JP4841900B2 - Process flow check apparatus, method and program - Google Patents

Description

  The present invention relates to a process flow check apparatus, method, and program for checking the existence of a specification violation by comparing a created process flow with a predetermined process specification rule.

  In the conventional process flow check apparatus, there are the following three rules as process specification rules for checking whether or not there is a violation of the specifications of the created process flow (process flow check).

  As the first process specification rule, there is a presence essential rule relating to the forward direction and the reverse direction. As shown in FIG. 8 (a), the presence-indispensable rule relating to the positive direction is determined by checking the direction from the start process to the final process (this direction is “positive direction”) between two specific processes. Is a rule for checking whether or not an essential process exists. For example, when the process B is indispensable between the process A and the process C in the process specification rule, the start condition; the process A, the end condition; the process C, the indispensable condition; As shown in FIG. 8 (b), the existence essential rule relating to the reverse direction is the difference between two specific steps when checking the direction from the end step of the manufacturing process to the start step (this direction is “reverse direction”). Is a rule for checking whether or not an essential process exists. For example, when the process B is indispensable between the process C and the process A in the process specification rule, the start condition; the process C, the end condition; the process A, the indispensable condition; The first process specification rule as described above is disclosed in Patent Documents 1 and 3. Here, the “start condition” refers to a condition that defines a process for starting a check. The “essential condition” refers to a condition that defines a process that is essential before or after the process set as the start condition when there is at least a process set as the start condition. “End condition” refers to a condition that defines a process for ending the check.

  As the second process specification rule, there is a presence essential rule that is immediately before and immediately after. As shown in FIG. 9C, the existence essential rule immediately before is a rule for checking whether or not the immediately preceding process exists immediately before a certain specific process. For example, when the process A is indispensable immediately before the process B in the process specification rule, the start condition; the process B, the indispensable condition; As shown in FIG. 9D, the existence essential rule immediately after is a rule for checking whether or not an immediately following process exists immediately after a certain specific process. For example, when the process C is indispensable immediately after the process B in the process specification rule, the start condition; the process B, the indispensable condition; The second process specification rule as described above is disclosed in Patent Document 2.

  As a third process specification rule, there is an existence prohibition rule. The existence prohibition rule is a rule for checking whether or not a prohibition process exists between two specific processes, as shown in FIG. For example, in the process specification rule, when the existence of the process B is prohibited between the process A and the process C, the start condition; the process A, the end condition; the process C, the prohibition condition; The third process specification rule as described above is disclosed in Patent Documents 1 and 3.

JP 2002-151374 A JP 2001-93793 A Japanese Patent Application Laid-Open No. 8-315016

  However, due to the diversification and complexity of the process flow, there are cases where it is desired to exclude the process flow check after a specific process, and it is difficult to detect violations of specifications with the conventional process flow check apparatus and method. Is coming out.

  For example, as shown in FIG. 11, in the case (A), plasma stripping is essential for resist stripping after high-current ion implantation. In the case (B), after silicon oxide film wet etching is performed. In the case (B), there is a case where it is desired to exclude the plasma peeling from the process flow check. In case (A), there is no specification violation when there is no plasma separation, and in case (B) there is no specification violation when there is no plasma separation. In the conventional process flow check apparatus and method, When a specification rule for detecting a specification violation in case (A) is applied using a specification rule (existence mandatory rule in the positive direction of the first process specification rule), case (B) cannot be handled and case ( The check result of B) becomes a violation (by the way, the case where the check result is a specification violation although it is not a true specification violation) is referred to as a “pseudo violation”. As a result of the check, if a specification is violated, a person will judge and deal with it every time. However, if there are many such pseudo violations, not only will the man-hours for confirmation increase, but the worst and true There are cases in which specification violations are missed.

  The main problem of the present invention is to cope with diversification and complexity of process flows.

