JP2006312887A - Fluid feeding mechanism - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fluid inputting/outputting means which is thinned, and reduced in power consumption when vibrating and driving a moving body. <P>SOLUTION: A switch device 1 is provided with: a first switch part 6 with an upper electrode 3a and lower electrodes 5a, 5a oppositely arranged with a clearance of a predetermined dimension; and a second switch part 11 having a metal dome 9 arranged on a lower side opposed to the first switch part 6 and expanded at a predetermined height. In the first switch part 6, a first spacer 4 is arranged which has a predetermined thickness (dimension A) for forming a clearance between the upper electrode 3a and the lower electrodes 5a, 5a. In the second switch part, a second spacer 7 is arranged which has the same or more thickness dimension (dimension B) as the swelling height of the metal dome 9. The thickness dimension of the second spacer 7 is formed thicker than the first spacer 4. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a fluid supply mechanism, and more particularly to a fluid supply mechanism capable of blocking various fluids flowing in a flow path by driving an electromagnetic actuator or supplying them to an external device.

As shown in FIG. 12, the conventional fluid supply mechanism 30 has a pump chamber 31, and for example, a pump that operates by repeatedly sucking and supplying fluid into the pump chamber 31 will be described. As described above, a magnet 33 (movable element) made of a permanent magnet is fixed on a thin and elastically deformable diaphragm 32 that shields the pump chamber 31. On the magnet 33, a ring-shaped coil 34 (stator) is disposed with a predetermined interval.
Then, by applying a predetermined voltage current to the coil 34 by the vibration control means 35, a periodic magnetic flux is generated in the coil 34, and the magnet 33 made of a permanent magnet is periodically attracted and repelled in the coil 34. Repeatedly, the magnet 323 and the diaphragm 32 vibrate at a predetermined frequency.

When the magnet 33 is vibrating with the vibration of the diaphragm 32, the fluid is sucked and supplied in the pressure chamber 31 with the single reciprocating vibration.
First, in the vibration of the diaphragm 32, when the diaphragm 32 is deformed upward, the pressure in the pressure chamber 31 is reduced, the suction-side first check valve 36 is opened, and the supply-side second check valve is opened. 38 closes and fluid flows into the pressure chamber 31 from the input port 37.

Thereafter, when the pressure difference between the inside and outside of the pressure chamber 31 disappears, the flow of fluid to the pressure chamber 31 stops, and when the diaphragm 32 is deformed downward, the first check valve 36 on the suction side is closed. Thus, the fluid flowing into the pressure chamber 31 from the input port 37 is compressed, the second check valve 38 on the supply side is opened, and the fluid is discharged to the outside from the discharge port 39.
Such a conventional fluid supply mechanism 30 is a pump capable of supplying fluid in one direction from the other, for example, by repeatedly sucking and supplying the fluid by the diaphragm 32 repeating the vibration with the vibration of the magnet 33. It is used.
Japanese Utility Model Publication No. 2001-263250

However, in the conventional fluid supply mechanism 30, the coil 34 is positioned on the magnet 33 and the diaphragm 32 is vibrated by applying an electric current to the coil 34. Therefore, the fluid input / output means 30 becomes thick. There was a problem of increasing the size.
Further, in order to vibrate the magnet 33 up and down, currents in different directions must be alternately applied to the coil 34 at a predetermined frequency, resulting in a problem that power consumption increases.
When the conventional fluid supply mechanism is used for the pump, the resonance control means 35 changes the vibration cycle of the mover in order to adjust the fluid supply amount.
However, when it is desired to reduce the amount of fluid supplied, there is a problem in that the number of amplitudes of the mover decreases and the amount of fluid supplied becomes uneven.
An object of the present invention is to solve the above-described problems, and to provide a fluid input / output means that can be thinned and can reduce power consumption when the movable element is driven to vibrate.

