JP2009300124A - Image measuring device, image measuring method, and computer program - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an image measuring device, an image measuring method, and a computer program enabling an operator to select the optimum illumination system without a skill, and to measure a desired shape highly accurately. <P>SOLUTION: The first image data acquired by imaging a measuring object by an imaging means using an epi-illumination means, and the second image data acquired by imaging the measuring object approximately at the same position by the imaging means by using a transmission illumination means are stored. The first image data is displayed, and designation of a measuring position is accepted on the displayed first image data. The first image data and the second image data is read out from a storage means corresponding to the designated measuring position, and position data is acquired based on the read-out first and second image data. Measurement on the designated measuring position is executed based on the acquired position data. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an image measurement apparatus, an image measurement method, and a computer program for measuring a desired shape of a measurement object based on captured image data.

  Conventionally, an object to be measured is imaged by an imaging device, and an edge portion of the object to be measured is detected and a dimension of a predetermined portion is measured based on an electrical signal photoelectrically converted according to a light intensity distribution of the captured image data Many image measuring devices have been developed. When an image is picked up by the image pickup device, a difference occurs in the image data to be picked up depending on from which direction the light is applied to the measurement object.

  That is, in the so-called epi-illumination device that irradiates light from the direction in which the imaging device is installed on the measurement object, it is possible to acquire image data that shows the surface of the measurement object in detail. In addition, with a so-called transmission illumination device that irradiates light from the opposite direction to the imaging device with the measurement object sandwiched between them, it is not possible to image irregularities, patterns, etc. on the surface of the measurement object, but a clear contour of the measurement object Image data having lines can be acquired.

For example, Patent Document 1 discloses a coordinate measurement system that switches between transmitted illumination, epi-illumination, and divided illumination to acquire an image optimal for measurement and measures the shape of an inspection object. Patent Document 2 discloses an image measuring apparatus that illuminates an inspection object with transmitted illumination or epi-illumination, forms an image of the inspection object on a CCD camera, and measures the shape of the inspection object. Both are provided with transmitted illumination and epi-illumination, and the shape of the inspection object is measured using either one.
Japanese Patent Laid-Open No. 08-314997 Japanese Patent Laid-Open No. 10-232117

  In the systems and apparatuses disclosed in Patent Documents 1 and 2 described above, skill is required to select an appropriate illumination method depending on the shape, color, material, and the like of the inspection object. That is, when an epi-illumination device is used, a measurement error is likely to occur due to the influence of reflected light depending on the edge shape, color, material, etc. of the inspection object. On the other hand, when using a transmission illumination device, stable contour detection is possible with little influence from the edge shape, color, material, etc. of the inspection object. Cannot be imaged, and the distance between them cannot be measured. Therefore, there is a problem that considerable skill is required for the operator to use the illumination method properly based on the part to be measured, the required measurement accuracy, and the like.

  In particular, when performing a sampling inspection such as a sampling inspection, it is unlikely that the operator is proficient with the image measurement device, depending on the position on the image measurement device where the inspection object is placed and measured. Therefore, it is necessary to avoid measurement errors as much as possible.

  The present invention has been made in view of the above circumstances, and allows an operator to select an optimal illumination method without requiring skill, and to measure a desired shape with high accuracy. An object is to provide a measurement method and a computer program.

  In order to achieve the above object, an image measuring apparatus according to a first aspect of the present invention includes an imaging unit that captures an image of a measurement object, an epi-illumination unit that illuminates the surface of the measurement object from the installation side of the imaging unit, and a measurement In an image measurement device comprising a transmission illumination means for illuminating an object from the side opposite to the installation side of the imaging means, first image data obtained by imaging the measurement object with the imaging means using the epi-illumination means; Storage means for storing second image data obtained by imaging the measurement object at substantially the same position by the imaging means using the transmitted illumination means, display means for displaying the first image data, and display A designation receiving means for receiving the designation of the measurement position on the first image data that has been set, and the storage of the first image data or the second image data in accordance with the measurement position that has been designated by the designation receiving means. hand The position acquisition means for acquiring position data based on the read first image data or the second image data, and the measurement at the measurement position where the designation is received is executed based on the acquired position data. And a measuring means that performs the above-described measurement.

  In the image measuring apparatus according to the second invention, in the first invention, the storage means further includes third image data obtained by aligning and synthesizing the first image data and the second image data. Stored, and the display means displays the first image data or the third image data.

  In the image measuring device according to a third aspect of the present invention, in the first or second aspect, the position acquisition unit is an edge portion where the measurement position received by the designation receiving unit is an edge portion indicating the outer shape of the measurement object. A determination means for determining whether or not, when the determination means determines that it is an edge portion of the measurement object, position data is acquired based on the second image data, and is determined not to be an edge portion In this case, the position data is acquired based on the first image data.

  The image measuring apparatus according to a fourth aspect of the present invention is the image measuring apparatus according to the third aspect, wherein, when the position determining unit determines that the determining unit is an edge portion of a measurement object, the first image data and the second Means is provided for calculating edge strength based on the second image data, and position data is obtained based on image data having a larger calculated edge strength.

  Next, in order to achieve the above object, an image measuring apparatus according to a fifth aspect of the present invention is an imaging unit that captures an image of a measurement object, and an epi-illumination unit that illuminates the surface of the measurement object from the installation side of the imaging unit. And a transmission illumination means for illuminating the measurement object from the side opposite to the installation side of the imaging means, a first image obtained by imaging the measurement object with the imaging means using the epi-illumination means Alignment of the data, second image data obtained by imaging the measurement object at substantially the same position by the imaging means using the transmitted illumination means, and the first image data and the second image data Storage means for storing the synthesized third image data, display means for displaying the first image data, designation receiving means for accepting designation of the measurement position on the displayed first image data, , The designated reception The third image data is read from the storage unit in accordance with the measurement position received designation in the stage, the position acquisition unit acquires the position data based on the read third image data, and the acquired position data And measuring means for executing measurement at the measurement position where the designation has been received.

  An image measuring apparatus according to a sixth invention is characterized in that, in the fifth invention, the display means displays the first image data or the third image data.

  Next, in order to achieve the above object, an image measuring apparatus according to a seventh aspect of the present invention includes an imaging unit that captures an image of a measurement object, and an epi-illumination unit that illuminates the surface of the measurement object from the installation side of the imaging unit. And a transmission illumination means for illuminating the measurement object from the side opposite to the installation side of the imaging means, a first image obtained by imaging the measurement object with the imaging means using the epi-illumination means Storage means for storing data and second image data obtained by imaging the measurement object at substantially the same position by the imaging means using the transmitted illumination means; and display means for displaying the first image data And a designation accepting means for accepting designation of a measurement position on the displayed first image data, and a measurement position for which designation is accepted based on the stored first image data and second image data In Edge extracting means for performing edge extraction, first determining means for determining whether or not the edge extraction of the first image data has been normally completed by the edge extracting means, and the edge extracting means for performing the first extraction Second determination means for determining whether or not the edge extraction of the second image data has been normally completed, and the first image according to the determination results of the first determination means and the second determination means. Position acquisition means for acquiring position data based on the data or the second image data, and measurement means for performing measurement at a measurement position for which designation has been received based on the acquired position data. When the means determines that the first determination unit has ended normally and the second determination unit determines that the processing has not ended normally, the unit obtains position data based on the first image data, Second judger If the first determination means determines that the process has not been completed normally, position data is acquired based on the second image data, and the first determination means and the first determination means If it is determined by the second determination means that the processing has been normally completed, the respective edge strengths are calculated, the image data having a larger calculated edge strength is selected, and the position data is obtained based on the selected image data. It is made to do so.

  According to an eighth aspect of the present invention, in the image measurement apparatus according to any one of the first to seventh aspects, the display means displays image data that is a basis of measurement by the measurement means. It is characterized by that.

  Next, in order to achieve the above object, an image measuring apparatus according to a ninth aspect of the present invention is an imaging unit that captures an image of a measurement object, and an epi-illumination unit that illuminates the surface of the measurement object from the installation side of the imaging unit. And a transmission illumination means for illuminating the measurement object from the side opposite to the installation side of the imaging means, a first image obtained by imaging the measurement object with the imaging means using the epi-illumination means Alignment of the data, second image data obtained by imaging the measurement object at substantially the same position by the imaging means using the transmitted illumination means, and the first image data and the second image data Storage means for storing the synthesized third image data, display means for displaying the first image data, designation receiving means for accepting designation of the measurement position on the displayed first image data, The first Selection accepting means for accepting selection of any one of image data, second image data, and third image data; the first image data accepting the selection by the selection accepting means; and the second image One of the data and the third image data is read from the storage means, and position data is acquired based on the read first image data, second image data, or third image data. It is characterized by comprising position acquisition means and measurement means for executing measurement at a measurement position for which designation has been received based on the acquired position data.

  An image measuring apparatus according to a tenth invention is characterized in that, in the ninth invention, the selection receiving means receives a selection from a displayed screen.

  An image measuring apparatus according to an eleventh aspect of the present invention is the image measuring apparatus according to any one of the seventh, ninth, and tenth aspects, wherein the display means displays the first image data or the third image data. It is made to do so.

  Next, in order to achieve the above object, an image measurement method according to a twelfth aspect of the present invention is an imaging means for capturing an image of a measurement object, and an epi-illumination means for illuminating the surface of the measurement object from the installation side of the imaging means. And an image measurement apparatus comprising a transmission illumination means for illuminating a measurement object from the opposite side of the installation side of the imaging means, wherein the imaging means uses the epi-illumination means. Storing first image data obtained by imaging a measurement object and second image data obtained by imaging the measurement object at substantially the same position by the imaging means using the transmission illumination means; The image data is displayed, designation of the measurement position is received on the displayed first image data, and the first image data or the second image data is read and read according to the measurement position at which the designation is accepted. Said It acquires position data based on the first image data or the second image data, based on the obtained position data, and executes the measurement in accepting the designated measurement location.

  An image measurement method according to a thirteenth aspect of the invention is the image measurement method according to the twelfth aspect of the invention, further storing third image data obtained by aligning and synthesizing the first image data and the second image data. One image data or the third image data is displayed.

  The image measurement method according to the fourteenth invention is the image measurement method according to the twelfth or thirteenth invention, wherein it is determined whether or not the designated measurement position is an edge portion indicating the outer shape of the measurement object. When it is determined that it is a portion, position data is acquired based on the second image data, and when it is determined that it is not an edge portion, position data is acquired based on the first image data. To do.