  In the first aspect of the present invention, in the process flow check apparatus, a start condition in which a process for starting a check is defined and a process that always exists before the process defined in the start condition are defined. A start preparation condition, and at least the start condition and an indispensable condition in which a process that is indispensable before or after the process set in the start condition when each process set in the start preparation condition exists is defined. A process specification rule storage unit that stores the set process specification rule, a process flow storage unit that stores a process flow in which a plurality of processes are arranged in a predetermined order, and each process of the process flow is stored in the process specification rule. Steps corresponding to the start condition and the start preparation condition in the process flow in comparison with the start condition, the start preparation condition, and the essential condition When present, characterized in that it comprises a checking unit which processes corresponding to the prerequisite in the process flow checks if there.

  In the process flow check device according to the present invention, the check unit may include a process corresponding to one or both of the start condition and the start preparation condition of the process specification rule in the process flow. It is preferable not to check whether there is a process corresponding to the essential condition.

  In the process flow check device of the present invention, when the check unit includes a plurality of processes corresponding to the start preparation condition of the process specification rule in the process flow, a process corresponding to the start preparation condition existing later It is preferable to check based on the above.

  In the process flow check device of the present invention, the check unit includes a plurality of processes corresponding to the start preparation condition of the process specification rule in the process flow, and a process corresponding to the start preparation condition. When there is a process corresponding to the start condition, it is preferable to perform a check based on a process corresponding to the start preparation condition before the process corresponding to the start condition.

  In the process flow check device of the present invention, the process specification rule storage unit stores one process specification rule and another process specification rule that are different from each other, and the check unit includes the one process step in the process flow. When there is a process corresponding to the start preparation condition of the specification rule and a process corresponding to the start preparation condition of the other process specification rule, each start of the one process specification rule and the other process specification rule It is preferable to perform a check based on a process corresponding to the preparation condition.

  According to a second aspect of the present invention, in the process flow check method, each process of the process flow in which a plurality of processes are arranged in a predetermined order has a start condition in which a process for starting the check is defined, and the start A process set in the start condition when there is a start preparation condition in which a process that always exists before the process specified in the condition is defined, and at least each process set in the start condition and the start preparation condition A step of comparing a process specification rule in which an indispensable condition in which an indispensable process is defined before and after the process is set in a computer, and a process corresponding to the start condition and the start preparation condition in the process flow When it exists, the computer checks whether there is a process corresponding to the essential condition in the process flow. A step, characterized in that it comprises a.

  In the third aspect of the present invention, in the process flow check program, each process of the process flow in which a plurality of processes are arranged in a predetermined order is set with a start condition in which a process for starting the check is defined, and the start A process set in the start condition when there is a start preparation condition in which a process that always exists before the process specified in the condition is defined, and at least each process set in the start condition and the start preparation condition There are a step of comparing an indispensable condition in which an indispensable process is defined before and after the process specification rule in which is set, and a process corresponding to the start condition and the start preparation condition in the process flow. A step of checking in the process flow whether or not there is a process corresponding to the essential condition in the process flow; And characterized in that.

  The process flow check program is stored in a recording medium (magnetic disk, magnetic tape, optical disk, memory card, semiconductor memory, etc.), read out to the computer via a reading device and an interface, and stored in the main memory. The present invention can be implemented by loading and executing the program.

  According to the present invention (Claim 1-15), by adding the item “preparation start condition”, it is possible to check the specifications of the process flow that could not be realized by the conventional process specification rules. In other words, due to the diversification and complexity of the process flow, it becomes possible to check the process flow even for process specifications that could not be handled by conventional process specification rules, and manufacturing defects due to process flow creation errors (in the semiconductor manufacturing process, Pollution accidents) can be prevented in advance.

(Embodiment 1)
A process flow check apparatus according to Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram schematically showing the configuration of a process flow check apparatus according to Embodiment 1 of the present invention.

  The process flow check device 10 according to the first embodiment is a computer that checks the existence of a specification violation by comparing a created process flow with a predetermined process specification rule, and includes a display unit 11 and a process flow input unit. 12, a process flow storage unit 13, a process specification rule input unit 14, a process specification rule storage unit 15, and a check unit 16.

  The display unit 11 is a part that displays information such as the presence or absence of specification violation.

  The process flow input unit 12 is a part for inputting a process flow created by an engineer. In the process flow input unit 12, when there is a specification violation, an engineer corrects the process flow. The process flow storage unit 13 is a part that stores the process flow input by the process flow input unit 12.

