JP2007033966A - Liquid crystal device, method for manufacturing same, and electronic apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid crystal device having proper alignment characteristics and concurrent high reliability. <P>SOLUTION: Disclosed is the liquid crystal display device which has a pair of substrates 10 and 20 between which liquid crystal is held, an oblique vapor-deposited film provided on at least one of the pair of substrates, and films 19 and 29 formed by chemically bonding an organic surface treating material to the top surface of the oblique vapor-deposited film; and the obliquely-vapor-deposited film is different in surface temperature with regions during the operation of the liquid crystal device, and the films 19 and 20 are formed by using the organic surface treating material which has a relatively long alkyl group, as compared with the organic surface treating material, used for regions (where films 19b and 29b are formed) where the obliquely-vapor-deposited film has the highest surface temperature during the operation of the liquid crystal device, for regions (where films 19a and 29a are formed) where the obliquely-vapor-deposited film has the lowest surface temperature. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a liquid crystal device, a method for manufacturing a liquid crystal device, and an electronic apparatus.

  In general, the liquid crystal device has a configuration in which liquid crystal is sandwiched between a pair of substrates, and an alignment film for controlling the initial alignment state of the liquid crystal is formed on the inner surface of the substrate in contact with the liquid crystal. As such an alignment film, an organic alignment film such as polyimide is generally used, but it cannot be said to be sufficient in terms of heat resistance and light resistance. Therefore, it has been proposed to use an inorganic alignment film made of an inorganic material such as silicon oxide as an alignment film that is not easily affected by light or heat.

The inorganic alignment film is generally formed by oblique deposition. The oblique vapor deposition film has a plurality of pores, and a large number of polarized hydroxyl groups exist on the surface and the inner surfaces of the pores. This hydroxyl group is active as a Bronsted acid point, and easily adsorbs or reacts with impurities contained in liquid crystal molecules and liquid crystal devices, particularly compounds having a polar group. Here, the impurities include impurities and unreacted components in the sealant, impurities and moisture in the liquid crystal layer, dirt attached in the manufacturing process, and the like. It is known that when impurities are adsorbed or reacted on the surface of the obliquely deposited film, the shape and polarity of the surface are changed, the vertical anchoring force is lowered, and the liquid crystal molecules cause alignment abnormality. It is also known that liquid crystal molecules directly react with hydroxyl groups. Therefore, as a method for modifying the surface of the obliquely deposited film, a method of treating the hydroxyl group on the surface of the obliquely deposited film with a higher alcohol has been proposed (see, for example, Patent Documents 1 to 3).
JP-A-5-203958 JP-A-11-160711 JP 2000-47211 A

Patent Documents 1 to 3 disclose alignment films obtained by treating the surface of an obliquely deposited silicon oxide film with an organic surface treatment material such as a higher alcohol or a silane coupling agent. These treatments are aimed at stabilizing the orientation of the obliquely deposited film having a weak orientation regulating force. However, such an amount of the organic surface treatment material is excellent in the orientation force, but is weak against heat and light, and there is a problem that the orientation force gradually decreases with long-term use. That is, the organic surface treatment material shows higher alignment regulating force as the molecular weight increases. However, when the molecular weight is too large, reliability is lowered in an environment where strong light is irradiated such as a projector.
The present invention has been made in view of such circumstances, and an object thereof is to provide a liquid crystal device having both good alignment characteristics and high reliability, and a method for manufacturing the same. It is another object of the present invention to provide an electronic apparatus having both good display characteristics and high reliability by including such a liquid crystal device.

In order to solve the above problems, a liquid crystal device of the present invention includes a pair of substrates that hold liquid crystal, an oblique deposition film provided on at least one of the pair of substrates, and the oblique deposition film. A liquid crystal device having a coating formed by chemically bonding an organic surface treatment material on the surface, wherein the surface temperature of the oblique vapor deposition film varies depending on a region during operation of the liquid crystal device, and the coating is formed of the liquid crystal device. The organic surface treatment material having a long alkyl group is used in the region having the lowest surface temperature of the obliquely deposited film during the operation of the organic surface treatment material relative to the organic surface treatment material used in the region having the highest surface temperature. It is characterized by being. Here, as the organic surface treatment material, various materials such as alcohol and a silane coupling material can be applied.
In general, a material having a long alkyl group has a large anchoring force for a liquid crystal and a high alignment regulating force, but is easily degraded by strong light, and therefore is inferior in terms of reliability. On the other hand, a material having a short alkyl group has high reliability with respect to light, but the anchoring force is small, so that the alignment regulating force is weak. In the present invention, an appropriate material is selected for each region using such characteristics. Therefore, sufficient alignment characteristics and reliability can be realized as the entire liquid crystal device. In this case, the orientation regulating force is weak in the region where the surface temperature is high, but the region where the orientation regulating force is strong (region where the surface temperature is low) exists in the surrounding area. Orientation characteristics can be realized. In general, since alignment characteristics and reliability are in a trade-off relationship, both characteristics cannot be realized at the same time. However, in the present invention, by realizing these characteristics in different regions, both characteristics can be realized. It is possible to satisfy the characteristics at the same time.

In the present invention, it has an image display area in which a plurality of pixels are arranged, and the image display area has the lowest surface temperature in the periphery of the image display area during the operation of the liquid crystal device, The central portion of the image display area has the highest surface temperature, and the coating has a relative low area relative to the organic surface treatment material used in the area having the highest surface temperature. In particular, the organic surface treatment material having a long alkyl group may be used.
According to this configuration, the deterioration of the film is extremely advanced only in the central portion of the image display region, so that the entire film is not made defective, and as a result, the life of the entire liquid crystal device can be extended.
Further, in the peripheral part of the liquid crystal device, the orientation tends to be disturbed earlier than the central part due to the intrusion of moisture and the elution component from the sealing material, but in the present invention, the peripheral part of the image display region is compared with the central part. Such a defect is less likely to occur because the film is formed in a state with good alignment characteristics.

In the present invention, an image display region in which a plurality of pixels are arranged is provided, a light shielding film is provided in the region between the pixels, and one of the region between the pixels or the region in the pixel has the highest surface temperature. The other surface has the highest surface temperature, and the coating has an alkylation relative to the organic surface treatment material used in the region with the highest surface temperature in the region with the lowest surface temperature. The organic surface treatment material having a long group may be used.
According to this structure, the lifetime of the film of the area | region between pixels and the area | region in a pixel can be made comparable. For this reason, when the film is extremely deteriorated only in the region within the pixel or only in the region between the pixels, the entire film is not made defective, and as a result, the life of the entire liquid crystal device can be extended. .

The liquid crystal device according to the present invention includes a pair of substrates for holding liquid crystal, an obliquely deposited film provided on at least one of the pair of substrates, and an organic surface treatment material on the surface of the obliquely deposited film. A liquid crystal device having a film formed by bonding, wherein a surface temperature of the oblique vapor deposition film varies depending on a region during operation of the liquid crystal device, and the oblique vapor deposition during operation of the liquid crystal device. It is provided in the region where the surface temperature of the film is the lowest and is not provided in the highest region.
According to this configuration, since the surface treatment is performed only in the region having a low surface temperature, characteristics higher than those in the related art can be obtained in terms of reliability. On the other hand, although the orientation regulation force is weak in the region where the surface temperature is high, there is a region with a strong orientation regulation force (region where the surface temperature is low) in the surrounding area. Characteristics can be realized. For this reason, also in the present invention, it is possible to provide a liquid crystal device having both good alignment characteristics and high reliability.

In the present invention, it has an image display area in which a plurality of pixels are arranged, and the image display area has the lowest surface temperature in the periphery of the image display area during the operation of the liquid crystal device, The central part of the image display area has the highest surface temperature, and the coating is provided in the peripheral part of the image display area having the lowest surface temperature, and provided in the central part of the image display area having the highest surface temperature. It may not be.
According to this configuration, the deterioration of the film is extremely advanced only in the central portion of the image display region, so that the entire film is not made defective, and as a result, the life of the entire liquid crystal device can be extended.
Further, in the peripheral part of the liquid crystal device, the orientation tends to be disturbed earlier than the central part due to the intrusion of moisture and the elution component from the sealing material, but in the present invention, the peripheral part of the image display region is compared with the central part. Such a defect is less likely to occur because the film is formed in a state with good alignment characteristics.

In the present invention, there is an image display region in which a plurality of pixels are arranged, a light shielding film is provided in the region between the pixels, and the region between the pixels or in the pixel during the operation of the liquid crystal device. One of the regions has the lowest surface temperature, the other has the highest surface temperature, and the coating is provided in the one region having the lowest surface temperature and provided in the other region having the highest surface temperature. It may not be.
According to this configuration, the coating film is not deteriorated because the coating film is extremely deteriorated only in the region within the pixel or only between the pixels, and as a result, the life of the entire liquid crystal device is extended. be able to.

The method for manufacturing a liquid crystal device according to the present invention includes a step of forming an oblique vapor deposition film on a surface of a substrate, and treating the surface of the oblique vapor deposition film with a treatment liquid containing an organic surface treatment material. Forming a film formed by chemically bonding the organic surface treatment material on the surface of the liquid crystal device, wherein the treatment with the treatment liquid is performed by the oblique deposition film during the operation of the liquid crystal device. In the region having the lowest surface temperature, the organic surface treatment material having a long alkyl group is used relative to the organic surface treatment material used in the region having the highest surface temperature.
According to this method, by selecting an appropriate organic surface treatment material for each of a region having a high surface temperature and a region having a low surface temperature, a liquid crystal device having good alignment characteristics and high reliability is provided. Can do.

The method for manufacturing a liquid crystal device according to the present invention includes a step of forming an oblique vapor deposition film on a surface of a substrate, and treating the surface of the oblique vapor deposition film with a treatment liquid containing an organic surface treatment material. Forming a film formed by chemically bonding the organic surface treatment material on the surface of the liquid crystal device, wherein the treatment with the treatment liquid is performed by the oblique deposition film during the operation of the liquid crystal device. It is characterized in that it is performed on the region having the lowest surface temperature and not performed on the region having the highest surface temperature.
According to this method, since the surface treatment is performed only in the region having a low surface temperature, characteristics higher than the conventional one can be obtained in terms of reliability. On the other hand, although the orientation regulation force is weak in the region where the surface temperature is high, there is a region with a strong orientation regulation force (region where the surface temperature is low) in the surrounding area. Characteristics can be realized. For this reason, also in the present invention, it is possible to provide a liquid crystal device having both good alignment characteristics and high reliability.