  Further, in the image measurement method according to the fifteenth aspect, in the fourteenth aspect, when it is determined that the measurement object is an edge portion, an edge strength is calculated based on the first image data and the second image data. Then, the position data is acquired based on image data having a larger calculated edge strength.

  Next, in order to achieve the above object, an image measuring method according to the sixteenth aspect of the present invention is an imaging means for capturing an image of a measurement object, and an epi-illumination means for illuminating the surface of the measurement object from the installation side of the imaging means. And an image measurement apparatus comprising a transmission illumination means for illuminating a measurement object from the opposite side of the installation side of the imaging means, wherein the imaging means uses the epi-illumination means. First image data obtained by imaging a measurement object, second image data obtained by imaging the measurement object at substantially the same position by the imaging means using the transmission illumination means, and the first image data The third image data obtained by aligning and synthesizing the second image data is stored, the first image data is displayed, and the measurement position designation is accepted on the displayed first image data. , Accept specification The third image data is read according to the measurement position, the position data is acquired based on the read third image data, and the measurement is performed at the measurement position where the designation is received based on the acquired position data. It is characterized by doing.

  An image measurement method according to a seventeenth aspect of the invention is the image display method according to the sixteenth aspect, wherein the first image data or the third image data is displayed.

  Next, in order to achieve the above object, an image measuring method according to an eighteenth aspect of the present invention is an imaging unit that captures an image of a measurement object, and an epi-illumination unit that illuminates the surface of the measurement object from the installation side of the imaging unit. And an image measurement apparatus comprising a transmission illumination means for illuminating a measurement object from the opposite side of the installation side of the imaging means, wherein the imaging means uses the epi-illumination means. Storing first image data obtained by imaging a measurement object and second image data obtained by imaging the measurement object at substantially the same position by the imaging means using the transmission illumination means; Measurement position that displays image data, accepts designation of a measurement position on the displayed first image data, and accepts designation based on the stored first image data and second image data In Execute extraction, determine whether the edge extraction of the first image data has been completed normally, determine whether the edge extraction of the second image data has been completed normally, In response, position data is acquired based on the first image data or the second image data, and measurement is performed at the measurement position where the designation is received based on the acquired position data. When it is determined that the edge extraction of the image data has ended normally and the edge extraction of the second image data has not ended normally, position data is acquired based on the first image data, If it is determined that the edge extraction of the second image data has been completed normally and the edge extraction of the first image data has not been completed normally, position data is acquired based on the second image data And before When it is determined that the edge extraction of the first image data and the edge extraction of the second image data have been normally completed, the respective edge strengths are calculated, and the image data having a larger calculated edge strength is selected. Then, the position data is acquired based on the selected image data.

  An image measurement method according to a nineteenth invention is characterized in that, in any one of the twelfth to eighteenth inventions, image data serving as a basis for measurement is displayed.

  Next, in order to achieve the above object, an image measuring method according to the twentieth aspect of the present invention is an imaging means for capturing an image of a measurement object, and an epi-illumination means for illuminating the surface of the measurement object from the installation side of the imaging means. And an image measurement apparatus comprising a transmission illumination means for illuminating a measurement object from the opposite side of the installation side of the imaging means, wherein the imaging means uses the epi-illumination means. First image data obtained by imaging a measurement object, second image data obtained by imaging the measurement object at substantially the same position by the imaging means using the transmission illumination means, and the first image data The third image data obtained by aligning and synthesizing the second image data is stored, the first image data is displayed, and the measurement position designation is accepted on the displayed first image data. The first image Data, the second image data, and the third image data are selected, and the first image data, the second image data, and the third image data that are selected are received. Any one is read, position data is acquired based on the read first image data, second image data, or third image data, and designation is accepted based on the acquired position data The measurement at the measurement position is executed.

  An image measuring method according to a twenty-first aspect is characterized in that in the twentieth aspect, a selection is received from a displayed screen.

  An image measurement method according to a twenty-second invention is characterized in that, in any one of the eighteenth, twentieth and twenty-first inventions, the first image data or the third image data is displayed. To do.

  Next, in order to achieve the above object, a computer program according to a twenty-third aspect of the present invention includes an imaging unit that captures an image of a measurement object, and an epi-illumination unit that illuminates the surface of the measurement object from the installation side of the imaging unit. In a computer program that can be executed by an image measurement apparatus that includes a transmission illumination unit that illuminates a measurement object from a side opposite to the installation side of the imaging unit, the image measurement device is used by using the incident illumination unit. Storage for storing first image data obtained by imaging the measurement object by the imaging means and second image data obtained by imaging the measurement object by the imaging means at substantially the same position using the transmission illumination means. Means for displaying the first image data; designation accepting means for accepting designation of a measurement position on the displayed first image data; accepting designation by the designation accepting means The position where the first image data or the second image data is read out from the storage unit according to the measured position and the position data is acquired based on the read out first image data or the second image data Based on the acquisition means and the acquired position data, it is made to function as a measurement means for executing measurement at a measurement position for which designation has been received.

  According to a twenty-fourth aspect of the present invention, in the twenty-third aspect, the computer program stores the third image data obtained by aligning and synthesizing the first image data and the second image data. The display means functions as means for displaying the first image data or the third image data.

  A computer program according to a twenty-fifth aspect of the present invention is the computer program according to the twenty-third or twenty-fourth aspect, wherein the position acquisition means is the edge portion indicating the outer shape of the measurement object. If it is determined that the determination means, and the determination means is an edge portion of the measurement object, position data is acquired based on the second image data, and if it is determined that it is not an edge portion, It is made to function as a means to acquire position data based on said 1st image data.

  According to a twenty-sixth aspect of the present invention, in the twenty-fifth aspect of the invention, the computer program according to the twenty-fifth aspect of the present invention is configured so that the position acquisition means And functioning as means for calculating edge strength based on the image data and means for acquiring position data based on image data having a larger calculated edge strength.

  Next, in order to achieve the above object, a computer program according to a twenty-seventh aspect of the present invention is an imaging means for capturing an image of a measurement object, and an epi-illumination means for illuminating the surface of the measurement object from the installation side of the imaging means. In a computer program that can be executed by an image measurement apparatus that includes a transmission illumination unit that illuminates a measurement object from a side opposite to the installation side of the imaging unit, the image measurement device is used by using the incident illumination unit. First image data obtained by imaging the measurement object by the imaging means, second image data obtained by imaging the measurement object by the imaging means using the transmission illumination means at substantially the same position, and the first Storage means for storing the third image data obtained by aligning and synthesizing the image data and the second image data, a display means for displaying the first image data, A designation receiving means for receiving designation of a measurement position on one image data, the third image data read out from the storage means in accordance with the measurement position designated by the designation receiving means, and the read third image data It is made to function as a position acquisition means which acquires position data based on, and a measurement means which performs measurement in the measurement position which received specification based on acquired position data.

  According to a twenty-eighth aspect of the present invention, in the twenty-seventh aspect, the computer program causes the display unit to function as a unit for displaying the first image data or the third image data.

  Next, in order to achieve the above object, a computer program according to a twenty-ninth aspect of the present invention provides an imaging means for capturing an image of a measurement object, and an epi-illumination means for illuminating the surface of the measurement object from the installation side of the imaging means. In a computer program that can be executed by an image measurement apparatus that includes a transmission illumination unit that illuminates a measurement object from a side opposite to the installation side of the imaging unit, the image measurement device is used by using the incident illumination unit. Storage for storing first image data obtained by imaging the measurement object by the imaging means and second image data obtained by imaging the measurement object by the imaging means at substantially the same position using the transmission illumination means. Means, display means for displaying the first image data, designation accepting means for accepting designation of the measurement position on the displayed first image data, and the stored first image Edge extraction means for performing edge extraction at the measurement position where the designation is received based on the data and the second image data, and whether the edge extraction of the first image data is normally completed by the edge extraction means First judgment means for judging whether or not, second judgment means for judging whether or not edge extraction of the second image data has been normally completed by the edge extraction means, the first judgment means, and the According to the determination result of the second determination means, the position acquisition means for acquiring the position data based on the first image data or the second image data, and the designation received based on the acquired position data It is made to function as a measurement unit that performs measurement at a measurement position, and the position acquisition unit is determined to have been normally terminated by the first determination unit, and is not normally terminated by the second determination unit. In the case where it is determined that the means for obtaining the position data based on the first image data, the second determining means has ended normally, and the first determining means determines that it has not ended normally, Based on the second image data, when the position data is obtained by the obtaining means, and the first judging means and the second judging means are judged to have ended normally, the respective edge strengths are calculated and calculated. The image data having a higher edge strength is selected and functioned as means for acquiring position data based on the selected image data.

  A computer program according to a thirtieth aspect of the invention is the computer program according to any one of the twenty-third to twenty-ninth aspects, wherein the display unit functions as a unit that displays image data that is a basis of measurement by the measurement unit. It is characterized by.

  Next, in order to achieve the above object, a computer program according to the thirty-first invention comprises an imaging means for capturing an image of a measurement object, and an epi-illumination means for illuminating the surface of the measurement object from the installation side of the imaging means. In a computer program that can be executed by an image measurement apparatus that includes a transmission illumination unit that illuminates a measurement object from a side opposite to the installation side of the imaging unit, the image measurement device is used by using the incident illumination unit. First image data obtained by imaging the measurement object by the imaging means, second image data obtained by imaging the measurement object by the imaging means using the transmission illumination means at substantially the same position, and the first Storage means for storing the third image data obtained by aligning and synthesizing the image data and the second image data, a display means for displaying the first image data, A designation accepting means for accepting designation of a measurement position on one image data, a selection accepting means for accepting a selection of any one of the first image data, the second image data, and the third image data, the selection Any one of the first image data, the second image data, and the third image data whose selection is received by the reception unit is read from the storage unit, and the read first image data, the first image data, Function as position acquisition means for acquiring position data based on the second image data or the third image data, and measurement means for executing measurement at the measurement position where the designation is received based on the acquired position data. It is characterized by.

  According to a thirty-second invention, the computer program according to the thirty-second invention is characterized in that the selection receiving means functions as a means for receiving a selection from a displayed screen.

  A computer program according to a thirty-third invention displays the first image data or the third image data on the display means in any one of the twenty-ninth, thirty-first and thirty-second inventions. It is made to function as a means.

