JP2007003209A5 - - Google Patents

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JP2007003209A5
JP2007003209A5 JP2005180398A JP2005180398A JP2007003209A5 JP 2007003209 A5 JP2007003209 A5 JP 2007003209A5 JP 2005180398 A JP2005180398 A JP 2005180398A JP 2005180398 A JP2005180398 A JP 2005180398A JP 2007003209 A5 JP2007003209 A5 JP 2007003209A5
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light
transmitting resin
photodetector
scale
light source
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JP2005180398A
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JP4869641B2 (en
JP2007003209A (en
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Claims (11)

少なくとも1つの光源と少なくとも1つの光検出器を、並べて光透過樹脂で一体化したパッケージからなるセンサヘッドと、前記センサヘッドと相対的に変位するスケールとから構成され、前記光源の光出射部から出射した光を前記スケールで反射及び回折し、反射及び回折した光を前記光検出器の受光部で受光して前記センサヘッドから変位信号を出力する光学式エンコーダにおいて、
前記光源の光出射部の任意の点から放出された光のうち、前記光透過樹脂と外界との界面で全反射する光が、前記光検出器の前記受光部の中心よりも前記光源側からみて外側に入射するように、前記光源の前記光出射部と前記光検出器の前記受光部との間隔及び前記光透過樹脂の厚さ及び前記光透過樹脂の屈折率の関係が設定されていることを特徴とする光学式エンコーダ。
A sensor head comprising a package in which at least one light source and at least one photodetector are arranged side by side and integrated with a light-transmitting resin, and a scale that is displaced relative to the sensor head, from a light emitting portion of the light source In the optical encoder that reflects and diffracts the emitted light by the scale, receives the reflected and diffracted light by the light receiving unit of the photodetector, and outputs a displacement signal from the sensor head,
Of the light emitted from an arbitrary point of the light emitting part of the light source, the light totally reflected at the interface between the light transmitting resin and the outside is from the light source side than the center of the light receiving part of the photodetector. to be incident on the outside as viewed before Symbol said light emitting portion and the spacing and the refractive index in the thickness and the light transmitting resin of the light transmitting resin and the light receiving portion of the photodetector relationship of the light source is set an optical encoder according to claim and Iruko.
前記光透過樹脂の前記スケールに対向する表面は、略平坦であることを特徴とする請求項1に記載の光学式エンコーダ。   The optical encoder according to claim 1, wherein a surface of the light transmitting resin facing the scale is substantially flat. 前記光透過樹脂の前記スケールに対向する表面と、前記光源の前記光出射部の表面と、前記光検出器の前記受光部の表面とが略平行であり、The surface of the light transmitting resin facing the scale, the surface of the light emitting part of the light source, and the surface of the light receiving part of the photodetector are substantially parallel,
前記光源の前記光出射部の表面から前記光透過樹脂の前記スケールに対向する表面までの厚みをt11と、  The thickness from the surface of the light emitting part of the light source to the surface of the light transmitting resin facing the scale is t11,
前記光検出器の前記受光部の表面から前記光透過樹脂の前記スケールに対向する表面までの厚みをt21と、  The thickness from the surface of the light receiving portion of the photodetector to the surface of the light transmitting resin facing the scale is t21,
前記光源の前記光出射部の任意の点から前記光検出器の前記受光部の中心までの前記光透過樹脂の表面に対して平行な方向の距離をdcと、  A distance in a direction parallel to the surface of the light transmitting resin from an arbitrary point of the light emitting portion of the light source to the center of the light receiving portion of the photodetector, dc,
外界の媒質の屈折率をn1と、  The refractive index of the outside medium is n1,
前記光透過樹脂の屈折率をn2とそれぞれしたとき、When the refractive index of the light transmitting resin is n2, respectively.
tan  tan -1-1 (dc/(t11+t21))<sin(Dc / (t11 + t21)) <sin -1-1 (n1/n2)(N1 / n2)
の条件式を満足することを特徴とする請求項2に記載の光学式エンコーダ。  The optical encoder according to claim 2, wherein the following conditional expression is satisfied.
前記光透過樹脂の前記スケールに対向する表面と、前記光源の前記光出射部の表面と、前記光検出器の前記受光部の表面とが略平行であり、The surface of the light transmitting resin facing the scale, the surface of the light emitting part of the light source, and the surface of the light receiving part of the photodetector are substantially parallel,