An electronic apparatus according to the present invention includes the liquid crystal device of the present invention described above or the liquid crystal device manufactured by the method of manufacturing the liquid crystal device of the present invention described above.
According to this configuration, it is possible to provide an electronic device having both good display characteristics and high reliability.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In the following embodiments, an active matrix liquid crystal device including a thin film transistor (TFT) as a pixel switching element will be described as an example. This liquid crystal device is used, for example, as a light valve (light modulation means) of a projector. In each drawing used in the following description, the scale is different for each layer and each member so that each layer and each member can be recognized on the drawing.

[First Embodiment]
[Configuration of liquid crystal device]
FIG. 1 is a plan view of the liquid crystal device 100 according to the present embodiment as viewed from the counter substrate side together with each component, and FIG. 2 is a cross-sectional view taken along the line HH ′ of FIG.
As shown in FIGS. 1 and 2, the liquid crystal device 100 according to the present embodiment includes a TFT array substrate 10 and a counter substrate 20 that are arranged to face each other. In addition, the TFT array substrate 10 and the counter substrate 20 are bonded to each other by a sealing material 52 provided in a rectangular frame shape on the peripheral portions of the surfaces facing each other, and are surrounded by the substrates 10 and 20 and the sealing material 52. A liquid crystal 50 that is an electro-optical material is sealed (held) in a region (in the cell gap).

  A light-shielding film (peripheral parting) 53 made of a light-shielding material is formed in an area inside the sealing material 52, and a plurality of pixels are arranged in a matrix in a plan view in the area inside the light-shielding film 53. An image display area 100A having a rectangular shape in plan view is formed. A data line driving circuit 201 and an external circuit mounting terminal 202 are formed along one side of the TFT array substrate 10 in a region outside the sealing material 52, and a scanning line driving circuit is formed along two sides adjacent to the one side. 204 is formed. On the remaining side of the TFT array substrate 10, a plurality of wirings 205 are provided for connecting between the scanning line driving circuits 204 provided on both sides of the image display region 100A. In addition, an inter-substrate conductive material 206 for providing electrical continuity between the TFT array substrate 10 and the counter substrate 20 is disposed at a corner portion of the counter substrate 20.

Instead of forming the data line driving circuit 201 and the scanning line driving circuit 204 on the TFT array substrate 10, for example, a TAB (Tape Automated Bonding) substrate on which a driving LSI is mounted and a peripheral portion of the TFT array substrate 10 The terminal group formed in the above may be electrically and mechanically connected via an anisotropic conductive film.
In the liquid crystal device 100, the type of liquid crystal mode to be used, that is, TN (Twisted Nematic) mode, VA (Vertical Alignment) mode, OCB (Optically Compensated Bend) mode, IPS (In Plain Switching) mode, STN (Super) A phase difference plate, a polarizing plate, and the like are arranged in a predetermined direction according to an operation mode such as a Twisted Nematic mode and a normally white mode / normally black mode, but the illustration is omitted here.

FIG. 3 is a diagram showing an equivalent circuit such as various elements and wirings in a plurality of pixels 100 a formed in a matrix in the image display region 100 </ b> A of the liquid crystal device 100.
As shown in FIG. 3, a plurality of pixels 100a are formed in a matrix in the image display region 100A, and a pixel switching TFT 30 is formed in each of these pixels 100a. Data lines 6a for supplying S1, S2,..., Sn are electrically connected to the source of the TFT 30. Pixel signals S1, S2,..., Sn to be written to the data lines 6a may be supplied line-sequentially in this order, or may be supplied for each group to a plurality of adjacent data lines 6a. . Further, the scanning line 3a is electrically connected to the gate of the TFT 30, and the scanning signals G1, G2,..., Gm are applied to the scanning line 3a in a pulse-sequential manner in this order at a predetermined timing. It is configured. The pixel electrode 9 is electrically connected to the drain of the TFT 30, and the pixel signal S1, S2,..., Sn supplied from the data line 6a is obtained by turning on the TFT 30 as a switching element for a certain period. Write to each pixel at a predetermined timing. The pixel signals S1, S2,..., Sn written in the liquid crystal via the pixel electrode 9 in this way are held for a certain period with the counter electrode 21 of the counter substrate 20 shown in FIG. Further, in order to prevent the held pixel signals S1, S2,..., Sn from leaking, a storage capacitor 60 is added in parallel with the liquid crystal capacitor formed between the pixel electrode 9 and the counter electrode 21. Reference numeral 3 b denotes a capacity line constituting the storage capacity 60.

Next, the structure of the pixel portion of the TFT array substrate of the liquid crystal device of the present embodiment will be described in detail with reference to FIGS. 4 is a plan view of a plurality of adjacent pixel groups on the TFT array substrate on which data lines, scanning lines, pixel electrodes, and the like are formed, and FIG. 5 is a cross-sectional view taken along the line AA ′ of FIG. is there.
As shown in FIG. 4, on the TFT array substrate 10 of the liquid crystal device 100, a plurality of transparent pixel electrodes 9 (outlined by dotted line portions 9a) are provided in a matrix shape. A data line 6a, a scanning line 3a, and a capacitor line 3b are provided along the vertical and horizontal boundaries. The data line 6a is electrically connected to a source region described later in the semiconductor layer 1a made of a polysilicon film through the contact hole 5, and the pixel electrode 9 is connected to the source layer in the semiconductor layer 1a through the contact hole 8. It is electrically connected to a drain region described later. The pixel electrode pitch is about 20 μm or less, preferably about 15 μm or less. In addition, the scanning line 3a is disposed so as to face a channel region (a hatched region rising to the right in the drawing) described later in the semiconductor layer 1a, and the scanning line 3a itself functions as a gate electrode.

  The capacitor line 3b is formed from a main line portion (that is, a first region formed along the scanning line 3a in plan view) that extends substantially linearly along the scanning line 3a and a portion intersecting the data line 6a. And a protruding portion (that is, a second region extending along the data line 6 a when viewed in a plan view) that protrudes forward (upward in the drawing) along the data line 6 a. A plurality of first light-shielding films 11a are provided in a region indicated by diagonal lines rising to the right in FIG. More specifically, the first light-shielding film 11a is provided at a position that covers the TFT including the channel region of the semiconductor layer 1a when viewed from the TFT array substrate side in the pixel portion, and further, the main line portion of the capacitor line 3b. And a main line portion that extends linearly along the scanning line 3a and a protruding portion that protrudes from the location intersecting the data line 6a to the rear stage side (downward in the figure) adjacent to the data line 6a. ing. The tip of the downward protruding portion in each stage (pixel row) of the first light shielding film 11a overlaps the tip of the upward protruding portion of the capacitor line 3b in the next stage under the data line 6a. A contact hole 13 for electrically connecting the first light-shielding film 11a and the capacitor line 3b to each other is provided at the overlapping portion. In other words, in the present embodiment, the first light-shielding film 11a is electrically connected to the upstream or downstream capacitor line 3b through the contact hole 13.

  Next, looking at the cross-sectional structure, as shown in FIG. 5, the liquid crystal device of the present embodiment has a pair of transparent substrates, the TFT array substrate 10 forming one of the substrates, and an opposing arrangement thereto. And the counter substrate 20 forming the other substrate. The TFT array substrate 10 is provided with pixel electrodes 9 made of a transparent conductive film such as indium tin oxide (hereinafter abbreviated as ITO), and each pixel electrode 9 on the TFT array substrate 10 is provided on each TFT electrode 10. A TFT 30 that controls switching of each pixel electrode 9 is provided at an adjacent position. The TFT 30 has an LDD (Lightly Doped Drain) structure, and includes a scanning line 3a, a channel region 1a ′ of the semiconductor layer 1a in which a channel is formed by an electric field from the scanning line 3a, and the scanning line 3a and the semiconductor layer 1a. The insulating thin film 2 to be insulated, the data line 6a, the low concentration source region 1b and the low concentration drain region 1c of the semiconductor layer 1a, and the high concentration source region 1d and the high concentration drain region 1e of the semiconductor layer 1a are provided.

  A second contact hole 5 leading to the high concentration source region 1d and a contact hole 8 leading to the high concentration drain region 1e are formed on the TFT array substrate 10 including the scanning line 3a and the insulating thin film 2, respectively. An interlayer insulating film 4 is formed. That is, the data line 6 a is electrically connected to the high concentration source region 1 d through the contact hole 5 that penetrates the second interlayer insulating film 4. Further, on the data line 6a and the second interlayer insulating film 4, a third interlayer insulating film 7 in which a contact hole 8 leading to the high concentration drain region 1e is formed is formed. That is, the high concentration drain region 1 e is electrically connected to the pixel electrode 9 through the contact hole 8 that penetrates the second interlayer insulating film 4 and the third interlayer insulating film 7. The third interlayer insulating film 7 and the pixel electrode 9 serve as a base layer for the alignment film 16.

  Further, the insulating thin film 2 serving as a gate insulating film is extended from a position facing the gate electrode formed of a part of the scanning line 3a and used as a dielectric film, and the semiconductor layer 1a is extended to extend the first storage capacitor electrode 1f. In addition, a part of the capacitor line 3b opposite to these is used as a second storage capacitor electrode, whereby the storage capacitor 60 is configured.

  A first light shielding film 11 a is provided at a position corresponding to each pixel switching TFT 30 on the surface of the TFT array substrate 10. A first interlayer insulating film (insulator layer) 12 made of, for example, highly insulating glass, a silicon oxide film, a silicon nitride film, or the like is provided between the first light shielding film 11a and the TFT 30. Further, the first interlayer insulating film 12 is formed on the entire surface of the TFT array substrate 10, and the surface is polished and planarized in order to eliminate the step of the first light shielding film 111 pattern.

  On the other hand, on the counter substrate 20, the second light shielding film 23 is formed in a region facing the formation region of the data line 6 a, the scanning line 3 a, and the pixel switching TFT 30 on the TFT array substrate 10, that is, a region other than the opening region of each pixel portion. Is provided. Further, a counter electrode (common electrode) 21 is provided over the entire surface of the counter substrate 20 including the second light shielding film 23. The counter electrode 21 is also formed of a transparent conductive film such as an ITO film, similarly to the pixel electrode 9 of the TFT array substrate 10. Due to the presence of the second light shielding film 23, incident light from the counter substrate 20 side does not enter the channel region 1 a ′, the low concentration source region 1 b, or the low concentration drain region 1 c of the semiconductor layer 1 a of the pixel switching TFT 30. Absent.

