Embodiment, the same code | symbol is attached | subjected and description about the overlapping structure and operation | movement is abbreviate | omitted.

  The electromagnetic induction fluid heating apparatus 1A showing the second embodiment shown in FIGS. 5 and 6 is different from the electromagnetic induction fluid heating apparatus 1 showing the first embodiment in that the configuration of the heating tube 2 is the first. In the coil bobbin 3 around which the heating coil 4 is wound, the second spiral portion 11B of the second exothermic bent tube 10B is inserted into the insertion hole 12 formed by the first spiral portion 10A of the first exothermic bent tube 10A. The first heat generating bent tube 10A and the second heat generating bent tube 10B are arranged.

  The electromagnetic induction fluid heating device according to the claims corresponds to the electromagnetic induction fluid heating device 1A, and the insertion hole corresponds to the insertion hole 12.

  Next, the operation of the electromagnetic induction fluid heating apparatus 1A showing the second embodiment will be described.

  When the heating coil 4 supplies high-frequency power from the high-frequency power supply unit 5, magnetic flux lines are generated, and eddy current electromagnetic waves are respectively generated in the first heat generating bent tube 10 </ b> A and the second heat generating bent tube 10 </ b> B in the magnetic field inside the heating coil 4. By generating inductive power and generating Joule heat by this electromagnetic induction power, each of the first heat generating bent tube 10A and the second heat generating bent tube 10B generates heat.

  Further, the first heat generating bent tube 10A and the second heat generating bent tube 10B generate magnetic flux in response to the generation of electromagnetic induction power, and the first heat generating bent tube 10A and the second heat generating bent tube 10B are in the magnetic field of the first heat generating bent tube 10B. In the heat generating bent tube 10A and the second heat generating bent tube 10B, further electromagnetic induction power is generated, and between the first heat generating bent tube 10A and the first short-circuit portion 6A, between the second heat generating bent tube 10B and the second short-circuit portion 6B. The first heat generating bent tube 10A and the second heat generating bent tube 10B also generate heat in the closed circuit formed respectively.

  The heated fluid circulates in the first heat generating bent tube 10A and the second heat generating bent tube 10B that generate heat in this way, so that heat is generated from the inner wall surfaces of the first heat generating bent tube 10A and the second heat generating bent tube 10B. The fluid to be heated is heated by the transmission.

  Therefore, according to the second embodiment, the heat generating tube 2 is composed of the first heat generating bent tube 10A and the second heat generating bent tube 10B, and the substantially central portion of the first heat generating bent tube 10A is spirally twisted. The first spiral portion 11A is formed, and the second spiral portion 11B is formed by spirally twisting the substantially central portion of the second exothermic curved tube 10B to form the first spiral portion of the first exothermic bent tube 10A. When the high frequency power is supplied to the heating coil 4 by inserting the second spiral portion 11B of the second heat generating bent tube 10B through the insertion hole 12 configured by 11A, the magnetic flux lines generated in the heating coil 4 are changed to the first heat generating curve. Since the first exothermic bent tube 10A and the second exothermic bent tube 10B are arranged in the coil bobbin 3 around which the heating coil 4 is wound so as to interlink with the tube 10A and the second exothermic bent tube 10B, respectively. The first heat generating bent tube 10A and the second heat generating bent by the magnetic flux generated in the heating coil 4. Electromagnetic induction power is generated in 10B, and further, electromagnetic induction power is generated between the first heat generating bent tube 10A and the second heat generating bent tube 10B by the magnetic flux lines generated in the first heat generating bent tube 10A and the second heat generating bent tube 10B. Therefore, it contributes to heat exchange in most of the first exothermic bent tube 10A and the second exothermic bent tube 10B in the magnetic field, and as a result, greatly improves the heat exchange efficiency for the fluid to be heated. Can do.

