JP2007036039A - Exposure pattern formation method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce manufacturing costs by enhancing versatility in a light source array, a fiber, and a fiber bundle and simplifying the formation process of an exposure pattern. <P>SOLUTION: An exposure pattern formation method uses the light source array 4 where light sources 8 are placed side by side vertically and horizontally, and the fiber bundle 6, where output side edges of a plurality of fibers 11 in which each of input side edges is optically connected to each of the light sources 8 in a one-to-one relationship are bundled into one and output ends are placed side by side on an end face. In the exposure pattern formation method, each of the input ends of the fibers 11 is optically connected to each of the light sources 8 in a one-to-one relationship randomly, positions of the output ends of the fibers 11 for outputting light when each of the light sources 8 is lit successively are detected successively, the correlation between each of the light sources 8 and each position of the output ends of the fibers 11 is stored, and each of the light sources 8 is lit based on the correspondence, thus forming a desired exposure pattern on the end face of the fiber handle 6. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an exposure pattern forming method.

  Conventionally, a method of forming an exposure pattern of a semiconductor integrated circuit, a liquid crystal device, or the like using a light source array in which LEDs having high luminous efficiency are arranged in an array has been proposed.

As an exposure pattern forming method using such a light source array, by using a fiber bundle that bundles a plurality of optical fibers arranged in the optical path of the output light of the light source, the unit light source is reduced, and the amount of uneven illumination is reduced. An exposure pattern forming method for reducing the size is known (Patent Document 1).
JP 2004-228548 A

  However, in the invention described in Patent Document 1, in order to emit the exposure pattern formed in the light source array as it is from the end face of the fiber bundle, the arrangement of the light sources in the light source array and the arrangement of the fibers in the end face of the fiber bundle are all 1: 1. It was necessary to use light source arrays and fiber bundles associated with each other. As a result, there are problems in that, as the number of light sources in the light source array increases, the manufacturing process of the light source array and the fiber bundle becomes complicated, the manufacturing cost increases, and the versatility of the parts is limited.

  SUMMARY OF THE INVENTION An object of the present invention is to provide an exposure pattern forming method using a light source array and a fiber bundle. The exposure pattern forming method can simplify the part manufacturing process to reduce the manufacturing cost and increase the versatility of the part. Is to provide.

  In order to solve the above-mentioned problems, the invention described in claim 1 is a plurality of light source arrays in which light sources are arranged side by side vertically and a plurality of input side end portions optically connected to each of the light sources in a one-to-one relationship. An exposure pattern forming method using a fiber bundle in which the output end portions of the fibers are bundled into one and the output ends are arranged in parallel on the end face, wherein each of the input ends of the fibers is assigned to each of the light sources. Randomly optically connect in a one-to-one correspondence, sequentially detect the position of the output end of the fiber that outputs light when each of the light sources is turned on sequentially, and each of the light sources and the A correspondence with each position of the output end of the fiber on the end face of the fiber bundle is stored, and lighting control of each of the light sources is performed based on the correspondence, so that a desired exposure pattern is obtained on the end face of the fiber bundle. And forming a.

  According to a second aspect of the present invention, a light source array in which light sources are arranged side by side in a vertical direction, a diffractive optical element unit in which a plurality of diffractive optical elements are arranged side by side in a vertical direction, and an input side end are provided in each of the light sources A plurality of fibers that are optically connected in a one-to-one relationship and whose output side end portions are optically connected to each of the diffractive optical elements in a one-to-one relationship are arranged in the middle of the light source and the diffractive optical element. A fiber bundle that is bundled together, wherein each of the input side ends of the fiber is randomly optically connected to each of the light sources in a one-to-one correspondence, and The diffractive optical element in which each of the output side end portions is optically connected randomly so as to correspond to each of the diffractive optical elements on a one-to-one basis, and light is output when the light sources are sequentially turned on. The position of In the diffractive optical element unit, the correspondence between each of the light sources and the position of each of the diffractive optical elements in the diffractive optical element unit is stored, and lighting control of each of the light sources is performed based on the correspondence. A desired exposure pattern is formed.