As a first means for solving the above-described problems, the fluid supply mechanism of the present invention includes an input port through which a predetermined fluid can be sucked and input from the outside, and the fluid is input from the input port into an internal flow path. The fluid input / output means capable of outputting to the outside from the output port, the fluid shutoff means capable of shutting off the flow of the fluid sucked into the flow path by the fluid input / output means, the fluid input / output means and the fluid An actuator capable of driving the shut-off means, and the actuator has a magnet magnetized with different magnetic poles on one surface and the other surface, and a coil yoke disposed with a predetermined gap from the outer peripheral end surface of the magnet. A coil,
By energizing the coil, either the magnet side or the coil side becomes a movable element that can vibrate with an amplitude of a predetermined dimension, and the other becomes a stator, and the coil is not energized. In the initial state, the magnetic flux of the magnet acts on the coil yoke, and at least the movable element is located near the center position in the thickness direction of the stator, and the movement is stopped. Then, at least the mover located near the center position is moved up in one direction or lowered in the other direction with a movement amount of half the amplitude.
Further, as a second means for solving the above problem, in the fluid input / output means in the initial state, at least the mover is located near the center position, and the coil is energized in the initial state. The movable element moves in at least one direction from the vicinity of the center position so that the fluid can be sucked into the flow path from the input port, or the fluid in the flow path can be output from the output port. It is characterized by being.
Further, as a third means for solving the above problem, in the fluid blocking means in the initial state, at least the movable element is located at one side position in the thickness direction of the stator, and the fluid flow When the coil is energized in the initial state, the mover moves from the one one-side position to the other one-side position, and the fluid whose flow has been blocked flows in the flow path. It is characterized by flowing.

As a fourth means for solving the problem, a first flow path through which the fluid sucked from the input port flows is formed between the input port and the fluid blocking unit. The channel is formed with a blocking port capable of blocking the flow of the fluid flowing in the first channel, and the blocking port is moved by at least the mover moving from the other one side position to the one one side position. It is possible to shield.
Further, as a fifth means for solving the above-mentioned problem, the blocking opening is formed in a round hole shape, and the movable element is formed with a convex portion having an arcuate tip that can shield the blocking opening. The blocking port can be directly shielded by the tip of the convex portion.
Further, as a sixth means for solving the above-described problem, a sheet member having a predetermined thickness and having a gap of a predetermined dimension is disposed at the lower part of the blocking opening and moves in the one direction. When the tip of the convex portion of the mover presses the sheet member, the blocking opening is indirectly blocked through the sheet member.

Further, as a seventh means for solving the above problem, the fluid input / output means is formed with a pump chamber having a predetermined volume formed in a part of the flow path, and the initial state when the coil is not energized is formed. If the coil is energized when the mover is at least near the center position in the state, the mover moves in at least one direction with a movement amount that is half the amplitude, and the internal pressure of the pump chamber increases. It is characterized by that.
Further, as an eighth means for solving the above-mentioned problem, the pump chamber is connected to a first flow path having one end connected to the input port and the other end is connected to the output port. The pump chamber has a suction port through which the fluid can be sucked from the first flow channel, and a discharge port through which the fluid sucked into the pump chamber can be discharged to the second flow channel. And a first check valve capable of shielding the suction port is disposed at the suction port, and the fluid supplied to the second flow path flows back to the pump chamber at the discharge port. A second check valve for preventing
When the coil in the initial state is energized, the mover moves in the one direction by the half movement amount, the internal pressure of the pump chamber rises, and the first check valve shields the suction port. In addition, the second check valve opens the discharge port, and the fluid is supplied from the pump chamber to the second flow path.

Further, as a ninth means for solving the above problem, after energizing the coil, the first check valve shields the pump chamber and the second check valve opens the pump chamber.
When the coil is not energized, the mover moves to the vicinity of the center position, the internal pressure of the pump chamber decreases, the first check valve opens the pump chamber and the second check valve. The fluid supply mechanism according to claim 8, wherein a valve shields the pump chamber, and the fluid in the first flow path is sucked into the pump chamber.
As a tenth means for solving the problem, the pump chamber has an elastically deformable diaphragm, the movable element is attached to the diaphragm, and the movement of the movable element causes the pump chamber to move. The fluid supply mechanism according to any one of claims 7 to 9, wherein the internal pressure is variable.
Further, as an eleventh means for solving the above-mentioned problem, a convex portion formed on the movable element is fixed to the diaphragm, and the diaphragm is elastically deformable by vibrating the movable element. The fluid supply mechanism according to claim 10.

