JP2007035294A - Normal pressure plasma processing device for water repelling treatment or the like - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a normal pressure plasma processing device performing high speed treatment without increasing amount of process-gas while maintaining processing capability at normal temperature plasma treatment for water repelling treatment. <P>SOLUTION: A processing passage 16 is formed between a processing head 10 of the plasma processing device M and a base plate W, and a part of the processing passage is turned into a plasma space 16a with a pressure near to atmospheric pressure. Process-gas introducing ports 15a are arranged in a line at upstream end of the passage 16, and exhaust ports 17a are arranged at down stream side. A formula; L×Vf/Vs>700×r is fulfilled, wherein, L is a distance (mm) between down stream end of the plasma space and the exhaust port, Vf is a flow speed at the processing passage, Vs is a conveying speed of the base plate, and r is (atmospheric density of oxygen at the exhaust port 17a)/(density of oxygen in the atmospheric air). <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a so-called direct type atmospheric pressure plasma processing apparatus, and more particularly to an atmospheric pressure plasma processing apparatus suitable for a process that dislikes mixing of oxygen into a plasma space such as a water repellent process.

  Vacuum plasma is often used in plasma processes for water repellent treatment. Since the vacuum plasma can easily achieve high gas decomposition efficiency, the amount of gas used is small. On the other hand, for example, in the liquid crystal field, as the substrate size increases, a large-scale vacuum facility is required, leading to an increase in price.

Under such circumstances, atmospheric pressure plasma, which requires no vacuum equipment and can be reduced in price, has attracted attention. The atmospheric pressure plasma processing apparatus has a high voltage electrode and a ground electrode. A process gas is introduced between these electrodes and plasma is formed under atmospheric pressure. A substrate is disposed between the electrodes, the substrate is directly exposed to plasma, and the surface of the substrate is plasma processed, and the substrate is disposed outside the electrodes, and plasma gas is blown from between the electrodes and applied to the substrate. There is a so-called remote system. By scanning one of the high-voltage electrode and the substrate, a large substrate can be handled. Currently, the development for increasing the scanning speed (conveying speed) is underway.
JP 2004-228136 A

  Increasing the transport speed not only shortens the substantial processing time (time for plasma irradiation), but also increases the amount of oxygen in the external atmosphere that is involved in the plasma space. On the other hand, in water repellency treatment or the like, if oxygen is mixed in the process gas, the processing ability is lowered. As a countermeasure, if the flow rate of the process gas is increased, the external atmosphere can be pushed back. However, this increases the amount of process gas used, which is not desirable from the viewpoint of running cost.

  The inventors have conducted diligent research toward high-speed scanning in a direct atmospheric pressure plasma processing apparatus. The apparatus configuration is such that a process gas flows through a processing path along the surface of the substrate and a part of the processing path is made a plasma space at a substantially atmospheric pressure, and the surface of the substrate is plasma-processed to form the plasma space. And a substrate-facing surface that forms the processing passage so as to face the substrate, the substrate-facing surface having a process gas inlet connected to an upstream end of the processing passage and the processing passage A processing head provided with an exhaust port connected to the downstream end, and a transport mechanism for moving the substrate relative to the processing head along the extending direction of the processing path (forward or reverse direction of the gas flow direction); A direct atmospheric pressure plasma processing apparatus equipped with

  FIG. 3 shows the result of the water-repellent treatment of the resist film on the glass substrate by the atmospheric pressure plasma processing apparatus having the above configuration. The processing capability evaluated by the contact angle was substantially constant at a substrate conveyance speed of 0.5 to 3 m / min, but significantly decreased at 4 m / min. This phenomenon is presumed to be because external air is entrained in the plasma space due to viscosity, and oxygen in the entrained air hinders the reaction for water repellency.

Furthermore, the inventors have studied not only the conveyance speed but also the gas flow rate and the dimensional configuration of the apparatus, and obtained the data shown in Table 1.

