JP2007062130A - Manufacturing method of micro-optical device, manufacturing method of mold for micro-optical device and micro-optical device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a micro-optical device or the like capable of forming a complicated three-dimensional structure precisely, rapidly and simply. <P>SOLUTION: In the manufacturing method of the micro-optical device, a photosetting resin liquid is selectively irradiated with light to form a cured resin layer by repeating collective exposure using a projection region as a unit to form a cured resin layer and the cured resin layer is successively laminated to form a three-dimensional shape. This manufacturing method is especially effective in the case that the structure of the micro-optical device or the like is the complicated three-dimensional structure having an overhang part. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention provides a micro optical device, wherein a photocurable resin liquid is selectively irradiated with light to form a cured resin layer, and the cured resin layer is sequentially laminated to form a three-dimensional structure. The present invention relates to a method, a method for manufacturing a micro optical device mold, and a micro optical device manufactured by a micro optical device mold.

  In the information and communication field, conversion from analog to digital, and from metal wire to wireless and optical fiber is progressing, and optical devices are attracting attention. Examples of the optical device include an optical waveguide and an optical switch.

  Quartz-based materials have often been used for optical waveguides, but in recent years, polymer optical waveguides that can achieve cost reduction have been proposed (for example, Patent Document 1). As a method of manufacturing the polymer optical waveguide, there are a method of performing photolithography and reactive ion etching. Also, a method in which a mold having an optical waveguide core pattern formed on the surface thereof is used, and a molten thermoplastic resin is poured into the mold and injection molding is performed, or the above mold is melted into a thermoplastic resin. A method of manufacturing a clad substrate having a core groove corresponding to the shape of the core pattern by hot embossing is being studied.

  FIG. 3 is a cross-sectional view showing an example of the polymer optical waveguide described in Patent Document 1. In the polymer optical waveguide 50, the core material 54 is filled in the core groove 52 of the clad substrate 53 manufactured using the clad material 51 as described above to form the core 55, and the same surface as the clad substrate 53 is formed on this surface. It is manufactured by bonding a film 56 formed of a material (clad material 51).

In recent years, attention has been focused on MEMS (Micro Electro Mechanical Systems) in optical switches. This is to change the path of light by inserting micro-size mirrors and shutters into the light beam propagating through space using micromachine technology. Generally, it is manufactured using a silicon process line. FIG. 4 shows a basic configuration of the optical switch array 60 (Non-Patent Document 1). Two components, a MEMS chip 61 with a micromirror (not shown) and a planar waveguide (PLC) 62, are the main components, and have a structure in which these are bonded together. The MEMS chip 61 is manufactured by performing DRIE (Deep Reactive Ion Etchang) processing on silicon. These are aligned to form a switch.
JP, 2004-29720, A FIG. 3 Paragraph numbers [0002]-[0005] Makoto Katayama et al. SEI Technical Review, September 2002, No. 161, pages 32-38

In manufacturing the optical waveguide and the micro optical switch, it is ideal to manufacture the optical waveguide by a simpler and quicker method.
On the other hand, development of a technique for forming a more complicated micro three-dimensional structure quickly and easily is desired. This is because the optical waveguide and the micro optical switch can be expected to realize high performance, miniaturization, and / or light weight by such technology.

  In addition, in the above, although the subject in an optical waveguide and a micro optical switch was described, it is not limited to these, A micro lens, an optical filter, an optical transmission / reception module, an optical synthesis demultiplexer, an optical attenuator (attenuator), Similar problems may occur in general micro optical devices including photonic crystals, photonic fractals, and the like. In this specification, the micro optical device requires a micro-order resolution, and includes various devices such as optical switches used in the field of optical information and optical communication, micro lenses, optical filters, and the like. Including parts and various structures in general.

  The present invention has been made in view of the above-described background, and an object of the present invention is to provide a micro optical device that can form a complicated three-dimensional structure and can be formed accurately, quickly and easily. It is to provide a manufacturing method and the like.

  The method for manufacturing a micro optical device or the like according to the present invention includes forming a cured resin layer by selectively irradiating light to a photocurable resin liquid by repeating collective exposure in units of projection areas, and the cured resin layer. Are sequentially laminated to form a three-dimensional structure. The present invention is particularly effective when the structure of a micro optical device or the like is a complicated three-dimensional structure having an overhang portion.

Here, when the area of the projection region is 100 mm ² or less, a micro optical device or the like can be formed with higher accuracy by using the optical modeling method according to the present invention.
Similarly, when the thickness of one layer of the cured resin layer is 10 μm or less, a micro optical device or the like can be formed with higher accuracy by using the optical modeling method according to the present invention.