  In the first invention, the twelfth invention, and the twenty-third invention, the first image data obtained by imaging the measurement object with the imaging means using the epi-illumination means and the measurement object substantially the same with the imaging means using the transmission illumination means. Second image data captured at the position is stored. First image data is displayed, and designation of a measurement position is received on the displayed first image data. The first image data or the second image data is read according to the measurement position for which the designation has been received, and the position data is acquired based on the read first image data or second image data. Based on the acquired position data, the measurement at the measurement position where the designation is accepted is executed. By displaying the first image data, surface irregularities, patterns, patterns, etc. on the measurement object can be specified as measurement objects, and desired measurements can be easily and accurately performed based on the displayed image. can do. In addition, for example, when the designated measurement position is a contour portion indicating an outer shape, the second image data is controlled, and if not, the first image data is controlled to be selected. Measurement can be performed with high accuracy without requiring skill in selecting image data.

  In the third invention, the fourteenth invention, and the twenty-fifth invention, when it is determined whether or not the measurement position at which the designation is received is an edge portion indicating the outer shape of the measurement object, and it is determined that the measurement position is the edge portion of the measurement object If the position data is acquired based on the second image data and it is determined that the position data is not an edge portion, the position data is acquired based on the first image data. If the specified measurement position is a contour portion showing the outer shape, the second image data that can clearly grasp the outer shape line is recognized, otherwise the surface irregularities, patterns, patterns, etc. are recognized. By controlling to select each of the first image data that can be obtained, it is possible to measure with high accuracy without requiring skill in selecting image data for measurement.

  In 4th invention, 15th invention, and 26th invention, when it is judged that it is an edge part of a measurement object, edge strength is calculated based on 1st image data and 2nd image data, and the calculated edge Position data is acquired based on image data having a higher intensity. By controlling to select the image data according to the magnitude of the edge strength, it is possible to measure with high accuracy without requiring skill in selecting the image data for measurement.

  In the fifth invention, the sixteenth invention and the twenty-seventh invention, the first image data obtained by imaging the measurement object by the imaging means using the epi-illumination means and the measurement object by the imaging means using the transmission illumination means are substantially the same. Second image data captured at a position and third image data obtained by aligning and synthesizing the first image data and the second image data are stored. First image data is displayed, and designation of a measurement position is received on the displayed first image data. The third image data is read according to the measurement position where the designation is accepted, the position data is obtained based on the read third image data, and the measurement at the measurement position where the designation is accepted is obtained based on the obtained position data. Execute. A composite image is generated so that the outline can be clearly grasped and the surface irregularities, patterns, patterns, and the like can be recognized. The measurement position can be specified on the generated composite image, and accurate position data can be acquired based on the composite image regardless of whether the measurement position is a contour portion indicating the outer shape. The image data can be measured with high accuracy without the operator consciously selecting it.

  In the second, sixth, eleventh, thirteenth, seventeenth, twenty-second, twenty-fourth, twenty-eighth and thirty-third inventions, the first image data or the third image data is displayed. Thus, not only the contour line indicating the outer shape of the measurement object but also the unevenness, pattern, pattern, etc. on the surface of the measurement object can be designated as the measurement position.

  In the seventh invention, the eighteenth invention and the twenty-ninth invention, the first image data obtained by imaging the measurement object with the imaging means using the epi-illumination means and the measurement object with the imaging means using the transmission illumination means are substantially the same. Second image data captured at the position is stored. First image data is displayed, and designation of a measurement position is received on the displayed first image data. Based on the stored first image data and second image data, the edge extraction at the measurement position where the designation is accepted is executed, and the edge extraction of the first image data and the second image data is normally performed. It is determined whether or not it has been completed. If it is determined that the edge extraction of the first image data has been completed normally, and it is determined that the edge extraction of the second image data has not been completed normally, position data is acquired based on the first image data. If it is determined that the edge extraction of the second image data has been completed normally, and it is determined that the edge extraction of the first image data has not been completed normally, position data is acquired based on the second image data. When it is determined that the edge extraction of the first image data and the edge extraction of the second image data have been completed normally, calculate the respective edge strengths, and select the image data having a larger calculated edge strength. The position data is acquired based on the selected image data. Based on the acquired position data, the measurement at the measurement position where the designation is accepted is executed. By displaying the first image data, surface irregularities, patterns, patterns, etc. on the measurement object can be specified as measurement objects, and desired measurements can be easily and accurately performed based on the displayed image. can do. Further, by selecting image data for acquiring position data depending on whether or not edge extraction has been normally completed, it is possible to select image data suitable for the designated measurement position without requiring skill, It becomes possible to measure with high accuracy.

  In the eighth invention, the nineteenth invention and the thirtieth invention, by displaying the image data that is the basis of the measurement, it becomes possible for the operator to visually confirm which image data is being measured, It is possible to confirm whether or not an erroneous selection has been made.

  In the ninth invention, the twentieth invention and the thirty-first invention, the first image data obtained by imaging the measurement object by the imaging means using the epi-illumination means and the measurement object by the imaging means using the transmission illumination means are substantially the same. Second image data captured at a position and third image data obtained by aligning and synthesizing the first image data and the second image data are stored. First image data is displayed, and designation of a measurement position is received on the displayed first image data. The selection of any one of the first image data, the second image data, and the third image data is accepted. One of the first image data, second image data, and third image data that has been selected is read out, and is based on the read first image data, second image data, or third image data. To obtain position data. Based on the acquired position data, the measurement at the measurement position where the designation is accepted is executed. The measurement position shows the outline by accepting selection of image data used for measurement, including a composite image that can clearly grasp the outline and also recognize surface irregularities, patterns, patterns, etc. In the case of only the outline portion, the second image data that can clearly grasp the outline is not the outline portion indicating the outline, but the first image in the case of surface irregularities, patterns, patterns, etc. When measuring the distance between image data, the operator selects the third image data, which is a composite image, to measure each, so that the image data can be selected without any skill. It becomes possible to measure well.

  In the tenth invention, the twenty-first invention, and the thirty-second invention, by accepting a selection from the displayed screen, the operator can make a selection while visually confirming which image data to select.

  According to the above configuration, by displaying the first image data, the unevenness, pattern, pattern, etc. on the surface of the measurement target can be specified as the measurement target, and a desired measurement can be performed based on the displayed image. Can be executed easily and accurately. In addition, for example, when the designated measurement position is a contour portion indicating the outer shape, the second image data is controlled, and if not, the first image data is selected to be selected, or the edge strength is increased or decreased. Thus, it is possible to perform measurement with high accuracy without requiring skill in selecting image data for measurement.

  Hereinafter, an image measurement device according to an embodiment of the present invention will be described with reference to the drawings. Throughout the drawings to be referred to, elements having the same or similar configuration or function are denoted by the same or similar reference numerals, and redundant description is omitted.

(Embodiment 1)
FIG. 1 is a schematic diagram showing a configuration of an image measurement apparatus according to Embodiment 1 of the present invention. As shown in FIG. 1, the image measuring apparatus 1 according to the first embodiment includes a measuring unit 2 and a control unit 3, and the control unit 3 calculates image data captured by the measuring unit 2. Process and measure the dimensions of the desired shape.

  The measurement unit 2 is provided with two sets of lighting devices across a table 21 that moves the measurement object 20 to the measurement part. First, a ring-shaped epi-illumination device 22 that illuminates the measurement object 20 on the table 21 from above is installed in the light receiving lens unit 23. The light irradiated by the epi-illumination device 22 is reflected by the surface of the measurement object 20 and returns to the light receiving lens unit 23. Thereby, the unevenness | corrugation of the surface of the measurement target object 20, a pattern, a pattern, etc. can be imaged.

  A transmission illumination device 24 that illuminates the measurement object 20 from below is installed below the table 21. The transmitted illumination device 24 includes at least a light source 241, a reflection mechanism 242, and a lens 243. The light emitted from the light source 241 is reflected by the reflection mechanism 242 toward the table 21, and the lens 243 reflects the table 21. To be converted into parallel light in a direction substantially perpendicular to each other. Thereby, only the light of the position where the measuring object 20 does not exist can be transmitted and imaged.

  The light receiving lens unit 23 includes at least a light receiving lens 231, a half mirror 232, a high magnification side imaging lens unit 233, and a low magnification side imaging lens unit 236. The half mirror 232 transmits the light emitted from the transmission illumination device 24 through the measurement target 20 and transmits the light reflected from the measurement target 20 to the low magnification side imaging lens unit 236. Each is guided to the high magnification side imaging lens unit 233. The high magnification side imaging lens unit 233 includes a slit 234 and an imaging lens 235 for imaging, and the low magnification side imaging lens unit 236 includes a slit 237 and an imaging lens 238 for imaging. It is configured.

  The imaging device 25 forms an image of light guided to the high-magnification imaging lens unit 233 with an imaging element 251 such as a CCD or CMOS, and transmits the image data to the control unit 3. Similarly, the imaging device 26 forms an image of light guided to the low magnification side imaging lens unit 236 by an imaging element 261 such as a CCD or CMOS, and transmits the image data to the control unit 3.

  FIG. 2 is a block diagram showing the configuration of the control unit 3 of the image measurement apparatus 1 according to Embodiment 1 of the present invention. As shown in FIG. 2, the control unit 3 of the image measuring apparatus 1 according to the first embodiment connects at least a CPU (central processing unit) 33, a storage device 34 such as a memory, communication means 35, and the above-described hardware. An internal bus 36 is used. Via an internal bus 36, the input device is also connected to a mouse 32, a keyboard 31, and a display device 27, which is an output device.

  The CPU 33 is connected to the hardware units as described above of the control unit 3 through the internal bus 36, controls the operation of the hardware units described above, and according to the computer program stored in the storage device 34. Perform various software functions. The storage device 34 is composed of, for example, a volatile memory such as SRAM or SDRAM, and a load module is developed when the computer program is executed, and stores temporary data generated when the computer program is executed.

  The communication unit 35 is connected to the internal bus 36, is connected to the imaging devices 25 and 26 via a communication line, and receives image data captured by the imaging devices 25 and 26. Further, by being connected to an external network such as the Internet, a LAN, or a WAN, data can be transmitted / received to / from an external computer or the like. Note that the computer program stored in the storage device 34 is downloaded from an external computer via the communication means 35.

