JP2007038357A - Manufacturing method of grinding wheel and grinding stone - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a grinding wheel and a grinding stone capable of effectively supplying grinding water to a grinding surface of the grinding stone. <P>SOLUTION: The grinding wheel 2 includes a grinding stone base 3 and a plurality of grinding stones 4 mounted in a circumferential direction on an end surface of the base 3. The grinding stone 4 is made of a spirally formed hollow grinding stone, and has spiral gaps to prevent spiral wall surfaces from coming into contact. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a grinding wheel provided with a grinding wheel for grinding a workpiece such as a semiconductor wafer and a method for manufacturing the grinding wheel.

  As is well known to those skilled in the art, in a semiconductor device manufacturing process, a wafer on which a plurality of devices such as ICs and LSIs are formed is ground by a grinding device on a back surface thereof before being divided into individual chips. It is formed to a thickness. The wafer is formed of a brittle difficult-to-cut material such as silicon, silicon nitride, gallium arsenide, sapphire, lithium tantalate, or silicon carbide. As grindstones for grinding wafers, vitrified grindstones in which diamond abrasive grains are bonded by vitrified bonds, metal bond grindstones in which diamond abrasive grains are bonded by metal bonds, and resin bond grindstones in which diamond abrasive grains are bonded by resin bonds are generally used. Yes. Since a wafer made of silicon nitride, sapphire, or silicon carbide has high hardness, a vitrified grindstone or metal bond grindstone that holds abrasive grains firmly is used.

  However, vitrified grindstones and metal bond grindstones have a characteristic that the grinding ability is maintained because the abrasive grain holding power is strong, while the self-generated blade action is insufficient because the abrasive grains are firmly held. In this way, vitrified wheels and metal bond wheels have insufficient self-generated blade action, so clogging occurs in a short period of time, so frequent dressing is required, and surface to be ground and streak-like scratches are present on the surface to be ground. There is a problem of causing.

In order to solve such a problem, a vitrified bond grindstone has been proposed in which pores are formed in an abrasive grain layer in which abrasive grains are bonded by vitrified bond to promote the self-generated blade action. (For example, see Patent Document 1)
JP 2003-136410 A

In order to improve the self-sharpening action of the grinding wheel, it is important that the grinding water is effectively supplied to the grinding surface of the grinding wheel.
However, the above-described grinding wheel is formed in a rectangular parallelepiped, a cylindrical body, and a cylindrical body, and it is not always possible to effectively supply grinding water to the grinding surface of the grinding wheel.

  This invention is made | formed in view of the said fact, The main technical subject is to provide the manufacturing method of the grinding wheel which can effectively supply grinding water to the grinding surface of a grinding stone, and a grinding stone. is there.

In order to solve the main technical problem, according to the present invention, there is provided a grinding wheel comprising a grinding wheel base and a plurality of grinding wheels mounted circumferentially on an end surface of the grinding wheel base,
The grinding wheel is composed of a hollow grindstone formed in a spiral shape, and is formed with a spiral gap so that the wall surface of the spiral wall does not contact.
A grinding wheel is provided.

Moreover, according to the present invention, there is provided a method for producing a plurality of grinding wheels mounted circumferentially on the end face of the grinding wheel base,
Abrasive kneaded material application step of applying an abrasive kneaded material produced by kneading abrasive grains and a bond material to the surface of an organic material sheet having a predetermined thickness to a predetermined thickness,
A roll body forming step of forming a roll body by spirally winding the abrasive kneaded material applied to the organic sheet together with the organic sheet;
A firing step of firing the roll body at a temperature at which the organic material sheet is oxidized and the bond material is sintered;
A shaping step of shaping the fired roll body into a predetermined dimension,
A method for producing a grinding wheel is provided.