  The manufacturing method of a micro optical device or the like according to the present invention is suitably used when the photocurable resin liquid is cured by light reflected by a digital mirror device.

  Moreover, the manufacturing method of the micro optical device etc. which concerns on this invention manufactures the micro optical device etc. which used ceramics which gave strength more as a material by mix | blending ceramic powder with the said photocurable resin liquid. Can do. Moreover, the micro optical device etc. which have the characteristic of a filler can be manufactured by mix | blending a filler with the said photocurable resin liquid.

  According to the present invention, it is possible to form a complicated three-dimensional structure, and it is possible to provide an excellent effect that it is possible to provide a manufacturing method of a micro optical device and the like that can be formed accurately, quickly and easily. Have.

  Hereinafter, an example of an embodiment to which the present invention is applied will be described. It goes without saying that other embodiments may also belong to the category of the present invention as long as they match the gist of the present invention.

[Embodiment 1 (Method of Manufacturing Micro Optical Device)]
FIG. 1 is a diagram for explaining an example of a device configuration of a photo-curing modeling apparatus (hereinafter referred to as “optical modeling apparatus”) that manufactures the micro optical device according to the first embodiment. As shown in the figure, the optical modeling apparatus 100 includes a light source 1, a digital mirror device (hereinafter abbreviated as “DMD”) 2, a lens 3, a modeling table 4, a dispenser 5, a recoater 6, a control unit 7, and a storage unit 8. Etc.

  The light source 1 is mounted with a laser beam capable of oscillating. The photo-curable resin liquid can be cured by irradiating a photo-curable resin liquid described later with a laser beam generated from the light source 1. Therefore, it is necessary to mount a laser beam having a wavelength capable of curing the photocurable resin liquid 10. Specific examples of the light source 1 include a laser diode (LD) that generates 405 nm laser light and an ultraviolet (UV) lamp.

  The digital mirror device (DMD) 2 is a device developed by Texas Instruments, and hundreds of thousands to millions of micromirrors that move independently on a CMOS semiconductor, for example, 480,000 to 1.31 million are spread. It is what has been. Individual micromirrors can be tilted by about ± 10 degrees, for example, about ± 12 degrees about the diagonal line by an electrostatic field effect. By controlling the angle of each micromirror, it is possible to irradiate a desired position of a photocurable resin liquid formed on a modeling table described later.

  The micromirror provided in the DMD 2 has a square shape in which the length of one side of the pitch of each micromirror is about 10 μm, for example, 13.68 μm. The interval between adjacent micromirrors is, for example, 1 μm. The entire DMD 2 used in the first embodiment has a square shape of 40.8 × 31.8 mm (of which the mirror portion has a square shape of 14.0 × 10.5 mm). It is composed of 786,432 micromirrors having a length of 13.68 μm. The laser beam emitted from the light source 1 is reflected by a micromirror that is a constituent member of the DMD 2. In the DMD 2, the laser beam reflected toward the condensing lens 3 is irradiated to the photocurable resin liquid 10 on the modeling table 4.

  The lens 3 plays a role of guiding the laser beam reflected by the DMD 2 onto the photocurable resin liquid 10 to form a projection region. The lens 3 may be a condenser lens using a convex lens or a concave lens. When a concave lens is used, a projection area larger than the actual size of DMD 2 can be obtained. The lens 3 according to the first embodiment is a condensing lens composed of a convex lens, and reduces incident light about 15 times and condenses it on a coat layer 9 formed of the photocurable resin liquid 10.

  The modeling table 4 is composed of a flat mounting table. The coating layer 9 of the photocurable resin liquid 10 is formed on the modeling table 4, and the photocurable resin liquid 10 is cured by being irradiated with a laser beam through the lens 3. The modeling table 4 is configured so that horizontal movement and vertical movement can be freely moved by a driving mechanism (not shown), that is, a moving mechanism. With this drive mechanism, stereolithography can be performed over a desired range. The dispenser 5 is configured to store the photocurable resin liquid 10 and supply a predetermined amount of the photocurable resin liquid 10 to a predetermined position. The recoater 6 includes, for example, a blade mechanism and a moving mechanism, and is configured so that the photocurable resin liquid 10 can be uniformly applied.