  An alignment film 16 is formed on the third interlayer insulating film 7 and the pixel electrode 9 corresponding to the formation region of the pixel switching TFT 30, the data line 6 a and the scanning line 3 a of the TFT array substrate 10. The alignment film 16 is mainly composed of an inorganic oxide film (obliquely deposited film) formed by oblique deposition.

FIG. 6 is a diagram schematically showing a cross-sectional structure along the oblique vapor deposition direction of the portion where the alignment film 16 is formed and the vicinity thereof.
As shown in FIG. 6, the alignment film 16 includes an inorganic oxide film 16a formed by oblique deposition, and a film 19 formed by treating the surface of the inorganic oxide film 16a with an organic surface treatment material. And. In the present embodiment, alcohol as described later is used as the organic surface treatment material, but a silane coupling material or the like may be used instead. In the oblique deposition method, a target substrate is fixed at a certain angle, an inorganic material such as silicon oxide is deposited from one direction, and a columnar structure (hereinafter referred to as a column) arranged at a predetermined angle with respect to the substrate. To grow). In the inorganic oxide film 16a, a large number of columns formed in this way are formed sparsely, and the pores 16H are vacant between adjacent columns.

The axis of each pore 16H is uniaxially oriented while being inclined with respect to the TFT array substrate 10. Here, the axis of each pore 16H being uniaxially oriented means that the majority of the pores 16H are oriented in substantially the same direction (the average direction of the axes of the pores 16H is controlled). The plurality of pores 16H may include pores 16H whose axial directions are different from the majority. As described above, since the pores 16H are regularly arranged, the inorganic oxide film 16a has high structural regularity.
Such an inorganic oxide film having a high structural regularity is generally obtained by oblique deposition, but it can be formed by using an ion beam sputtering method to form a film from an oblique direction of the substrate, or a flat inorganic oxide film. It can also be obtained by irradiating an ion beam from an oblique direction. Any inorganic oxide film having uniaxially oriented pores inclined with respect to the substrate and having high structural regularity may be used.

  Returning to FIG. 5, an alignment film 22 made of the same material is also provided on the counter electrode 21 of the counter substrate 20 that is at a position facing the alignment film 16 on the TFT array substrate 10 side. Similarly to the alignment film 16, the alignment film 22 is also provided with an inorganic oxide film 22 a made of an oblique deposition film such as silicon oxide on the counter substrate 20 on which the second light shielding film 23, the counter electrode 21, and the like are formed. It is formed by forming a coating 29 on the surface of the inorganic oxide film 22a.

  Returning again to FIG. With such a configuration, the liquid crystal molecules 50 a contained in the liquid crystal layer 50 are easily vertically aligned (homeotropic alignment). Therefore, the alignment films 16 and 22 having such a configuration are useful for the construction of a VA (Vertical Alignment) type liquid crystal panel. Further, since the alignment films 16 and 22 have high structural regularity, the alignment direction of the liquid crystal molecules 50a is more accurately aligned in a certain direction (vertical direction), and as a result, the performance of the liquid crystal device 100 is improved. Can be planned.

The angle θ _C formed between the pores of the inorganic oxide films 16a and 22a and the upper surfaces of the substrates 10 and 20 is not particularly limited, but is preferably about 30 to 70 °, and about 40 to 60 °. Is more preferable. This ensures that it is possible to vertically aligned while being pre-tilt the liquid crystal molecules 50a in a predetermined pretilt angle theta _P.

  The inorganic oxide films 16a and 22a are films composed of an inorganic oxide as a main material. In general, inorganic materials have superior chemical stability (light stability) compared to organic materials. For this reason, the inorganic oxide films 16a and 22a have particularly excellent light resistance as compared with the alignment film made of an organic material.

  The inorganic oxide constituting the inorganic oxide films 16a and 22a is preferably one having a relatively low dielectric constant. Thereby, image sticking etc. in liquid crystal device 100 can be prevented more effectively.

Examples of such inorganic oxides include silicon oxide such as SiO ₂ and SiO, Al ₂ O ₃ , MgO _, TiO ₂ , TiO ₂ , In ₂ O ₃ , Sb ₂ O ₃ , Ta ₂ O ₅ , and Y. Examples include metal oxides such as ₂ O ₃ , CeO ₂ , WO ₃ , CrO ₃ , GaO ₃ , HfO ₂ , Ti ₃ O ₅ , NiO, ZnO, Nb ₂ O ₅ , ZrO ₂ , Ta ₂ O _5. Of these, one or a combination of two or more thereof can be used, and those containing SiO ₂ or Al ₂ O ₃ as the main component are particularly preferred. SiO ₂ and Al ₂ O ₃ have a particularly low dielectric constant and high light stability.

  The coating films 19 and 29 are formed along at least the surfaces (in this embodiment, the surfaces and the inner surfaces of the pores) of the inorganic oxide films 16a and 22a. The coatings 19 and 29 are films formed by processing the inorganic oxide films 16a and 22a using a processing liquid described later, that is, the surfaces of the inorganic oxide films 16a and 22a and the inner surfaces of the pores. It is a film formed by a chemical reaction (dehydration condensation reaction) between an active hydroxyl group and a hydroxyl group of alcohol (organic surface treatment material), and is a film mainly composed of the main skeleton portion of alcohol.

  By forming the films 19 and 29, the number of active hydroxyl groups present in the inorganic oxide films 16a and 22a can be reduced, and various impurities adhere to the inorganic oxide films 16a and 22a. It is possible to prevent the inorganic oxide films 16a and 22a from reacting with liquid crystal molecules. For this reason, for example, a decrease in the vertical anchoring force of the alignment films 16 and 22 with respect to the liquid crystal molecules can be prevented, and as a result, the occurrence of abnormal alignment in the liquid crystal molecules is prevented (that is, the alignment is stabilized). be able to. In particular, in the present embodiment, since the alcohol is chemically bonded to the hydroxyl group present on the inner surface of the pore, the above effect becomes more remarkable.

  FIG. 7 is a plan view of two substrates constituting the liquid crystal device 100. FIG. 7A and FIG. 7B show the configuration of the coating 19 on the TFT array substrate 10 side and the configuration of the coating 29 on the counter substrate 20 side, respectively.

  As shown in FIG. 7, on each of the substrates 10 and 20, coatings 19a and 29a are formed in a rectangular frame-shaped region around the image display region, and in the rectangular region in the center of the image display region that is inside thereof. Films 19b and 29b are formed. These are formed by applying different surface treatments to the inorganic oxide films in the central portion and the peripheral portion of the image display region 100A. This difference in surface treatment is based on the distribution of the surface temperature of the inorganic oxide film during module operation (during display operation of the projector including the liquid crystal device 100). That is, in the liquid crystal device for a projector, the intensity of light at the central portion is about 5% to 15% higher than the peripheral portion of the image display region 100A. In addition, since the cooling of the liquid crystal device is also performed from the frame attached to the peripheral portion of the liquid crystal device at the same time as the air is sent over the entire surface, the surface temperature of the alignment film is also higher in the central portion than in the peripheral portion. . When viewed from the entire liquid crystal device, the surface temperature is highest at the center of the image display region 100A, and the surface temperature decreases toward the outer periphery, and the surface temperature near the outermost periphery of the image display region 100A or the region outside it is the highest. Is low. In general, photodegradation of organic matter is about 1.5 to 3 times faster when the temperature rises by 10 ° C. Therefore, if a common surface treatment is applied to regions with different surface temperatures, the coating deteriorates quickly in regions with high surface temperatures. Even if other parts are not deteriorated, the whole film is judged to be defective. Therefore, in this embodiment, the organic surface treatment material to be used is varied according to the difference in the surface temperature of the alignment film during module operation, and the most suitable material for the temperature condition is selected for each region. Yes.

  Specifically, by adjusting the length of the alkyl group of the coating chemically bonded to the inorganic oxide film, appropriate characteristics can be obtained for each region. In general, a material having a long alkyl group has a large anchoring force for a liquid crystal and a high alignment regulating force, but is easily degraded by strong light, and therefore is inferior in terms of reliability. On the other hand, a material having a short alkyl group has high reliability with respect to light, but the anchoring force is small, so that the alignment regulating force is weak. For this reason, the peripheral portion of the image display region 100A where the surface temperature of the alignment film during module operation is relatively low (the region including the vicinity of the outermost peripheral portion of the image display region 100A where the surface temperature is the lowest or the region outside thereof) Then, from the viewpoint of strengthening the orientation regulating force, a long alkyl group is selected as the coating film 19a, 29a of alcohol (organic surface treatment material) to be chemically bonded to the inorganic oxide films 16a, 22a. On the other hand, in the central part of the image display area where the surface temperature of the alignment film during module operation is relatively high (including the central part of the image display area 100A where the surface temperature is highest), the long-term reliability of the alignment is improved. In view of the above, as the coating films 19b and 29b of alcohol (organic surface treatment material) to be chemically bonded to the inorganic oxide films 16a and 22a, those having a short alkyl group are selected. In this case, although the alignment regulating force is weak at the center of the image display region 100A where the coatings 19b and 29b are formed, the liquid crystal molecules in this part are aligned from the periphery of the image display region 100A having a strong alignment regulating force. Since it is affected, the orientation characteristics are not extremely deteriorated.

  It should be noted that there is a difference in the average alkyl group length between the alcohol of the coating in the high surface temperature region and the low surface temperature region. You may make it combine suitably with alcohol of molecular weight. In particular, when low molecular weight alcohol is used in combination in the periphery of the image display area where high molecular weight alcohol should be used, the alcohol is also chemically bonded to the hydroxyl groups between the high molecular weight alcohols and the hydroxyl groups existing in the back of the pores. There is an advantage that the hydroxyl groups remaining in the inorganic oxide films 16a and 22a can be more reliably reduced.

  The alcohol of the coating films 19a and 29a formed in the region having a low surface temperature preferably has a main component having a carbon number (alkyl group length) of 5 or more. Moreover, it is preferable that the average molecular weight of alcohol is about 100-400, and it is more preferable that it is about 120-400. By using a material having such a carbon number and average molecular weight, good alignment stability can be obtained. Further, since the affinity for the liquid crystal molecules is higher, the vertical anchoring force for the liquid crystal molecules can be reliably increased.