  Further, according to the second embodiment, the power direction of the electromagnetic induction power generated in the first heat generating bent tube 10A and the power direction of the electromagnetic induction power generated in the second heat generating bent tube 10B are in phase. Since the first heat generating bent tube 10A and the second heat generating bent tube 10B are arranged with respect to the heating coil 4, the magnetic flux lines generated by electromagnetic induction power cancel each other in the first heat generating bent tube 10A and the second heat generating bent tube 10B. Therefore, electromagnetic induction power is generated between the first heat generating bent tube 10A and the second heat generating bent tube 10B, so that most of the first heat generating bent tube 10A and the second heat generating bent tube 10B in the magnetic field. This contributes to heat exchange, and as a result, the heat exchange efficiency for the fluid to be heated can be greatly improved.

  In addition, according to the second embodiment, the short-circuit portion 6 includes the first short-circuit portion 6A that electrically connects the one end portion 2A and the other end portion 2B of the first heat-generating bent tube 10A, and the second heat-generation curve. The first end 2A and the second end 2B of the tube 10B are electrically connected to each other, and the second short circuit 6B is electrically connected to each other. The first exothermic bent tube 10A and the first short circuit 6A, the second exothermic bent tube 10B and the second Since the closed circuit is formed between the two short-circuit portions 6B, the first heat generating bent tube 10A and the second heat generating bent tube 10B also generate heat, so that the heat exchange efficiency can be greatly improved. .

  In the electromagnetic induction fluid heating apparatus 1 (1A) shown in the present embodiment, the object is to maintain the heated fluid flowing through the first exothermic bent tube 10A and the second exothermic bent tube 10B at the same target temperature. Therefore, it is desirable that the fluids to be heated flowing through the first heat generating bent tube 10A and the second heat generating bent tube 10B are the same fluid.

  In the electromagnetic induction fluid heating device 1 (1A) of the above embodiment, the fluid to be heated is circulated from the one end 2A side to the other end 2B side of the first exothermic bent tube 10A and the second exothermic bent tube 10B. Desirably, for example, the same effect can be obtained by flowing the heated fluid from the one end side 2A to the other end 2B side in the first exothermic bent tube 10A, and from the other end 2B side to the one end 2A side in the second exothermic bent tube 10B. It goes without saying that can be obtained.

  Moreover, in the said embodiment, the heat_generation | fever pipe | tube 2 is comprised so that the 2nd spiral part 11B of the 2nd heat_generation | fever curved pipe | tube 10B may be interposed between the 1st spiral part 11A of the 1st heat_generation | fever bent tube 10A, for example. Alternatively, for example, the insertion hole 12 is formed by the first spiral portion 11A of the first exothermic bent tube 10A, and the exothermic tube is inserted into the insertion hole 12 through the second spiral portion 11B of the second exothermic bent tube 10B. However, if the magnetic flux lines generated in the heating coil 4 are linked with each other in the first exothermic bent tube 10A and the second exothermic bent tube 10B, not only these arrangement configurations but also various arrangements are possible. It goes without saying that the composition is considered.

  Moreover, in the said embodiment, although the heat_generation | fever tube 2 was comprised with two heat_generation | fever bent tubes, 10A of 1st heat generation bent tubes, and the 2nd heat_generation | fever bent tube 10B, it comprised with three or more heat generation bent tubes. Needless to say, the same effect can be obtained.

  According to the electromagnetic induction fluid heating device of the present invention, the heat generating tube is constituted by at least two heat generating bent tubes, and the first spiral portion is formed by spirally twisting the substantially central portion of one heat generating bent tube. At the same time, when the second spiral portion is formed by spirally twisting the substantially central portion of the other heat generating bent tube, and the high frequency power is supplied to the heating coil, the two magnetic flux lines generated in the heating coil Since the at least two heat generating bent tubes are arranged with respect to the heating coil so as to be linked to the heat generating bent tube, the one heat generating bent tube and the one of the heat generating bent tubes are formed by magnetic flux lines generated in the heating coil. Since electromagnetic induction power is generated in the other heat generating bent tube, and further, electromagnetic induction power is generated between the heat generating bent tubes by the magnetic flux lines generated in these heat generating bent tubes, one heat generating bent tube in the magnetic field and Contributing to heat exchange in most parts of the other exothermic bent tube, As a result, the heat exchange efficiency with respect to the fluid to be heated can be greatly improved. For example, the fluid to be heated such as a gas such as nitrogen gas or a liquid such as alcohol is electromagnetically heated. It is.

