JP2007017097A5 - - Google Patents
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- Publication number
- JP2007017097A5 JP2007017097A5 JP2005199898A JP2005199898A JP2007017097A5 JP 2007017097 A5 JP2007017097 A5 JP 2007017097A5 JP 2005199898 A JP2005199898 A JP 2005199898A JP 2005199898 A JP2005199898 A JP 2005199898A JP 2007017097 A5 JP2007017097 A5 JP 2007017097A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005199898A JP2007017097A (en) | 2005-07-08 | 2005-07-08 | Method and device for vapor generation, vapor processing device, and storage medium for vapor generation |
US11/472,415 US7637029B2 (en) | 2005-07-08 | 2006-06-22 | Vapor drying method, apparatus and recording medium for use in the method |
DE602006005992T DE602006005992D1 (en) | 2005-07-08 | 2006-07-06 | A steam drying apparatus and method |
EP06014037A EP1742248B1 (en) | 2005-07-08 | 2006-07-06 | A vapor drying method and an apparatus |
TW095124855A TW200714843A (en) | 2005-07-08 | 2006-07-07 | A vapor drying method and an apparatus |
KR1020060063794A KR101111008B1 (en) | 2005-07-08 | 2006-07-07 | Vapor drying method, apparatus therefor, vapor treating apparatus and storage medium for producing vapor |
CN2006101014914A CN1911489B (en) | 2005-07-08 | 2006-07-10 | Vapor drying method, apparatus therefor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005199898A JP2007017097A (en) | 2005-07-08 | 2005-07-08 | Method and device for vapor generation, vapor processing device, and storage medium for vapor generation |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007017097A JP2007017097A (en) | 2007-01-25 |
JP2007017097A5 true JP2007017097A5 (en) | 2008-08-21 |
Family
ID=37720642
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005199898A Pending JP2007017097A (en) | 2005-07-08 | 2005-07-08 | Method and device for vapor generation, vapor processing device, and storage medium for vapor generation |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2007017097A (en) |
CN (1) | CN1911489B (en) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1634520A1 (en) | 2004-09-13 | 2006-03-15 | Nestec S.A. | Device and method for heating a liquid |
JP4957273B2 (en) * | 2007-02-01 | 2012-06-20 | 株式会社豊田中央研究所 | Steam supply device |
JP5004001B2 (en) * | 2007-03-01 | 2012-08-22 | 三浦工業株式会社 | Superheated steam generator |
CN102889576B (en) * | 2012-10-17 | 2014-04-23 | 亿恒节能科技江苏有限公司 | Low-humidity steam double-effect heat exchange system |
CN102889579B (en) * | 2012-10-17 | 2014-04-23 | 亿恒节能科技江苏有限公司 | Inner drying steam flash evaporating double-effect heat exchanging system |
CN102901086B (en) * | 2012-10-17 | 2014-04-23 | 亿恒节能科技江苏有限公司 | Internal dried steam three-effect heat exchange system |
JP6114685B2 (en) * | 2013-11-27 | 2017-04-12 | タニコー株式会社 | Aqua gas generation unit |
JP7281925B2 (en) * | 2019-03-07 | 2023-05-26 | 東京エレクトロン株式会社 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM |
CN112420485B (en) * | 2019-08-21 | 2023-03-31 | 长鑫存储技术有限公司 | Wafer processing method |
US20220364721A1 (en) * | 2019-09-30 | 2022-11-17 | Yoshiaki Miyazato | Steam generation apparatus |
CN113130357B (en) * | 2021-04-25 | 2024-04-12 | 北京北方华创微电子装备有限公司 | Wafer drying system and wafer drying method |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0947664A (en) * | 1995-05-31 | 1997-02-18 | Seda Giken:Kk | Catalytic reactor |
JP3345803B2 (en) * | 1997-05-16 | 2002-11-18 | 東京エレクトロン株式会社 | Steam generation method and device |
US6328809B1 (en) * | 1998-10-09 | 2001-12-11 | Scp Global Technologies, Inc. | Vapor drying system and method |
JP2000356301A (en) * | 1999-06-14 | 2000-12-26 | Miura Co Ltd | Steam generator and control therefor |
JP4289587B2 (en) * | 2000-06-26 | 2009-07-01 | 森口 和子 | Sterilizer |
KR100417040B1 (en) * | 2000-08-03 | 2004-02-05 | 삼성전자주식회사 | Method for drying a wafer and apparatus for performing the same |
JP2003014203A (en) * | 2001-06-27 | 2003-01-15 | Maruyasu Industries Co Ltd | Superheated steam generating device |
TWI240952B (en) * | 2003-10-28 | 2005-10-01 | Samsung Electronics Co Ltd | System for rinsing and drying semiconductor substrates and method therefor |
-
2005
- 2005-07-08 JP JP2005199898A patent/JP2007017097A/en active Pending
-
2006
- 2006-07-10 CN CN2006101014914A patent/CN1911489B/en not_active Expired - Fee Related
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