In Table 1, L is the distance from the downstream end of the plasma space to the exhaust port in the processing passage, that is, the length (mm) of the portion of the processing passage downstream from the plasma space, and L = 60 mm and L = 90 mm. There were two ways.
Vf is a process gas flow velocity in the processing path, and Vf = 306 mm / sec = 18.36 m / min and Vf = 612 mm / sec = 36.72 m / min.
Vs is a transport speed by the transport mechanism, and Vs = 25 mm / sec = 1.5 m / min and Vs = 50 mm / sec = 3.0 m / min. The processing head was fixed, and the substrate was transported in the direction from the exhaust port toward the introduction port (the direction opposite to the flow of process gas in the processing passage).
CA is the contact angle of the substrate surface after the water repellent treatment.
Other conditions are as follows.
Process gas; N ₂ 67 vol%, CF ₄ 33 vol%
Power supply: input voltage 20 kV, frequency 20 kHz
Gap between the lower surface of the processing head and the substrate; 1.0 mm

FIG. 4 is a graph of Table 1. The horizontal axis of the figure is L × Vf / Vs (unit: mm).
From the above results, the following formula 1a was derived as a condition for obtaining sufficient processing capacity.
k = L × Vf / Vs> 700 (Formula 1a)
It is more preferable that the following expression 2a is satisfied.
k = L × Vf / Vs> 1400 (Formula 2a)

The data in Table 1 and FIG. 4 are those in an air atmosphere, and the oxygen concentration in the atmosphere entrained in the plasma space was about 20%. On the other hand, if the oxygen concentration in the atmosphere changes, the amount of oxygen involved changes accordingly, so the lower limit value of k changes.
When the oxygen concentration in the atmosphere is also taken into consideration, the equations 1a and 2a can be rewritten into the following equations 1 and 2, respectively.
k = L × Vf / Vs> 700 × r (Formula 1)
k = L × Vf / Vs> 1400 × r (Formula 2)
Here, r is the ratio of the oxygen concentration in the atmosphere (strictly speaking, the oxygen concentration in the atmosphere excluding the process gas at the exhaust port) to the oxygen concentration in the atmosphere (about 20%).

The present invention has been made by the above research and consideration,
A normal pressure plasma processing apparatus for flowing a process gas through a processing path along a surface of a substrate and making a part of the processing path into a plasma space at a substantially atmospheric pressure, and plasma processing the surface of the substrate,
An electrode for forming the plasma space; and a substrate-facing surface that forms the processing path so as to face the substrate, and the substrate-facing surface has a process gas introduction port connected to an upstream end of the processing path. And a processing head provided with an exhaust port connected to the downstream end of the processing path;
A transport mechanism for moving the substrate relative to the processing head along the extending direction of the processing path,
The following relationship is satisfied.
L × Vf / Vs> 700 × r (Formula 1)
here,
L: Distance from the downstream end of the plasma space to the exhaust port (mm)
Vf: Process gas flow velocity in the processing path Vs: Transfer speed by the transfer means r: Ratio of oxygen concentration in the atmosphere excluding process gas at the exhaust port to oxygen concentration in the atmosphere

More preferably, a process gas containing a fluorocarbon compound or the like is caused to flow in a processing path along the surface of the substrate, and a part of the processing path is made into a plasma space at a substantially atmospheric pressure to make the surface of the substrate water repellent, etc. An atmospheric pressure plasma processing apparatus for performing plasma processing,
An electrode for forming the plasma space; and a substrate-facing surface that forms the processing path so as to face the substrate, and the substrate-facing surface has a process gas introduction port connected to an upstream end of the processing path. And a processing head provided with an exhaust port connected to the downstream end of the processing path;
A transport mechanism for moving the substrate relative to the processing head along the extending direction of the processing path,
The following relationship is satisfied.
L × Vf / Vs> 1400 × r (Formula 2)
here,
L: Distance from the downstream end of the plasma space to the exhaust port (mm)
Vf: Process gas flow velocity in the processing path Vs: Transfer speed by the transfer means r: Ratio of oxygen concentration in the atmosphere excluding process gas at the exhaust port to oxygen concentration in the atmosphere By this, the atmosphere is caught in the processing path If the distance L from the downstream end of the plasma space to the exhaust port is sufficiently long, the processing capability can be maintained without increasing the amount of process gas used even if the transport speed Vs is increased. Can do.