  According to the first aspect of the present invention, it is possible to confirm the position of the fiber corresponding to the light source by detecting the position of the fiber that emits light one by one when the light source is turned on. Then, by storing the correspondence, it is possible to determine which light source should be controlled to be lit in order to form a desired exposure pattern on the end face of the fiber bundle. Accordingly, the light source and the fiber may be optically connected so as to correspond one-to-one in an arbitrary order, and the light source array and the fiber bundle in which the arrangement order of the light sources and the arrangement order of the fibers are associated with each other. There is no need to use. Therefore, even when the number of light sources in the light source array is large, it is possible to simplify the manufacturing process of the parts to reduce the manufacturing cost and to increase the versatility of the parts.

  According to the second aspect of the present invention, the position of the diffractive optical element corresponding to the light source can be confirmed by detecting the position of the diffractive optical element from which light is emitted when the light source is turned on one by one. It becomes possible. By storing the correspondence, it is possible to determine which light source should be controlled to light in order to form a desired exposure pattern in the diffractive optical element unit. Accordingly, the light source and the diffractive optical element may be optically connected so as to correspond one-to-one in an arbitrary order, and the light source array order and the diffractive optical element array order are associated with each other. There is no need to use arrays and diffractive optical element units. Therefore, even when the number of light sources in the light source array is large, it is possible to simplify the manufacturing process of the parts to reduce the manufacturing cost and to increase the versatility of the parts.

(First embodiment)
First, a first embodiment of the present invention will be described with reference to FIGS.

  As shown in FIG. 1, an exposure apparatus 1 used in an exposure pattern forming method according to the present embodiment uses an exposure pattern as an exposure optical system for projecting and exposing a desired exposure pattern onto a substrate 3 supported by a stage 2. A light source array 4, a diffractive optical element unit 5, a fiber bundle 6, and a projection lens 7.

  As shown in FIG. 2, a plurality of light sources 8 are arranged in the light source array 4 vertically and horizontally. Each light source 8 is connected to a switching circuit 22 (see FIG. 3) for injecting current from an electrode of a semiconductor laser (LD) to generate laser light, and each light source 8 emits light independently. And can be controlled. Note that the light sources 8 of the light source array 4 may be arranged in a staggered manner. Further, as the light source 8, a light emitting diode (LED) may be used.

  Each light source 8 is provided with a glass window 9 for emitting laser light emitted from a semiconductor laser (LD) to the outside.

  In addition, a diffractive optical element unit 5 configured by a plurality of diffractive optical elements (Diffractive Optical Elements) 10 arranged side by side in the vertical and horizontal directions is provided at a position close to the light source array 4. The plurality of diffractive optical elements 10 are provided so as to correspond to the respective light sources 8, and laser light emitted from the window 9 of one light source 8 is incident on one diffractive optical element 10. .

  Here, the diffractive optical element 10 included in the diffractive optical element unit 5 shapes the laser light emitted in an elliptical shape into a substantially square or rectangular shape, and forms the laser light emitted from each light source 8 without gaps. The direction of the laser beam is controlled. Further, the diffractive optical element 10 is configured to convert the power distribution of the laser light into a top hat type, thereby making the intensity of the laser light uniform and performing uniform exposure in a short time. In addition, each diffractive optical element 10 is configured to allow incident laser light to enter from the input end of each fiber 11. In this embodiment, one diffractive optical element 10 performs a plurality of functions. However, a plurality of diffractive optical elements 10 are provided for one light source 8, and each diffractive optical element 10 has a function. It is also possible to make it.

  Further, as shown in FIG. 1, each of the input side end portions of the plurality of fibers 11 is disposed so as to be close to each of the diffractive optical elements 10, whereby each of the light sources 8 included in the light source array 4 is provided. And are optically connected in a random order so as to correspond one-to-one.

  Further, the output side end portions of the plurality of fibers 11 are bundled together by the fiber bundle 6 so that the output ends of the fibers 11 are juxtaposed with the end face of the fiber bundle 6.

