JP2007066253A - Device for checking process flow - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a checking device respondable to diversification and complication of a manufacturing process flow. <P>SOLUTION: This process flow checking device collates respective processes (processes A-G) of a process flow having the plurality of processes arranged in a predetermined order with a process specification rule for setting a start condition (process A) for defining a process for starting check, a stop condition (process C) for defining a process for stopping the check after starting the check, a restart condition (process E) for defining a process for restarting the check after stopping the check, a termination condition (process G) for defining a process for terminating the check, and a prohibition condition (process D) for defining a prohibited process between the process set by the start condition and the process set by the termination condition. This device checks whether the process corresponding to the prohibition condition exists between the processes corresponding to the start condition and stop condition and between the processes corresponding to the restart condition and termination condition. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a process flow check apparatus that checks the existence of a specification violation by comparing a created process flow with a predetermined process specification rule.

  In the conventional process flow check apparatus, there are the following three rules as process specification rules for checking whether or not there is a violation of the specifications of the created process flow.

  As the first process specification rule, there is a presence essential rule relating to the forward direction and the reverse direction. As shown in FIG. 6 (a), the presence essential rule relating to the positive direction is a check between the two specific steps when checking the direction from the start step of the manufacturing process to the final step (this direction is “positive direction”). Is a rule for checking whether or not an essential process exists. For example, when the process B is indispensable between the process A and the process C in the process specification rule, the start condition; the process A, the end condition; the process C, the indispensable condition; As shown in FIG. 6 (b), the existence essential rule relating to the reverse direction is the difference between two specific processes when checking the direction from the end process of the manufacturing process to the start process (this direction is “reverse direction”). Is a rule for checking whether or not an essential process exists. For example, when the process B is indispensable between the process C and the process A in the process specification rule, the start condition; the process C, the end condition; the process A, the indispensable condition; The first process specification rule as described above is disclosed in Patent Documents 1 and 3. Here, the “start condition” refers to a condition that defines a process for starting a check. The “essential condition” refers to a condition that defines a process that is essential before or after the process set as the start condition when there is at least a process set as the start condition. “End condition” refers to a condition that defines a process for ending the check.

  As the second process specification rule, there is a presence essential rule that is immediately before and immediately after. As shown in FIG. 7C, the presence essential rule immediately before is a rule for checking whether or not a previous step exists immediately before a certain specific step. For example, when the process A is indispensable immediately before the process B in the process specification rule, the start condition; the process B, the indispensable condition; As shown in FIG. 7D, the presence essential rule immediately after is a rule for checking whether or not the immediately following process exists immediately after a certain specific process. For example, when the process C is indispensable immediately after the process B in the process specification rule, the start condition; the process B, the indispensable condition; The second process specification rule as described above is disclosed in Patent Document 2.

  As a third process specification rule, there is an existence prohibition rule. As shown in FIG. 8, the existence prohibition rule is a rule for checking whether a prohibition process exists between two specific processes. For example, in the process specification rule, when the existence of the process B is prohibited between the process A and the process C, the start condition; the process A, the end condition; the process C, the prohibition condition; The third process specification rule as described above is disclosed in Patent Documents 1 and 3.

JP 2002-151374 A JP 2001-93793 A Japanese Patent Application Laid-Open No. 8-315016

  However, due to the diversification and complexity of the process flow, there are cases where it is excluded from the process flow check target only between specific processes, and it is difficult to detect violations of specifications with the conventional process flow check apparatus and method. A case has come out.

  For example, as shown in FIG. 9, in the case (A), acid peeling is prohibited between TiN sputtering and warehousing, but in case (B), acid peeling is also performed between bevel etching and PR process even between TiN sputtering and warehousing. In some cases. If there is acid peeling in case (A), the specification is violated. If acid peeling is present in case (B), there is no specification violation. However, in the conventional process flow check apparatus and method, When the process specification rule that detects the specification violation of the case (A) is applied using the specification rule (existence prohibition rule of the third process specification rule), the case (B) cannot be handled and the case (B) The check result is a specification violation (by the way, a case where the result is a violation but not a violation is called a “pseudo violation”). If the result of the check is a specification violation, a person will judge and deal with it every time, but if there are many such false violations, not only will the man-hours for confirmation increase, but the worst and true specification violations may occur. The case that I miss will come out.

  The main problem of the present invention is to cope with diversification and complexity of the manufacturing process flow.