  The CPU 33 of the control unit 3 uses the incident image data (first image data) that is the image data of the incident image captured by the imaging device 25 using the incident illumination device 22 and the imaging device 26 using the transmission illumination device 24. Storage means 331 that stores transmission image data (second image data) that is image data of the captured transmission image, display means 332 that displays the incident image data on the display device 27, and the measurement position on the displayed incident image. A designation accepting unit 333 that accepts designation, a position obtaining unit 334 that obtains position data based on incident image data or transmission image data according to a measurement position that accepts designation, and a measurement position that accepts designation based on position data. A measuring means 335 for measuring is included, and these processing operations are controlled.

  The storage unit 331 is epi-illumination image data that is image data of an epi-illumination image captured by the imaging device 25 using the epi-illumination device 22 and image data of a transmission image that is captured by the imaging device 26 using the transmission illumination device 24. The transmission image data is stored in the storage device 34 while being aligned with each other. Here, the alignment means that the coordinate position on the display screen is matched between the incident image and the transmission image. By storing the two types of image data that have been aligned, appropriate image data can be selected according to the measurement position for which the designation has been received.

  The display unit 332 displays the incident image data received by the communication unit 35 as an incident image on the display device 27 such as an LCD or an organic EL display. The epi-illumination image can clearly show the unevenness, pattern, pattern, etc. on the surface of the measurement object 20, and can be used to measure the dimension of the portion other than the contour line indicating the outer shape.

  The designation accepting unit 333 accepts designation based on the incident image displayed on the display device 27 by the display unit 332 with the position to be measured as the measurement position. FIG. 3 is an illustration of a method for designating a measurement position by the designation receiving means 333.

  As shown in FIG. 3, for example, in order to specify the length L to be measured, the operator sets a detection area 301 for detecting one edge portion on the reflected image of the displayed measurement object 20. Designation is performed using the mouse 32. Next, the other edge part 302 which is the other party whose distance is to be measured is similarly designated using the mouse 32. Thus, by accepting designation of two places, it is possible to specify that the straight line distance L between the edge portions for which designation has been accepted is a measurement target.

  The position acquisition unit 334 receives the reflected image data (first image data) that is image data of the reflected image or the transmitted image data (second image data) that is the image data of the transmitted image according to the measurement position that has received the designation. ) And position data is acquired based on the read incident image data or transmitted image data. The measuring unit 335 measures the dimension of the designated measurement position based on the acquired position data.

  Conventionally, whether to measure using an epi-illumination image or a transmission image is specified by visual confirmation of an operator. However, for the operator, it does not matter which image it is, and it is sufficient if the dimensions of the desired position can be measured with high accuracy. Therefore, the measurement of the dimensions may be performed by the control unit 3 selecting more preferable image data.

  For specifying the measurement position, an epi-illumination image that can display surface irregularities, patterns, patterns, and the like is more preferable than a transmission image that displays only the outline of the outer shape. Therefore, an epi-illumination image is displayed on the display device 27, and image data serving as a basis for calculating the dimensions is selected inside the control unit 3 when the designation of the measurement position on the screen is received. By doing in this way, a more exact dimension can be measured.

  The operation of the image measuring apparatus 1 having the above-described configuration will be described in detail based on a flowchart. FIG. 4 is a flowchart showing a processing procedure of the CPU 33 of the control unit 3 of the image measuring apparatus 1 according to the first embodiment of the present invention.

  As shown in FIG. 4, the CPU 33 of the control unit 3 uses the epi-illumination device 22 to image the measurement object 20 by the imaging device 25, acquires the epi-illumination image, and uses the transmission illumination device 24 to image the imaging device 26. A transmission image obtained by capturing the same measurement object 20 at substantially the same position is acquired (step S401). The CPU 33 stores the acquired incident image data (first image data), which is image data of the reflected image, and the transmissive image data (second image data), which is the image data of the transmissive image, in the storage device 34. (Step S402).

  The epi-illumination image and the transmission image are captured at a substantially same position with respect to the same measurement object 20 with a slight time interval. The time interval is set to capture each image because the optimal optical ambient environment, condition settings, etc. when capturing an epi-illumination image are not necessarily optimal when capturing a transmission image. This is for storing image data captured under optimum conditions.

  FIG. 5 is an exemplary diagram when the incident image data stored in the storage device 34 is displayed. As shown in FIG. 5, the outline indicating the outer shape of each measurement object 20 includes a clear measurement object 20 and an unclear measurement object 20 depending on the shape. On the other hand, the unevenness, the pattern, the pattern, and the like on the surface of each measurement object 20 also have different display degrees depending on the angle of illumination, the reflectance of the material, and the like.

  FIG. 6 is an exemplary diagram when the transmission image data stored in the storage device 34 is displayed. As shown in FIG. 6, the contour line indicating the outer shape of each measurement object 20 can be clearly obtained regardless of the shape of the measurement object 20. On the other hand, unevenness, patterns, patterns, etc. on the surface of each measurement object 20 cannot be obtained at all.

  The CPU 33 displays an incident image on the display device 27 based on the incident image data stored in the storage device 34 (step S403). The reason why the incident image is displayed is that the unevenness, pattern, pattern, etc. on the surface of the measurement object 20 are also measured.

  The CPU 33 accepts designation of the measurement position on the displayed incident image (step S404). The method for specifying the measurement position is not particularly limited, and any method can be used as long as it can specify the position to be measured on the displayed image.

  The CPU 33 reads either the incident image data or the transmission image data from the storage device 34 in accordance with the measurement position for which the designation has been received (step S405), and the position based on the read incident image data or transmission image data. Data is acquired (step S406). Based on the acquired position data, the CPU 33 performs measurement at the measurement position where the designation has been received (step S407).

  Various methods can be used as the position data acquisition method. FIG. 7 is a flowchart showing a procedure of position data acquisition processing of the CPU 33 of the control unit 3 of the image measurement apparatus 1 according to Embodiment 1 of the present invention.

  The CPU 33 of the control unit 3 receives the designation of the measurement position on the displayed incident image (step S404). The CPU 33 determines whether or not the measurement position that has received the designation is an edge portion indicating the outer shape of the measurement target 20 (step S701). When the CPU 33 determines that the measurement position at which the designation has been received is the edge portion of the measurement object 20 (step S701: YES), the CPU 33 reads the transmission image data from the storage device 34 (step S702), and transmits the transmission image data. The position data is acquired based on (Step S703).

  When the CPU 33 determines that the measurement position that has received the designation is not the edge portion of the measurement target 20 (step S701: NO), the CPU 33 reads the incident image data from the storage device 34 (step S704), and the incident image data. The position data is acquired based on (Step S705).

  Also, it is assumed that the edge portion is not clear even if it is transmission image data, and conversely the edge portion is clear even if it is incident image data. Therefore, the edge strength of the edge portion may be calculated, and the position data may be acquired using image data having a high edge strength. FIG. 8 is a flowchart showing a procedure of image data selection processing of the CPU 33 of the control unit 3 of the image measuring apparatus 1 according to Embodiment 1 of the present invention.

  The CPU 33 of the control unit 3 accepts designation of the measurement position on the displayed incident image (step S404), and determines whether or not the designated measurement position is an edge portion indicating the outer shape of the measurement object 20. (Step S701). When the CPU 33 determines that the measurement position where the designation has been received is the edge portion of the measurement object 20 (step S701: YES), the CPU 33 determines the edge strength of the edge portion for which the designation has been received as the incident image data and the transmission image. Calculation is performed for each piece of data (step S801). The method for calculating the edge strength is not particularly limited, but in the first embodiment, the square root of the square sum of the primary differential values in the vertical and horizontal directions of the edge portion for which designation has been received is calculated. The CPU 33 determines whether or not the edge strength calculated based on the incident image data is larger than the edge strength calculated based on the transmission image data (step S802).

  When the CPU 33 determines that the edge intensity calculated based on the incident image data is greater than the edge intensity calculated based on the transmission image data (step S802: YES), the CPU 33 determines that the incident intensity is reflected from the storage device 34. Image data is read out (step S803). When the CPU 33 determines that the edge strength calculated based on the incident image data is equal to or lower than the edge strength calculated based on the transmission image data (step S802: NO), the CPU 33 reads the transmission image from the storage device 34. Data is read (step S804).

  The position data is acquired as a coordinate value on the display screen. By using the imaging magnification of the imaging devices 25 and 26 based on the coordinate values on the display screen, it is possible to easily calculate actual measurement values.

  As described above, according to the first embodiment, by displaying the epi-illumination image, the unevenness, pattern, pattern, etc. on the surface of the measurement object can be specified as the measurement object, and based on the displayed image. Desired measurement can be performed easily and accurately. In addition, for example, when the designated measurement position is a contour portion indicating the outer shape, transmission image data is controlled, and when it is not, the incident image data is controlled to be selected, or the image data is selected depending on the magnitude of the edge strength. By controlling the selection, etc., it is possible to measure with high accuracy without requiring skill in selecting image data as a basis of measurement.

(Embodiment 2)
Since the configuration of the image measuring apparatus 1 according to the second embodiment of the present invention is the same as that of the first embodiment, detailed description thereof is omitted by attaching the same reference numerals. In the second embodiment, the epi-illumination image data (first image data) that is the image data of the epi-illumination image obtained by imaging the measurement object 20 with the imaging device 25 using the epi-illumination device 22 and the transmission illumination device 24 are used. Then, not only the transmission image data (second image data) that is the image data of the transmission image obtained by imaging the measurement object at substantially the same position by the imaging device 26 but also the incident image data and the transmission image data are aligned. The second embodiment is different from the first embodiment in that synthesized image data (third image data) that is image data of the synthesized image is used.

  The CPU 33 of the control unit 3 captures the incident image data (first image data), which is the image data of the incident image captured by the imaging device 25 using the incident illumination device 22, and the image capturing device 26 using the transmission illumination device 24. Transmission image data (second image data) that is image data of the transmitted image, and composite image data (third image) that is image data of a combined image obtained by aligning and combining the epi-image data and the transmission image data Storage means 331 for storing data), display means 332 for displaying the epi-illumination image data on the display device 27, designation accepting means 333 for accepting designation of the measurement position on the displayed epi-illumination image, and according to the measurement position for which the designation has been accepted. Measurement is performed at a position acquisition unit 334 that acquires position data based on the composite image data, and a measurement position that receives a designation based on the position data. It includes measuring means 335, and controls these processing operations.

