JP2006313086A - Three-dimensional shape inspection machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To perform size and shape measurement and inspection by displaying overall pickup images of workpieces in a focused state. <P>SOLUTION: This three-dimensional shape inspection machine is constituted of: a stage 6 for mounting an object 5 to be inspected; an imaging system comprising a projector lens 4 and an image pickup device 3 for imaging the object to be inspected; a stage Z-axis position sensor 11 for detecting the position of the stage 6 in the direction of a Z-axis; a monitor 16 for displaying the image etc. of the object to be inspected; and a computer main body 15 for instructing the stage to move vertically, processing the image of the object to be inspected, and displaying it on the monitor 16. The computer main body 15 divides a plan-view image of the object to be inspected into a plurality of images according to the depth of focus on the basis of both shape data of the object 5 to be inspected and the depth of focus of the projector lens 4, determines the position of the relative vertical movement of the stage 6 at which each image is focused as imaging positions, sequentially moves the stage to the imaging positions, images the object to be inspected at each imaging position by the imaging system, extracts focused parts from a plurality of pickup images, synthesizes them, creates an image in a focused state as a whole, and displays it on the monitor. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a three-dimensional shape inspection machine for measuring and inspecting a planar view shape of an inspection object having a three-dimensional shape (particularly a large height dimension).

  In many cases, it is required to inspect whether the shape and dimensions of various workpieces after forming are within the allowable range. As a device for performing such inspection, processing placed on a stage (stage) A three-dimensional shape inspection machine is known in which an object is picked up by a camera from above, and the shape and dimensions of the inspection object are measured from the picked-up image and inspected (for example, see Patent Document 1). However, since there is a limit to the depth of focus when photographing with a camera, the entire surface of the object to be inspected can be obtained if the workpiece placed on the mounting table has a planar shape and the entire upper surface is within the depth of focus. Workpieces that can be photographed clearly but have a large height and do not fit within the depth of focus (machine parts, plastic moldings, molds, etc. When the object is a workpiece, the image of the portion out of the depth of focus is blurred and unclear, and it is difficult to measure and inspect the shape and dimensions of the object to be inspected (the workpiece).

  For this reason, when inspecting the shape and dimension of a workpiece having a large three-dimensional shape such as a machined part, a plastic molded product, a mold, etc., using a conventional three-dimensional shape inspection machine, first place it on the mounting table. Set the reference point by focusing on the part that will be the measurement standard of the inspection object (workpiece) and measure its horizontal (front / rear / left / right) position. Focus and set the measurement point, measure the horizontal position of this measurement point, and calculate the horizontal dimension from the reference point to the measurement point from the measured reference point and the horizontal position data of the measurement point. The technique of doing was taken. In addition, an external shape chart when the workpiece placed on the mounting table is viewed from above (from the camera side) is obtained from the workpiece shape data (CAD data), and the workpiece image actually captured by the camera is obtained. Even in the chart measurement in which the outer shape chart is displayed in an overlapping manner to inspect the deviation of the shape of the workpiece, the inspection is performed in comparison with the outer shape chart for each in-focus portion.

Japanese Patent Laid-Open No. 08-185428

  As can be seen from the above explanation, when measuring and inspecting a workpiece having a three-dimensional shape with a large height in the measurement and inspection of a workpiece by a conventional three-dimensional shape inspection machine, it is divided for each portion in focus. The work of calculating and inspecting the dimensions while performing the measurement is necessary, and the measurement work is complicated and takes time. In addition, since there are only limited portions in focus, there is a problem in that it is impossible to capture and display all measurement locations at the same time, and there is a risk of measurement omission.

  The present invention has been made in view of such problems, and can display a whole captured image of a workpiece or the like having a large three-dimensional shape with a high height clearly in a focused state. An object of the present invention is to provide a three-dimensional shape inspection machine having a configuration capable of easily and accurately performing measurement and inspection.

  In order to achieve such an object, a three-dimensional shape inspection machine according to the present invention has a mounting table on which an object to be inspected made based on predetermined shape data is placed, and a vertical position above the mounting table. An imaging system comprising: a projection lens that forms an image of an object to be inspected that is provided on the mounting table; and an imaging device that captures an image formed by the projection lens; and the imaging system A moving mechanism for moving the mounting table in the vertical direction, a vertical position sensor for detecting the vertical relative movement position of the mounting table, and a display for displaying an image of the inspection object imaged by the imaging system And a control system for instructing the operation of the moving mechanism based on a detection signal from the vertical position sensor and processing the image of the inspection object imaged by the imaging system to display on the display device Is done. Furthermore, the control system divides the planar image of the inspection object into a plurality of images corresponding to the focal depth based on the shape data of the inspection object placed on the mounting table and the focal depth of the projection lens, An imaging position setting function unit for obtaining, as imaging positions, a plurality of vertical movement positions of the mounting table necessary for focusing and imaging each of the plurality of images, and positioning the mounting table at each of the plurality of imaging positions. An imaging instruction function unit that instructs the operation of the moving mechanism and captures an image of the inspection object placed on the mounting table by the imaging system at each of the plurality of imaging positions, and the plurality of imaging positions by the imaging system And an image extraction / synthesizing function unit that extracts and synthesizes the in-focus portions from the images picked up in FIG. 5 and creates a clear image that is entirely in focus and displays it on the display device.

  The moving mechanism is configured to be operated by manual operation, and the imaging instruction function unit is positioned at the imaging position and a function for instructing a manual operation direction for relatively moving the mounting table to the imaging position. It may be configured to have a function of displaying.

