JP2007050564A - Inkjet recording head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inkjet recording head capable of efficiently laying out a substrate while suppressing the degradation in strength of the substrate. <P>SOLUTION: This inkjet recording head has a third nozzle array 10 in the non-opening part other than the region where an ink supply port 9 is formed, of the supply port region 9 in a region reduced in thickness because of a dented ink supply common part 6b formed on the rear surface side of the element substrate. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an ink jet recording head that performs recording on a recording medium by discharging ink according to an ink jet method.

  In the recording apparatus, the ink ejection method using the electrothermal conversion element does not require a large space for disposing the ejection energy generating element, the structure of the recording head is simple, and the nozzles are easily integrated. There are such advantages. In particular, the ink jet recording methods disclosed in Patent Documents 1 to 4 are configured such that bubbles generated by driving an electrothermal conversion element by a recording signal are vented to the outside air. By adopting this ink jet recording method, the volume of the flying ink droplets is stabilized, and a very small amount of ink droplets can be ejected at high speed. In addition, it is possible to improve the durability of the heater by eliminating cavitation that occurs when bubbles are eliminated. Therefore, a further high-definition image can be easily obtained. In the above-mentioned publication, the shortest distance between the electrothermal conversion element that generates bubbles in the ink and the ejection port that is the opening through which the ink is ejected is used as a configuration for communicating the bubbles with the outside air. Therefore, a configuration that greatly shortens is mentioned.

  The configuration of this type of recording head will be described below.

  An element substrate provided with an electrothermal conversion element that discharges ink and a flow path configuration substrate (also referred to as an orifice substrate) that is bonded to the element substrate and forms an ink flow path are provided. The flow path constituting substrate has a plurality of nozzles through which ink flows, a supply chamber that supplies ink to each of these nozzles, and a plurality of discharge ports that are nozzle tip openings that discharge ink droplets. The nozzle includes a foaming chamber in which bubbles are generated by the electrothermal conversion element, and a supply path for supplying ink to the foaming chamber. On the element substrate, an electrothermal conversion element is disposed in the foam chamber. The element substrate is provided with a supply port for supplying ink to the supply chamber from the back surface opposite to the main surface in contact with the flow path constituting substrate. The flow path constituting substrate is provided with a discharge port at a position facing the electrothermal conversion element on the element substrate.

  Further, in the recording head configured as described above, the ink supplied from the supply port to the supply chamber is supplied along each nozzle and filled in the foaming chamber. The ink filled in the foaming chamber is ejected in the direction substantially perpendicular to the main surface of the element substrate by bubbles generated by film boiling by the electrothermal conversion element and ejected as ink droplets from the ejection port.

  FIG. 9 is a partially cutaway perspective view of a conventional example of the preferred ink jet recording head described above.

  The ink jet recording head of the form shown in FIG. 9 has a plurality of heaters 1 that are electrothermal conversion elements in each heater 1 and an isolation wall that individually forms nozzles 5 that are ink flow paths. The configuration extends from the outlet 4 to the vicinity of the supply chamber 6.

  This ink jet recording head has a plurality of heaters 1 and a plurality of nozzles 5. The first nozzle row 7 in which the longitudinal directions of the nozzles 5 are arranged in parallel and the longitudinal direction of the nozzles 5 are arranged in parallel at positions facing the first nozzle row 7 across the supply chamber 6. And a second nozzle row 8.

  In the first and second nozzle rows 7 and 8, the interval between adjacent nozzles is formed at a pitch of 600 dpi. Further, the nozzles 5 of the second nozzle row 8 are arranged so that the pitch between adjacent nozzles is shifted from the nozzles 5 of the first nozzle row 7 by ½ pitch.

  Such a recording head has an ink discharge means to which the ink jet recording method disclosed in Patent Documents 5 and 6 is applied, and bubbles generated during ink discharge are communicated with the outside air through the discharge port. Yes.

  On the other hand, a Si substrate used in an ink jet recording head is generally used by forming a large number of circuits on a Si wafer at the same time as an ordinary IC and separating them by dicing or the like. Therefore, the price of one Si substrate is determined by how many substrates can be obtained from one wafer. For example, in order to obtain the above-mentioned 1 inch wide substrate, if the substrate size is about 30 mm × 3 mm, only about 100 substrates can be obtained from a 6 inch wafer. If this is used to make a head using the above six types of ink, only about 16 heads can be obtained. On the other hand, for example, if the substrate can be formed with a size of 30 mm × 1 mm, about 300 substrates can be obtained from one wafer, and the price can be greatly reduced.