The abrasive kneaded product is composed of a vitrified abrasive kneaded product formed by kneading diamond abrasive grains and a vitrified bond mainly composed of silicon dioxide, the organic material sheet is made of paper, and the firing step Bakes the roll body at a temperature of 400 to 500 ° C. for 1 hour to oxidize the organic sheet, and then bakes the roll body at a temperature of 700 to 800 ° C. for 4 hours.
The abrasive kneaded material is composed of a metal bond abrasive kneaded material produced by kneading diamond abrasive grains and a metal bond mainly composed of copper and tin, and the organic material sheet is made of paper. In the firing step, the roll body is fired at a temperature of 400 to 500 ° C. for 1 hour to oxidize the organic sheet, and then the roll body is fired at a temperature of 800 to 900 ° C. for 4 hours.

  The grinding wheel according to the present invention comprises a hollow grinding wheel in which the grinding wheel is formed in a spiral shape, and is formed with a spiral gap so that the wall surface of the spiral wall does not come into contact with the grinding wheel. Grinding water is reliably supplied to the grinding surface through the spiral gap, and the grinding water supplied to the spiral gap is effectively discharged from the open outer periphery of the spiral gap and the circulation of the grinding water is good Therefore, the cooling of the grinding wheel and the self-generated blade action are improved. Thus, since the self-sharpening action of the grinding wheel is improved, even difficult-to-cut materials such as sapphire and silicon carbide can be efficiently ground. In addition, by mounting the grinding wheel according to the present invention on the wheel mount of the grinding apparatus, even when the chuck table of the grinding apparatus is made of a difficult-to-cut material such as silicon carbide, the upper surface of the chuck table is ground with a grinding wheel. Thus, it is possible to satisfactorily perform self-grinding for matching the grinding surface of the grinding wheel with the upper surface of the chuck table.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of a grinding wheel and a method for producing a grinding wheel constructed according to the present invention will be described in more detail with reference to the accompanying drawings.

FIG. 1 shows a perspective view of a grinding wheel constructed in accordance with the present invention.
A grinding wheel 2 shown in FIG. 1 includes an annular grindstone base 3 and a plurality of grinding wheels 4 attached to the lower surface (end surface) of the annular grindstone base 3 in the circumferential direction. A plurality of female screw holes 31 are formed in the annular grindstone base 3 at intervals in the circumferential direction, and fastening screws disposed by inserting a wheel mount (not shown) of the grinding device into the female screw holes 31 are provided. By screwing, the grindstone base 3 is mounted on the wheel mount. A fitting recess 32 having a circular cross section is formed on the lower surface (end surface) of the grindstone base 3 as shown in FIG. Further, the grindstone base 3 has an annular passage 33 formed at an intermediate portion in the thickness direction, a grinding water passage 34 communicating the annular passage 33 and the fitting recess 32, and an upper surface communicating with the annular passage 33. A plurality of grinding water supply passages 35 are provided.

  As shown in FIGS. 2 and 3, the grinding wheel 4 is a hollow grinding wheel formed in a spiral shape, and is formed with a spiral gap 42 so that the wall surface of the spiral wall 41 does not contact. In the illustrated embodiment, the grinding wheel 4 has a diameter D of 10 mm, a wall 41 having a thickness T of 0.3 to 0.5 mm, and a gap S between the walls 42 of 0.1 to 0.2 mm. Has been. As shown in FIG. 2, the grinding wheel 4 configured in this way is partially fitted into a fitting recess 32 formed in the grinding wheel base 3, and its outer peripheral surface is a wall surface of the fitting recess 32 by an adhesive. It is fixed to.

