JP2007033312A - Method and device for manufacturing segment sample for analysis - Google Patents

Method and device for manufacturing segment sample for analysis Download PDF

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JP2007033312A
JP2007033312A JP2005218851A JP2005218851A JP2007033312A JP 2007033312 A JP2007033312 A JP 2007033312A JP 2005218851 A JP2005218851 A JP 2005218851A JP 2005218851 A JP2005218851 A JP 2005218851A JP 2007033312 A JP2007033312 A JP 2007033312A
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sample
section sample
liquid
free surface
section
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Akiyoshi Ishizaki
明美 石崎
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Canon Inc
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/02Devices for withdrawing samples
    • G01N1/04Devices for withdrawing samples in the solid state, e.g. by cutting
    • G01N1/06Devices for withdrawing samples in the solid state, e.g. by cutting providing a thin slice, e.g. microtome
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/02Devices for withdrawing samples
    • G01N1/04Devices for withdrawing samples in the solid state, e.g. by cutting
    • G01N1/06Devices for withdrawing samples in the solid state, e.g. by cutting providing a thin slice, e.g. microtome
    • G01N2001/061Blade details
    • G01N2001/063Blade details with sawing action

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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and a device for manufacturing a segment sample for analysis that can easily sample many segment samples continuously without damage or loss, at a predetermined attitude, and in a predetermined order, and to allow efficient three-dimensional structural analysis. <P>SOLUTION: Segment samples E sequentially formed by cutting a solid S including an analyzed object with a knife 42 for cut are sequentially supplied onto a free surface of liquid L with an equivalent attitude. Liquid flows F1-F4 flowing along the free surface are produced in the liquid L by a peristaltic pump 61. The segment samples E are moved along the liquid flows in a moving course on the liquid free surface. At this time, the width of the moving course of the segment samples E is set larger than the minor diameter of the segment samples E and smaller than the longest diameter. The segment samples E moving in the moving course are adhered onto the upper surface of a sample base P and collected by a collecting means 12. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、分析対象物を含む固体を切削して切片試料を作製する方法及び装置に関するものである。切片試料は赤外線吸光分析器(IR)、X線光電子分光器(XPS)、走査型プローブ顕微鏡(SPM)、透過型電子顕微鏡(TEM)及び走査型電子顕微鏡(SEM)等の分析装置により2次元情報を取得するのに使用される。これらにより得られた2次元情報は、それらを繋ぎ合わせて3次元情報を構築するのに利用される。   The present invention relates to a method and apparatus for producing a section sample by cutting a solid containing an analysis object. The section sample is two-dimensionally analyzed by an analyzer such as an infrared absorption analyzer (IR), an X-ray photoelectron spectrometer (XPS), a scanning probe microscope (SPM), a transmission electron microscope (TEM), and a scanning electron microscope (SEM). Used to get information. The two-dimensional information obtained by these is used to connect them to construct three-dimensional information.

一般に、電子顕微鏡や光学顕微鏡で観察乃至撮影される切片試料を作製するための手段としてミクロトームが用いられている。ミクロトームでは、一般に、分析対象物を樹脂等に包埋した後にアームに固定し、このアームを上下運動させてダイヤモンドやガラスからなるナイフで薄片状に切削する。この切削により得られた切片は切削刃付のボートに張られた水面上に浮かぶので、この切片をメッシュ等ですくい取って透過型電子顕微鏡等の顕鏡試料として用いることができる。このようにして分析対象物を含む固体から切削で連続的に作製された切片試料の観察または撮影に基づき得られる2次元情報は、それらを繋ぎ合せて分析対象物の3次元構造を再構築される。この方法は、生物試料等における3次元構造解析に用いられている。また、薄片化された切片試料のみではなく、切削により切片が除去された残留物として得られるブロックも、分析用試料として用いることが可能であり、例えば光学顕微鏡や走査型電子顕微鏡の顕鏡試料として用いられる。   In general, a microtome is used as a means for preparing a section sample to be observed or photographed with an electron microscope or an optical microscope. In the microtome, in general, an analysis object is embedded in a resin or the like and then fixed to an arm. The arm is moved up and down and cut into a thin piece with a knife made of diamond or glass. Since the slice obtained by this cutting floats on the water surface stretched on a boat with a cutting blade, the slice can be scooped with a mesh or the like and used as a microscope sample such as a transmission electron microscope. In this way, the two-dimensional information obtained based on observation or imaging of the section sample continuously produced by cutting from the solid containing the analysis object is reconstructed to reconstruct the three-dimensional structure of the analysis object. The This method is used for three-dimensional structural analysis of biological samples and the like. Further, not only a sliced slice sample but also a block obtained as a residue from which a slice has been removed by cutting can be used as an analysis sample. For example, a microscope sample of an optical microscope or a scanning electron microscope Used as

連続切削により得られる複数の切片試料からの2次元情報に基づき分析対象物の3次元構造を再構築するためには、先ず分析対象物を含む固体の着目する3次元領域(分析対象物を含む領域)を一定の厚さずつ順次に切削(スライス)する。そして、こうして得られた多数の切片試料を順序よく取得することが必要である。ミクロトームを用いてこのような切片試料の連続捕集をすることは、多大な根気と労力を要する。しかも手動により切片試料を捕集するため、切片試料の一部を紛失したり、切片試料にしわが発生したりするなどの不都合が生ずるおそれがあり、また非効率であった。そして、このことが連続切片法による3次元構造解析を実行する上での高いハードルになっていた。   In order to reconstruct a three-dimensional structure of an analysis object based on two-dimensional information from a plurality of section samples obtained by continuous cutting, first, a three-dimensional region (including the analysis object) in which a solid including the analysis object is focused The region is cut (sliced) sequentially by a certain thickness. Then, it is necessary to obtain a large number of section samples thus obtained in order. The continuous collection of such section samples using a microtome requires a great deal of patience and effort. In addition, since the section sample is collected manually, there is a risk that a part of the section sample may be lost or the section sample may be wrinkled, which is inefficient. This is a high hurdle for executing the three-dimensional structural analysis by the continuous section method.