  In the first aspect of the present invention, in the process flow check apparatus, a start condition in which a process for starting the check is defined, and a stop condition in which a process for stopping the check after the check is started are defined. A restart condition in which a process for restarting the check after the check is stopped, an end condition in which a process for ending the check is specified, a process set in the start condition and the end condition are set A process specification rule storage unit for storing a process specification rule in which an essential condition or a prohibition condition in which a process that is indispensable or prohibited is defined between specified processes, and a plurality of processes are arranged in a predetermined order A process flow storage unit that stores a process flow, and each process of the process flow in comparison with the process specification rule, the start condition in the process flow, When there are processes corresponding to the stop condition, the restart condition, and the end condition, between the start condition and the process corresponding to the stop condition in the process flow, and to the restart condition and the end condition A check unit that checks whether or not there is a process corresponding to the essential condition or the prohibition condition between the corresponding processes.

  In the process flow check device of the present invention, the check unit determines whether a process corresponding to the essential condition or the prohibition condition exists between processes corresponding to the stop condition and the restart condition in the process flow. It is preferable not to check.

  In the process flow check device of the present invention, the check unit includes a process in the process flow when there is no process corresponding to the restart condition between the process corresponding to the stop condition and the end condition in the process flow. It is preferable to check whether or not a process corresponding to the essential condition or the prohibition condition exists only between the processes corresponding to the start condition and the stop condition.

  In the second aspect of the present invention, in the process flow check method, each process of the process flow in which a plurality of processes are arranged in a predetermined order is checked with a start condition in which a process for starting the check is defined and a check. A stop condition that specifies a process for stopping the check after starting, a restart condition that specifies a process for restarting the check after the check stops, and an end that specifies the process for ending the check A process specification rule in which a condition and an indispensable condition or prohibition condition in which an essential or prohibited process is defined between the process set in the start condition and the process set in the end condition Checking in a computer, and a process corresponding to the start condition, the stop condition, the restart condition, and the end condition in the process flow A step corresponding to the indispensable condition or the prohibition condition between steps corresponding to the start condition and the stop condition in the process flow and between steps corresponding to the restart condition and the end condition. Checking in a computer whether or not exists.

  In the third aspect of the present invention, in the process flow check program, each process in the process flow in which a plurality of processes are arranged in a predetermined order is checked with a start condition in which a process for starting the check is defined, A stop condition that specifies the process for stopping the check after starting the check, a restart condition that specifies the process for restarting the check after the check stops, and a process for ending the check are specified A process specification rule in which an end condition, an indispensable condition or a forbidden condition in which an indispensable or prohibited process is defined between the process set in the start condition and the process set in the end condition; and And there are processes corresponding to the start condition, the stop condition, the restart condition, and the end condition in the process flow. In addition, there is a step corresponding to the essential condition or the prohibition condition between the steps corresponding to the start condition and the stop condition in the process flow and between the steps corresponding to the restart condition and the end condition. And a step of checking whether or not the computer is executed.

  According to the present invention (claims 1-9), by adding the idea of “stop condition, restart condition”, it becomes possible to check the specifications of the process flow that could not be realized by the process specification rules so far. In other words, due to the diversification and complexity of the process flow, it becomes possible to check the flow of process specifications that could not be handled by the conventional process specification rules, and manufacturing defects due to process flow creation errors (contamination accidents in the semiconductor manufacturing process) Can be prevented in advance.

(Embodiment 1)
A process flow check apparatus according to Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram schematically showing the configuration of a process flow check apparatus according to Embodiment 1 of the present invention.

  The process flow check device 10 according to the first embodiment is a computer that checks the existence of a specification violation by comparing a created process flow with a predetermined process specification rule, and includes a display unit 11 and a process flow input unit. 12, a process flow storage unit 13, a process specification rule input unit 14, a process specification rule storage unit 15, and a check unit 16.

  The display unit 11 is a part that displays information such as the presence or absence of specification violation.

  The process flow input unit 12 is a part for inputting a process flow created by an engineer. In the process flow input unit 12, when there is a specification violation, an engineer corrects the process flow. The process flow storage unit 13 is a part that stores the process flow input by the process flow input unit 12.

  The process specification rule input unit 14 is a part for inputting a process specification rule created based on the process specification derived from the process flow. The process specification rule storage unit 15 is a part that stores the process specification rule input by the process specification rule input unit 14.

  The check unit 16 implements a program for executing a check for specification violation based on the process flow and the process specification rule. The check unit 16 reads out the process flow stored in the process flow storage unit 13 and the process specification rule stored in the process specification rule storage unit 15, and the process flow is suitable for the process specification rule. Check if it is. The check unit 16 causes the display unit 11 to display the presence or absence of specification violation as a result of the check. When there is no specification violation, the check unit 16 transmits the corresponding process flow (a checked flow with no specification violation) from the process flow storage unit 13 to the process flow storage device 21.

