JP2007069329A - Manufacturing method of micro three-dimensional structure operation tool and micro three-dimensional structure operation tool manufactured thereby - Google Patents
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Abstract
【課題】ＦＩＢ−ＣＶＤを用い、簡便に任意形状の３次元的な微小立体構造操作具を作製する微小立体構造物操作具の作製方法及びそれによって作製される微小立体構造操作具を提供する。
【解決手段】微小立体構造操作具の作製方法において、３次元ＣＡＤを利用して設計した微小立体構造操作具を三次元モデルから算出した描画データに基づいて、原料ガスへの集束イオンビームの照射によるＦＩＢ−ＣＶＤ法を用い、集束イオンビームの照射位置、ビームの強度、照射時間、照射間隔を制御することで任意形状のＤＬＣブレードナイフ１２，１３及びニードル１４を有する微小立体構造物操作具としてのナノカッターを作製する。
【選択図】図２The present invention provides a method for manufacturing a micro three-dimensional structure operating tool for easily manufacturing a three-dimensional micro three-dimensional structure operating tool having an arbitrary shape using FIB-CVD, and a micro three-dimensional structure operating tool manufactured thereby.
In a manufacturing method of a micro three-dimensional structure operation tool, a focused ion beam is irradiated on a source gas based on drawing data calculated from a three-dimensional model of a micro three-dimensional structure tool designed using three-dimensional CAD. As a micro three-dimensional structure operation tool having DLC blade knives 12 and 13 and needles 14 of arbitrary shapes by controlling the irradiation position of the focused ion beam, the intensity of the beam, the irradiation time, and the irradiation interval by using the FIB-CVD method. The nanocutter is made.
[Selection] Figure 2
Description
本発明は、微小立体構造操作具の作製方法及びそれによって作製される微小立体構造操作具に係り、特に、ナノカッターとナノフィルタの作製方法及びそれによって作製される微小立体構造操作具に関するものである。 The present invention relates to a method for manufacturing a micro three-dimensional structure operating tool and a micro three-dimensional structure operating tool manufactured by the method, and more particularly to a method for manufacturing a nano cutter and a nano filter and a micro three-dimensional structure operating tool manufactured by the method. is there.
微小なツールは従来、半導体製造プロセスである光または電子ビームを用いたリソグラフィによる構造形成およびドライまたはウェットエッチングを用いて作製されている。ＣＶＤを用いて微小立体構造を作製する方法としては、光（レーザ）、集束電子ビーム（ＦＥＢ）、ＦＩＢ（下記特許文献１〜３，非特許文献１〜２参照）を用いたものがある。また、微小対象物の一例である細胞や細胞内小器官などの操作を行うにあたって細胞膜・細胞壁を除去する手法としては、ミキサーなどを用いた機械的な手法や酵素を用いた化学的な手法等がある。また、微小対象物のフィルタリングや操作を行う手法としてはアスピレータや微小なピンセットを用いた手法や、ＭＥＭＳ技術等で作製した流路中で行う手法がある。
これまでのツールは、半導体製造プロセスを利用して、光または電子ビームを用いたリソグラフィによるパターン形成およびドライまたはウェットエッチングにより、シリコン基板等のウエハ上に形成された２次元構造である。この従来の方法では、マイクロ、ナノ立体構造を有する高機能なツールを作製することは不可能である。 A conventional tool is a two-dimensional structure formed on a wafer such as a silicon substrate by pattern formation by lithography using light or an electron beam and dry or wet etching using a semiconductor manufacturing process. With this conventional method, it is impossible to produce a highly functional tool having a micro and nano three-dimensional structure.
本発明は、上記状況に鑑みて、ＦＩＢ−ＣＶＤを用い、簡便に任意形状の３次元的な微小立体構造操作具を作製する微小立体構造物操作具の作製方法及びそれによって作製される微小立体構造操作具を提供することを目的とする。 In view of the above-described circumstances, the present invention provides a method for manufacturing a micro three-dimensional structure operation tool for easily manufacturing a three-dimensional micro three-dimensional structure control tool having an arbitrary shape using FIB-CVD, and a micro three-dimensional object manufactured thereby. An object is to provide a structural operation tool.