  The conveyance speed Vs by the conveyance means is preferably Vs> 2 m / min, and more preferably Vs> 4 m / min. According to the present invention, not only Vs> 2 m / min but also high-speed scanning of Vs> 4 m / min can reliably prevent or suppress the atmosphere from being caught in the processing path, and can reliably maintain the processing capability. it can.

The present invention is suitable for a water-repellent treatment that should minimize oxygen contamination in the process gas. In the case of the water repellent treatment, the process gas preferably contains a fluorocarbon compound such as CF ₄ as a main component, and preferably contains nitrogen.

It is considered that the oxygen concentration at the downstream side of the processing path is smaller as the position is closer to the plasma space.
In the water repellent treatment, the oxygen concentration in the plasma space is required to be 100 ppm or less. Therefore, it is preferable to set the L, Vf, Vs, and r so that the oxygen concentration at the downstream end of the plasma space is 100 ppm or less. Thereby, the processing capability in the water repellent treatment can be surely ensured.

  The processing head is provided with a curtain gas blowing portion on the opposite side of the processing passage across the exhaust port, the process gas flow rate of the processing passage, the curtain gas flow rate from the blowing portion, and the exhaust port from the exhaust port. The r is preferably adjusted according to the exhaust flow rate.

The present invention is particularly effective for atmospheric pressure plasma treatment in a pressure environment of substantially normal pressure (near atmospheric pressure). Here, “substantially normal pressure” refers to a range of 1.013 × 10 ^{4 to} 50.663 × 10 ⁴ Pa, and considering the ease of pressure adjustment and the simplification of the apparatus configuration, 1.333 × 10 ⁴ to 10.664 × 10 ⁴ Pa is preferable, and 9.331 × 10 ^{4 to} 10.9797 × 10 ⁴ Pa is more preferable.

  According to the present invention, it is possible to prevent or suppress oxygen in the atmosphere from being caught in the processing passage and maintain the processing capability, and to perform high-speed processing while suppressing an increase in the amount of process gas used.

Embodiments of the present invention will be described below.
FIG. 1 shows a direct atmospheric pressure plasma processing apparatus M for water repellent treatment according to the first embodiment. The atmosphere around the atmospheric pressure plasma processing apparatus M is air.

  The apparatus M includes a processing head 10 and a stage 20. The processing head 10 is fixed and supported on an apparatus frame (not shown). The processing head 10 has a pair of left and right processing units 11. These processing units 11 have a symmetrical shape, but may have different shapes, dimensions, structures, and the like. Each processing unit 11 has a unit main body 12 and a high-voltage electrode 13 held by the unit main body 12.

A common power source (not shown) is connected to the high-voltage electrodes 13 of the two processing units 11.
A ceramic plate 14 as a solid dielectric layer is provided on the lower surface of the unit main body 12 and the high-voltage electrode 13 of each processing unit 11.

A slit-like introduction path 15 is formed between the two processing units 11. The process gas source 2 is connected to the upper end of the introduction path 15. An opening 15a at the lower end of the introduction path 15 is a process gas introduction port.
The process gas source 2 mixes an appropriate amount of a fluorocarbon compound such as CF ₄ and nitrogen as a process gas for water repellent treatment, and supplies the mixture to the introduction path 15 of the processing head 10.

  Exhaust cylinders 17 are provided on both the left and right sides of the processing head 10. The lower end surface of the exhaust tube 17 is flush with the lower surface of the processing unit 11, but may be non-planar. A slit-like exhaust port 17 a is formed at the lower end surface of the exhaust cylinder 17. The upper end portion of the exhaust cylinder 17 is connected to exhaust means such as a suction pump (not shown).

A stage 20 is disposed below the processing head 10. The stage 20 is made of metal and is electrically grounded to form a ground electrode.
A transport mechanism 21 is connected to the stage 20. The stage 20 is moved in the left-right direction by the transport mechanism 21.

  A large-area substrate W such as liquid crystal glass to be processed is placed on the upper surface of the stage 20. Although not shown in detail, a resist film is coated on the upper surface of the substrate W.

