JP2007059395A - Ion beam implanting device and method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a new system structure for high-current ion beam generation improved in the uniformity of ion beams without requiring additional structuring elements, even if manufacturing cost is reduced and manufacturing processes are simplified. <P>SOLUTION: This ion implanting device is provided with multiple operating modes. The device has an ion source and an extraction means for extracting a ribbon-shaped ion beam therefrom. The ion implanting device includes a magnetic analyzer for selecting ions with specific mass-to-charge ratios to pass through a mass slit to be projected to a substrate. A multipole lens is provided to control beam uniformity and collimation. This ion implating method is provided with a two-path beamline in which a second path incorporates a deceleration system incorporating energy filtering. The method can change over ion implantation modes from the one-dimensional scanning to two-dimensional scanning of a target, and from a a simple path to an S-shaped path with deceleration. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates generally to an apparatus for performing ion implantation. The present invention specifically relates to an apparatus and method for performing high current / medium current ion implantation at different ion energies.

  Ion implantation is a type of bullet process that is used to introduce atoms or molecules, commonly referred to as dopants, into a target substrate, creating a material with useful properties. Ion implantation is a common process used to create modern integrated circuits and is particularly interesting. Ion implantation can also be used for deposited thin films with controlled surface thickness and predetermined surface properties to produce optical or display devices such as flat panel displays.

  FIG. 1 shows a conventional batch injection system, a common type that has been manufactured for about 30 years. The implantation system includes an ion beam source 14 that forms an ion beam 13. The beam 13 is directed to impinge on a group of target substrates 10 mounted on a disc-shaped target substrate holder 11. Although not shown, these elements are housed in a vacuum enclosure. The disc-shaped substrate holder rotates about the axis 12 (preferably parallel to the axis of the beam 13) and moves horizontally, so that the distance R between the axis 12 and the beam 13 is changed. In order to achieve a uniform ion implantation dose, the moving speed is inversely proportional to the distance R.

  In certain applications, particularly those using 300 mm wafers or larger substrates as implantation targets, it is advantageous to generate a ribbon beam ion beam having a high aspect ratio with one direction of the beam cross-section much greater than the other direction. is there. These ribbon beams are widely used in ion implanters and implant systems where a single workpiece, such as a silicon wafer or flat panel display, moves in a single direction through the ion beam. In these cases, the cross section of the ribbon ion beam typically has one direction that is larger than the one direction dimension of the implant base material. As a result, a uniform ion implantation amount can be implanted into the base material by passing the ion beam once or more.

  In these applications, it is desirable for the ribbon beam to move under parallel and careful control of the ion trajectory so as to provide a uniform current density profile suitable for ion implantation into a semiconductor wafer or flat glass panel. It is also desirable that the ion source be an ion beam that is substantially free of undesirable species that may be present in the source source material and / or the material of the ion source itself. Over the years, magnet analysis has been performed as a standard technique in the industry to separate and exclude unwanted species or components from these ion beams. However, for large ribbon beams, this type of magnet analysis and ion beam purification is generally more difficult and costly. In addition to this specific problem, the most common state-of-the-art ribbon beam analysis and transport technology is the detailed review by White et al. “Controlling Uniformity of Parallel Ribbon Ion Beams Up to 24 Inch” ( Applications of Accelerators in Science and Industry 1998, AIP, page 830, 1999), the entire text of which is expressly incorporated herein.

  Among the ion implanters and implant systems that have been on the market in recent years, Nissin Ion Equipment Co., Ltd. (Kyoto, Japan), Sumitomo / Eaton-Nova Co., Ltd. (Tokyo, Japan), and Ishikawajima-Harima Heavy Industries Co., Ltd. , Tokyo) flat panel displays for ion beam implantation are on the market. Many of these systems have little or no ability to eliminate undesirable species of contaminants that are almost always present in the ion beam as they remain in the ion source.

  In contrast, Mitsui Engineering produces commercial injection devices and systems that are mass analyzed (ie beams purified by removal of unwanted species) into flat panel displays with uniform ribbon beams. A moderate resolution that can be implanted but is usually sufficient to remove very large species of contaminants from ion beams of several different commercially useful elemental sources (ie, approximately 10 squared) ) Magnet is used.

  One type of ion implantation system for silicon wafers is typically modeled SHC 80, VIISTA-80, and VIISTA HC ion implantation systems, manufactured by Varian Semiconductor Device Partners (Gloester, MA). This system is shown in FIG. 2 as a modification of FIG. 1 of US Pat. No. 5,350,926, which is incorporated herein by reference. The system includes an ion source 2 for generating an ion beam 1, an analysis electromagnet 3, a decomposition aperture 4 and a second electromagnet 5. The control unit 36 receives beam intensity information on line 36a from the beam recorder and provides control signals along line 36b to control the multipolar elements of the magnet 3 or along line 36c to control the beam variable element. To send. The magnet 3 performs mass analysis on the ion beam. The magnet 5 expands the beam along the dispersion plane using a closed-loop controlled magnetic field to maintain beam uniformity. The result is a ribbon-like ion beam 6 incident on the target 7. Further details of the system of FIG. 2 are described in the abbreviation 926 patent.

  Due to the complex interaction between the ion beam and the magnetic field applied for beam expansion, this method poses several technical, practical and process related problems and increases the overall manufacturing cost of such a device. In addition, the operation procedure for performing ion implantation becomes more complicated. In particular, the beam path through this system is relatively long, and at low energies and high beam currents, it is possible to control ion beam uniformity and angular variations within the beam with the accuracy required by certain commercial processes. It becomes increasingly difficult.