  As described above, in the present embodiment, the plurality of fibers 11 and each of the light sources 8 can be connected in a random order, and the order of arrangement of the light sources 8 in the light source array 4 and the end face of the fiber bundle 6 can be determined. The order of arrangement of the output ends of the plurality of fibers 11 does not need to correspond.

  The fiber bundle 6 is configured to be horizontally moved or rotated by a fiber bundle driving unit 20 (see FIG. 3). Thereby, when the fiber 11 is disconnected or when the number of the fibers 11 on the end face of the fiber bundle 6 is larger than the number of the light sources 8 in the light source array 4, the fiber bundle 6 is horizontally moved or rotated to The fiber 11 is made to correspond to the light source 8 to be emitted, so that it is possible to prevent a blackened portion from being always formed in the exposure pattern.

  In the present embodiment, the fiber bundle 6 is configured to horizontally move or rotate. However, the fiber bundle 6 and the light source array 4 may be relatively horizontally moved or rotated. It is also possible to adopt a configuration in which both the light source array 4 and the fiber bundle 6 are horizontally moved or rotated.

  Further, the fiber bundle 6 of the present embodiment has a rectangular parallelepiped shape. By emitting light having a shape corresponding to the cross-sectional shape of the fiber bundle 6, the laser light is made substantially square or rectangular from each of adjacent light sources. The output light can be imaged without any gap. The fiber bundle 6 can also be formed in a cylindrical shape.

  Next, the laser light emitted from the fiber bundle 6 enters the projection lens 7. The projection lens 7 is configured by a reduction projection lens, and reduces the optical image by the laser beam transmitted from the fiber bundle 6 to form an image on the substrate 3 supported by the stage 2.

  As shown in FIG. 1, the exposure apparatus 1 used for the exposure pattern forming method according to the present embodiment includes a half mirror 12 as a detection optical system that detects the position of the output end of the fiber 11 that emits laser light. A condenser lens 13 and a light spot position detector 14 are provided.

  The half mirror 12 reflects light emitted from the output end of the fiber 11 in the direction of the condenser lens 13.

  The condensing lens 13 condenses the projection light from the half mirror 12 on the light spot position detector 14 as a light spot.

  The light spot position detector 14 is provided on the focal plane of the condenser lens 13 and detects the position of the light spot formed by the light emitted from the condenser lens 13. The light spot position detector 14 of the present embodiment is constituted by a position sensitive photodiode, a CCD array, or the like, and detects the light spot position on the xy plane as shown in FIG. The position of the output end of the fiber 11 that emits laser light is detected on the end face of the bundle 6.

  Next, FIG. 3 shows a functional configuration of the exposure apparatus 1 used in the exposure pattern forming method according to the present embodiment.

  As shown in FIG. 3, the exposure apparatus 1 according to this embodiment includes a control device 15. The control unit 16 included in the control device 15 includes a CPU (Central Processing Unit), a RAM (Random Access Memory) composed of a rewritable semiconductor element, and a ROM (Read Only Memory) composed of a nonvolatile semiconductor memory. Has been.

  Each component of the exposure apparatus 1 is connected to the control unit 16, and the control unit 16 expands the processing program recorded in the ROM to the RAM and executes the processing program by the CPU, thereby each of these components. The components are driven and controlled.

  The input unit 17 included in the control device 15 includes a keyboard, a mouse, a touch panel, and the like, and an instruction regarding an exposure pattern can be input by a user. Further, the input unit 17 can be configured so that a recording medium such as a disk can be loaded, and information related to the exposure pattern can be read from the recording medium.

  The storage unit 18 provided in the control device 15 is a recording memory including a semiconductor memory and has a recording area for recording information transmitted from each component of the exposure apparatus 1. The storage unit 18 may be, for example, a built-in memory such as a flash memory, a removable memory card or a memory stick, or a magnetic recording medium such as a hard disk or a floppy (registered trademark) disk. Good.

  Further, the storage unit 18 of the present embodiment stores the correspondence between each of the light sources 8 included in the light source array 4 and each position of the output end of the fiber 11 on the end face of the fiber bundle 6.