  The storage unit 331 includes incident image data that is image data of an epi-illumination image captured by the imaging device 25 using the epi-illumination device 22, and transmission that is image data of a transmission image captured by the imaging device 26 using the transmission illumination device 24. Image data and composite image data (third image data), which is image data of a composite image obtained by aligning and combining epi-image data and transmission image data, are stored in the storage device 34 in a state of being aligned with each other. To do. Here, the alignment means that the coordinate position on the display screen is matched between the reflected image, the transmitted image, and the synthesized image. By storing the three types of image data that have been aligned, the position data can be acquired based on the composite image data in accordance with the measurement position for which the designation has been received.

  The display unit 332 displays the incident image data received by the communication unit 35 as an incident image on the display device 27 such as an LCD or an organic EL display. The epi-illumination image can clearly show irregularities, patterns, patterns, and the like on the surface of the measurement object, and can be used to measure dimensions and the like of portions other than the contour line indicating the outer shape.

  The designation accepting unit 333 accepts designation based on the incident image displayed on the display device 27 by the display unit 332 with the position to be measured as the measurement position. The position acquisition unit 334 reads the composite image data (third image data) according to the measurement position that has received the designation, and acquires position data based on the read composite image data. The measuring unit 335 measures the dimension of the designated measurement position based on the acquired position data.

  Conventionally, whether to measure using an epi-illumination image or a transmission image is specified by visual confirmation of an operator. However, for the operator, it does not matter which image it is, and it is sufficient if the dimensions of the desired position can be measured with high accuracy. Therefore, the measurement of the dimensions may be performed by the control unit 3 selecting more preferable image data.

  For specifying the measurement position, an epi-illumination image that can display surface irregularities, patterns, patterns, and the like is more preferable than a transmission image that displays only the outline of the outer shape. Accordingly, the reflected image is displayed on the display device 27, and when the designation of the measurement position on the screen is received, the composite image data is read out as image data serving as a basis for measuring the shape of the measurement object 20. By doing in this way, an exact shape can be measured.

  The operation of the image measuring apparatus 1 having the above-described configuration will be described in detail based on a flowchart. FIG. 9 is a flowchart showing a processing procedure of the CPU 33 of the control unit 3 of the image measuring apparatus 1 according to the second embodiment of the present invention.

  As shown in FIG. 9, the CPU 33 of the control unit 3 uses the epi-illumination device 22 to image the measurement object 20 by the imaging device 25, acquires the epi-illumination image, and uses the transmission illumination device 24 to capture the imaging device 26. A transmission image obtained by imaging the same measurement object 20 at substantially the same position is acquired (step S901). The CPU 33 aligns and synthesizes the incident image data (first image data) that is the image data of the acquired incident image and the transmission image data (second image data) that is the image data of the transmission image. Composite image data (third image data) that is image data of the image is generated (step S902), and the incident image data, the transmission image data, and the composite image data are stored in the storage device 34 (step S903).

  The epi-illumination image and the transmission image are picked up with a slight time interval at substantially the same position with respect to the same measurement object 20. The time interval is set to capture each image because the optimal optical ambient environment, condition settings, etc. when capturing an epi-illumination image are not necessarily optimal when capturing a transmission image. This is for storing image data captured under optimum conditions.

  FIG. 10 is an exemplary diagram when the composite image data stored in the storage device 34 is displayed. As shown in FIG. 10, the composite image can clearly display the contour lines indicating the outer shape of each measurement object 20 and the surface irregularities, patterns, patterns, and the like.

  The CPU 33 displays the incident image on the display device 27 based on the incident image data stored in the storage device 34 (step S904). The reason why the incident image is displayed is that the unevenness, pattern, pattern, etc. on the surface of the measurement object 20 are also measured.

  The CPU 33 accepts designation of a measurement position on the displayed epi-illumination image (step S905). The method for specifying the measurement position is not particularly limited, and any method can be used as long as it can specify the position to be measured on the displayed image.

  The CPU 33 reads the composite image data from the storage device 34 (step S906), and acquires position data based on the read composite image data in accordance with the measurement position for which the designation has been received (step S907). Based on the acquired position data, the CPU 33 performs measurement of dimensions and the like at the measurement position where the designation has been received (step S908).

  Since the position data is acquired based on the composite image data, the measurement position can be reliably specified regardless of whether or not the measurement position at which the designation is received is an edge portion indicating the outer shape of the measurement object 20. The position data can be acquired with high accuracy. The position data is acquired as coordinate values on the display screen. By using the imaging magnification of the imaging devices 25 and 26 based on the coordinate values on the display screen, it is possible to easily calculate actual measurement values.

  As described above, according to the second embodiment, by displaying the epi-illumination image, the surface unevenness, pattern, pattern, etc. of the measurement object can be designated as the measurement object, and the desired measurement can be performed based on the image. Can be executed easily and accurately. In addition, regardless of whether or not the designated measurement position is a contour portion indicating the outer shape, accurate position data can be acquired based on the composite image data, and the operator is conscious of the image data related to the measurement. It is possible to measure with high accuracy without making a selection.

  In the second embodiment described above, the epi-illumination image is displayed on the display device 27 and the designation of the measurement position is accepted. However, since the composite image data is generated, the composite image is displayed on the display device 27. Needless to say, the designation of the measurement position may be accepted. Of course, also in the first embodiment, it is needless to say that the composite image data may be used as an image for receiving the designation of the measurement position.

(Embodiment 3)
Since the configuration of the image measuring apparatus 1 according to Embodiment 3 of the present invention is the same as that of Embodiments 1 and 2, detailed description thereof is omitted by attaching the same reference numerals. In the third embodiment, epi-illumination image data (first image data), which is image data of an epi-illumination image obtained by imaging the measurement object 20 with the imaging device 25 using the epi-illumination device 22, and the transmission illumination device 24 are used. In the transmission image data (second image data), which is the image data of the transmission image obtained by imaging the measurement object with the imaging device 26 at substantially the same position, according to the success or failure of the edge extraction at the specified measurement position, The difference from Embodiments 1 and 2 is that the position data is acquired based on any one of the image data.

  FIG. 11 is a block diagram showing the configuration of the control unit 3 of the image measuring apparatus 1 according to the third embodiment of the present invention. As shown in FIG. 11, the hardware configuration of the control unit 3 of the image measurement apparatus 1 according to the third embodiment is the same as that of the first and second embodiments. Detailed explanation is omitted.

  The CPU 33 of the control unit 3 uses the incident image data (first image data) that is the image data of the incident image captured by the imaging device 25 using the incident illumination device 22 and the imaging device 26 using the transmission illumination device 24. Storage means 331 that stores transmission image data (second image data) that is image data of the captured transmission image, display means 332 that displays the incident image data on the display device 27, and the measurement position on the displayed incident image. Specification accepting means 333 that accepts designation, edge extraction means 336 that executes edge extraction at the measurement position that accepts designation based on the incident image data and transmission image data, and normal edge extraction in the incident image data and transmission image data A determination means 337 for determining whether or not the process has ended, and the position based on the incident image data or the transmission image data according to the determination result Comprises measuring means 335 for measuring the accepts the designated measurement position based on the position obtaining unit 334, and the position data to acquire over motor, to control these processing operations.

  The storage unit 331 is epi-illumination image data that is image data of an epi-illumination image captured by the imaging device 25 using the epi-illumination device 22 and image data of a transmission image that is captured by the imaging device 26 using the transmission illumination device 24. The transmission image data is stored in the storage device 34 while being aligned with each other. Here, the alignment means that the coordinate position on the display screen is matched between the incident image and the transmitted image. By storing both pieces of image data that have been aligned, it is possible to select appropriate image data according to the measurement position for which the designation has been received.

  The display unit 332 displays the incident image data received by the communication unit 35 as an incident image on the display device 27 such as an LCD or an organic EL display. The epi-illumination image can clearly show the unevenness, pattern, pattern, etc. on the surface of the measurement object 20, and can be used to measure the dimension of the portion other than the contour line indicating the outer shape.

  The designation accepting unit 333 accepts designation based on the incident image displayed on the display device 27 by the display unit 332 with the position to be measured as the measurement position. The edge extraction unit 336 executes edge extraction processing at the measurement position where the designation is received for each of the incident image data and the transmission image data. The edge extraction method is not particularly limited, and for example, a method of extracting a coordinate value whose luminance value change is larger than a predetermined threshold value in the vicinity of a specified measurement position may be used.

  The determination unit 337 determines whether or not the edge extraction unit 336 has successfully completed edge extraction for each of the incident image data and the transmission image data. This is because, depending on the image data, it may occur that the edge cannot be normally extracted at the designated measurement position.

  The position acquisition means 334 selects epi-image data or transmission image data in accordance with the determination result of whether or not the edge extraction has been normally completed, and acquires position data based on the selected epi-image data or transmission image data. get. The measuring means 335 measures the dimensions and the like at the designated measurement position based on the acquired position data.

  For the designation of the measurement position, an epi-illumination image that can display surface irregularities, patterns, patterns, etc. is more preferable than a transmission image in which only the outline of the outline is displayed. Therefore, an epi-illumination image is displayed on the display device 27, and image data serving as a basis for calculating the dimensions is selected inside the control unit 3 when the designation of the measurement position on the screen is received. By doing in this way, a more exact dimension can be measured.

  The operation of the image measuring apparatus 1 having the above-described configuration will be described in detail based on a flowchart. FIG. 12 is a flowchart showing a processing procedure of the CPU 33 of the control unit 3 of the image measuring device 1 according to the third embodiment of the present invention.

  As shown in FIG. 12, the CPU 33 of the control unit 3 uses the epi-illumination device 22 to image the measurement object 20 by the imaging device 25, acquires the epi-illumination image, and uses the transmission illumination device 24 to image the imaging device 26. A transmission image obtained by imaging the same measurement object 20 at substantially the same position is acquired (step S1201). The CPU 33 stores the incident image data and the transmitted image data in the storage device 34 (step S1202).

  The epi-illumination image and the transmission image are picked up with a slight time interval at substantially the same position with respect to the same measurement object 20. The time interval is set to capture each image because the optimal optical ambient environment, condition settings, etc. when capturing an epi-illumination image are not necessarily optimal when capturing a transmission image. This is for storing image data captured under optimum conditions.

