JP2006327884A5 - - Google Patents

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JP2006327884A5
JP2006327884A5 JP2005154884A JP2005154884A JP2006327884A5 JP 2006327884 A5 JP2006327884 A5 JP 2006327884A5 JP 2005154884 A JP2005154884 A JP 2005154884A JP 2005154884 A JP2005154884 A JP 2005154884A JP 2006327884 A5 JP2006327884 A5 JP 2006327884A5
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quartz glass
pretreatment
bubbles
treatment
forming
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JP2005154884A
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JP4655761B2 (en
JP2006327884A (en
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すなわち、請求項１に記載の発明は、モールド内に前処理後石英ガラスを収容して、該前処理後石英ガラスを加熱加圧することにより、略平坦な表面をもつ所望形状の石英ガラスを成形する方法において、前処理前石英ガラスの内部に石英ガラス合成時に発生した泡が存在する場合、該前処理前石英ガラスを、前記泡の中心より石英ガラス内部側で切断することにより、前記前処理前石英ガラスから切り出して前記前処理後石英ガラスを得る石英ガラスの前処理方法としたことを特徴とする。 In other words, the invention according to claim 1 forms the quartz glass of a desired shape having a substantially flat surface by accommodating the quartz glass after pretreatment in the mold and heating and pressing the quartz glass after the pretreatment. In the method, when there is a bubble generated during the synthesis of quartz glass inside the pre- treatment quartz glass , the pre- treatment is performed by cutting the pre-treatment quartz glass on the quartz glass inside side from the center of the foam. It is characterized by being a quartz glass pretreatment method that is cut out from pre-quartz glass to obtain the pretreated quartz glass.

請求項２に記載の発明は、モールド内に前処理後石英ガラスを収容して、該前処理後石英ガラスを加熱加圧することにより、略平坦な表面をもつ所望形状の石英ガラスを成形する方法において、前処理前石英ガラスの内部に石英ガラス合成時に発生した泡が存在する場合、前記前処理前石英ガラスの表面から前記泡まで貫通する貫通孔を形成することにより、前記泡を外部と連通させた前記前処理後石英ガラスを得る石英ガラスの前処理方法としたことを特徴とする。 The invention according to claim 2 is a method for forming a quartz glass of a desired shape having a substantially flat surface by accommodating the pre-treated quartz glass in a mold and heating and pressurizing the quartz glass after the pre-treatment. in previous cases the process inside the foam generated during the silica glass synthesis before quartz glass is present, by forming a through hole penetrating from the pretreatment the surface of the pre-silica glass until the foam, external communication with the foam A quartz glass pretreatment method for obtaining quartz glass after the pretreatment is performed.

Claims (8)