  The process specification rule input unit 14 is a part for inputting a process specification rule created based on the process specification derived from the process flow. The process specification rule storage unit 15 is a part that stores the process specification rule input by the process specification rule input unit 14.

  The check unit 16 implements a program for executing a check for specification violation based on the process flow and the process specification rule. The check unit 16 reads out the process flow stored in the process flow storage unit 13 and the process specification rule stored in the process specification rule storage unit 15, and the process flow is suitable for the process specification rule. Check if it is. The check unit 16 causes the display unit 11 to display the presence or absence of specification violation as a result of the check. When there is no specification violation, the check unit 16 transmits the corresponding process flow (a checked flow with no specification violation) from the process flow storage unit 13 to the process flow storage device 21.

  The process flow transmitted from the process flow storage unit 13 is stored in the process flow storage device 21 outside the process flow check device 10. The production control system 22 reads the process flow stored in the process flow storage device 21, and transmits a manufacturing instruction to the processing device 23 and the transport facility 24 based on the process flow. The processing device 23 and the transport facility 24 perform a predetermined operation based on a manufacturing instruction from the production control system 22.

  Next, the 4th process specification rule used in the process flow check device concerning Embodiment 1 is explained using a drawing. FIG. 2 is a schematic diagram showing an outline of a fourth process specification rule used in the process flow check apparatus according to the first embodiment of the present invention.

  The fourth process specification rule shown in FIG. 2 is an improvement of the conventional first process specification rule (existence essential rule in the positive direction; see FIG. 8A). When the fourth process specification rule is an existence-required rule related to the positive direction, two checks existing after the start preparation condition when checking the direction from the start process to the final process (forward direction) This is a rule for checking whether there is an essential process between processes. For example, when the process C is indispensable between the process B and the process D after the process A on the process specification rule, the start preparation condition; the process A, the start condition; the process B, the end condition; the process D, the essential condition; This is represented as step C.

  Here, the “start condition” refers to a condition that defines a process for starting a check. “Start preparation condition” refers to a condition that prescribes a process that always exists before the start condition. In the created process flow, the start condition appears after the start preparation condition, and the end condition appears after the start condition. This is one of the conditions for starting the process flow check. “Indispensable condition” is a condition that specifies a process that is indispensable between a process set as a start condition and a process set as an end condition when there are processes set as start conditions and start preparation conditions. Say. “End condition” refers to a condition that defines a process for ending the check.

  In the problem of the prior art shown in FIG. 11, the process flow check as expected can be performed by applying the fourth process specification rule. The setting of the process specification rule at that time is as follows. The check result is as shown in FIG. FIG. 3 is a schematic diagram for explaining an example of an operation based on the fourth process specification rule of the process flow check apparatus according to the first embodiment of the present invention.

  As the fourth process specification rule, for example, when “the positive coating process is a start preparation condition and the plasma stripping process is essential between the subsequent high current I / I process and the resist stripping process” is set, the start preparation condition; Positive coating process, start condition; high current I / I process, end condition; resist stripping process, essential condition; plasma stripping process. In FIG. 3A, since the start condition; the high current I / I process and the end condition; the start preparation condition; the positive coating process exists before the resist stripping process, the plasma stripping process becomes an indispensable condition. A process flow check for confirming the presence or absence of the peeling process is performed. On the other hand, in FIG. 3B, the start condition; the high current I / I process and the end condition; the start preparation condition; the positive coating process does not exist before the resist stripping process; In other words, the process flow check for confirming the presence or absence of the plasma peeling process is not performed.

  Next, another operation based on the fourth process specification rule of the process flow check apparatus according to the first embodiment will be described with reference to the drawings. FIGS. 4-6 is a schematic diagram for demonstrating the other operation | movement based on the 4th process specification rule of the process flow check apparatus which concerns on Embodiment 1 of this invention.

  In the created process flow, the process flow check device shows only the start preparation condition (of the fourth process specification rule) (see FIG. 4A) and only the start condition (see FIG. 4B). Then do not start the check. Note that the check is not started when neither the start preparation condition nor the start condition appears in the process flow.