  The CPU 33 displays the incident image on the display device 27 based on the incident image data stored in the storage device 34 (step S1203). The reason why the incident image is displayed is that the unevenness, pattern, pattern, etc. on the surface of the measurement object 20 are also measured.

  The CPU 33 accepts designation of a measurement position on the displayed incident image (step S1204). The method for specifying the measurement position is not particularly limited, and any method can be used as long as it can specify the position to be measured on the displayed image.

  The CPU 33 reads the incident image data and the transmitted image data from the storage device 34 (step S1205), and executes an edge extraction process in the vicinity of the measurement position where the designation is received based on the read incident image data and the transmitted image data (step S1205). Step S1206). The CPU 33 determines whether or not the edge extraction processing has been normally completed for each of the incident image data and the transmitted image data (step S1207), and determines the position data based on the incident image data or the transmitted image data according to the determination result. Obtain (step S1208). Based on the acquired position data, the CPU 33 performs measurement at the measurement position where the designation has been received (step S1209).

  The method for selecting the epi-image data or the transmission image data according to the determination result as to whether or not the edge extraction processing has been normally completed is not particularly limited. For example, you may select the image data with large edge strength of the edge extraction part of transmission image data and epi-illumination image data.

  FIG. 13 is a flowchart showing a procedure of image data selection processing of the CPU 33 of the control unit 3 of the image measuring apparatus 1 according to the third embodiment of the present invention. As shown in FIG. 13, the CPU 33 of the control unit 3 determines whether or not only the edge extraction process based on the transmission image data has been normally completed (step S1301). When the CPU 33 determines that only the edge extraction process based on the transparent image data has been normally completed (step S1301: YES), the CPU 33 selects the transparent image data (step S1302).

  When the CPU 33 determines that only the edge extraction process based on the transmission image data has not been normally completed (step S1301: NO), the CPU 33 determines whether only the edge extraction process based on the incident image data has been normally completed. Judgment is made (step S1303). When the CPU 33 determines that only the edge extraction process based on the incident image data has been normally completed (step S1303: YES), the CPU 33 selects the incident image data (step S1304).

  When the CPU 33 determines that only the edge extraction processing based on the incident image data has not been completed normally (step S1303: NO), the CPU 33 performs the edge extraction processing based on the transmission image data and the edge extraction processing based on the incident image data. It is determined whether both have ended normally (step S1305). If the CPU 33 determines that both have ended normally (step S1305: YES), the CPU 33 calculates the edge strength of the extracted edge for each of the transmitted image data and the incident image data (step S1306).

  The CPU 33 determines whether or not the calculated edge strength of the transmitted image data is larger than the edge strength of the incident image data (step S1307). When the CPU 33 determines that the edge strength of the transmission image data is larger than the edge strength of the incident image data (step S1307: YES), the CPU 33 selects the transmission image data (step S1302).

  When the CPU 33 determines that the edge intensity of the transmission image data is equal to or lower than the edge intensity of the incident image data (step S1307: NO), the CPU 33 selects the incident image data (step S1304). When the CPU 33 determines that both the edge extraction process based on the transmission image data and the edge extraction process based on the incident image data are not normally completed (step S1305: NO), the CPU 33 cannot perform the edge extraction. Since the measurement is impossible, the process is terminated.

  Note that the method for calculating the edge strength is not particularly limited. For example, it may be obtained as the square root of the sum of squares of the first derivative values of the extracted edges in the vertical and horizontal directions. In addition, when an edge having a specific shape such as a straight line or an arc is extracted, the reciprocal of the variance of the detected edge point sequence may be obtained. The reciprocal is used to evaluate an edge having a small variance as a high strength. In addition, the edge strength may be obtained as an index value for comprehensive determination including the difference in contrast and the presence or absence of noise.

  As described above, according to the third embodiment, by displaying the epi-illumination image, the unevenness, pattern, pattern, etc. on the surface of the measurement object can be designated as the measurement object, and based on the displayed image. Desired measurement can be performed easily and accurately. Further, by selecting image data for acquiring position data depending on whether or not edge extraction has been normally completed, it is possible to select image data suitable for the designated measurement position without requiring skill, It becomes possible to measure with high accuracy.

  In the third embodiment described above, it is preferable to display the image data on which the measurement is based on the display device 27 as an image. This is because the operator can visually confirm which image data is being measured, and can also confirm whether an erroneous selection has been made.

(Embodiment 4)
Since the configuration of the image measurement apparatus 1 according to the fourth embodiment of the present invention is the same as that of the first to third embodiments, detailed description thereof will be omitted by attaching the same reference numerals. In the fourth embodiment, epi-illumination image data (first image data) that is image data of an epi-illumination image obtained by imaging the measurement object 20 with the imaging device 25 using the epi-illumination device 22 and the transmission illumination device 24 are used. Then, not only the transmission image data (second image data) that is the image data of the transmission image obtained by imaging the measurement object at substantially the same position by the imaging device 26 but also the incident image data and the transmission image data are aligned. Embodiment 1 in that composite image data (third image data), which is image data of a composite image that has been combined, is used, and image data that is the basis of measurement is selected on the displayed screen in accordance with the measurement position. To 3

  FIG. 14 is a block diagram showing the configuration of the control unit 3 of the image measuring device 1 according to the fourth embodiment of the present invention. As shown in FIG. 14, the hardware configuration of the control unit 3 of the image measurement apparatus 1 according to the fourth embodiment is the same as that of the first to third embodiments. Detailed explanation is omitted.

  The CPU 33 of the control unit 3 captures the incident image data (first image data), which is the image data of the incident image captured by the imaging device 25 using the incident illumination device 22, and the image capturing device 26 using the transmission illumination device 24. Transmission image data (second image data) that is image data of the transmitted image, and composite image data (third image) that is image data of a combined image obtained by aligning and combining the epi-image data and the transmission image data Storage means 331 for storing data), display means 332 for displaying the epi-illumination image data on the display device 27, designation accepting means 333 for accepting designation of the measurement position on the displayed epi-illumination image, epi-illumination image data, transmission image data, composition Selection accepting means 338 that accepts selection of any one of the image data, and acquires position data based on the image data that accepts the selection It comprises measuring means 335 for measuring the dimensions and the like at the position obtaining unit 334, and on the basis of the position data has been accepted designated measurement position, to control these processing operations.

  The storage unit 331 includes incident image data that is image data of an epi-illumination image captured by the imaging device 25 using the epi-illumination device 22, and transmission that is image data of a transmission image captured by the imaging device 26 using the transmission illumination device 24. Image data and composite image data (third image data), which is image data of a composite image obtained by aligning and combining epi-image data and transmission image data, are stored in the storage device 34 in a state of being aligned with each other. To do. Here, the alignment means that the coordinate position on the display screen is matched between the reflected image, the transmitted image, and the synthesized image. By storing the three types of image data that have been aligned, appropriate image data can be selected in accordance with the measurement position for which the designation has been received.

  The display unit 332 displays the incident image data received by the communication unit 35 as an incident image on the display device 27 such as an LCD or an organic EL display. The epi-illumination image can clearly show irregularities, patterns, patterns, and the like on the surface of the measurement object, and can be used to measure dimensions and the like of portions other than the contour line indicating the outer shape.

  The designation accepting unit 333 accepts designation based on the incident image displayed on the display device 27 by the display unit 332 with the position to be measured as the measurement position. The selection receiving unit 338 receives selection of any one of the stored incident image data, transmission image data, and composite image data. The position acquisition unit 334 reads any one image data that has been selected from the storage device 34, and acquires position data based on the read image data. The measuring unit 335 measures the dimension of the designated measurement position based on the acquired position data.

  Conventionally, when an operator visually confirms a measurement object, whether the measurement is performed using an epi-illumination image or a transmission image is specified. However, for the operator, it does not matter which image it is, and it is sufficient if the dimensions of the desired position can be measured with high accuracy. Therefore, the measurement of the dimensions may be performed by the control unit 3 selecting and executing more preferable image data.

  For specifying the measurement position, an epi-illumination image that can display surface irregularities, patterns, patterns, and the like is more preferable than a transmission image that displays only the outline of the outer shape. Therefore, whether or not it is necessary to display the incident image on the display device 27 and switch to other image data, that is, transmission image data or composite image data, when the measurement position designation on the screen is received. And selection of which image data should be measured is accepted. By doing in this way, an exact dimension can be measured.

  The operation of the image measuring apparatus 1 having the above-described configuration will be described in detail based on a flowchart. FIG. 15 is a flowchart showing a processing procedure of the CPU 33 of the control unit 3 of the image measuring device 1 according to the fourth embodiment of the present invention.

  As shown in FIG. 15, the CPU 33 of the control unit 3 images the measurement object 20 by the imaging device 25 using the epi-illumination device 22, acquires the epi-illumination image, and uses the transmission illumination device 24 to capture the imaging device 26. A transmission image obtained by imaging the same measurement object 20 at substantially the same position is acquired (step S1501). The CPU 33 aligns and synthesizes the incident image data (first image data) that is the image data of the acquired incident image and the transmission image data (second image data) that is the image data of the transmission image. Composite image data (third image data), which is image data of the image, is generated (step S1502), and the incident image data, transmission image data, and composite image data are stored in the storage device 34 (step S1503).

  The epi-illumination image and the transmission image are captured at a substantially same position with respect to the same measurement object 20 with a slight time interval. The time interval is set to capture each image because the optimal optical ambient environment, condition settings, etc. when capturing an epi-illumination image are not necessarily optimal when capturing a transmission image. This is for storing image data captured under optimum conditions.

  The CPU 33 displays the incident image on the display device 27 based on the incident image data stored in the storage device 34 (step S1504). The reason why the incident image is displayed is that the unevenness, pattern, pattern, etc. on the surface of the measurement object 20 are also measured.

  The CPU 33 accepts designation of a measurement position on the displayed incident image (step S1505). The method for specifying the measurement position is not particularly limited, and any method can be used as long as it can specify the position to be measured on the displayed image.

  The CPU 33 accepts selection of image data displayed on the display device 27 (step S1506). That is, when the measurement position that has received the designation is a contour portion indicating the outer shape, the image is changed to display the transmission image data, and the distance between the contour portion indicating the outer shape and a part of the surface pattern is changed. When the measurement position is designated, the image is changed to display the composite image data. By changing the displayed image in this way, it is possible to select the image data that is the basis of the measurement, and it is possible to perform the measurement while confirming whether the correct measurement position is designated by the operator's visual observation. It becomes.