  As shown in FIG. 4, the light spot position detector 14, the exposure pattern control unit 19, the fiber bundle driving unit 20, and the stage driving unit 21 are electrically connected to the control unit 16.

The light spot position detector 14 detects the position of the output end of the fiber 11 that emits laser light. For example, as shown in FIG. 2, if the light spot position detected when the light source 8a is turned on is (X, Y) = (4, 3), the position is the output of the fiber 11 corresponding to the light source 8a. Judged as the end position. As described above, the light sources 8b, 8c,... Are similarly detected one by one, the position of the output end of the fiber 11 from which the laser light is output is determined, and the output end of the fiber 11 on the end face of the fiber bundle 6 is determined. The correspondence between the position and the light source 8 connected to the fiber 11 is stored in the storage unit 18.

  Thereby, even if the order of arrangement of the light sources 8 in the light source array 4 does not correspond to the order of arrangement of the output ends of the plurality of fibers 11 on the end face of the fiber bundle 6, the desired exposure is performed on the end face of the fiber bundle 6. It is possible to determine which light source 8 should be turned on in order to form a pattern.

  In the step of detecting the position of the output end of the fiber 11 on the end face of the fiber bundle 6, the exposure pattern control unit 19, as shown in FIG. 2, according to the order in which the light sources 8 are arranged in parallel in the light source array 4. , 8b, 8c, and so on.

  Further, the exposure pattern control unit 19 reads out a desired exposure pattern according to the purpose from the storage unit 18 based on an instruction signal from the control unit 16 and also forms the desired exposure pattern on the end face of the fiber bundle 6. The position of the output end is determined. Then, by reading out and referring to the correspondence between the position of the output end of the fiber 11 and the light source 8 from the storage unit 18, it is determined which light source 8 should be turned on to form an exposure pattern. The switching circuit 22 is controlled so that the predetermined light source 8 is turned on.

  The fiber bundle drive unit 20 is configured to horizontally move or rotate the fiber bundle 6 based on an instruction signal from the control unit 16.

  The stage drive unit 21 adjusts the position of the laser light incident on the surface of the substrate 3 from the projection lens 7 by controlling the vertical movement and inclination of the stage 2 that supports the substrate 3.

  Next, an exposure pattern forming method of the present invention using the above exposure apparatus 1 will be described.

  First, each of the input side end portions of the plurality of fibers 11 is disposed so as to be close to each of the diffractive optical elements 10 so as to correspond to each of the light sources 8 included in the light source array 4 on a one-to-one basis. Connect optically in random order.

  Next, under the control of the switching circuit 22, the exposure pattern controller 19 controls the light sources 8 one by one in accordance with the order in which the light sources 8 are arranged in the light source array 4 as shown in FIG. It will light up.

  When one light source 8 is turned on in this way, the laser light emitted from the light source 8 enters one diffractive optical element 10 in the diffractive optical element unit 5. The laser light incident on one diffractive optical element 10 enters one fiber 11. Thereby, when one light source 8 is turned on, the output end of one fiber 11 connected to the light source 8 emits laser light from a predetermined position on the end face of the fiber bundle 6.

  Next, when each of the output ends of the fiber 11 emits laser light from a predetermined position on the end face of the fiber bundle 6, the half mirror 12 emits the emitted light from each of the output ends of the fiber 11 in the direction of the condenser lens 13. The light is reflected, and the condensing lens 13 condenses the projection light from the half mirror 12 on the light spot position detector 14 as a light spot.

  Subsequently, the light spot position detector 14 detects the position of the output end of the fiber 11 that emits the laser light. For example, as shown in FIG. 2, if the light spot position detected when the light source 8a is turned on is (X, Y) = (4, 3), the position is the output of the fiber 11 corresponding to the light source 8a. Judged as the end position. In this manner, the same detection is performed for each of the light sources 8b, 8c... And the position of the output end of the fiber 11 is determined. Then, the correspondence between the position of the output end of the fiber 11 on the end face of the fiber bundle 6 and the light source 8 connected to the fiber 11 is stored in the storage unit 18.