The surface of the substrate is roughly divided into an electric circuit portion including the above-described resistor and a fluid portion including a through hole and through which ink flows. Of these, the electrical circuit portion can be reduced in area by a fine wiring process and a low-resistance wiring process used in an LSI or the like, so that a reduction in the area of the fluid portion is a problem. Sand blasting, laser processing, anisotropic etching, dry etching, etc. are known as means for forming through holes in the fluid portion, but sand blasting and laser processing have poor dimensional accuracy and the edges of the holes are jagged. Since there is a tendency, it is not preferable. Although dry etching has good processing accuracy, when a small through hole is formed, the resistance of the fluid increases, resulting in a decrease in the frequency response of droplet discharge. In contrast to this, for example, if anisotropic etching is performed on the <100> plane Si from the back side, the <111> plane is formed at an angle of 54.8 °, and a through hole of a square frustum is formed. Therefore, a preferable through hole with high accuracy and low flow resistance can be obtained. However, since the opening on the back surface increases in proportion to the thickness of the Si substrate, the opening is about 0.8 mm when the thickness of a general Si wafer is 625 μm. However, only 0.1 mm remained, making adhesion difficult.
JP 54-161935 A JP-A 61-185455 JP 61-249768 A JP-A-4-10941 Japanese Patent Laid-Open No. 4-10940

  In order to solve this problem, a configuration has been proposed in which a region where the substrate is thin (ink supply common portion) is formed by forming a recess on the back surface, and an ink supply port is formed in the region. Yes. Since this supply port is formed for every several nozzles and is provided in a thin region of the substrate, the area of the ink supply port can be taken only in an area much smaller than the area of the common ink supply part for the purpose of maintaining strength. In addition, it is impossible to increase the number of supply ports due to the problem of processing accuracy of the supply ports, or increase the number of supply ports more than necessary.

  As described above, in a region where the substrate is thin, a useless region without an ink supply port is necessary for reasons of strength. By forming a recess on the back surface to form a region where the substrate is thin (ink supply common part) and providing an ink supply port, this configuration is much smaller than the conventional batch supply port. The area that does not exist is a useless area, which is a problem in terms of cost. In particular, the upper surface is a layer constituting a circuit, and the presence of a circuit region having no function is a wasteful configuration.

  The present invention has been made in view of the above-described problems, and an object of the present invention is to provide an ink jet recording head capable of providing an efficient substrate layout while suppressing a decrease in strength.

  In order to achieve the above object, an ink jet recording head according to the present invention includes a plurality of energy generating elements that generate energy, an element substrate provided with the energy generating elements, and a plurality of first nozzles on the element substrate. A plurality of ink supply ports for supplying ink to each nozzle are provided between one nozzle row, a second nozzle row having a plurality of second nozzles, and the first and second nozzle rows. In an ink jet recording head having a formed supply port area and ejecting ink from nozzles of each nozzle row in a substantially vertical direction of the element substrate to form an image on a recording medium, the supply port area is a back surface of the element substrate. In the region where the thickness of the substrate formed by forming the concave ink supply common portion on the side is reduced, in the non-opening portion other than the region where the ink supply port is formed in the supply port region Duplicate It characterized by having a third nozzle of.

  According to the present invention, it is possible to form an efficient substrate layout without reducing the strength of the element substrate by forming the nozzle in a region that has been conventionally used only for securing the strength of the element substrate. It was.

Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings.
<Outline of the main unit>
FIG. 1 is an external perspective view showing an outline of the configuration of an ink jet printer IJRA which is a typical embodiment of the present invention. In FIG. 1, the carriage HC engaged with the spiral groove 5004 of the lead screw 5005 that rotates via the driving force transmission gears 5009 to 5011 in conjunction with the forward and reverse rotation of the drive motor 5013 has a pin (not shown). is doing. A carriage HC supported by the guide rail 5003 and reciprocatingly moved in the directions of arrows a and b is equipped with an integrated ink jet cartridge IJC having a built-in recording head IJH and an ink tank IT. The paper pressing plate 5002 presses the recording paper P against the platen 5000 in the moving direction of the carriage HC. Photocouplers 5007 and 5008 are home position detectors for confirming the presence of the lever 5006 of the carriage HC in this region and switching the rotation direction of the motor 5013 and the like. A member 5016 supports a cap member 5022 that caps the front surface of the recording head IJH, and a suction unit 5015 sucks the inside of the cap, and performs suction recovery of the recording head through the cap opening 5023. . The cleaning blade 5017 is movable in the front-rear direction by a member 5019, and these are supported by the main body support plate 5018. Needless to say, the cleaning blade 5017 is not limited to this configuration, and a known cleaning blade can be applied to this example. The lever 5021 is for starting suction for suction recovery. The lever 5021 moves with the movement of the cam 5020 engaged with the carriage HC, and the driving force from the driving motor is transmitted by a known transmission mechanism such as clutch switching. Move controlled.