A processing path 16 is formed between the left and right processing units 11 of the processing head 10 and the substrate W on the stage 20. The upstream end of the left processing passage 16 is connected to the process gas introduction port 15a, and the downstream end is connected to the left exhaust port 17a. The upstream end of the right processing passage 16 is connected to the process gas introduction port 15a, and the downstream end is connected to the right exhaust port 17a.
The lower surface of each processing unit 11 constitutes a substrate facing surface.

The substrate W has a length not only in the left-right direction but also in the front-rear direction (width direction) orthogonal to the paper surface of FIG.
The width dimensions in the front-rear direction of the processing head constituent members 11 to 14, 17 including the high-voltage electrode 13 and the space portions 15, 15a, 16, 17a are substantially the same as or larger than the width dimension in the front-rear direction of the substrate W. It is set to be.

Here, the left and right length of the downstream side portion 16c of the processing passage 16 is L (mm), the conveyance speed of the stage 20 is Vs (m / min), and the flow rate of the process gas in the processing passage 16 is Vf (m / min). min), it is set so as to satisfy the relationship of the following equation. The length L of the downstream side portion 16c of the processing passage 16 indicates the distance from the downstream end of the plasma space 16a in the center of the processing passage 16 to the exhaust port 17a, and from the edge of the high voltage electrode 13 on the exhaust port 17a side to the exhaust port. It is equivalent to the distance to 17a.
L × Vf / Vs> 700 (mm) (Formula 1a)
More preferably, it is set so as to satisfy the relationship of the following formula.
L × Vf / Vs> 1400 (mm) (Formula 2a)

In the above configuration, by supplying a voltage from the power source to each high-voltage electrode 13, an intermediate portion of each processing passage 16 (a portion between the high-voltage electrode 13 and the substrate W on the stage 20) becomes an atmospheric pressure plasma space 16a.
In parallel with the voltage supply, the process gas is blown out from the inlet 15a through the supply path and the introduction path 15 in sequence. The process gas blown out from the introduction port 15a is branched to the left and right.

  The process gas branched to the left side passes through the upstream side portion 16 b of the left processing passage 16 and enters the plasma space 16 a in the middle of the left processing passage 16. The process gas is turned into plasma in the plasma space 16 a and contacts the substrate W to cause a reaction. Thereby, the resist film on the surface of the substrate W can be subjected to water repellent treatment. The process gas further flows leftward, passes through the downstream side portion 16c of the left processing passage 16, and is sucked into the left exhaust port 17a and exhausted.

  Similarly, the process gas branched to the right side passes through the upstream side portion 16b of the right processing path 16 and enters the right plasma space 16a to be converted into plasma, and the resist film on the surface of the substrate W is subjected to water repellent treatment. Further, the gas is exhausted from the right exhaust port 17a via the downstream side portion 16c of the right processing passage 16.

  At the same time, as indicated by the arrows in FIG. 1, the stage 20 and thus the substrate W are transported left and right. Thereby, the entire surface of the substrate W can be subjected to water repellent treatment.

  Here, when the substrate W is transported from the left side to the right direction, for example, the atmosphere above the left side portion of the substrate W tends to be caught in the downstream side portion 16c of the left processing path 16 due to viscosity. (At this time, almost no air entrainment occurs in the processing path 16 on the right side.)

  On the other hand, the length L of the downstream side portion 16c of the processing passage 16, the transport speed Vs, and the process gas flow velocity Vf in the processing passage 16 are set so as to satisfy the above formulas 1a and 2a. It is possible to prevent or reduce the air entrained in the downstream side portion 16c of the processing passage 16 from reaching the left plasma space 16a. Thereby, the oxygen concentration in the atmosphere entering the left plasma space 16a can be suppressed to zero or very small (100 ppm or less).

Similarly, when the substrate W is transported from the right side to the left side, the atmosphere tends to be trapped in the downstream side portion 16c of the right processing path 16, and the trapped atmosphere reaches the right plasma space 16a. It can be prevented or reduced from reaching, and the oxygen concentration in the atmosphere entering the plasma space 16a on the right side can be suppressed to zero or very low (100 ppm or less).
Thereby, the processing capability can be sufficiently maintained.