  Next, the exposure pattern control unit 19 reads out a desired exposure pattern according to the purpose from the storage unit 18 based on an instruction signal from the control unit 16. Subsequently, the exposure pattern control unit 19 determines the position of the output end of the fiber 11 that forms a desired exposure pattern on the end face of the fiber bundle 6. Then, the correspondence between the position of the output end of the fiber 11 and the light source 8 is read from the storage unit 18 and referenced to determine which light source 8 should be turned on to form the exposure pattern. Then, the switching circuit 22 is controlled so that these predetermined light sources 8 are turned on.

  Subsequently, when a predetermined light source 8 in the light source array 4 is turned on, the laser light emitted from each light source 8 enters one diffractive optical element 10 in the diffractive optical element unit 5. The diffractive optical element 10 shapes the laser light emitted in an elliptical shape into a substantially square or rectangular shape, controls the direction of the laser light so that the laser light from each light source 8 forms an image without any gap, and at the same time, the laser light. The power distribution of is converted into a top hat type. Each diffractive optical element 10 causes the incident laser beam to enter the fiber 11 forming the exposure pattern.

  Thus, when the laser light is incident on the fiber 11, the fiber bundle 6 emits the laser light from the end face as a desired exposure pattern.

  At this time, the fiber bundle driving unit 20 horizontally moves or rotates the fiber bundle 6 to disconnect the fiber 11, or the number of the fibers 11 on the end face of the fiber bundle 6 depends on the number of the light sources 8 in the light source array 4. In many cases, the fiber 11 is made to correspond to the light source 8 that emits laser light to prevent the exposure pattern from always being blackish.

  Subsequently, when the laser beam emitted from the fiber bundle 6 passes through the projection lens 7, the image is reduced and formed on the substrate 3 supported by the stage 2. Thus, the substrate 3 is exposed according to the reduced desired exposure pattern.

  At this time, the stage drive unit 21 adjusts the position of the laser light incident on the surface of the substrate 3 from the projection lens 7 by controlling the vertical movement and inclination of the stage 2 that supports the substrate 3.

  As described above, according to the exposure pattern forming method according to the present embodiment, by detecting the position of the fiber 11 that emits light when the light source 8 is turned on one by one, the fiber 11 corresponding to the light source 8 is detected. The position can be confirmed. Then, by storing the correspondence, it is possible to determine which light source 8 should be controlled to light up in order to form a desired exposure pattern on the end face of the fiber bundle 6. As a result, the light source 8 and the fiber 11 may be optically connected so as to correspond one-to-one in any order, and the light source 8 and the order of the fibers 11 are associated with each other. There is no need to use the array 4 and the fiber bundle 6. Therefore, even when the number of the light sources 8 in the light source array 4 is large, it is possible to simplify the manufacturing process of the parts to reduce the manufacturing cost and increase the versatility of the parts.

  In this embodiment, the exposure pattern forming method is applied to the exposure apparatus 1. However, the exposure pattern forming method of the present invention can also be applied to an optical apparatus such as a mask manufacturing apparatus.

(Second Embodiment)
Next, a second embodiment of the present invention will be described with reference to FIG. In addition, the same code | symbol is attached | subjected to the same part as 1st Embodiment, the description is abbreviate | omitted, and a different part from 1st Embodiment is demonstrated.

  As shown in FIG. 4, the exposure apparatus 1 used for the exposure pattern forming method according to the present embodiment has a light source array 4 and a diffractive optical element in which a plurality of diffractive optical elements 23 are arranged side by side as an exposure optical system. A unit 24, a fiber bundle 26 that bundles a plurality of fibers 25 into one, and a projection lens 7 are provided. The configurations of the light source array 4 and the projection lens 7 are the same as those in the first embodiment.

  In the present embodiment, each of the input side end portions of the plurality of fibers 25 is optically connected in a random order so as to correspond to each of the light sources 8 on a one-to-one basis. Further, as shown in FIG. 4, each of the output side end portions of the plurality of fibers 25 is optically connected in a random order so as to correspond to each of the diffractive optical elements 23 on a one-to-one basis.

