JP2007055008A - Demolding method of composite optical element and mold assembly - Google Patents

Demolding method of composite optical element and mold assembly Download PDF

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JP2007055008A
JP2007055008A JP2005241069A JP2005241069A JP2007055008A JP 2007055008 A JP2007055008 A JP 2007055008A JP 2005241069 A JP2005241069 A JP 2005241069A JP 2005241069 A JP2005241069 A JP 2005241069A JP 2007055008 A JP2007055008 A JP 2007055008A
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mold
resin
optical element
composite optical
substrate
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Kazunori Aoki
一乘 青木
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Canon Inc
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Canon Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a demolding method of a composite optical element high in quality and productivity capable of easily demolding the composite optical element without applying large load to an optical element substrate. <P>SOLUTION: An up and down movable member 2b for changing the R of the surface 1a of a mold 1 and an actuator 2a for moving the up and down movable member 2b up and down are provided to the lower part of the mold 1. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、複合型光学素子の離型方法および複合型光学素子の金型装置に関する。   The present invention relates to a method for releasing a composite optical element and a mold apparatus for the composite optical element.

複合型光学素子の成形方法において、金型から樹脂と光学素子基板を一体的に離型する際に離型を容易にする方法として、離型剤からなる非粘着層を形成する技術が一般的である。例えば、特開昭60−73816号公報には、金型に離型剤を浸漬法、スプレー法、スピン法およびハケ塗り法等により塗布する方法が提案されている。   In a method of molding a composite optical element, a technique for forming a non-adhesive layer made of a mold release agent is generally used as a method for facilitating mold release when the resin and the optical element substrate are integrally released from the mold. It is. For example, Japanese Patent Application Laid-Open No. 60-73816 proposes a method in which a release agent is applied to a mold by a dipping method, a spray method, a spin method, a brush coating method, or the like.

また前記方法と異なるものとして特開昭54−6006号公報には、樹脂と型材とに温度差を与え、その熱膨張率の違いを利用して離型させる方法や、特開昭60−76319号公報のように成形品と金型との密着体に超音波振動子を当接させて超音波振動を密着体に与えることにより離型させる方法などが提案されている。   Further, as a method different from the above-mentioned method, Japanese Patent Laid-Open No. 54-6006 discloses a method of giving a temperature difference between a resin and a mold material and releasing the mold by utilizing the difference in coefficient of thermal expansion, or Japanese Patent Laid-Open No. 60-76319. As disclosed in Japanese Laid-Open Patent Publication No. Hokukai, a method has been proposed in which an ultrasonic vibrator is brought into contact with a close contact body between a molded product and a mold to release the mold by applying ultrasonic vibration to the close contact body.

さらに特開平06−270170号公報には、金型成形面の光学有効径外周部に形状記憶合金からなる弾性部材を設け、該弾性部材に樹脂を接触させて樹脂を硬化した後、前記弾性部材を変形させて樹脂と金型とを剥離する方法が提案されている。
特開昭60−73816号公報 特開昭54−6006号公報 特開昭60−76319号公報 特開平06−270170号公報
Further, in JP-A-06-270170, an elastic member made of a shape memory alloy is provided on the outer periphery of the optically effective diameter of the mold forming surface, the resin is brought into contact with the elastic member, the resin is cured, and then the elastic member There has been proposed a method in which the resin and the mold are separated by deforming.
Japanese Patent Laid-Open No. 60-73816 Japanese Patent Laid-Open No. 54-6006 JP 60-76319 A Japanese Patent Laid-Open No. 06-270170

しかしながら、特開昭60−73816号公報記載の離型剤を成形面全体に塗布する方法では、塗布層の厚さ制御が困難なため、塗布ムラが発生する。また離型剤は非粘着質のため、樹脂が硬化中に収縮することで、部分的に樹脂が剥離する現象、すなわちヒケが発生し甲額面を高精度に形成できない欠点や、ゴミの付着や離型剤を希釈する有機溶剤の取り扱い及び対作業環境の考慮に注意を要する等の作業工程上の問題点を有する。   However, in the method of applying the release agent described in JP-A-60-73816 to the entire molding surface, it is difficult to control the thickness of the coating layer, and thus coating unevenness occurs. In addition, since the release agent is non-adhesive, the resin shrinks during curing, and the phenomenon that the resin partially peels, that is, the disadvantage that the upper face cannot be formed with high accuracy due to the occurrence of sink marks, There are problems in the work process, such as handling of the organic solvent for diluting the mold release agent and consideration of the working environment.

