JP2007015834A - Conveyance device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a conveyance device having a configuration suitable for an annular conveyance passage based on the technology for transmitting power by using the attraction force of a magnet. <P>SOLUTION: This conveyance device can make rounds and run at fixed speed by attaching a hanger 11 for loading a wafer on it to a carrier 12 along the conveyance passage. Plate-like bodies 20 constituted by forming N poles and S poles alternately like strips of paper at predetermined angles to the direction of running and connecting them annularly through a connection means 3 and a circular cylinder-like body 21 attached rotatably along the conveyance passage to let attraction force of different poles act in a non-contact manner with these plate-like bodies 20, letting the N poles and the S poles polarise on a rotary shaft alternately like strips of paper at predetermined angles, and arranged in a predetermined region of a substantially straight part of the conveyance passage are used as a transmission mechanism 2 for transmitting running force to the carrier 12. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a transfer device that transfers, for example, a semiconductor wafer as a transfer object.

The inventor of the present application researches and develops a transmission means for transmitting a traveling force to a carriage or the like on which a transported object is placed in a transport apparatus having an annular transport path.
Conventionally, belts, chains, etc. have been used as the transmission means, but when using a belt, its tamil or elongation occurs, and it becomes necessary to cut and adjust the belt for tension adjustment, which makes maintenance complicated. Become. Such a problem becomes more serious as the conveying path is longer. Also, there are many problems with semiconductor wafers and the like that generate dust due to wear of the belt and are highly required to be transported in a clean environment.
On the other hand, in the case of a chain, although the problem of dust generation can be reduced, the trouble of adjusting the conveyance sound and tension remains.

Attention has been focused on transmission means using the attractive force of a magnet as transmission means without the above disadvantages.
Patent 3353107

This patent document 1 discloses a conveyor provided with a drive mechanism that drives each roller constituting a conveyance path. The drive mechanism is composed of a drive magnetic vehicle body in which a drive magnetic wheel is mounted at intervals along a support shaft, and a driven magnetic wheel provided in a pair with each drive magnetic wheel of the drive magnetic vehicle body. A car is connected to the end of the support shaft of each roller, and a driving magnetic body is disposed below each of the driven magnetic wheels. The pole band is provided in a spiral shape, and the N pole band and the S pole band of the permanent magnet are alternately provided while spirally turning along the peripheral surface of each driven magnetic wheel.
However, the conveyor of this patent document 1 uses a magnet for the drive mechanism of the linear conveyance path, and suggests a specific configuration that solves a special technical problem occurring in an endless conveyance path such as an annular shape. Not what you want.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a transport device that includes a transmission mechanism that uses a magnetic attraction force and that is suitable for an annular transport path.

In order to solve the above problems, plate-like bodies that are attached so as to be able to run along an annular conveyance path, and in which strip-shaped N poles and S poles are alternately formed along the running direction, and these plate-like shapes The connecting means for connecting the body and the suction means are arranged in a predetermined region of the substantially straight portion of the transport path, are rotatably attached, and are in contact with the plate-like body and attracted by different polarities. As described above, a transport apparatus is provided that includes a cylindrical body in which strip-shaped N poles and S poles are alternately magnetized, and a drive mechanism that applies a rotational force to these cylindrical bodies. (Invention of Claim 1).
The angle with respect to the running direction of the strip-shaped N pole and S pole formed in the said plate-shaped body is not specifically limited.
In accordance with this angle, the angles of the N and S poles alternately magnetized in the cylindrical body are also determined, and the configuration of the drive mechanism that applies rotational force to the cylindrical body is also determined. .

  In the above invention, a hanger having a semiconductor wafer as an object to be conveyed is attached to the plate-like body via a carriage (invention according to claim 2).

  In the above invention, a conveying device is provided in which one driving mechanism is provided for each of the columnar bodies arranged in the traveling direction of the plate-like body and the direction of reversal thereof. Described invention).

  In the above invention, a transfer device is provided in which the coupling means is provided with a buffer portion (the invention according to claim 4).

  According to the present invention, a transmission mechanism is configured by the columnar body arranged in a substantially straight portion of the annular transport path and the plate-like body connected via the connecting means, and the annular structure is difficult to install. The transmission mechanism in the reversal region can be simplified, and a conveyance device using a transmission mechanism suitable for the annular conveyance path can be provided. At the same time, the problem of dust generation and maintenance of the transmission mechanism can be solved.