  Furthermore, it is desirable to obtain ion milliamp currents with energy as low as 200 eV. The maximum beam current is obtained by decelerating the ion beam just before the target. However, this implementation has several known disadvantages. One disadvantage is that the trajectory fluctuates due to deceleration and the angular error increases, making it more difficult to control the uniformity of the ribbon beam. Another disadvantage is that some ions are neutralized by the charge exchange process with the remaining gaseous atoms and molecules and as a result are not slowed down. These ions penetrate more into silicon than intended, and this deep penetration of certain dopant ions interferes with the intended process, and also maintains constant conditions daily because it depends on the system pressure in the vacuum system. And is not sufficiently constant to allow the degree of contamination. This problem is known and solutions are proposed in US Pat. Nos. 6,489,622 B1 and 6,710,358 B1, which are incorporated herein by reference.

  As a result, these types of ion implantation systems are often not possible solutions for performing sequential mode implantation with high current and high uniformity ion beams that can be controlled in shape and size. There is a need in the integrated circuit industry to provide a new system configuration for high current ion beam generation with improved uniformity without the need for additional components even if manufacturing costs are reduced and manufacturing processes are simplified.

  One aspect of the present invention is an ion implanter comprising an ion source, an extraction assembly for extracting an ion beam through a branch extraction optics, a mass spectrometry magnet and a beam density controller. The injection device further includes a target chamber on which a target for injection is placed. Illustratively, the target is a semiconductor wafer or a flat panel display. The extraction optics has a convex shape to create a beam that branches when the beam exits the extraction optics. The ion beam is shaped by branch extraction optics and a beam density controller, but has a relatively high and narrow cross section with the longer direction lying in the non-dispersed plane of the magnet. As the beam continues to move, the beam becomes increasingly higher as bifurcation continues so that the ion beam reaches a target wafer and is high enough to cover all of the wafer diameter. The ion implanter further includes a Faraday beam current measurement device installed near the target wafer for scanning the ion beam over a long lateral direction to measure the uniformity of the beam and transfer the measurement data to the beam density controller. provide feedback.

  In another aspect of the present invention, a single dipole magnet is provided, and the ion beam is subjected to mass analysis while the principal axis direction continues to branch from the ion source in the direction of the dipole magnetic field. The embodiment can additionally use a lens to collimate or collimate the beam by stopping the branching of the ion beam once the required major dimension size is reached. A suitable lens can use a magnetic or electric field and must produce a quadrupole field so that the high aspect ratio beam path roughly matches the ribbon shape of the ion beam.

  In certain situations, such as using a high current, low energy beam, it may not be possible to ensure that the ribbon beam is sufficiently uniform. In another embodiment of the present invention, an ion source that generates a ribbon-like ion beam, a magnetic mass analyzer (magnetic mass analyzer), a focusing system that forms the beam, and a matrix such as a silicon wafer or flat panel is passed through the ion beam. And machining locations that can be moved mechanically. As the ion beam leaves the mass analyzer, the first lens can be manipulated in two ways, which can be a magnetic multipole lens that includes an array of coils disposed on a pair of ferromagnetic supports. In the first mode, the current in the coil of the multipole lens is controlled to control the current density of the beam profile in response to the measurement of the ion beam profile. The ion beam can be continued as a ribbon beam whose major dimensions exceed the dimensions of the matrix. The matrix is then moved through this ion beam along a single path one or more times to inject a uniform dose of the desired ions onto the matrix surface. In the second mode, the current in the coil of this first multipole lens is excited to produce a quadrupole magnetic field that focuses the ribbon ion beam to its main dimension, thereby causing either dimension of the matrix. A smaller beam spot in both lateral directions is generated at the downstream point. Then, the base material moves in a two-dimensional reciprocating path through the ion beam so that a uniform ion implantation amount is implanted by a continuous strip-shaped implantation partially overlapping the surface.

  The second mode is a high current, low energy beam (e.g., energy lower than 3 keV, 1 mA under conditions that make space uniformity and other effects make it more difficult to achieve positive current uniformity in the beam. Is likely to be advantageous when using larger). The first mode requires slower movement and is likely to result in higher throughput with energy at which control that satisfies the ion beam profile is achieved. In either manner, the current in the multipole lens can reduce the current density profile of the beam, even at low energy, even if this control is insufficient to ensure uniform injection in a single pass of the ribbon beam. Can be adjusted to fine tune. In the second mode, this would be worth approximating a smooth Gaussian beam profile. If the beam profile is not smooth, the method of passing the base material through the ion beam in certain increments will cause fringes that can detect variations in the amount of ion beam implantation in the base material.

  In a further aspect of the present invention, a second lens is provided after the first multipole lens, and its function is to make the ion beam parallel. This is particularly important in the first mode of operation, i.e. in the case of ribbon beams where otherwise systematic variation of the injection angle will occur across the surface of the matrix. It is also important to reduce the range of angular variation of the ion beam in the second manner.

  A further aspect of the present invention provides an optional means of ion beam deceleration using a curved ion beam path, but for applications where ions are implanted in the form of a ribbon beam or a 2D scanning beam, a high beam current at low energy. It is a means for transmitting high energy pollutants while removing them with a filter. According to this aspect of the invention, the beam is curved at a slightly different angle from the standard conditions, and the ion beam is a means using a set of electrodes that superimposes two opposite lateral components of the electric field in a deceleration field. Decelerate and deflect the ion beam into an S shape, deflecting each at an angle of at least 10 degrees to give a lateral displacement several times the width of the ion beam. By providing a beam stop on either side of the beam, the only ions transmitted are those with the correct charge and energy, and contaminants such as high energy neutral atoms can be removed.

