JP2007032535A5 - - Google Patents

Claims (11)

Attached to the vacuum chamber,
A pump body for sucking and exhausting gas molecules in the vacuum chamber;
A controller that is mounted outside the pump body and includes a control circuit board that controls the operation of the pump body;
A heat sink covering the periphery of the controller, contacting the control circuit board to conduct heat, and dissipating the heat from a plurality of fins aligned on the outer wall surface to the outside air;
Whatever the mounting posture of the pump main body with respect to the vacuum chamber, the direction of the fin of the heat sink is configured to be inclined with respect to the rotation center axis of the pump main body. Vacuum pump device. Attached to the vacuum chamber,
A pump body for sucking and exhausting gas molecules in the vacuum chamber;
A controller that is mounted outside the pump body and includes a control circuit board that controls the operation of the pump body;
A controller case covering the periphery of the controller and having a vent hole for venting the hot air heated by the heat of the control circuit board to the outside;
A vacuum pump device comprising:   The heat sink has fins on both sides that are inclined at an arbitrary angle on the outer plate facing the outside air, and a communication passage through which air passes is formed at a position connecting the intersections of the fins on both sides. The vacuum pump device according to claim 1, wherein the device is a vacuum pump device. The heat sink is configured so that the tip of the fin of the inner plate facing the pump body extends along the outer shape of the pump case, and the pump case can be removed with the controller attached . The vacuum pump device according to claim 1.   The heat sink has fins on both sides inclined at an arbitrary angle on the inner plate facing the pump body, and a communication passage through which air passes is formed at a position where the intersections of the fins on both sides are connected. The vacuum pump device according to claim 1.   The vacuum pump device according to any one of claims 1 to 5, wherein the pump mechanism inside the pump body is formed of a magnetic bearing type rotating body. Removably mounted outside the pump body of the vacuum pump device,
A control circuit board for controlling the operation of the pump body;
A heat sink that contacts the control circuit board and conducts heat, and dissipates the heat from a plurality of fins arranged on the outer wall surface to the outside air,
A controller of a vacuum pump device, wherein the fins of the heat sink are configured to be inclined with respect to the rotation center axis of the pump body. Removably mounted outside the pump body of the vacuum pump device,
A control circuit board for controlling the operation of the pump body;
A controller case that covers the periphery of the control circuit board and has a vent hole that vents the hot air heated by the heat of the control circuit board to the outside;
A controller for a vacuum pump device, comprising:   The heat sink has fins on both sides that are inclined at an arbitrary angle on the outer plate facing the outside air, and a communication passage through which air passes is formed at a position connecting the intersections of the fins on both sides. The controller of the vacuum pump device according to claim 7, wherein the controller is a vacuum pump device.   8. The controller of a vacuum pump device according to claim 7, wherein the heat sink extends so that the tip of the fin of the inner plate facing the pump body follows the outer shape of the pump case.   The heat sink has fins on both sides inclined at an arbitrary angle on the inner plate facing the pump body, and a communication passage through which air passes is formed at a position where the intersections of the fins on both sides are connected. The controller of the vacuum pump device according to claim 7.