  Examples of such alcohols include aliphatic alcohols, aromatic alcohols, alicyclic alcohols, heterocyclic alcohols, polyhydric alcohols, and halogen-substituted products thereof (particularly, fluorine-substituted products). Alcohol, alicyclic alcohol or a fluorine-substituted product thereof (fluoroalcohol) is preferred. By using an aliphatic alcohol, an alicyclic alcohol, or a fluorine-substituted product thereof, the vertical anchoring force for the liquid crystal molecules is further increased, and the liquid crystal molecules can be more reliably vertically aligned.

  The alicyclic alcohol or its fluorine-substituted product is more preferably one having a steroid skeleton. Since the alicyclic alcohol having a steroid skeleton or a fluorine-substituted product thereof has a highly planar structure, it is particularly excellent in the function of controlling the alignment of liquid crystal molecules.

  For these reasons, the alcohol used for processing the peripheral portion of the image display area is octanol, nonanol, decanol, undecanol, dodecanol, tridecanol, tetradecanol, pentadecanol, hexadecanol, heptadecanol, octadecanol, Fatty alcohols such as eicosanol, heneicosanol, docosanol, tricosanol, tetracosanol, cholesterol, epicholesterol, cholestanol, epicholestanol, ergostanol, epiergostanol, copressanol, epicoprestanol, α- Preferred are those mainly composed of alicyclic alcohols such as ergosterol, β-sitosterol, stigmasterol, campesterol, or their fluorine-substituted products. Further, the aliphatic alcohol or the fluorine-substituted product thereof may be either one in which the hydrocarbon portion or the fluorocarbon portion (main skeleton portion) is linear or branched.

  On the other hand, the alcohol of the coating films 19b and 29b formed in the region having a high surface temperature is preferably composed mainly of one having 1 to 4 carbon atoms (length of alkyl group). Moreover, it is preferable that the average molecular weight of alcohol is about 32-70, and it is more preferable that it is about 32-60. By using a material having such a carbon number and average molecular weight, an alignment film having excellent long-term reliability can be obtained. Moreover, since the alcohol having such a carbon number has a small molecular size, it can be surely penetrated deeply into the pores. Moreover, since it is liquid at normal temperature, it is easy to handle when the inorganic oxide films 16a and 22a are treated with a treatment liquid described later.

  As such an alcohol, methanol, ethanol, propanol or those mainly containing a fluorine-substituted product thereof is preferable. Since many liquid crystal molecules are fluorinated, the use of a fluorine-substituted product improves the affinity with the liquid crystal molecules and further enhances the effect of vertically aligning the liquid crystal molecules.

[Method of manufacturing liquid crystal device]
Next, a method for manufacturing the liquid crystal device 100 will be described while paying attention to a method for forming an alignment film. FIG. 8 is a process flow showing a method for forming an alignment film.
The formation method of the alignment film 16 and the alignment film 22 is basically the same. Therefore, here, a method for forming the alignment film 16 will be mainly described.

First, the inorganic oxide film 16a is formed on the TFT array substrate 10 manufactured by a known method by oblique vapor deposition (step S1). By using the oblique deposition method, an inorganic oxide film 16a having a plurality of pores 16H can be obtained.
Here, the angle θ _C (see FIG. 6) of the pores 16H with respect to the TFT array substrate 10 is adjusted by appropriately setting the angle at which the inorganic oxide vaporized from the evaporation source reaches the surface of the TFT array substrate 10. be able to.

Next, a first treatment liquid containing 1-hexanol or the like is applied to the periphery of the image display region 100A (step S2).
The first treatment liquid contains, as the organic surface treatment material, an alcohol having a large average molecular weight or a large number of carbon atoms suitable for strengthening the orientation regulating force as described above.

  The first treatment liquid may be such alcohol itself (alcohol content is almost 100%) or may be diluted with a suitable diluent solvent. When the alcohol is mixed or dissolved in a solvent, a solvent that can mix or dissolve the alcohol and has a lower polarity than the alcohol is selected. As a result, it is possible to prevent the solvent from interfering with the reaction between the hydroxyl group of the inorganic oxide film 16a and the alcohol in the post-process S3, and a chemical reaction can be reliably caused.

  The first treatment liquid needs to penetrate sufficiently into the pores 16H of the inorganic oxide film 16a. For this reason, when the first treatment liquid is applied, it is desirable that the air in the pores is degassed in a reduced-pressure atmosphere to sufficiently penetrate the first treatment liquid into the pores 16H.

  As a method for applying the first treatment liquid, a flexographic printing method, an ink jet printing method, or the like that can be selectively applied only to a predetermined region of the substrate is preferable.

When the first treatment liquid is applied, the substrate 10 is heated (step S3).
Thereby, a dehydration condensation reaction occurs between the hydroxyl group present on the surface of the inorganic oxide film 16a and the inner surface of the pore 16H and the hydroxyl group of the alcohol, and on the surface of the inorganic oxide film 16a and the inner surface of the pore 16H. , Alcohol is chemically bonded. As a result, a film 19a mainly composed of the main skeleton portion of alcohol is formed along the surface of the inorganic oxide film 16a and the inner surface of the pores 16H.

  Although the heating temperature of the board | substrate 10 is not specifically limited, It is preferable that it is about 80-250 degreeC, and it is more preferable that it is about 100-200 degreeC. If the heating temperature is too low, the alcohol may not be sufficiently chemically bonded to the inorganic oxide film 16a depending on the type of alcohol, the type of inorganic oxide, and the like. Even if it exceeds this value, no further increase in effect can be expected.

  The heating time of the substrate 10 is not particularly limited, but is preferably about 20 to 180 minutes, more preferably about 40 to 100 minutes. If the heating time is too short, alcohol may not be sufficiently chemically bonded to the inorganic oxide film 16a depending on other conditions such as the heating temperature. On the other hand, the heating temperature is set higher than the upper limit. However, no further increase in effect can be expected.

  In this step, a method using heating is used as a method of reacting a hydroxyl group present on the surface of the inorganic oxide film 16a and the inner surface of the pore 16H with alcohol, but the reaction is not limited to the method using heating, for example, It can also be performed by ultraviolet irradiation, infrared irradiation, or the like.

  When a plurality of alcohols are used, a plurality of alcohols may be mixed simultaneously in the treatment liquid. In this case, the ratio of the plurality of types of alcohols chemically bonded to the inorganic oxide film 16a is adjusted by appropriately setting, for example, the blending ratio, type, molecular weight, processing conditions, and the like of the plurality of types of alcohols in the processing solution. Can do. Alternatively, a plurality of treatment liquids each containing each alcohol may be prepared, and the treatment liquid may be sequentially used to treat the substrate 10 as described above. In this case, it is preferable to process the substrate 10 by sequentially changing the treatment liquid containing the alcohol having the lowest molecular weight to the treatment liquid containing the alcohol having the higher molecular weight. Thereby, the low molecular weight alcohol can be chemically bonded more reliably to the back of the pores 16H.

When the surface treatment of the peripheral portion of the image display region 100A is completed as described above, a second treatment liquid containing isopropyl alcohol or the like is applied to the central portion of the image display region 100A (Step S4).
As described above, the second treatment liquid contains an alcohol having a small average molecular weight or a small number of carbon atoms suitable for improving the reliability of the alignment film as an organic surface treatment material.
Conditions for the second treatment liquid adjustment method, coating method, deaeration treatment after coating, and the like are the same as those for the first treatment liquid.

When the second treatment liquid is applied, the substrate 10 is heated (step S5).
Thereby, a dehydration condensation reaction occurs between the hydroxyl group present on the surface of the inorganic oxide film 16a and the inner surface of the pore 16H and the hydroxyl group of the alcohol, and on the surface of the inorganic oxide film 16a and the inner surface of the pore 16H. , Alcohol is chemically bonded. As a result, a film 19b mainly composed of the main skeleton portion of alcohol is formed along the surface of the inorganic oxide film 16a and the inner surface of the pores 16H.
Conditions such as heating temperature and heating time are the same as in the case of the first treatment liquid.

Thus, the surface treatment is completed for both the central portion and the peripheral portion of the image display region 100A, thereby completing the inorganic oxide film 16.
Here, the processing of the peripheral portion of the image display area 100A is first performed, and then the processing of the central portion of the image display area 100A is performed, but this order may be either.

Next, the alignment film 22 is formed on the surface of the counter substrate 20 using the same method.
Then, these substrates 10 and 20 are bonded together via a sealing material 52 provided in a frame shape, and the frame of the sealing material 52 is filled with liquid crystal. Thereafter, a polarizing plate or the like is attached to the outer surface side of the substrates 10 and 20 as necessary.
Thus, the liquid crystal device 100 is completed.

  As described above, in the present embodiment, the central portion of the image display region 100A having a high surface temperature and the image display region 100A having a low surface temperature according to the distribution of the surface temperature of the alignment films 16 and 22 during module operation. Appropriate organic surface treatment materials are selected for each peripheral portion. Specifically, for regions with a low surface temperature, the reliability to light is low, but using an organic surface treatment material with excellent alignment regulation power, for regions with a high surface temperature, the alignment regulation force is slightly inferior, Organic surface treatment materials with high light reliability are used. For this reason, when the coating film is extremely deteriorated only at the central portion of the image display region 100A, the entire coating film is not made defective. As a result, the life of the entire liquid crystal device can be extended. In this case, the orientation regulating force is weak in the region where the surface temperature is high, but the region where the orientation regulating force is strong (region where the surface temperature is low) exists in the surrounding area. Orientation characteristics can be realized. In general, since alignment characteristics and reliability are in a trade-off relationship, both characteristics cannot be realized at the same time. However, in the present invention, by realizing these characteristics in different regions, both characteristics can be realized. It is possible to satisfy the characteristics at the same time.

  In addition, in the peripheral portion of the liquid crystal device, the orientation tends to be disturbed earlier than the central portion due to moisture intrusion and elution components from the sealing material, but in this embodiment, the peripheral portion of the image display region is compared to the central portion. Such a defect is less likely to occur because the film is formed in a state with good alignment characteristics.

[Second Embodiment]
Next, a second embodiment of the present invention will be described.
FIG. 9 is a process flow showing the method for manufacturing the liquid crystal device of the present embodiment. The basic part of this process is the same as that of the first embodiment, and the only difference is the method of selectively disposing the processing liquid at a predetermined position on the substrate. For this reason, the same code | symbol is attached | subjected about the component which is common in 1st Embodiment, and detailed description is abbreviate | omitted.