  In addition, the process flow check device, when one start preparation condition (of the fourth process specification rule) appears in the created process flow, and when another start preparation condition appears in the same process specification rule, The start preparation condition is validated, one start preparation condition is canceled, and a check is started based on another start preparation condition. However, this does not apply in the following cases.

  If one start preparation condition appears in the created process flow, and further start conditions appear, then one check is performed even if another start preparation condition (the same as one start preparation condition) appears. There is no cancellation. Referring to FIG. 5, since the second start preparation condition starts checking based on the second start preparation condition by the appearance of the start condition, after that, even if the third start preparation condition appears, The second start preparation condition is not canceled.

  In the created process flow, when a start preparation condition for one process specification rule appears and then a start preparation condition for another process specification rule appears, the process flow check device checks based on each start preparation condition. To start. For example, referring to FIG. 6, even if the start preparation condition of the specification rule for processing appears, and then the start preparation condition of the specification rule for cleaning appears, the start preparation condition of the specification rule for processing is canceled. Instead, the check is started based on each start preparation condition.

  Next, the operation of the process flow check apparatus according to the first embodiment will be described with reference to the drawings. FIG. 7 is a flowchart for explaining the operation of the process flow check apparatus according to the first embodiment of the present invention. Here, it demonstrates, comparing with the flowchart shown by FIG. 4 of patent document 1. FIG.

  First, 0 is set to a variable n indicating a process number (step S10). Step S10 is the same as FIG. 4 of Patent Document 1.

  Next, it is determined whether or not the process indicated by the variable n is a start preparation process indicated by the process specification rule (step S11). If it is not the start preparation process (NO in S11), 1 is added to the variable n (step S12), and the process returns to step S11 to repeat the process. When it is a start preparation process (YES of S11), it progresses to step S13. Steps S11 and S12 are additional items that are not shown in FIG.

  If it is a start preparation process (YES in S11), 1 is added to the variable n (step S13), and it is determined whether or not the process indicated by the variable n is a start process indicated by the process specification rule (step S14). . When it is a start process (YES of step S14), it progresses to step S18. If it is not a start process (NO in step S14), it is determined whether or not the process indicated by the variable n is the final process indicated by the process specification rule (step S16). If it is the final process (YES in step S16), the process proceeds to step S40. If it is not the final process (NO in step S16), the process returns to step S13 and is repeated. Steps S14 and S16 are the same as those in FIG.

  If it is a start process (YES in step S14), it is determined whether the process indicated by the variable n is the final process indicated by the process specification rule (step S18). If it is the final process (YES in step S18), the process proceeds to step S40. If it is not the final process (NO in step S18), a variable i for counting man-hours is set to 0 (step S20). Steps S18 and S20 are the same as those in FIG.

  Next, 1 is added to the variable i (step S22), and it is determined whether or not the process indicated by the variable n + i corresponds to the prohibited process indicated by the process specification rule (step S26). If it is a prohibited process (YES in step S26), a flag indicating that the order between the processes is denied (NG) according to the process specification rule is set to on (step S28), and the process proceeds to step S36. If the process is not a prohibited process (NO in step S26), it is determined whether the process indicated by the variable n + i corresponds to an essential process indicated by the process specification rule (step S30). When it corresponds to an essential process (YES in step S30), the essential flag is set to on (step S32), and the process proceeds to step S34. When it does not correspond to the essential process (NO in step S30), the process proceeds to step S34 as it is. Steps S22, 24, 26, 28, 30, and 32 are the same as those in FIG.

  When it does not correspond to the essential process (NO in step S30), or after step S32, it is determined whether or not the process indicated by the variable n + i corresponds to the end process indicated by the process specification rule (step S34). When it corresponds to the end process (YES in step S34), the process returns to step S13 to repeat the process. If it does not fall under the end process (NO in step S34), it is determined whether the n + i process is the final process (step S36). If it is the final process (YES in step S36), the process proceeds to step S40. If it is not the final process (NO in step S36), it is determined whether the variable i for counting the man-hour is equal to the inspection man-hour (k) indicated by the process specification rule (step S38). When the variable i is not equal to the inspection man-hour (k) (NO in step S38), the process returns to step S22 and the process is repeated. When the variable i is equal to the inspection man-hour (k) (YES in step S38), the process returns to step S13 and the process is repeated. Steps S34, 36, and 38 are the same as those in FIG.