さらに離型をくりかえすと、離型剤が徐々に樹脂に移行したり、表面の非粘着性の経時的な劣化を防止するため、一定経過後は再塗布を行うと定めると、それにより生産効率が低下する。それを避けるためには高価な金型を多数用意する必要もある。   Furthermore, if the mold release is repeated, the release agent gradually shifts to the resin and the non-adhesiveness of the surface is prevented from deterioration over time. Decreases. In order to avoid this, it is necessary to prepare many expensive molds.

特開昭54−6006号公報によれば、所定温度加熱による金型と樹脂の線膨張の違いによる変形を離型に利用するため、初期形状に比べて全ての部材が熱変形状態にあり、金型を初期形状に戻すには、室温に戻した後、さらに8時間の型形状再生時間が必要であることが実験により確認されている。したがって金型に温度変化を与える時間が長く、成形時間周期が長くなるという問題を抱えている。   According to Japanese Patent Application Laid-Open No. 54-6006, since the deformation due to the difference in linear expansion between the mold and the resin due to heating at a predetermined temperature is used for mold release, all members are in a heat-deformed state compared to the initial shape, In order to return the mold to the initial shape, it has been confirmed by experiments that a mold shape regeneration time of 8 hours is required after returning to room temperature. Therefore, there is a problem that the time for applying a temperature change to the mold is long and the molding time period is long.

また特開昭60−76319号公報によれば、超音波振動を密着体にあたえて成形品と金型を離型するための初期亀裂を誘発するが、振動を与え続ける時間が長く、安定していないため、結果的に成形時間周期が長くなるという問題がある。さらに、特開平06−270170号公報によれば、凹面レンズ基板上の樹脂に形状記憶合金からなる弾性部材を接触させて樹脂を硬化した後、弾性部材を変形させて樹脂と金型とを剥離する。これは弾性部材が臨界応力を超えて変形することなく弾性部材の形状が初期形状に再生することを前提としている。   Further, according to Japanese Patent Laid-Open No. 60-76319, an ultrasonic crack is applied to the adhesion body to induce an initial crack for releasing the molded product and the mold, but the time for which the vibration is continuously applied is long and stable. As a result, there is a problem that the molding time period becomes long. Further, according to Japanese Patent Laid-Open No. 06-270170, an elastic member made of a shape memory alloy is brought into contact with the resin on the concave lens substrate to cure the resin, and then the elastic member is deformed to separate the resin and the mold. To do. This presupposes that the shape of the elastic member is restored to the initial shape without the elastic member deforming beyond the critical stress.

ところが、凸型面レンズに上記形態を採用すると、離型方向とは相反する方向にレンズ面形状があるため、離型時、弾性部材に臨界応力を超えた力が加わり、弾性部材を初期形状に再生できない場合がある。   However, when the above configuration is adopted for a convex surface lens, the lens surface shape is in a direction opposite to the mold release direction. Therefore, a force exceeding the critical stress is applied to the elastic member at the time of mold release, so that the elastic member has an initial shape. May not play properly.

また、近年では円形レンズ基板に限らず、マイクロレンズ、液晶モジュール等、素子基板が薄型化されたものが開発されており、離型時、基板の外径に機械的大負荷を与えることはいっそう困難となっている。   In recent years, not only circular lens substrates but also microlenses, liquid crystal modules, etc. have been developed in which element substrates have been made thinner, and it is even more likely to give a large mechanical load to the outer diameter of the substrate when released. It has become difficult.

