JP2007040699A5 - Roller hearth type continuous firing furnace and continuous firing method for display panel substrates - Google Patents
Roller hearth type continuous firing furnace and continuous firing method for display panel substrates Download PDFInfo
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- JP2007040699A5 JP2007040699A5 JP2006215502A JP2006215502A JP2007040699A5 JP 2007040699 A5 JP2007040699 A5 JP 2007040699A5 JP 2006215502 A JP2006215502 A JP 2006215502A JP 2006215502 A JP2006215502 A JP 2006215502A JP 2007040699 A5 JP2007040699 A5 JP 2007040699A5
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- glass substrate
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- continuous firing
- roller
- display panel
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- 239000000758 substrate Substances 0.000 title claims description 59
- 238000010304 firing Methods 0.000 title claims description 27
- 239000011521 glass Substances 0.000 claims description 57
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000010583 slow cooling Methods 0.000 claims description 9
- 239000005350 fused silica glass Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 230000003746 surface roughness Effects 0.000 claims description 6
- 238000001816 cooling Methods 0.000 description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000002393 scratching Effects 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Description
本発明は、ディスプレイパネル用ガラス基板のローラハース式連続焼成炉及び連続焼成方法に関するものである。 The present invention relates to a roller hearth continuous baking furnace and a continuous baking method for a glass substrate for a display panel .
例えばプラズマディスプレイパネル用基板等のガラス基板に電極、誘電体、蛍光体等の膜形成を行うためには、ローラハース式連続焼成炉が用いられている。このローラハース式連続焼成炉では、例えばプラズマディスプレイパネル用ガラス基板等の板状被加熱物は、トンネル型の炉内を、所定温度まで加熱される加熱ゾーン、徐冷が行われる徐冷ゾーン、さらに常温程度まで冷却する冷却ゾーンに順次搬送されながら熱処理が行われている。図３は従来のローラハース式連続焼成炉を示す概略断面図であり、このローラハース式連続焼成炉について説明する。 For example, in order to form a film such as an electrode, a dielectric, and a phosphor on a glass substrate such as a plasma display panel substrate, a roller hearth type continuous firing furnace is used. In this roller hearth type continuous firing furnace, for example, a plate-like object to be heated such as a glass substrate for a plasma display panel is heated in a tunnel-type furnace to a predetermined temperature, a slow cooling zone in which slow cooling is performed, Heat treatment is performed while being sequentially conveyed to a cooling zone that cools to about room temperature. FIG. 3 is a schematic cross-sectional view showing a conventional roller hearth type continuous firing furnace, which will be described.
なお、従来のローラハース式連続焼成炉で、板状被加熱物Ａを直接ハースローラー２２上に載置して搬送しようとすると、加熱ゾーンや徐冷ゾーンのうち、特に板状被加熱物が熱歪みを生じる温度以上になる領域において、板状被加熱物Ａに大きな歪みが発生することとなり、要求される精度を満足することはできなかった。
本発明は上記の事情に鑑みて提案されたものであって、セッターを用いずに板状被加熱物を直接ハースローラー上に載置して搬送しても、板状被加熱物に歪みが発生するのを抑えることができるディスプレイパネル用ガラス基板のローラハース式連続焼成炉及び連続焼成方法を提供することを目的とする。
In a conventional roller hearth type continuous firing furnace, when the plate-shaped object A is placed directly on the hearth roller 22 and conveyed, the plate-shaped object to be heated is particularly heated in the heating zone or the slow cooling zone. In a region where the temperature is higher than the temperature at which distortion occurs, large distortion occurs in the plate-shaped object A, and the required accuracy cannot be satisfied.
The present invention has been proposed in view of the above circumstances, and even if a plate-shaped object to be heated is placed directly on a hearth roller without using a setter, the plate-shaped object is not distorted. It is an object of the present invention to provide a roller hearth type continuous firing furnace and a continuous firing method for a glass substrate for a display panel that can be prevented from occurring.
