JP2007048631A - 光電子増倍管 - Google Patents
光電子増倍管 Download PDFInfo
- Publication number
- JP2007048631A JP2007048631A JP2005232488A JP2005232488A JP2007048631A JP 2007048631 A JP2007048631 A JP 2007048631A JP 2005232488 A JP2005232488 A JP 2005232488A JP 2005232488 A JP2005232488 A JP 2005232488A JP 2007048631 A JP2007048631 A JP 2007048631A
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- JP
- Japan
- Prior art keywords
- electron
- anode
- photomultiplier tube
- electron multiplier
- control electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 229910052710 silicon Inorganic materials 0.000 claims description 40
- 239000010703 silicon Substances 0.000 claims description 40
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- 239000000758 substrate Substances 0.000 description 57
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 39
- 239000011521 glass Substances 0.000 description 36
- 239000003153 chemical reaction reagent Substances 0.000 description 19
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- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/06—Electrode arrangements
Landscapes
- Electron Tubes For Measurement (AREA)
- Measurement Of Radiation (AREA)
Abstract
【解決手段】 内部が真空に維持された外囲器を備え、該外囲器内に、光電面(22)と、電子増倍部(31)と、陽極(32)とが配置されている。特に、電子増倍部(31)及び陽極(32)を取り囲む外囲器の内部空間に配置されには1又はそれ以上の制御電極(320)が電子増倍部(31)の電子放出端から伸びた1又はそれ以上の接続部を介して電気的に接続されている。この構成において、電子増倍部(31)の電子入射端と電子放出端との間に印加されていた電圧を電子入射端と制御電極の間に印加することより、電子増倍部(31)には、光電面(22)側から陽極(32)側に向かって徐々に増加する電位勾配が形成されるとともに、該電子増倍部(32)の電子放出端と陽極(32)との間に十分な電位差が与えられ、安定した検出精度が得られる。
【選択図】 図2
Description
Claims (4)
- 内部が真空状態に維持された外囲器と、
前記外囲器内に収納され、該外囲器を介して取り込まれた光に応じて電子を該外囲器の内部に放出する光電面と、
前記外囲器内に収納され、電子の進行方向に沿って伸びた溝部を有する電子増倍部と、
前記外囲器内に収納され、前記電子増倍部でカスケード増倍された電子のうち到達した電子を信号として取り出すための陽極と、
前記電子増倍部及び前記陽極を取り囲む前記外囲器の内部空間に配置された1又はそれ以上の制御電極であって、カスケード増倍された電子が放出される前記電子増倍部の電子放出端とそれぞれ電気的に接続されるとともに、該電子放出端よりも高い電位に設定される制御電極を備えた光電子増倍管。 - 前記制御電極は、前記電子増倍部の電子放出端から伸びた複数の配線部に接続された状態で、前記電子増倍部とともに前記陽極を挟むよう配置されており、前記陽極は、前記電子増倍部の電子放出端、前記複数の配線部及び前記制御電極によって囲まれた領域内に配置されていることを特徴とする請求項1記載の光電子増倍管。
- 前記制御電極の電位は、前記電子増倍部における電子放出端の電位よりも高く、かつ前記陽極の電位と等しいかそれ以下に設定されることを特徴とする請求項1又は2記載の光電子増倍管。
- 前記制御電極は、シリコンからなることを特徴とする請求項1〜3のいずれか一項記載の光電子増倍管。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005232488A JP4708117B2 (ja) | 2005-08-10 | 2005-08-10 | 光電子増倍管 |
CN2006800192749A CN101208768B (zh) | 2005-08-10 | 2006-06-01 | 光电子倍增器 |
PCT/JP2006/311008 WO2007017983A1 (ja) | 2005-08-10 | 2006-06-01 | 光電子増倍管 |
EP06756885A EP1921661A4 (en) | 2005-08-10 | 2006-06-01 | PHOTOMULTIPLIER |
US11/921,934 US7928657B2 (en) | 2005-08-10 | 2006-06-01 | Photomultiplier |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005232488A JP4708117B2 (ja) | 2005-08-10 | 2005-08-10 | 光電子増倍管 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007048631A true JP2007048631A (ja) | 2007-02-22 |
JP4708117B2 JP4708117B2 (ja) | 2011-06-22 |
Family
ID=37727174
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005232488A Active JP4708117B2 (ja) | 2005-08-10 | 2005-08-10 | 光電子増倍管 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7928657B2 (ja) |
EP (1) | EP1921661A4 (ja) |
JP (1) | JP4708117B2 (ja) |
CN (1) | CN101208768B (ja) |
WO (1) | WO2007017983A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8492694B2 (en) | 2010-10-14 | 2013-07-23 | Hamamatsu Photonics K.K. | Photomultiplier tube having a plurality of stages of dynodes with recessed surfaces |
US8587196B2 (en) | 2010-10-14 | 2013-11-19 | Hamamatsu Photonics K.K. | Photomultiplier tube |