  These capping, cleaning, and suction recovery are configured so that desired processing can be performed at the corresponding positions by the action of the lead screw 5005 when the carriage HC comes to the region on the home position side. However, any desired application can be applied to this example as long as a desired operation is performed at a known timing.

<Description of control configuration>
Next, a control configuration for executing the recording control of the above-described apparatus will be described.

  FIG. 2 is a block diagram showing the configuration of the control circuit of the inkjet printer IJRA.

  A recording signal is input to the interface 1700. A ROM 1702 is a ROM that stores a control program executed by the MPU 1701, and various data (such as the recording signal and recording data supplied to the recording head IJH) are stored in the DRAM 1703. A gate array (GA) 1704 controls supply of print data to the printhead IJH, and also controls data transfer among the interface 1700, MPU 1701, and RAM 1703. A carrier motor 1710 is a motor for transporting the recording head IJH, and a transport motor 1709 is a motor for transporting the recording paper. A head driver 1705 is a driver for driving the recording head IJH, and motor drivers 1706 and 1707 are drivers for driving a transport motor 1709 and a carrier motor 1710, respectively.

  The operation of the control configuration will be described. When a recording signal enters the interface 1700, the recording signal is converted into recording data for printing between the gate array 1704 and the MPU 1701. The motor drivers 1706 and 1707 are driven, and the recording head IJH is driven according to the recording data sent to the head driver 1705 to perform recording.

(First embodiment)
FIG. 3 is a partially enlarged plan view schematically showing a nozzle array in which the heat generating elements in the ink jet recording head of the present embodiment are formed in an array, and FIG. 4 is a schematic diagram of the AA ′ cross section in FIG. FIG. In addition to this embodiment, in the description of other embodiments, the first nozzle row 7 has the first nozzle, the second nozzle row 8 has the second nozzle, and the third nozzle 10 has. The third nozzle may have a different droplet size for ejection. However, since the basic function of ejecting ink droplets is the same, these nozzles will be collectively described as nozzle 5.

  In the ink jet recording head of this embodiment shown in FIGS. 3 and 4, a heating element (heater) 1 is provided on the element substrate 2, and the flow path constituting substrate 3 disposed to face the element substrate 2 is A discharge port 4 is formed. Further, a partition wall 12 for individually forming the nozzles 5 that are ink flow paths independently extends from the ejection port 4 to the vicinity of a supply port region 9 described later.

  This ink jet recording head has a plurality of heating elements 1 and a plurality of nozzles 5 as in the prior art. The first nozzle row 7 in which the longitudinal directions of the nozzles 5 are arranged in parallel and the supply nozzle region 9 including the ink supply port 6a are sandwiched between the nozzles 5 at positions facing the first nozzle row 7. And a second nozzle row 8 arranged in parallel in the longitudinal direction. The nozzles of the second nozzle row 8 are arranged so as to be shifted by a predetermined pitch with respect to the nozzles of the first nozzle row 7. The heating element 1 applies a voltage to the heating element 1 to instantaneously boil the ink in the vicinity of the heating element 1, and ejects ink droplets at high speed by a rapid foaming pressure generated by the phase change of the ink at the time of boiling. 4 is discharged. Ink discharged from the discharge port 4 is supplied from an ink supply common unit 6b described later through the ink supply port 6a.

  In the ink jet recording head of this embodiment, a third nozzle row 10 having a plurality of nozzles 5 which is a feature of the present invention is provided in a supply port region 9 in which a plurality of ink supply ports 6a are formed.

  First, the ink supply port 6a formed in the supply port region 9 will be described. The supply port region 9 refers to the region surrounded by the two-dot chain line shown in FIG. 3, and refers to the region where the ink supply port 6a and the third nozzle row 10 are formed.