  The process flow transmitted from the process flow storage unit 13 is stored in the process flow storage device 21 outside the process flow check device 10. The production control system 22 reads the process flow stored in the process flow storage device 21, and transmits a manufacturing instruction to the processing device 23 and the transport facility 24 based on the process flow. The processing device 23 and the transport facility 24 perform a predetermined operation based on a manufacturing instruction from the production control system 22.

  Next, the 4th process specification rule used in the process flow check device concerning Embodiment 1 is explained using a drawing. FIG. 2 is a schematic diagram showing an outline of a fourth process specification rule used in the process flow check apparatus according to the first embodiment of the present invention.

  The fourth process specification rule shown in FIG. 2 is an improvement over the conventional third process specification rule (presence prohibition rule; see FIG. 8). The fourth process specification rule is a rule for checking whether or not there is a prohibited process between two specific processes and excluding between the stop condition and the restart condition. For example, in the process specification rule, when there is a process D corresponding to the prohibited process between the process A and the process G and between the process C and the process E, the start condition; the process A, the stop condition; the process C , Restart condition; process E, end condition; process G, prohibition condition; The prohibition condition; step D exists between the stop condition; step C and the restart condition; step E, and therefore is not subject to the process flow check. Further, when the process B or the process F corresponds to the prohibited process, the process B or the process F is a target of the process flow check.

  Here, the “start condition” refers to a condition that defines a process for starting a check. The “stop condition” is a condition that defines a process for stopping the check after the check is started. The “prohibited condition” refers to a condition that defines a process that is prohibited during the check. “Resume condition” refers to a condition that defines a process for resuming a check after the check is stopped. “End condition” refers to a condition that defines a process for ending the check.

  In the problem of the prior art shown in FIG. 9, the process flow check as expected can be performed by applying the fourth process specification rule. The setting of the process specification rule at that time is as follows. The check result is as shown in FIG. FIG. 3 is a schematic diagram for explaining an example of an operation based on the fourth process specification rule of the process flow check apparatus according to the first embodiment of the present invention.

  As the fourth process specification rule, for example, “the existence of an acid peeling process is prohibited between the TiN sputtering process and the warehousing process. However, the check is excluded only during the bevel etch process and the PR process” is set. In this case, start conditions; TiN sputtering process, stop conditions; bevel etch process, restart conditions: PR process (coating process), end conditions; warehousing process, prohibition process: acid peeling process. In FIG. 3 (A), there is no start condition; TiN sputtering process and end condition; stop condition between warehousing process; bevel etch process and restart condition: PR process (coating process); It becomes a prohibition condition, and a process flow check for confirming the presence or absence of the acid peeling process is performed. On the other hand, in FIG. 3B, the start condition; TiN sputtering process and the end condition; the stop condition between the warehousing process; the bevel etch process and the restart condition: the PR process (coating process) exists. Even if there is a prohibition process: acid peeling step between the process and the restart condition: PR process (coating process), a process flow check for confirming the presence or absence of the acid peeling process is not performed.

  Next, another operation based on the fourth process specification rule of the process flow check apparatus according to the first embodiment will be described with reference to the drawings. FIG. 4 is a schematic diagram for explaining another operation based on the fourth process specification rule of the process flow check apparatus according to the first embodiment of the present invention.

  The process flow check device ends the process flow check when an end condition exists between the stop condition and the restart condition (in the fourth process specification rule) in the created process flow.

  Next, the operation of the process flow check apparatus according to the first embodiment will be described with reference to the drawings. FIG. 5 is a flowchart for explaining the operation of the process flow check apparatus according to the first embodiment of the present invention. Here, it demonstrates, comparing with the flowchart shown by FIG. 4 of patent document 1. FIG.

  First, 0 is set to a variable n indicating a process number (step S10). Next, 1 is added to the variable n (step S11), and it is determined whether or not the process indicated by the variable n is a start process indicated by the process specification rule (step S12). When it is a start process (YES of step S12), it progresses to step S14. If it is not a start process (NO in step S12), it is determined whether or not the process indicated by the variable n is the final process indicated by the process specification rule (step S13). If it is the final process (YES in step S13), the process proceeds to step S40. If it is not the final process (NO in step S13), the process returns to step S11 and is repeated. Steps S10 to S13 are the same as those in FIG.

  If it is a start process (YES in step S12), it is determined whether or not the process indicated by the variable n is the final process indicated by the process specification rule (step S14). If it is the final process (YES in step S14), the process proceeds to step S40. If it is not the final process (NO in step S14), a variable i for counting man-hours is set to 0 (step S15). Next, the variable i is incremented by 1 (step S16). Steps S14 to S17 are the same as those in FIG.