  The control unit 7 controls the light source 1, DMD 2, modeling table 4, dispenser 5, and recoater 6 according to control data including exposure data. The control unit 7 can typically be configured by installing a predetermined program in a computer. A typical computer configuration includes a central processing unit (CPU) and memory. The CPU and the memory are connected to an external storage device such as a hard disk device as an auxiliary storage device via a bus. This external storage device functions as the storage unit 8 of the control unit 7. A storage medium drive device such as a flexible disk device, a hard disk device, or a CD-ROM drive that functions as the storage unit 8 is connected to a bus via various controllers. A portable storage medium such as a flexible disk is inserted into a storage medium driving apparatus such as a flexible disk apparatus. The storage medium can store a predetermined computer program for executing the present embodiment by giving instructions to the CPU in cooperation with the operating system.

  The storage unit 8 stores control data including exposure data of cross-sectional groups obtained by slicing a three-dimensional model to be modeled into a plurality of layers. Based on the exposure data stored in the storage unit 8, the control unit 7 mainly controls the angle control of each micromirror in the DMD 2 and the movement of the modeling table 4 (that is, the position of the laser beam irradiation range with respect to the three-dimensional model). Instructing the modeling of the three-dimensional model.

  The computer program is executed by being loaded into a memory. The computer program can be compressed or divided into a plurality of pieces and stored in a storage medium. In addition, user interface hardware can be provided. Examples of the user interface hardware include a pointing device for inputting such as a mouse, a keyboard, or a display for presenting visual data to the user.

As the photocurable resin liquid 10, one that is cured by a laser beam is selected. As the laser beam, for example, visible light or ultraviolet light can be suitably used. For example, an acrylic resin corresponding to 405 nm having a curing depth of 15 μm or more (500 mJ / cm ² ) and a viscosity of 1500 to 2500 Pa · s (25 ° C.) can be used.

  Next, the optical modeling operation of the optical modeling apparatus 100 according to the first embodiment will be described. First, the uncured photocurable resin liquid 10 is accommodated in the dispenser 5. The modeling table 4 is in the initial position. The dispenser 5 supplies the stored photocurable resin liquid 10 on the modeling table 4 by a predetermined amount. The recoater 6 sweeps the photocurable resin liquid 10 so as to stretch and forms a coat layer 9 for one layer to be cured.

The laser beam emitted from the light source 1 enters the DMD 2. The DMD 2 is controlled by the control unit 7 according to the exposure data stored in the storage unit 8, and the control unit 7 irradiates the laser beam to a desired position of the coat layer 9 formed by the photocurable resin liquid 10. Thus, the angle of the micromirror is adjusted. Thereby, the laser beam reflected from the micromirror is irradiated onto the coating layer 9 of the photocurable resin liquid 10 through the condenser lens 3, and the laser beam reflected from the other micromirrors is applied to the photocurable resin liquid 10. The coating layer 9 can be prevented from being irradiated. Irradiation of the laser beam to the photocurable resin liquid 10 is performed for 0.4 seconds, for example. At this time, the projection region of the photocurable resin liquid 10 onto the coat layer 9 is, for example, about 1.3 × 1.8 mm, and can be reduced to about 0.6 × 0.9 mm. The area of the projection region is usually desirably 100 mm ² or less.

  By using a concave lens for the lens 3, the projection area can be expanded to about 6 × 9 cm. If the projection area is enlarged beyond this size, the energy density of the laser beam applied to the projection area is lowered, so that the photocurable resin liquid 10 may be insufficiently cured. In the case of forming a three-dimensional model larger than the size of the laser beam projection area, for example, the modeling table 4 is moved horizontally by a moving mechanism to move the irradiation position of the laser beam and irradiate the entire modeling area. Laser beam irradiation is performed one shot at each projection area. Control of laser beam irradiation to each projection area will be described in detail later.

  In this way, by moving the projection area and performing irradiation of the laser beam with each projection area as a unit, that is, exposure, the coat layer 9 of the photocurable resin liquid 10 is cured, and the first layer A cured resin layer is formed. The lamination pitch for one layer, that is, the thickness of one cured resin layer is, for example, 1 to 50 μm, preferably 2 to 10 μm, and more preferably 5 to 10 μm. In the conventional optical modeling method, it is difficult to increase the resolution of the modeled object, and the typical resolution is several tens of μm, and it is difficult to use it for manufacturing a micro optical device that requires higher resolution. According to the optical modeling method according to the first embodiment, for example, the resolution can be increased to about 5 μm in the stacking direction, and the planar resolution parallel to the modeling table can be increased to about 2 μm.