  If the length L of the downstream side portion 16c of each processing passage 16 is sufficiently large, the processing capability can be sufficiently maintained without increasing the amount of process gas used even if the transport speed Vs is increased. For example, even if the conveyance speed Vs is set to a high speed of about Vs = 4 m / min, the processing capability can be sufficiently maintained. As a result, high-speed processing can be performed while maintaining processing capability.

Next, another embodiment of the present invention will be described. In the following embodiments, the same reference numerals are attached to the drawings for the same configurations as those of the above-described embodiments, and the description thereof is omitted.
As shown in FIG. 2, in the second embodiment, nozzles 18 as curtain gas outlets are provided outside the left and right exhaust pipes 17 of the processing head 10. A curtain gas source (not shown) is connected to each blowing nozzle 18. Nitrogen (N ₂ ) is used as the curtain gas. The curtain gas may be shared with a nitrogen source for process gas.

  According to the second embodiment, nitrogen gas is blown from the left and right blowing nozzles 18 when the substrate W is processed. As a result, a nitrogen gas curtain can be formed between the lower end of the blowing nozzle 18 and the substrate W, and the atmosphere of the external atmosphere can more reliably enter the side of the exhaust port 17a and hence the processing passage 16 from the blowing nozzle 18. It can be prevented or suppressed. Thereby, processing capability can be maintained more reliably.

In the second embodiment, the following equation is set.
L × Vf / Vs> 700 × r (Formula 1)
L × Vf / Vs> 1400 × r (Formula 2)
Where r is
r = (oxygen concentration in the atmosphere at the exhaust port 17a) / (oxygen concentration in the air) (Formula 3)
It is. The oxygen concentration in the atmosphere is about 20%. When the process gas flow rate is Qp, the curtain gas flow rate is Qc, the exhaust flow rate from the exhaust port 17a is Qs, and the air entrainment flow rate is Qa, the following relationship is established.
Qs = Qp + Qc + Qa (Formula 4)
The atmosphere flow rate Q1 at the exhaust port 17a is the sum of the curtain gas flow rate Qc and the air entrainment flow rate Qa, as shown in the following equation 5, and is a size obtained by subtracting the process gas flow rate Qp from the total gas flow rate Qp + Qc + Qa (= Qs). become.
Q1 = Qa + Qc
= Qs-Qp (Formula 5)
From Equations 3 to 5, r is expressed by the following equation and can be adjusted by the process gas flow rate Qp, the curtain gas flow rate Qc, and the exhaust flow rate Qs.
r = (Qs−Qp−Qc) / (Qs−Qp) (Formula 6)

  With the above settings, oxygen in the external atmosphere can be reliably prevented from entering the processing passage 16, and the processing capacity can be more reliably maintained without increasing the amount of process gas used. In addition, the length L of the downstream side portion 16c of the processing path 16 can be made shorter than that of the first embodiment, and further high-speed scanning can be realized.

The present invention is not limited to the above embodiment, and various modifications can be made.
For example, in the above embodiment, the processing head 10 is fixed and the substrate W is moved. However, the substrate W may be fixed and the processing head 10 may be moved.
The processing head 10 has two processing units 11 and the process gas is diverted in two directions from the center to the left and right. However, the processing head 10 is composed of only one processing unit 11 and the total amount of the process gas is one processing. The unit 11 may flow from one end to the other end.

Examples will be described.
Water repellent treatment was performed using the same apparatus M as in FIG. The dimensional configuration and processing conditions of the apparatus M are as follows.
Dimensions of high voltage electrode 13: 40 mm (left and right) x 700 (front and back)
Gap between the processing head 10 and the substrate W (thickness of the processing path 16): 1 mm
Input power: 1kW (20kHz pulse wave)
Substrate W: Glass (# 1737), 880 mm (left and right length) × 680 mm (front and rear width)
Contact angle of the resist film on the surface of the substrate W before processing: 70 ° (to water)
Process gas: N ₂ 40 slm, CF ₄ 20 slm
Process gas flow rate in each processing passage 16: Qp = 30 slm
Length of downstream side portion 16c of each processing passage 16: L = 90 mm
Process gas flow velocity in each processing passage 16: Vf = 42.8 m / min
Conveying speed: Vs = 4m / min
Therefore, L × Vf / Vs = 963 (mm)> 700 (mm), which satisfies Expression 1a.