〔１〕微小立体構造操作具の作製方法において、３次元ＣＡＤを利用して設計した微小立体構造操作具を三次元モデルから算出した描画データに基づいて、原料ガスへの集束イオンビームの照射によるＦＩＢ−ＣＶＤ法を用い、集束イオンビームの照射位置、ビームの強度、照射時間、照射間隔を制御することで任意形状の微小立体構造操作具を作製することを特徴とする。 [1] In a method of manufacturing a micro three-dimensional structure operation tool, a micro three-dimensional structure control tool designed by using a three-dimensional CAD is based on drawing data calculated from a three-dimensional model, by irradiating a source gas with a focused ion beam. An FIB-CVD method is used to control a focused ion beam irradiation position, beam intensity, irradiation time, and irradiation interval to produce a micro three-dimensional structure operation tool having an arbitrary shape.
〔２〕上記〔１〕記載の微小立体構造操作具の作製方法において、前記微小立体構造操作具がナノカッターであることを特徴とする。 [2] The method for producing a micro three-dimensional structure operation tool according to [1], wherein the micro three-dimensional structure operation tool is a nano cutter.
〔３〕上記〔１〕記載の微小立体構造操作具の作製方法において、前記ナノカッターはガラスキャピラリーの両側面にＤＬＣブレードナイフと前記ガラスキャピラリーの先端に進入針を形成することを特徴とする。 [3] In the method for manufacturing a micro three-dimensional structure operation tool described in [1], the nanocutter is characterized in that a DLC blade knife is formed on both side surfaces of the glass capillary and an entrance needle is formed on the tip of the glass capillary.
〔４〕上記〔１〕記載の微小立体構造操作具の作製方法において、前記微小立体構造操作具がナノフィルタであることを特徴とする。 [4] The method for producing a micro three-dimensional structure operation tool according to [1], wherein the micro three-dimensional structure operation tool is a nano filter.
〔５〕上記〔１〕記載の微小立体構造操作具の作製方法において、前記ナノフィルタはガラスキャピラリーの先端部に設けられるリングと、このリングに掛けられる網目状のワイヤからなることを特徴とする。 [5] In the method for manufacturing a micro three-dimensional structure operation tool described in [1], the nanofilter includes a ring provided at a tip portion of a glass capillary and a mesh-like wire hung on the ring. .
〔６〕上記〔１〕から〔５〕の何れか一項記載の微小立体構造操作具の作製方法において、前記微小立体構造操作具を前記ガス原料を多種類の材料とすることを特徴とする。 [6] The method for producing a micro three-dimensional structure operation tool according to any one of [1] to [5], wherein the micro three-dimensional structure operation tool includes the gas material as a plurality of types of materials. .
〔７〕上記〔１〕記載の微小立体構造操作具の作製方法において、前記微小立体構造操作具をガラスキャピラリー上の任意の場所において、作製することを特徴とする。 [7] The method for manufacturing a micro three-dimensional structure operation tool according to [1], wherein the micro three-dimensional structure operation tool is manufactured at an arbitrary location on a glass capillary.
〔８〕上記〔１〕記載の微小立体構造操作具の作製方法において、前記微小立体構造操作具をプローブ上の任意の場所において作製することを特徴とする。 [8] The method for manufacturing a micro three-dimensional structure operation tool according to [1], wherein the micro three-dimensional structure operation tool is manufactured at an arbitrary location on a probe.
〔９〕微小立体構造操作具であって、上記〔１〕〜〔８〕のいずれか一項記載の微小立体構造操作具の作製方法によって作製される。 [9] A micro three-dimensional structure operation tool, which is manufactured by the method for manufacturing a micro three-dimensional structure operation tool according to any one of [1] to [8].
以上、詳細に説明したように、本発明によれば、下記のような効果を奏することができる。 As described above in detail, according to the present invention, the following effects can be obtained.
（１）ＦＩＢ−ＣＶＤを用いて医療分野、生命科学分野、工学分野等のさまざまな分野において使用できる微小立体構造操作具、特に、ナノカッター及びナノフィルタ等のナノツールの作製が可能である。 (1) Using a FIB-CVD, it is possible to produce a micro three-dimensional structure operation tool, particularly a nano tool such as a nano cutter and a nano filter, which can be used in various fields such as the medical field, life science field, and engineering field.
（２）ＦＩＢ−ＣＶＤにより作製したナノカッター及びナノフィルタを用いれば、新規的及び高精度な微小対象物の操作・解析法の実現が可能である。 (2) If a nanocutter and nanofilter produced by FIB-CVD are used, it is possible to realize a novel and highly accurate operation / analysis method of a minute object.