An embodiment of a transfer device according to the present invention will be described with reference to the drawings.
1 is a schematic perspective view of a transport device according to the first embodiment, FIG. 2 is a cross-sectional view taken along line A to D shown in FIG. 1, FIG. 3 is a perspective view of a main part of a transmission mechanism of the device, and FIG. FIG. 5 is a schematic plan view of the driving mechanism of the apparatus, and FIG. 6 is a layout view of the transmission mechanism and the driving mechanism of the apparatus.
In each of these drawings, the same components are denoted by the same reference numerals, and redundant description is omitted.

The transfer apparatus 1 according to the first embodiment is a transfer apparatus that uses a semiconductor wafer (hereinafter also simply referred to as a wafer; illustration is omitted) as an object to be transferred. As shown in FIGS. 1 and 2, an annular transfer path 10 is formed, and a hanger 11 on which a wafer is placed along the transfer path 10 is attached to a carriage 12 so that it can travel around at a constant speed. ing. Wafers are transferred by a loader / unloader unit 13 of a manufacturing apparatus arranged at an arbitrary position adjacent to the transfer path 10.
Then, as the transmission mechanism 2 for transmitting the traveling force to the carriage 12, the N pole and the S pole are alternately formed at a predetermined angle with respect to the traveling direction and are formed into a strip shape, and are connected in an annular shape via the connecting means 3. The plate-like body 20 is attached to the plate-like body 20 so as to be rotatable along the conveying path 10 so that the attraction force between the different poles acts without contact with the plate-like body 20. A cylindrical body 21 is used in which poles and S poles are alternately magnetized in a strip shape at a predetermined angle and arranged in a predetermined region of a substantially linear portion of the transport path 10.

As shown in FIG. 3, the plate-like body 20 is formed by forming permanent magnets in a rack shape, and alternately providing N poles 20N and S poles 20S on each strip-shaped portion. The S pole 20 </ b> S is formed at about 45 degrees with respect to the traveling direction X, and is cut so as to be attachable to the carriage 12.
The plate-like body 20 is fixed to the back surface of the carriage 12 with the magnetized surface down.
The carriage 12 includes a slide portion 120 and a radial bearing portion 121 that allows the slide portion 120 to swing freely (see FIG. 2), and the slide portion 120 travels on a rail 4R provided on the conveyance path 10. Thus, the plate-like body 20 is attached so as to be able to travel along the conveyance path 10. The rail 4R may be one or two.

As shown in FIG. 3, the columnar body 21 is formed by forming a permanent magnet in a cylindrical shape and alternately magnetizing N poles 21N and S poles 21S on its outer peripheral surface. The 21N and the S pole 21S are formed in a spiral shape at about 45 degrees with respect to the rotation shaft 210 of the cylindrical body 21.
The columnar bodies 21 are arranged in such a manner that the cylindrical bodies 21 are not in contact with the plate-like body 20 and are attracted to each other so that suction forces of different polarities act.
In the plate-like body 20, the N pole and the S pole are alternately formed at about 45 degrees with respect to the traveling direction. Correspondingly, the cylindrical body 21 has the rotation axis 210 with the N pole and the S pole alternately. On the other hand, it is formed in a spiral shape at about 45 degrees, and the N pole and the S pole are always crossed so that the attractive force acts efficiently.

  Each of the cylindrical bodies 21 has a number that can generate the traction force required to run each carriage 12 connected to the connecting means 3 at a predetermined speed (for example, about 200 mm / sec). 10 are arranged in a predetermined region 10 </ b> L (see FIGS. 5 and 6) of a substantially straight line portion, and are respectively attached to drive shafts 40 constituting the drive mechanism 4.

  The connecting means 3 may connect the arm 30 pivotally attached to the front and rear of the carriage 12 in a loose shape with the arm 30 of the adjacent carriage 12 by a pin or the like.

Further, a buffer material 32 such as a spring may be arranged between the arm 30 and the pin 31 as in the connecting means 3A shown in FIG.
When the N pole and S pole of the plate-like body 20 and the different poles of the N pole and S pole of the cylindrical body 21 synchronize with good timing, each carriage 12 travels at a constant speed, but does not synchronize. Cases need to be considered. That is, since it is necessary to protect the wafer by reducing the impact between the carriages 12 resulting from the deviation of the running timing of each carriage 12, the cushioning material 32 such as a spring is interposed as described above.