本発明は上記問題を考えてなされたもので、その目的は素子基板表面形状に制約を受けず、素子基板に大負荷をかけることなく、容易に離型が可能な品質性と生産性に優れた複合型光学素子の離型方法および金型装置を提供することにある。   The present invention has been made in consideration of the above problems, and its purpose is not limited by the surface shape of the element substrate, and is excellent in quality and productivity that can be easily released without applying a heavy load to the element substrate. Another object of the present invention is to provide a mold release method and a mold apparatus for a composite optical element.

本発明はガラス基板の表面にエネルギー硬化型の樹脂を置載し、所望の形状を反転させた金型成形面を圧着した状態でエネルギーを照射して樹脂を硬化させ、硬化した樹脂を前記金型から離型する複合型光学素子の離型方法において、前記金型の内部に上下動が可能なアクチュエーターを内蔵し、該アクチュエーターにて金型外周表面裏部を押し上げまたは押し下げることにより表面形状部のRを変化させ、樹脂と金型を剥離する方法である。   In the present invention, an energy curable resin is placed on the surface of a glass substrate, and the resin is cured by irradiating energy in a state where a mold forming surface having a desired shape inverted is pressure-bonded. In a mold release method for a composite optical element that is released from a mold, an actuator capable of moving up and down is built in the mold, and a surface shape portion is formed by pushing up or down the outer peripheral surface of the mold with the actuator. This is a method in which R is changed and the resin and the mold are peeled off.

[作用]
以下に本発明の作用を説明する。従来技術では、図2に示すようにガラス基板4の外周部へ金型2から樹脂3を剥がす外力Fを加えると、樹脂と金型の密着面で円弧状に力は分散され、樹脂と金型の剥離は一向に発現しない。そこでこれを剥離しようと外力Fを大きくしていくと基板4が破損してしまい離型ができないことになる。
[Action]
The operation of the present invention will be described below. In the prior art, when an external force F for peeling the resin 3 from the mold 2 is applied to the outer peripheral portion of the glass substrate 4 as shown in FIG. 2, the force is distributed in an arc shape on the contact surface between the resin and the mold, and the resin and the mold Mold peeling does not occur at all. Therefore, if the external force F is increased to peel the substrate, the substrate 4 is damaged, and the mold cannot be released.

一方、本発明では図1に示すように、金型1の内部に上下動可能な可動部材2bと可動させる為のアクチュエーター2aを設けることにより金型表面1aのRを変化させることができる。金型表面1aのRを変化させることにより、図3に示すように樹脂3と金型表面1aの間に、剥離を促進する力Fcが発生する。また反対に図4に示すように樹脂の内部応力を高める力Fdを発生させることも可能である。   On the other hand, in the present invention, as shown in FIG. 1, by providing a movable member 2b that can move up and down inside the mold 1 and an actuator 2a for moving, the R of the mold surface 1a can be changed. By changing R of the mold surface 1a, a force Fc that promotes peeling is generated between the resin 3 and the mold surface 1a as shown in FIG. Conversely, as shown in FIG. 4, it is also possible to generate a force Fd that increases the internal stress of the resin.

以上の説明で明らかなように、本発明によれば離型処理ムラによる成形面の外観ムラの発生がなく、成形毎に温度変化や超音波等の長時間の外的負荷を与える必要がないので、成形タイムが短くなり、成形品の低コスト化が実現できる。   As is apparent from the above description, according to the present invention, there is no occurrence of unevenness in the appearance of the molding surface due to unevenness in the mold release process, and it is not necessary to apply a long-term external load such as temperature change and ultrasonic waves for each molding. Therefore, the molding time is shortened and the cost of the molded product can be reduced.

(実施例1)
図5〜図8は本実施例を示し、図5は装置概略図、図6〜8は成形工程を示す概略図である。金型1は上下動自在にベース6上に保持され、金型1の外周部にはガラス基板を保持また離型力Fを発生させるためのイジェクター5が取り付けられている。
Example 1
5 to 8 show the present embodiment, FIG. 5 is a schematic view of the apparatus, and FIGS. 6 to 8 are schematic views showing the molding process. The mold 1 is held on a base 6 so as to be movable up and down, and an ejector 5 for holding a glass substrate and generating a release force F is attached to the outer periphery of the mold 1.