本発明の微小立体構造操作具の作製方法は、３次元ＣＡＤを利用して設計した微小立体構造操作具を三次元モデルから算出した描画データに基づいて、原料ガスへの集束イオンビームの照射によるＦＩＢ−ＣＶＤ法を用い、集束イオンビームの照射位置、ビームの強度、照射時間、照射間隔を制御することで任意形状の微小立体構造操作具を作製する。 The method for producing a micro three-dimensional structure operating tool of the present invention is based on the irradiation of a focused ion beam to a source gas based on drawing data calculated from a three-dimensional model of a micro three-dimensional structure operating tool designed using three-dimensional CAD. An FIB-CVD method is used to control a focused ion beam irradiation position, beam intensity, irradiation time, and irradiation interval to produce a micro three-dimensional structure operating tool having an arbitrary shape.
以下、本発明の実施の形態について詳細に説明する。 Hereinafter, embodiments of the present invention will be described in detail.
本発明者らは、フェナントレンガスを用いてＤＬＣ（Ｄｉａｍｏｎｄ Ｌｉｋｅ Ｃａｒｂｏｎ) で構成されたナノワイングラス、コイル、ピラーなどのさまざまな立体ナノ構造をＦＩＢ−ＣＶＤにより自由に作製することをこれまでに示している（下記特許文献１〜３，非特許文献１〜２参照）。このＦＩＢを用いた微小立体構造の形成技術は、さまざまなナノツールを作製する上で非常に有効な技術である。また、ＦＩＢ−ＣＶＤの特徴から、さまざまな材料でツール構造を形成でき、さらにシリコン基板上、ＡＦＭのカンチレバー上、ガラスキャピラリー上等の至る所でのツール構造形成が可能である。 The present inventors have shown that various three-dimensional nanostructures such as nanowine glasses, coils, pillars, etc. composed of DLC (Diamond Like Carbon) using phenanthrene gas can be freely produced by FIB-CVD. (See Patent Documents 1 to 3 and Non-Patent Documents 1 and 2 below). This technique for forming a micro three-dimensional structure using FIB is a very effective technique for producing various nano tools. In addition, because of the characteristics of FIB-CVD, a tool structure can be formed with various materials, and further, a tool structure can be formed on a silicon substrate, an AFM cantilever, a glass capillary, and the like.
以下で述べる一連のナノツールは、ＦＩＢ−ＣＶＤにより作製したツールである。その作製原理模式図を図１として示す。 A series of nano tools described below is a tool manufactured by FIB-CVD. A schematic diagram of the manufacturing principle is shown in FIG.
図１に示すように、シリコン基板１上にＤＬＣピラー２を形成する場合、ＣＶＤのガス原料としてフェナントレン（Ｃ14Ｈ10）３を用いる。フェナントレン３を約８５℃に加熱し、ガス圧１．０×１０-4Ｐａで噴射し、そのガス雰囲気中にビーム照射電流約７ｐＡ程度のＧａ+ 集束イオンビーム４を照射することでＣＶＤを行う。Ｇａ+ 集束イオンビーム４によるＣＶＤは、フェナントレンガス雰囲気中にＧａ+ 集束イオンビーム４を照射することで、基板１に吸着しているフェナントレン分子をビーム励起表面反応により分解し、カーボンを析出させ堆積させることでＤＬＣ２を成長させていくものであり、本発明では、Ｇａ+ 集束イオンビーム４を任意方向にスキャンさせることでナノツールとしてナノカッター及びナノフィルタとなる構造をガラスキャピラリー上に形成した。ビーム制御は、独自に開発した３Ｄ−ＣＡＭを用いて行った。 As shown in FIG. 1, when the DLC pillar 2 is formed on the silicon substrate 1, phenanthrene (C 14 H 10 ) 3 is used as a CVD gas material. CVD is performed by heating the phenanthrene 3 to about 85 ° C., injecting it at a gas pressure of 1.0 × 10 −4 Pa, and irradiating the gas atmosphere with a Ga + focused ion beam 4 having a beam irradiation current of about 7 pA. . CVD using a Ga + focused ion beam 4 irradiates the Ga + focused ion beam 4 in a phenanthrene gas atmosphere, thereby decomposing the phenanthrene molecules adsorbed on the substrate 1 by a beam-excited surface reaction to deposit and deposit carbon. In this invention, a structure that becomes a nanocutter and a nanofilter as a nanotool is formed on the glass capillary by scanning the Ga + focused ion beam 4 in an arbitrary direction. The beam control was performed using a uniquely developed 3D-CAM.