本発明は上記目的を達成するために以下の手段を採用している。すなわち、本発明のローラハース式連続焼成炉は、板状被加熱物としてのディスプレイパネル用ガラス基板に対して所定の温度条件に従って加熱、徐冷を含む一連の熱処理を行うトンネル型の炉内に、このガラス基板を搬送するための複数のハースローラーが所定のピッチ間隔で配列されたディスプレイパネル用ガラス基板のローラハース式連続焼成炉において、少なくとも上記ガラス基板が熱歪みを生じる温度以上になる領域の上記ピッチ間隔を、上記ガラス基板に歪みを生じることなく、このガラス基板をセッターを用いずにハースローラー上に直接載置して搬送可能な狭い間隔とし、かつ少なくとも上記領域のハースローラーの少なくとも表面が、溶融シリカで形成されたものである（請求項１）。
また、本願発明の連続焼成方法は、複数のハースローラーが所定のピッチ間隔で配列されたローラハース式連続焼成炉により、板状被加熱物としてのディスプレイパネル用ガラス基板に対して所定の温度条件に従って加熱、徐冷を含む一連の熱処理を行うディスプレイパネル用ガラス基板の連続焼成方法において、少なくとも上記ガラス基板が熱歪みを生じる温度以上になる領域では、上記ガラス基板に歪みを生じることのない狭いピッチ間隔とし、かつ少なくとも表面が溶融シリカで形成されたハースローラー上に当該ガラス基板をセッターを用いずに直接載置して搬送しながら上記一連の熱処理を行うものである（請求項３）。
このようにハースローラーのピッチ間隔を狭くすることにより、ガラス基板とハースローラーが接する面積、すなわちガラス基板を支持する面積を多くすることができる。これによって、ガラス基板がハースローラー間の隙間により撓むことを防止することができるので、セッターを用いずにガラス基板を直接ハースローラー上に載置して搬送しても、ガラス基板に歪みが発生するのを抑えることができる。
また、ガラス基板と接触するハースローラーの表面が溶融シリカであるので、ガラス基板の表面にキズをつけ難くすることができる。
The present invention employs the following means to achieve the above object. That is, the roller hearth type continuous firing furnace of the present invention is a tunnel-type furnace that performs a series of heat treatments including heating and slow cooling according to a predetermined temperature condition for a glass substrate for a display panel as a plate-shaped object to be heated. In a roller hearth continuous firing furnace for glass substrates for display panels in which a plurality of hearth rollers for conveying the glass substrate are arranged at a predetermined pitch interval, at least in the region where the glass substrate is at or above the temperature at which thermal distortion occurs the pitch, without distortion to the glass substrate, at least the surface of the glass substrate is placed directly on the hearth rollers without using setter and narrow spacing can be conveyed to, and at least the region of the hearth rollers , Formed of fused silica (claim 1).
The continuous firing method of the present invention is a roller hearth type continuous firing furnace in which a plurality of hearth rollers are arranged at a predetermined pitch interval, according to a predetermined temperature condition for a glass substrate for a display panel as a plate-shaped object to be heated. In a continuous firing method of a glass substrate for display panels that performs a series of heat treatments including heating and slow cooling, at least in a region where the glass substrate is at or above a temperature at which thermal distortion occurs, a narrow pitch that does not cause distortion of the glass substrate The above-mentioned series of heat treatment is performed while the glass substrate is directly placed and transported without using a setter on a hearth roller having at least a surface and formed of fused silica.
Thus, by narrowing the pitch interval of the hearth rollers, the area where the glass substrate and the hearth roller are in contact, that is, the area supporting the glass substrate can be increased. This prevents the glass substrate from being bent by the gap between the hearth rollers, so even if the glass substrate is directly placed on the hearth roller and transported without using a setter, the glass substrate is not distorted. Occurrence can be suppressed.
In addition, since the surface of the hearth roller in contact with the glass substrate is fused silica, the surface of the glass substrate can be hardly scratched.
また、上記ローラハース式連続焼成炉は、少なくとも上記ガラス基板が熱歪みを生じる温度以上になる領域の上記ハースローラーの表面粗さを、ガラス基板の表面粗さ以下とすることが望ましい（請求項２）。この場合、ガラス基板と接触するハースローラーの表面が滑らかに仕上げられているので、ガラス基板の表面にキズがつくのをより効果的に防止することができる。 In the roller hearth-type continuous firing furnace, it is desirable that the surface roughness of the hearth roller at least in a region where the glass substrate is at a temperature at which thermal distortion occurs is not more than the surface roughness of the glass substrate. ). In this case, since the surface of the hearth roller in contact with the glass substrate is smoothly finished, it is possible to more effectively prevent the surface of the glass substrate from being scratched.