  In addition, the movement mechanism is controlled in response to an instruction from the imaging instruction function unit, and the mounting table is sequentially moved relative to each of the plurality of imaging positions, and mounted on the mounting table in accordance with an instruction from the imaging instruction function unit. The image of the placed inspection object may be configured to be captured at each imaging position by the imaging system.

  On the other hand, the moving mechanism is configured so that the mounting table can be moved relative to the imaging system in the front-rear and left-right directions, and the shape of the object to be inspected located outside the imaging field of the imaging system is set by the moving mechanism. It is preferable that an image can be taken by moving in the front-rear and left-right directions.

  Furthermore, the control system reads the shape data of the object to be inspected placed on the mounting table, and displays the shape diagram when the inspection object placed on the mounting table is viewed from the imaging system on the display device A functional part, a measurement part setting function part for defining a measurement part by an external instruction in the shape diagram displayed on the display device by the shape display function part, and an image of the inspection object displayed on the display device by the image extraction / synthesis function part In addition, a configuration may be provided that includes a measurement result display function unit that displays the measurement result of the measurement point set by the measurement point setting function unit.

  A chart calculation function unit that obtains an outer shape chart when the control system reads shape data of the inspection object placed on the mounting table and sees the inspection object placed on the mounting table from the imaging system, and image extraction You may provide the chart display function part which superimposes and displays the external shape chart calculated | required by the chart calculation function part on the image of the to-be-inspected object displayed on the display apparatus by the synthetic | combination function part. In this case, it is preferable that the chart calculation function unit obtains an outer shape chart having an allowable range when the inspection object is made based on the shape data.

  According to the three-dimensional shape inspection machine according to the present invention, the mounting table is relatively moved to the imaging position for focusing each image divided based on the shape data of the inspection object and the focal depth of the projection lens, and the inspection object is Since the in-focus part of the image captured and imaged at each imaging position is extracted and a clear image in which the entire image is in focus is created and displayed, even if the inspection object has a large height dimension, It is possible to easily obtain a clear whole image as if a plan view of the drawing is viewed, and to easily and accurately measure and inspect the shape and dimensions thereof.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows an example of the overall configuration of a three-dimensional shape inspection machine according to the present invention. The inspection machine includes a projection imaging unit PU and a computer unit CU. Both units PU and CU are connected to a camera USB cable 13. And a position sensor USB cable 14.

  The projection imaging unit PU includes a stage 6 that can move in the front-rear and left-right directions (horizontal direction, that is, the XY direction) and the vertical direction (vertical direction, that is, the Z direction) with respect to the projector main body 1. 5 is placed on the stage 6. The inspection object 5 placed on the stage 6 can be transmitted and illuminated from below by the transmitted illumination lamp 7 or can be illuminated by the incident illumination lamp 8 via the half mirror 9. A projection lens 4, a half mirror 9 and a TV camera 2 are arranged on the projector main body 1 as shown in the figure above the stage 6, and the illumination light reflected or transmitted to the inspection object 5 is reflected by the projection lens 4 and The image is formed as an observation image of the inspection object 5 on the image pickup device 3 of the TV camera 2 through the half mirror 9. Note that the projection lens 4 can be exchanged. For example, the projection lens 4 can be exchanged with a projection lens 22 having a different magnification to change the size of an image formed on the image sensor 3.

  The image picked up by the image pickup device 3 of the TV camera 2 in this way is digitally processed and taken as digital image data into the computer main body 15 of the computer unit CU via the camera USB cable 13. Note that the output image of the TV camera 2 has two types of images, a quasi-moving image and a still image, and can be switched by a command from the computer main body 15.

  The stage 6 can manually move the stage X-axis drive knob 23 and the stage Y-axis drive knob 24 to move the stage 6 back and forth, left and right (X-axis direction and Y-axis direction, that is, horizontal direction). Further, if the stage Z-axis drive knob 10 is manually operated, the stage 6 can be moved in the vertical direction (Z-axis direction, that is, the vertical direction) by the stage Z-axis drive unit 12. The position of the stage 6 in the Z-axis direction is detected by a stage Z-axis position sensor 11 installed on the moving axis of the stage Z-axis drive unit 12, and this detection data is taken into the computer main body 15 via the position sensor USB cable 14. .

  The computer unit CU is configured by connecting a display monitor 16, a mouse 17, and a keyboard 18 to the computer main body 15, and is connected via a network 19 to a CAD data memory 20 that stores CAD data (shape data). ing. In addition, a medium 21 storing CAD data (shape data) can be connected.

  A method for performing a shape measurement inspection of the inspection object 5 placed on the stage 6 using the three-dimensional shape inspection machine configured as described above will be described below. In this inspection, first, measurement information of the inspection object 5 is input according to the flow shown in FIG. 2, and this is shown in the measurement information registration screen A (CAD data capture and measurement information registration) shown in FIG. 3 and FIG. This will be described with reference to the measurement information registration screen B (registered measurement information display) shown. 3 and 4 show screen display contents of the display monitor 16.