  As shown in FIG. 4, the element substrate 2 is formed with an ink supply common portion 6b having a thin substrate thickness and a thick thick region 6c. The ink supply port 6a is formed so as to penetrate a partial region of the ink supply common portion 6b having a thin substrate thickness. Such ink supply ports 6 a are alternately arranged in a staggered manner in the supply port region 9.

  The ink supply port 6a is formed corresponding to every several nozzles as shown in FIG. That is, in the present embodiment, one ink supply port 6 a is formed for two of the nozzles of the first nozzle row 7, and one is provided for two of the nozzles of the second nozzle row 8. Is formed. In addition, the opening area of the ink supply port 6a can be formed only in a much smaller area than the area of the surface where the ink supply port 6a of the ink supply common part 6b is formed. This is because the opening area is made as small as possible because it is necessary to maintain the strength. Further, the numerical aperture cannot be increased unnecessarily due to the problem of the processing accuracy of the ink supply port 6a. Therefore, no more openings or the like can be formed in this region of the element substrate 2 where the thin ink supply common portion 6b is formed. That is, conventionally, the region between the ink supply ports 6a of the element substrate 2 is used only for ensuring strength, and has no other function, and is a useless region in terms of the layout of the substrate. It was.

  As typical dimensions of the ink jet recording head of this embodiment, the thickness of the element substrate 2 is 100 to 300 μm in the thick thick region 6c, and 10 to 10 in the thin region of the ink supply common part 6b. 30 μm. The width of the ink supply common portion 6b is preferably 80 to 100 μm, and the ink supply port 6a is preferably 30 μm × 30 μm or more quadrilateral. In addition, the ink supply port 6a of this embodiment shown in FIG. 3 has a dimension of 30 μm × 60 μm. Although there are methods such as wet etching and sand blasting for the depression of the ink supply common part, it is preferable that the processing accuracy such as the dry etching method is high. Since the ink supply port 6a requires processing accuracy, dry etching is preferable.

  Next, the third nozzle row 10 will be described.

  The third nozzle row 10 in the supply port region 9 is a non-opening portion in which the ink supply ports 6a arranged alternately in a staggered manner are not formed, that is, conventionally, was wasted in terms of substrate layout. It is provided in the area. In other words, the third nozzle row 10 is configured such that each nozzle is arranged in a staggered manner at a position where the ink supply ports 6a alternately arranged in a staggered manner are interpolated. Alternatively, in the third nozzle row 10, the ink supply ports 6 a and the nozzles formed in a useless area formed between the ink supply ports 6 a are alternately arranged, and the third nozzle row 10 corresponds to the pitch of the ink supply ports 6 a. It can be said that the nozzle rows shifted by only two are formed in parallel.

  Each nozzle forming the third nozzle row 10 is partitioned by a partition wall 11 formed substantially perpendicular to the element substrate 2, and each nozzle is formed as a single nozzle for recording one pixel. In the present embodiment, the thickness of the partition wall 11 is 6 μm. The partition wall 11 is formed in a U-shape when viewed from the discharge port side, and an opening is formed toward the ink supply port 6a side.

  Conventionally, if an opening is formed between the ink supply ports 6a formed at intervals in the element substrate 2, there is a concern about a decrease in strength, so that it has been left as a useless region. However, in the case of this embodiment, since the heater element 1 is provided and functions as a nozzle, not the way of use in which an opening is formed in this useless area to increase the ink supply port, the strength of the element substrate 2 is increased. It will not be reduced. Further, each nozzle forming the third nozzle row 10 is provided with a partition wall 11 so as to be formed as a single nozzle. That is, the rigidity of the ink jet recording head can be increased by providing the partition wall 11.

  Further, the third nozzle row 10 is formed in a region where the substrate thickness is thin, and the ink in the ink supply common part 6b flows, so that the heating elements provided in the third nozzle row 10 are provided. 1 heat is easily radiated to the ink supply common part 6b side. Moreover, since the ink in the ink supply common part 6b is finally discharged to the outside, the temperature rise of the ink jet recording head can be suppressed.

  The energization circuit and the wiring to the heat generating elements 1 in the third nozzle row 10 can be sufficiently arranged by arranging them in the thin area of the element substrate 2 so as to avoid the ink supply port 6a.