  As a result, the contact angle of the resist film on the treated substrate surface with respect to water could be 110 °, and a sufficient water-repellent surface could be obtained under a high-speed scan of Vs = 4 m / min.

A water repellent treatment was performed using the same apparatus M as in FIG. The dimensional configuration and processing conditions of the apparatus M are as follows.
Dimensions of high voltage electrode 13: 40 mm (left and right) x 700 (front and back)
Gap between the processing head 10 and the substrate W (thickness of the processing path 16): 1 mm
Input power: 1kW (20kHz pulse wave)
Substrate W: Glass (# 1737), 880 mm (left and right length) × 680 mm (front and rear width)
Contact angle of the resist film on the surface of the substrate W before processing: 70 ° (to water)
Process gas: N ₂ 20 slm, CF ₄ 10 slm
Process gas flow rate in each processing passage 16: Qp = 15 slm
Curtain gas flow rate from each nozzle 18: Qc = 17.5 slm
Exhaust flow rate from each exhaust port 17a: Qs = 50 l / min
Ratio of entrained oxygen concentration to atmospheric oxygen concentration: r = 0.5
Length of downstream side portion 16c of each processing passage 16: L = 90 mm
Process gas flow velocity in each processing passage 16: Vf = 21.4 m / min
Conveying speed: Vs = 4m / min
Therefore, L × Vf / Vs = 482 (mm)> 700 (mm) × r = 350 (mm), and Expression 1 is satisfied.

  As a result, the contact angle CA of the resist film on the surface of the substrate after the treatment can be set to CA> 100 °, and a sufficient water-repellent surface can be obtained under a high-speed scan of Vs = 4 m / min. It was confirmed that by forming the gas curtain, the length L of the downstream side portion 16c of the processing passage 16 and the amount of process gas used can be made sufficiently smaller than in the case of Example 1 (no gas curtain).

  The present invention can be applied to a process of making a substrate such as liquid crystal glass water repellent.

1 is a front view showing a schematic configuration of a direct atmospheric pressure plasma treatment apparatus for water repellency treatment according to a first embodiment of the present invention. It is a front view which shows schematic structure of the direct type normal pressure plasma processing apparatus for water-repellent treatment which concerns on 2nd Embodiment of this invention. It is a graph which shows the contact angle after a process with respect to the conveyance speed at the time of carrying out the research course which makes this invention the water-repellent treatment of the resist film on a glass substrate with a direct type atmospheric pressure plasma processing apparatus. In the research course leading up to the present invention, the length of the downstream side of the processing path of the direct atmospheric plasma processing apparatus, the process gas flow rate in the processing path, and the water repellent treatment when the transfer speed is adjusted It is a graph which shows a contact angle.

Explanation of symbols

M Direct-type atmospheric pressure plasma processing apparatus W for water repellency treatment Substrate 2 Process gas source 10 Processing head 11 Processing unit 12 Unit main body 13 High-voltage electrode 14 Ceramic plate 15 Introduction path 15a Process gas introduction port 16 Processing path 16a Plasma space 16b Upstream portion 16c of processing passage 16 Downstream portion 17 of processing passage Exhaust cylinder 17a Slit-shaped exhaust port 18 Curtain gas blowing nozzle (curtain gas blowing portion)
20 Stage 21 Transfer mechanism L Length of downstream side of processing path (distance from downstream end of plasma space to exhaust port)

Claims (7)