  Next, it is determined whether or not the stop flag is on for the process indicated by the variable n + i (step S21). If the stop flag is on (YES in step S21), the process proceeds to step S24. If the stop flag is not on (NO in step S21), it is determined whether or not the process indicated by the variable n + i corresponds to the stop process indicated by the process specification rule (step S22). When it corresponds to a stop process (YES of step S22), a stop flag is set to on (step S23), it returns to step S16, and a process is repeated. When it does not correspond to a stop process (NO of step S22), it progresses to step S26. When the stop flag is on (YES in step S21), it is determined whether or not the process indicated by the variable n + i corresponds to the restart process indicated by the process specification rule (step S24). If the process does not fall under the restart process (NO in step S24), the process returns to step S16 and is repeated. When it corresponds to the restart process (YES in step S24), the stop flag is turned off (step S25), and the process proceeds to step S26. Steps S21 to S25 are additional matters that are not shown in FIG.

  After the stop flag is turned off or when the process does not correspond to the stop process (NO in step S22), it is determined whether or not the process indicated by the variable n + i corresponds to the prohibited process indicated by the process specification rule (step S26). . If it is a prohibited process (YES in step S26), a flag indicating that the order between the processes is denied (NG) according to the process specification rule is set to on (step S28), and the process proceeds to step S36. If the process is not a prohibited process (NO in step S26), it is determined whether the process indicated by the variable n + i corresponds to an essential process indicated by the process specification rule (step S30). When it corresponds to an essential process (YES in step S30), the essential flag is set to on (step S32), and the process proceeds to step S34. When it does not correspond to the essential process (NO in step S30), the process proceeds to step S34 as it is. Steps S26, 28, 30, and 32 are the same as those in FIG.

  When it does not correspond to the essential process (NO in step S30), or after step S32, it is determined whether or not the process indicated by the variable n + i corresponds to the end process indicated by the process specification rule (step S34). When it corresponds to the end process (YES in step S34), the process returns to step S11 and is repeated. If it does not fall under the end process (NO in step S34), it is determined whether the n + i process is the final process (step S36). If it is the final process (YES in step S36), the process proceeds to step S40. If it is not the final process (NO in step S36), it is determined whether the variable i for counting the man-hour is equal to the inspection man-hour (k) indicated by the process specification rule (step S38). When the variable i is not equal to the inspection man-hour (k) (NO in step S38), the process returns to step S16 and is repeated. When the variable i is equal to the inspection man-hour (k) (YES in step S38), the process returns to step S11 and the process is repeated. Steps S34, 36, and 38 are the same as those in FIG.

  When the inspection proceeds to the final process, it is determined whether or not the prohibition flag is set to on (step S40). If the flag is not on (NO in step S40), it is determined whether the essential flag is set on (step S42). If the essential flag is set to on (YES in step S42), the process specification rule indicates that the order between the processes is recognized (OK) (step S46), and the process ends. When the prohibition flag is set to on (YES in step S40), or when the essential flag is not set to on (NO in step S42), the fact that the order between the processes is denied by the process specification rule The determination of (NG) is shown (step S44), and the process ends. Steps S40, 42, 44, and 46 are the same as those in FIG.

  Although the existence prohibition rule has been described as an example in the flowchart shown in FIG. 5, the stop condition and the restart condition are also applied to other process specification rules (existence mandatory (forward direction) and (reverse direction) rules). It can be set similarly.

  According to the first embodiment, by adding the idea of “stop condition, restart condition”, it becomes possible to check the specifications of the process flow that could not be realized by the process specification rules so far. In other words, due to the diversification and complexity of the process flow, it becomes possible to check the flow of process specifications that could not be handled by the conventional process specification rules, and manufacturing defects due to process flow creation errors (contamination accidents in the semiconductor manufacturing process) Can be prevented in advance.