一方、特許文献1には、ミクロトームを用いて作製されボートに張られた水面上に浮かんでいる切片試料を長尺テープに貼り付けて採取保持する方法が開示されている。
特公平7−97069号公報
On the other hand, Patent Document 1 discloses a method of collecting and holding a slice sample floating on a water surface produced using a microtome and stretched on a boat, on a long tape.
Japanese Patent Publication No. 7-97069

而して、上記特許文献1に記載の方法では、長尺テープに切片試料を順序よく貼り付けるために、切削により固体から分離した切片が形成されると同時に、この切片を長尺テープ上に載せて水面から引き上げるようにしている。このように、自由水面上での切片試料の滞在時間が短い場合には、自由水面の表面張力による平坦化の作用を殆ど受けることなく長尺テープに貼り付けられることになる。切削により形成された時の切片は、一般には平坦ではなく屈曲状態にある。このため、切削と同時に長尺テープに貼り付けられる切片は、引き上げの際に急激な平坦化力を受けて割れなどの損傷を受けるおそれがあった。
本発明は、多数の切片試料を、損傷や損失なく連続的に、更には、所定の姿勢で且つ所定の順序で容易に採取することが可能な分析用切片試料の作製方法及び作製装置を提供することを目的とする。
Thus, in the method described in Patent Document 1, in order to affix the section samples to the long tape in order, a section separated from the solid is formed by cutting, and at the same time, the section is placed on the long tape. And pulling it up from the water surface. As described above, when the residence time of the section sample on the free water surface is short, it is affixed to the long tape with almost no flattening action due to the surface tension of the free water surface. The section formed by cutting is generally not flat but in a bent state. For this reason, the section attached to the long tape at the same time as cutting may be damaged by cracking or the like due to a sudden flattening force when it is pulled up.
The present invention provides a method and apparatus for preparing a section sample for analysis that can easily collect a large number of section samples continuously without damage or loss, and in a predetermined posture and in a predetermined order. The purpose is to do.

上記の目的を達成する本発明の分析用切片試料の作製方法は、
分析対象物を含む固体を切削して切片試料を形成し、
液流を形成し、
形成された切片試料を前記液流によって搬送し、
搬送された前記切片試料を試料台上に捕集する
ことを特徴とする。
The method for preparing an analytical section sample of the present invention that achieves the above object is as follows.
Cutting a solid containing the analyte to form a section sample,
Forming a liquid flow,
The formed slice sample is conveyed by the liquid flow,
The section sample transported is collected on a sample stage.

より詳しくは、分析対象物を含む固体を切削して分析用の切片試料を作製する方法であって、
切削により順次形成された複数の切片試料を同等の姿勢で液体の自由表面上に順次供給し、
前記液体に該液体の自由表面に沿って流れる液流を形成し、
前記切片試料を前記自由表面上にて前記液流に従って移動させ、その際に、前記自由表面における前記切片試料の移動経路を設定し、該移動経路の幅を前記切片試料の短径より大きく且つ最長径より小さく設定しておき、
前記移動経路を移動してきた前記切片試料を試料台上に捕集することを特徴とする、分析用切片試料の作製方法、
である。
More specifically, a method of cutting a solid containing an analysis object to produce a section sample for analysis,
A plurality of slice samples formed sequentially by cutting are sequentially supplied onto the free surface of the liquid in an equivalent posture,
Forming a liquid flow in the liquid that flows along a free surface of the liquid;
Moving the section sample on the free surface according to the liquid flow, setting a movement path of the section sample on the free surface, the width of the movement path being larger than the minor axis of the section sample and Set smaller than the longest diameter,
Collecting the section sample that has moved along the movement path on a sample stage;
It is.

本発明の一態様においては、前記切片試料の捕集を、前記液体中から前記自由表面を経て上向きに試料台を移動させ、該試料台の表面に前記切片試料を載せて貼り付けることで行う。本発明の一態様においては、前記切片試料を前記液体の自由表面上に供給する方向は、前記自由表面における前記切片試料の移動経路の方向と同一である。本発明の一態様においては、前記切片試料を前記自由表面上にて前記液流に従って移動させる際に、前記移動経路の幅を前記切片試料の短径と直交する方向の長径より小さく設定しておく。   In one aspect of the present invention, the section sample is collected by moving the sample stage upward from the liquid through the free surface and placing the section sample on the surface of the sample stage. . In one aspect of the present invention, the direction in which the section sample is supplied onto the free surface of the liquid is the same as the direction of the movement path of the section sample on the free surface. In one aspect of the present invention, when the section sample is moved on the free surface according to the liquid flow, the width of the movement path is set smaller than the major axis in the direction perpendicular to the minor axis of the section sample. deep.

更に、上記の目的を達成する本発明の分析用切片試料作製装置は、
液体を収容するタンクと、
切削刃を有し、前記分析対象物を含む固体を切削するための切削手段と、
前記切削手段により形成された切片試料を搬送すべく、前記液体に液流を発生させるための液流発生手段と、
前記液流によって搬送された前記切片試料を試料台上に捕集する捕集手段と、
を備えることを特徴とする。
Furthermore, the analytical section sample preparation apparatus of the present invention that achieves the above-described object is as follows.
A tank containing liquid;
A cutting means having a cutting blade for cutting a solid containing the analysis object;
A liquid flow generating means for generating a liquid flow in the liquid to convey the section sample formed by the cutting means;
A collecting means for collecting the section sample conveyed by the liquid flow on a sample stage;
It is characterized by providing.