以上のように、本発明に係るローラハース式連続焼成炉及び連続焼成方法では、ディスプレイパネル用ガラス基板に歪みを生じることなく、このガラス基板をハースローラー上に直接載置して搬送可能なように、少なくともガラス基板が熱歪みを生じる温度以上になる領域のハースローラーのピッチ間隔を狭く構成しているので、ガラス基板がハースローラー間の隙間により撓むことを防止することができる。これによって、セッターを用いずにガラス基板を直接ハースローラー上に載置して搬送しても、ガラス基板に歪みが発生するのを抑えることができる。また、焼成にセッターを必要としないので、セッターにかかるコストを無くすことが可能である。また、焼成にセッターを必要としないので、ガラス基板だけを加熱すればよく、消費電力が少なくなる。また、ガラス基板より寸法が大きいセッターを使用しないので、炉自体を小さくすることができる。 As described above, in the roller hearth type continuous firing furnace and the continuous firing method according to the present invention, the glass substrate can be directly placed on the hearth roller and transported without causing distortion in the glass substrate for display panel. In addition, since the pitch interval of the hearth rollers in the region where the glass substrate is at least the temperature at which thermal distortion occurs is narrow, the glass substrate can be prevented from being bent by the gap between the hearth rollers. Accordingly, even if the glass substrate is directly placed on the hearth roller and transported without using a setter, it is possible to suppress the occurrence of distortion in the glass substrate . In addition, since no setter is required for firing, it is possible to eliminate the cost of the setter. In addition, since no setter is required for firing, only the glass substrate needs to be heated, and power consumption is reduced. Moreover, since a setter having a size larger than that of the glass substrate is not used, the furnace itself can be made small.
また、上記ガラス基板と接触するハースローラーの表面が溶融シリカであるので、ガラス基板の表面にキズをつけ難くすることができる。
また、上記ハースローラーの表面粗さがガラス基板の表面粗さ以下である場合、ガラス基板と接触するハースローラーの表面が滑らかに仕上げられているので、ガラス基板の表面にキズがつくのをより効果的に防止することができる。
Moreover, since the surface of the hearth roller in contact with the glass substrate is fused silica, the surface of the glass substrate can be hardly damaged.
Further, when the surface roughness of the hearth rollers is less than the surface roughness of the glass substrate, because the surface of the hearth rollers in contact with the glass substrate are smooth finish, from scratching the surface of the glass substrate more It can be effectively prevented.
図１は本発明に係るディスプレイパネル用基板のローラハース式連続焼成炉の一実施の形態を示す概略断面図であり、図２はこのローラハース式連続焼成炉の全体構成を示す概略図である。以下、図に基づいてこのローラハース式連続焼成炉について説明する。
この連続焼成炉には、図２に示すようにディスプレイパネル用ガラス基板である板状被加熱物Ａを所定温度まで加熱する加熱ゾーンＢと、所定温度まで加熱された板状被加熱物Ａを徐冷する徐冷ゾーンＣと、徐冷された板状被加熱物Ａをさらに常温程度まで冷却する冷却ゾーンＤとが設けられている。板状被加熱物Ａは、トンネル型の炉内１を加熱ゾーンＢ、徐冷ゾーンＣ、冷却ゾーンＤと順次移動されながら熱処理が行われる。
FIG. 1 is a schematic cross-sectional view showing an embodiment of a roller hearth continuous firing furnace for a display panel substrate according to the present invention, and FIG. 2 is a schematic view showing the overall configuration of the roller hearth continuous firing furnace. The roller hearth type continuous firing furnace will be described below with reference to the drawings.