前記光源の前記光出射部の表面から前記光透過樹脂の前記スケールに対向する表面までの厚みをt111と、  The thickness from the surface of the light emitting portion of the light source to the surface of the light transmitting resin facing the scale is t111,
前記光検出器の前記受光部面から前記光透過樹脂の前記スケールに対向する表面までの厚みをt211と、  The thickness from the light receiving portion surface of the photodetector to the surface of the light transmitting resin facing the scale is t211;
前記光源の前記光出射部の任意の点から前記光検出器の前記受光部までの前記光透過樹脂の表面に対して平行な方向の距離のうち最も長い距離をdeと、  The longest distance among the distances in the direction parallel to the surface of the light transmitting resin from an arbitrary point of the light emitting portion of the light source to the light receiving portion of the photodetector is de,
外界の媒質の屈折率をn1と、  The refractive index of the outside medium is n1,
前記光透過樹脂の屈折率をn2とそれぞれしたとき、  When the refractive index of the light transmitting resin is n2, respectively.
tan  tan -1-1 (de/(t111+t211))<sin(De / (t111 + t211)) <sin -1-1 (n1/n2)(n1 / n2)
の条件式を満足することを特徴とする請求項2に記載の光学式エンコーダ。  The optical encoder according to claim 2, wherein the following conditional expression is satisfied.
前記光透過樹脂の前記スケールに対向する表面のうち前記光源の前記光出射部と前記光検出器の前記受光部との間の少なくとも一部の表面は、凸状部を有していることを特徴とする請求項1に記載の光学式エンコーダ。At least a part of the surface between the light emitting part of the light source and the light receiving part of the photodetector among the surfaces of the light transmitting resin facing the scale has a convex part. The optical encoder according to claim 1, wherein 前記光透過樹脂の前記スケールに対向する表面のうち前記凸状部の表面と、前記光源の前記光出射部の表面と、前記光検出器の前記受光部の表面とが略平行であり、The surface of the convex portion, the surface of the light emitting portion of the light source, and the surface of the light receiving portion of the photodetector are substantially parallel among the surfaces of the light transmitting resin facing the scale,
前記光源の前記光出射部の表面から前記光透過樹脂の前記凸状部の前記スケールに対向する表面までの厚みをt12と、  The thickness from the surface of the light emitting part of the light source to the surface of the convex part of the light transmitting resin facing the scale is t12,
前記光検出器の前記受光部の表面から前記光透過樹脂の前記凸状部の前記スケールに対向する表面までの厚みをt22と、  The thickness from the surface of the light receiving portion of the photodetector to the surface of the convex portion of the light transmitting resin facing the scale is t22,
前記光源の前記光出射部の任意の点から前記光検出器の前記受光部の中心までの前記光透過樹脂の表面に対して平行な方向の距離をdcと、  A distance in a direction parallel to the surface of the light transmitting resin from an arbitrary point of the light emitting portion of the light source to the center of the light receiving portion of the photodetector, dc,
外界の媒質の屈折率をn1と、  The refractive index of the outside medium is n1,
前記光透過樹脂の屈折率をn2とそれぞれしたとき、  When the refractive index of the light transmitting resin is n2, respectively.
tan  tan -1-1 (dc/(t12+t22))<sin(Dc / (t12 + t22)) <sin -1-1 (n1/n2)(N1 / n2)
の条件式を満足することを特徴とする請求項5に記載の光学式エンコーダ。  The optical encoder according to claim 5, wherein the following conditional expression is satisfied.
前記光透過樹脂の前記スケールに対向する表面のうち前記凸状部の表面と、前記光源の前記光出射部の表面と、前記光検出器の前記受光部の表面とが略平行であり、The surface of the convex portion, the surface of the light emitting portion of the light source, and the surface of the light receiving portion of the photodetector are substantially parallel among the surfaces of the light transmitting resin facing the scale,
前記光源の前記光出射部の面から前記光透過樹脂の前記凸状部の前記スケールに対向する表面までの厚みをt122と、  The thickness from the surface of the light emitting part of the light source to the surface of the convex part of the light transmitting resin facing the scale is t122,
前記光検出器の前記受光部の表面から前記光透過樹脂の前記凸状部の前記スケールに対向する表面までの厚みをt222と、  The thickness from the surface of the light receiving portion of the photodetector to the surface of the convex portion of the light transmitting resin facing the scale is t222,
前記光源の前記光出射部の任意の点から前記光検出器の前記受光部までの前記光透過樹脂の表面に対して平行な方向の距離のうち最も長い距離をdeと、  The longest distance among the distances in the direction parallel to the surface of the light transmitting resin from an arbitrary point of the light emitting portion of the light source to the light receiving portion of the photodetector is de,
