JP2007073880A5 - - Google Patents

Claims (2)

A processing chamber for processing a substrate, a gas supply line for supplying a processing gas to the processing chamber, an exhaust line for exhausting the processing gas in the processing chamber, and an exhaust line for storing a liquefied material in the processing gas Liquid storage means , a drain line provided on the downstream side of the liquid storage device for discharging the liquefied material from the liquid storage means to the outside, and an exhaust line for controlling the pressure in the processing chamber. A pressure control means, an absolute pressure detection means provided in the exhaust line for detecting the pressure in the processing chamber by an absolute pressure, and a pressure control means provided in the exhaust line for detecting the pressure in the processing chamber by a differential pressure from the outside air; a differential pressure detecting means, when processing a substrate in the processing chamber, a state of not communicating the said liquid storage means external while controlling said pressure control means based on a detection value detected by the absolute pressure detecting means consisting of said liquid storage means to control as, before When discharging the reservoir has been liquefied material in the liquid storage means, said drain line and the outside based on a detection value detected by the differential pressure detection means for controlling said liquid storage means so as to be a state in communication A substrate processing apparatus characterized by a control unit . Based on the detection value detected by the absolute pressure detection means provided in the exhaust line for exhausting the processing gas supplied from the gas supply line to the processing chamber, the liquid storage means provided in the exhaust line is not in communication with the outside Controlling the liquid storage means so that the substrate is processed in the processing chamber while controlling the pressure in the processing chamber with the pressure control means;
The liquid storage means is arranged so that the liquid storage means communicates with the outside based on a detection value detected by the differential pressure detection means provided in the exhaust line with the pressure difference between the processing chamber and the outside air. And a step of discharging the liquefied material in the processing gas stored in the liquid storage means to the outside.