  In this embodiment, first, the inorganic oxide film 16a is formed on the TFT array substrate 10 manufactured by a known method by the oblique vapor deposition method (step S11).

Next, a second treatment liquid containing isopropyl alcohol or the like is applied to the entire substrate 10 (step S12).
As described above, the second treatment liquid contains an alcohol having a small average molecular weight or a small number of carbon atoms suitable for improving the reliability of the alignment film as an organic surface treatment material.
As a method for applying the second treatment liquid, a spin coating method, a dip coating method, or the like that can be applied uniformly over the entire substrate is preferable.

When the second treatment liquid is applied, the substrate 10 is heated (step S13).
As a result, a film 19b mainly composed of the main skeleton portion of alcohol is formed on the surface of the inorganic oxide film 16a and the inner surface of the pores 16H.

Next, the mask is used to irradiate the peripheral portion of the image display region 100A and the region outside thereof with ultraviolet rays, and the coating 19b in the region is selectively removed (step S14).
In this step, a method of irradiating ultraviolet rays is used as a method for removing the coating film 19b, but any other method may be used as long as it can selectively remove the coating film.

When the surface treatment of the central portion of the image display area 100A is completed as described above, the first treatment liquid containing 1-hexanol or the like is applied to the peripheral portion of the image display area 100A (step S15).
The first treatment liquid contains, as the organic surface treatment material, an alcohol having a large average molecular weight or a large number of carbon atoms suitable for strengthening the orientation regulating force as described above.

  As a coating method of the first treatment liquid, not only a method that can be selectively applied only to the peripheral portion of the substrate 10 such as a flexographic printing method or an ink jet printing method, but also a spin coating method, a dip coating method, or the like. As described above, a film in which a coating film is formed on the entire substrate can also be used. The central portion of the image display area 100A has already been surface-treated with the second treatment liquid, and alcohol contained in the second treatment liquid is present on the surface of the inorganic oxide film 16a and the inner surface of the pores 16H. This is because, since they are firmly bonded, even if the surface treatment is performed again with the first treatment liquid, alcohol does not adhere to that portion.

When the first treatment liquid is applied, the substrate 10 is heated (step S16).
Thereby, the coating film 19a mainly composed of the main skeleton portion of alcohol is formed on the surface of the inorganic oxide film 16a and the inner surface of the pores 16H.

Thus, the surface treatment is completed for both the central portion and the peripheral portion of the image display region 100A, thereby completing the inorganic oxide film 16.
Here, the processing of the central portion of the image display area 100A is performed first, and then the processing of the peripheral portion of the image display area 100A is performed, but this order may be either.

Next, the alignment film 22 is formed on the surface of the counter substrate 20 using the same method.
Then, these substrates 10 and 20 are bonded together via a sealing material 52 provided in a frame shape, and the frame of the sealing material 52 is filled with liquid crystal. Thereafter, a polarizing plate or the like is attached to the outer surface side of the substrates 10 and 20 as necessary.
Thus, the liquid crystal device is completed.

  In this embodiment, after surface-treating the whole, the surface treatment is partially removed to realize different surface treatments for each region. For this reason, patterning becomes unnecessary at the stage of applying the treatment liquid, and the process becomes easier accordingly.

[Third Embodiment]
[Configuration of liquid crystal device]
Next, a third embodiment of the present invention will be described.
FIG. 10 is a plan view of two substrates constituting the liquid crystal device of the present embodiment. FIG. 10A and FIG. 10B show the configuration of the coating 191 on the TFT array substrate 10 side and the configuration of the coating 291 on the counter substrate 20 side, respectively. In FIG. 10, a part of the pixels 100a arranged in a matrix is shown in an enlarged manner in a frame indicated by a one-dot chain line.
The basic structure of this liquid crystal device is the same as that of the first embodiment, and the only difference is the position of the film formed by the surface treatment and its configuration. For this reason, the same code | symbol is attached | subjected about the component which is common in 1st Embodiment, and detailed description is abbreviate | omitted.

  As shown in FIG. 10, on each of the substrates 10 and 20, coatings 191 b and 291 b are formed in a rectangular region (region in the pixel) where the pixel electrode 9 is arranged, and a lattice-shaped region that configures the space between the pixels. Films 191a and 291a are formed in (regions between pixels). These are formed by applying different surface treatments to the region in the pixel and the region between the pixels. This difference in surface treatment is based on the distribution of the surface temperature of the inorganic oxide film during module operation. That is, as shown in FIG. 10B, a light shielding film 23 having a lattice shape in plan view is formed on the counter substrate 20 corresponding to the area between the pixels. Therefore, the temperature condition differs between the area where the incident light is blocked (light-blocking area) and the area where the incident light is not blocked (non-light-blocking area). More specifically, the surface temperature is highest at the center of the in-pixel region that is a non-light-shielding region, and the surface temperature is lowest in the vicinity of the outermost peripheral portion of the in-pixel region or the inter-pixel region that is a light-shielding region. Therefore, in the present embodiment, the organic surface treatment material to be used is changed according to the difference in the surface temperature of the alignment film during the module operation, and a material most suitable for the temperature condition is selected for each region. I am doing so.

  Specifically, by adjusting the length of the alkyl group of the coating chemically bonded to the inorganic oxide film, appropriate characteristics can be obtained for each region. That is, in the light shielding region where the surface temperature is relatively low due to light being blocked, a material having a long alkyl group is selected as the alcohol coatings 191a and 291a chemically bonded to the inorganic oxide films 16a and 22a. In the non-light-shielding region where the surface temperature is relatively high by transmitting light, a material having a short alkyl group is selected as the alcohol coatings 191b and 291b to be chemically bonded to the inorganic oxide films 16a and 22a. In this case, although the alignment regulating force is weak in the region in the pixel where the coating films 191b and 291b are formed, the liquid crystal molecules in this portion are affected by the alignment from the pixel peripheral portion having a strong alignment regulating force. It won't be extremely bad. Especially in the case of a small liquid crystal device used as a light modulation means of a projector, since the size of one pixel is very small, even if the alignment characteristic at the center of the pixel is inferior, the alignment characteristic of the inter-pixel region If it is good, good orientation characteristics can be realized even in the center of the pixel due to the influence of the orientation.

  Note that the surface temperature distribution of the light shielding region and the non-light shielding region may be opposite to the above depending on the intensity of incident light, the material of the light shielding film, and the like. That is, when the light shielding film is made of a material that easily absorbs light, the light shielding region is heated by absorbing light, and the surface temperature may increase. In this case, since the surface temperature of the outermost peripheral part of the pixel inner region or the inter-pixel region is the highest and the surface temperature is the lowest in the central part of the pixel inner region, the surface temperature is contrary to the above configuration. It is desirable to select a material having a long alkyl group for the non-light-shielding region where the surface temperature is relatively low, and to select a material having a short alkyl group for the light-shielding region where the surface temperature is relatively high.

  The alcohol of the coating films 191a and 291a formed in the region having a low surface temperature is preferably composed mainly of a carbon number (alkyl group length) of 5 or more. Moreover, it is preferable that the average molecular weight of alcohol is about 100-400, and it is more preferable that it is about 120-400. On the other hand, the alcohols of the coating films 191b and 291b formed in the region having a high surface temperature are preferably mainly composed of one having 1 to 4 carbon atoms (length of alkyl group). Moreover, it is preferable that the average molecular weight of alcohol is about 32-70, and it is more preferable that it is about 32-60. As these alcohols, those described above can be used.

[Method of manufacturing liquid crystal device]
Next, a method for manufacturing a liquid crystal device will be described while paying attention to a method for forming an alignment film. FIG. 11 is a process flow showing a method for forming an alignment film.
The formation method of the alignment film 16 and the alignment film 22 is basically the same. Therefore, here, a method for forming the alignment film 16 will be mainly described.

  First, an inorganic oxide film 16a is formed on the TFT array substrate 10 manufactured by a known method by oblique vapor deposition (step S21).

Next, the 1st processing liquid containing 1-hexanol etc. is applied to the field between pixels in image display field 100A (process S22).
The first treatment liquid contains, as the organic surface treatment material, an alcohol having a large average molecular weight or a large number of carbon atoms suitable for strengthening the orientation regulating force as described above.
As a method for applying the first treatment liquid, an ink jet printing method or the like is preferable because it can be selectively applied only to a region between pixels.

When the first treatment liquid is applied, the substrate 10 is heated (step S23).
As a result, a film 191a mainly composed of the main skeleton portion of alcohol is formed on the surface of the inorganic oxide film 16a and the inner surface of the pores 16H.

When the surface treatment of the region in the pixel is completed as described above, the second treatment liquid containing isopropyl alcohol or the like is applied to the region in the pixel in the image display region 100A (step S24).
As described above, the second treatment liquid contains an alcohol having a small average molecular weight or a small number of carbon atoms suitable for improving the reliability of the alignment film as an organic surface treatment material.
As a method for applying the second treatment liquid, an ink jet printing method or the like that can be selectively applied only to the region in the pixel is suitable.

When the second treatment liquid is applied, the substrate 10 is heated (step S25).
As a result, a film 191b mainly composed of the main skeleton portion of alcohol is formed on the surface of the inorganic oxide film 16a and the inner surface of the pores 16H.

Thus, the surface treatment is completed for both the region in the pixel and the region between the pixels, thereby completing the inorganic oxide film 16.
Note that, here, the processing of the region between the pixels is performed first, and then the processing of the region within the pixel is performed. However, this order may be either.

Next, the alignment film 22 is formed on the surface of the counter substrate 20 using the same method.
Then, these substrates 10 and 20 are bonded together via a sealing material 52 provided in a frame shape, and the frame of the sealing material 52 is filled with liquid crystal. Thereafter, a polarizing plate or the like is attached to the outer surface side of the substrates 10 and 20 as necessary.
Thus, the liquid crystal device is completed.

  In the present embodiment, an appropriate surface treatment material is used in accordance with the difference in surface temperature between the region between pixels and the region within the pixel, so that a liquid crystal device with more excellent alignment stability and reliability is provided. be able to. In this case, although the alignment regulating power of the region in the pixel is weak, the size of one pixel is very small, about 10 μm, in the liquid crystal device for projectors, so the influence of the surrounding region with high alignment characteristics (inter-pixel region) Thus, the low orientation characteristics of the in-pixel region can be sufficiently compensated.