  In the present embodiment, the opening area of the discharge port 4 corresponding to the third nozzle row 10 formed in the flow path constituting substrate 3 is the discharge amount corresponding to the first nozzle row 7 and the second nozzle row 8. It is smaller than the opening area of the outlet. In the present embodiment, the droplets discharged from the discharge ports 4 of the first nozzle row 7 and the second nozzle row 8 are 5 pl, the droplets of the third nozzle row 10 are 0.5 pl, Good quality recording is possible. In the present embodiment, the pitch of each nozzle is arranged at 600 dpi in all nozzle rows.

  As described above, according to the present embodiment, forming the nozzles in the region between the ink supply ports 6a, which has been conventionally used only for securing the strength and has no other functions, reduces the strength of the substrate. Efficient board layout is possible.

(Second Embodiment)
FIG. 5 is a partially enlarged plan view schematically showing a nozzle row in which the heating elements in the ink jet recording head of this embodiment are formed in a row.

  Since the layout on the substrate of the ink jet recording head of this embodiment is basically the same as that shown in the first embodiment, the same reference numerals are used, and the detailed description is omitted. To do.

In the present embodiment, the droplet size discharged from the discharge port 4 of the first nozzle row 7 is 5 pl, the droplet size discharged from the discharge port 4 of the second nozzle row 8 is 2 pl, and the third nozzle row 10. The droplet size discharged from the discharge port 4 is 0.5 pl. As described above, the present embodiment includes nozzles that eject three types of droplet sizes: large, medium, and small.
The nozzle pitch is also 600 dpi. In the case of this embodiment, by adding medium droplets to the second nozzle row 8, halftone expression and high-quality recording with good gradation can be achieved.

(Third embodiment)
FIG. 6 is a partially enlarged plan view schematically showing an enlarged nozzle array in which the heat generating elements in the ink jet recording head of the present embodiment are formed in an array.

  The layout on the substrate of the ink jet recording head of the present embodiment is basically the same as that shown in the second embodiment, and therefore the same reference numerals are used, and the detailed description is omitted. To do.

  In the first and second embodiments, an example is shown in which each nozzle forming the third nozzle row 10 is surrounded by a U-shaped partition wall 11 having an opening formed only on the ink supply port 6a side. . On the other hand, the ink jet recording head of this embodiment has a configuration in which two parallel partition walls 11a are provided so that not only the ink supply port 6a side but also the opposite side is open. In the present embodiment, as in the second embodiment, three large, medium, and small droplet sizes are ejected. Of these, the ink droplet size in the third nozzle row 10 is 0. Smallest at 5 pl. Smaller droplets require faster responsiveness (refill), but the flow resistance in the nozzle can be reduced and the refill speeded up by forming the partition wall 11a with openings formed on both sides. be able to. Further, not only the refilling of the small droplets in the third nozzle row 10 is increased, but also the middle and large droplets are ejected with a time difference, thereby simultaneously reducing the resistance of the middle and large droplet nozzles and the supply chamber. Can be lowered. As a result, the refill characteristics of the medium and large droplets, that is, the nozzles of the first nozzle row 7 and the second nozzle row 8 can also be improved.

(Fourth embodiment)
FIG. 7 is a partially enlarged plan view schematically showing an enlarged nozzle array in which the heat generating elements in the inkjet recording head of the present embodiment are formed in an array.

  In addition, since the layout on the substrate of the ink jet recording head of this embodiment is basically the same as that shown in each of the above-described embodiments, the reference numerals used are the same, and detailed description is omitted. To do.

  Each of the embodiments described above is an example in which the droplet size ejected from the third nozzle row 10 is smaller than the droplet size ejected from the first nozzle row 7 and the second nozzle row 8. Explained. In contrast, in the present embodiment, the droplet size (8 pl or 10 pl) discharged from the third nozzle row 10 is the same as the droplet size (0.5 pl) of the first nozzle row 7 and the second nozzle row 8. It is configured to be larger than the droplet size (2 pl). Correspondingly, the opening area of the ink supply port 6a is enlarged. In each of the above-described embodiments, the size of the ink supply port 6a is 30 μm × 30 μm, whereas in this embodiment, the size of the ink supply port 6a is 100 μm × 50 μm. In addition, although the shape of a partition wall is illustrated in FIG. 7 as a U-shape, it is not limited to this. Further, although a configuration is shown in which a small droplet is ejected from the first nozzle row 7 and a medium droplet is ejected from the second nozzle row 8, the present invention is not limited to this. . For example, both the first nozzle row 7 and the second nozzle row 8 may eject ink having the same droplet size.