  Subsequently, a second layer of a three-dimensional model having a desired shape is simultaneously formed in the same process. Specifically, the photocurable resin liquid 10 supplied from the dispenser 5 is applied to the outside of the cured resin layer formed as the first layer so as to be stretched beyond the three-dimensional model by the recoater 6. Then, a second cured resin layer is formed on the first cured resin layer by irradiating with a laser beam. Thereafter, the third and subsequent cured resin layers are sequentially deposited in the same manner. And after completion | finish of deposition of the last layer, the modeling thing formed on the modeling table 4 is taken out. The molded object removes the uncured photocurable resin liquid adhering to the surface by washing or other methods. Thereafter, the molded article may be further irradiated with an ultraviolet lamp or the like as necessary to further cure.

  As long as the structure of the micro optical device is within the range of the resolution of the optical modeling apparatus, an arbitrary structure can be manufactured. For example, a micro optical switch, an optical transmission / reception module, an optical synthesis demultiplexer, an optical attenuator (attenuator), an optical waveguide, a micro lens, a photonic crystal, a photonic fractal, and the like can be given. In the case of an electric device such as an electrode or a sensor, a conductive layer may be provided by providing a thin metal layer on the surface of the substrate by vapor deposition or the like. Further, by forming a more complicated three-dimensional structure, for example, by forming a thin piece partly floating from the surface of the substrate, a sensor for detecting strain against mechanical vibration can be obtained. The manufacturing method of the micro optical device and the like according to the present embodiment is particularly suitable for manufacturing a micro optical device having a complicated three-dimensional structure having an overhang portion.

  Here, “having an overhang portion” means that the overhang portion is present at least in part when viewed from the vertical direction even when the three-dimensional structure is rotated and installed in any direction. To do. In addition, the overhang portion is a portion having a structure in which the horizontal width of the upper portion is larger than the horizontal width of a certain portion. Typically, the overhang portion is in contact with the column portion and the column portion than the column portion. However, it is not limited to a linear structure, but includes a shape having a curved surface that rises in the vertical direction and protrudes in the horizontal direction, and a so-called reverse tapered shape. It is a concept. For example, the cylindrical shape is an overhang when viewed from the vertical direction with the cylindrical side in contact with the horizontal plane, but there is no overhang when viewed from the vertical direction with the bottom in contact with the horizontal plane. It is not a three-dimensional structure having an overhang portion. On the other hand, the spherical shape is a three-dimensional structure having an overhang portion. The manufacturing method of the present invention is particularly suitable for modeling a three-dimensional structure having an overhang portion. If the structure has no overhang portion when viewed from a certain direction, the overhang portion is essentially difficult to manufacture. This is because even if other manufacturing methods are used, it may be possible to form the three-dimensional structure.

  The photocurable resin liquid used in Embodiment 1 is not particularly limited, but a photocurable resin liquid composition comprising a radical polymerizable compound and / or a cationic polymerizable compound is usually preferable. Used for. In addition, a photopolymerization initiator corresponding to radical polymerization or cationic polymerization is usually added to these photocurable resin liquid compositions.

  The three-dimensional object made of the cured product obtained by the above-described stereolithography method is taken out from the stereolithography apparatus, and after removing the unreacted composition (uncured) remaining on the surface and inside thereof, it is washed as necessary. To do. Here, as the cleaning agent, alcohol-based organic solvents typified by alcohols such as isopropyl alcohol and ethyl alcohol; ketone-based organic solvents typified by acetone, ethyl acetate, methyl ethyl ketone, etc .; aliphatics typified by terpenes Based organic solvents. By the above process, a micro optical device made of a cured product of a photocurable resin can be obtained. According to the manufacturing method described above, a micro optical device that can achieve weight reduction can be manufactured.

  When it is desired to manufacture the micro optical device with ceramic, ceramic powder can be blended with the photocurable resin liquid composition. The number average particle size of the ceramic powder is usually 0.01 to 0.5 μm as measured by electron microscopy. Preferably, it is 0.02-0.3 micrometer, More preferably, it is 0.05-0.2 micrometer. The particle size of the ceramic powder is measured by electron microscopy, but scanning electron microscopy is particularly preferred. The shape of the ceramic powder is not particularly limited as long as it has a granularity that can define the particle size. For example, it is not limited to a spherical shape, and may be a pulverized body or the like. The particle diameter in the case of a shape other than a spherical shape is defined by the maximum diameter in the electron microscope image. The mixing amount of the ceramic powder in the photocurable resin liquid is not particularly limited, but it is necessary that the coating layer 9 formed from the photocurable resin liquid 10 is sufficiently hardened by the laser beam.