[Fourth Embodiment]
Next, a fourth embodiment of the present invention will be described.
FIG. 12 is a process flow showing the method for manufacturing the liquid crystal device of this embodiment. The basic part of this process is the same as that of the third embodiment, and the only difference is the method of selectively disposing the processing liquid at a predetermined position on the substrate. For this reason, the same code | symbol is attached | subjected about the component which is common in 3rd Embodiment, and detailed description is abbreviate | omitted.

  In the present embodiment, first, the inorganic oxide film 16a is formed on the TFT array substrate 10 manufactured by a known method by the oblique vapor deposition method (step S31).

Next, a second treatment liquid containing isopropyl alcohol or the like is applied to the entire substrate 10 (step S32).
As described above, the second treatment liquid contains an alcohol having a small average molecular weight or a small number of carbon atoms suitable for improving the reliability of the alignment film as an organic surface treatment material.
As a method for applying the second treatment liquid, a spin coating method, a dip coating method, or the like that can be applied uniformly over the entire substrate is preferable.

When the second treatment liquid is applied, the substrate 10 is heated (step S33).
As a result, a film 191b mainly composed of the main skeleton portion of alcohol is formed on the surface of the inorganic oxide film 16a and the inner surface of the pores 16H.

Next, the area between the pixels of the image display area 100A is irradiated with ultraviolet rays using a mask, and the film 191b in the area is selectively removed (step S34).
In this step, a method of irradiating ultraviolet rays is used as a method of removing the coating film 191b, but any other method may be used as long as it can selectively remove the coating film.

When the surface treatment of the region in the pixel is completed as described above, the first treatment liquid containing 1-hexanol or the like is applied to the region between the pixels of the image display region 100A (step S35).
The first treatment liquid contains, as the organic surface treatment material, an alcohol having a large average molecular weight or a large number of carbon atoms suitable for strengthening the orientation regulating force as described above.

  As a coating method of the first treatment liquid, not only a method that can be selectively applied only to an area between pixels, such as an ink jet printing method, but also a whole substrate such as a spin coating method or a dip coating method. A film on which a coating film is formed can also be used. The region in the pixel has already been surface-treated with the second treatment liquid, and the alcohol contained in the second treatment liquid is firmly bonded to the surface of the inorganic oxide film 16a and the inner surface of the pores 16H. Therefore, even if the surface treatment is performed again with the first treatment liquid, alcohol does not adhere to that portion.

When the first treatment liquid is applied, the substrate 10 is heated (step S36).
As a result, a film 191a mainly composed of the main skeleton portion of alcohol is formed on the surface of the inorganic oxide film 16a and the inner surface of the pores 16H.

Thus, the surface treatment is completed for both the region in the pixel and the region between the pixels, thereby completing the inorganic oxide film 16.
Note that, here, the region in the pixel is first processed and then the region between the pixels is processed, but this order may be either.

Next, the alignment film 22 is formed on the surface of the counter substrate 20 using the same method.
Then, these substrates 10 and 20 are bonded together via a sealing material 52 provided in a frame shape, and the frame of the sealing material 52 is filled with liquid crystal. Thereafter, a polarizing plate or the like is attached to the outer surface side of the substrates 10 and 20 as necessary.
Thus, the liquid crystal device is completed.

  In this embodiment, after surface-treating the whole, the surface treatment is partially removed to realize different surface treatments for each region. For this reason, patterning becomes unnecessary at the stage of applying the treatment liquid, and the process becomes easier accordingly.

[Fifth Embodiment]
[Configuration of liquid crystal device]
Next, a fifth embodiment of the present invention will be described.
FIG. 13 is a plan view of two substrates constituting the liquid crystal device of the present embodiment. 13A and 13B show the configuration of the coating 192 on the TFT array substrate 10 side and the configuration of the coating 292 on the counter substrate 20 side, respectively.
The basic structure of this liquid crystal device is the same as that of the first embodiment, and the only difference is that the surface treatment of the inorganic oxide film is performed only on the periphery of the image display region 100A. For this reason, the same code | symbol is attached | subjected about the component which is common in 1st Embodiment, and detailed description is abbreviate | omitted.

  In this liquid crystal device, the surface treatment is performed only on the peripheral portion of the image display region 100A of each of the substrates 10 and 20, that is, on the region where the surface temperature of the alignment film is relatively low during module operation. The central portion of the relatively high image display area 100A is not subjected to surface treatment. For this reason, the coating films 192 and 292 formed by the surface treatment are arranged in a rectangular frame shape only around the periphery of the image display region 100A, and have higher reliability with respect to light than that of the first embodiment. It has a structure. In this configuration, the alignment regulating force is weak in the central portion of the image display region 100A where the surface treatment is not performed, but the liquid crystal molecules in this portion are aligned from the periphery of the image display region 100A having a strong alignment regulating force. Since it is affected, the orientation characteristics are not extremely deteriorated. However, if the area where the surface treatment is not performed becomes too large, the influence of the orientation of the peripheral part cannot be sufficiently exerted up to the central part, so the area of this area depends on the situation such as the temperature distribution that occurs during module operation. It is desirable to make it as small as possible.

  The alcohols of the coating films 192 and 292 are preferably those having a carbon number (alkyl group length) of 5 or more as a main component. Moreover, it is preferable that the average molecular weight of alcohol is about 100-400, and it is more preferable that it is about 120-400. As such an alcohol, those described above can be used.

As a surface treatment method, the following method can be used.
First, a treatment liquid containing 1-hexanol or the like is selectively applied to the peripheral portion of the image display region 100A using a flexographic printing method, an inkjet printing method, or the like. As described above, this treatment liquid contains an alcohol having a large average molecular weight or a large number of carbon atoms suitable for strengthening the orientation regulating force as described above.

After the treatment liquid is applied, the substrate is heated.
As a result, coatings 192 and 292 mainly comprising the main skeleton portion of alcohol are formed on the surfaces of the inorganic oxide films 16a and 22a and the inner surfaces of the pores. The coating films 192 and 292 are selectively formed only on the peripheral portion of the image display region 100A because the processing liquid is selectively applied to the peripheral portion of the image display region 100A.

As the surface treatment method, the following method can also be used.
First, a treatment liquid containing 1-hexanol or the like is applied to the entire substrate. As described above, this treatment liquid contains an alcohol having a large average molecular weight or a large number of carbon atoms suitable for strengthening the orientation regulating force as described above.

After the treatment liquid is applied, the substrate is heated.
As a result, coatings 192 and 292 mainly comprising the main skeleton portion of alcohol are formed on the surfaces of the inorganic oxide films 16a and 22a and the inner surfaces of the pores.

  Next, ultraviolet rays are applied to the central portion of the image display region 100A using a mask to selectively remove the coating films 191 and 292 in the region. Thereby, the coatings 192 and 292 are selectively formed only in the peripheral part of the image display region 100A.

  In this embodiment, the surface treatment of the alignment film is performed only on the peripheral portion of the image display region 100A, and the alignment characteristics of the central portion of the image display region 100A that is not subjected to the surface treatment are set to the stable alignment of the peripheral portion of the image display region. It is supposed to be compensated by influence. For this reason, the reliability with respect to light can also be improved, maintaining the alignment characteristic of a liquid crystal comparatively favorable.

[Sixth Embodiment]
[Configuration of liquid crystal device]
Next, a sixth embodiment of the present invention will be described.
FIG. 14 is a plan view of two substrates constituting the liquid crystal device of the present embodiment. 14A and 14B show the configuration of the coating 193 on the TFT array substrate 10 side and the configuration of the coating 293 on the counter substrate 20 side, respectively. In FIG. 14, a part of the pixels 100a arranged in a matrix is shown in an enlarged manner in a frame indicated by a one-dot chain line.
The basic structure of this liquid crystal device is the same as that of the third embodiment, and the only difference is the position of the film formed by the surface treatment and its configuration. For this reason, the same code | symbol is attached | subjected about the component which is common in 3rd Embodiment, and detailed description is abbreviate | omitted.

  As shown in FIG. 14, on each of the substrates 10 and 20, coatings 193A and 293A are formed in the periphery of the image display region 100A, and coatings 193B and 293B are formed in the center of the image display region 100A. In addition, the coatings 193B and 293B include coatings 193b and 293b formed in a rectangular region (region in the pixel) where the pixel electrode 9 is disposed, and a lattice-shaped region (inter-pixel region) that forms between the pixels. ) And the coatings 193a and 293a formed. These coatings are formed by applying different surface treatments to the central portion and the peripheral portion of the image display region, or to the region in the pixel and the region between the pixels in the image display region. This difference in surface treatment is based on the distribution of the surface temperature of the inorganic oxide film during module operation. Specifically, the length of the alkyl group of the film chemically bonded to the inorganic oxide film is adjusted. Thus, an appropriate characteristic can be obtained for each region.

  That is, in the peripheral portion of the image display region 100A where the surface temperature of the alignment film during module operation is relatively low, an alcohol film that is chemically bonded to the inorganic oxide films 16a and 22a from the viewpoint of strengthening the alignment regulating force. As 193A and 293A, those having a long alkyl group are selected. On the other hand, in the central portion of the image display area 100A, the surface temperature is different between a light shielding area (area between pixels) where light is blocked by the light shielding film 23 and a non-light-shielding area (area within the pixel) where light is not blocked. Depending on the surface temperature, the most suitable material is selected for each region. That is, in the light shielding region where the surface temperature is relatively low due to light being blocked, a material having a long alkyl group is selected as the alcohol coatings 193a and 293a to be chemically bonded to the inorganic oxide films 16a and 22a. In the non-light-shielding region where the surface temperature is relatively high by being transmitted, a material having a short alkyl group is selected as the alcohol coatings 193b and 293b that are chemically bonded to the inorganic oxide films 16a and 22a. In this case, both the coating films 193A and 293A in the peripheral portion of the image display area 100A and the coating films 193a and 293a in the area between the pixels are made of a material having a long alkyl group for the purpose of strengthening the alignment regulating force. Can be formed by a common process. This embodiment is also formed as such. However, when the conditions are optimized for each region, it is of course possible to form the two by different processes.

