JP2007064666A - Wave front aberration measuring device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To analyze the wave front aberration of each wavelength including the DUV of the inspecting optical system by using an interferometer. <P>SOLUTION: In the wavefront aberration measuring device, the optical fiber illumination system 4 for transmitting each beam of laser light with each wavelength λ<SB>1</SB>, λ<SB>2</SB>to λ<SB>n-1</SB>from the UV to the NIR by single mode optical fibers F<SB>1</SB>, F<SB>2</SB>to F<SB>n-1</SB>, and making it enter the interferometer 3, and direct incident illumination system 5 for making it enter the interferometer 3 by transmitting the laser light of wavelength λ<SB>n</SB>of the DUV through the space are provided. These beams of laser light from the optical fiber illumination system 4 and the beam of laser light from the direct incident illumination system 5 are switched by the illumination switching part 6 and introduced into the interferometer 3. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a wavefront aberration measuring apparatus for analyzing wavefront aberration of a test optical system such as a lens.

  For example, as a method for evaluating the optical performance of a test optical system such as an objective lens of a microscope, in this case, the transmission performance, an object that transmits coherent light such as a laser beam to the test optical system and passes through the test optical system. A method is known in which light and reference light are interfered by an interferometer to generate a plurality of interference fringes having different phases, and the wavefront aberration of a test optical system is analyzed based on these interference fringes. Such a wavefront aberration measuring method is described in Patent Document 1, for example.

The phase difference between the plurality of interference fringes is based on the wavelength of the laser beam output from the laser light source to be used. The laser light source to be used outputs laser light having a wavelength designed for the test optical system. For example, a He—Ne laser is the most common, and its wavelength is 633 nm.
Since the wavelength of such a laser light source is fixed, each optical element such as a beam splitter and a reference mirror constituting the interferometer is provided with a coating optimized for the wavelength of the laser light source. Also, an interference fringe analyzer for analyzing the wavefront aberration of the test optical system incorporates an analysis program on the assumption that a laser light source having a specific wavelength is used.
JP-A-10-96679

  In this way, the interferometer generates interference fringes using laser light having a wavelength designed for the test optical system, and the wavelength for which the test optical system is optimally designed ranges from ultraviolet (UV) to near infrared (NIR). ) Wavelength range, specifically, a wavelength range of 300 nm to 1500 nm. Therefore, when evaluating a test optical system such as a highly accurate lens optimally designed at a wavelength other than the wavelength of 633 nm, it is required to evaluate the wavefront aberration at the wavelength designed for the test optical system. .

  In particular, in recent years, laser light sources that output laser light having a wavelength of, for example, deep ultraviolet (DUV) to near infrared (NIR), specifically 200 nm to 1500 nm, are supplied at a relatively easily available price. . As a result, the number of optical systems to be tested such as high-precision objective lenses optimally designed for a certain wavelength within the wavelength range from DUV to NIR is increasing. From such a background, there is an increasing demand for evaluation of transmitted wavefront aberration for a test optical system optimally designed for wavelengths from DUV to NIR.

  Under such circumstances, in order to perform each evaluation of each transmitted wavefront aberration for each optical system to be measured at each wavelength, each optical element such as a beam splitter and a reference mirror constituting the interferometer is a laser light source. Because the coating optimized for the wavelength of the laser is applied, and the interference fringe analyzer incorporates an analysis program on the premise that a laser light source of a specific wavelength is used, the wavelength of each optical system under test Each dedicated interferometer must be used according to

  However, even if an interferometer is dedicated to one wavelength, for example, the wavelength 633 nm, it is very expensive. In order to evaluate each transmitted wavefront aberration for various optical systems to be tested in each wavelength within the wavelength range from DUV to NIR. It is necessary to prepare a plurality of very expensive interferometers for each wavelength. For this reason, it takes much cost and time to prepare each interferometer for each wavelength, and the efficiency in evaluating the transmitted wavefront aberration is poor.

  The present invention relates to a wavefront aberration measuring apparatus that generates interference fringes reflecting the optical performance of a test optical system via coherent light and measures the wavefront aberration of the test optical system based on the interference fringes. A first illumination system that emits light having a wavelength in the deep ultraviolet region; a second illumination system that emits light having a wavelength different from the wavelength of light emitted from the first illumination system; 2 is a wavefront aberration measuring apparatus including illumination switching means for switching light to any one of the two illumination systems and causing light to enter the optical system to be tested.

  The present invention can provide a wavefront aberration measuring apparatus that can analyze the wavefront aberration of an optical system under test for each wavelength including DUV using a single interferometer.

Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a configuration diagram of a multiwavelength transmitted wavefront aberration analyzer. The illumination system 1 outputs a laser beam capable of selecting an arbitrary wavelength λi (i = 1, 2, 3,..., N). The wavelength λi of the laser light is an arbitrary wavelength within a wavelength range of deep ultraviolet (DUV) to near infrared (NIR), for example, a wavelength range of 200 nm to 1500 nm. The wavelength λi of the laser beam output from the illumination system 1 is performed manually or automatically by switching control of a wavefront aberration analyzer 2 described later. The laser beam output from the illumination system 1 is guided to a Twiman-Green interferometer (hereinafter abbreviated as an interferometer) 3.