より詳しくは、分析対象物を含む固体を切削して分析用の切片試料を作製する装置であって、
液体を収容するタンクと、
該タンクに配置された切削用ナイフ及び該ナイフにより切削されるように前記分析対象物を含む固体の運動を駆動する駆動部を含んでなる切削手段と、
前記液体に該液体の自由表面に沿って流れる液流を発生させるための液流発生手段と、
前記自由表面における前記切片試料の移動経路及びその幅を設定する移動経路設定手段と、
前記移動経路を移動してきた前記切片試料を捕集する捕集手段とを備えることを特徴とする、分析用切片試料の作製装置である。
More specifically, an apparatus for cutting a solid containing an analysis object to produce a section sample for analysis,
A tank containing liquid;
A cutting means including a cutting knife disposed in the tank and a driving unit that drives the movement of the solid including the analysis object so as to be cut by the knife;
A liquid flow generating means for generating a liquid flow in the liquid along the free surface of the liquid;
A movement path setting means for setting the movement path and the width of the section sample on the free surface;
An apparatus for preparing a section sample for analysis, comprising: a collection means for collecting the section sample that has moved along the movement path.

本発明の一態様においては、前記捕集手段は、前記切片試料を載せて貼り付ける試料台を保持するための試料台ホルダーと該試料台ホルダーを上下方向に移動させるホルダー移動手段とを備える。本発明の一態様においては、前記切削手段は前記切片試料を前記液体の自由表面上に供給し、その供給の方向は前記自由表面における前記切片試料の移動経路の方向と同一である。本発明の一態様においては、前記液流発生手段は、前記タンク内において前記液体を前記自由表面に沿って横向きに流し、タンク底部に向けて下向きに流し、前記タンク底部に沿って横向きに流し、更に前記自由表面に向けて上向きに流すような循環する前記液流を発生させるものである。本発明の一態様においては、前記液流発生手段は、前記タンク底部に設けられた蠕動ポンプを備えている。   In one aspect of the present invention, the collecting means includes a sample stage holder for holding a sample stage on which the section sample is placed and attached, and a holder moving means for moving the sample stage holder in the vertical direction. In one aspect of the present invention, the cutting means supplies the section sample onto the free surface of the liquid, and the direction of the supply is the same as the direction of the movement path of the section sample on the free surface. In one aspect of the present invention, the liquid flow generating means causes the liquid to flow laterally along the free surface in the tank, to flow downward toward the tank bottom, and to flow laterally along the tank bottom. Furthermore, the circulating liquid flow is generated so as to flow upward toward the free surface. In one aspect of the present invention, the liquid flow generating means includes a peristaltic pump provided at the bottom of the tank.

本発明によれば、切片試料を、損傷や損失なく容易に採取することができる。   According to the present invention, a section sample can be easily collected without damage or loss.

更には、移動経路を移動してきた切片試料に回転や順番の入れ替わりを生ずることなく捕集することができ、切片試料を損傷や損失なく連続的に所定の姿勢で採取することが可能となる。これにより、3次元構造分析の効率的実施が可能になる。   Furthermore, it is possible to collect the section sample that has moved along the movement path without causing rotation or change of order, and the section sample can be continuously collected in a predetermined posture without damage or loss. This enables efficient implementation of the three-dimensional structure analysis.

以下、図面を参照しながら、本発明の分析用切片試料の作製方法及び作製装置の実施の形態を説明する。   Hereinafter, embodiments of a method and apparatus for preparing a section sample for analysis according to the present invention will be described with reference to the drawings.

図1は本発明の分析用切片試料の作製装置の一実施形態を示す模式的断面図であり、図2はその平面図であり、図3及び図4はそれぞれ図1のA−A’断面図及びB−B’断面図である。   FIG. 1 is a schematic cross-sectional view showing an embodiment of an analytical section sample preparation apparatus according to the present invention, FIG. 2 is a plan view thereof, and FIGS. 3 and 4 are cross-sectional views taken along line AA ′ of FIG. It is a figure and BB 'sectional drawing.

これらの図において、タンク(ボート)2内に液体Lが収容されている。液体Lとしては、切片試料に対して表面張力に基づく浮力を作用させることができるもので且つ切片試料と化学反応などの反応を生じないものであれば、好ましく使用することができる。このような液体Lの体表例として水が挙げられる。   In these drawings, a liquid L is contained in a tank (boat) 2. The liquid L can be preferably used as long as it can cause buoyancy based on surface tension to act on the slice sample and does not cause a reaction such as a chemical reaction with the slice sample. An example of the body surface of such a liquid L is water.

作製装置は切削手段4を備えている。この切削手段4は、タンク2の上縁部に配置された切削用ナイフ41と切削の際の分析対象物を含む固体Sの運動を駆動する駆動部42とを含んでいる。駆動部42は、分析対象物を含む固体Sを把持して該固体Sを上下方向(X方向)及び水平方向(Y方向)にそれぞれ移動させることができる。切削に際しては、X方向の往復移動とY方向で切削用ナイフ(切削刃)41に近づく向きの間欠移動とを組み合わせた運動がなされる。これにより固体Sが順次切削され、形成された複数の切片試料Eが同等の姿勢で順次タンク内液体Lの自由表面上に供給される。このような切削手段4の構成及び動作は公知のミクロトームのものと同様である。   The production apparatus includes cutting means 4. The cutting means 4 includes a cutting knife 41 disposed at the upper edge of the tank 2 and a drive unit 42 that drives the movement of the solid S containing the analysis object at the time of cutting. The drive unit 42 can hold the solid S including the analysis target and move the solid S in the vertical direction (X direction) and the horizontal direction (Y direction). At the time of cutting, a motion combining a reciprocating movement in the X direction and an intermittent movement in a direction approaching the cutting knife (cutting blade) 41 in the Y direction is performed. Thereby, the solid S is sequentially cut, and the formed plurality of slice samples E are sequentially supplied onto the free surface of the liquid L in the tank in an equivalent posture. The configuration and operation of such cutting means 4 are the same as those of a known microtome.