  First, a measurement information registration application stored in the computer main body 15 is activated (step 101). As a result, the measurement information registration screen A shown in FIG. 3 is displayed on the display monitor 16 as the screen display 150a. When the CAD data reading button 152 on the display screen 150 a is clicked with the mouse 17, CAD data is taken into the computer main body 15 from the CAD data memory 20 (or the medium 21 connected to the computer main body 15) via the network 19. It is converted and saved in a data format that can be used with this system. The CAD data thus captured is displayed in the CAD diagram tree display unit 158 and can be pulled down by the CAD diagram pull-down menu 159. Therefore, the CAD data of the object to be inspected can be displayed in the CAD diagram tree display unit 158 and the CAD. When the selection is made using the drawing pull-down menu 159, the selected CAD diagram 168 is displayed on the main screen 151 as shown in FIG. 3 (step 102).

  Clicking on the CAD reference 168 displayed on the main screen 151 in this way with the mouse 17 as a measurement reference point (the part 161 in this example) displays a reference point 162 on the CAD reference 168. It is added (step 103). In this example, the dimensions 163, 164, and 165 from the reference point 162 indicated by an arrow in the top left plan view in the CAD FIG. 168 are the measurement locations, and these are the measurement locations. The measurement locations 163, 164 and 165 are clicked with the mouse 17, and the measurement location button 154 is clicked. As a result, the display colors of the selected measurement points 163, 164 and 165 are changed to indicate that they have been designated (step 104).

  Next, when the registration button 155 is clicked with the mouse 17, the reference point 162, the measurement points 163 to 165, their height dimension information 166 and 167, and the magnification of the projection lens 4 mounted (this determines the depth of focus). Based on this, the measurement point, the number of captured images, the moving direction, the moving amount, the stop accuracy, the capturing order are set, and the measurement information diagram 190 displayed on the main screen 151 of the measurement information registration screen B shown in FIG. 4 is set. (Step 105).

  Here, the measurement points are points (points 162, 184, 185, and 186 shown in FIG. 4) that serve as a reference for measuring the measurement points 163, 164, and 165. The number of captured images refers to the number of images necessary to capture all the images, that is, the image portion within the range that can be covered within the focal depth range of the projection lens 4, that is, the inspection object 5 by the TV camera 2. This is the number of divided images when the observation image at the time of imaging is divided into a plurality of images corresponding to the focal depth of the projection lens 4. The moving direction is a moving direction when moving the stage 6 in the Z-axis direction to each in-focus position (that is, upward or downward) because it is necessary to focus and capture each captured image. The amount of movement is the amount of movement in the Z-axis direction necessary for moving in this direction of movement to the in-focus position. The stop accuracy is the positioning accuracy necessary for obtaining a desired in-focus state according to the magnification (depth of focus) of the projection lens 4, and the capture order refers to data obtained by capturing the images divided as described above. Is the order of loading.

  As a result, display of measurement points 184, 185, and 186 is added to the CAD diagram 168 shown in FIG. 3 as shown in FIG. 4, and the image capture position (reference plane 187, A shown in the lower left diagram of FIG. Surface 188, surface B 189) information is added, and a measurement information diagram 190 from which dimension lines not related to measurement are deleted is created, and the data is saved under a file name with a CAD diagram number added. (Step 106). After the storage is completed, the measurement information registration screen B having the measurement information diagram 190 is replaced and displayed as the screen display 150b of the display monitor 16 as shown in FIG. The measurement information diagram 190 is displayed in place of the CAD diagram 168 in the screen display 150b on which the measurement information registration screen B is displayed in this way, and the measurement information tree display unit 180 and the measurement information pull-down are displayed in the information frame 160. A menu 181 is provided, and each registered value registered according to the flow of FIG. 2 is displayed as shown.

  In order to check the registered measurement information, the measurement information registration application A is started and the measurement information registration screen A shown in FIG. 3 is displayed, and then the measurement information button 157 in the information frame 160 is clicked with the mouse 17. And switch to the measurement information registration screen B. Then, a desired measurement information file name is clicked with the mouse 17 in the measurement information tree display portion 180 and the measurement information pull-down menu 181 in the information frame 160. When changing or adding a measurement location, click the measurement location or addition location on the measurement information diagram 190 on the main screen 151 with the mouse 17 and click the measurement location button 154 to register. Click the button 155. To return from the measurement information registration screen B (screen display 150b) to the measurement information registration screen A (screen display 150a), the CAD button 156 in the information frame 160 is clicked with the mouse 17.

  When the measurement information registration work is completed as described above, the inspection object is then measured according to the flow shown in FIG. The details of the measurement will be described with reference to FIGS.

  In order to perform this measurement, first, the measurement application of the computer main body 15 is activated (step 201). As a result, the measurement screen 250 shown in FIG. 6 is displayed on the screen of the display monitor 16, and the measurement target information is stored in the measurement information tree display unit 180 and the pull-down menu 181 in the measurement information frame 254. The measured measurement information file name is clicked with the mouse 17, and the measurement information is read out. When the measurement information is read in this way, a number indicating the number of captured screens is displayed in the image capturing surface number frame 255 of the measurement information frame 254 (step 202).

  Then, a projection lens (for example, the projection lens 4) that matches the size of the inspection object 5 and the image range to be captured is selected and attached to the projector main body 1. Then, the magnification of the projection lens 4 attached in this way is set with the mouse 17 in the projection lens magnification setting pull-down menu 253 (step 203). Then, in the computer main body 15, the measurement information is corrected based on the magnification data (focus depth data) of the projection lens 4 (step 204). This is because, in the above-described measurement information registration (registration according to the flow of FIG. 2), the projection lens magnification is set by using a predetermined initial value (default value) and the number of captured images is set. When the projection lens magnification thus obtained is different from the initial value, the number of captured images and the like are corrected in accordance with the focal depth of the actual projection lens.