It is explanatory drawing which shows directly the internal structure of the electromagnetic induction fluid heating apparatus which shows the 1st Embodiment of this invention. It is explanatory drawing which made a part of internal structure of the electromagnetic induction fluid heating apparatus which shows 1st Embodiment a cross section. It is explanatory drawing which shows simply the electrical relationship of the heating coil in the electromagnetic induction fluid heating apparatus which shows 1st Embodiment, a 1st heat_generation | fever bent tube, a 2nd heat_generation | fever bent tube, a 1st short circuit part, and a 2nd short circuit part. is there. It is explanatory drawing which shows directly the relationship between the 1st heat_generation | fever bent tube, the 2nd heat_generation | fever bent tube, a 1st short circuit part, and a 2nd short circuit part inside the electromagnetic induction fluid heating apparatus which shows 1st Embodiment from a DC resistance standpoint. . It is explanatory drawing which shows directly the internal structure of the electromagnetic induction fluid heating apparatus which shows 2nd Embodiment. It is explanatory drawing which made a part of internal structure of the electromagnetic induction fluid heating apparatus which shows 2nd Embodiment the cross section. It is explanatory drawing which shows simply the electrical relationship of the heating coil in a conventional electromagnetic induction fluid heating apparatus, a heat generating pipe, and a short circuit part. It is explanatory drawing which shows directly the electrical relationship of the heat generating tube and short circuit part inside the conventional electromagnetic induction fluid heating apparatus from a DC resistance standpoint.

Explanation of symbols

1 (1A) Electromagnetic induction fluid heating device 2 Heating tube 4 Heating coil 5 High frequency power supply unit 6 Short circuit 6A First short circuit 6B Second short circuit 10A First heat generation curved tube (one heat generation curved tube)
10B 2nd exothermic curved pipe (other exothermic curved pipe)
11A 1st spiral part 11B 2nd spiral part 12 Insertion hole

Claims (6)

A heating tube made of a conductive material through which a fluid to be heated flows, a heating coil that is spirally wound and arranged to surround the heating tube, and a high-frequency power supply unit that supplies high-frequency power to the heating coil are provided. An electromagnetic induction fluid heating device that generates electromagnetic induction power in the heat generation tube by magnetic flux lines generated by supplying high-frequency power to the heating coil, and heats the heat generation tube by the electromagnetic induction power. ,
The exothermic tube is composed of at least two exothermic bent tubes, and a substantially central portion of one exothermic bent tube is spirally twisted to form a first spiral portion, and an approximately central portion of the other exothermic bent tube When a high frequency power is supplied to the heating coil, the magnetic flux lines generated in the heating coil are linked to the at least two heat generating bent tubes. Further, the electromagnetic induction fluid heating apparatus is characterized in that the two heat generating bent tubes are arranged with respect to the heating coil. The power direction of the electromagnetic induction power generated in the one heat generating bent tube and the power direction of the electromagnetic induction power generated in the other heat generating bent tube are in phase with each other with respect to the heating coil. 2. The electromagnetic induction fluid heating device according to claim 1, further comprising a heat generating bent tube. The said at least 2 heat_generation | fever bent tube is arrange | positioned with respect to the said heating coil so that the said 2nd spiral part may be interposed between the said 1st spiral part, The Claim 1 or 2 characterized by the above-mentioned. Electromagnetic induction fluid heating device. The at least two exothermic curved tubes are arranged with respect to the heating coil so that the second spiral portion is inserted through an insertion hole formed by the first spiral portion. 3. The electromagnetic induction fluid heating device according to 2. 5. The electromagnetic induction fluid heating apparatus according to claim 1, further comprising a short-circuit portion that electrically connects both end portions of the heat generating tube. The short-circuit part is
A first short-circuit portion that electrically connects both end portions of the one heat generating bent tube;
6. The electromagnetic induction fluid heating device according to claim 5, comprising a second short-circuit portion that electrically connects both end portions of the other heat generating bent tube.

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