作製装置は、また、液体Lにその自由表面に沿って流れる液流を発生させるための液流発生手段6を備えている。この液流発生手段6は、タンク内を循環する液流を発生させる。タンク2内において液体Lは自由表面に沿って横向きに流れ(矢印F1)、タンク底部に向けて下向きに流れ(矢印F2)、タンク底部に沿って横向きに流れ(矢印F3)、更に自由表面に向けて上向きに流(矢印F4)れる。このため、タンク2には液流路形成部材8が配置されており、上記液流は液流路形成部材8の周囲を循環する。液流発生手段6は、更に、タンク2の底部に設けられた蠕動ポンプ61を備えている。即ち、タンク2の底部はフレキシブルシート611からなっており、このフレキシブルシート611の上面と上記液流路形成部材8との間を通って循環する液流路が形成されている。フレキシブルシート611の下方には、不図示の駆動源に接続された駆動ローラ612及びフリーローラ613に巻き掛けられたベルト614が配置されている。ベルト614の外面には突起614’が形成されている。駆動ローラ612が回転すると、ベルト614が走行し、突起614’がフレキシブルシート611を上方へと押しながら移動する。これにより、フレキシブルシート611が液流路形成部材8の下面へと押しつけられる位置(突起614’とフレキシブルシート611との接触位置)が移動し、上記循環する液流が発生する。   The production apparatus also includes liquid flow generating means 6 for generating a liquid flow that flows along the free surface of the liquid L. The liquid flow generating means 6 generates a liquid flow that circulates in the tank. In the tank 2, the liquid L flows sideways along the free surface (arrow F1), flows downward toward the tank bottom (arrow F2), flows sideways along the tank bottom (arrow F3), and further on the free surface. Flow upward (arrow F4). For this reason, the liquid flow path forming member 8 is disposed in the tank 2, and the liquid flow circulates around the liquid flow path forming member 8. The liquid flow generating means 6 further includes a peristaltic pump 61 provided at the bottom of the tank 2. That is, the bottom of the tank 2 is made of a flexible sheet 611, and a liquid channel that circulates between the upper surface of the flexible sheet 611 and the liquid channel forming member 8 is formed. Below the flexible sheet 611, a driving roller 612 connected to a driving source (not shown) and a belt 614 wound around a free roller 613 are arranged. A protrusion 614 ′ is formed on the outer surface of the belt 614. When the driving roller 612 rotates, the belt 614 travels and the protrusion 614 ′ moves while pushing the flexible sheet 611 upward. As a result, the position at which the flexible sheet 611 is pressed against the lower surface of the liquid flow path forming member 8 (contact position between the protrusion 614 ′ and the flexible sheet 611) moves, and the circulating liquid flow is generated.

作製装置は、また、液体Lの自由表面における切片試料Eの移動経路及びその幅を設定する移動経路設定手段10を備えている。この移動経路設定手段10は、タンク2の上部において、液体Lの自由表面の一部を覆うように配置された1対の経路幅調整板101,102を有する。経路幅調整板101,102の互いに対向する直線状縁辺の間に、液体Lの自由表面における切片試料Eの移動経路103が形成される。経路幅調整板101,102には、それぞれ調整ネジ101’,102’が付設されている。タンク外において調整ネジ101’,102’を操作することで、経路幅調整板101,102を互いに接近させたり離隔させたりすることができ、経路幅調整板101,102間の間隔即ち移動経路幅Wを適宜に設定することができる。   The production apparatus also includes a movement path setting means 10 for setting the movement path and the width of the section sample E on the free surface of the liquid L. The moving path setting means 10 has a pair of path width adjusting plates 101 and 102 arranged so as to cover a part of the free surface of the liquid L in the upper part of the tank 2. A moving path 103 of the section sample E on the free surface of the liquid L is formed between the linear edges of the path width adjusting plates 101 and 102 facing each other. Adjustment screws 101 'and 102' are attached to the path width adjusting plates 101 and 102, respectively. By operating the adjusting screws 101 'and 102' outside the tank, the path width adjusting plates 101 and 102 can be moved closer to or away from each other, and the distance between the path width adjusting plates 101 and 102, that is, the moving path width. W can be set appropriately.

作製装置は、また、移動経路103を移動してきた切片試料Eを捕集する捕集手段12を備えている。この捕集手段12は、切片試料Eのそれぞれを載せて貼り付ける複数の試料台Pを保持するための試料台ホルダー121と該試料台ホルダーを上下方向に移動させるホルダー移動手段122とを備えている。ホルダー移動手段122は、試料台ホルダー121を下から支持する上下方向の駆動ネジ122’をタンク2の底部に設けられた雌ネジ122”と嵌合させることにより形成されている。タンク外において駆動ネジ122’を操作することで、試料台ホルダー121を上下に移動させることができ、試料台Pを上向きに移動させることができる。尚、タンク2内においては、駆動ネジ122’の周囲において試料台ホルダー121とタンク2の底部との間を接続するように配置されたベローズ123が設けられている。また、タンク2内には、複数の試料台Pの適切な上下方向の配列のためのガイドフレーム124が形成されている。   The production apparatus also includes a collection means 12 for collecting the section sample E that has moved along the movement path 103. The collection means 12 includes a sample stage holder 121 for holding a plurality of sample stands P on which each of the section samples E is mounted and attached, and a holder moving means 122 for moving the sample stage holder in the vertical direction. Yes. The holder moving means 122 is formed by fitting a vertical drive screw 122 ′ supporting the sample stage holder 121 from below with a female screw 122 ″ provided at the bottom of the tank 2. Drive outside the tank. By manipulating the screw 122 ′, the sample stage holder 121 can be moved up and down, and the sample stage P can be moved upward.In the tank 2, the sample is around the drive screw 122 ′. A bellows 123 is provided so as to connect between the base holder 121 and the bottom of the tank 2. Further, in the tank 2, a plurality of sample stands P are arranged in an appropriate vertical direction. A guide frame 124 is formed.

