JP2007078621A5 - - Google Patents

Claims (13)

An apparatus for acquiring information about a specimen as a target using an electromagnetic wave including at least a part of the frequency region in a frequency region of 30 GHz to 30 THz,
At least a conductor part, a periodic structure arranged in or near a part of the conductor part, and a specimen holding part for holding the specimen;
Specimen information acquisition means for acquiring information about the specimen by detecting a change caused by the specimen in a condition in which surface plasmon resonance occurs in the vicinity of the specimen holding section when the electromagnetic wave interacts with the conductor section; A sensing apparatus comprising: coupling means for generating an electromagnetic wave and coupling to the conductor part; and detecting means for detecting the electromagnetic wave after interacting with the conductor part. The sensing device according to claim 1 , wherein the conductor portion is a metal or a semiconductor whose carrier concentration is controlled . The specimen information acquisition unit includes a coupling unit configured to irradiate the electromagnetic wave while maintaining a certain incident angle with respect to a main surface on which the conductor unit is formed, and to couple to the conductor unit, and to reflect from the conductor unit. sensing apparatus according to claim 1 or 2, characterized in that it comprises a detection means for detected electromagnetic waves while maintaining a constant angle of reflection. The specimen information acquisition means is reflected from the conductor section, a coupling means for irradiating the electromagnetic wave at a plurality of incident angles to the main surface on which the conductor section is formed and coupling to the conductor section. an electromagnetic wave, to a plurality of reflection angle corresponding to the angle of incidence, sensing apparatus according to claim 1 or 2, characterized in that it comprises means for detecting. Said periodic structure, a sensing device according to any one of claims 1 to 4, characterized in that a diffraction grating or a two-dimensional array of grid. A transmission path for propagating electromagnetic waves including the conductor portion is provided in the vicinity of the specimen holding section, and the coupling means and the detection means are respectively connected to the transmission path from the means for coupling electromagnetic waves and the transmission path. sensing device according to any one of claims 1 to 5, characterized in that a means for detecting the electromagnetic wave. The sample holding portion, the sensing device according to any one of claims 1 to 6, characterized in that it consists flow path capable of controlling the supply of the specimen. A sensing method for acquiring information about a specimen as an object using an electromagnetic wave including at least a part of the frequency region in a frequency region of 30 GHz to 30 THz,
Holding a specimen in the vicinity of a conductor portion in which a periodic structure is disposed in part or in the vicinity thereof, coupling and interacting with an electromagnetic wave in the conductor portion, and detecting the electromagnetic wave after the interaction, A sensing method characterized in that based on this detection, a change in the condition under which surface plasmon resonance occurs in the vicinity of a portion where the specimen is held is detected to obtain information on the specimen. 9. The sensing method according to claim 8 , wherein the frequency of the electromagnetic wave generated by the surface plasmon resonance is set to at least one of the absorption spectra of the specimen. Changes in the conditions under which the surface plasmon resonance occurs due to the specimen are detected as fluctuations in the resonance frequency of electromagnetic waves , or as fluctuations in the resonance conditions of the incident angle of the electromagnetic waves with respect to the main surface on which the conductor portion is formed. The sensing method according to claim 8 or 9 . An apparatus for acquiring information about a specimen using terahertz waves,
Generating means for generating terahertz waves;
A conductor made of a metal or a semiconductor having a controlled carrier concentration; and
Coupling means for coupling the terahertz wave generated by the generating means to the conductor portion;
Detection means for detecting terahertz waves interacted with the conductor portion;
A sample holder for holding the sample;
A specimen information acquisition means for acquiring information about the specimen,
A periodic structure composed of a structure whose characteristic values are periodically changed along at least one direction is disposed in a part of or near the conductor portion;
The specimen information acquisition means acquires information on the specimen by detecting a change caused by the specimen in a condition where surface plasmon resonance occurs in the vicinity of the specimen holding section when the terahertz wave interacts with the conductor section. A sensing device characterized by: Generating means for generating terahertz waves;
A transmission path including a conductor portion for transmitting the terahertz wave generated by the generating means;
Coupling means for irradiating the conductor portion with the terahertz wave generated by the generating means;
Detecting means for detecting a terahertz wave transmitted through the transmission path,
The transmission path is configured to include a diffraction grating disposed in the conductor portion,
The apparatus is configured such that a grating pitch of the diffraction grating and an angle at which the terahertz wave is incident on the transmission line are in a relationship causing surface plasmon resonance. The apparatus according to claim 12, wherein information on the specimen is acquired from the terahertz wave detected by the detection unit.