  Next, the computer main body 15 issues a command to capture and transmit a semi-moving image to the TV camera 2 and displays the semi-moving image sent from the TV camera 2 on the measurement main screen 251 in response to this command ( Step 205). Then, the inspection object 5 is placed on the stage 6, and the operator manually operates the stage Z-axis drive knob 10 while looking at the measurement main screen 251 to focus on the reference plane 187 (see FIG. 4). Further, the stage X-axis drive knob 23 and the stage Y-axis drive knob 24 are manually operated so that the reference point 267 of the captured image is set substantially at the center of the screen (step 206).

  Then, the measurement start button 257 at the lower right of the measurement screen 250 is clicked with the mouse 17 (step 207). As a result, the computer main body 15 issues a command to the TV camera 2 to capture a still image and transfer the captured image, and reads an image focused on the reference plane 187 (reference plane image 281 shown in FIG. 8). Image processing 284 is performed to delete the unfocused portion (the shaded portion of the reference surface image 281 in FIG. 8) from the reference surface image 281 to obtain the post-reference surface image processed image 284 shown in FIG. 8 (step 208). ).

  As a result, an image that is in focus (focused) on the reference plane 187 and is within the depth of focus range of the projection lens 4 (an image 284 after the reference plane image processing) is obtained. The direction of movement to the next capture screen is instructed along with the measurement information corrected in. In this example, since the next capture screen is the A plane 188 shown in FIG. 4, “Stage DOWN” 263 shown in FIG. 7 is displayed in the stage movement information frame 252 at the upper right of the measurement screen 250. At this time, the computer main body 15 issues a command to send the quasi-moving image to the TV camera 2 again, and the quasi-moving image from the TV camera 2 is displayed on the measurement main screen 251.

  When the measurer turns the stage Z-axis drive knob 10 in the direction of lowering the stage 6 in accordance with the indication “stage DOWN” 263, the stage 6 is moved vertically downward accordingly. At this time, the computer main unit 15 monitors the position data from the stage Z-axis position sensor 11, and displays “Stage Stop” 261 in the stage movement information frame 252 when it reaches a position where the next capture screen is in focus. (Step 209). After displaying “Stage Stop” 261 in the stage movement information frame 252, the computer main body 15 stops within a predetermined height range (a range where the A plane 188 is focused (focused)). It is confirmed by looking at the position data of the stage Z-axis position sensor 11. When it is out of the predetermined height range, the direction of movement of the stage movement information frame 252 is changed so that the stage 6 is moved within this range, and the operator can operate the stage Z-axis drive knob 10 again. This is repeated until it stops within a predetermined range.

  When the stage 6 is positioned within a predetermined height range, that is, when the position reaches the position where the A plane 188 is in focus, the computer main body 15 captures a still image and transfers the captured image to the TV camera 2 , Read the image of the A surface 188 (A surface image 282 shown in FIG. 8), and delete the unfocused portion (the shaded portion of the A surface image 282 in FIG. 8) from the A surface image 282 Image processing 285 is performed to obtain an A-side image processed image 285 shown in FIG. 8 (step 210).

  Thereafter, the computer main body 15 synthesizes the reference plane image processed image 284 and the A plane image processed image 285, and performs dimension measurement on the measurement location 163. And the measurement result is described in the measurement result display part 256 (step 211).

  Next, proceeding to step 212, it is determined whether the number of captured images has reached the measurement information value (after correction). In this example, since the measurement information value has not yet been reached and the B surface 189 remains, the process returns to step 209 again, and the processing of step 210 and step 211 is performed in the same manner as in the case of the A surface. That is, after the stage 6 is moved to a position where the B surface 189 is in focus, an image of the B surface 189 (B surface image 283) is taken in, and the unfocused portion is deleted to obtain an image 286 after B surface image processing. . Then, the computer main body 15 synthesizes the reference plane image processed image 284 and the B plane image processed image 286, measures the dimensions of the measurement locations 164 and 165, and displays the measurement results on the measurement result display unit 256. This is described (step 211).

  When the imaging and capturing of the entire screen is completed in this way, the process proceeds from step 212 to step 213, and images subjected to image processing on each surface (reference surface 187, A surface 188, and B surface 189) (after the reference surface image processing) The image 284, the A-side image processed image 285 and the B-side image processed image 286) are combined into one image to create a combined image 287 (step 213). Further, a dimension display image 288 is created based on the data measured on each surface (step 213). Then, the composite image 287 and the dimension display image 288 are displayed on the measurement main screen 251 in a state where they are positioned on different layers (step 214).

  When saving the measurement result in this way, the save button 258 at the lower right of the measurement screen 250 is clicked with the mouse 17. By this operation, the composite image 287 and the dimension display image 288 are integrated to create a storage measurement image 289. The created storage image 289 and measurement data (measurement dimensions 264, 265, 266) are stored under the designated file names associated with each other (step 215).

  As can be seen from the above description, if the three-dimensional shape inspection machine according to the present embodiment is used, the operator who performs the measurement work starts the measurement information registration application and performs the measurement information registration work according to the flow shown in FIG. After performing the measurement application, the projection lens is exchanged and exchange data is input, the stage Z-axis drive knob 10 is manually operated to focus on the reference plane 187, the stage X-axis drive knob 23 and the stage. If the manual operation of the Y-axis drive knob 24 is performed to position the reference point 267 substantially at the center of the screen, the measurement is started simply by clicking the measurement start button 257. Also in this measurement, the operator only has to manually operate the stage Z-axis drive knob 10 based on the display of the stage movement information frame 252, and thereafter, all measurements are automatically performed by the computer main body 15.