次に、本実施形態の作製装置の動作即ち本発明の分析用切片試料の作製方法の一実施形態を説明する。   Next, an embodiment of the production apparatus of the present embodiment, that is, an embodiment of the method for producing an analytical section sample of the present invention will be described.

先ず、分析対象物を含む固体Sを切削手段4の駆動部42により保持させる。この固体Sは、例えば公知の手法で分析対象物を樹脂等に包埋したものである。そして、駆動部42をX方向に往復移動させつつ、該往復移動の上死点近傍においてY方向に切削用ナイフ41の方へ向けて所要のピッチ(形成しようとする切片試料の厚さに相当する長さ)で間欠移動させる。やがて、切削用ナイフ41による固体Sの切削が開始される。この切削は、固体が下向きに移動する際に、切削用ナイフ41と接触することでなされる。切削により順次形成された切片試料Eは、同等の姿勢で液体Lの自由表面上に順次供給される。   First, the solid S containing the analysis object is held by the drive unit 42 of the cutting means 4. The solid S is obtained by embedding an analysis object in a resin or the like by a known method, for example. Then, while the drive unit 42 is reciprocated in the X direction, a required pitch (corresponding to the thickness of the slice sample to be formed) in the Y direction toward the cutting knife 41 in the vicinity of the top dead center of the reciprocation. To move intermittently. Eventually, the cutting of the solid S by the cutting knife 41 is started. This cutting is performed by contacting the cutting knife 41 when the solid moves downward. The slice samples E sequentially formed by cutting are sequentially supplied onto the free surface of the liquid L in an equivalent posture.

この切片試料供給の位置は液体Lの自由表面における切片試料Eの移動経路103の始点に相当し、ここから、切片試料Eは液体自由表面上にて液流に従って切削用ナイフ41から遠ざかる向きに移動する。この液体自由表面における切片試料Eの移動経路の方向(Y方向)は、切片試料Eが液体自由表面上に供給される方向と同一である。   The position of the section sample supply corresponds to the starting point of the moving path 103 of the section sample E on the free surface of the liquid L. From here, the section sample E moves away from the cutting knife 41 according to the liquid flow on the liquid free surface. Moving. The direction (Y direction) of the moving path of the slice sample E on the liquid free surface is the same as the direction in which the slice sample E is supplied onto the liquid free surface.

移動経路103の幅Wは、切片試料Eの短径及び最長径と特定の関係を持つように設定される。図5及び図6は、切片試料Sをその厚み方向に見た図であり、切片試料Eの短径d1、長径d2及び最長径d3を示す図である。即ち、短径d1は外径が最も小さくなるように特定方向に見た時の当該外径を指し、長径d2は該特定方向と直交する方向に見た時の外径を指し、最長径d3は外径が最も大きくなるように見た時の当該外径を指す。本発明においては、上記移動経路103の幅Wは、切片試料Eの短径d1より大きく且つ最長径d3より小さく設定されるのが好ましい。このようにすることで、移動経路103内での切片試料Eの180°以上の回転及び追い越しが阻止され、切片試料Eは反対向きになることなく揃った方向性を持って移動する。更に好ましくは、移動経路103の幅Wは、切片試料Eの短径d1より大きく且つ長径d2より小さく設定される。このようにすることで、移動経路103内での切片試料Eの許容回転角が更に小さくなり、切片試料Eは更に良好に揃った方向性を持って移動する。   The width W of the movement path 103 is set so as to have a specific relationship with the short diameter and the longest diameter of the slice sample E. 5 and 6 are views of the slice sample S as viewed in the thickness direction, and are diagrams showing the short diameter d1, the long diameter d2, and the longest diameter d3 of the slice sample E. FIG. That is, the short diameter d1 indicates the outer diameter when viewed in a specific direction so that the outer diameter becomes the smallest, the long diameter d2 indicates the outer diameter when viewed in a direction orthogonal to the specific direction, and the longest diameter d3. Indicates the outer diameter when the outer diameter is viewed to be the largest. In the present invention, the width W of the moving path 103 is preferably set larger than the short diameter d1 and smaller than the longest diameter d3 of the section sample E. In this way, the rotation and overtaking of the section sample E by 180 ° or more in the movement path 103 is prevented, and the section sample E moves with a uniform direction without being in the opposite direction. More preferably, the width W of the moving path 103 is set to be larger than the short diameter d1 of the slice sample E and smaller than the long diameter d2. By doing in this way, the permissible rotation angle of the section sample E in the movement path 103 is further reduced, and the section sample E moves with a more uniform directionality.