図２は本発明の実施例を示すＦＩＢ−ＣＶＤを用いたナノカッターの作製方法の説明図である。 FIG. 2 is an explanatory view of a method for producing a nanocutter using FIB-CVD showing an embodiment of the present invention.
（１）まず、図２（ａ）に示すように、マイクロピペットプラーによりガラスキャピラリー１１の引き伸ばしを行った。このプロセスによりガラスキャピラリー１１先端の直径を約１μｍにすることができる。 (1) First, as shown in FIG. 2A, the glass capillary 11 was stretched by a micropipette puller. By this process, the diameter of the tip of the glass capillary 11 can be reduced to about 1 μm.
（２）次に、図２（ｂ）に示すように、ＦＩＢ−ＣＶＤを用いて、ガラスキャピラリー１１外壁の側面に細胞壁切断のためのブレードナイフ１２を作製した。ここでは、ＣＶＤのガス原料としてフェナントレン（Ｃ14Ｈ10）を用い、硬度に優れたＤＬＣでブレードナイフ１２を作製した。 (2) Next, as shown in FIG. 2B, a blade knife 12 for cutting the cell wall was formed on the side surface of the outer wall of the glass capillary 11 using FIB-CVD. Here, phenanthrene (C 14 H 10 ) was used as a CVD gas material, and the blade knife 12 was made of DLC having excellent hardness.
（３）次に、図２（ｃ）に示すように、前プロセス過程と同様に反対側のガラスキャピラリー１１外壁側面に同じＤＬＣでブレードナイフ１３を作製した。 (3) Next, as shown in FIG. 2 (c), a blade knife 13 was made of the same DLC on the outer wall side surface of the opposite glass capillary 11 as in the previous process.
（４）そして最後に、図２（ｄ）に示すように、ガラスキャピラリー１１先端に、細胞に穴をあけ細胞内に侵入するための細胞壁進入針（ニードル）１４を作製し、ナノカッター１０が完成した。この細胞壁進入針１４の材質もＤＬＣである。 (4) Finally, as shown in FIG. 2 (d), a cell wall entry needle (needle) 14 for making a hole in the cell and entering the cell is prepared at the tip of the glass capillary 11, and the nanocutter 10 completed. The material of the cell wall entry needle 14 is also DLC.
図３は本発明により作製したナノカッターのＳＥＭ画像を示す図である。 FIG. 3 is a view showing an SEM image of the nanocutter produced according to the present invention.
ＦＩＢ−ＣＶＤを用いた作製に要した時間は約３０分であった。ナノカッター１０は、図３に示すようにＤＬＣブレードナイフ１２，１３及びニードル１４を有している。 The time required for production using FIB-CVD was about 30 minutes. The nanocutter 10 has DLC blade knives 12 and 13 and a needle 14 as shown in FIG.
次に、作製したナノカッターを用いて、細胞壁を選択的に切断する実験を行った。ここでは、オオカナダ藻（Ｅｇｅｒｉａ ｄｅｎｓａ) の細胞を使用した。 Next, an experiment for selectively cutting the cell wall was performed using the produced nanocutter. Here, cells of Egeria densa were used.
図４にナノカッターを使った細胞壁の切断の様子を示す。 FIG. 4 shows the state of cell wall cutting using a nanocutter.
まず、図４（ａ）に示すように、細胞壁２１近傍までナノカッター１０を近づけた。 First, as shown in FIG. 4A, the nanocutter 10 was brought close to the vicinity of the cell wall 21.
次に、図４（ｂ）に示すように、細胞内進入ニードル１４で細胞壁２１を押した。このとき細胞壁２１が伸びるのが観察された。そして、細胞壁２１が伸長限界に達すると、細胞壁２１に穴が開き、更に強くナノカッター１０を押すと、図４（ｃ）に示すように、ＤＬＣブレードナイフ１２，１３により細胞壁２１が切断された。 Next, as shown in FIG. 4 (b), the cell wall 21 was pushed with the intracellular entry needle 14. At this time, the cell wall 21 was observed to grow. When the cell wall 21 reaches the extension limit, a hole is opened in the cell wall 21 and when the nanocutter 10 is pressed more strongly, the cell wall 21 is cut by the DLC blade knives 12 and 13 as shown in FIG. .