By the apparatus and method of the present invention,
1. Generating a ribbon beam for ion implantation that is efficiently mass analyzed with a single analysis magnet in a short, relatively simple beam line with high resolution;
2. Providing a second mode of operation in which the beam is smaller than the target of implantation, and the target is scanned in a 2D pattern so that uniform implantation is achieved;
3. Controlling the variation of the ion beam parallelism and implantation angle across the target surface;
4). Providing a means to slow down the ion beam of either implantation mode in a scheme that removes normal contamination with high energy neutral atoms;
5. It is possible to provide a means for changing and controlling the current density in the ion beam.

  These and other objects and advantages of the present invention will become apparent to those skilled in the art from the following detailed description.

  FIG. 3 is a perspective view of the first embodiment of the ion implantation system of the present invention. The system includes an ion source 102 that produces an ion beam 100 emanating from branched extraction optics similar to that shown in FIG. As will be appreciated by those skilled in the art, these components are housed in a vacuum enclosure (not shown). The magnet 414 includes upper and lower coils 120, 121 and a yoke 110 having an entrance aperture 164 and an exit aperture 166. The magnet is bent with an arc of about 90 degrees. The cross section of the ion beam is relatively high and thin, and the longer direction of the cross section is in the non-dispersed surface of the magnet 110. The ion beam is slightly branched as it exits the extraction electrode, and as the beam travels along the beam path, it becomes higher as the beam light continues to diverge and the beam becomes more likely to be a target (e.g., a semiconductor wafer). As it approaches, the major dimension is larger than the implantation target size, ie 200 or 300 mm for silicon wafers. The collimator lens 200 stops branching and collimates the beam while controlling the change in injection angle across the target injection surface.

  The analysis magnet of FIG. 3 has a central passage for a beam having an upper portion and a lower portion that are parallel from the incident aperture 164 to the outgoing aperture 166. Therefore, the magnet cross section taken along the line A-A 'in FIG. 3 is the same at any point along the radius of curvature of the magnet. However, the ion beam is branched. In the second embodiment, the magnet configuration is changed as shown in the three cross-sectional views of FIGS. 4a, 4b, and 4c, and the height of the beam path through the magnet increases as the beam expands. In particular, the height of the central passage 160 is the smallest, as shown in FIG. 4a, which represents the cross section closest to the incident aperture 164 of the magnet. As shown in FIG. 4c, which represents the cross section closest to the exit aperture 166, the height of the central passage is the largest, and as shown in FIG. 4b, which represents the cross section between FIGS. It is. As a result, the beam occupies a large fraction of the volume in which the magnetic field is generated, and less power is wasted in generating the unused magnetic field.

  A preferred embodiment of the mass spectrometry magnet 414 is shown in the perspective view of FIGS. 6 and 11 and in the cross-sectional views of FIGS. 4a to 4c. The magnet includes an arcuate yoke 110 of ferromagnetic material and upper and lower coils 120 and 121. The yoke and coil have a radius of curvature in the range of 0.25 and 2 meters and surround the ion beam path that is curved with an arc of curvature in the range of about 45 degrees to less than about 110 degrees. The yoke generally has a rectangular cross section with an upper and lower portion located at the same distance above and below the intended beam path and a vertical side that encompasses the spatial volume surrounding the intended beam path. Coils 120 and 121 have a saddle shape (also called a bed frame shape), which is a mirror image of an intermediate plane. The magnetic field required to curve the ion beam is generated by the current passing through these two coils. The direction of the magnetic field is generally perpendicular and the field lines end at the upper and lower portions of the yoke perpendicular to the inner surface.

Coils 120 and 121 each include one or more turns of conductive wire that is wound to fill a rectangular cross-sectional envelope following the three-dimensional path. As shown in detail in FIG. 11, the path of the upper coil 120 includes the following multipole segments.
1) A segment 120a that begins to the right of the intended beam axis at the entrance of the yoke 310, takes an arcuate path approximately parallel to the intended beam axis to the exit of the yoke and passes between the side wall of the yoke and the intended beam path.
2) A segment 120b that curves upward about 90 degrees.
3) A segment 120c arcing approximately 180 degrees to the left near the exit of the yoke and beyond the top of the beam path (this segment can optionally be subdivided into two arc segments and one straight section)
4) 120d curved about 90 degrees toward the yoke exit
5) A segment 120e that takes an arcuate path approximately parallel to the intended beam axis that passes between the side wall of the yoke and the intended beam path in the opposite direction of the intended path of the beam, starting from the yoke exit to the entrance of the yoke.
6) A segment 120f that curves upward about 90 degrees.
7) A segment 120g arcing approximately 180 degrees to the right near the entrance to the yoke and beyond the top of the beam path (this segment can optionally be subdivided into two arc segments and one straight section)
8) A segment 102h that curves 90 degrees toward the entrance of the yoke and connects at the start of the coil envelope path to complete the circuit.
Thus, the lower coil is a mirror image of the upper coil.

Thus, the pair of saddle coils is
(I) imparting a bending direction to the two rounded inclined ends of one annular coil facing the bending direction with respect to the two rounded inclined ends of the other annular coils in the array;
(Ii) providing each of the two coils with a central open space channel via a closed loop cavity volume, wherein the central open space channel extends from each of the inclined loop ends to the other end beyond the linear dimension distance of the array; Stretched to
(Iii) a pair of arranged rounded inclined loop ends disposed within the interior space region along the inner surfaces of two opposing walls of the arcuate yoke configuration, the two open ends of the arcuate yoke configuration From each of the clubs
(Iv) the intent of the continuous ribbon ion beam as it travels in the curvilinear central axis and in the interstitial space existing between the two looped coils located in the internal space of the arcuate yoke configuration. It acts as a boundary that limits the arcuate path.