  In other words, when measuring objects to be inspected with different measurement surfaces, all the measurement points can be measured without waste if the images are taken in accordance with the instructions displayed on the monitor, so the measurement work is simple and the measurement time And omission of measurement can be eliminated. In addition, since an image obtained by synthesizing an image in which all the measurement points are in focus and a size image can be stored, an operation such as synthesizing the captured image after measurement is not necessary.

  Next, a second embodiment of the present invention will be described. Since the solid shape inspection machine shown in FIG. 1 is also used in the second embodiment, the description of the configuration is omitted, and the shape measurement inspection of the inspection object 5 placed on the stage 6 is performed using this solid shape inspection machine. The method to perform is demonstrated below. In this embodiment, an external shape chart when the inspection object 5 is viewed through the projection lens 4 is obtained using the shape data (CAD data) of the inspection object, and this external shape chart is displayed so as to overlap the measurement image. This shows a case where an inspection called a so-called chart measurement, in which an inspection of a planar view shape of an object to be inspected is performed based on a shift between the two, is performed.

  In this inspection, first, measurement information (chart information) of the inspection object 5 is input according to the flow shown in FIG. 9, and this is input to the measurement information (chart) registration screen C (CAD data capture and measurement) shown in FIG. Information registration) and measurement information (chart) registration screen D (registered measurement information display) shown in FIG. 11 will be described.

  First, the chart measurement information registration application stored in the computer main body 15 is activated (step 301). As a result, the measurement information (chart) registration screen C shown in FIG. 10 is displayed on the display monitor 16 as the screen display 350a. When the CAD data reading button 353 on the display screen 350a is clicked using the mouse 17, CAD data is taken into the computer main body 15 from the CAD data memory 20 (or the medium 21 connected to the computer main body 15) via the network 19. It is converted and saved in a data format that can be used with this system. The CAD data thus captured is displayed in the CAD diagram tree display unit 359 and can be pulled down by the CAD diagram pull-down menu 360. Therefore, the CAD data of the object to be inspected can be displayed in the CAD diagram tree display unit 359 and CAD. When the selection is made using the drawing pull-down menu 360, the selected CAD diagram 370 is displayed on the main screen 351 as shown in FIG. 10 (step 302).

  With respect to the CAD drawing 370 displayed on the main screen 351 in this manner, a portion serving as a measurement reference point (in this example, a portion 363) and a reference auxiliary line 362 of the chart are clicked with the mouse 17, and then a reference point button Click 354. Thereby, a display showing the reference point 361 and the reference auxiliary line 362 is added on the CAD diagram 370 (step 303). Further, when the measurement points (contour lines) 363 to 367 are clicked with the mouse 17 and the measurement point button 355 is clicked, the color of the selected portion is changed (step 304).

  Next, when the registration button 356 is clicked with the mouse 17, the reference point 361, the reference auxiliary line 362, the measurement points 363 to 367, the height dimension information 368 and 369, and the magnification of the mounted projection lens 4 (the focus thereby) The following measurement information is created on the basis of the dimensional tolerance, the measurement point, and the designated processing allowable value based on the depth is determined (step 305).

・ First, calculate the number of captured images, the direction of movement, the amount of movement, the stop accuracy, and the order of capture.
Next, measurement information displayed on the main screen 351 of the measurement information (chart) registration screen D shown in FIG. 11 (screen import screen (reference plane 383, A plane 384, B plane 385 with respect to CAD FIG. 370)) And delete dimensions that are not related to measurement)
-Chart 488 for measurement (from CAD drawing 370, only reference point 361, reference auxiliary line 362, measurement points 363 to 367 are used, and a line indicating the allowable writing range is added to the measurement point. If the measurement point is a circle, Also add a centerline).

  The measurement information created in this way is stored with a file name obtained by adding a serial number to the CAD diagram number. After this storage is completed, the measurement information registration screen D is replaced and displayed as the screen display 350b of the display monitor 16 as shown in FIG. 11 (step 306). In this way, a measurement information diagram 386 is displayed in place of the CAD diagram 370 on the screen display 350b on which the measurement information registration screen D is displayed, and the information capture area information 382 and the measurement information tree display portion are displayed in the information frame 352. 380, a measurement information pull-down menu 381 is provided, and each registered value registered according to the flow of FIG. 9 is displayed as shown.

  In order to confirm the registered measurement information, the chart measurement information registration application is activated to display the measurement information registration screen C in FIG. 10, and then the measurement information button 357 in the information frame 352 is moved with the mouse 17. Click to switch to the measurement information registration screen D. Then, a desired measurement information file name is clicked with the mouse 17 in the measurement information tree display portion 380 and the measurement information pull-down menu 381 in the information frame 352. When changing or adding a measurement location, click the measurement location or addition location on the measurement information diagram 370 on the main screen 351 with the mouse 17, click the measurement location button 355, and then register. Click button 356. To return from the measurement information registration screen D (screen display 350b) to the measurement information registration screen C (screen display 350a), the CAD button 358 in the information frame 352 is clicked with the mouse 17.

  When the measurement information registration operation is completed as described above, the inspection object is then measured according to the flow shown in FIG. The details of the measurement will be described with reference to FIGS.