FIG. 2 is a block diagram showing an example of the illumination system 1. The illumination system 1 includes an optical fiber illumination system 4 as a first illumination system, a direct incident illumination system 5 as a second illumination system, and lasers from the optical fiber illumination system 4 or the direct incident illumination system 5. And an illumination switching unit 6 for switching light to enter the interferometer 3.
The optical fiber illumination system 4 includes a plurality of wavelengths λ ₁ , λ ₂ ,... In a wavelength region from UV to NIR, specifically, a wavelength region of 300 nm to 1500 nm as a first wavelength among laser beams having a plurality of wavelengths. , Λn−1 laser beams are transmitted by single mode optical fibers (hereinafter referred to as single mode fibers: SMF) F ₁ , F ₂ ,..., Fn−1 and are incident on the interferometer 3.

Specifically, the optical fiber illumination system 4 includes a plurality of first laser light sources L ₁ , L ₂ ,..., Ln−1. These first laser light sources L ₁ , L ₂ ,..., Ln−1 each output laser light of each wavelength in the wavelength region from UV to NIR. For example, each wavelength of each laser beam output from these first laser light sources L ₁ , L ₂ ,..., Ln−1 is, for example, a wavelength region of visible light (near 400 nm to 700 nm) as a wavelength region from UV to NIR. And in the wavelength region of the infrared wavelength region (700 nm to 1500 nm).
One end of each single mode fiber F ₁ , F ₂ ,..., Fn−1 is connected to each laser emission end of the first laser light sources L ₁ , L ₂ ,. The other ends of these single mode fibers F ₁ , F ₂ ,..., Fn−1 are connected to the wavelength switching unit 7, respectively.

The wavelength switching unit 7 includes, for example, a switching board 8 and a motor 9 as a rotation driving unit that rotates the switching board 8. A plurality of laser emission connectors C ₁ , C ₂ ,..., Cn−1 are attached to the switching board 8 on the same circumference. These laser emission connectors C ₁ , C ₂ ,..., Cn-1 can be attached to and detached from the switching panel 8. The switching panel 8 is rotated in the direction of the arrow a, for example, by driving the motor 9, and any one of the laser emission connectors C ₁ , C ₂ ,..., Cn−1 is set at a predetermined position, that is, the first illumination tube. Never stop at 10 opposite positions.

The first illumination tube 10 guides the laser beam emitted from any one of the laser emission connectors C ₁ , C ₂ ,..., Cn−1 to the illumination switching unit 6. A collimator lens 11 is provided in the first illumination tube 10.
The collimator lens 11 collimates laser light emitted from any one of the laser emission connectors C ₁ , C ₂ ,..., Cn−1 into parallel light. The collimator lens 11 uses a single lens to act on the wavelength region of visible light (near 400 nm to 700 nm) and the wavelength region of infrared light (700 nm to 1500 nm), and each laser emission connector C ₁ , C ₂ ,..., The numerical aperture (NA) of the laser beam emitted from Cn−1 is reduced. Thereby, the collimator lens 11 can shape each laser beam of each wavelength λi (i = 1, 2, 3,..., N−1) into parallel light having substantially no aberration.

When a single lens is used as the collimator lens 11, the focal length of the collimator lens 11 changes depending on the wavelength λi. In order to cope with this, the emission ends of the laser emission connectors C ₁ , C ₂ ,..., Cn−1 attached to the switching board 8 are fixed in advance at different positions corresponding to the respective wavelengths λi. ing. The collimator lens 11 is preferably made of quartz that hardly causes a difference in transmittance due to each wavelength λi.

The direct incident illumination system 5 has a wavelength region of visible light (near 400 nm to 700 nm) and a second wavelength different from the wavelength region of infrared light (700 nm to 1500 nm), for example, a wavelength λn of deep ultraviolet rays (DUV) having a wavelength of 200 nm to 300 nm. The laser beam is transmitted into the space and is incident on the interferometer 3.
Specifically, the direct incident illumination system 5 includes, for example, one second laser light source Ln. The second laser light source Ln outputs laser light having a wavelength λn in the DUV wavelength region. For example, the wavelength λn of the laser light output from the second laser light source Ln is in the DUV wavelength region (for example, the wavelength of 200 nm to 300 nm).

A beam steerer 12 as an adjustment optical system is provided on the optical path of the laser light output from the second laser light source Ln. Note that the second laser light source Ln and the beam steerer 12 are installed on a vibration isolation table 13. The vibration isolation table 13 prevents vibration from the outside from being transmitted to the second laser light source Ln, and installs the second laser light source Ln in the horizontal direction.
The beam steerer 12 adjusts the angle and position at which the laser beam output from the second laser light source Ln is emitted from the beam steerer 12. In other words, the beam steerer 12 includes a first mirror 13 and a second mirror 14. The first mirror 13 reflects the laser beam output in the horizontal direction from the second laser light source Ln in the vertical direction upward. The first mirror 13 is movable in the example the z direction (arrow _{b 1} direction). The second mirror 14 reflects the laser beam reflected by the first mirror 13 in the horizontal direction. Since the second illumination cylinder 15 is provided on the reflected light path of the second mirror 14, the laser light reflected by the first mirror 13 enters the second illumination cylinder 15. The second mirror 14 is movable in example z direction (arrow _{b 2} direction).

Here, the angle and position adjustment of the laser beam emitted from the beam steerer 12 will be described. If the output direction of the laser beam output from the second laser light source Ln is, for example, the x direction, the first mirror 13 reflects the laser beam in the z direction, and the second mirror 14 transmits the laser beam to the x direction. Reflect in the direction. However, the first mirror 13 is moved in the arrow b ₁ direction, the position of the laser light incident on the second mirror 14 moves in the x direction (the arrow e ₁ direction). When the second mirror 14 moves in the arrow b ₂ direction, the position of the laser light incident on the second illumination tube 15 is moved in the z direction (the arrow e ₂ direction). Accordingly, the first mirror 13 is moved in the arrow b ₁ direction, the second mirror 14 moves in the arrow b ₂ direction, the position of the laser light incident on the second illumination tube 15 is moved in the xz direction . Thereby, the angle and position of the laser beam incident on the second illumination cylinder 15 can be adjusted by moving the first mirror 13 and the second mirror 14.