  A rectangular envelope along the path thus described is filled by winding a predetermined number of conductor turns along the path. The formed coil can optionally be immersed in a resin to form a rigid body. The lower coil is formed in the same manner as the upper coil. Both coils can be used in series with one current source or two current sources, one for each coil. The arcuate portion of the intended beam path is encompassed at the top and bottom positions of the iron portion of the yoke by the upper and lower coil segments. The effect of current passing through the coil is to generate a substantially uniform vertically oriented magnetic field within the enclosed volume bounded by the top and bottom of the coil and yoke, where the magnetic field is near zero from the yoke. To provide a region at the inlet and outlet that rapidly decreases with distance. The magnetic field as a whole is effective in deflecting the ribbon-like ion beam while removing contamination through the aperture along the intended path. The central plane and non-dispersing surface of the magnet 214 extend from the ion source to a target perpendicular to the dispersing surface.

  A preferred embodiment of a collimator lens 200 is shown in FIG. 12, which is filed on March 24, 2004, US patent application Ser. No. 10 / 807,770, currently US Patent Application Publication No. 2005/0017202, “ FIG. 7 is a modification of FIG. 7 of “Electromagnetic Regulator Assembly for Adjustment and Control of Current Uniformity of Continuous Ion Beams”. This application is incorporated herein in its entirety. As shown in FIG. 12, the collimator lens 200 includes two ferromagnetic rods 1120 and 1220, each of which is somewhat longer in linear distance than the X-axis dimension of the traveling ion beam intended for control, in parallel with each other. Oriented to be located at a preselected gap distance 1144. Each ferromagnetic rod 1120 and 1220 serves as a linear indicator rod, but a plurality of individual wire coils 1122 and 1222 are wound at right angles at different positions in a predetermined number around the rod and independently. A continuous body arranged in the axial direction of coil windings separated and adjacent to each other is created as a whole.

  The collimator lens components provide variable current (amperes) of electrical energy through independently adjacent aligned wire coils 1122 and 1222 disposed at right angles along the fixed length of the indicator rods 1120 and 1220. Means for responding to the request (not shown). Given an appropriate current flow of electrical energy, each adjacently placed and energized wire coil 1122 and 1222 generates an adjustable gradient field of limited width that extends independently orthogonally; A plurality of limited width adjacent and expanding gradient fields jointly combine to form an adjacent magnetic field, and the strength of each of the limited width magnetic fields within the adjacent magnetic field can be individually varied by changing the current. The gradient field can be adjusted freely and can be adjusted over the adjacent magnetic field.

In particular, as shown in FIGS. 2 and 3 of the abbreviation 770 application, and as described in connection with FIGS. 6 and 7 below, windings 1122 and 1222 are intended to alter the shape and / or uniformity of the ion beam. Can be selectively excited. Therefore, the current honeyness profile of the ion beam can be modified to produce a beam profile at the base material that is close to any one of the following profiles:
1) A uniform profile that extends beyond the dimensions of the matrix 2) A Gaussian or other desired profile 3) A linearly varying profile that extends beyond the dimensions of the matrix 4) Any other useful for the ion beam process Furthermore, in the case of Gaussian beam profiles and other profiles where measurements such as half width are significant, the half width of the beam profile can be controlled.

  In a preferred embodiment of the present invention as shown in FIG. 5a, the ion implantation system includes an ion source 410, extraction optics 412, an analysis magnet 414, a focusing system 430, a controller 440, a target chamber 450 and a wafer transfer system 475. . The ion implantation system also includes a beam dump 505 that absorbs unwanted ions, and a Faraday beam profile measurement system 420 located in the target chamber 450.

  The ion source 410 is preferably a Bernas type ion source, and the extraction optics is slightly convex. The mass spectrometry magnet is preferably the same as the system of FIG. 3 described in detail in the paragraphs [0022] to [0025] above. The focus system 430 further includes a first set of multipole magnets 402 and a second set of multipole magnets 404. Each set of multipole magnets has a configuration similar to that of the collimator lens 200 of the system of FIG. Such multipole magnet configurations are described in further detail in paragraphs [0026]-[0028] above and in the above-cited US patent application Ser. No. 10 / 807,770. The operation of the focusing system is described in paragraphs [0035] to [0039] below. The target chamber 450 (FIG. 5a) also includes an electrostatic chuck 471 and a transport platform that moves in two directions. In FIG. 5a, these directions are typically up and down with respect to the central plane (ie inside and outside the page) and left and right with respect to the non-dispersing side (ie up and down the page). Wafer transfer system 475 further includes load locks 474a and 474b and a robot arm 475 that moves the wafer from the load lock to the transfer mechanism for ion implantation and the transferred wafer from the transfer mechanism to the load lock.

  Further details of a suitable mechanical two-dimensional scanning system for the matrix are shown in FIG. 8, adapted from FIG. 10 of US Patent Application Publication No. US2005 / 0173656 A1, which is incorporated herein in its entirety. . The electrostatic chuck 471 for the base material 460 is mounted on an arm 472, and the arm pivots around a horizontal axis 490, which is 900 mm from the center of the base material and parallel to the beam axis 501 in this example. The arm rotated to position the chuck on one side of the ion beam path, the second axis of rotation pivots the chuck to a horizontal position, and the robot arm 475a attaches or detaches the base material from the load portion 474a or 474b. . Once the base material is placed on the chuck, the chuck rotates about the horizontal axis 490 until the normal of the base material surface is at a predetermined angle to the beam axis 501 (usually 0 degrees).

  When a ribbon beam is used, the height of the arm is adjusted by sliding the mechanism along a sliding seal 480 by a linear motor (not shown), and the trace of the base material is collected on the beam, at which point the arm Can be rotated around the axis 490 at a controlled speed, passing the base material back and forth as needed through the ribbon beam and implanting the desired ion implant into the base material.

  To perform injection in a two-dimensional scan, the arm is moved over the sliding seal 480 to the bottom of its movement, and its height passes through the beam (this is to inject a uniform injection volume into the matrix). (If the beam is focused on a point smaller than the base material), the beam is gradually increased as the arm is swung around to pass the base material into a curved zigzag pattern.