  In order to perform this measurement, first, the measurement application of the computer main body 15 is activated (step 401). As a result, the measurement screen 450 shown in FIG. 13 is displayed on the screen of the display monitor 16, and the measurement information in which the measurement target information is stored by the measurement information tree display unit 380 and the measurement information pull-down menu 381 is displayed. Click the file name with the mouse 17 to read the measurement information. When the measurement information is read in this way, a number indicating the number of captured screens is displayed in the image capturing surface number frame 454 (step 402).

  Then, a projection lens (for example, the projection lens 4) that matches the size of the inspection object 5 and the image range to be captured is selected and attached to the projector main body 1. Then, the magnification of the projection lens 4 attached in this way is set by the mouse 17 in the projection lens magnification setting pull-down menu 453 (step 403). Then, in the computer main body 15, the measurement information is corrected based on the magnification data (focus depth data) of the projection lens 4. The measurement chart 488 corrected in this way is displayed on the overlay of the chart measurement main image 451 (step 404).

  Next, the computer main body 15 issues a command to shoot and transmit a quasi-moving image to the TV camera 2 and displays the quasi-moving image transmitted from the TV camera 2 on the chart measurement main screen 451 in response to this command. (Step 405). Then, the inspection object 5 is placed on the stage 6, and the operator manually operates the stage Z-axis drive knob 10 while looking at the chart measurement main screen 451 to focus on the reference plane 383. Further, the stage X-axis drive knob 23 and the stage Y-axis drive knob 24 are manually operated so that the measurement point 363 of the measurement chart 488 is adjusted so that the image of the circle 490 of the captured image approximately overlaps (step 406). .

  Then, the measurement start button 455 at the lower right of the measurement screen 450 is clicked with the mouse 17 (step 407). As a result, the computer main body 15 displays no measurement chart 488 on the overlay of the chart measurement main image 451, issues a command to the TV camera 2 to capture a still image and transfer the captured image, to the reference plane 383. Image processing for reading an in-focus image (reference plane image 481 shown in FIG. 15) and deleting a softly focused part (a shaded portion of the reference plane image 481 in FIG. 15) from the reference plane image 481 To obtain a reference plane image processed image 484 shown in FIG. 15 (step 408).

  As a result, an image (reference image processed image 484) that is in focus (focused) on the reference plane 383 and within the focal depth range of the projection lens 4 is obtained. The direction of movement to the next capture screen is instructed along with the measurement information corrected in. In this example, since the next capture screen is the A plane 384 shown in FIG. 11, “Stage DOWN” 462 shown in FIG. 14 is displayed in the stage movement information frame 452 at the upper right of the measurement screen 450. At this time, an instruction to send the quasi-moving image to the TV camera 2 from the computer main body 15 is issued again, and the quasi-moving image from the TV camera 2 is displayed on the chart measurement main screen 451.

  When the measurer turns the stage Z-axis drive knob 10 in the direction of lowering the stage 6 in accordance with the indication “stage DOWN” 462, the stage 6 is moved vertically downward accordingly. At this time, the computer main unit 15 monitors the position data from the stage Z-axis position sensor 11, and when the position reaches the position where the next capture screen is in focus, the stage movement information frame 452 displays "Stage stop" 460. (Step 409). After displaying “Stage Stop” 460 in the stage movement information frame 452, the computer main body 15 stops within a predetermined height range (a range where the A plane 384 is focused (focused)). It is confirmed by looking at the position data of the stage Z-axis position sensor 11. When it is out of the predetermined height range, the direction of movement of the stage movement information frame 452 is changed so as to move the stage 6 within this range, and the operator can operate the stage Z-axis drive knob 10 again. This is repeated until it stops within a predetermined range.

  When the stage 6 is positioned within a predetermined height range, that is, when the position reaches the position where the A-plane 384 is in focus, the computer main body 15 captures a still image and transfers the captured image to the TV camera 2 , Read the image of the A surface 384 (A surface image 482 shown in FIG. 15) and delete the unfocused portion (the shaded portion of the A surface image 482 in FIG. 15) from this A surface image 482 Image processing 485 shown in FIG. 15 is performed to obtain the post-A-side image processed image 485 (step 410).

  Next, the process proceeds to step 411, where it is determined whether the number of captured images has reached the measurement information value (after correction). In this example, since the measurement information value has not yet been reached and the B surface 385 remains, the process returns to step 409 again, and the processing of step 410 is performed in the same manner as in the case of the A surface. That is, after the stage 6 is moved to a position where the B surface 385 is in focus, an image of the B surface 385 (B surface image 483) is taken in, and a sweet portion is deleted to obtain an image 486 after B surface image processing. .

  When imaging and capturing of the entire screen is completed in this way, the process proceeds from step 411 to step 412, and images (after the reference surface image processing) subjected to image processing on each surface (reference surface 383, A surface 384 and B surface 385). The image 484, the A-side image processed image 485 and the B-side image processed image 486) are combined into one image to create a combined image 487 (step 412). Further, a composite image reference point 491 and a composite image reference auxiliary line 492 are calculated based on the composite image 487.

  Then, the position of the measurement chart 488 is automatically adjusted so that the reference point 361 of the measurement chart 488 and the composite image reference point 491 overlap, and the composite image reference auxiliary line 492 and the reference auxiliary line 362 of the measurement chart approximately overlap. The chart measurement main image 451 is displayed on the overlay (step 413). When the composite image 487 and the measurement chart 488 are deviated in the rotation direction, the rotation button 457 at the lower right of the measurement screen 450 is clicked with the mouse 17 for adjustment.