  The material constituting the ceramic powder is not particularly limited as long as it does not substantially absorb the light having the irradiation wavelength. For example, oxides such as alumina, zirconia, titania, zinc oxide, ferrite, barium titanate, apatite, silica, carbides such as zirconium carbide and silicon carbide, nitrides such as aluminum nitride, silicon nitride, and sialon (SiAlON), or Various ceramics such as a mixture thereof can be used. Usually, as the component (A), alumina, zirconia, silica, aluminum nitride, silicon nitride, or a mixture thereof is preferably used.

  When a three-dimensionally shaped product obtained by photocuring a photocurable resin liquid containing ceramic powder is fired, a micro optical device made of a ceramic fired body is obtained. Compared with the hardened | cured material of the said photocurable resin liquid, the micro optical device with the high mechanical strength of a micro optical device, durability, and heat resistance can be obtained. In addition, the baking method used here is not specifically limited, A well-known method can be used. In addition, a three-dimensional model obtained by photocuring a photocurable resin liquid containing a ceramic powder does not necessarily need to be fired and may be used as it is.

  When it is desired to increase the heat resistance of the micro optical device according to this embodiment, a filler capable of improving heat resistance (hereinafter simply referred to as “heat-resistant filler”) is added to the photocurable resin liquid composition. Can do. The number average particle size of the heat-resistant filler is usually 10 to 1000 nm as measured by electron microscopy. The particle size of the heat-resistant filler is measured by electron microscopy, but scanning electron microscopy is particularly preferable. The shape of the filler is not particularly limited as long as it has a granularity that can define the particle size. For example, it is not limited to a spherical shape, and may be a pulverized body or the like. The particle diameter in the case of a shape other than a spherical shape is defined by the maximum diameter in the electron microscope image.

  Examples of the heat-resistant filler that can be suitably used include silica particles and elastomer particles. The material constituting the filler is not particularly limited as long as it does not substantially absorb light having an irradiation wavelength. Although the addition amount of a filler is not specifically limited, It is necessary to make the photocurable resin into an amount that can be sufficiently cured by a laser beam. In addition, it replaces with a heat resistant filler, and a conductive filler, a magnetic filler, etc. may be mixed with a photocurable resin liquid, and the characteristic of the hardened | cured material obtained may be changed. By adding various fillers, a micro optical device having desired physical properties can be obtained.

  Next, an example of a micro optical device that can be manufactured by the manufacturing method according to the present embodiment will be described. When the polymer optical waveguide 50 as shown in FIG. 3 is manufactured, for example, a portion composed of the clad substrate 53 and the film 56 is first manufactured by the above-described stereolithography method. Subsequently, the core 55 may be formed by filling the internal flow path corresponding to the core groove 52 with the core material 54 and curing it by external stimulation by light or heat. At this time, the core 55 may be evacuated in order to fill the core 55 more reliably. The optical waveguide material is not particularly limited as long as it has high transparency with respect to the wavelength band of light to be used and has reliability adapted to the use environment. Instead of forming the clad substrate 53 and the film collectively, only the clad substrate 53 is formed by an optical shaping method, then the core 55 is filled with the core 55, and then the film 56 is formed. May be.

  FIG. 2 shows a conceptual diagram of a micro optical scanner as an example of a micro optical device. The micro optical scanner 30 is a micro optical device having a function of variably controlling the reflection direction of a light beam by controlling the direction of a small mirror. In the drawing, a base 32 in which a driving force generating part 31 such as an electromagnet is embedded, a mirror surface 33 on the upper end surface, and a driving force such as a permanent magnet at both lower ends provided at positions facing the driving force generating part 31. A mirror part 35 having a passive part 34 is mechanically connected by a spring part 36. Conventionally, in order to manufacture the micro optical device 30 having such a structure, for example, it is necessary to assemble the micro optical device by combining the respective parts after manufacturing the base portion 32, the spring portion 36, and the mirror portion 35 separately. there were. According to the manufacturing method of the micro optical device of the present invention, for example, after the main structure portion of the base portion 32, the spring portion 36, and the mirror portion 35 is manufactured as one body, a necessary electric circuit or the like is incorporated and mirror surface processing is performed. By performing the post-processing, the micro optical device can be efficiently manufactured.