  The alcohol of the coating films 193A, 293A, 193a, and 293a formed in the region having a low surface temperature preferably has a main component having a carbon number (alkyl group length) of 5 or more. Moreover, it is preferable that the average molecular weight of alcohol is about 100-400, and it is more preferable that it is about 120-400. On the other hand, the alcohol of the coating films 193B, 293B, 193b, and 293b formed in the region having a high surface temperature preferably has a carbon number (alkyl group length) of 1 to 4 as a main component. Moreover, it is preferable that the average molecular weight of alcohol is about 32-70, and it is more preferable that it is about 32-60. As these alcohols, those described above can be used. It is also possible not to perform surface treatment on this region.

  Note that the surface temperature distribution of the light shielding region and the non-light shielding region may be opposite to the above depending on the intensity of incident light, the material of the light shielding film, and the like. In this case, contrary to the above configuration, a material having a long alkyl group is selected for the non-light-shielding region where the surface temperature is relatively low, and an alkyl group is used for the light-shielding region where the surface temperature is relatively high. It is desirable to select materials with short groups.

As a surface treatment method, the following method can be used.
First, the first treatment liquid is selectively applied to the area between the pixels in the periphery of the image display area and in the center of the image display area using an inkjet printing method or the like.
The first treatment liquid contains, as the organic surface treatment material, an alcohol having a large average molecular weight or a large number of carbon atoms suitable for strengthening the orientation regulating force as described above.

When the first treatment liquid is applied, the substrate is heated.
As a result, coatings 193A, 293A, 193a, and 293a mainly including the main skeleton portion of alcohol are formed on the surfaces of the inorganic oxide films 16a and 22a and the inner surfaces of the pores.

When the surface treatment of the area between the pixels in the peripheral area of the image display area and the central area of the image display area is completed as described above, the second area is now added to the area in the central area of the image display area by using an inkjet printing method or the like. A treatment liquid is selectively applied.
As described above, the second treatment liquid contains an alcohol having a small average molecular weight or a small number of carbon atoms suitable for improving the reliability of the alignment film as an organic surface treatment material.

When the second treatment liquid is applied, the substrate is heated.
As a result, coatings 193b and 293b mainly comprising the main skeleton portion of alcohol are formed on the surfaces of the inorganic oxide films 16a and 22a and the inner surfaces of the pores.

Thus, the surface treatment is completed for both the central portion and the peripheral portion of the image display area 100A.
Here, the processing of the peripheral portion of the image display region and the inter-pixel region is first performed, and then the processing of the intra-pixel region is performed, but this order may be either.

As the surface treatment method, the following method can also be used.
First, the first treatment liquid is applied to the entire substrate.
The first treatment liquid contains, as the organic surface treatment material, an alcohol having a large average molecular weight or a large number of carbon atoms suitable for strengthening the orientation regulating force as described above.

When the first treatment liquid is applied, the substrate is heated.
As a result, a film mainly composed of the main skeleton of alcohol is formed on the surfaces of the inorganic oxide films 16a and 22a and the inner surfaces of the pores.

  Next, the mask is used to irradiate the region in the pixel at the center of the image display region with ultraviolet rays, and the film in the region is selectively removed.

When the surface treatment of the area between the pixels in the peripheral area of the image display area and the central area of the image display area is completed as described above, the second processing liquid is selectively applied to the area in the pixel in the central area of the image display area. .
As described above, the second treatment liquid contains an alcohol having a small average molecular weight or a small number of carbon atoms suitable for improving the reliability of the alignment film as an organic surface treatment material.

  As a method for applying the second treatment liquid, not only a method that can be selectively applied only to an area within a pixel, such as an ink jet printing method, but also an entire substrate such as a spin coating method or a dip coating method. A film on which a coating film is formed can also be used. The peripheral area of the image display area and the area between the pixels have already been surface-treated with the first treatment liquid, and the surface of the inorganic oxide film 16a and the inner surface of the pores 16H are included in the first treatment liquid. This is because the alcohol to be bonded is firmly bonded, so even if the surface treatment is performed again with the second treatment liquid, the alcohol does not adhere to that portion.

When the second treatment liquid is applied, the substrate 10 is heated.
As a result, coatings 193b and 293b mainly composed of the main skeleton portion of alcohol are formed on the surface of the inorganic oxide film 16a and the inner surface of the pores 16H.

Thus, the surface treatment is completed for both the central portion and the peripheral portion of the image display area 100A.
Here, the processing of the peripheral portion of the image display region and the inter-pixel region is first performed, and then the processing of the intra-pixel region is performed, but this order may be either.

  In the present embodiment, since an appropriate organic surface treatment material is used according to the difference in surface temperature between the inter-pixel region and the intra-pixel region, a liquid crystal device with more excellent alignment stability and reliability is provided. be able to. In this case, although the alignment regulation power in the pixel inner region is weak, the size of one pixel is very small, such as about 10 μm, in the liquid crystal device for projectors. The low orientation characteristics of the in-pixel region can be sufficiently compensated. In addition, since a region having a good alignment characteristic is formed in the peripheral portion of the image display region 100A, a better alignment characteristic can be obtained by the influence of the alignment from this region. Further, by increasing the alignment regulating force in the peripheral portion of the image display region 100A, it is difficult to cause a problem that the alignment is disturbed due to intrusion of moisture from the peripheral portion of the liquid crystal device or an elution component from the sealing material.

[Seventh Embodiment]
[Configuration of liquid crystal device]
Next, a seventh embodiment of the present invention will be described.
15 and 16 are plan views of two substrates constituting the liquid crystal device of this embodiment. FIG. 15A shows the overall configuration of the coating 194 on the TFT array substrate 10 side, and FIGS. 15B and 15C show the configuration of one pixel in the peripheral and central portions of the image display area. Respectively. FIG. 16A shows the overall configuration of the coating 294 on the counter substrate 20 side, and FIGS. 16B and 16C show one pixel in the periphery and center of the image display area. Each configuration is shown.
The basic structure of this liquid crystal device is the same as that of the third embodiment, and the only difference is the position of the film formed by the surface treatment and its configuration. For this reason, the same code | symbol is attached | subjected about the component which is common in 3rd Embodiment, and detailed description is abbreviate | omitted.

  As shown in FIGS. 15 and 16, on each of the substrates 10 and 20, films 194A and 294A are formed on the periphery of the image display area 100A, and films 194B and 294B are formed on the center of the image display area 100A. Yes. Further, the coatings 194A and 294A include coatings 194b and 294b formed in a rectangular region (region in the pixel) where the pixel electrode 9 is disposed, and a lattice-shaped region (inter-pixel region) forming between the pixels. ) Are formed. The coatings 194B and 294B include the coatings 194d and 294d formed in the region in the pixel, and the coatings 194c and 294c formed in the region between the pixels. It is included. These coatings are formed by applying different surface treatments to the region in the pixel and the region between the pixels. This difference in surface treatment is based on the distribution of the surface temperature of the inorganic oxide film during module operation. Specifically, the length of the alkyl group of the film chemically bonded to the inorganic oxide film is adjusted. Thus, an appropriate characteristic can be obtained for each region.

  That is, when one pixel is viewed by the light shielding film 23 formed corresponding to the inter-pixel region, the surface temperature is highest in the central portion of the pixel inner region which is a non-light-shielding region, and the vicinity of the outermost peripheral portion of the pixel inner region or The surface temperature is lowest in the inter-pixel region that is the light shielding region. For this reason, in the light shielding region where the surface temperature is relatively low due to light being blocked, a material having a long alkyl group is used as the alcohol coatings 194a, 194c, 294a, 294c chemically bonded to the inorganic oxide films 16a, 22a. In the non-light-shielding region where the surface temperature is relatively high when the light is transmitted, the alcohol coatings 194b, 194d, 294b, and 294d that are chemically bonded to the inorganic oxide films 16a and 22a have short alkyl groups. The material is selected. On the other hand, since the surface temperature of the alignment film is lower in the peripheral portion of the image display region 100A than in the central portion when viewed as the entire image display region, the coating 194a in the inter-pixel region in the peripheral portion of the image display region has an image. A material having a longer alkyl group than the coating 194c in the inter-pixel region at the center of the display region is selected, and the coating 194b in the pixel inner region at the periphery of the image display region is more alkylated than the pixel inner region 194d at the center of the image display region. Long base materials have been selected. Similarly, a material having a longer alkyl group than the coating 294c in the interpixel region in the center of the image display region is selected for the coating 294a in the interpixel region in the periphery of the image display region, and the in-pixel region in the periphery of the image display region A material having a longer alkyl group than the in-pixel region 294d at the center of the image display region is selected for the coating 294b.

  The alcohol of the coating films 194a, 194c, 294a, and 294c formed in the region having a low surface temperature preferably has a main component having a carbon number (alkyl group length) of 5 or more. Moreover, it is preferable that the average molecular weight of alcohol is about 100-400, and it is more preferable that it is about 120-400. On the other hand, the alcohol of the coating films 194b, 194d, 294b, and 294d formed in the region having a high surface temperature preferably has a carbon number (alkyl group length) of 1 to 4 as a main component. Moreover, it is preferable that the average molecular weight of alcohol is about 32-70, and it is more preferable that it is about 32-60. As these alcohols, those described above can be used. It is also possible not to perform surface treatment on this region.

  Note that the surface temperature distribution of the light shielding region and the non-light shielding region may be opposite to the above depending on the intensity of incident light, the material of the light shielding film, and the like. In this case, contrary to the above configuration, a material having a long alkyl group is selected for the non-light-shielding region where the surface temperature is relatively low, and an alkyl group is used for the light-shielding region where the surface temperature is relatively high. It is desirable to select materials with short groups.

As a surface treatment method, the following method can be used.
First, the first treatment liquid is selectively applied to the inter-pixel region around the image display region by using an inkjet printing method or the like. Then, by heating the substrate, coatings 194a and 294a mainly composed of the main skeleton portion of alcohol are formed along the surfaces of the inorganic oxide films 16a and 22a and the inner surfaces of the pores.

  Next, the second treatment liquid is selectively applied to the area between the pixels in the center of the image display area by using an ink jet printing method or the like. Then, by heating the substrate, coatings 194c and 294c mainly composed of the main skeleton of alcohol are formed along the surfaces of the inorganic oxide films 16a and 22a and the inner surfaces of the pores.

  Next, the third treatment liquid is selectively applied to a region in the pixel in the periphery of the image display region by using an inkjet printing method or the like. Then, by heating the substrate, coatings 194b and 294b mainly composed of the main skeleton portion of alcohol are formed along the surfaces of the inorganic oxide films 16a and 22a and the inner surfaces of the pores.