In the fluid supply mechanism of the present invention, in the initial state when the coil is not energized, the magnetic flux of the magnet acts on the coil yoke, and at least the mover is positioned near the center position in the thickness direction of the stator. When movement is stopped and the coil is energized, the mover located at least near the center position is moved in one direction or moved in the other direction with a movement amount that is half the predetermined amplitude. The fluid blocking mechanism and the fluid input / output means can be driven with a small amplitude, and the vibration speed of the mover can be increased. Therefore, the fluid can be appropriately supplied to the external device without unevenness.
In the fluid input / output means in the initial state, at least the mover is positioned near the center position. When the coil is energized in the initial state, the mover moves in at least one direction from the vicinity of the center position, and fluid is input. Since the fluid can be sucked into the flow channel from the port or the fluid in the flow channel can be output from the output port, the fluid input / output means with the increased vibration speed of the mover makes the fluid supply more appropriate and uniform. It can be carried out.
The fluid blocking means in the initial state is such that at least the mover is positioned at one side position in the thickness direction of the stator and the flow of the fluid is blocked. Since the fluid that has been blocked from flowing from one side position to the other side position flows in the flow path, it is not necessary to energize the coil when blocking the fluid flow. Power consumption can be reduced.

A first flow path through which the fluid sucked from the input port flows is formed between the input port and the fluid blocking means, and the flow of the fluid flowing in the first flow path is blocked in the first flow path. A possible blocking port is formed, and the blocking port can be shielded by a mover that moves from at least one other side position to one side position, so that the fluid sucked into the flow path flows backward to the input port side. Can be surely prevented.
Further, the blocking port is formed in a round hole shape, and the movable element has an arc-shaped convex portion at the tip that can shield the blocking port, and the blocking port can directly shield the blocking port. Therefore, the number of parts can be reduced.
In addition, a sheet member having a predetermined thickness having a gap of a predetermined dimension is disposed at the lower part of the blocking opening, and the tip of the convex portion of the mover moving in one direction presses the sheet member. Since the blocking port is blocked indirectly, the blocking member can be reliably blocked by the sheet member.
Further, the blocking port is formed in a round hole shape, and the movable element has an arc-shaped convex portion at the tip that can shield the blocking port, and the blocking port can directly shield the blocking port. Therefore, a fluid supply mechanism having a fluid blocking means with a small number of parts can be provided.
In addition, a sheet member having a predetermined thickness having a gap of a predetermined dimension is disposed at the lower part of the blocking opening, and the tip of the convex portion of the mover moving in one direction presses the sheet member. Since the blocking port is indirectly blocked through the sheet member, the blocking port can be reliably blocked even if the mover is slightly inclined.

The fluid input / output means is formed with a pump chamber having a predetermined volume formed in a part of the flow path, and when the coil is energized at least near the center position in the initial state when the coil is not energized, Since the movable element moves in at least one direction with a movement amount of half the amplitude and the internal pressure of the pump chamber increases, the vibration cycle of the movable element of the fluid input / output means can be easily increased with low power consumption. .
By increasing the vibration cycle, the fluid can be continuously supplied to the external device side without any unevenness.
When the coil in the initial state is energized, the mover moves in one direction with a half movement amount, the internal pressure of the pump chamber rises, the first check valve shields the suction port, and the second check Since the valve opens the outlet and the fluid is supplied from the pump chamber to the second flow path, the fluid is reliably supplied from the upstream side to the downstream side by the first and second check valves. it can.