  When manufacturing a photonic crystal, a dispenser 5 and a recoater 6 that contain a photocurable resin liquid 10 capable of forming a high refractive index layer and a low refractive index layer are prepared. Then, for example, a photocurable resin liquid 10 for forming a high refractive index layer may be supplied onto the modeling table 4 to form a coat layer, and light irradiation may be performed in units of projection areas. When a layer larger than the projection area is formed, the irradiation position of the laser beam may be moved by a moving mechanism to irradiate the entire modeling area with light. Subsequently, the photocurable resin liquid 10 for forming the low refractive index layer may be supplied to the modeling table 4 to form the coat layer 9, and light irradiation may be performed in the same manner. By repeating this in sequence, it is possible to obtain one having a refractive index periodic structure with a spatial scale comparable to that of the optical wavelength region. As a method for making the refractive index different, for example, a known method such as changing the kind or content of the ceramic powder can be used. An optical filter can also be manufactured by the same optical modeling method. The number of dispensers and recoaters is arbitrary, and can be determined as appropriate depending on the type of material to be laminated.

  When manufacturing photonic fractals, a photocurable resin liquid containing high-permittivity ceramic powder is supplied to the modeling table to form a coat layer, and batch exposure is performed in units of projection areas based on CAD data. The desired three-dimensional structure can be modeled by repeating the light irradiation and the coating of the photocurable resin liquid.

  Moreover, not only the various micro optical devices themselves can be manufactured, but also a housing structure, another element member, a fitting part with another element member, an engaging part and the like can be formed together. For example, in conjunction with the production of the photonic crystal, a housing structure that accommodates the photonic crystal can be simultaneously produced by the optical modeling method. An optical device can be manufactured more quickly and easily by collectively manufacturing conventional parts that have been manufactured separately. In addition, it is expected that various optical devices themselves and the equipment on which they are mounted will be made smaller and lighter by integrally forming fitting parts and engaging parts with other element members, etc. it can.

  According to the first embodiment, a desired micro optical device is accurately and easily shaped by repeating the light irradiation and the coating of the photocurable resin liquid while switching the cross section handled in the light irradiation process to the adjacent cross section. be able to. Also, it is possible to manufacture a micro optical device having a complicated three-dimensional structure. Further, there is an advantage that micro-optical devices having different shapes can be easily and quickly manufactured only by rewriting exposure data stored in the storage unit 8. Therefore, the present invention is particularly suitable for providing a small amount of various types of micro optical devices and custom-made micro optical devices. In addition, a structure having an overhang structure can be formed easily and quickly. Furthermore, by mixing ceramic powder and various fillers into the photocurable resin liquid, it is possible to increase mechanical strength, heat resistance, etc. A micro optical device having characteristics can be easily manufactured.

[Embodiment 2 (Manufacturing Method of Micro Optical Device Mold)]
Next, a method for manufacturing a micro optical device mold will be described. The basic stereolithography method is the same as that of the first embodiment except for the following points. That is, in the first embodiment, the micro optical device itself is modeled and manufactured by the optical modeling method. However, in the second embodiment, the mold used for manufacturing the micro optical device is modeled and manufactured by the optical modeling method. The point to do is different. Here, the mold includes a female mold and a master mold. Both can be modeled and manufactured by the optical modeling method. Here, the female mold refers to a mold for copying a shape from the mold to manufacture a micro optical device, and the master mold is a prototype of the micro optical device to be finally manufactured, which is a master mold. This is a mold for producing the above-described female mold by copying the shape.

  As a female mold of the polymer optical waveguide 50 shown in FIG. 3, for example, a first female substrate and a second female substrate are bonded to each other so that an inner space of the clad substrate 53 and a film are intended. Those having 56 shapes can be used. In this case, the first female substrate and the second female substrate are provided with positioning means in addition to the joining means. As specific examples of the joining means and the positioning means, a convex portion is provided on the frame body portion or the like of the first female substrate, and a concave portion to be fitted to the convex portion is provided on the second female substrate so that these can be fitted together. A method can be mentioned. Further, an engaging portion such as a pin and an engaged portion that engages with the pin may be provided on the first female substrate and the second female substrate. In addition, an injection port for injecting a liquid for forming a micro-optical device into an internal space formed when the first female substrate and the second female substrate are joined is provided as the first female substrate or / And formed on the second female substrate at the same time as the optical modeling. The core 55 may be formed by filling the internal flow path corresponding to the core groove 52 with the core material 54 in the same manner as in the first embodiment after obtaining the clad portion by the method described later.

  Instead of the method of forming the first female substrate and the second female substrate as a female mold, an integral female mold having an internal space structure of a desired modeled object may be manufactured by a direct optical modeling method. Good. Also in this case, an injection port for injecting a liquid for forming a micro optical device into the internal space is simultaneously formed by an optical modeling method. In addition, instead of the method of forming the injection port at the time of optical modeling, a through hole for injecting a liquid for forming a micro optical device may be opened after modeling the female mold.