A normal pressure plasma processing apparatus for flowing a process gas through a processing path along a surface of a substrate and making a part of the processing path into a plasma space at a substantially atmospheric pressure, and plasma processing the surface of the substrate,
An electrode for forming the plasma space; and a substrate-facing surface that forms the processing path so as to face the substrate, and the substrate-facing surface has a process gas introduction port connected to an upstream end of the processing path. And a processing head provided with an exhaust port connected to the downstream end of the processing path;
A transport mechanism for moving the substrate relative to the processing head along the extending direction of the processing path,
An atmospheric pressure plasma processing apparatus characterized in that the following relationship is satisfied.
L × Vf / Vs> 700 × r (Formula 1)
here,
L: Distance from the downstream end of the plasma space to the exhaust port (mm)
Vf: Process gas flow velocity in the processing path Vs: Transfer speed by the transfer means r: Ratio of oxygen concentration in the atmosphere excluding process gas at the exhaust port to oxygen concentration in the atmosphere A normal pressure plasma processing apparatus for flowing a process gas through a processing path along a surface of a substrate and making a part of the processing path into a plasma space at a substantially atmospheric pressure, and plasma processing the surface of the substrate,
An electrode for forming the plasma space; and a substrate-facing surface that forms the processing path so as to face the substrate, and the substrate-facing surface has a process gas introduction port connected to an upstream end of the processing path. And a processing head provided with an exhaust port connected to the downstream end of the processing path;
A transport mechanism for moving the substrate relative to the processing head along the extending direction of the processing path,
An atmospheric pressure plasma processing apparatus characterized in that the following relationship is satisfied.
L × Vf / Vs> 1400 × r (Formula 2)
here,
L: Distance from the downstream end of the plasma space to the exhaust port (mm)
Vf: Process gas flow velocity in the processing path Vs: Transfer speed by the transfer means r: Ratio of oxygen concentration in the atmosphere excluding process gas at the exhaust port to oxygen concentration in the atmosphere A normal pressure plasma processing apparatus for flowing a process gas containing a fluorocarbon compound through a processing path along a surface of a substrate, forming a part of the processing path into a plasma space at a substantially atmospheric pressure, and repelling the surface of the substrate. There,
An electrode for forming the plasma space; and a substrate-facing surface that forms the processing path so as to face the substrate, and the substrate-facing surface has a process gas introduction port connected to an upstream end of the processing path. And a processing head provided with an exhaust port connected to the downstream end of the processing path;
A transport mechanism for moving the substrate relative to the processing head along the extending direction of the processing path,
An atmospheric pressure plasma processing apparatus for water repellent treatment, characterized in that the following relationship is satisfied.
L × Vf / Vs> 700 × r (Formula 1)
here,
L: Distance from the downstream end of the plasma space to the exhaust port (mm)
Vf: Process gas flow velocity in the processing path Vs: Transfer speed by the transfer means r: Ratio of oxygen concentration in the atmosphere excluding process gas at the exhaust port to oxygen concentration in the atmosphere A normal pressure plasma processing apparatus for flowing a process gas containing a fluorocarbon compound through a processing path along a surface of a substrate, forming a part of the processing path into a plasma space at a substantially atmospheric pressure, and repelling the surface of the substrate. There,
An electrode for forming the plasma space; and a substrate-facing surface that forms the processing path so as to face the substrate, and the substrate-facing surface has a process gas introduction port connected to an upstream end of the processing path. And a processing head provided with an exhaust port connected to the downstream end of the processing path;
A transport mechanism for moving the substrate relative to the processing head along the extending direction of the processing path,
An atmospheric pressure plasma processing apparatus for water repellent treatment, characterized in that the following relationship is satisfied.
L × Vf / Vs> 1400 × r (Formula 2)
here,
L: Distance from the downstream end of the plasma space to the exhaust port (mm)
Vf: Process gas flow velocity in the processing path Vs: Transfer speed by the transfer means r: Ratio of oxygen concentration in the atmosphere excluding process gas at the exhaust port to oxygen concentration in the atmosphere   The atmospheric pressure plasma processing apparatus for water repellent treatment according to claim 3 or 4, wherein an oxygen concentration at a downstream end of the plasma space is 100 ppm or less.   The atmospheric pressure plasma processing apparatus according to claim 1, wherein a conveying speed Vs by the conveying unit is Vs> 4 m / min. The processing head is provided with a curtain gas outlet on the opposite side of the processing passage across the exhaust port,
The said r is adjusted with the process gas flow rate of the said process channel | path, the curtain gas flow rate from the said blowing part, and the exhaust flow rate from the said exhaust port, The one in any one of Claims 1-6 characterized by the above-mentioned. Atmospheric pressure plasma processing equipment.

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