  When operating the system of FIG. 5a, a Bernas type ion source 410 is used to create an ion beam 400 that is much higher than the width. A set of extraction optics 412 is used to apply a relatively negative potential on the first electrode to extract the beam. The generated beam has a light path that is slightly branched with respect to the non-dispersed surface of the magnet 414. The result is a ribbon-like beam with a rectangular cross section with longer dimensions located in the non-dispersed plane. The ion beam is directed toward a mass analysis magnet 414 that selects the desired ions for the appropriate charge to mass ratio. The desired ions then traverse a first set of multipole magnets 402 that are controlled either via open or closed loop operation via feedback from the Faraday beam profile measurement system 420. The first set of multipole magnets 402 is operated in response to beam profile measurements by the Faraday beam profile measurement system 420 to ensure that the amount of total ion implantation rate per height is uniform at the point of use or target wafer 460. Control beam size and current density profile to ensure. To do this, a coil of a first set of multipole magnets creates an entire quadrupole field with controllable regions superimposed on the gradient field. After the ion beam passes through the first set of multipole magnets 402, it continues along the beam path to the second set of multipole magnets 404. The coils of the second set of multipole magnets can also be used to generate a quadrupole field suitable for the parallel of the ion beam in the non-dispersed plane of the analysis magnet 414, as will be described below, thereby diverging the ion beam. Or convergence can be offset. The coils of the second set of magnets can be further used to overlay controllable regions of the tilt field, reducing angular variations in the beam, including variations generated by the first set of multipole magnets 402. All other paths of beam ions interspersed with beam dumps 505 of appropriate material so that the desired ions pass through selected gaps between the poles of this lens and only the desired ions reach target chamber 450. Disturb. The target 460 can be mechanically scanned in a direction perpendicular to the beam and in-plane to provide a uniform implantation range of the target.

  The ion implantation system of FIGS. 5a and 5b can be operated in the two manners shown in FIGS. 6 and 7 show the system of FIGS. 5a and 5b in a highly simplified form to facilitate understanding of this aspect of the invention. In particular, only the mass spectrometry magnet 414, the focus system 430, the controller 440 and the target 460 with the first and second sets of multipole magnets 402, 404 are shown.

  In the first mode of operation shown in FIG. 6, the ion beam can continue as a ribbon-like beam whose major dimensions exceed the dimensions of the matrix. Accordingly, the focus lens 430 is operated in a first manner so that the ion beam can be expanded until it is larger than the target 460. The current in the coil of the second set of multi-pole magnets 404 is controlled in response to the measurement of the ion beam profile and controls the current density in this beam profile. In particular, the current is used to collimate the ion beam, and the ions in the beam become substantially parallel as the beam is directed to the target 460 in the chamber 450. The matrix is moved one or more times through the ion beam along a single path to implant the desired uniform ion implant volume on the surface. Illustratively, the matrix can simply move laterally through the beam, as shown by the arrows in FIG. However, in the embodiment shown in FIGS. 5a and 5b, it travels an arcuate path, where the current density in the beam is proportional to the local scan speed of the target matrix, which is the distance from the pivot axis of the arm. The beam uniformity needs to be controlled to be proportional to

  While such ribbon beam implantation operations provide high throughput in ion implantation operations, for example, ensuring sufficient ion beam uniformity at the high current and minimal energy required for the manufacture of modern integrated circuits is important. It is very difficult if not impossible. In particular, when the current is larger than 1 mA and the ion energy is smaller than about 3 keV, even if care is taken to establish space / charge neutralization, the space beam effect causes large confusion in the ion beam, and semiconductor wafer ion implantation It is impossible to guarantee a ribbon beam having the required uniformity.

  In this situation, the focus lens system 430 is operated in the second manner illustrated in FIG. 7 to focus the ion beam on a beam 701 having a smaller cross section than the implantation target. More specifically, in the second mode, a current in the coils of the first set of multipole magnets 402 is excited to generate a quadrupole magnetic field that converges the ribbon ion beam to its main dimensions, thereby causing the target mother A beam point is generated at a downstream location where both transverse dimensions are smaller than either dimension of the material 460. Again, the second style of multipole magnet 404 is used to reduce the range of ion beam angular variation. In the second mode of operation, the matrix moves in a two-dimensional reciprocating path through the ion beam so as to inject a uniform dose of ions on its surface. Illustratively, the target scans up and down with respect to the central plane and across the non-dispersed surface to the left and right to ensure that all semiconductor wafer targets of reduced size are illuminated.

  Advantageously, two modes of operation of the multipole lens are achieved by applying different currents to the individual coils of the set of magnets 402 and 404 under the control of the system controller 440. At the same time, the controller also controls the operation of the moving platform to provide one-dimensional or two-dimensional scanning.

  In the preferred embodiment of the present invention, separate ion beam paths 501 and 502 are used after the analysis magnet, as shown in FIG. 5a. Such a path facilitates the delivery of a higher beam current with lower energy for ion implantation in either mode of operation of the focusing system 430. It can be seen that the analysis magnet is adjusted to deflect the ion beam 5 degrees from its initial axis 501 to deflect it to the axis 502 and incorporate the S-curve to realign with the axis 501. In the path passing along this axis, the ion beam is decelerated to a predetermined energy in the range of 3% to 20% of the initial energy. To effect this change, the first set of multipole magnets 402 is moved in orbit as indicated by arrow 403 to be centered on the modified beam axis 502 so that the ion beam is in the second set of multipoles. A second beam channel is provided as it passes through the magnet 404, where the direction of the magnetic field is conveniently reversed from that direction to the axis 501. Other methods of providing an appropriate second beam path and variations of this method are also depicted.