図7に、移動経路103における切片試料Eの移動の様子を示す。図7(a)は移動経路設定手段10の経路幅調整板101,102により移動経路幅Wを上記範囲内に設定した場合を示す。この場合には、図2の場合も同様であるが、切片試料Eは切削順に同一の方向性を持って同一方向に移動する。これに対して、比較のために示す図7(b)は移動経路設定手段を持たない従来タイプのものを示す。この場合には、切片試料Eは液体の自由表面上にて自由に移動できるので、蛇行したり、回転したりして、バラバラの姿勢で移動し、更に切削順の配列が不明になる。   FIG. 7 shows how the slice sample E moves along the movement path 103. FIG. 7A shows a case where the movement path width W is set within the above range by the path width adjusting plates 101 and 102 of the movement path setting means 10. In this case, the same applies to the case of FIG. 2, but the section sample E moves in the same direction with the same directionality in the cutting order. On the other hand, FIG. 7B shown for comparison shows a conventional type that does not have a movement path setting means. In this case, since the slice sample E can freely move on the free surface of the liquid, the slice sample E can meander or rotate to move in a disjointed posture, and further, the arrangement of the cutting order becomes unclear.

次に、移動経路103を移動してきた切片試料Eを捕集手段12により順次捕集する。この捕集に際しては、先ず、図1及び図8(a)に示されるように、積み重ねて配置された複数の試料台Pのうちの最上位置のものを、その上表面の一部(切削ナイフ4からの距離が大きい部分)が液体自由表面から露出するようにして、配置しておく。そこに切片試料Eが到達すると、図8(b)に示されるように、その先端部分が試料台Pの上表面に乗り上げる。次いで、ホルダー移動手段122により試料台ホルダー121を上昇させると、図8(c)に示されるように、切片試料Eは試料台Pの上表面に載せられて貼り付けられる。次いで、図8(d)に示されるように、切片試料Eの貼り付けられた試料台Pを採取する。この際、切片試料Eは液体Lの表面張力の作用により、皺なく平坦に試料台P上にて伸展している。その後、切片試料E付の試料台Pを自然乾燥させると、液体の蒸発に伴い、切片試料Eは試料台P上に隙間なく平坦かつ強固に貼り付き固定される。   Next, the section sample E that has moved along the movement path 103 is sequentially collected by the collecting means 12. In this collection, first, as shown in FIG. 1 and FIG. 8 (a), the uppermost one of the plurality of sample stands P arranged in a stack is placed on a part of the upper surface (cutting knife). The portion where the distance from 4 is large) is exposed from the liquid free surface. When the section sample E arrives there, the tip portion thereof rides on the upper surface of the sample stage P as shown in FIG. Next, when the sample stage holder 121 is raised by the holder moving means 122, the section sample E is placed on the upper surface of the sample stage P and attached, as shown in FIG. Next, as shown in FIG. 8D, the sample stage P to which the section sample E is attached is collected. At this time, the section sample E extends on the sample stage P without any wrinkles due to the action of the surface tension of the liquid L. Thereafter, when the sample stage P with the section sample E is naturally dried, the section sample E is flatly and firmly adhered and fixed on the sample stage P with no gap as the liquid evaporates.

尚、上記切削手段4による切削での切片試料Eの形成と上記液流発生手段6による液流の発生と上記捕集手段12による切片試料Eの捕集とを、互いに関連づけて、次のように行うことができる。即ち、切削による切片試料Eの形成、移動経路103に沿った切片試料Eの移動、及び切片試料Eの捕集を、1つの試料台Pに貼り付ける所要個数毎に行うのである。この所要個数は、切片試料Eの長径と試料台PのY方向長さとに基づき、適宜設定することができる。1つの試料台Pに1つのみの切片試料Eを貼り付けるようにしてもよい。先ず、切削により形成される所要個数の切片試料Eが移動経路103に切削順に一列に並んだ後に、切削を停止する。そして、液流発生手段6により液流を発生させ、所要個数の切片試料Eの列を捕集手段12へと移動させる。この移動が完了した後に、液流発生を停止する。そして、捕集手段12により所要個数の切片試料Eを捕集する。このような操作は、顕微鏡観察下で行うことができる。   The formation of the slice sample E by cutting by the cutting means 4, the generation of the liquid flow by the liquid flow generating means 6, and the collection of the slice sample E by the collecting means 12 are related to each other as follows. Can be done. That is, the formation of the section sample E by cutting, the movement of the section sample E along the movement path 103, and the collection of the section sample E are performed for each required number to be attached to one sample stage P. The required number can be set as appropriate based on the major axis of the section sample E and the length of the sample stage P in the Y direction. Only one section sample E may be attached to one sample stage P. First, after the required number of slice samples E formed by cutting are arranged in a line in the cutting order in the movement path 103, the cutting is stopped. Then, a liquid flow is generated by the liquid flow generating means 6, and a required number of sections of the sample E are moved to the collecting means 12. After this movement is completed, the liquid flow generation is stopped. Then, a required number of slice samples E are collected by the collecting means 12. Such an operation can be performed under a microscope.