When the coil is energized and the first check valve shields the pump chamber and the second check valve opens the pump chamber and then the coil is de-energized, the mover moves near the center position. The first check valve opens the pump chamber and the second check valve shields the pump chamber, and the fluid in the first flow path is sucked into the pump chamber. Therefore, it is possible to reliably perform the pump operation and supply the fluid to the external device.
The pump chamber has an elastically deformable diaphragm, and a movable element is attached to the diaphragm so that the internal pressure of the pump chamber can be varied by moving the movable element. Fluid can be reliably supplied to external equipment by changing internal pressure.
In addition, the convex part formed on the mover is fixed to the diaphragm, and the mover vibrates so that the diaphragm can be elastically deformed. Therefore, the diaphragm is vibrated reliably, and the fluid is more reliably transferred to the external device. Can supply.

  Hereinafter, embodiments of the fluid supply mechanism of the present invention will be described with reference to the drawings. 1 is an external view of a fluid supply mechanism of the present invention, FIG. 2 is a configuration diagram thereof, FIG. 3 is a cross-sectional view of main parts of FIG. 1, and FIG. 4 is a cross-sectional view of main parts of an actuator according to the present invention. FIG. 5 is a diagram for explaining the operation of the actuator, FIGS. 6 and 7 are sectional views for explaining the fluid blocking means according to the present invention, and FIGS. 8 to 10 are diagrams for explaining the fluid according to the present invention. It is principal part sectional drawing explaining operation | movement of an input-output means, FIG. 11 is schematic which demonstrates the modification of a fluid interruption | blocking means.

First, as shown in FIG. 1, the fluid supply mechanism 1 of the present invention has a housing 2 made of a rectangular parallelepiped. The inside of the housing 2 includes a fluid shut-off means 6 and a fluid inlet. The output means 20 and the first and second flow paths 7 and 24 are disposed.
The housing 2 is formed with an input port 3 on the left side in the figure and an output port 4 on the right side in the figure. The input port 3 is a predetermined liquid fuel used for a fuel cell or the like as shown in FIG. It is connected to a storage tank 5 that stores fluid.
In addition, a first flow path 7 that connects the input port 3 and the fluid blocking means 6 is formed inside the housing 2, and the fluid 8 sucked into the first flow path 7 through the input port 3 is shown in FIG. 6, shown in black in FIG. 8 and flows in the direction of arrow R. The fluid 8 sucked into the first flow path 7 from the input port 3 can be blocked by the fluid blocking means 6.

As shown in FIGS. 6 and 7, the fluid blocking means 6 includes a flow path forming plate 9 having a predetermined thickness formed below the upper plate 2a of the housing 2, and the flow path forming plate 9 and the upper plate 2a. Between the two, a first branch channel 7a constituting the first channel 7 is formed on the left side of the figure, and an inflow port 7b is formed through the first branch channel 7a.
A second branch channel 7c is formed at the lower part of the channel forming plate 9 so as to connect to the inlet 7b, and a round hole-shaped blocking port 7d having a predetermined diameter is formed on the right side of the second branch channel 7c in the figure. It is formed through.
A sheet member 10 made of a thin, elastically deformable rubber film or the like is disposed at the lower portion of the flow path forming plate 9.
That is, the flow path forming plate 9 having the first and second branch flow paths 7a and 7c of the first flow path 7 is sandwiched between the upper plate 2a of the housing 2 and the sheet member 10, and the sheet member 10 is 2 is mounted on the actuator support member 2b.

,
In addition, an actuator 11 of the fluid blocking means 6 capable of directly or indirectly blocking the blocking port 7d is disposed below the blocking port 7d formed in the flow path forming plate 9. Further, the blocking port 7d connected to the second branch channel 7c is connected to the third branch channel 7e.
That is, as shown in FIG. 6, the first flow path 7 includes a first branch path 7a, an inlet 7b, a second branch path 7c, a blocking port 7d, and a third branch path 7e. The fluid 8 in which this portion is painted black flows from the arrow L to the arrow R direction.
The fluid blocking means 6 can block the flow of the fluid 8 from the direction of the arrow L to the direction of the arrow R by the sheet member 10 indirectly blocking the blocking port 7d by the operation of the actuator 11 described later. .