  The CPU 33 acquires position data related to the measurement position for which the designation has been received based on the image data for which the selection has been accepted (step S1507). Based on the acquired position data, the CPU 33 performs measurement of dimensions and the like at the measurement position where the designation is received (step S1508).

  Since the position data is acquired based on the selected image data, it is possible to reliably specify the measurement position regardless of whether the measurement position at which the designation is received is an edge portion indicating the outer shape of the measurement object 20 or not. And position data can be obtained with high accuracy. The position data is acquired as coordinate values on the display screen. By using the imaging magnification of the imaging devices 25 and 26 based on the coordinate values on the display screen, it is possible to easily calculate actual measurement values.

  As described above, according to the fourth embodiment, by displaying the epi-illumination image, the surface unevenness, pattern, pattern, etc. of the measurement object 20 can be designated as the measurement object, and a desired object can be determined based on the image. Measurement can be performed easily and accurately. In addition, regardless of whether or not the designated measurement position is a contour portion indicating an outer shape, accurate position data can be acquired based on the selected image data, and measurement can be performed with high accuracy. .

  In Embodiment 4 described above, the epi-illumination image is displayed on the display device 27 and the designation of the measurement position is accepted. However, since the composite image data is generated, the composite image is displayed on the display device 27. Needless to say, the designation of the measurement position may be accepted.

  In the first to fourth embodiments described above, it is preferable to display the image data on which the measurement is based on the display device 27 as an image. The operator visually confirms whether the image data that is the basis for measuring the measurement object 20 is epi-image data, transmission image data, or composite image data obtained by combining both. Because it can.

  Furthermore, although Embodiment 1 thru | or 4 mentioned above demonstrated about the structure provided with the control unit 3 only for the image measurement apparatus 1, hardware constitutions are not specifically limited to this. For example, the function of the control unit 3 may be replaced by an external computer.

  FIG. 16 is a schematic diagram illustrating a configuration of another image measurement apparatus 1. As shown in FIG. 16, the present image measurement apparatus 1 includes a measurement unit 2 and an external computer 4, and the image data captured by the measurement unit 2 is processed by the external computer 4 to obtain a desired value. Measure the dimensions of the shape.

  Since the configuration and function of the measurement unit 2 are the same as those in the first to fourth embodiments, detailed description is omitted by attaching the same reference numerals. The external computer 4 includes at least a CPU (not shown) and a storage device (not shown) such as a memory, and is connected to a display device 41, a keyboard 42, and a mouse 43. A CPU (not shown) acquires image data from the imaging devices 25 and 26, and executes the same processing as the CPU 33 of the control unit 3 in the first to fourth embodiments described above.

  In addition, the present invention is not limited to Embodiments 1 to 4 described above, and it goes without saying that various modifications and substitutions are possible within the scope of the present invention.

It is a schematic diagram which shows the structure of the image measuring device which concerns on Embodiment 1 of this invention. It is a block diagram which shows the structure of the control unit of the image measuring device which concerns on Embodiment 1 of this invention. It is an illustration figure of the designation | designated method of the measurement position by a designation | designated reception means. It is a flowchart which shows the process sequence of CPU of the control unit of the image measuring device which concerns on Embodiment 1 of this invention. It is an illustration figure at the time of displaying epi-illumination image data memorize | stored in the memory | storage device. It is an illustration figure at the time of displaying the transmission image data memorize | stored in the memory | storage device. It is a flowchart which shows the procedure of the position data acquisition process of CPU of the control unit of the image measuring device which concerns on Embodiment 1 of this invention. It is a flowchart which shows the procedure of the image data selection process of CPU of the control unit of the image measuring device which concerns on Embodiment 1 of this invention. It is a flowchart which shows the process sequence of CPU of the control unit of the image measuring device which concerns on Embodiment 2 of this invention. It is an illustration figure at the time of displaying the composite image data memorize | stored in the memory | storage device. It is a block diagram which shows the structure of the control unit of the image measuring device which concerns on Embodiment 3 of this invention. It is a flowchart which shows the process sequence of CPU of the control unit of the image measuring device which concerns on Embodiment 3 of this invention. It is a flowchart which shows the procedure of the image data selection process of CPU of the control unit of the image measuring device which concerns on Embodiment 3 of this invention. It is a block diagram which shows the structure of the control unit of the image measuring device which concerns on Embodiment 4 of this invention. It is a flowchart which shows the process sequence of CPU of the control unit of the image measuring device which concerns on Embodiment 4 of this invention. It is a schematic diagram which shows the structure of another image measuring device.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Image measuring device 2 Measuring part 3 Control unit 4 External computer 22 Epi-illumination device 24 Transmission illumination device 25, 26 Imaging device 27, 41 Display device 33 CPU
34 storage device 35 communication unit 36 internal bus 331 storage unit 332 display unit 333 designation reception unit 334 position acquisition unit 335 measurement unit 336 edge extraction unit 337 determination unit 338 selection reception unit

Claims (33)