以上の実施形態では、切削により形成された切片試料Eが屈曲状態にあっても、液体自由表面上にて移動経路103を移動して捕集されるまでに、液体Lの表面張力などに基づき液体自由表面上にて徐々に伸展せしめられる。よって、図9のa1に示すように、捕集の際には切片試料Eは損傷を受けることなく試料台Pの上表面に容易且つ確実に貼り付けることができる。その後、図9のa2に示すように試料台P上の切片試料Eを自然乾燥させると、水分の蒸発に伴い、切片試料Eは試料台P上に隙間なく平坦かつ強固に張り付き固定される。これに対して、従来の乾式で作製された切片の場合、図9のb1、b2に示すように、切片試料E’には皺やカールが発生する場合が多く、このため試料台P上に乗せたとき、試料台Pと切片試料E’との間に隙間が出来る。そのため、このような状態でIR測定をおこなった場合、スペクトルには干渉が生じ、満足な波形が得られなくなる。これを防ぐため、通常は切片を上方からプレスして整形することにより機械的に貼り付ける方法が用いられるが、この場合プレスにより、組織の変形や組成の拡散が生じてしまうため、正確な情報が得られなかった。   In the above embodiment, even if the slice sample E formed by cutting is in a bent state, it is based on the surface tension of the liquid L until it is collected by moving along the movement path 103 on the liquid free surface. It is gradually extended on the free surface of the liquid. Therefore, as shown by a1 in FIG. 9, the section sample E can be easily and reliably attached to the upper surface of the sample stage P without being damaged during the collection. After that, when the section sample E on the sample stage P is naturally dried as shown by a2 in FIG. 9, the section sample E is fixed flatly and firmly on the sample stage P without any gap as the moisture evaporates. On the other hand, in the case of a section prepared by a conventional dry method, as shown in b1 and b2 of FIG. 9, the section sample E ′ often has wrinkles and curls. When placed, there is a gap between the sample stage P and the slice sample E ′. Therefore, when IR measurement is performed in such a state, interference occurs in the spectrum and a satisfactory waveform cannot be obtained. In order to prevent this, a method of mechanically affixing a slice by pressing it from the top is usually used, but in this case, deformation causes tissue deformation and composition diffusion, so accurate information Was not obtained.

以上のようにして捕集され試料台Pに貼り付けられた切片試料Eは、赤外線吸光分析器(IR)、X線光電子分光器(XPS)、走査型プローブ顕微鏡(SPM)、透過型電子顕微鏡(TEM)及び走査型電子顕微鏡(SEM)等の分析装置により2次元情報を取得するのに使用される。そして、こうして得られた2次元情報は、画像処理により、それらを繋ぎ合わせて3次元情報を構築するのに利用される。尚、試料台Pとしては、ガラスのような絶縁体やシリコンのような半導体や金属のような導電体から分析の種類に応じて適宜選択される。   The section sample E collected as described above and attached to the sample stage P includes an infrared absorption analyzer (IR), an X-ray photoelectron spectrometer (XPS), a scanning probe microscope (SPM), and a transmission electron microscope. (TEM) and a scanning electron microscope (SEM) are used to acquire two-dimensional information by an analyzer. Then, the two-dimensional information obtained in this way is used to construct three-dimensional information by connecting them by image processing. The sample stage P is appropriately selected depending on the type of analysis from an insulator such as glass, a semiconductor such as silicon, or a conductor such as metal.

本発明の分析用切片試料の作製装置の一実施形態を示す模式的断面図である。It is typical sectional drawing which shows one Embodiment of the preparation apparatus of the section | slice sample for analysis of this invention. 図1の作製装置の平面図である。It is a top view of the preparation apparatus of FIG. 図1のA−A’断面図である。It is A-A 'sectional drawing of FIG. 図1のB−B’断面図である。It is B-B 'sectional drawing of FIG. 切片試料の短径、長径及び最長径を示す図である。It is a figure which shows the short diameter, long diameter, and longest diameter of a section | slice sample. 切片試料の短径、長径及び最長径を示す図である。It is a figure which shows the short diameter, long diameter, and longest diameter of a section | slice sample. 切片試料の移動の様子を示す図である。It is a figure which shows the mode of a movement of a section | slice sample. 捕集手段により切片試料を捕集する工程を示す図である。It is a figure which shows the process of collecting a section | slice sample by a collection means. 捕集手段の違いによる切片試料の特徴を示す図である。It is a figure which shows the characteristic of the slice sample by the difference in a collection means.

符号の説明Explanation of symbols

2 タンク(ボート)
4 切削手段
41 切削用ナイフ
42 分析対象物を含む固体の運動を駆動する駆動部
6 液流発生手段
61 蠕動ポンプ
611 フレキシブルシート
612 駆動ローラ
613 フリーローラ
614 ベルト
614’ 突起
8 液流路形成部材
10 移動経路設定手段
101,102 経路幅調整板
101’,102’ 調整ネジ
103 切片試料の移動経路
12 切片試料捕集手段
121 試料台ホルダー
122 ホルダー移動手段
122’ 駆動ネジ
122” 雌ネジ
123 ベローズ
124 ガイドフレーム
L 液体
S 分析対象物を含む固体
E 切片試料
E’ 乾式捕集した切片試料
P 試料台
2 Tank (boat)
DESCRIPTION OF SYMBOLS 4 Cutting means 41 Cutting knife 42 The drive part which drives the motion of the solid containing an analysis target object 6 Liquid flow generation means 61 Peristaltic pump 611 Flexible sheet 612 Drive roller 613 Free roller 614 Belt 614 'Protrusion 8 Liquid flow path formation member 10 Moving path setting means 101, 102 Path width adjusting plates 101 ′, 102 ′ adjusting screw 103 Section sample moving path 12 Section sample collecting means 121 Sample stage holder 122 Holder moving means 122 ′ Drive screw 122 ”Female screw 123 Bellows 124 Guide Frame L Liquid S Solid containing the analyte E Section sample E 'Dry collected section sample P Sample stage

Claims (10)