  In the second illumination cylinder 15, a condenser lens 16, a pinhole 17, and a collimator lens 18 are provided on the optical path of the laser light reflected by the second mirror 14. The condensing lens 16 condenses the laser light reflected by the second mirror 14. The pinhole 17 is provided at the condensing point of the condensing lens 16. The pinhole 17 functions as a laser light spatial filter. The collimator lens 18 collimates the laser light that has passed through the pinhole 17 and converts it into parallel light.

  The laser emission ports of the first illumination cylinder 10 and the second illumination cylinder 15 are respectively provided in the illumination switching unit 6. In the illumination switching unit 6, an illumination optical path switching mirror 19 is provided so as to be movable in the direction of arrow f, for example, in the same direction as the optical axis direction of the laser light emitted from the collimator lens 11 in the first illumination tube 10. The laser beam emitted from the collimator lens 18 in the second illumination cylinder 15 is switched to either the optical axis of the laser beam or a position off the optical axis. The switching operation of the illumination optical path switching mirror 19 is performed by a switching command issued from the wavefront aberration analyzer 2 or manually by an operator. When the illumination optical path switching mirror 19 is switched by a switching command from the wavefront aberration analyzer 2, a switching mechanism for moving the illumination optical path switching mirror 19 in the direction of the arrow f is provided.

  Therefore, when the illumination optical path switching mirror 19 is disposed on the optical axis of the laser light emitted from the collimator lens 18, the wavelength region from UV to NIR emitted from the collimator lens 11 in the first illumination cylinder 10 is obtained. Λ i (i = 1, 2, 3,..., N−1) is introduced into the interferometer 3 and arranged at a position off the optical axis of the laser light emitted from the collimator lens 18. Then, laser light having a wavelength λn that is a wavelength region of DUV emitted from the collimator lens 18 in the second illumination cylinder 15 is introduced into the interferometer 3.

  In FIG. 1, the gantry 20 is formed in a U-shape, and integrally forms a base 21, a support portion 22, and an arm 23. A beam splitter 24 is provided on the upper surface of the arm 23. Further, a test optical system 25 such as an objective lens of a microscope is provided on the lower surface of the arm 23. The test optical system 25 is provided so as to coincide with the optical axis of the measurement light H reflected downward by the beam splitter 24.

An XYZ stage 26 is provided on the base 21 of the gantry 20. A concave spherical mirror 27 is provided on the XYZ stage 26. In the spherical mirror 27, the center of curvature C of the spherical mirror 27 and the focal position S of the optical system 25 to be tested coincide. The center of curvature C of the spherical mirror 27 and the focal position S of the test optical system 25 are adjusted by moving the spherical mirror 27 in the XYZ directions by driving the XYZ stage 26.
The spherical mirror 27 is preferably formed with a mirror surface made of Si. In general, a Fizeau interferometer or the like generally uses a spherical mirror made of glass. While the reflectance of glass is about 4%, the reflectance of Si is high, for example, about 40% in the visible region. Further, as will be described later, the beam splitter 24 uses a plane-parallel plate to apply the anti-reflection coating (AR coating) to the second surface 24b. When the AR coating has a wide band, the reflectance is about 0. It is realistic to be 5%. Here, the amount of unnecessary light reflected from the second surface 24b of the beam splitter 24 with respect to the light reflected from the spherical mirror 27 is relatively reduced by forming the spherical mirror 27 with Si having high reflectance. Can do.

A planar reference mirror 28 is provided on the transmission optical path of the beam splitter 24. When the spherical mirror 27 is formed of Si, the reference mirror 28 is preferably formed of Si in order to obtain the best contrast for all wavelengths λi. However, as long as it has a high reflectance and a flat reflectance over a wide wavelength region, for example, a vapor deposition mirror produced by vapor deposition of aluminum may be used.
The reference mirror 28 is provided on a stage using a piezoelectric element (PZT) 29. The reference mirror 28 is moved stepwise in the same direction as the traveling direction of the reference light R transmitted through the beam splitter 24 by driving the piezoelectric element 29. The reason why the reference mirror 28 is moved stepwise in this way is to realize a phase shift method in which a plurality of pieces of interference fringe image data having different phases are captured and the wavefront aberration of the interference fringe image data is analyzed.

On the reflected light path above the beam splitter 24, the lenses L ₁ and L ₂ constituting the relay optical system and the CCD imaging device 30 are provided. The lenses L ₁ and L ₂ and the CCD imaging device 30 constitute an interference fringe imaging system 31. The CCD image pickup device 30 picks up an incident interference fringe through the lenses L ₁ and L ₂ and outputs an image signal thereof. As the CCD image pickup device 30, for example, a device having high sensitivity for the DUV wavelength region, a device having high sensitivity for the UV wavelength region, a device having high sensitivity for the NIR wavelength region, or the like is used. If the CCD imaging device 30 having a sensitivity suitable for the wavelength λi to be used is used, an interference fringe image with a good S / N ratio can be obtained by the wavefront aberration analyzer 2.