  After passing through these focus devices, the beam passes through a short region of the accelerating electric field before being decelerated, as shown in more detail in FIG. The ion beam paths 901 and 902 in FIG. 9 correspond to the ion beam paths 501 and 502 in FIG. 5a. The first set of electrodes 910 defines the initial energy, the second set of electrodes 911a-c is a larger negative voltage for suppressing electrons, and the third set of electrodes 912a, 912b are at an intermediate positive potential. The fourth set of electrodes 913 is at the final potential. Illustratively, in FIG. 9, a 10 mA beam of boron ions initially moves at 4 keV. The suppression potential is about −3 keV and the potential difference between the electrodes 510 and 513 is 3800V.

  The function of the negative suppression potential at the electrodes 911a-c is to prevent the electrons in the ion beam from being accelerated in the ion deceleration region, which is well known. Following the suppression region, a positive bias electrode 912a is placed on one side of the ion beam. The electrode has the dual function of generating a deflection field and raising the potential on the beam axis, thereby partially decelerating the beam. The beam is deflected about 20 degrees to the left and then passes through a regulation aperture formed by electrode 910r. The amount by which the beam is deflected can be adjusted and controlled by changing the suppression potential of the electrodes 911a and 911b. After passing through this aperture, the beam is greatly decelerated while being deflected to the right and merged into the initial beam path. The final beam energy is defined by the potential between the ion source and the implantation target. The final electrode 913 is at the potential of the implantation target, but is shaped to produce a deceleration as well as a deflection field. The electrode 913m is movable as indicated by the arrows, and its position adjustment is useful in ion beam adjustment to accurately fuse with the initial beam axis 901, but with much less initial energy. Neutral atoms in the ion beam that reach the deceleration structure are collected in the neutral beam dump without being deflected. Ions that undergo charge exchange while passing through this S-curved structure will also almost exit the beam. Upon exiting the structure of FIG. 9, there is only a short small area where ions can be charge exchanged in a way that could reach the wafer.

  Experimentally, a) the energy contamination level in a 200-500 eV ion beam will be less than 0.05%, b) the maximum energy present in this beam is 10-20 times the final energy of the beam Even when decelerated from energy, it does not exceed twice the final energy, c) The beam current of an almost pure low energy beam turns out to be many times greater than what is currently available with other types of implanters did.

  The use of this S-curve, which is slowed down in the second mode of the beamline, allows a two-dimensional scan to be used to obtain a uniform implant dose, while at the same time precise control of ribbon beam uniformity is no longer necessary. Means that.

  In another embodiment of the invention, an electrostatic lens is used instead of a magnetic lens in the focusing system 430 to collimate or focus the ion beam. An example of such a lens is shown in FIG. 10, adapted from FIG. 2 of US Patent Publication No. 2004/0262542 A2, which is incorporated herein. The first pair of electrodes 1061 and 1062 establish a first voltage gap, and the second pair of electrodes 1063 and 1064 establish a second voltage gap. A slot shaped aperture in the electrode allows the ion beam 1048 to pass. As described more fully in paragraphs [0021] and [0022] of the abbreviation 542 patent, ions entering the lens by the action of the electric field created by the electrodes exit the lens with a trajectory substantially parallel to axis 1048. It will be.

  The ion implantation system of the present invention has significant advantages over prior art ion implantation systems. Inline mode injection is preferred over batch mode because of throughput considerations and reduced risk of product loss in the event of machine failure. The serial ion implantation system also has a much simpler and less expensive wafer transfer system, so the development, manufacturing and operating costs are lower than the batch mode system. By implementing the system design and arrangement of the present invention, equipment suppliers can challenge the serial equipment for injection applications with reliable and competitive process control capabilities. Furthermore, the novel arrangement now taught by the present invention must be able to achieve significant success, but requires relatively few parts compared to other series high current methods. Recently, batch-type devices have entered the high current injector niche, but the present invention provides a great product for the semiconductor industry, especially for low energy and 300 mm applications.

  In addition to ion implantation, the process and apparatus of the present invention can be used to perform film coating or other types of surface processing applications. Because the beam is irradiated as a branched beam with a small branch angle, a highly uniform beam density is used for implantation or particle deposition to achieve a higher level of uniformity when the expanded beam reaches the target surface. Provided for. As a result, the present invention has applications for vapor deposition for optical filter coating formation on the surface or for different types of surface processing functions on glass, metal or a wide variety of materials.

  While this invention has been described in several embodiments, it should be understood that such disclosure is not to be construed as limiting. Various changes and modifications will no doubt become apparent to those skilled in the art after reading the above disclosure. Accordingly, the appended claims are intended to be construed to include all changes and modifications that fall within the spirit and scope of the present invention.

1 is a functional block diagram of a prior art batch ion implantation system in which a rotating disk holding an implantation target provides one direction of motion and movement of the disk provides a second direction. FIG. 1 is a functional block diagram of a prior art ribbon beam injector where the injection target moves through the ribbon beam in one direction. FIG. 1 is a perspective view of a ribbon beam system according to the present invention in which an ion beam branches through an analysis magnet and is collimated by a lens. Figure 2 shows a continuous cross-sectional view of a magnet adjusted to fit an expanding ion beam. Figure 2 shows a continuous cross-sectional view of a magnet adjusted to fit an expanding ion beam. Figure 2 shows a continuous cross-sectional view of a magnet adjusted to fit an expanding ion beam. Two multipole lenses follow the analysis magnet and the beam has two possible paths, one path being decelerated to reach an ultra-low energy without contamination by high-energy neutral atoms or ions S 1 illustrates one embodiment of the invention through curvature. FIG. 5b is a perspective view of FIG. 5a showing a scanning system in which the target matrix can move in two dimensions through the beam path. FIG. 6 represents the use of the embodiment of FIG. 5 to generate a narrower beam higher than the target. 6 represents the use of the embodiment of FIG. 5 to generate a point beam smaller than the target. Figure 2 shows an apparatus for scanning a target through an ion beam in either one or two dimensions. 6 represents details of the S-shaped deceleration region used in the system of FIGS. 5a and b. An alternative prior art electrostatic lens that can be used in the present invention to control ion beam parallelism is shown. Detailed configuration of a suitable magnet coil is shown. The detailed structure of a multipole lens is shown.