  When the inspection proceeds to the final process, it is determined whether or not the prohibition flag is set to on (step S40). If the flag is not on (NO in step S40), it is determined whether the essential flag is set on (step S42). If the essential flag is set to on (YES in step S42), the process specification rule indicates that the order between the processes is recognized (OK) (step S46), and the process ends. When the prohibition flag is set to on (YES in step S40), or when the essential flag is not set to on (NO in step S42), the fact that the order between the processes is denied by the process specification rule The determination of (NG) is shown (step S44), and the process ends. Steps S40, 42, 44, and 46 are the same as those in FIG.

  Note that the flowchart shown in FIG. 7 shows a case where the direction of the process flow check is an existence mandatory rule relating to the forward direction, but if the direction of the flow check is an existence mandatory rule relating to the reverse direction, The addition of the variable n in S13 and step S24 may be subtracted. The start preparation condition can be set in the same manner in the existence prohibition rule and the existence essential rule (immediately before and immediately after).

  According to the first embodiment, by adding the item “preparation start condition”, it is possible to check the specification of the process flow that could not be realized by the process specification rule so far. In other words, due to the diversification and complexity of the process flow, it becomes possible to check the process flow even for process specifications that could not be handled by conventional process specification rules, and manufacturing defects due to process flow creation errors (in the semiconductor manufacturing process, Pollution accidents) can be prevented in advance.

It is the block diagram which showed typically the structure of the process flow check apparatus which concerns on Embodiment 1 of this invention. It is the schematic diagram which showed the outline of the 4th process specification rule used in the process flow check apparatus which concerns on Embodiment 1 of this invention. It is a schematic diagram for demonstrating an example of the operation | movement based on the 4th process specification rule of the process flow check apparatus which concerns on Embodiment 1 of this invention. It is a schematic diagram for demonstrating the 1st other operation | movement based on the 4th process specification rule of the process flow check apparatus which concerns on Embodiment 1 of this invention. It is a schematic diagram for demonstrating the 2nd other operation | movement based on the 4th process specification rule of the process flow check apparatus which concerns on Embodiment 1 of this invention. It is a schematic diagram for demonstrating the 3rd other operation | movement based on the 4th process specification rule of the process flow check apparatus which concerns on Embodiment 1 of this invention. It is a flowchart for demonstrating operation | movement of the process flow check apparatus which concerns on Embodiment 1 of this invention. It is the schematic diagram which showed the outline of the 1st process specification rule used in the process flow check apparatus which concerns on a prior art example. It is the schematic diagram which showed the outline of the 2nd process specification rule used in the process flow check apparatus which concerns on a prior art example. It is the schematic diagram which showed the outline of the 3rd process specification rule used in the process flow check apparatus which concerns on a prior art example. It is the schematic diagram which showed the problem of the process flow check apparatus which concerns on a prior art example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Process flow check apparatus 11 Display part 12 Process flow input part 13 Process flow memory | storage part 14 Process specification rule input part 15 Process specification rule memory | storage part 16 Check part 21 Process flow memory | storage device 22 Production control system 23 Processing apparatus 24 Conveying equipment

Claims (15)