Further, as shown in FIG. 4, the actuator 11 of the fluid shut-off means 6 that can elastically deform the sheet member 10 upward in the figure and shield the shut-off port 7d has one surface (the top surface shown in the drawing) and the other surface (the top surface shown in the drawing). On the lower surface of the figure, a magnet 12 having a predetermined thickness in which different magnetic poles (for example, one surface has an N pole and the other surface has an S pole) is disposed at the center.
The magnet 12 has an outer peripheral end surface 12a having a circular outer shape, and a first magnet yoke 13 made of a magnetic material having the same outer diameter as the magnet 12 is adhered to one surface (the upper surface in the drawing) with an adhesive or the like. And is fixed.
The first magnet yoke 13 has a convex portion 13a that protrudes at a predetermined height at the center.

A second magnet yoke 14 having substantially the same shape as the first magnet yoke 13 is fixed to the lower surface of the magnet 12 with an adhesive or the like, and the second magnet yoke 14 protrudes downward at a predetermined height at the center. The convex part 14a to be formed is formed.
The magnet 12 and the first and second magnet yokes 13 and 14 constitute a mover.
In addition, a ring-shaped coil 15 is disposed outside the outer peripheral end surface 12a of the circular magnet 12 which is a mover and a gap having a dimension G.
That is, the circular magnet 12 is located inside the inner peripheral surface 15a of the ring-shaped coil 15 with a gap of a dimension G interposed therebetween.

The coil 15 includes first and second coils 16 and 17, and the first and second coils 16 and 17 sandwich a center yoke 18 a of a coil yoke 18 described later. Are stacked one above the other.
The first and second coils 16 and 17 are covered with a coil yoke 18 having a predetermined thickness made of a magnetic material, and the inner peripheral surface 15a side of the coil 15 facing the outer peripheral end surface 12a of the magnet 12 is exposed.

The coil yoke 18 is formed with a center yoke 18a for partitioning the first and second coils 16 and 17 up and down in the drawing, and a first yoke piece 18b is formed on one surface (upper surface in the drawing) of the first coil 16. The second yoke piece 18c is disposed in close contact with the other surface (the lower surface in the drawing) of the second coil 17.
That is, the coil 15 is composed of first and second coils 16 and 17 that are stacked with the center yoke 18a interposed therebetween, and the magnet 12 side is a mover and the coil 15 side is a stator.

In such an actuator 11, the magnetic flux generated by alternately energizing the first and second coils 16, 17 with current in one direction and the other direction acts on the magnetic flux of the magnet 12, and the mover The magnet 12 is capable of vibrating in the vertical direction in the figure with a predetermined amplitude.
The operation of the actuator 11 is as follows. First, as shown in the schematic diagram of FIG. 5, the magnet 12, which is a mover when the coil 15 is not energized, has the dimensions from the first yoke piece 18 b to the first magnet yoke 13. The center position where the dimension from the second yoke piece 18c to the second magnet yoke 14 is substantially the same (the center line C which is the center of the thickness direction of the center yoke 18a and the thickness direction of the magnet 12 which is the mover) Position near the center of the same line).

At this time, the dimension from the first magnet yoke 13 to the center yoke 18a on the coil 15 side is A, and the dimension from the first magnet yoke 13 to the first yoke piece 18b is dimension B.
The dimensions A and B can be varied by varying the thickness dimension of the magnet 12 or the first and second magnet yokes 13 and 14.