  Thus, in the present embodiment, each of the light sources 8 and each of the diffractive optical elements 23 can be connected in a random order by the plurality of fibers 25, and the order of arrangement of the light sources 8 in the light source array 4 The order of arrangement of the diffractive optical elements 23 in the diffractive optical element unit 24 need not correspond. A plurality of fibers 25 optically connected to each of the diffractive optical elements 23 can be connected to each light source 8 in a random order.

  The plurality of fibers 25 are bundled together by a fiber bundle 26 between the light source 8 and the diffractive optical element 23.

  The configuration of the detection optical system is the same as that of the first embodiment.

  Next, differences from the first embodiment in the functional configuration of the exposure apparatus 1 used in the exposure pattern forming method according to the present embodiment will be described.

  The storage unit 18 of the present embodiment stores correspondence between each light source 8 included in the light source array 4 and each position of the diffractive optical element 23 in the diffractive optical element unit 24.

  The light spot position detector 14 detects the position of the diffractive optical element 23 from which the laser light is emitted from the output end of the fiber 25. Then, the same detection is performed for each of the light sources 8a, 8b, 8c... To associate the position of the diffractive optical element 23 in the diffractive optical element unit 24 with the light source 8 corresponding to the diffractive optical element 23. Judgment is made, and the correspondence is stored in the storage unit 18.

  In the step of detecting the position of the diffractive optical element 23 in the diffractive optical element unit 24, the exposure pattern control unit 19 sets the light sources 8a, 8b, 8c,... 1 according to the order in which the light sources 8 are arranged in the light source array 4. It lights up one by one.

  The exposure pattern control unit 19 reads out a desired exposure pattern according to the purpose from the storage unit 18 based on an instruction signal from the control unit 16 and forms a desired exposure pattern in the diffractive optical element unit 24. The position of 23 is judged. Then, by reading out and referring to the correspondence between the position of the diffractive optical element 23 and the light source 8 from the storage unit 18, it is determined which light source 8 should be turned on to form an exposure pattern. The switching circuit 22 is controlled so that the predetermined light source 8 is turned on.

  The configurations of the control unit 16, the input unit 17, the fiber bundle driving unit 20, and the stage driving unit 21 are the same as those in the first embodiment.

  Next, an exposure pattern forming method of the present invention using the above exposure apparatus 1 will be described.

  First, each of the input side end portions of the plurality of fibers 25 is optically connected in a random order so as to correspond to each of the light sources 8 on a one-to-one basis. As shown in FIG. 4, the output side end portions of the plurality of fibers 25 are optically connected in a random order so as to correspond to the diffractive optical elements 23 on a one-to-one basis. A plurality of fibers 25 optically connected to each of the diffractive optical elements 23 may be connected to each light source 8 in a random order. The plurality of fibers 25 are bundled together by a fiber bundle 26 between the light source 8 and the diffractive optical element 23.

  Next, under the control of the switching circuit 22, the exposure pattern control unit 19 turns on the light sources 8 one by one in the order of the light sources 8a, 8b, 8c,.

  When one light source 8 is turned on in this way, the laser light emitted from the light source 8 enters one fiber 25 connected to each window 9, and the output end of the fiber 25 transmits the laser light to one diffractive optical element 23. Exit.

  Next, when the output end of the fiber 25 emits laser light to one diffractive optical element 23, the half mirror 12 reflects the laser light emitted from the diffractive optical element 23 in the direction of the condenser lens 13, and the condenser lens. 13 condenses the light projected from the half mirror 12 on the light spot position detector 14 as a light spot.

  Subsequently, the light spot position detector 14 detects the position in the diffractive optical element unit 24 of the diffractive optical element 23 from which the laser light is emitted from the output end of the fiber 25. The light sources 8a, 8b, 8c, ... are similarly detected one by one, and the correspondence between the position of the diffractive optical element 23 in the diffractive optical element unit 24 and the light source 8 corresponding to the diffractive optical element 23 is stored. Store in unit 18.