  Next, the fourth treatment liquid is selectively applied to a region in the pixel at the center of the image display region using an inkjet printing method or the like. Then, by heating the substrate, coatings 194d and 294d mainly composed of the main skeleton portion of alcohol are formed along the surfaces of the inorganic oxide films 16a and 22a and the inner surfaces of the pores.

  In addition, the 1st process liquid-the 4th process liquid contain the alcohol which satisfy | fills the above-mentioned conditions as an organic surface treatment material.

Thus, the surface treatment is completed for both the central portion and the peripheral portion of the image display area 100A.
Note that, here, the processing of the region between the pixels is performed first, and then the processing of the region within the pixel is performed. However, this order may be either. Similarly, either the peripheral portion or the central portion of the image display area may be processed first. In addition, surface treatment was performed on individual regions by an inkjet printing method or the like, but instead, a method of performing surface treatment on the entire substrate by a spin coating method or the like and removing an unnecessary portion of the film by ultraviolet irradiation or the like is used. May be.

  In the present embodiment, an appropriate surface treatment material is used according to the difference in the surface temperature between the region between the pixels and the region in the pixel and the difference in the surface temperature between the peripheral portion and the central portion of the image display region. A liquid crystal device with more excellent alignment stability and reliability can be provided.

[Projection type display device]
Next, a projection type display device (projector) which is a specific example of the electronic apparatus of the invention will be described with reference to FIG. FIG. 17 is a schematic configuration diagram illustrating a main part of the projection display device. This projection type display device includes the liquid crystal device according to each of the above-described embodiments as light modulation means.

  In FIG. 17, 810 is a light source, 813 and 814 are dichroic mirrors, 815, 816 and 817 are reflection mirrors, 818 is an incident lens, 819 is a relay lens, 820 is an exit lens, and 822, 823 and 824 are liquid crystal devices of the present invention. 825 is a cross dichroic prism, and 826 is a projection lens. The light source 810 includes a lamp 811 such as a metal halide and a reflector 812 that reflects the light of the lamp.

  The dichroic mirror 813 transmits red light contained in white light from the light source 810 and reflects blue light and green light. The transmitted red light is reflected by the reflection mirror 817 and is incident on the light modulation means 822 for red light. The green light reflected by the dichroic mirror 813 is reflected by the dichroic mirror 814 and is incident on the light modulating means 823 for green light. Further, the blue light reflected by the dichroic mirror 813 passes through the dichroic mirror 814. For blue light, in order to prevent light loss due to a long optical path, a light guide means 821 including a relay lens system including an incident lens 818, a relay lens 819, and an exit lens 820 is provided. Blue light is incident on the light modulating means 824 for blue light through the light guiding means 821. Note that the liquid crystal devices of the above-described embodiments are employed for the respective light modulation means 822, 823, and 824.

  The three color lights modulated by the respective light modulation means are incident on the cross dichroic prism 825. The cross dichroic prism 825 is formed by bonding four right-angle prisms. A dielectric multilayer film that reflects red light and a dielectric multilayer film that reflects blue light are formed in an X shape at the interface. Yes. These dielectric multilayer films combine the three color lights to form light representing a color image. The synthesized light is projected onto the screen 827 by the projection lens 826 which is a projection optical system, and the image is enlarged and displayed.

  Since the projection type display device employs the liquid crystal device of each of the above-described embodiments, even when high-intensity light irradiation is performed, the photodegradation of the alignment film does not progress as much as in the past. Therefore, stable display can be performed over a long period of time.

The preferred embodiments of the present invention have been described above with reference to the accompanying drawings, but it goes without saying that the present invention is not limited to such examples. Various shapes, combinations, and the like of the constituent members shown in the above-described examples are examples, and various modifications can be made based on design requirements and the like without departing from the spirit of the present invention.
The liquid crystal device of the present invention is not limited to the light modulation means of the projection display device, but is an electronic book, a personal computer, a digital still camera, a liquid crystal television, a viewfinder type or a monitor direct view type video tape recorder, a car navigation device, Electronic devices that can be suitably used as image display means for devices such as pagers, electronic notebooks, calculators, word processors, workstations, videophones, POS terminals, touch panels, etc., all of which are highly reliable and excellent in display quality Can be provided.

The top view which shows the liquid crystal device of 1st Embodiment. Sectional drawing which follows the H-H 'line | wire of FIG. FIG. 3 is an equivalent circuit diagram of various elements and wirings in a plurality of pixels formed in a matrix in the image display region of the liquid crystal device. FIG. 3 is a plan view showing a plurality of adjacent pixel groups on the TFT array substrate of the liquid crystal device. Sectional drawing which follows the A-A 'line of FIG. The figure which shows typically the cross-section of the part in which the alignment film of the liquid crystal device was formed. The top view which shows the structure of the film formed in the surface of an inorganic oxide film. The process flow which shows the manufacturing method of a liquid crystal device. 9 is a process flow showing a method for manufacturing a liquid crystal device of a second embodiment. The top view which shows the structure of the film in the liquid crystal device of 3rd Embodiment. The process flow which shows the manufacturing method of a liquid crystal device. 10 is a process flow showing a method for manufacturing a liquid crystal device of a fourth embodiment. The top view which shows the structure of the film in the liquid crystal device of 5th Embodiment. The top view which shows the structure of the film in the liquid crystal device of 6th Embodiment. The top view which shows the structure of the film by the side of the TFT array substrate of the liquid crystal device of 7th Embodiment. The top view which shows the structure of the film by the side of the opposing board | substrate of a liquid crystal device. FIG. 6 is a diagram illustrating a projection display device that is an example of an electronic apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... TFT array substrate, 16 ... Orientation film, 16a ... Inorganic oxide film (rhombic vapor deposition film), 19, 19a, 19b, 191, 191a, 191b, 192, 193, 193A, 193B, 193a, 193b, 194 194A, 194B, 194a, 194b, 194c, 194d ... coating, 20 ... counter substrate, 22 ... orientation film, 22a ... inorganic oxide film (orthotropic deposition film), 23 ... light shielding film, 29, 29a, 29b, 291 291a, 291b, 292, 293, 293A, 293B, 293a, 293b, 294, 294A, 294B, 294a, 294b, 294c, 294d ... coating, 50 ... liquid crystal, 100 ... liquid crystal device, 100a ... pixel, 100A ... image display area

Claims (9)

A pair of substrates for holding liquid crystal; an obliquely deposited film provided on at least one of the pair of substrates; and a film formed by chemically bonding an organic surface treatment material to the surface of the obliquely deposited film. A liquid crystal device comprising:
During the operation of the liquid crystal device, the surface temperature of the oblique deposition film varies depending on the region,
The film has a long alkyl group relative to the organic surface treatment material used in the region having the highest surface temperature in the region having the lowest surface temperature of the oblique deposition film during operation of the liquid crystal device. A liquid crystal device using the organic surface treatment material. Having an image display area in which a plurality of pixels are arranged;
In the operation of the liquid crystal device, the image display area has the lowest surface temperature at the periphery of the image display area, and the center part of the image display area has the highest surface temperature.
In the region where the surface temperature is the lowest, the organic surface treatment material having a relatively long alkyl group is used for the coating in the region where the surface temperature is the highest. The liquid crystal device according to claim 1, wherein the liquid crystal device is provided. Having an image display area in which a plurality of pixels are arranged;
A light shielding film is provided in a region between the pixels,
One of the region between the pixels or the region in the pixel has the lowest surface temperature, the other has the highest surface temperature,
In the region where the surface temperature is the lowest, the organic surface treatment material having a long alkyl group is used in the region where the surface temperature is the lowest, relative to the organic surface treatment material used in the region where the surface temperature is the highest. The liquid crystal device according to claim 1, wherein the liquid crystal device is a liquid crystal device. A pair of substrates for holding liquid crystal; an obliquely deposited film provided on at least one of the pair of substrates; and a film formed by chemically bonding an organic surface treatment material to the surface of the obliquely deposited film. A liquid crystal device comprising:
During the operation of the liquid crystal device, the surface temperature of the oblique deposition film varies depending on the region,
The liquid crystal device according to claim 1, wherein the coating film is provided in a region where the surface temperature of the oblique vapor deposition film during operation of the liquid crystal device is lowest and is not provided in the highest region. Having an image display area in which a plurality of pixels are arranged;
In the operation of the liquid crystal device, the image display area has the lowest surface temperature at the periphery of the image display area, and the center part of the image display area has the highest surface temperature.
5. The liquid crystal according to claim 4, wherein the coating film is provided in a peripheral portion of the image display region having the lowest surface temperature and is not provided in a central portion of the image display region having the highest surface temperature. apparatus. Having an image display area in which a plurality of pixels are arranged;
A light shielding film is provided in a region between the pixels,
During the operation of the liquid crystal device, one of the region between the pixels or the region in the pixel has the lowest surface temperature, the other has the highest surface temperature,
6. The liquid crystal device according to claim 4, wherein the coating is provided in the one region having the lowest surface temperature and not provided in the other region having the highest surface temperature. Forming an oblique deposition film on the surface of the substrate; treating the surface of the oblique deposition film with a treatment liquid containing an organic surface treatment material; and chemically treating the organic surface treatment material on the surface of the oblique deposition film. A method of manufacturing a liquid crystal device comprising a step of forming a film formed by bonding,
In the treatment with the treatment liquid, an alkyl group is relatively formed in the region having the lowest surface temperature of the oblique deposition film during the operation of the liquid crystal device and relative to the organic surface treatment material used in the region having the highest surface temperature. A method for producing a liquid crystal device, comprising using the long organic surface treatment material. Forming an oblique deposition film on the surface of the substrate; treating the surface of the oblique deposition film with a treatment liquid containing an organic surface treatment material; and chemically treating the organic surface treatment material on the surface of the oblique deposition film. A method of manufacturing a liquid crystal device comprising a step of forming a film formed by bonding,
The liquid crystal device is characterized in that the treatment with the treatment liquid is performed on a region having the lowest surface temperature of the oblique deposition film during the operation of the liquid crystal device, and is not performed on the highest region. Manufacturing method. An electronic apparatus comprising the liquid crystal device according to claim 1 or the liquid crystal device manufactured by the method for manufacturing a liquid crystal device according to claim 7 or 8.

Images