その後、図４（ｄ）に示すように、細胞内からナノカッター１０を取り出すと、浸透圧の違いで細胞内から外へ、葉緑体等の細胞内小器官が出てくるのが観察された。 Thereafter, as shown in FIG. 4 (d), when the nanocutter 10 is taken out from the cell, it is observed that intracellular organelles such as chloroplasts emerge from the cell to the outside due to the difference in osmotic pressure. It was.
このようにしてナノカッター１０を使って、細胞壁２１を選択的に切断することに成功した。 In this manner, the cell wall 21 was selectively cut using the nanocutter 10.
次に、ナノツールとしてナノフィルタを作製した。 Next, a nanofilter was fabricated as a nanotool.
作製プロセスは、まず、マイクロピペットプラーによりガラスキャピラリー３１を引き伸ばし、ガラスキャピラリー３１先端の直径を約１μｍにした。そして、加工中のイオンビームによるチャージアップを避けるために、ＤＣスパッタリングを用いてガラスキャピラリー３１側面にＡｕのコーティングを行った。この時の膜厚は約１５ｎｍである。次に、ＦＩＢ−ＣＶＤを用いて、ナノフィルタ構造を作製した。作製したナノフィルタのＳＩＭ画像を図５として示す。ビーム電流７ｐＡで作製時間は約４０分である。ナノフィルタ３２の網目状のワイヤ３４の線幅が３００ｎｍ、そして網目状のワイヤ３４を支持するためのリング３３の径が７μｍといった構造をしている。このＦＩＢ−ＣＶＤにより作製したナノフィルタ３２を用いて、直径２μｍのポリスレンマイクロビーズを水中でフィルタリングする実験を行った。 In the production process, first, the glass capillary 31 was stretched by a micropipette puller so that the diameter of the tip of the glass capillary 31 was about 1 μm. Then, in order to avoid charge-up due to the ion beam during processing, the side surface of the glass capillary 31 was coated with Au using DC sputtering. The film thickness at this time is about 15 nm. Next, a nanofilter structure was fabricated using FIB-CVD. FIG. 5 shows a SIM image of the produced nanofilter. The fabrication time is about 40 minutes with a beam current of 7 pA. The wire width of the mesh wire 34 of the nanofilter 32 is 300 nm, and the diameter of the ring 33 for supporting the mesh wire 34 is 7 μm. Using the nanofilter 32 produced by this FIB-CVD, an experiment was conducted in which polysylene microbeads having a diameter of 2 μm were filtered in water.
図６は本発明のナノフィルタを用いたマイクロビーズのフィルタリング実験の様子を示す図である。 FIG. 6 is a diagram showing a microbead filtering experiment using the nanofilter of the present invention.
（１）まず、図６（ａ）に示すように、水面近くまでナノフィルタ３２を近づけた。そして、図６（ｂ）に示すように、マニピュレータのＺ軸を操作することで、ナノフィルタ３２をマイクロビーズの入った水中に入れた数秒保持した。数秒後、図６（ｃ）に示すように、ナノフィルタ３２によりマイクロビーズがフィルタリングされた。この時、図６（ｄ）に示すように、ナノフィルタ３２には３つのマイクロビーズがフィルタリングされていた。 (1) First, as shown in FIG. 6A, the nanofilter 32 was brought close to the water surface. Then, as shown in FIG. 6B, by manipulating the Z axis of the manipulator, the nanofilter 32 was held for several seconds in water containing microbeads. After a few seconds, the microbeads were filtered by the nanofilter 32 as shown in FIG. At this time, as shown in FIG. 6D, three microbeads were filtered in the nanofilter 32.
このようにして、ナノフィルタを用いてマイクロビーズのフィルタリングに成功した。 Thus, the microbead was successfully filtered using the nanofilter.
図７は本発明の実験後のマイクロビーズをフィルタリングしたナノフィルタのＳＩＭ画像を示す図である。 FIG. 7 is a diagram showing a SIM image of a nanofilter obtained by filtering microbeads after the experiment of the present invention.
ここでは、ナノフィルタ３２には３つのマイクロビーズ３５がフィルタリングされていた。 Here, three microbeads 35 are filtered in the nanofilter 32.