  The grinding wheel 2 in the illustrated embodiment is configured as described above, and is rotated together with a wheel mount (not shown) mounted during grinding and is provided on the grindstone base 3 of the grinding wheel 2 as shown in FIG. Grinding water is supplied to the ground grinding water supply passage 35. The grinding water enters the annular passage 33 through the grinding water supply passage 35 and is supplied to the grinding wheel 4 from the upper side through the grinding water passage 34. The grinding water supplied to the grinding wheel 4 is reliably supplied to the lower grinding surface through the spiral gap 42 so that the wall surface of the wall 41 does not contact. Further, the grinding water supplied to the spiral gap 42 is effectively discharged because the spiral gap 42 is open on the outer peripheral side, and the circulation of the grinding water is improved. On the other hand, the grinding water introduced into the annular passage 33 flows along the inner peripheral surface of the grinding wheel 2 and is supplied to the grinding portion of the grinding wheel 4.

  As described above, since the grinding stone 4 in the illustrated embodiment is formed with the spiral gap 42 so that the wall surface of the spiral wall 41 does not contact, the grinding water supplied to the grinding stone 4 is spiral. The ground water is reliably supplied to the grinding surface on the lower surface through the gap 42, and the grinding water supplied to the spiral gap 42 is effectively discharged from the outer peripheral opening portion of the spiral gap 42, and the circulation of the grinding water is good. Therefore, the self-generated blade action of the grinding wheel 4 is improved. Thus, since the grinding wheel 2 according to the present invention has a good self-sharpening action of the grinding wheel 4, it can be efficiently ground even with difficult-to-cut materials such as sapphire and silicon carbide. Further, by mounting the grinding wheel 2 according to the present invention on the wheel mount of the grinding apparatus, even when the chuck table of the grinding apparatus is made of a difficult-to-cut material such as silicon carbide, the upper surface of the chuck table is provided by the grinding wheel 4. Thus, self-grinding can be satisfactorily performed by matching the grinding surface of the grinding wheel with the upper surface of the chuck table.

Next, a method for manufacturing the grinding wheel 4 will be described with reference to FIGS.
First, as shown in FIG. 4, an organic sheet 401 such as paper is prepared. The organic sheet 401 is formed to have a thickness of 0.1 to 0.2 mm and is cut into a predetermined size.

Next, as shown in FIG. 5, an abrasive kneaded material application step of applying an abrasive kneaded material 402 formed by kneading abrasive grains and a bond material to the surface of the organic material sheet 401 to a predetermined thickness. carry out.
The abrasive kneaded material 402 is, for example, a vitrified abrasive kneaded material produced by kneading diamond abrasive grains having a particle size of about 10 μm and vitrified bonds mainly composed of silicon dioxide, A metal bond abrasive kneaded product produced by kneading about 10 μm of diamond abrasive grains and a metal bond mainly composed of copper and tin is used. The abrasive kneaded material 402 is uniformly applied with a thickness of 0.3 to 0.5 mm.

If the abrasive grain kneaded material application process described above is performed, a roll body forming process is performed in which the grindstone material 402 applied to the surface of the organic material sheet 401 is spirally wound together with the organic material sheet 401 to form a roll body.
That is, as shown in FIG. 6A, the organic sheet 401 and the abrasive kneaded material 402 are wound around the cylindrical rod 5 in a spiral shape. Then, by pulling out the cylindrical bar 5, a roll body 40 wound in a spiral shape is formed as shown in FIG. In the embodiment shown in FIG. 6 (a), an example in which the organic sheet 401 is wound around the cylindrical rod 5 with the organic sheet 401 inside is shown. However, the organic sheet 401 may be wound outside. Note that the organic material sheet 401 and the abrasive kneaded material 402 may be wound in a spiral shape without using the cylindrical bar 5.