分析用切片試料の作製方法であって、
分析対象物を含む固体を切削して切片試料を形成し、
液流を形成し、
形成された切片試料を前記液流によって搬送し、
搬送された前記切片試料を試料台上に捕集する
ことを特徴とする分析用切片試料の作製方法。
A method for preparing a section sample for analysis,
Cutting a solid containing the analyte to form a section sample,
Forming a liquid flow,
The formed slice sample is conveyed by the liquid flow,
A method for producing a section sample for analysis, wherein the section sample transported is collected on a sample stage.
分析対象物を含む固体を切削して分析用の切片試料を作製する方法であって、
切削により順次形成された複数の切片試料を同等の姿勢で液体の自由表面上に順次供給し、
前記液体に該液体の自由表面に沿って流れる液流を形成し、
前記切片試料を前記自由表面上にて前記液流に従って移動させ、その際に、前記自由表面における前記切片試料の移動経路を設定し、該移動経路の幅を前記切片試料の短径より大きく且つ最長径より小さく設定しておき、
前記移動経路を移動してきた前記切片試料を試料台上に捕集することを特徴とする分析用切片試料の作製方法。
A method for producing a section sample for analysis by cutting a solid containing an analysis object,
A plurality of slice samples formed sequentially by cutting are sequentially supplied onto the free surface of the liquid in an equivalent posture,
Forming a liquid flow in the liquid that flows along a free surface of the liquid;
Moving the section sample on the free surface according to the liquid flow, setting a movement path of the section sample on the free surface, the width of the movement path being larger than the minor axis of the section sample and Set smaller than the longest diameter,
A method for producing a section sample for analysis, wherein the section sample that has moved along the movement path is collected on a sample stage.
液体の自由表面を経て上向きに前記試料台を移動させ、該試料台の表面に前記切片試料を載せて、前記捕集を行うことを特徴とする、請求項1又は2に記載の分析用切片試料の作製方法。 The analytical section according to claim 1 or 2, wherein the sample stage is moved upward through a free surface of a liquid, the section sample is placed on the surface of the sample stage, and the collection is performed. Sample preparation method. 前記切片試料を前記液体の自由表面上に供給する方向は、前記自由表面における前記切片試料の移動経路の方向と同一であることを特徴とする、請求項1〜3のいずれかに記載の分析用切片試料の作製方法。 The analysis according to any one of claims 1 to 3, wherein a direction in which the section sample is supplied onto the free surface of the liquid is the same as a direction of a movement path of the section sample on the free surface. Method for preparing a section sample. 前記切片試料を前記自由表面上にて前記液流に従って移動させる際に、移動経路の幅を前記切片試料の短径と直交する方向の長径より小さく設定しておくことを特徴とする、請求項1〜4のいずれかに記載の分析用切片試料の作製方法。 When moving the section sample according to the liquid flow on the free surface, the width of the movement path is set smaller than the major axis in the direction orthogonal to the minor axis of the section sample. A method for preparing a section sample for analysis according to any one of 1 to 4. 分析用切片試料の作製装置であって、
液体を収容するタンクと、
切削刃を有し、前記分析対象物を含む固体を切削するための切削手段と、
前記切削手段により形成された切片試料を搬送すべく、前記液体に液流を発生させるための液流発生手段と、
前記液流によって搬送された前記切片試料を試料台上に捕集する捕集手段と、
を備えることを特徴とする分析用切片試料の作製装置。
An apparatus for preparing a section sample for analysis,
A tank containing liquid;
A cutting means having a cutting blade for cutting a solid containing the analysis object;
A liquid flow generating means for generating a liquid flow in the liquid to convey the section sample formed by the cutting means;
A collecting means for collecting the section sample conveyed by the liquid flow on a sample stage;
An apparatus for preparing a section sample for analysis, comprising:
分析対象物を含む固体を切削して分析用切片試料を作製する分析用切片試料の作製装置であって、
液体を収容するタンクと、
該タンクに配置された切削用ナイフ及び該ナイフにより切削されるように前記分析対象物を含む固体の運動を駆動する駆動部を含んでなる切削手段と、
前記液体に該液体の自由表面に沿って流れる液流を発生させるための液流発生手段と、
前記自由表面における前記切片試料の移動経路及びその幅を設定する移動経路設定手段と、
前記移動経路を移動してきた前記切片試料を試料台上に捕集する捕集手段とを備えることを特徴とする分析用切片試料の作製装置。
An analytical section sample preparation apparatus for preparing an analytical section sample by cutting a solid containing an analysis object,
A tank containing liquid;
A cutting means including a cutting knife disposed in the tank and a driving unit that drives the movement of the solid including the analysis object so as to be cut by the knife;
A liquid flow generating means for generating a liquid flow in the liquid along the free surface of the liquid;
A movement path setting means for setting the movement path and the width of the section sample on the free surface;
An apparatus for preparing a section sample for analysis, comprising: a collection means for collecting the section sample that has moved along the movement path on a sample stage.
前記捕集手段は、前記試料台を保持するための試料台ホルダーと該試料台ホルダーを上下方向に移動させるホルダー移動手段とを備えることを特徴とする、請求項6又は7に記載の分析用切片試料の作製装置。 The analysis means according to claim 6 or 7, wherein the collecting means includes a sample stage holder for holding the sample stage and a holder moving means for moving the sample stage holder in the vertical direction. Section sample preparation device. 前記切削手段は前記切片試料を前記液体の自由表面上に供給し、その供給の方向は前記自由表面における前記切片試料の移動経路の方向と同一であることを特徴とする、請求項6〜8のいずれかに記載の分析用切片試料の作製装置。 9. The cutting means supplies the section sample onto the free surface of the liquid, and the direction of the supply is the same as the direction of the movement path of the section sample on the free surface. An apparatus for preparing a section sample for analysis according to any one of the above. 前記液流発生手段は、前記タンク内において前記液体を前記自由表面に沿って横向きに流し、タンク底部に向けて下向きに流し、前記タンク底部に沿って横向きに流し、更に前記自由表面に向けて上向きに流すような循環する前記液流を発生させるものであることを特徴とする、請求項6〜9のいずれかに記載の分析用切片試料の作製装置。 The liquid flow generating means causes the liquid to flow laterally along the free surface in the tank, to flow downward toward the tank bottom, to flow laterally along the tank bottom, and further toward the free surface. The apparatus for preparing a section sample for analysis according to any one of claims 6 to 9, which generates the circulating liquid flow that flows upward.
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