Here, the CCD image pickup device 30 is provided at a position conjugate with the pupil position of the optical system 25 to be tested. Each of the lenses L ₁ and L ₂ constituting the relay optical system is an example for realizing that the CCD imaging device 30 is provided at a position conjugate with the pupil position of the optical system 25 to be tested. The focal position of the lens L ₁ is in the pupil position of the optical system to be measured 25. The focal position of the lens L ₂ is on the imaging surface 30 a of the CCD imaging device 30.
The beam splitter 24 branches the laser light output from the illumination system 1 into the measurement light H and the reference light R, passes through the optical system 25 to be measured, enters the spherical mirror 27, and reflects off the spherical mirror 27. Then, the measurement light H that has been transmitted through the test optical system 25 and returned and the reference light R that has been reflected by the reference mirror 28 and reflected back are reflected upward.

  Usually, in the interferometer, a wedge plate 32 is often used in order to prevent unnecessary reflected light from the second surface 32b from entering the CCD image pickup device 30 as shown in FIG. However, since the refractive index of the wedge plate 32 differs depending on the wavelength λi, the inclination of the optical axis Z of the light reflected by the spherical mirror 27, transmitted through the optical system 25 to be measured and incident on the CCD image pickup device 30 depends on the wavelength λi. Change. For this reason, it is necessary to change the inclination of the imaging system 31 for each wavelength λi. Since this is very complicated mechanically and the operation becomes complicated, a beam splitter 24 of a parallel plane plate is used as shown in FIG.

  In the plane-plane beam splitter 24, a broadband light split coat is applied to the first surface 24a on which the laser light is incident, and a broadband reduction is performed to prevent unnecessary light reflection on the second surface 24b opposite to the first surface 24a. It is preferable to apply a reflective coat (AR coat). Note that the light splitting coat on the first surface 24a sets the light splitting ratio to 50%: 50%. When the beam splitter 24 is used for a plurality of wavelengths λi, for example, a plurality of beam splitters 24 are prepared, and the wavelength ranges of DUV to NIR are set in these beam splitters 24, for example, each wavelength band 200 to 350 nm, 350 to 500 nm. , 500-700 nm, 700-1500 nm, etc. are applied. Then, a method may be adopted in which the beam splitter 24 with the broadband coating in the wavelength band suitable for the wavelength λi to be used is replaced or selected and switched by a switching mechanism (not shown).

  Similarly, the CCD imaging device 30 also prepares a plurality of highly sensitive devices for each wavelength region of, for example, each wavelength band of 200 to 350 nm, 350 to 500 nm, 500 to 700 nm, and 700 to 1500 nm as wavelength regions from DUV to NIR, for example. You may make it replace | exchange according to (lambda) i. Each wavelength band described above is not limited to this, and may be set as appropriate according to the specifications and conditions of the apparatus.

  The wavefront aberration analyzer 2 is formed by a personal computer, for example, and stores a wavefront aberration analysis program. The wavefront aberration analyzer 2 executes the wavefront aberration analysis program to acquire the image signal output from the CCD imaging device 30 and acquire it as interference fringe image data. The interference fringe image data and the illumination system 1 The wavefront aberration of the test optical system 25 is analyzed on the basis of the wavelength λi of the laser light in the wavelength region from DUV to NIR output from the DUV, and the analysis result is stored.

  The wavefront aberration analyzer 2 stores or calculates a plurality of step movement amounts of the reference mirror 28 corresponding to a plurality of wavelengths λi of the laser light in the DUV to NIR wavelength region that can be output from the illumination system 1, and is calculated by an operator. The wavelength λi to be used is manually input. The wavefront aberration analyzer 2 issues an output command for the laser light of the wavelength λi to the illumination system 1 and issues a drive command for the step movement amount of the reference mirror 28 corresponding to the wavelength λi to the piezoelectric element 29. When the wavelength λi of the laser beam output from the illumination system 1 is switched manually by the operator, the wavefront aberration analyzer 2 reads the wavelength λi of the laser beam switched by the illumination system 1 and changes the wavelength λi to the wavelength λi. A drive command for the step movement amount of the corresponding reference mirror 28 is issued to the piezoelectric element 29.

  In addition, the wavefront aberration analyzer 2 transmits each laser beam having a plurality of different wavelengths λi in the wavelength region from DUV to NIR through the optical system 25 to be measured for each wavelength λi. Each wavefront aberration of the test optical system 25 is obtained, and longitudinal chromatic aberration and lateral chromatic aberration are obtained based on the difference between these wavefront aberrations.

Next, the operation of the apparatus configured as described above will be described.
Each wavelength lambda _1, lambda _2, ..., when performing analysis of the wavefront aberration of the optical system 25 wavelengths, which are optimally designed for example to the wavelength lambda ₁ in the wavelength range of the NIR from UV among lambda] n-1, the target An optical analysis system 25 is provided on the lower surface of the arm 23 of the gantry 20. At this time, the spherical mirror 27 is moved in the XYZ directions by driving the XYZ stage 26, and the alignment is adjusted so that the center of curvature C of the spherical mirror 27 and the focal position S of the optical system 25 to be tested coincide.

In the illumination system 1, the laser emission connector C ₁ is positioned at a position facing the first illumination tube 10 by the switching operation of the wavelength switching unit 7 as shown in FIG. Switching to the laser emission connector C ₁ drives the motor 9 by switching command outputted from the wavefront aberration analyzer 2 may be performed by rotating the switching plate 8 of wavelength switching unit 7, or the operator of the manual May be performed by rotating the switching board 8 of the wavelength switching unit 7. The wavefront aberration analyzer 2 detects that the switching operation to the test optical system 25 optimally designed for the wavelength λ ₁ has been performed by the operator and issues a switching command.