Claims (20)

An apparatus for implanting a target with ions,
An ion source for generating an ion beam;
A magnetic mass analyzer;
Means for traversing the target in two independent transverse directions through the ion beam;
Focusing means independent of the mass analyzer for controlling the shape of the ion beam and freely generating one of two differently shaped ion beams;
A first shape effective to implant a uniform amount of ions by traversing the target through the beam in a single direction, the continuous unscanned ribbon beam having a dimension greater than that of the target;
A second continuous unscanned beam that is substantially smaller than the target in both transverse dimensions and effective to implant a uniform amount of ions by traversing the target through the beam in a two-dimensional pattern. And the shape of
A device comprising: The apparatus of claim 1, wherein the ion source produces a long dimension and a short dimension beam, and the ion beam branches at the longer dimension. The apparatus of claim 1, wherein the magnetic field in the mass analyzer is generally aligned with the long dimension of the ion beam. The apparatus of claim 1, wherein the focusing means is effective to control and substantially eliminate variations in the incident angle of the ion beam across the surface of the target. The focusing means comprises
A uniform profile that extends across the dimensions of the workpiece,
A Gaussian profile or other desired profile with a half width less than half the size of the workpiece;
A linearly varying profile extending across the dimensions of the workpiece;
Any other predetermined beam profile valid in the ion beam processing process;
The apparatus of claim 1, wherein the apparatus is effective to control the current density profile of the ion beam in one direction so as to freely generate a profile approximating one of the two. The magnetic mass analyzer is
An arcuate yoke including a path for the ion beam;
A set of mirror-symmetric saddle-shaped coils extending through the yoke along the ion beam path;
The apparatus of claim 1, comprising: Each saddle-shaped coil in the aligned array is
A first curved segment that is generally parallel to the curved segment of the beam axis that is tangential to the central plane of the beam axis;
A second curved segment that bends approximately 90 ° from the central plane of the beam axis;
A third curved segment that warps 180 ° along the entire beam axis;
A fourth curvilinear segment of about 90 ° that is generally parallel to the second segment;
A fifth curved segment parallel to the curved beam axis segment and facing the first segment;
A sixth segment that bends 90 ° from the central plane of the beam axis;
A seventh segment that turns 180 ° along the entire beam axis;
An eighth segment rotated 90 ° and connected to the first curvilinear segment;
The apparatus of claim 6, comprising eight connected conductive segments in a continuous series comprising: The magnetic mass analyzer is
An arcuate yoke including a path for the ion beam, the path having a radius in the range of 0.25 meters and 2 meters, and a curved arc extending from at least about 45 degrees to about 110 degrees or less; The arcuate yoke is at least partially formed of a ferromagnetic material, has a fixed size and a substantially rectangular cross-section, and two separate open ends that serve as an inlet and outlet for the moving beam, An arcuate yoke with an internal spatial region of determinable deposition that serves as a spatial path for the moving beam;
A set of mirror-symmetric saddle-shaped coils set in parallel as an aligned array;
With
(A) Each separate coil of the set of the aligned array is an elongate complete loop with two rounded and inclined loop ends, each of which is bent in the same direction and has multiple conductive Two sets of sex segments connect the loop ends on either side of the interior space region;
(B) the aligned array of two saddle-shaped coils paired in mirror symmetry,
(I) the two rounded and inclined ends of one loop-shaped coil opposite to the bending direction for the two rounded and inclined ends of the other loop-shaped coil in the array Presents the bending direction for
(Ii) providing a central open spatial channel through the closed loop cavity volume at each of the two coils, the central open spatial channel from each of the inclined loop ends of the array; Stretch to the other at the linear dimensional distance,
(Iii) a pair of aligned rounded inclined loop ends extending from each of the two open ends of the arched yoke structure and adjacent to each other of the arched yoke structure; Disposed in the interior space region along the inner surfaces of two opposing walls;
(Iv) a limiting boundary for the curvilinear central axis and a gap between the two loop-shaped coils in which the continuous ribbon ion beam is disposed in the internal space region of the arched yoke structure Acts as an intended circular path for it as it moves in space,
The apparatus of claim 1. The focusing means comprises a set of multipole lenses each energized by a set of controllable power supplies;
The first multipole lens generates an overall quadrupole electric field with multiple controllable regions of field gradient that is effective to control both the transverse size and current density profile of the beam Can operate in response to measurements of the beam profile to control the size and current density profile of the ion beam at the target,
The second multipole lens is operable to generate a quadrupole electric field suitable for collimation of the ion beam in the non-dispersive plane of the analyzer magnet, canceling the divergence or focusing of the ion beam; Additional controllable regions of field gradient can be superimposed to reduce beam angular changes, including the second multipole produced by the first multipole lens.
The apparatus of claim 1. Each multipole lens comprises two multipole coil arrays arranged parallel to each other on either side of the ion beam, each wrapped independently of the ferromagnet and pre-selected on the support rod A straight support bar comprising a plurality of wire coils arranged adjacent to the position;
A set of power supplies for passing irrelevant and simultaneously variable current electrical energy through respective adjacently disposed wire coils on each of the support rods of the first and second multipole arrays; Thus, each adjacently arranged and energized wire coil extends irrelevantly and simultaneously with a limited width of right angle between the first and second multipole coil arrays. Generating individually adjustable magnetic field gradients, wherein a plurality of adjacently extending magnetic field gradients of limited width are continuous magnetic fields between the first multipole coil array and the second multipole coil array , And each magnetic field gradient of a limited width within the continuous magnetic field can be freely and individually modified simultaneously to produce an adjustable and controllable magnetic field gradient on the continuous magnetic field. of And Tsu door,