金型1の上方には同一軸線上に位置だしされた基板4が配設されている。金型1と基板4の間にウレタンアクリレート系紫外線硬化型樹脂3を介在させ、金型1、基板4および樹脂3は密着している。基板4の外周部には基板4を保持するためのイジェクター5が設けられている。   A substrate 4 placed on the same axis is disposed above the mold 1. A urethane acrylate ultraviolet curable resin 3 is interposed between the mold 1 and the substrate 4, and the mold 1, the substrate 4 and the resin 3 are in close contact with each other. An ejector 5 for holding the substrate 4 is provided on the outer peripheral portion of the substrate 4.

次に図5〜図7を用いて成形工程の説明を行う。まず光学ガラスBKにより形成された基板4の上面に未硬化樹脂を適量吐出する。基盤1の成形面にはあらかじめ樹脂3との密着性を向上させるため、酸化アルミ薄膜を蒸着法にて300nm程度の厚みにコーティングしさらにシランカップリング剤をディップコートして80℃30分間の乾燥処理を行う。ここで用いるカップリング剤は、水:エタノールが1:9の溶液に酢酸をPh5に調整した溶媒液にシランカップリング剤A−174(商品形式名;日本ユニカ(株))を1〜2wt%の割合で希釈した駅を用いる。次に基板4を反転させイジェクター5の上へ設置する。さらに金型1を上昇させ基板4に近づけることにより樹脂3を広げ、樹脂3が所望の厚みになった位置で停止する。   Next, the molding process will be described with reference to FIGS. First, an appropriate amount of uncured resin is discharged onto the upper surface of the substrate 4 formed of the optical glass BK. In order to improve the adhesion to the resin 3 on the molding surface of the substrate 1 in advance, an aluminum oxide thin film is coated to a thickness of about 300 nm by a vapor deposition method, and further a silane coupling agent is dip coated and dried at 80 ° C. for 30 minutes. Process. The coupling agent used here is 1 to 2 wt% of a silane coupling agent A-174 (trade name; Nippon Unica Co., Ltd.) in a solvent solution in which acetic acid is adjusted to Ph5 in a water: ethanol 1: 9 solution. Stations diluted at a rate of Next, the substrate 4 is inverted and placed on the ejector 5. Further, the mold 1 is raised and brought closer to the substrate 4 to spread the resin 3, and stops at a position where the resin 3 has a desired thickness.

この状態で基板4の上方より紫外線を照射して樹脂3を硬化させる。これにより金型1、基板4および樹脂3が密着した密着体が形成される。次に金型1の内部に設置された図1のアクチュエーター2aで可動部材2bを上昇させ金型表面1aのRを変化させ図4における力Fdを樹脂3へ与える。これにより樹脂3に内部応力が発生し、イジェクター5を上昇させ基板4の外周部に当接させ離型させる際、樹脂3の持つ内部応力が離型を補助する働きとなり、容易かつ瞬時に金型1から基板4と樹脂3との密着体である複合型光学素子が離型される。(図8)
本実施例に拠れば、金型1の表面1aに離型処理を施さずに、連続しての離型が容易に実施できる。
In this state, the resin 3 is cured by irradiating ultraviolet rays from above the substrate 4. As a result, an adhesion body in which the mold 1, the substrate 4 and the resin 3 are in close contact with each other is formed. Next, the movable member 2b is raised by the actuator 2a of FIG. 1 installed inside the mold 1 to change the R of the mold surface 1a, and the force Fd in FIG. As a result, an internal stress is generated in the resin 3, and when the ejector 5 is raised and brought into contact with the outer peripheral portion of the substrate 4 to release the mold, the internal stress of the resin 3 serves to assist the mold release, and easily and instantly The composite optical element that is an adhesive body of the substrate 4 and the resin 3 is released from the mold 1. (Fig. 8)
According to the present embodiment, continuous release can be easily performed without subjecting the surface 1a of the mold 1 to the release treatment.