In the illumination system 1, as shown in FIG. 2, the wavefront aberration analyzer 2 issues a switching command for the illumination optical path switching mirror 19 to the illumination switching unit 6. Thereby, the illumination switching unit 6 moves the illumination optical path switching mirror 19 in the direction of the arrow f by a switching mechanism (not shown) and arranges it on the optical axis of the laser light emitted from the collimator lens 18 (shown by a solid line in FIG. 2). The position of the illumination optical path switching mirror 19).
At the same time, the wave front aberration analyzer 2, the operation of the output instruction of the laser beam having a wavelength lambda ₁ by the operator is performed, the piezoelectric element 29 a drive command of the step movement amount of the reference mirror 28 corresponding to the wavelength lambda ₁ To emit. Incidentally, the wavefront aberration analyzer 2, when the wavelength lambda ₁ of the laser light output from the illumination system 1 is switched by the manual operator, automatically reads the wavelength λi of the laser beam is switched by the illumination system 1, A drive command for the step movement amount of the reference mirror 28 corresponding to the wavelength λ ₁ may be issued to the piezoelectric element 29.

As a result, the first laser light source L ₁ outputs a laser beam having a wavelength λ ₁ . The laser light of wavelength λ ₁ reaches the laser emission connector C ₁ through the single mode fiber L ₁ , is emitted from the laser emission connector C ₁ into the first illumination tube 10, and is converted into parallel light by the collimator lens 11. Is done. The laser light having the wavelength λ ₁ converted into the parallel light is reflected by the illumination optical path switching mirror 19 and enters the beam splitter 24 of the interferometer 3.

The beam splitter 24 branches the incident laser light into measurement light H and reference light R. Among these, the measurement light H passes through the test optical system 25 and enters the spherical mirror 27, is reflected upward by the spherical mirror 27, passes through the test optical system 25 again, and enters the beam splitter 24. The reference light R is reflected by the reference mirror 28 and enters the beam splitter 24 again.
Then, the measurement light H passes through the beam splitter 24, enters the CCD image pickup device 30 through the lenses L ₁ and L _{2 of the} image pickup system 31, and the reference light R is reflected upward by the beam splitter 24 together with this, Similar to the measurement light H, the light enters the CCD image pickup device 30 through the lenses L ₁ and L ₂ of the image pickup system 31. Thereby, an interference fringe is generated by the measurement light H and the reference light R, and this interference fringe is imaged on the imaging surface 30 a of the CCD imaging device 30.

In this state, when a drive command for the step movement amount of the reference mirror 28 is given from the wavefront aberration analyzer 2 to the piezoelectric element 29, the reference mirror 28 is driven in the same direction as the reference light R by driving the piezoelectric element 29. Step in the direction. For example, when acquiring four pieces of interference fringe image data having a phase difference of 90 °, the reference mirror 28 moves 5 steps by a step amount of 1/8 of the wavelength λ ₁ . This step movement amount corresponds to a step amount that is a half of the wavelength λ ₁ . Thus, every time the reference mirror 28 moves stepwise, the CCD imaging device 30 images each interference fringe incident by each lens L ₁ , L ₂ and outputs each image signal.

The wavefront aberration analyzer 2 captures each image signal output from the CCD imaging device 30 and stores, for example, four pieces of interference fringe image data having a 90 ° phase difference. At this time, the CCD imaging device 30 is provided at a position conjugate with the pupil position of the test optical system 25 via the lenses L ₁ and L ₂ constituting the relay optical system. The contour of the pupil is clearly projected on the imaging surface 30a of the CCD imaging device 30, and the wavefront aberration can be accurately evaluated up to the contour boundary of the pupil of the optical system 25 to be examined.
In addition, the wavefront aberration analyzer 2 transmits each laser beam having a plurality of different wavelengths λi in the UV to NIR wavelength region through the optical system 25 to be measured for each wavelength λi based on a plurality of interference fringes. Each wavefront aberration of the test optical system 25 is obtained, and longitudinal chromatic aberration and lateral chromatic aberration are obtained based on the difference between these wavefront aberrations.

  On the other hand, when analyzing the wavefront aberration of the test optical system 25 optimally designed for the wavelength λn within the DUV wavelength region, the test optical system 25 is provided on the lower surface of the arm 23 of the gantry 20. At this time, the spherical mirror 27 is moved in the XYZ directions by driving the XYZ stage 26, and the alignment is adjusted so that the center of curvature C of the spherical mirror 27 and the focal position S of the optical system 25 to be tested coincide.

  The wavefront aberration analyzer 2 issues a switching command for the illumination optical path switching mirror 19 to the illumination switching unit 6. As a result, the illumination switching unit 6 moves the illumination optical path switching mirror 19 in the direction of the arrow f by a switching mechanism (not shown) and arranges it at a position off the optical axis of the laser light emitted from the collimator lens 18 (FIG. 2). The position of the illumination optical path switching mirror 19 indicated by a broken line in FIG.

  At the same time, the wavefront aberration analyzer 2 issues a drive command for the step movement amount of the reference mirror 28 corresponding to the wavelength λn to the piezoelectric element 29 when the operator performs an operation to output a laser beam having the wavelength λn. Similarly to the above, when the wavelength λn of the laser beam output from the illumination system 1 is switched manually by the operator, the wavefront aberration analyzer 2 automatically changes the wavelength λn of the laser beam switched by the illumination system 1. And a drive command for the step movement amount of the reference mirror 28 corresponding to the wavelength λn is issued to the piezoelectric element 29.