  In order to save the measurement result in this way, the save button 456 at the lower right of the measurement screen 450 is clicked with the mouse 17. By this operation, the composite image 487 and the measurement chart 488 are integrated to create a storage measurement image 489. The created save image 489 is saved with the associated designated file name (step 414).

  As can be seen from the above description, if the three-dimensional shape inspection machine according to the second embodiment is used, the worker who performs the measurement work starts the measurement information registration application and registers the measurement information according to the flow shown in FIG. After performing the work, the measurement application is started, the projection lens is exchanged and exchange data is entered, the stage Z-axis drive knob 10 is manually operated to focus on the reference plane 383, and the stage X-axis drive knob 23 If the stage Y-axis drive knob 24 is manually operated to adjust the measurement point 363 of the measurement chart 488 and the image of the circle 490 of the captured image to approximately overlap each other, the measurement start button 455 is thereafter set. Just click to start measurement. Also in this measurement, the operator only has to manually operate the stage Z-axis drive knob 10 based on the display of the stage movement information frame 452, and thereafter, all measurements are automatically performed by the computer main body 15.

  As a result, in the chart measurement main image 451, a measurement chart 488 is displayed so as to be overlaid (overlaid) on the composite image 487 obtained by the automatic measurement in this way, and based on the deviation between the two. Thus, the shape of the inspection object 5 can be inspected. In step 305 in FIG. 9, a measurement chart 488 is created based on the dimensional tolerance, and the dimensional tolerance range is displayed (colored display) on the measurement chart 488. Therefore, it is possible to easily perform the shape inspection by checking whether or not the shape line of the composite image 487 is within the tolerance range of the measurement chart 488.

  That is, when measuring charts of inspected objects having different measurement surfaces, if the image is taken in accordance with the instructions displayed on the monitor, an image display in which all the measurement points are in focus can be obtained. Comparison is facilitated, the measurement operation is simple, the measurement time can be shortened, and measurement omissions can be eliminated. In addition, since an image obtained by synthesizing an image in which all the measurement points are in focus and a size image can be stored, an operation such as synthesizing the captured image after measurement is not necessary.

Next, a third embodiment of the present invention will be described. In the third embodiment, a three-dimensional shape inspection machine shown in FIG. 16 is used. This three-dimensional shape inspection machine has only a configuration having a stage XY axis position sensor 25 on the stage 6 and a stage XY axis position sensor USB cable 26 for sending detection information from these sensors to the computer main body 15. Unlike the three-dimensional shape inspection machine of FIG. 1, the other configurations are the same.

  In the three-dimensional shape inspection machine (FIG. 1) used in the first and second embodiments, the stage X-axis drive knob 23 and the stage Y-axis drive knob 24 perform adjustments so that the measurement location of the inspection object is included in the image. For this reason, it was not used as measurement information. However, when the three-dimensional shape inspection machine shown in FIG. 16 is used, the movement information in the X-axis and Y-axis directions of the stage 6 by the operation of the stage X-axis drive knob 23 and the stage Y-axis drive knob 24 is the stage X−. While being detected by the Y-axis position sensor 25, the detection information is sent to the computer main body 15 via the stage XY-axis position sensor USB cable 26.

  As a result, in the computer main body 15, based on the sent movement information of the stage 6 in the X-axis and Y-axis directions, the range to be imaged on the image sensor 3 of the TV camera 2 with respect to the inspection object 5 is exceeded. It is possible to inspect the shape and inspect the shape. In other words, all measurements can be performed by capturing an image according to the instructions displayed on the monitor, even for objects to be measured that have different measurement surfaces that do not fit in the angle of view of the TV camera at the same time. Since an image that is in focus at a location is displayed, measurement leakage can be prevented. In chart measurement, measurement is possible even if the reference point and the measurement location are not on the same screen.

  In the first and second embodiments, the stage Z-axis drive knob 10 is operated based on the display of the stage movement information frame (display of “stage DOWN”, “stage UP”, “stage stop”, etc.). Although the work has been performed manually, it may be automated. That is, the Z-axis drive unit 12 of the stage 6 is motorized, and automatically based on the movement direction and movement amount instructions from the computer main body 15 based on the Z-axis direction position data detected by the stage Z-axis sensor 11. Movement control may be performed. In this way, the computer main body 15 can automate the operations from the reference plane image capture (step 206, step 408) to the composite image display (step 215, step 413), thereby facilitating the measurement operation and reducing the measurement time. Can be shortened.

  In the above description, an example of a configuration in which the stage 6 is moved up and down (moved in the Z direction) is shown. However, the stage 6 is fixedly held, and the imaging system, that is, the projection lens 4 and the TV camera 2 are replaced. It may be moved up and down.