  In the case of the present embodiment, an example in which the droplet size discharged from the third nozzle row 10 is larger than that in each of the above-described embodiments has been described. This is an image recording that does not require small droplets such as plain paper. This is a configuration with improved speed. Furthermore, the nozzle for ejecting large droplets of ink is the third nozzle array 10 formed in the supply port region 9, thereby reducing the resistance in the ink supply path and increasing the refill speed.

  In the present embodiment, the nozzle arrangement pitch in the first nozzle row 7 which is a small droplet is set to 1200 dpi. As a result, even when the third nozzle row 10 is enlarged, the configuration corresponds to the frequent use of small droplets when recording high-quality images such as photographs.

(Fifth embodiment)
FIG. 8 is a partially enlarged plan view schematically showing an enlarged nozzle array in which the heat generating elements in the ink jet recording head of the present embodiment are formed in an array.

  In addition, since the layout on the substrate of the ink jet recording head of this embodiment is basically the same as that shown in each of the above-described embodiments, the reference numerals used are the same, and detailed description is omitted. To do.

  This embodiment also has a configuration in which nozzles that eject three types of large, medium, and small droplet sizes are provided, but medium-sized droplets are ejected from the third nozzle row 10. In the present embodiment, the arrangement pitch of the first nozzle rows 7 that discharge small droplets is 1200 dpi. This embodiment has a configuration suitable for recording a high image quality such as a photograph using many small and medium droplets at a high recording speed.

  In addition, this invention may combine each embodiment mentioned above how.

1 is a perspective view of an example of an inkjet printer suitable for the present invention. It is a block diagram of an example of the control system of the inkjet printer in the present invention. It is the partially expanded plan view which showed typically the some nozzle row in the 1st Embodiment of this invention. FIG. 4 is a side sectional view taken along line A-A ′ shown in FIG. 3. It is the partially expanded plan view which showed typically the some nozzle row in the 2nd Embodiment of this invention. It is the partially expanded plan view which showed typically the some nozzle row in the 3rd Embodiment of this invention. It is the partially expanded plan view which showed typically the some nozzle row in the 4th Embodiment of this invention. It is the partially expanded plan view which showed typically the some nozzle row in the 5th Embodiment of this invention. 1 is a perspective view of an embodiment of an ink jet recording head suitable for the present invention, partially cut away.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Heat generating element 2 Element board | substrate 3 Flow path structure board | substrate 4 Ejection port 5 Nozzle 6a Ink supply port 6b Ink supply common part 6c Thick area 7 First nozzle row 8 Second nozzle row 9 Supply port region 10 Third nozzle Column

Claims (6)

A plurality of energy generating elements for generating energy, an element substrate provided with the energy generating elements, a first nozzle row having a plurality of first nozzles on the element substrate, and a plurality of second nozzles And a supply port region in which a plurality of ink supply ports for supplying ink to each of the nozzles is formed between the first and second nozzle rows. In an inkjet recording head for forming an image on a recording medium by ejecting ink from the nozzles of each nozzle row in a substantially vertical direction of the element substrate,
The supply port region is in a region where the thickness of the element substrate formed by forming a recessed ink supply common portion on the back side of the element substrate is reduced, and the supply port region An ink jet recording head having a plurality of third nozzles in a non-opening portion other than a region where an ink supply port is formed.   The ink supply ports are alternately arranged in a zigzag pattern, and the third nozzles are arranged in a zigzag manner at positions that interpolate the ink supply ports alternately arranged in a zigzag pattern. The inkjet recording head according to claim 1, further comprising a third nozzle row.   The inkjet recording head according to claim 1, wherein each of the third nozzles is formed of a single nozzle that records one pixel.   4. The ink jet recording head according to claim 1, wherein the third nozzle has a flow path formed by at least two partition walls formed perpendicular to the element substrate. 5.   The droplet size of ink ejected from the third nozzle is smaller than at least one of the droplet sizes of ink ejected from the first and second nozzles. 2. An ink jet recording head according to item 1. The droplet size of the ink ejected from the third nozzle is larger than the droplet size of the ink ejected from the first and second nozzles. Inkjet recording head.

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