A start condition in which a process for starting a check is defined, a start preparation condition in which a process that always exists before the process defined in the start condition is defined, and at least the start condition and the start preparation condition are set. A process specification rule storage unit for storing a process specification rule in which an indispensable condition in which an indispensable process is defined before or after the process set in the start condition when each process is performed,
A process flow storage unit for storing a process flow in which a plurality of processes are arranged in a predetermined order;
When each process of the process flow is compared with the process specification rule and a process corresponding to the start condition and the start preparation condition exists in the process flow, the process corresponding to the essential condition in the process flow A check unit that checks whether or not exists,
A process flow check apparatus comprising:   The check unit includes a process corresponding to the essential condition in the process flow when there is no process corresponding to one or both of the start condition and the start preparation condition of the process specification rule in the process flow. 2. The process flow check apparatus according to claim 1, wherein the process flow check device is not checked.   The check unit, when there are a plurality of processes corresponding to the start preparation condition of the process specification rule in the process flow, to perform a check based on a process corresponding to the start preparation condition existing later The process flow check apparatus according to claim 1.   The check unit includes a plurality of processes corresponding to the start preparation condition of the process specification rule in the process flow, and a process corresponding to the start condition exists between processes corresponding to the start preparation condition. 4. The process flow check apparatus according to claim 3, wherein a check is performed based on a process corresponding to the start preparation condition before a process corresponding to the start condition. The process specification rule storage unit stores one process specification rule and another process specification rule that are different from each other,
The check unit includes the step corresponding to the start preparation condition of the one process specification rule and the step corresponding to the start preparation condition of the other process specification rule in the process flow. 2. The process flow check apparatus according to claim 1, wherein a check is performed based on a process corresponding to each start preparation condition of the process specification rule and the other process specification rule. Each step of the process flow in which a plurality of steps are arranged in a predetermined order,
A start condition in which a process for starting a check is defined, a start preparation condition in which a process that always exists before the process defined in the start condition is defined, and at least the start condition and the start preparation condition are set. A process specification rule in which an indispensable condition in which an indispensable process is defined before or after the process set in the start condition when each process is present,
Illuminating the computer with a computer,
Checking in a computer whether or not there is a process corresponding to the essential condition in the process flow when there is a process corresponding to the start condition and the start preparation condition in the process flow;
A process flow check method comprising:   Check whether there is a process corresponding to the essential condition in the process flow when there is no process corresponding to one or both of the start condition and the start preparation condition of the process specification rule in the process flow 7. The process flow check method according to claim 6, wherein the process is not performed by a computer.   The computer checks when a plurality of processes corresponding to the start preparation condition of the process specification rule exist in the process flow based on a process corresponding to the start preparation condition existing later. 6. The process flow check method according to 6.   When there are a plurality of processes corresponding to the start preparation condition of the process specification rule in the process flow, and there are processes corresponding to the start condition between processes corresponding to the start preparation condition, the start 9. The process flow check method according to claim 8, wherein a check is performed by a computer based on a process corresponding to the start preparation condition before a process corresponding to a condition.   In the process flow, when a process corresponding to a start preparation condition of one process specification rule and a process corresponding to a start preparation condition of another process specification rule different from the one process specification rule exist 7. The process flow check method according to claim 6, wherein a check is performed by a computer based on a process corresponding to each start preparation condition of said one process specification rule and said other process specification rule. Each step of the process flow in which a plurality of steps are arranged in a predetermined order,
A start condition in which a process for starting a check is defined, a start preparation condition in which a process that always exists before the process defined in the start condition is defined, and at least the start condition and the start preparation condition are set. A process specification rule in which an indispensable condition in which an indispensable process is defined before or after the process set in the start condition when each process is present,
The step of collating
Checking whether there is a process corresponding to the essential condition in the process flow when there is a process corresponding to the start condition and the start preparation condition in the process flow;
A process flow check program for causing a computer to execute.   Check whether there is a process corresponding to the essential condition in the process flow when there is no process corresponding to one or both of the start condition and the start preparation condition of the process specification rule in the process flow 12. The process flow check program according to claim 11, wherein the computer is not executed.   When there are a plurality of processes corresponding to the start preparation condition of the process specification rule in the process flow, the computer is caused to perform a check based on a process corresponding to the start preparation condition existing later. Item 11. A process flow check program according to Item 11.   When there are a plurality of processes corresponding to the start preparation condition of the process specification rule in the process flow, and there are processes corresponding to the start condition between processes corresponding to the start preparation condition, the start The process flow check program according to claim 13, wherein the computer executes a check based on a process corresponding to the start preparation condition before a process corresponding to a condition.   In the process flow, when a process corresponding to a start preparation condition of one process specification rule and a process corresponding to a start preparation condition of another process specification rule different from the one process specification rule exist 12. The process flow check program according to claim 11, which causes a computer to perform a check based on a process corresponding to each start preparation condition of the one process specification rule and the other process specification rule.

Images