It is a schematic explanatory drawing which shows the structure of the solid shape inspection machine which concerns on the 1st Embodiment of this invention. In 1st Embodiment, it is a flowchart which shows the content of the measurement information registration operation | movement for to-be-inspected object. It is explanatory drawing which shows the structure of the setting screen for registering CAD data acquisition and measurement information in the measurement information registration for inspecting objects which concerns on 1st Embodiment. It is explanatory drawing which shows the structure of the registered measurement information display screen in the measurement information registration for inspected objects which concerns on 1st Embodiment. 5 is a flowchart showing the content of a measurement operation in the first embodiment. It is explanatory drawing which shows the structure of a measurement screen in the measurement operation | movement of the to-be-inspected object which concerns on 1st Embodiment. It is explanatory drawing which shows the stage movement instruction | indication display content in the measurement operation | movement of the to-be-inspected object which concerns on 1st Embodiment. It is explanatory drawing which shows an image processing process in the measurement operation | movement of the to-be-inspected object which concerns on 1st Embodiment. In 2nd Embodiment, it is a flowchart which shows the content of the measurement information (chart) registration operation | movement for to-be-inspected object. It is explanatory drawing which shows the structure of the setting screen for registering CAD data acquisition and measurement information in the measurement information (chart) registration for inspected objects which concerns on 2nd Embodiment. FIG. 10 is an explanatory diagram illustrating a configuration of a registered measurement information display screen in registration of measurement information (chart) for an inspection object according to a second embodiment. In 2nd Embodiment, it is a flowchart which shows the content of the chart measurement operation | movement. It is explanatory drawing which shows the structure of a chart measurement screen in the measurement operation | movement of the to-be-inspected object which concerns on 2nd Embodiment. It is explanatory drawing which shows the stage movement instruction | indication display content in the measurement operation | movement of the to-be-inspected object which concerns on 2nd Embodiment. It is explanatory drawing which shows an image processing process in the measurement operation | movement of the to-be-inspected object which concerns on 2nd Embodiment. It is a schematic explanatory drawing which shows the structure of the solid shape inspection machine which concerns on different embodiment of this invention.

Explanation of symbols

PU Projection imaging unit CU Computer unit 1 Projector body 2 TV camera 3 Imaging element 4, 22 Projection lens 5 Inspection object 6 Stage 10 Stage Z axis drive knob 12 Stage Z axis drive unit 11 Stage Z axis position sensor 15 Computer body 16 Display monitor 17 Mouse 19 Network 20 CAD data memory 21 Media 22 Projection lens with different magnifications 23 Stage X axis drive knob 24 Stage Y axis drive knob 25 Stage X, Y axis position sensor

Claims (7)

A mounting table for mounting an object to be inspected based on predetermined shape data;
A projection lens that is provided above and above the mounting table so as to be vertically opposed to form an image of an object to be inspected placed on the mounting table; and an imaging element that captures an image formed by the projection lens. A configured imaging system;
A moving mechanism for moving the mounting table relative to the imaging system in the vertical direction;
A vertical position sensor for detecting a vertical relative movement position of the mounting table;
A display device for displaying an image of the object imaged by the imaging system;
A control system for instructing the operation of the moving mechanism based on a detection signal from the vertical position sensor, and for controlling the image of the inspection object imaged by the imaging system to be displayed on the display device. Configured
The control system is
Based on the shape data of the inspected object placed on the mounting table and the focal depth of the projection lens, the planar image of the inspected object is divided into a plurality of images corresponding to the focal depth, and the plural An imaging position setting function unit for obtaining, as imaging positions, a plurality of vertical relative movement positions of the mounting table necessary for focusing and imaging each of the images;
The operation of the moving mechanism is instructed to position the mounting table at each of the plurality of imaging positions, and an image of the inspection object placed on the mounting table by the imaging system at each of the plurality of imaging positions. An imaging instruction function unit for imaging
An image extraction / synthesis function that extracts and synthesizes in-focus portions from images taken at the plurality of imaging positions by the imaging system, creates a clear image that is entirely in focus, and displays the image on the display device 3D shape inspection machine characterized by having a part. The moving mechanism is configured to be manually operated,
The imaging instruction function unit has a function of instructing a manual operation direction for relatively moving the mounting table to the imaging position, and a function of displaying that it is positioned at the imaging position. The three-dimensional shape inspection machine according to 1.   The movement mechanism is controlled to operate according to an instruction from the imaging instruction function unit, and the mounting table is sequentially moved relative to each of the plurality of imaging positions, and according to an instruction from the imaging instruction function unit. The three-dimensional shape inspection machine according to claim 1, wherein an image of an object to be inspected placed on a table is configured to be imaged at each imaging position by the imaging system. The moving mechanism is configured to be capable of relatively moving the mounting table in the front-rear and left-right directions with respect to the imaging system,
2. The structure according to claim 1, wherein a shape of the object to be inspected located outside an imaging field of view of the imaging system can be imaged by moving the mounting table in the front-rear and left-right directions by the moving mechanism. Three-dimensional shape inspection machine in any one of -3. The control system is
A shape display function for reading shape data of an inspection object placed on the mounting table and displaying on the display device a shape diagram when the inspection object placed on the mounting table is viewed from the imaging system And
A measurement point setting function unit for defining a measurement point by an external instruction in the shape diagram displayed on the display device by the shape display function unit;
A measurement result display function unit that displays the measurement result of the measurement location set by the measurement location setting function unit on the image of the inspection object displayed on the display device by the image extraction / synthesis function unit; The three-dimensional shape inspection machine according to any one of claims 1 to 4, wherein The control system is
A chart calculation function unit for obtaining an outer shape chart when the shape of the inspection object placed on the mounting table is read and the inspection object placed on the mounting table is viewed from the imaging system;
A chart display function unit that superimposes and displays the outer shape chart obtained by the chart calculation function unit on the image of the inspection object displayed on the display device by the image extraction / synthesis function unit. The three-dimensional shape inspection machine according to any one of claims 1 to 4.   The three-dimensional shape inspection machine according to claim 6, wherein the chart calculation function unit is configured to obtain an outer shape chart having an allowable range when the inspection object is made based on the shape data. .

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