It is the block diagram which showed typically the structure of the process flow check apparatus which concerns on Embodiment 1 of this invention. It is the schematic diagram which showed the outline of the 4th process specification rule used in the process flow check apparatus which concerns on Embodiment 1 of this invention. It is a schematic diagram for demonstrating an example of the operation | movement based on the 4th process specification rule of the process flow check apparatus which concerns on Embodiment 1 of this invention. It is a schematic diagram for demonstrating other operation | movement based on the 4th process specification rule of the process flow check apparatus which concerns on Embodiment 1 of this invention. It is a flowchart for demonstrating operation | movement of the process flow check apparatus which concerns on Embodiment 1 of this invention. It is the schematic diagram which showed the outline of the 1st process specification rule used in the process flow check apparatus which concerns on a prior art example. It is the schematic diagram which showed the outline of the 2nd process specification rule used in the process flow check apparatus which concerns on a prior art example. It is the schematic diagram which showed the outline of the 3rd process specification rule used in the process flow check apparatus which concerns on a prior art example. It is the schematic diagram which showed the problem of the process flow check apparatus which concerns on a prior art example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Process flow check apparatus 11 Display part 12 Process flow input part 13 Process flow memory | storage part 14 Process specification rule input part 15 Process specification rule memory | storage part 16 Check part 21 Process flow memory | storage device 22 Production control system 23 Processing apparatus 24 Conveying equipment

Claims (9)

A start condition that specifies the process for starting the check, a stop condition that specifies the process for stopping the check after starting the check, and a process for restarting the check after the check stops are specified. The restart condition, the end condition in which the process for ending the check is specified, and the process that is essential or prohibited between the process set in the start condition and the process set in the end condition are specified A process specification rule storage unit for storing a process specification rule in which an indispensable condition or a prohibition condition is set;
A process flow storage unit for storing a process flow in which a plurality of processes are arranged in a predetermined order;
When each process of the process flow is compared with the process specification rule, the process flow has a process corresponding to the start condition, the stop condition, the restart condition, and the end condition in the process flow. Check whether there is a step corresponding to the essential condition or the prohibition condition between the steps corresponding to the start condition and the stop condition and between the steps corresponding to the restart condition and the end condition. Check section to perform,
A process flow check apparatus comprising:   The check unit does not check whether a process corresponding to the essential condition or the prohibition condition exists between the processes corresponding to the stop condition and the restart condition in the process flow. The process flow check apparatus according to 1.   The check unit corresponds to the start condition and the stop condition in the process flow when there is no process corresponding to the restart condition between the process corresponding to the stop condition and the end condition in the process flow. 2. The process flow check apparatus according to claim 1, wherein it is checked whether or not there is a process corresponding to the essential condition or the prohibition condition only during the process. Each step of the process flow in which a plurality of steps are arranged in a predetermined order,
A start condition that specifies the process for starting the check, a stop condition that specifies the process for stopping the check after starting the check, and a process for restarting the check after the check stops are specified. The restart condition, the end condition in which the process for ending the check is specified, and the process that is essential or prohibited between the process set in the start condition and the process set in the end condition are specified A process specification rule with mandatory or prohibited conditions set;
Illuminating the computer with a computer,
When there are processes corresponding to the start condition, the stop condition, the restart condition, and the end condition in the process flow, between the process corresponding to the start condition and the stop condition in the process flow, and Checking in a computer whether a process corresponding to the essential condition or the prohibition condition exists between the processes corresponding to the restart condition and the termination condition;
A process flow check method comprising:   The computer does not check whether or not there is a step corresponding to the essential condition or the prohibition condition between steps corresponding to the stop condition and the restart condition in the process flow. Process flow check method.   Only when the process corresponding to the restart condition does not exist between the process corresponding to the stop condition and the end condition in the process flow, only between the process corresponding to the start condition and the stop condition in the process flow. 5. The process flow check method according to claim 4, wherein a computer checks whether or not there is a process corresponding to the essential condition or the prohibition condition. Each step of the process flow in which a plurality of steps are arranged in a predetermined order,
A start condition that specifies the process for starting the check, a stop condition that specifies the process for stopping the check after starting the check, and a process for restarting the check after the check stops are specified. The restart condition, the end condition in which the process for ending the check is specified, and the process that is essential or prohibited between the process set in the start condition and the process set in the end condition are specified A process specification rule with mandatory or prohibited conditions set;
The step of collating
When there are processes corresponding to the start condition, the stop condition, the restart condition, and the end condition in the process flow, between the process corresponding to the start condition and the stop condition in the process flow, and Checking whether there is a process corresponding to the essential condition or the prohibition condition between the processes corresponding to the restart condition and the end condition;
A process flow check program for causing a computer to execute.   8. The computer is not allowed to check whether a process corresponding to the essential condition or the prohibition condition exists between the processes corresponding to the stop condition and the restart condition in the process flow. The described process flow check program.   Only when the process corresponding to the restart condition does not exist between the process corresponding to the stop condition and the end condition in the process flow, only between the process corresponding to the start condition and the stop condition in the process flow. The process flow check program according to claim 7, wherein the computer checks whether or not there is a process corresponding to the indispensable condition or the prohibition condition.

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