Imaging means for capturing an image of the measurement object;
Epi-illumination means for illuminating the surface of the measurement object from the installation side of the imaging means;
In an image measurement apparatus comprising: a transmission illumination unit that illuminates a measurement object from a side opposite to the installation side of the imaging unit;
First image data obtained by imaging the measurement object with the imaging means using the epi-illumination means, and second image obtained by imaging the measurement object with the imaging means using the transmission illumination means at substantially the same position. Storage means for storing image data;
Display means for displaying the first image data;
Designation accepting means for accepting designation of a measurement position on the displayed first image data;
The first image data or the second image data is read from the storage unit according to the measurement position received by the designation accepting unit, and the read first image data or second image data is read. Position acquisition means for acquiring position data based on;
An image measurement apparatus comprising: a measurement unit that performs measurement at a measurement position for which designation has been received based on acquired position data. The storage means further stores third image data obtained by aligning and combining the first image data and the second image data,
The image measuring apparatus according to claim 1, wherein the display unit displays the first image data or the third image data. The position acquisition means includes
A determination unit that determines whether or not the measurement position received by the designation reception unit is an edge portion indicating the outer shape of the measurement object;
When the determination means determines that the measurement object is an edge portion, the position data is acquired based on the second image data. 3. The image measuring apparatus according to claim 1, wherein position data is acquired. The position acquisition means includes
A means for calculating an edge strength based on the first image data and the second image data when the determining means determines that the edge portion of the measurement object is present;
4. The image measuring apparatus according to claim 3, wherein position data is acquired based on image data having a larger calculated edge strength. Imaging means for capturing an image of the measurement object;
Epi-illumination means for illuminating the surface of the measurement object from the installation side of the imaging means;
In an image measurement apparatus comprising: a transmission illumination unit that illuminates a measurement object from a side opposite to the installation side of the imaging unit;
First image data obtained by imaging the measurement object with the imaging means using the epi-illumination means, and second image obtained by imaging the measurement object with the imaging means using the transmission illumination means at substantially the same position. Storage means for storing image data, and third image data obtained by aligning and combining the first image data and the second image data;
Display means for displaying the first image data;
Designation accepting means for accepting designation of a measurement position on the displayed first image data;
Position acquisition means for reading out the third image data from the storage means in accordance with the measurement position received by the designation receiving means, and acquiring position data based on the read third image data;
An image measurement apparatus comprising: a measurement unit that performs measurement at a measurement position for which designation has been received based on acquired position data.   6. The image measuring apparatus according to claim 5, wherein the display means displays the first image data or the third image data. Imaging means for capturing an image of the measurement object;
Epi-illumination means for illuminating the surface of the measurement object from the installation side of the imaging means;
In an image measurement apparatus comprising: a transmission illumination unit that illuminates a measurement object from a side opposite to the installation side of the imaging unit
First image data obtained by imaging the measurement object with the imaging means using the epi-illumination means, and second image obtained by imaging the measurement object with the imaging means using the transmission illumination means at substantially the same position. Storage means for storing image data;
Display means for displaying the first image data;
Designation accepting means for accepting designation of a measurement position on the displayed first image data;
Edge extraction means for executing edge extraction at a measurement position for which designation is received based on the stored first image data and second image data;
First determination means for determining whether or not the edge extraction of the first image data has been normally completed by the edge extraction means;
Second determination means for determining whether or not the edge extraction of the second image data has been normally completed by the edge extraction means;
Position acquisition means for acquiring position data based on the first image data or the second image data according to the determination results of the first determination means and the second determination means;
Measuring means for executing measurement at the measurement position where the designation is received based on the acquired position data, and
The position acquisition means includes
If it is determined that the first determination unit has ended normally, and the second determination unit determines that it has not ended normally, position data is acquired based on the first image data;
If it is determined that the second determination means has ended normally and the first determination means determines that it has not ended normally, position data is acquired based on the second image data,
When it is determined that the first determination unit and the second determination unit have ended normally, the respective edge strengths are calculated, and the image data having a larger calculated edge strength is selected and selected. An image measuring apparatus characterized in that position data is acquired based on image data.   8. The image measurement apparatus according to claim 1, wherein the display means displays image data that is a basis of measurement by the measurement means. Imaging means for capturing an image of the measurement object;
Epi-illumination means for illuminating the surface of the measurement object from the installation side of the imaging means;
In an image measurement apparatus comprising: a transmission illumination unit that illuminates a measurement object from a side opposite to the installation side of the imaging unit;
First image data obtained by imaging the measurement object with the imaging means using the epi-illumination means, and second image obtained by imaging the measurement object with the imaging means using the transmission illumination means at substantially the same position. Storage means for storing image data, and third image data obtained by aligning and combining the first image data and the second image data;
Display means for displaying the first image data;
Designation accepting means for accepting designation of a measurement position on the displayed first image data;
Selection accepting means for accepting selection of any one of the first image data, the second image data, and the third image data;
The first image data, the first image data, the second image data, and the third image data received by the selection receiving unit are read from the storage unit, and the read first image data, Position acquisition means for acquiring position data based on the second image data or the third image data;
An image measurement apparatus comprising: a measurement unit that performs measurement at a measurement position for which designation has been received based on acquired position data.   The image measurement apparatus according to claim 9, wherein the selection receiving unit is configured to receive a selection from a displayed screen.   The image measurement apparatus according to claim 7, wherein the display unit displays the first image data or the third image data. Imaging means for capturing an image of the measurement object;
Epi-illumination means for illuminating the surface of the measurement object from the installation side of the imaging means;
In an image measurement method that can be executed by an image measurement device comprising: a transmission illumination unit that illuminates a measurement object from a side opposite to the installation side of the imaging unit;
First image data obtained by imaging the measurement object with the imaging means using the epi-illumination means, and second image obtained by imaging the measurement object with the imaging means using the transmission illumination means at substantially the same position. Store image data,
Displaying the first image data;
Accept the designation of the measurement position on the displayed first image data,
Read the first image data or the second image data according to the measurement position that received the designation, acquire the position data based on the read first image data or the second image data,
An image measurement method, comprising: performing measurement at a measurement position for which designation has been received based on acquired position data. Further storing third image data obtained by aligning and synthesizing the first image data and the second image data;
The image measurement method according to claim 12, wherein the first image data or the third image data is displayed. Determine whether the measurement position that received the designation is an edge part that shows the outer shape of the measurement object,
When it is determined that it is an edge portion of the measurement object, position data is acquired based on the second image data, and when it is determined that it is not an edge portion, position data is acquired based on the first image data. The image measurement method according to claim 12, wherein the image measurement method is performed. If it is determined that the measurement object is an edge portion, the edge strength is calculated based on the first image data and the second image data,
The image measurement method according to claim 14, wherein the position data is acquired based on image data having a larger calculated edge strength. Imaging means for capturing an image of the measurement object;
Epi-illumination means for illuminating the surface of the measurement object from the installation side of the imaging means;
In an image measurement method that can be executed by an image measurement device that includes a transmission illumination unit that illuminates a measurement object from the side opposite to the installation side of the imaging unit
First image data obtained by imaging the measurement object with the imaging means using the epi-illumination means, and second image obtained by imaging the measurement object with the imaging means using the transmission illumination means at substantially the same position. Storing image data and third image data obtained by aligning and combining the first image data and the second image data;
Displaying the first image data;
Accept the designation of the measurement position on the displayed first image data,
Read the third image data according to the measurement position that received the designation, obtain the position data based on the read third image data,
An image measurement method, comprising: performing measurement at a measurement position for which designation has been received based on acquired position data.   The image measurement method according to claim 16, wherein the first image data or the third image data is displayed. Imaging means for capturing an image of the measurement object;
Epi-illumination means for illuminating the surface of the measurement object from the installation side of the imaging means;
In an image measurement method that can be executed by an image measurement device comprising: a transmission illumination unit that illuminates a measurement object from a side opposite to the installation side of the imaging unit;
First image data obtained by imaging the measurement object with the imaging means using the epi-illumination means, and second image obtained by imaging the measurement object with the imaging means using the transmission illumination means at substantially the same position. Store image data,
Displaying the first image data;
Accept the designation of the measurement position on the displayed first image data,
Based on the first image data and the second image data stored, the edge extraction at the measurement position that received the designation is executed,
Determining whether the edge extraction of the first image data has been normally completed;
Determining whether the edge extraction of the second image data has been normally completed;
According to the determination result, position data is acquired based on the first image data or the second image data,
Based on the acquired position data, execute the measurement at the measurement position that received the designation,
If it is determined that the edge extraction of the first image data has ended normally and the edge extraction of the second image data has not ended normally, position data is obtained based on the first image data. Acquired,
If it is determined that the edge extraction of the second image data has been completed normally, and it is determined that the edge extraction of the first image data has not been completed normally, position data is obtained based on the second image data. Acquired,
When it is determined that the edge extraction of the first image data and the edge extraction of the second image data have been completed normally, the respective edge strengths are calculated, and the image data having a larger calculated edge strength is selected. Then, the image measurement method characterized by acquiring position data based on the selected image data.   19. The image measurement method according to claim 12, wherein image data that is a basis of measurement is displayed. Imaging means for capturing an image of the measurement object;
Epi-illumination means for illuminating the surface of the measurement object from the installation side of the imaging means;
In an image measurement method that can be executed by an image measurement device comprising: a transmission illumination unit that illuminates a measurement object from a side opposite to the installation side of the imaging unit;
First image data obtained by imaging the measurement object with the imaging means using the epi-illumination means, and second image obtained by imaging the measurement object with the imaging means using the transmission illumination means at substantially the same position. Storing image data and third image data obtained by aligning and combining the first image data and the second image data;
Displaying the first image data;
Accept the designation of the measurement position on the displayed first image data,
Accepts selection of any one of the first image data, the second image data, and the third image data;
One of the first image data, the second image data, and the third image data that has been selected is read out, and the read out first image data, the second image data, or the first image data Obtain position data based on the third image data,
An image measurement method, comprising: performing measurement at a measurement position for which designation has been received based on acquired position data.   21. The image measurement method according to claim 20, wherein selection is received from a displayed screen.   The image measurement method according to any one of claims 18, 20, and 21, wherein the first image data or the third image data is displayed. Imaging means for capturing an image of the measurement object;
Epi-illumination means for illuminating the surface of the measurement object from the installation side of the imaging means;
In a computer program that can be executed by an image measurement apparatus comprising: a transmission illumination unit that illuminates a measurement object from a side opposite to the installation side of the imaging unit;
The image measuring device;
First image data obtained by imaging the measurement object with the imaging means using the epi-illumination means, and second image obtained by imaging the measurement object with the imaging means using the transmission illumination means at substantially the same position. Storage means for storing image data;
Display means for displaying the first image data;
Designation accepting means for accepting designation of a measurement position on the displayed first image data;
The first image data or the second image data is read from the storage unit according to the measurement position received by the designation accepting unit, and the read first image data or second image data is read. A computer program that functions as a position acquisition unit that acquires position data based on the data and a measurement unit that executes measurement at a measurement position for which designation has been received based on the acquired position data. The storage means;
Function as means for storing third image data obtained by aligning and synthesizing the first image data and the second image data;
24. The computer program according to claim 23, wherein said display means functions as means for displaying said first image data or said third image data. The position acquisition means;
Judgment means for judging whether or not the measurement position whose designation is accepted by the designation accepting means is an edge part indicating the outer shape of the measurement object, and when the judgment means judges that it is an edge part of the measurement object The position data is acquired based on the second image data, and when it is determined that the position data is not an edge portion, the position data is acquired based on the first image data. The computer program according to 23 or 24. The position acquisition means;
A means for calculating an edge strength based on the first image data and the second image data when the judgment means judges that the edge portion of the measurement object is present; 26. The computer program according to claim 25, wherein the computer program functions as means for acquiring position data based on image data. Imaging means for capturing an image of the measurement object;
Epi-illumination means for illuminating the surface of the measurement object from the installation side of the imaging means;
In a computer program that can be executed by an image measurement apparatus comprising: a transmission illumination unit that illuminates a measurement object from a side opposite to the installation side of the imaging unit;
The image measuring device;
First image data obtained by imaging the measurement object with the imaging means using the epi-illumination means, and second image obtained by imaging the measurement object with the imaging means using the transmission illumination means at substantially the same position. Storage means for storing image data and third image data obtained by aligning and combining the first image data and the second image data;
Display means for displaying the first image data;
Designation accepting means for accepting designation of a measurement position on the displayed first image data;
Position acquisition means for reading out the third image data from the storage means according to the measurement position designated by the designation receiving means, and obtaining position data based on the read third image data, and the obtained position A computer program that functions as a measurement unit that performs measurement at a measurement position for which designation is received based on data.   28. The computer program according to claim 27, wherein the display means functions as means for displaying the first image data or the third image data. Imaging means for capturing an image of the measurement object;
Epi-illumination means for illuminating the surface of the measurement object from the installation side of the imaging means;
In a computer program that can be executed by an image measurement apparatus comprising: a transmission illumination unit that illuminates a measurement object from a side opposite to the installation side of the imaging unit;
The image measuring device;
First image data obtained by imaging the measurement object with the imaging means using the epi-illumination means, and second image obtained by imaging the measurement object with the imaging means using the transmission illumination means at substantially the same position. Storage means for storing image data;
Display means for displaying the first image data;
Designation accepting means for accepting designation of a measurement position on the displayed first image data;
Edge extraction means for performing edge extraction at a measurement position for which designation has been received based on the stored first image data and second image data;
First determination means for determining whether or not the edge extraction of the first image data has been normally completed by the edge extraction means;
Second determination means for determining whether or not edge extraction of the second image data has been normally completed by the edge extraction means;
Position acquisition means for acquiring position data based on the first image data or the second image data according to the determination results of the first determination means and the second determination means; and the acquired position data To function as a measurement means to execute measurement at the measurement position that received the designation,
The position acquisition means;
Means for obtaining position data on the basis of the first image data when it is determined that the first determination means has ended normally and the second determination means has determined that it has not ended normally;
Means for obtaining position data based on the second image data when it is determined that the second determination means has ended normally and the first determination means has determined that it has not ended normally; and When it is determined that the first determination means and the second determination means have finished normally, the respective edge strengths are calculated, image data having a larger calculated edge strength is selected, and the selected image is selected. A computer program that functions as means for acquiring position data based on data.   30. The computer program according to claim 23, wherein the display means functions as means for displaying image data that is a basis of measurement by the measurement means. Imaging means for capturing an image of the measurement object;
Epi-illumination means for illuminating the surface of the measurement object from the installation side of the imaging means;
In a computer program that can be executed by an image measurement apparatus comprising: a transmission illumination unit that illuminates a measurement object from a side opposite to the installation side of the imaging unit;
The image measuring device;
First image data obtained by imaging the measurement object with the imaging means using the epi-illumination means, and second image obtained by imaging the measurement object with the imaging means using the transmission illumination means at substantially the same position. Storage means for storing image data and third image data obtained by aligning and combining the first image data and the second image data;
Display means for displaying the first image data;
Designation accepting means for accepting designation of a measurement position on the displayed first image data;
Selection accepting means for accepting selection of any one of the first image data, the second image data, and the third image data;
The first image data, the first image data, the second image data, and the third image data received by the selection receiving unit are read from the storage unit, and the read first image data, Functions as a position acquisition unit that acquires position data based on the second image data or the third image data, and a measurement unit that executes measurement at a measurement position that receives a designation based on the acquired position data A computer program characterized by causing   32. The computer program according to claim 31, wherein the selection receiving means functions as means for receiving selection from a displayed screen.   The computer program according to any one of claims 29, 31, and 32, wherein the display means is caused to function as means for displaying the first image data or the third image data.

Images