  As shown in FIG. 3, the drive mechanism 4 for each cylindrical body 21 drives the drive shaft 40, a transmission means 41 such as a chain for transmitting a rotational force to the drive shaft 40, and the transmission means 41. The cylindrical body 21 is rotated in a fixed direction.

Instead of the drive mechanism 4, a drive mechanism 4 </ b> A configured as shown in FIG. 5 may be used.
The drive mechanism 4A constitutes one drive system for the columnar body group 21G disposed in each of the traveling direction X1 and the reversal direction X2 of the plate-like body 20, and includes one motor 42, A gear train 43 for transmitting the rotational force of the motor 42 clockwise, a gear train 44 for transmitting counterclockwise, a transmission means 45 for transmitting the rotation of the gear train 43 to the drive shaft 40, and the gear train Transmission means 46 for transmitting the rotation of 44 to the drive shaft 40 is provided.

In the reversal region 10R of the conveyance path 10, it is difficult to dispose the transmission mechanism 2 and there is a strong possibility of occurrence of obstacles such as uneven rotation torque, and it is difficult to run each carriage 12 at a constant speed. The arrangement of the transmission mechanism 2 at 10R is omitted. On the other hand, the transmission mechanism 2 is arranged in a predetermined area 10L of the conveyance path 10, the carriage 12 is sent out by the transmission mechanism 2 in the traveling direction X1, and the carriage 12 is pulled by the transmission mechanism 2 in the reverse direction X2.
With this configuration, the same traveling speed of each carriage 12 can be maintained, and driving by a single motor 42 is also possible.

  The drive mechanism 4A and the transmission mechanism 2 may be provided at a plurality of locations in accordance with the transport distance of the transport path 10, for example, as shown in FIG. 6, four constant speed holding regions 100A to 100D as the predetermined region 10L. Provided.

Next, an operation example of the transfer device 1 will be described.
When the start switch of the transport device 1 is turned on, the motor 42 is started, and each drive shaft 40 is rotated by the drive mechanism 4A.
As a result, each columnar body 21 rotates, and the rotation of the N pole and the S pole of each columnar body 21 follows the rotation force of the different polarities of each columnar body 21 and the plate-like body 20, A propulsive force in the traveling direction of the plate-like body 20 is given.
Although the transmission mechanism 2 is not provided in the reversal region 10R of the conveyance path 10, the carriage 12 is sent and pulled by the transmission mechanism 2 and the drive mechanism 4A provided in the constant speed holding regions 100A to 100D. Each carriage 12 travels at a constant speed.
Wafer transfer may be performed by temporarily stopping the carriage 12 by the loader / unloader unit 13 or by continuously running the carriage 12 and synchronizing the operation of each loader / unloader unit 13 to the traveling speed. Also good.

According to the transport device 1,
a. Dust generation can be prevented in the transmission mechanism 2, and maintenance is easy because it is non-contact.
b. The transmission mechanism 2 can prevent a traveling trouble in the reversal region 10R of the conveyance path 10 and enables continuous continuous conveyance at a constant speed.
c. Even if the suction force between each plate-like body 20 and the columnar body 21 is not synchronized and a pulsation phenomenon occurs, the transported object can be protected by the connecting means 3A.

  In this embodiment, the plate-like body 20 is formed with an N-pole and an S-pole alternately at about 45 degrees, and the columnar body 21 is formed with a spiral with an N-pole and an S-pole alternately at about 45 degrees. However, it is not limited to such an angle and method of magnetization.

  Although the conveyance path of the said embodiment was an oval form, it is not limited to this, In the endless conveyance path, the said transmission mechanism 2 and the said drive mechanisms 4 and 4A are provided in the linear area | region. It can also be used.

  It is not necessary to arrange the hangers 13 on all of the carts 12, and the hangers 13 may be attached only to the necessary carts 12 according to the purpose of conveyance.

