JP2007057487A5 - - Google Patents

Download PDF

Info

Publication number
JP2007057487A5
JP2007057487A5 JP2005246206A JP2005246206A JP2007057487A5 JP 2007057487 A5 JP2007057487 A5 JP 2007057487A5 JP 2005246206 A JP2005246206 A JP 2005246206A JP 2005246206 A JP2005246206 A JP 2005246206A JP 2007057487 A5 JP2007057487 A5 JP 2007057487A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005246206A
Other versions
JP2007057487A (ja
JP4736629B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005246206A priority Critical patent/JP4736629B2/ja
Priority claimed from JP2005246206A external-priority patent/JP4736629B2/ja
Priority to US11/508,298 priority patent/US7372557B2/en
Priority to TW095130912A priority patent/TWI404926B/zh
Priority to KR1020060080305A priority patent/KR20070024393A/ko
Publication of JP2007057487A publication Critical patent/JP2007057487A/ja
Publication of JP2007057487A5 publication Critical patent/JP2007057487A5/ja
Application granted granted Critical
Publication of JP4736629B2 publication Critical patent/JP4736629B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2005246206A 2005-08-26 2005-08-26 表面欠陥検査装置 Active JP4736629B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005246206A JP4736629B2 (ja) 2005-08-26 2005-08-26 表面欠陥検査装置
US11/508,298 US7372557B2 (en) 2005-08-26 2006-08-23 Surface defect inspection apparatus and surface defect inspection method
TW095130912A TWI404926B (zh) 2005-08-26 2006-08-23 Surface defect inspection device and surface defect inspection method
KR1020060080305A KR20070024393A (ko) 2005-08-26 2006-08-24 표면 결함 검사 장치 및 표면 결함 검사 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005246206A JP4736629B2 (ja) 2005-08-26 2005-08-26 表面欠陥検査装置

Publications (3)

Publication Number Publication Date
JP2007057487A JP2007057487A (ja) 2007-03-08
JP2007057487A5 true JP2007057487A5 (ja) 2008-08-28
JP4736629B2 JP4736629B2 (ja) 2011-07-27

Family

ID=37921104

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005246206A Active JP4736629B2 (ja) 2005-08-26 2005-08-26 表面欠陥検査装置

Country Status (1)

Country Link
JP (1) JP4736629B2 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5078583B2 (ja) * 2007-12-10 2012-11-21 インターナショナル・ビジネス・マシーンズ・コーポレーション マクロ検査装置、マクロ検査方法
JP5167542B2 (ja) * 2008-09-03 2013-03-21 シーシーエス株式会社 検査用照明装置及び検査方法
CN102834712B (zh) 2010-03-30 2014-12-24 杰富意钢铁株式会社 带树脂覆膜的钢板的表面检查方法及其表面检查装置
JP2014052217A (ja) * 2012-09-05 2014-03-20 Dainippon Printing Co Ltd 異物検査装置、異物検査方法
KR102250032B1 (ko) 2014-12-29 2021-05-12 삼성디스플레이 주식회사 표시 장치의 검사 장치 및 표시 장치의 검사 방법
KR102220731B1 (ko) * 2020-05-13 2021-02-26 케이맥(주) 박막 표면 미세 변화 측정 시스템 및 방법

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0752156B2 (ja) * 1986-06-27 1995-06-05 株式会社日立製作所 異物検査装置
JPH04307358A (ja) * 1991-04-03 1992-10-29 Hitachi Metals Ltd 表面検査装置
JP3981895B2 (ja) * 1997-08-29 2007-09-26 株式会社ニコン 自動マクロ検査装置
JP5288672B2 (ja) * 2001-07-11 2013-09-11 株式会社ニコン 表面欠陥検査装置
JP3965325B2 (ja) * 2002-05-29 2007-08-29 株式会社日立ハイテクノロジーズ 微細構造観察方法、および欠陥検査装置
JP4529366B2 (ja) * 2003-03-26 2010-08-25 株式会社ニコン 欠陥検査装置、欠陥検査方法及びホールパターンの検査方法

Similar Documents

Publication Publication Date Title
BE2012C042I2 (ja)
BR122017004709A2 (ja)
AP2140A (ja)
JP2007062523A5 (ja)
JP2007057487A5 (ja)
JP2007010072A5 (ja)
JP2006346209A5 (ja)
JP2006243975A5 (ja)
JP2006335246A5 (ja)
JP2006292333A5 (ja)
JP2007072322A5 (ja)
JP2006339091A5 (ja)
CN300726222S (zh) 包装纸(金色高金火腿肠)
CN300726004S (zh) 鞋帮
CN300748614S (zh) 空气清新器
CN300727203S (zh) 手表表头
CN300726699S (zh) 调料瓶套装(d)
CN300726698S (zh) 调料瓶套装(e)
CN300726697S (zh) 调料瓶套装(b)
CN300726696S (zh) 调料瓶套装(c)
CN300726695S (zh) 调料瓶套装(a)
CN300726592S (zh) 碗用具（双壁式4）
CN300726591S (zh) 冷冰食品制作器
CN300726508S (zh) 头部遮挡板
CN300725997S (zh) 鞋帮