なお、本実施形態では、可動部材2bの可動に際してアクチュエーター2aはピエゾ素子を用いて半径30mmに対してΔh=0.005〜0.01mmのR変化をおこさせたが、可動部材2bの可動に際しては高価なピエゾ素子のアクチュエーターでなく、安価なマイクロヘッド等をもちいて手動にて行っても良い。   In this embodiment, when the movable member 2b is moved, the actuator 2a uses a piezo element to cause an R change of Δh = 0.005 to 0.01 mm with respect to a radius of 30 mm. May be performed manually using an inexpensive micro head or the like instead of an expensive piezo element actuator.

(実施例2)
本実施例は、前記記載の実施例1における可動部材1aを外周部下部に引っ掛けるように配置し、離型時に図3に示すように樹脂3と金型1の剥離を促進する力Fcを発生させるようにした構成である。以下前記実施例1と同様な構成であり、説明を省略する。
(Example 2)
In this embodiment, the movable member 1a in the first embodiment described above is arranged so as to be hooked on the lower part of the outer peripheral portion, and a force Fc that promotes the separation of the resin 3 and the mold 1 is generated as shown in FIG. It is the structure made to let it be. The configuration is the same as that of the first embodiment, and a description thereof will be omitted.

本実施例は前記実施例1と同様な作用であり、作用の説明を省略する。   The present embodiment has the same operation as that of the first embodiment, and the description of the operation is omitted.

本発明によれば、前記実施例1と同様な効果が得られるとともに、直接剥離を促進する方向へ力Fcが発生するため、より離型が容易である。とくに回折光学素子等、球面や非球面形状ではない微細形状が形成された複合型光学素子の離型において形状を保ったままの離型が可能である。   According to the present invention, the same effect as in the first embodiment can be obtained, and the force Fc is generated in the direction of directly promoting the peeling, so that the mold release is easier. In particular, it is possible to release the composite optical element formed with a fine shape that is not spherical or aspherical, such as a diffractive optical element, while maintaining the shape.

(比較例1)
本発明の比較例として、金型の光学有効径外外周部が光学有効面と同様に鏡面加工された金型を用いて本発明と同様な金型、基板および樹脂の密着体を形成し、本発明と同様なイジェクターを用いて離型させたところ、金型と樹脂の密着力が大きく、基板が離型により破損してしまった。
(Comparative Example 1)
As a comparative example of the present invention, a mold, a substrate, and a resin adhesion body similar to the present invention are formed using a mold in which the outer periphery of the optical effective diameter of the mold is mirror-finished in the same manner as the optical effective surface, When the mold was released using the same ejector as in the present invention, the adhesion between the mold and the resin was large, and the substrate was damaged by the mold release.

(比較例2)
本発明の比較例として、金型の光学有効径外外周部および光学有効面に離型剤処理が施された金型を用いて本発明と同様な金型、基板および樹脂の密着体を形成し、本発明と同様なイジェクターを用いて離型させたところ、数十個前後で容易な離型ができなくなり、比較例1と同様に基板が破損してしまい、離型ができなくなった。
(Comparative Example 2)
As a comparative example of the present invention, a mold, a substrate and a resin adhesion body similar to the present invention are formed using a mold in which a mold release agent treatment is applied to the outer periphery of the optical effective diameter of the mold and the optically effective surface. However, when the mold was released using the same ejector as that of the present invention, it was not possible to release the mold easily by several tens, and the substrate was damaged as in Comparative Example 1, so that the mold could not be released.

本発明の金型内部図Mold internal view of the present invention 従来例を示す説明図Explanatory drawing showing a conventional example 実施例2を示す説明図Explanatory drawing which shows Example 2. 実施例1の成形工程の説明図Explanatory drawing of the molding process of Example 1 実施例1の成形工程の説明図Explanatory drawing of the molding process of Example 1 実施例1の成形工程の説明図Explanatory drawing of the molding process of Example 1 実施例1の成形工程の説明図Explanatory drawing of the molding process of Example 1 実施例1の成形工程の説明図Explanatory drawing of the molding process of Example 1