  When manufacturing a micro optical device from a female mold, for example, a silane compound having a hydrolyzable group is injected into the female mold and a hydrolysis / condensation reaction is caused by heating or the like. A three-dimensional structure made of polysiloxane whose shape is copied is obtained. A micro optical device can be obtained by peeling the three-dimensional structure from the female mold. When the first female substrate and the second female substrate are joined, they may be separated to obtain a micro optical device. When an integrally formed female mold having a desired space structure of a modeled object is used, the female mold can be cut out with a scalpel or the like, and the micro optical device can be taken out.

  The liquid for forming the micro optical device is a material that satisfies various characteristics such as reliability, dielectric constant, and refractive index required for the micro optical device, and can be cured by an appropriate method after being poured into a mold and filled. There is no limitation to the above example. For example, molten metal may be used, and after filling a thermosetting uncured resin such as an acrylic resin, heat is applied to cure inside the mold, or a thermoplastic resin is melted and filled. Later, the inside of the mold may be cooled to be cured. Moreover, ceramic powder and a filler can also be mix | blended with these resin.

  If the structure of the female mold is complicated, the female mold may not be peeled unless the female mold is destroyed. In such a case, for example, the cured resin constituting the female mold is burned away by heat treatment at 300 ° C. for about 6 hours, or the ultrasonic treatment is performed for about 1 hour by immersing in an organic solvent such as ethanol. The female mold can be destroyed by a method such as swelling of the cured resin constituting the mold. Even if the female mold made of the photocurable resin liquid does not break due to peeling, the number of times that the micro optical device can be manufactured is limited because the mechanical strength is inferior to the mold or the like. . However, unlike a metal mold, a female mold can be obtained easily and quickly, which is effective when trial manufacture of micro optical devices having various shapes.

  When it is desired to use the female die of the micro optical device as a ceramic material, ceramic powder can be blended with the photocurable resin liquid composition by the same method as in the first embodiment. Thereby, the female type | mold of a micro optical device with high mechanical strength compared with the hardened | cured material of the said photocurable resin liquid can be obtained. Thereby, durability of a female type | mold can be improved. Moreover, the female type | mold of a filler containing micro optical device can also be obtained by mix | blending a filler with a photocurable resin liquid composition by the method similar to the said Embodiment 1. FIG.

  The female mold of the micro optical device may be manufactured by a vacuum casting method. The vacuum casting method is a method for producing a replica by using FRP or silicon rubber as a replica mold instead of a mold and pouring resin into the mold in a vacuum. For example, the following manufacturing method can be adopted as the vacuum casting method. First, a master mold of a micro optical device is manufactured by a photocuring method. At this time, an injection port for injecting molding resin or the like from the female mold is also formed at the same time. Next, this is set in a mold. The amount of silicon resin is calculated and weighed according to the size of the mold and the size of the master mold. Thereafter, a curing agent is injected into the silicon resin and stirred to perform preliminary desorption, and this is poured into a mold and vacuum delamination. Thereby, silicon resin can be filled to every corner. In order to accelerate the curing of the silicon resin, heat at a constant temperature is applied for a predetermined time.

  After the silicone resin is completely cured, the mold is removed, a knife is inserted into the silicone resin, the female mold is opened, and the master mold is removed. Thereafter, the amount of molding resin is calculated and measured, and a curable resin such as a two-component curable polyurethane resin is injected from a female injection port made of silicon in a vacuum state. Due to the difference between the vacuum state and the atmospheric pressure, the resin can be spread to every corner of the female internal space structure. Thereafter, it is cured by heating at a constant temperature. After curing, the micro optical device can be obtained by cooling to room temperature and removing the mold. Since silicon resin is used as the female mold of the micro optical device, it is excellent in flexibility. For this reason, damage to the master mold can be reduced. When silicon resin is used as the female mold, generally about 20 to 50 micro optical devices can be obtained. Therefore, it is particularly suitable when a small amount is desired.

  Further, the lost wax method may be used as a method for manufacturing the female mold of the micro optical device. In the lost wax method, first, a master mold of a micro optical device is manufactured by a photocuring method. At this time, an injection port for injecting a resin liquid for forming a micro optical device, molten metal, or the like into the internal space from the female mold is also formed at the same time. Next, a process of applying and hardening a gypsum or ceramic slurry to the master mold is repeated, and this is fired to obtain a female mold of the micro optical device. According to the female mold of the micro optical device manufactured by the lost wax method, it has heat resistance sufficient to pour molten metal, and is particularly suitable for obtaining a metal micro optical device. According to the metal micro-optical device, it is possible to obtain a high mechanical strength.