  As a result, the second laser light source Ln outputs laser light having a wavelength λn within the wavelength region of DUV. The laser light having the wavelength λn propagates in the space in the beam steerer 12, is reflected by the first mirror 13, is further reflected by the second mirror 14, and enters the second illumination cylinder 15. The laser light having the wavelength λn that has entered the second illumination cylinder 15 is condensed by the condenser lens 16 and enters the pinhole 17.

The first mirror 13 is moved in the arrow b ₁ direction, the second mirror 14 by being moved in the arrow b ₂ direction, the angle and position of the laser beam incident on the second illumination tube 15 By this adjustment, the condensing position of the laser beam having the wavelength λn is adjusted to the position of the pinhole 17. The laser light having the wavelength λn that has passed through the pinhole 17 is collimated by the collimator lens 18 to be converted into parallel light, and enters the beam splitter 24 of the interferometer 3.
As described above, the beam splitter 24 branches the incident laser light into the measurement light H and the reference light R. Among these, the measurement light H passes through the test optical system 25 and enters the spherical mirror 27, is reflected upward by the spherical mirror 27, passes through the test optical system 25 again, and enters the beam splitter 24. The reference light R is reflected by the reference mirror 28 and enters the beam splitter 24 again. Then, the measurement light H passes through the beam splitter 24, enters the CCD image pickup device 30 through the lenses L ₁ and L _{2 of the} image pickup system 31, and the reference light R is reflected upward by the beam splitter 24 together with this, Like the measurement light H, the light enters the CCD image pickup device 30 through the lenses L ₁ and L ₂ of the image pickup system 31, so that an interference fringe is generated by the measurement light H and the reference light R. An image is formed on the imaging surface 30a.

In this state, since the wavefront aberration analyzer 2 gives a drive command for the step movement amount of the reference mirror 28 to the piezoelectric element 29 as described above, the reference mirror 28 is driven by the piezoelectric element 29 in the traveling direction of the reference light R. And move in the same direction. Each time the reference mirror 28 moves stepwise, the CCD imaging device 30 images each interference fringe incident by the lenses L ₁ and L ₂ and outputs each image signal. The wavefront aberration analyzer 2 captures each image signal output from the CCD imaging device 30 and stores, for example, each interference fringe image data for each phase. Accordingly, the wavefront aberration analyzer 2 clearly projects the contour of the pupil of the optical system 25 to be tested, which is optimally designed for the wavelength λn within the wavelength region of the DUV, onto the imaging surface 30a of the CCD imaging device 30 and The wavefront aberration can be accurately evaluated up to the contour boundary of the pupil of the system 25.

  Further, the wavefront aberration analyzer 2 detects the test for each wavelength λi based on a plurality of interference fringes generated by transmitting each laser beam having a plurality of different wavelengths λi in the DUV wavelength region to the test optical system 25. Each wavefront aberration of the optical system 25 is obtained, and longitudinal chromatic aberration and lateral chromatic aberration are obtained based on a difference between these wavefront aberrations.

As described above, according to the first embodiment, each single-mode fiber F ₁ , F ₂ ,..., Fn− is converted from the laser light of each wavelength λ ₁ , λ ₂ ,. An optical fiber illumination system 4 that is transmitted by 1 and incident on the interferometer 3, and a direct incident illumination system 5 that transmits laser light having a wavelength λn of DUV into the space and is incident on the interferometer 3 are provided. Since the laser light from the illumination system 4 and the laser light from the direct incident illumination system 5 are switched by the illumination switching unit 6 and introduced into the interferometer 3, each interferometer 3 can be used for each wavelength including DUV. Analysis and evaluation of the wavefront aberration of the detection optical system 25 can be performed.

The reason why the optical fiber illumination system 4 and the direct incident illumination system 5 are divided is as follows. Each single mode fiber F ₁ , F ₂ ,..., Fn-1 is relatively easily available, and each laser emitted from each single mode fiber F ₁ , F ₂ ,. It can be treated as a point light source. Thereby, by switching each laser emitting connector C ₁ , C ₂ ,..., Cn-1 of each single mode fiber F ₁ , F ₂ ,. It is possible to switch to each laser beam of each wavelength λ ₁ , λ ₂ ,..., Λn−1 in the wavelength region, and to analyze and evaluate the wavefront aberration of each optical system 25 in the UV to NIR wavelength region. Can be done efficiently.

  On the other hand, in the wavelength region of DUV, a single mode fiber cannot be used in the wavelength region. To be precise, even if a single-mode fiber in the DUV wavelength region is produced, if the laser light having the DUV wavelength is transmitted to the single-mode fiber, the transmittance of the single-mode fiber is immediately reduced. It is virtually unusable. Therefore, in order to guide the laser light in the DUV wavelength region to the interferometer 3, the direct incident illumination system 5 that transmits the laser light having the wavelength λn of the DUV into the space is used.

  However, analysis and evaluation of the wavefront aberration of the optical system 25 to be tested optimally designed for each wavelength λi within the wavelength range from DUV to NIR can be performed by one interferometer 3, and each wavelength is expensive. There is no need to prepare each interferometer, which is economical and can analyze and evaluate the transmitted wavefront aberration in a short time, and can efficiently evaluate the transmitted wavefront aberration.

Next, a second embodiment of the present invention will be described with reference to the drawings. 1 and 2 are denoted by the same reference numerals, and detailed description thereof is omitted.
FIG. 4 shows a configuration diagram of another example of the illumination system 1 in the multiwavelength transmitted wavefront aberration analyzer. In this apparatus, each collimator lens 11, 18 in the first embodiment is replaced with one collimator lens 40. The collimator lens 40 is provided on the optical axis between the illumination optical path switching mirror 19 and the beam splitter 24 of the interferometer 3 that are disposed when guiding laser light in the wavelength region from UV to NIR to the interferometer 3. .