モールド内に前処理後石英ガラスを収容して、該前処理後石英ガラスを加熱加圧することにより、略平坦な表面をもつ所望形状の石英ガラスを成形する方法において、
前処理前石英ガラスの内部に石英ガラス合成時に発生した泡が存在する場合、該前処理前石英ガラスを、前記泡の中心より石英ガラス内部側で切断することにより、前記前処理前石英ガラスから切り出して前記前処理後石英ガラスを得ることを特徴とする石英ガラスの前処理方法。 In a method of forming a desired shape of quartz glass having a substantially flat surface by housing the quartz glass after pretreatment in a mold and heating and pressurizing the quartz glass after pretreatment,
When bubbles generated during the synthesis of quartz glass are present inside the pre-treatment quartz glass, the pre-treatment quartz glass is cut from the pre-treatment quartz glass by cutting the pre-treatment quartz glass on the quartz glass inner side from the center of the bubbles. A quartz glass pretreatment method, characterized by cutting out and obtaining the quartz glass after the pretreatment. モールド内に前処理後石英ガラスを収容して、該前処理後石英ガラスを加熱加圧することにより、略平坦な表面をもつ所望形状の石英ガラスを成形する方法において、
前処理前石英ガラスの内部に石英ガラス合成時に発生した泡が存在する場合、前記前処理前石英ガラスの表面から前記泡まで貫通する貫通孔を形成することにより、前記泡を外部と連通させた前記前処理後石英ガラスを得ることを特徴とする石英ガラスの前処理方法。 In a method of forming a desired shape of quartz glass having a substantially flat surface by housing the quartz glass after pretreatment in a mold and heating and pressurizing the quartz glass after pretreatment,
When bubbles generated during the synthesis of quartz glass are present inside the pre- treated quartz glass, the bubbles are communicated with the outside by forming a through-hole penetrating from the surface of the pre-treated quartz glass to the bubbles. A pretreatment method for quartz glass, characterized in that quartz glass is obtained after the pretreatment. 請求項１に記載の石英ガラスの前処理方法において、前記前処理後石英ガラスの表面に残存する泡の容積が、切断前の泡の容積の５０％以下であることを特徴とする石英ガラスの前処理方法。   2. The pretreatment method for quartz glass according to claim 1, wherein the volume of bubbles remaining on the surface of the quartz glass after the pretreatment is 50% or less of the volume of bubbles before cutting. Pre-processing method. 請求項２に記載の石英ガラスの前処理方法において、前記貫通孔の直径が前記泡の直径の５０％以上であることを特徴とする石英ガラスの前処理方法。   3. The pretreatment method for quartz glass according to claim 2, wherein the diameter of the through hole is 50% or more of the diameter of the bubble. 請求項２に記載の前処理方法において、前記貫通孔の長さが前記泡の直径の２倍以下であることを特徴とする石英ガラスの前処理方法。   The pretreatment method according to claim 2, wherein the length of the through hole is not more than twice the diameter of the bubble. 請求項１乃至５の何れか一つに記載の石英ガラスの前処理方法よって得られた前記前処理後石英ガラスを、真空雰囲気内で加熱加圧することにより、略平坦な表面をもつ所望形状の石英ガラスを成形することを特徴とする石英ガラスの成形方法。   The pre-treated quartz glass obtained by the quartz glass pre-treatment method according to any one of claims 1 to 5 is heated and pressed in a vacuum atmosphere to obtain a desired shape having a substantially flat surface. A method for forming quartz glass, comprising forming quartz glass. 請求項１乃至５の何れか一つに記載の前処理方法よって得られた前記前処理後石英ガラスを、0.1mm/分以下の速度で加熱加圧することにより、略平坦な表面をもつ所望形状の石英ガラスを成形することを特徴とする石英ガラスの成形方法。   A desired shape having a substantially flat surface by heating and pressurizing the pre-treated quartz glass obtained by the pre-treatment method according to claim 1 at a speed of 0.1 mm / min or less. A method for molding quartz glass, comprising molding quartz glass. 請求項６又は７に記載の成形方法で所望形状の石英ガラスを成形した後、更に、前記モールド内に、Ｎ２ガス等の不活性ガスを導入して雰囲気温度を均一にした後、更に前記石英ガラスを加熱加圧することを特徴とする石英ガラスの成形方法。 After molding the desired shape quartz glass by the molding method according to claim 6 or 7, further introducing an inert gas such as N 2 gas into the mold to make the ambient temperature uniform, and further A method for forming quartz glass, comprising heating and pressurizing quartz glass.
JP2005154884A 2005-05-27 2005-05-27 Pretreatment method of quartz glass and molding method of quartz glass Expired - Fee Related JP4655761B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005154884A JP4655761B2 (en) 2005-05-27 2005-05-27 Pretreatment method of quartz glass and molding method of quartz glass

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Application Number Priority Date Filing Date Title
JP2005154884A JP4655761B2 (en) 2005-05-27 2005-05-27 Pretreatment method of quartz glass and molding method of quartz glass

Publications (3)

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JP2006327884A JP2006327884A (en) 2006-12-07
JP2006327884A5 true JP2006327884A5 (en) 2008-05-29
JP4655761B2 JP4655761B2 (en) 2011-03-23

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011162392A (en) * 2010-02-09 2011-08-25 Tosoh Quartz Corp Mold material for production of quartz glass molding and method for producing quartz glass molding

Family Cites Families (4)

* Cited by examiner, † Cited by third party
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JP2514876B2 (en) * 1991-08-31 1996-07-10 信越石英株式会社 Method for producing synthetic quartz glass molded body for optics
JPH05163026A (en) * 1991-12-12 1993-06-29 Matsushita Electric Ind Co Ltd Glass raw material for forming optical element and its production
JP4110362B2 (en) * 2000-12-26 2008-07-02 信越化学工業株式会社 Method for producing synthetic quartz glass member
JP4341277B2 (en) * 2003-04-07 2009-10-07 株式会社ニコン Method of forming quartz glass

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