  In the case of manufacturing a micro optical device from a master mold, for example, after electroforming Ni on the surface of the master mold, the master mold is peeled off to produce a female mold in which the shape of the master mold is copied. Thereby, a female die can be obtained. By using a metallic female mold, the durability of the female mold can be greatly improved. A polysiloxane micro optical device can be obtained by injecting and reacting a silane compound having a hydrolyzable group to this female mold and peeling it from the female mold in the same manner as described above. Alternatively, a molten metal can be poured into a female mold to obtain a micro optical device made of metal.

  According to the second embodiment, the desired micro-optical device mold can be accurately and simply obtained by repeating the light irradiation and the coating of the photocurable resin liquid while switching the cross section handled in the light irradiation process to the adjacent cross section. It can be modeled quickly. In addition, by using the micro optical device mold manufactured by the manufacturing method according to the second embodiment, a micro optical device made of various materials such as a resin material, a ceramic-containing resin material, a metal material, and a ceramic material can be manufactured. it can. For this reason, the micro optical device which consists of a material optimal for various uses can be obtained.

FIG. 3 is an explanatory diagram illustrating an example of a schematic configuration of the optical modeling apparatus according to the first embodiment. The conceptual diagram of a micro optical scanner. Sectional drawing which shows the structure of the polymer optical waveguide which concerns on a prior art example. The perspective view which shows the structure of the micro optical switch which concerns on a prior art example.

Explanation of symbols

1 Light source 2 DMD
DESCRIPTION OF SYMBOLS 3 Condensing lens 4 Modeling table 5 Dispenser 6 Recoater 7 Control part 8 Memory | storage part 9 Coat layer 10 Photocurable resin liquid 30 Micro optical device 31 Driving force generation part 32 Base 33 Mirror surface 34 Driving force passive part 35 Mirror part 36 Spring part 100 Stereolithography equipment

Claims (15)

  By repeating collective exposure with the projection area as a unit, selectively irradiating light to the photocurable resin liquid to form a cured resin layer, and sequentially laminating the cured resin layer to form a three-dimensional structure. A method of manufacturing a micro-optical device, which is characterized.   The method of manufacturing a micro optical device according to claim 1, wherein the three-dimensional structure of the micro optical device has an overhang portion.   The manufacturing method of the micro optical device of Claim 1 or 2 whose said photocurable resin liquid contains ceramic powder or a filler. The method of manufacturing a micro optical device according to claim 1, wherein an area of the projection region is 100 mm ² or less.   The method for manufacturing a micro optical device according to claim 1, wherein the thickness of one layer of the cured resin layer is 10 μm or less.   6. The method of manufacturing a micro optical device according to claim 1, wherein the photocurable resin liquid is cured by light reflected by a digital mirror device.   By repeating collective exposure with the projection area as a unit, selectively irradiating light to the photocurable resin liquid to form a cured resin layer, and sequentially laminating the cured resin layer to form a three-dimensional structure. A method for producing a mold for a micro-optical device, which is characterized.   The manufacturing method of the type | mold for micro optical devices of Claim 7 with which the three-dimensional structure of the said micro optical device has an overhang part. 9. The method for manufacturing a mold for a micro optical device according to claim 7, wherein an area of the projection region is 100 mm ² or less.   10. The method for manufacturing a mold for a micro optical device according to claim 7, wherein the thickness of one layer of the cured resin layer is 10 μm or less.   The method for producing a mold for a micro optical device according to any one of claims 7 to 10, wherein the photocurable resin liquid is cured by light reflected by a digital mirror device.   The manufacturing method of the type | mold for micro optical devices of any one of Claims 7-11 whose said type | mold for micro optical devices is a female type | mold for manufacturing a micro optical device.   The manufacturing method of the type | mold for micro optical devices of any one of Claims 7-11 whose said type | mold for micro optical devices is a master type | mold for manufacturing the female type | mold for micro optical devices.   The manufacturing method of the type | mold for micro optical devices of Claim 12 or 13 whose said photocurable resin liquid contains ceramic powder or a filler.   The micro optical device manufactured using the type | mold for micro optical devices manufactured by the manufacturing method of the type | mold for micro optical devices of any one of Claims 7-14.

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