Next, a configuration example of the transfer apparatus 1A according to the second embodiment will be described with reference to FIG.
A conveying apparatus 1A according to the second embodiment uses a plate-like body 20A instead of the plate-like body 20 as a transmission mechanism 2A for transmitting a traveling force to the carriage 12, and a columnar shape instead of the columnar body 21. The body 22 is used. The drive mechanism 4B includes a drive shaft 47 of the columnar body 22, a columnar body 48 fixed to the drive shaft 47, a columnar body 49 having the same configuration as the columnar body 21, and a first body. A drive shaft 40A having the same configuration as the drive mechanism 4 of the embodiment, a transmission means 41A, a motor 42A, and the like are included.

The plate-like body 20A is formed so that strip-shaped N poles and S poles are alternately intersected with each other in the running direction.
On the outer circumferential surface of the cylindrical body 22, N poles 22N and S poles 22S are magnetized alternately and in parallel with the rotation axis (drive shaft 47), and the plate-like body 20A. And are arranged at a fine interval so that a suction force between different poles acts.
The N pole 48N and the S pole 48S formed on the outer peripheral surface of the columnar body 48 have their rotation axes (drive shafts) so that the N pole 21N and the S pole 21S of the columnar body 21A can always cross each other. 47) is formed in a spiral shape at about 45 degrees, is not in contact with the columnar body 49, and is arranged at a fine interval such that a suction force between different poles acts.
Other configurations are substantially the same as those of the first embodiment, and have the same effects.

In each of the above embodiments, it is assumed that each carriage 12 is connected by the connecting means 3 or the like. However, the carriage 12 is knitted into a plurality of carriage groups 12G, and the knitting carriages are not connected to each other. It may be allowed to travel (train-type transport system).
For example, as shown in FIG. 8, three sets of knitting carts 12G1 to 12G3 may be run in the conveyance path 10 without being connected to each other.
In this case, the interval between the adjacent cylindrical body groups 21G is made smaller than the knitting growth of the knitting carriages 12G1 to 12G3 so that the knitting carriages are sent and pulled by the adjacent cylindrical body groups 21G. .
Even with such a configuration, there are substantially the same operational effects as the above embodiments.

In the above embodiment, the transport apparatus is a configuration example in the case where the object to be transported is a semiconductor wafer, but a glass substrate for liquid crystal may be used.
In addition, you may use the said conveying apparatus also for the conveyance path | route of foodstuffs, such as rotary sushi, and the conveyance path | route of chemicals.

1 is a schematic perspective view of a transport device according to an embodiment; Sectional view, The principal part perspective view of the transmission mechanism of the conveyance apparatus, A plan view of the connecting means of the transport device, An arrangement plan view of the drive mechanism of the transport device, Arrangement plan view of the transmission mechanism of the transport device, An arrangement plan view of the drive mechanism of the transport device, The arrangement | positioning top view of the transmission mechanism of the conveyance apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 1A Conveyance apparatus 10 Conveyance path 11 Hanger 12 Cart 12G1-12G3 Knitting cart 13 Loader unloader part 2 Transmission mechanism 3 Connecting means 20 20A Plate-like body 21 21A 22 Columnar body 20N 21N N pole 20S 21S S pole 120 Slide part 121 Radial Bearing part 4R Rail 210 Rotating shaft 10L Predetermined region 4 4A 4B Drive mechanism 40 40A Drive shaft 48 Columnar body 30 Arm 31 Pin 32 Buffer material 41 41A Transmission means 42 42A Motor X1 Running direction X2 Reverse direction 21G Cylindrical body group 43 44 Gear train 10R Inversion area 100A-D Constant speed holding area

Claims (4)

A plate-like body that is attached so as to be able to travel along an annular conveyance path and in which strip-shaped N poles and S poles are alternately formed along the traveling direction;
Connecting means for connecting these plate-like bodies;
The strip-shaped N is disposed in a predetermined region of the substantially linear portion of the transport path, is rotatably attached, and is in non-contact with the plate-like body so that suction forces of different polarities act on each other. A cylindrical body having poles and S poles alternately magnetized;
A conveying device comprising a drive mechanism for applying a rotational force to these cylindrical bodies.   2. The transfer apparatus according to claim 1, wherein a hanger having a semiconductor wafer as a transfer object is attached to the plate-like body via a carriage.   The transport apparatus according to claim 1, wherein one driving mechanism is provided for the cylindrical body disposed in each of the traveling direction of the plate-like body and the direction of reversal thereof.   The conveying device according to claim 1, wherein a buffer portion is provided in the connecting means.

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