US8354791B2 (en) * | 2010-10-14 | 2013-01-15 | Hamamatsu Photonics K.K. | Photomultiplier tube |
CN102468110B (zh) * | 2010-10-29 | 2016-04-06 | 浜松光子学株式会社 | 光电倍增管 |
CN102468109B (zh) * | 2010-10-29 | 2015-09-02 | 浜松光子学株式会社 | 光电倍增管 |
CN103245854B (zh) * | 2013-04-22 | 2015-03-25 | 兰州空间技术物理研究所 | 一种采用光电法产生入射电子源的电子倍增器测试装置 |
US20210384871A1 (en) * | 2018-10-16 | 2021-12-09 | Hamamatsu Photonics K.K. | Vacuum tube for amplifier circuit, and amplifier circuit using same |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5022396B1 (ja) * | 1969-03-06 | 1975-07-30 | ||
JPH04359855A (ja) * | 1991-06-06 | 1992-12-14 | Hamamatsu Photonics Kk | 二次電子増倍装置 |
JPH05234565A (ja) * | 1992-02-20 | 1993-09-10 | Murata Mfg Co Ltd | 二次電子増倍装置 |
US5568013A (en) * | 1994-07-29 | 1996-10-22 | Center For Advanced Fiberoptic Applications | Micro-fabricated electron multipliers |
WO2005078759A1 (ja) * | 2004-02-17 | 2005-08-25 | Hamamatsu Photonics K.K. | 光電子増倍管 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5316958B2 (ja) | 1973-07-03 | 1978-06-05 | ||
US5264693A (en) * | 1992-07-01 | 1993-11-23 | The United States Of America As Represented By The Secretary Of The Navy | Microelectronic photomultiplier device with integrated circuitry |
DE4429925C1 (de) * | 1994-08-23 | 1995-11-23 | Roentdek Handels Gmbh | Verfahren und Detektoreinrichtung zur elektronischen positionsbezogenen Erfassung von Strahlung |
EP1093150A4 (en) * | 1998-06-01 | 2007-05-02 | Hamamatsu Photonics Kk | photomultiplier |
JP3078905U (ja) | 2001-01-12 | 2001-07-27 | 華容股▲分▼有限公司 | 遠隔操作装置 |
AU2003231505A1 (en) * | 2002-05-15 | 2003-12-02 | Hamamatsu Photonics K.K. | Photomultiplier tube and its using method |
US7049747B1 (en) * | 2003-06-26 | 2006-05-23 | Massachusetts Institute Of Technology | Fully-integrated in-plane micro-photomultiplier |
GB2409927B (en) * | 2004-01-09 | 2006-09-27 | Microsaic Systems Ltd | Micro-engineered electron multipliers |
US7492097B2 (en) * | 2005-01-25 | 2009-02-17 | Hamamatsu Photonics K.K. | Electron multiplier unit including first and second support members and photomultiplier including the same |
JP4359855B2 (ja) | 2007-07-09 | 2009-11-11 | Smc株式会社 | 電磁弁駆動回路及び電磁弁 |
-
2005
- 2005-08-10 JP JP2005232488A patent/JP4708117B2/ja active Active
-
2006
- 2006-06-01 WO PCT/JP2006/311008 patent/WO2007017983A1/ja active Application Filing
- 2006-06-01 US US11/921,934 patent/US7928657B2/en not_active Expired - Fee Related
- 2006-06-01 CN CN2006800192749A patent/CN101208768B/zh not_active Expired - Fee Related
- 2006-06-01 EP EP06756885A patent/EP1921661A4/en not_active Withdrawn
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5022396B1 (ja) * | 1969-03-06 | 1975-07-30 | ||
JPH04359855A (ja) * | 1991-06-06 | 1992-12-14 | Hamamatsu Photonics Kk | 二次電子増倍装置 |
JPH05234565A (ja) * | 1992-02-20 | 1993-09-10 | Murata Mfg Co Ltd | 二次電子増倍装置 |
US5568013A (en) * | 1994-07-29 | 1996-10-22 | Center For Advanced Fiberoptic Applications | Micro-fabricated electron multipliers |
WO2005078759A1 (ja) * | 2004-02-17 | 2005-08-25 | Hamamatsu Photonics K.K. | 光電子増倍管 |
Also Published As
Publication number | Publication date |
---|---|
US20090218944A1 (en) | 2009-09-03 |
US7928657B2 (en) | 2011-04-19 |
WO2007017983A1 (ja) | 2007-02-15 |
EP1921661A1 (en) | 2008-05-14 |
CN101208768B (zh) | 2010-10-13 |
JP4708117B2 (ja) | 2011-06-22 |
CN101208768A (zh) | 2008-06-25 |
EP1921661A4 (en) | 2011-10-05 |
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