上記したように、本発明によれば、
（１）ＦＩＢ−ＣＶＤにより作製したナノカッター及びナノフィルタは、医療分野、生命科学分野、工学分野等のさまざまな分野において使用でき、これらのナノツールを使った新規的及び高精度な微小対象物の操作・解析法の実現が可能である。
As mentioned above, according to the present invention,
(1) Nanocutters and nanofilters produced by FIB-CVD can be used in various fields such as the medical field, life science field, engineering field, etc., and novel and highly accurate micro objects using these nanotools. It is possible to realize the operation and analysis method.
（２）上記したナノカッター及びナノフィルタは、ＦＩＢ−ＣＶＤを主技術として作製しているため、ツール構造、構造材料等を容易に変更可能であり、さまざまな応用が可能である。 (2) Since the nanocutter and the nanofilter described above are manufactured using FIB-CVD as the main technology, the tool structure, the structural material, and the like can be easily changed, and various applications are possible.
（３）上記したナノカッター及びナノフィルタはＦＩＢ−ＣＶＤを主技術として作製しているため、ツール構造材料の選択性に富み、細胞等と材料との相性に合わせた材料を任意に選択できる。 (3) Since the nanocutter and the nanofilter described above are manufactured using FIB-CVD as the main technique, the tool structure material is highly selective, and a material that matches the compatibility between the cells and the material can be arbitrarily selected.
（４）上記したナノカッター及びナノフィルタはＦＩＢ−ＣＶＤを主技術として作製しているため、ツール構造の材料を部分的に違った材料で形成可能である。 (4) Since the nanocutter and the nanofilter described above are manufactured using FIB-CVD as the main technique, the material of the tool structure can be partially formed from different materials.
（５）上記したナノカッター及びナノフィルタはＦＩＢ−ＣＶＤを主技術としているが、作製プロセスにおいて、他の加工技術との併用も可能であり、さまざまな展開が期待できる。 (5) Although the nanocutter and nanofilter described above have FIB-CVD as the main technology, they can be used in combination with other processing technologies in the production process, and various developments can be expected.
（６）本発明におけるナノカッターを用いれば、細胞の細胞膜、細胞膜等の微小対象物の選択的な切断が可能となり、微小対象物の任意の場所を切断できる。そのためその内部構造にダメージを与えることが少ない。例えば、細胞内の器官等を傷つけずに細胞膜、細胞壁を切断し除去することができる。 (6) By using the nanocutter in the present invention, it becomes possible to selectively cut micro objects such as cell membranes and cell membranes of cells, and it is possible to cut any place of the micro objects. Therefore, the internal structure is less damaged. For example, the cell membrane and cell wall can be cut and removed without damaging the organs in the cell.
（７）本発明におけるナノフィルタを用いることで、微小対象物のフィルタリングが可能であり、さらに、フィルタリングした微小対象物をそのまま損傷を与えずマニピュレートできるため、その後、高精度な測定、分析を行うことができる。 (7) By using the nanofilter according to the present invention, it is possible to filter a minute object, and further, the filtered minute object can be manipulated as it is without being damaged, so that highly accurate measurement and analysis are performed thereafter. be able to.
なお、上記実施例では、ガラスキャピラリーへの微小構造物操作具の作製について述べたが、プローブへ微小構造物操作具を作製するようにしてもよい。 In the above embodiment, the fabrication of the microstructure manipulation tool on the glass capillary has been described. However, the microstructure manipulation tool may be fabricated on the probe.
本発明の微小立体構造操作具の作製方法は、ボトムアップ加工技術であるために局所的な場所に形成が可能である。 Since the manufacturing method of the micro three-dimensional structure operation tool of the present invention is a bottom-up processing technique, it can be formed locally.