外界の媒質の屈折率をn1と、  The refractive index of the outside medium is n1,
前記光透過樹脂の屈折率をn2とそれぞれしたとき、  When the refractive index of the light transmitting resin is n2, respectively.
tan  tan -1-1 (de/(t122+t222))<sin(De / (t122 + t222)) <sin -1-1 (n1/n2)(N1 / n2)
の条件式を満足することを特徴とする請求項5に記載の光学式エンコーダ。  The optical encoder according to claim 5, wherein the following conditional expression is satisfied.
少なくとも1つの光源と少なくとも1つの光検出器を、光透過樹脂で一体化したパッケージからなるセンサヘッドと、前記センサヘッドと相対的に変位するスケールとから構成され、前記光源の光出射部から出射した光を前記スケールで反射及び回折し、その反射及び回折した光を前記光検出器の受光部で受光して前記センサヘッドから変位信号を出力する光学式エンコーダにおいて、A sensor head composed of a package in which at least one light source and at least one photodetector are integrated with a light transmitting resin, and a scale that is displaced relative to the sensor head, and is emitted from a light emitting portion of the light source. In the optical encoder that reflects and diffracts the light with the scale, receives the reflected and diffracted light with the light receiving unit of the photodetector, and outputs a displacement signal from the sensor head,
前記光透過樹脂の前記スケールに対向する表面のうち前記光源の前記光出射部と前記光検出器の前記受光部との間の少なくとも一部の表面は、凹状部を有していることを特徴とする光学式エンコーダ。  At least a part of the surface between the light emitting part of the light source and the light receiving part of the photodetector among the surfaces of the light transmitting resin facing the scale has a concave part. An optical encoder.
前記光透過樹脂の前記スケールに対向する表面のうち前記凹状部の表面と、前記光源の前記光出射部の表面と、前記光検出器の前記受光部の表面とが略平行であり、The surface of the concave portion of the surface of the light transmitting resin facing the scale, the surface of the light emitting portion of the light source, and the surface of the light receiving portion of the photodetector are substantially parallel,
前記光源の前記光出射部の表面から前記光透過樹脂の前記凹状部の前記スケールに対向する表面までの厚みをt13と、  The thickness from the surface of the light emitting portion of the light source to the surface of the concave portion of the light transmitting resin facing the scale is t13,
前記光検出器の前記受光部の表面から前記光透過樹脂の前記凹状部の前記スケールに対向する表面までの厚みをt23と、  The thickness from the surface of the light receiving portion of the photodetector to the surface of the concave portion of the light transmitting resin facing the scale is t23,
前記光源の前記光出射部の任意の点から前記光検出器の前記受光部までの前記光透過樹脂の表面に対して平行な方向の距離のうち最も短い距離をdsと、  Ds is the shortest distance among the distances in a direction parallel to the surface of the light transmitting resin from an arbitrary point of the light emitting portion of the light source to the light receiving portion of the photodetector;
外界の媒質の屈折率をn1と、  The refractive index of the outside medium is n1,
前記光透過樹脂の屈折率をn2とそれぞれしたとき、  When the refractive index of the light transmitting resin is n2, respectively.
1.73×(t13+t23)<ds  1.73 × (t13 + t23) <ds
の条件式を満足することを特徴とする請求項8に記載の光学式エンコーダ。  The optical encoder according to claim 8, wherein the following conditional expression is satisfied.
前記光源上に、少なくとも1つのスリットパターンを有する光学部材を配置したことを特徴とする請求項1または8記載の光学式エンコーダ。9. The optical encoder according to claim 1, wherein an optical member having at least one slit pattern is disposed on the light source. 前記スリットパターンを有する前記光学部材は、前記光源に直接貼付されていることを特徴とする請求項10に記載の光学式エンコーダ。The optical encoder according to claim 10, wherein the optical member having the slit pattern is directly attached to the light source.
JP2005180398A 2005-06-21 2005-06-21 Optical encoder Active JP4869641B2 (en)

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JP2009236854A (en) * 2008-03-28 2009-10-15 Olympus Corp Optical encoder

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JP2003166856A (en) * 2001-11-29 2003-06-13 Fuji Electric Co Ltd Optical encoder
JP4024644B2 (en) * 2002-05-14 2007-12-19 株式会社ミツトヨ Reflective encoder
JP2005156549A (en) * 2003-11-05 2005-06-16 Sendai Nikon:Kk Optical encoder

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