Next, a firing process is performed in which the roll body 40 is fired at a temperature at which the organic sheet is oxidized and the bond material is sintered.
In the firing step, when the abrasive kneaded material 402 is a vitrified abrasive kneaded material and the organic material sheet 401 is paper, the roll body 40 is baked at a temperature of 400 to 500 ° C. for 1 hour in a calcining furnace. 401 is oxidized, and then the roll body 40 is fired at a temperature of 700 to 800 ° C. for 4 hours. When the abrasive kneaded material 402 is a metal bond abrasive kneaded material, the roll body 40 is baked at a temperature of 400 to 500 ° C. for 1 hour in a baking furnace to oxidize the organic material sheet, and then the roll body is Bake at a temperature of 800 to 900 ° C. for 4 hours. When the abrasive kneaded material 402 is a metal bond abrasive kneaded material, a reducing furnace is used as the firing furnace.
By carrying out the firing step as described above, the organic material sheet 401 is burned away, and the roll body 40 fired as shown in FIG. 7 has a spiral gap 42 so that the wall surface of the spiral wall 41 does not contact. Is formed.

  When the above-described firing process is performed, a shaping process is performed in which a spiral gap 42 is formed so that the wall surface of the spiral wall 41 does not contact and the roll body 40 is shaped to a predetermined size. As shown in FIG. 4, a grinding wheel 4 having a predetermined dimension can be obtained.

1 is a perspective view of a grinding wheel constructed in accordance with the present invention. Sectional drawing which expands and shows the principal part of the grinding wheel shown in FIG. The top view of the grinding wheel which comprises the grinding wheel shown in FIG. The perspective view of the organic substance sheet used when manufacturing the grinding wheel which comprises the grinding wheel shown in FIG. Explanatory drawing of the abrasive grain kneaded material application | coating process in the manufacturing method of the grinding wheel by this invention. Explanatory drawing of the roll body formation process in the manufacturing method of the grinding wheel by this invention. The perspective view of the roll body which implemented the baking process in the manufacturing method of the grinding stone by this invention. The perspective view of the grinding wheel which implemented the shaping process in the manufacturing method of the grinding wheel by this invention.

Explanation of symbols

2: Grinding wheel 3: Annular grindstone base 31: Female screw hole 32: Fitting recess 33: Annular passage 34: Grinding water passage 35: Grinding water supply passage 4: Grinding wheel 41: Spiral wall 42: Spiral shape 40: Roll body 401: Organic sheet 402: Abrasive grain kneaded material

Claims (4)

A grinding wheel comprising a grinding wheel base and a plurality of grinding wheels mounted circumferentially on an end surface of the grinding wheel base,
The grinding wheel is composed of a hollow grindstone formed in a spiral shape, and is formed with a spiral gap so that the wall surface of the spiral wall does not contact.
A grinding wheel characterized by that. A method for producing a plurality of grinding wheels mounted circumferentially on an end face of a grinding wheel base,
Abrasive kneaded material application step of applying an abrasive kneaded material produced by kneading abrasive grains and a bond material to the surface of an organic material sheet having a predetermined thickness to a predetermined thickness,
A roll body forming step of forming a roll body by spirally winding the abrasive kneaded material applied to the organic sheet together with the organic sheet;
A firing step of firing the roll body at a temperature at which the organic material sheet is oxidized and the bond material is sintered;
A shaping step of shaping the fired roll body into a predetermined dimension,
A method for producing a grinding wheel characterized by that. The abrasive kneaded material is composed of a vitrified abrasive kneaded material produced by kneading diamond abrasive grains and a vitrified bond mainly composed of silicon dioxide, and the organic material sheet is made of paper,
The grinding wheel manufacturing method according to claim 2, wherein in the firing step, the roll body is fired at a temperature of 400 to 500 ° C for 1 hour to oxidize the organic sheet, and then the roll body is fired at a temperature of 700 to 800 ° C for 4 hours. Method. The abrasive kneaded product is composed of a metal bond abrasive kneaded product produced by kneading diamond abrasive grains and a metal bond mainly composed of copper and tin, and the organic sheet is made of paper.
The grinding wheel manufacturing method according to claim 2, wherein in the firing step, the roll body is fired at a temperature of 400 to 500 ° C for 1 hour to oxidize the organic sheet, and then the roll body is fired at a temperature of 800 to 900 ° C for 4 hours. Method.

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