  Next, the exposure pattern control unit 19 reads out a desired exposure pattern according to the purpose from the storage unit 18 based on an instruction signal from the control unit 16. Subsequently, the exposure pattern control unit 19 determines the position of the diffractive optical element 23 that forms a desired exposure pattern in the diffractive optical element unit 24. Then, the correspondence between the position of the diffractive optical element 23 and the light source 8 is read from the storage unit 18 and referenced to determine which light source 8 should be turned on to form the exposure pattern. Then, the switching circuit 22 is controlled so that these predetermined light sources 8 are turned on.

  As described above, according to the exposure pattern forming method according to the present embodiment, the position of the diffractive optical element 10 from which light is emitted when the light source 8 is turned on is detected one by one, thereby corresponding to the light source 8. The position of the diffractive optical element 10 can be confirmed. By storing the correspondence, it is possible to determine which light source 8 should be controlled to be lit in order to form a desired exposure pattern in the diffractive optical element unit 5. Accordingly, the light source 8 and the diffractive optical element 10 may be optically connected so as to correspond one-to-one in an arbitrary order, and the order of arrangement of the light sources 8 corresponds to the order of arrangement of the diffractive optical elements 10. There is no need to use the attached light source array 4 and diffractive optical element unit 5. Therefore, even when the number of the light sources 8 in the light source array 4 is large, it is possible to simplify the manufacturing process of the parts to reduce the manufacturing cost and increase the versatility of the parts.

As described above in detail, according to the exposure pattern forming method of the present invention, in the exposure pattern forming method using the light source array and the fiber bundle, the manufacturing process of the component is simplified to reduce the manufacturing cost, and It becomes possible to improve versatility.

1 is a schematic block diagram of an exposure apparatus according to a first embodiment of the present invention. It is a front view which shows the structure of the light source array and fiber bundle which concern on the 1st Embodiment of this invention. 1 is a block diagram showing a functional configuration of an exposure apparatus according to a first embodiment of the present invention. It is a schematic block diagram of the exposure apparatus which concerns on the 2nd Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Exposure apparatus 2 Stage 3 Substrate 4 Light source array 5 Diffractive optical element unit 6 Fiber bundle 8 Light source 10 Diffractive optical element 11 Fiber 12 Half mirror 13 Condensing lens 14 Light spot position detector 16 Control part 17 Input part 18 Storage part 19 Exposure Pattern control unit 20 Fiber bundle drive unit 21 Stage drive unit 22 Switching circuit 23 Diffractive optical element 24 Diffractive optical element unit 25 Fiber 26 Fiber bundle

Claims (2)

  A light source array in which light sources are arranged vertically and horizontally, and output side ends of a plurality of fibers each having an input side end optically connected to each of the light sources in a one-to-one manner are bundled into one output end. Is an exposure pattern forming method using a fiber bundle arranged side by side on an end face, wherein each of the input ends of the fiber is randomly optically connected to each of the light sources in a one-to-one correspondence, The positions of the output ends of the fibers that output light when each of the light sources is sequentially turned on are sequentially detected, and the positions of the light sources and the output ends of the fibers on the end face of the fiber bundle, And forming a desired exposure pattern on the end face of the fiber bundle by controlling lighting of each of the light sources based on the correspondence. .   A light source array in which light sources are arranged side by side in length, a diffractive optical element unit in which a plurality of diffractive optical elements are arranged in length and width, and an input side end are optically connected to each of the light sources in a one-to-one relationship. And a fiber bundle that bundles a plurality of fibers, each of which is optically connected to each of the diffractive optical elements on a one-to-one basis, between the light source and the diffractive optical element. In the exposure pattern forming method, each of the input side ends of the fiber is randomly optically connected to each of the light sources in a one-to-one correspondence, and each of the output side ends of the fiber is connected to the light source. Randomly optically connect to each diffractive optical element in a one-to-one correspondence, and sequentially detect the position of the diffractive optical element from which light is output when each of the light sources is turned on sequentially. Each of the light sources and the A correspondence with each position of the diffractive optical element in the folding optical element unit is stored, and lighting control of each of the light sources based on this correspondence forms a desired exposure pattern in the diffractive optical element unit. An exposure pattern forming method characterized by:

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