The apparatus of claim 1, each comprising: A method of controlling a mechanical scanning system in an ion implanter for implanting the ion beam and a desired uniform amount of ions into a target comprising:
Providing a mass-analyzed continuous ion beam that expands in a ribbon shape;
A first multipole lens effective to locally focus or defocus the ion beam in a plurality of adjacent zones along its major dimension using a plurality of controllable sources of current or voltage Providing steps, and
Providing means for moving a target to be implanted through the ion beam in two generally orthogonal directions, either of which may optionally be arc-shaped, at a desired implantation location;
Providing means for measuring the size and current profile of the ion beam along its major dimensions to provide a means at or near the desired implantation location;
Controlling the size of the ion beam in at least one of a first mode and a second mode;
Adjusting the multipole lens so that the ion beam expands until its major dimension exceeds that of the implanted target, and the ribbon beam to achieve a profile suitable for uniform implantation. Further adjusting the multipole lens to control current uniformity and then passing the target through the ribbon ion beam one or more times back and forth along a single direction. 1 mode,
Adjusting all zones of the multipole lens to focus the ion beam, thereby interrupting its divergence and making it part of the size of the implanted target; Passing the target through the ion beam several times back and forth along a continuous path effective for implanting ions in front of the target; and
A method comprising: The method of claim 11, further comprising adjusting the multipole lens to control the current profile of the spot beam formed to have a desired profile in the second mode. Providing a second lens between the first multipole lens and the implantation location, and minimizing the variation in the angle of incidence of the ions of the beam across the implanted surface of the target. And the step of controlling the excitation of the second multipole lens. The third mode is
Manipulating the analyzer magnet to increase or decrease deflection from that used in the first mode of operation, thereby slightly diverting the beam path from the axis of its intended path;
Apply a delayed electrostatic field that includes transverse electrostatic field components in at least two different zones of the field so that the field of the first zone deflects the ion beam back toward the axis of its intended path Directed so that the field of the second zone is directed against the field of the first zone, whereby the ion beam is decelerated and recombined with its intended axis of movement. When,
Placing obstructions on either side of the beam to obstruct neutral atoms and ions of undesired energy that cannot follow the intended s-shaped beam path;
Thereby eliminating these unwanted particles from the decelerated ion beam;
The method of claim 11, comprising: A method for implanting a desired uniform amount of ions into a target, comprising:
Forming a mass-analyzed continuous ion beam that expands in a ribbon shape;
Focusing or defocusing the ion beam in a plurality of adjacent zones along its major dimension using a plurality of controllable sources of current or voltage applied to the first multipole lens;
Moving a target implanted through the ion beam in two generally perpendicular directions, either of which can optionally be arc-shaped;
Measuring the size and current profile of the ion beam along its major dimensions;
Controlling the size of the ion beam in at least one of a first mode and a second mode;
Adjusting the multipole lens so that the ion beam expands until its major dimension exceeds that of the implanted target, and the ribbon beam to achieve a profile suitable for uniform implantation. Further adjusting the multipole lens to control current uniformity, and then passing the target through the ribbon ion beam one or more times back and forth along a single direction. Mode and
Adjusting all zones of the multipole lens to focus the ion beam, thereby stopping its divergence and making it part of the size of the implanted target; And passing the target through the ion beam several times back and forth along a continuous path effective to implant the entire surface of the target with ions. The method of claim 15, further comprising adjusting the multipole lens to control the current profile of the spot beam formed to have a desired profile in a second mode. A second lens is located between the first multipole lens and the implantation position to minimize variations in the angle of incidence of the ions of the beam across the implanted surface of the target. The method of claim 15, further comprising controlling the excitation of the second multipole lens. Manipulating the analyzer magnet to increase or decrease deflection from that used in the first mode of operation, thereby causing the beam path to diverge slightly from the axis of its intended path;
Apply a delayed electrostatic field that includes transverse electrostatic field components in at least two different zones of the field so that the field of the first zone deflects the ion beam back toward the axis of its intended path Directed so that the field of the second zone is directed against the field of the first zone, whereby the ion beam is decelerated and recombined with its intended axis of movement. When,
Interfering with undesired neutral atoms and ions that cannot follow the intended s-shaped beam path;
Thereby eliminating these undesirable particles from the decelerated ion beam;
16. The method of claim 15, comprising: An apparatus for decelerating an ion beam,
An ion source from which an ion beam is extracted and accelerated relative to the initial energy;
A short region where the energy of the ion beam rises slightly;
A region that is decelerated to an energy equal to or less than the initial energy while being deflected in the first direction by at least 10 degrees;
A region where the ion beam is decelerated to intermediate energy;
A region that is deflected in a second direction opposite the first direction to pass the beam at the final energy along a predetermined beam axis, while the ion beam is decelerated to the final energy;
A device comprising: A method of decelerating an ion beam having an initial energy in a final low energy and final direction while substantially eliminating contaminant ions and neutral atoms having a higher energy than the final energy. ,
Generating a beam of ions with initial energy;
Directing the ion beam along an ion beam path;
Control and adjust the electrostatic potential and electric field along the beam path to cause the ion beam to follow a generally s-shaped path while being decelerated, so that the ion beam is generally after decelerating movement in the final direction. The ions in are reduced to the final energy and the center of mass of the beam;
Interfering with unmodified neutral atoms formed from the ion beam by charge exchange to remove it from the ion beam;
A method comprising:

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