With such a configuration, when the wavelength of the wavelength region of the NIR from UV, for example the analysis of the wavefront aberration of optimally designed target optical system 25 to the wavelength lambda ₁ performs a wavefront aberration analyzer 2, the illumination optical path A switching command for the switching mirror 19 is issued to the illumination switching unit 6, and the illumination optical path switching mirror 19 is arranged at the position of the illumination optical path switching mirror 19 indicated by a solid line in FIG.
The laser light of wavelength λ ₁ output from the first laser light source L ₁ reaches the laser emission connector C ₁ through the single mode fiber L ₁ , and is emitted from the laser emission connector C ₁ into the first illumination tube 10. Further, the light is reflected by the illumination light path switching mirror 19 and converted into parallel light by the collimator lens 40. The laser light having the wavelength λ ₁ converted into the parallel light is incident on the beam splitter 24 of the interferometer 3.

On the other hand, when analyzing the wavefront aberration of the test optical system 25 optimally designed for a wavelength within the wavelength region of the DUV, for example, the wavelength λn, the wavefront aberration analyzer 2 sends a switching command for the illumination optical path switching mirror 19 to switch illumination. The illumination optical path switching mirror 19 is arranged at the position of the illumination optical path switching mirror 19 indicated by a broken line in FIG.
The laser light having the wavelength λn output from the second laser light source Ln propagates through the space in the beam steerer 12, is reflected by the first mirror 13, and further reflected by the second mirror 14 to be second. , And is condensed by the condenser lens 16 in the second illumination cylinder 15 and enters the pinhole 17. The laser light having the wavelength λn that has passed through the pinhole 17 is collimated by the collimator lens 40 to be converted into parallel light, and enters the beam splitter 24 of the interferometer 3.
Note that the analysis and evaluation of the wavefront aberration of the optical system 25 to be measured by the wavefront aberration analyzer 2 and the measurement of the longitudinal chromatic aberration and the lateral chromatic aberration are the same as those in the first embodiment, and the description thereof will be omitted.

  In this way, even if the collimator lens 40 that converts each laser beam of the optical fiber illumination system 4 and the direct incident illumination system 5 into parallel light and guides it to the interferometer 3 is shared, it is the same as in the first embodiment. There is an effect.

Next, a third embodiment of the present invention will be described with reference to the drawings. 1 and 2 are denoted by the same reference numerals, and detailed description thereof is omitted.
FIG. 5 shows a configuration diagram of another example of the illumination system 1 in the multiwavelength transmitted wavefront aberration analyzer. Each of the first laser light sources L ₁ , L ₂ ,..., Ln−1 is provided with a shutter S ₁ , S ₂ ,. These shutters S ₁ , S ₂ ,..., Sn−1 are controlled to be opened and closed by a shutter control signal issued from, for example, a wavefront aberration analyzer 2 having the function of a control unit.

The second laser light source Ln is controlled to output and stop the laser beam by a laser on / off control signal emitted from the wavefront aberration analyzer 2, for example.
A half mirror 41 is fixedly provided in place of the illumination light path switching mirror 19.

With such a configuration, when the wavelength of the wavelength region of the NIR from UV, for example the analysis of the wavefront aberration of optimally designed target optical system 25 to the wavelength lambda ₁ performs a wavefront aberration analyzer 2, a second A laser off control signal is issued to the laser light source Ln. Thereby, the second laser light source Ln stops the output of the laser light.

At the same time, the wave front aberration analyzer 2, opens the shutter _{S 1,} the other shutter _S 2, ..., a shutter control signals each shutter _S 1 to close the _Sn-1, S 2, ..., emit a Sn-1. Thus, the shutter _{S 1} is open, the other shutter _S 2, ..., Sn-1 is closed.
However, the laser beam of wavelength lambda ₁ outputted from the first laser light source L ₁ passes through the shutter S _1, lead to laser emission connector C ₁ through the single mode fiber L within _1, this laser emission connector C ₁ The light is emitted into the first illumination tube 10, further reflected by the half mirror 41, and converted into parallel light by the collimator lens 40. The laser light having the wavelength λ ₁ converted into the parallel light is incident on the beam splitter 24 of the interferometer 3.

  On the other hand, when analyzing the wavefront aberration of the test optical system 25 that is optimally designed to a wavelength within the wavelength region of the DUV, for example, the wavelength λn, the wavefront aberration analyzer 2 controls the laser on for the second laser light source Ln. Send a signal. Thereby, the second laser light source Ln outputs a laser beam.

At the same time, the wavefront aberration analyzer 2 issues a shutter control signal for closing all the shutters S ₁ , S ₂ ,..., Sn−1 to each of the shutters S ₁ , S ₂ ,. Thereby, all the shutters S ₁ , S ₂ ,..., Sn-1 are closed.
However, the laser light having the wavelength λn output from the second laser light source Ln propagates through the space in the beam steerer 12 and is reflected by the first mirror 13 and further reflected by the second mirror 14. The light enters the second illumination cylinder 15, is condensed by the condenser lens 16 in the second illumination cylinder 15, and enters the pinhole 17. The laser light having the wavelength λn that has passed through the pinhole 17 passes through the half mirror 41, is collimated by the collimator lens 40, converted into parallel light, and enters the beam splitter 24 of the interferometer 3.
Note that the analysis and evaluation of the wavefront aberration of the optical system 25 to be measured by the wavefront aberration analyzer 2 and the measurement of the longitudinal chromatic aberration and the lateral chromatic aberration are the same as those in the first embodiment, and the description thereof will be omitted.