In this continuous firing furnace, as shown in FIG. 2, a heating zone B for heating a plate-like heated object A which is a glass substrate for a display panel to a predetermined temperature, and a plate-like heated object A heated to a predetermined temperature are provided. A slow cooling zone C for gradually cooling and a cooling zone D for further cooling the gradually cooled plate-like heated object A to about room temperature are provided. The plate-shaped object A is heat-treated while being sequentially moved in the tunnel-type furnace 1 to the heating zone B, the slow cooling zone C, and the cooling zone D.
Claims (3)
少なくとも上記ガラス基板が熱歪みを生じる温度以上になる領域の上記ピッチ間隔を、上記ガラス基板に歪みを生じることなく、このガラス基板をセッターを用いずにハースローラー上に直接載置して搬送可能な狭い間隔とし、かつ少なくとも上記領域のハースローラーの少なくとも表面が、溶融シリカで形成されたことを特徴とするディスプレイパネル用ガラス基板のローラハース式連続焼成炉。 A plurality of hearth rollers for transporting the glass substrate into a tunnel-type furnace that performs a series of heat treatments including heating and slow cooling on a glass substrate for a display panel as a plate-like object to be heated according to a predetermined temperature condition In a roller hearth continuous firing furnace for glass substrates for display panels in which are arranged at a predetermined pitch interval,
At least the pitch of the region where the glass substrate is equal to or higher than the temperature causing thermal distortion, without distortion to the glass substrate, can convey the glass substrate is placed directly on the hearth rollers without using setter A roller hearth- type continuous firing furnace for glass substrates for display panels , characterized in that at least the surface of the hearth roller in at least the above region is formed of fused silica .
少なくとも上記ガラス基板が熱歪みを生じる温度以上になる領域では、上記ガラス基板に歪みを生じることのない狭いピッチ間隔とし、かつ少なくとも表面が溶融シリカで形成されたハースローラー上に当該ガラス基板をセッターを用いずに直接載置して搬送しながら上記一連の熱処理を行うことを特徴とするディスプレイパネル用ガラス基板の連続焼成方法。At least in a region where the temperature of the glass substrate is higher than the temperature at which heat distortion occurs, the glass substrate is set on a hearth roller having a narrow pitch interval that does not cause distortion of the glass substrate and at least the surface formed of fused silica. A continuous baking method for a glass substrate for a display panel, wherein the series of heat treatments is carried out while being placed and transported directly without using a glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006215502A JP2007040699A (en) | 2006-08-08 | 2006-08-08 | Roller hearth type continuous furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006215502A JP2007040699A (en) | 2006-08-08 | 2006-08-08 | Roller hearth type continuous furnace |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001119746A Division JP2002318077A (en) | 2001-04-18 | 2001-04-18 | Roller hearth type continuous burning furnace |
Publications (2)
| Publication Number | Publication Date |
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| JP2007040699A JP2007040699A (en) | 2007-02-15 |
| JP2007040699A5 true JP2007040699A5 (en) | 2008-04-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP2006215502A Pending JP2007040699A (en) | 2006-08-08 | 2006-08-08 | Roller hearth type continuous furnace |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2009252347A (en) * | 2008-04-01 | 2009-10-29 | Panasonic Corp | Plasma display panel and method for manufacturing the same |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1120725A (en) * | 1978-01-25 | 1982-03-30 | Norman C. Nitschke | Apparatus for bending and tempering glass |
| JPS6215562U (en) * | 1985-07-12 | 1987-01-30 | ||
| JPH01317911A (en) * | 1988-06-14 | 1989-12-22 | Toshiba Ceramics Co Ltd | Ceramic roll for carrying |
| US5205398A (en) * | 1990-07-27 | 1993-04-27 | Eltech Systems Corporation | Insulating roll cover |
| JPH07133126A (en) * | 1993-11-01 | 1995-05-23 | Asahi Glass Co Ltd | Conveyor roll of glass heating furnace |
| JP2000106084A (en) * | 1998-09-29 | 2000-04-11 | Dainippon Printing Co Ltd | Manufacture of plasma display panel and management of firing plate for manufacturing plasma display panel |
| JP2000130951A (en) * | 1998-10-28 | 2000-05-12 | Ngk Insulators Ltd | Substrate firing furnace for plasma display panel and furnace member therefor |
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