また、医療分野、生命科学分野、工学分野におけるＦＩＢ−ＣＶＤを用いて作製したナノカッター及びナノフィルタの利用は、操作、解析対象である微小対象物に損傷を与えない操作、解析が可能であることを特徴としている。例えば、細胞内小器官は細胞膜、細胞壁に覆われており、細胞内小器官の操作・分析を行うためには、まず細胞膜、細胞壁を取り除く必要がある。しかしながら、既存の除去法、つまりミキサーを用いたホモゲナイズや酵素を用いた手法では、分析対象である細胞内小器官を機械的・化学的に傷つけてしまう恐れが非常に高かった。つまり、分析対象に機械的・化学的な損傷を与えるということは、知りたい生体情報を正確に取り出せないということを意味している。そこで、本発明におけるナノカッターを用いることで、細胞内小器官等を傷つけることなく、細胞壁の局所部分を選択的に切断することが可能であり、生体の正確な情報の取り出しが実現できる。本発明におけるナノフィルタはガラスキャピラリーやプローブ先端にも作製可能であるために、特定サイズの微小対象物を選別・捕獲する場合、従来のようなチップ上の流路等に対象物を流す作業が不要であり、ナノフィルタを有するガラスキャピラリー等を市販のマニピュレータ等で操作するだけで、任意の場所での選別・捕獲が可能である。また、細胞、細胞内小器官をマニピュレートする手法として、従来は微小なピンセットや空気で吸引するアスピレータが用いられてきたが、それらの方法では細胞や細胞内小器官等の操作、解析対象に対して圧力をかけることになり、対象を傷つけずに操作することが困難であった。そこで本発明におけるナノフィルタを用いることで、ソフトタッチでの対象捕獲が実現可能となる。 In addition, the use of nanocutters and nanofilters fabricated using FIB-CVD in the medical field, life science field, and engineering field allows operation and analysis without damaging the micro object that is the object of operation and analysis. It is characterized by that. For example, intracellular organelles are covered with cell membranes and cell walls, and in order to manipulate and analyze intracellular organelles, it is first necessary to remove the cell membranes and cell walls. However, the existing removal method, that is, the homogenization using a mixer or the method using an enzyme, has a very high risk of mechanically and chemically damaging the intracellular organelle to be analyzed. In other words, mechanical and chemical damage to the analysis target means that the biological information that is desired cannot be accurately extracted. Therefore, by using the nanocutter in the present invention, it is possible to selectively cut a local portion of the cell wall without damaging an intracellular organelle or the like, and it is possible to extract accurate information on a living body. Since the nanofilter in the present invention can also be produced on a glass capillary or the tip of a probe, when sorting and capturing a minute object of a specific size, there is a conventional work of flowing the object through a flow path on a chip. It is unnecessary and can be selected and captured at any place by simply operating a glass capillary having a nanofilter with a commercially available manipulator. In addition, as a technique for manipulating cells and subcellular organelles, micro tweezers and aspirators that suck with air have been used in the past. It was difficult to operate without damaging the subject. Therefore, by using the nanofilter according to the present invention, it is possible to achieve target capture by soft touch.
なお、本発明は上記実施例に限定されるものでなく、本発明の趣旨に基いて種々の変形が可能であり、これらを本発明の範囲から排除するものではない。 In addition, this invention is not limited to the said Example, A various deformation | transformation is possible based on the meaning of this invention, and these are not excluded from the scope of the present invention.
本発明の微小立体構造操作具の作製方法及びそれによって作製される微小立体構造操作具は、外径がｎｍからμｍオーダーの任意形状の微小立体構造操作具をＦＩＢ−ＣＶＤ法を用いて作製でき、医療分野、生命科学分野、工学分野等のさまざまな分野において利用可能である。 The manufacturing method of the micro three-dimensional structure operation tool of the present invention and the micro three-dimensional structure operation tool manufactured by the method can manufacture a micro three-dimensional structure operation tool having an outer diameter of the order of nm to μm using the FIB-CVD method. It can be used in various fields such as the medical field, life science field, and engineering field.
１ シリコン基板
２ ＤＬＣピラー
３ フェナントレン（Ｃ14Ｈ10）
４ Ｇａ+ 集束イオンビーム
５ ＤＬＣ
１０ ナノカッター
１１，３１ ガラスキャピラリー
１２，１３ ブレードナイフ
１４ 細胞壁進入針
２１ 細胞壁
３２ ナノフィルタ
３３ リング
３４ 網目状のワイヤ
３５ マイクロビーズ
1 Silicon substrate 2 DLC pillar 3 Phenanthrene (C14H10)
4 Ga + focused ion beam 5 DLC
DESCRIPTION OF SYMBOLS 10 Nanocutter 11,31 Glass capillary 12,13 Blade knife 14 Cell wall approach needle 21 Cell wall 32 Nano filter 33 Ring 34 Reticulated wire 35 Microbead
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