符号の説明Explanation of symbols

1 金型構成部
1a 金型表面部
2a アクチュエーター
2b 上下可動部材
3 樹脂
4 ガラス基板
5 イジェクター
6 型ベース
DESCRIPTION OF SYMBOLS 1 Mold structure part 1a Mold surface part 2a Actuator 2b Vertical movable member 3 Resin 4 Glass substrate 5 Ejector 6 Mold base

Claims (3)

光学素子基板の表面にエネルギー硬化型の樹脂を置載し、所望の形状を反転させた金型成形面を圧着した状態でエネルギーを照射して樹脂を硬化させ、硬化した樹脂を該金型から離型する複合型光学素子の離型方法において、前記金型成形面の外周下部に可動部材を配置し、前記樹脂を硬化させた後、前記金型成形面の該外周下部を押し成形面のRを変化させて樹脂と金型を剥離することを特徴とする複合型光学素子の離型方法。   An energy curable resin is placed on the surface of the optical element substrate, and the resin is cured by irradiating energy in a state where a mold forming surface having a desired shape reversed is pressed, and the cured resin is removed from the mold. In the mold release method of the composite optical element to be released, a movable member is disposed at the lower part of the outer periphery of the mold molding surface, and after the resin is cured, the lower peripheral part of the mold molding surface is pushed onto the molding surface. A method for releasing a composite optical element, wherein the resin and the mold are separated by changing R. 光学素子基板の表面にエネルギー硬化型の樹脂を置載し、所望の形状を反転させた金型成形面を圧着した状態でエネルギーを照射して樹脂を硬化させ、硬化した樹脂を該金型から離型する複合型光学素子の離型方法において、請求項1記載の可動部をあらかじめ可動させ所望のRまで成形面を変形させた後樹脂を硬化させ、硬化後に該可動部材を可動させ金型成形面のRを変化させることにより樹脂と金型の剥離を進展させることを特徴とする複合型光学素子の離型方法。   An energy curable resin is placed on the surface of the optical element substrate, and the resin is cured by irradiating energy in a state where a mold forming surface having a desired shape reversed is pressed, and the cured resin is removed from the mold. In a mold release method for a composite optical element to be released, the movable portion according to claim 1 is moved in advance and the molding surface is deformed to a desired R, then the resin is cured, and after the cure, the movable member is moved to move the mold. A mold release method for a composite optical element, wherein peeling of a resin and a mold is advanced by changing R of a molding surface. 前記金型成形面は弾性をもち下部から押させることにより容易に変形し、結果として成形面のRを変化させることを特徴とする請求項1,2記載の複合型光学素子の離型方法。   3. The method of releasing a composite optical element according to claim 1, wherein the mold molding surface has elasticity and is easily deformed by being pushed from below, and as a result, R of the molding surface is changed.
JP2005241069A 2005-08-23 2005-08-23 Demolding method of composite optical element and mold assembly Withdrawn JP2007055008A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013042519A1 (en) * 2011-09-22 2013-03-28 オリンパス株式会社 Method for manufacturing optical element and surface treatment device
CN107816628A (en) * 2016-09-12 2018-03-20 普瑞车联有限公司 The sub-assembly of casting including casting, mold and casting method

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013042519A1 (en) * 2011-09-22 2013-03-28 オリンパス株式会社 Method for manufacturing optical element and surface treatment device
JP2013068839A (en) * 2011-09-22 2013-04-18 Olympus Corp Method for manufacturing optical element, and surface processing device
CN103635835A (en) * 2011-09-22 2014-03-12 奥林巴斯株式会社 Method for manufacturing optical element and surface treatment device
CN103635835B (en) * 2011-09-22 2015-10-21 奥林巴斯株式会社 The manufacture method of optical element and surface processing device
US9511553B2 (en) 2011-09-22 2016-12-06 Olympus Corporation Optical element manufacturing method and surface processing device
CN107816628A (en) * 2016-09-12 2018-03-20 普瑞车联有限公司 The sub-assembly of casting including casting, mold and casting method
CN107816628B (en) * 2016-09-12 2020-09-25 普瑞车联有限公司 Casting, assembly comprising a casting, casting mould and casting method

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