As described above, according to the third embodiment, the shutters S ₁ , S ₂ ,..., Sn provided at the laser emission ends of the first laser light sources L ₁ , L ₂ ,. -1 is controlled to open and close, the output of the laser beam from the second laser light source Ln and its stop are controlled, and the half mirror 41 is fixed, so that the first and second embodiments described above are provided. Thus, the same effect as that of the first embodiment can be obtained without switching the illumination light path switching mirror 19.

  As in the first to third embodiments, it is desirable to use the Twiman-Green interferometer 4 in order to cope with a plurality of wavelengths λi with one wavefront aberration measuring apparatus. Since the Twiman Green interferometer 4 can measure regardless of the coherence distance, a laser beam having a small coherence distance, for example, a relatively inexpensive light source such as a semiconductor laser can be used, which is advantageous in terms of cost. Become.

However, when a laser beam having a high coherence distance depending on the wavelength of the laser beam may be used, the wavefront aberration measuring device of the present invention may be configured with a Fizeau interferometer.
In addition, this invention is not limited to said each embodiment, You may deform | transform as follows.
In the above embodiments, the second laser light source Ln of the direct incident illumination system 5 is described as one unit, but a plurality of units may be provided.
In each of the above-described embodiments, only the case where the wavefront aberration (transmission is surface aberration) of a transmission-type objective lens composed of lenses is described. However, even when measuring the wavefront aberration of an objective lens (test optical system) composed of a reflective element (mirror) and a lens or an objective lens (test optical system) composed only of a reflective element, it is natural. Nevertheless, it is clear that the present invention is effective. The test optical system may be composed of any element.

The block diagram which shows 1st Embodiment of the wavefront aberration measuring apparatus which concerns on this invention. The block diagram which shows an example of the illumination system in the apparatus. The figure for demonstrating the beam splitter of the plane-parallel plate in the apparatus. The block diagram which shows 2nd Embodiment of the wavefront aberration measuring apparatus which concerns on this invention. The block diagram which shows 3rd Embodiment of the wavefront aberration measuring apparatus which concerns on this invention.

Explanation of symbols

1: illumination system, 2: wavefront aberration analyzer, 3: interferometer (Twiman Green interferometer), 4: optical fiber illumination system, 5: direct incident illumination system, 6: illumination switching unit, F ₁ , F ₂ , ..., Fn-1: an optical fiber (single mode _{fiber), L 1, L 2,} ..., Ln-1, Ln: the laser light source, 7: wavelength switching unit, 8: switch plate, 9: _{motor, C} 1, C ₂ ,..., Cn-1: laser emission connector, 10: first illumination tube, 11: collimator lens, 12: beam steerer, 13: vibration isolation table, 13: first mirror, 14: second mirror , 15: second illumination tube, 16: condenser lens, 17: pinhole, 18: collimator lens, 19: illumination optical path switching mirror, 20: mount, 21: base, 22: support, 23: arm, 24 : Beam splitter, 25: Test optics , 26: XYZ stage 27: spherical mirror, 24a: first face, 24b: second face, 28: reference mirror, 29: piezoelectric element, 30: CCD image pickup _device, L 1 ,, _{L 2:} Lens, 31: Imaging system, 30a: imaging surface, 32: wedge plate, 40: collimator lens, S1 _, S2 _, ..., Sn-1: shutter, 41: half mirror.

Claims (8)

In the wavefront aberration measuring device that generates coherent light through the test optical system and that reflects the optical performance of the test optical system, and measures the wavefront aberration of the test optical system based on the interference fringe,
A first illumination system that emits light having a wavelength in the deep ultraviolet region;
A second illumination system that emits light having a wavelength different from the wavelength of the light emitted from the first illumination system;
Illumination switching means for switching to either one of the first or second illumination system and causing the light to enter the optical system to be detected;
A wavefront aberration measuring apparatus comprising: Coherent light is incident on an interferometer, and the interferometer generates an interference fringe reflecting the optical performance of the optical system to be detected via the optical system to be detected, and the test object is based on the interference fringe. In the wavefront aberration measuring apparatus for measuring the wavefront aberration of the optical system,
A first illumination system that transmits the coherent light of a first wavelength through a fiber and enters the interferometer;
A second illumination system for transmitting the coherent light having a second wavelength different from the first wavelength to the sky and entering the interferometer;
A wavefront aberration measuring apparatus comprising: The second illumination system includes a light source that outputs the coherent light having a wavelength in the deep ultraviolet region,
An adjusting optical system for adjusting the angle and position of the optical axis of the coherent light output from the light source;
The wavefront aberration measuring device according to claim 1, wherein:   The wavefront aberration measuring apparatus according to claim 1, wherein the first illumination system outputs the coherent light having an arbitrary wavelength in an ultraviolet region to an infrared region.   5. The wavefront aberration measuring apparatus according to claim 4, wherein the first illumination system includes at least one light source that outputs the coherent light having different wavelengths in the ultraviolet region to the infrared region. An illumination switching unit that switches to one of the coherent light from the first illumination system or the coherent light from the second illumination system and enters the interferometer;
The wavefront aberration measuring apparatus according to claim 2, further comprising:   The wavefront aberration measuring apparatus according to claim 2, wherein the second illumination system outputs the coherent light having a wavelength in a deep ultraviolet region.   The illumination switching unit causes the coherent light from the first illumination system or the coherent light from the second illumination system to enter the interferometer by inserting and removing a reflecting member. Item 7. The wavefront aberration measuring device according to Item 1 or 6.

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