When the magnet 12 is positioned in the vicinity of the center position on the center line C in the initial state when the first and second coils 16 and 17 are not energized, the magnetic path at this time is as shown in FIG. In addition, the lines of magnetic force emitted from, for example, the N pole magnetized on the upper surface side of the magnet 12, from the second yoke piece 18 c via the center yoke 18 a of the coil yoke 18 on the stator side from the first magnet yoke 13. There is a first route D that returns to the S pole on the lower surface side via the second magnet yoke 14.
In addition, the lines of magnetic force emitted from the north pole of the magnet 12 pass through the first magnet yoke 13 through the first yoke piece 18b and from the second yoke piece 18c through the second magnet yoke 14 of the magnet 12 to the lower surface side. When there is a second route E returning to the S pole and the magnetic force of the second route E is larger than the magnetic force of the first route D, the magnet 12 as the mover is positioned at the center position on the center line C as shown in FIG. It is located in the vicinity and stops moving.

  That is, in the case of the actuator 11 of the first embodiment in which the thickness of the magnet 12 is a predetermined thickness or more and the relationship between the dimensions A and B is A> B as shown in FIG. In the initial state in which the second coils 16 and 17 are not energized, the magnetic force of the magnet 12 that attracts the coil yoke 18 is stronger in the magnetic path of the second route E than in the magnetic path of the first route D. Stops near the center position.

The actuator 11 according to the first embodiment is in a predetermined direction with respect to the first and second coils 16 and 17 in a state where the magnet 12 is located near the center position in an initial state when the coil 15 is not energized. By energizing this current, it is possible to move the magnet 12 located near the center position in one upward direction or another downward direction.
That is, in the actuator 11 according to the first embodiment, the magnet 12 at the center position in the initial state when no current is applied is raised from the center position by energizing the coil 15 and faces the first yoke piece 18b. It can be moved down to one side position or the other one side position facing the second yoke piece 18c.
That is, in the actuator 11 of the first embodiment, when the coil 15 is not energized, the magnet 12, which is the mover at the center, moves half the predetermined amplitude from one side position to the other side position. It is designed to rise in one direction or descend in the other direction.

Therefore, the movable element can be vibrated with low power consumption. Since the movable element at this time has half the normal amplitude, the time required for vibration can be shortened, and the sheet member 9 can be vibrated at high speed.
When the energization of the coil 15 is released, the magnet 12 is located near the center position on the center line C by its own magnetic force and stops moving.
In addition, when reverse current is applied to the first and second coils 16 and 17 when the magnet 12 is raised to one side position, the magnet 12 can be lowered below the center position. .

Also, the actuator of the second embodiment in which the thickness of the magnet 12 is made thinner than a predetermined dimension and the relationship between the dimensions A and B is A <B is omitted from the illustration, but for convenience, the first embodiment is omitted. The same numbers as those of the actuator 11 will be described.
In the second actuator 11, since the relationship between the dimensions A and B is A <B, the magnetic force of the magnetic path of the first route D is stronger than the magnetic force of the magnetic path of the second route E.
As a result, when the upper surface side of the magnet 12 is N-pole, the actuator 11 according to the second embodiment moves up the magnet 12 that is the mover in the initial state when the coil 115 is not energized. Then, the first magnet yoke 13 and the first yoke piece 18b move to one side position where the first magnet yoke 13 and the first yoke piece 18b approach each other, and the movement is stopped.

If the lower surface of the magnet 12 is an N pole, the magnet 12 in the initial state when no current is applied to the coil 115 is lowered and the other one side position where the second magnet yoke 14 and the second yoke piece 18c approach each other. The movement will stop and stop.
That is, in the actuator 11 of the second embodiment in which the relationship between the dimensions A and B is A <B, in the initial state when the coil 15 is not energized, the magnet 12 as the mover is on one side or the other side. The movement stops at the position.

Then, by using the actuator of the second embodiment for the fluid blocking means 6, the magnet 12 that is a mover when the coil 15 is not energized is positioned at one side position or the other side position. It has become.
Thereafter, when the coil 15 is energized, it can be lowered from one side position to the other side position or raised from the other side position to one side position and vibrated with a predetermined amplitude.
For example, the operation of the fluid blocking means 6 shown in FIG. 6 will be described using the actuator 11 according to the second embodiment. In the initial state when the coil 15 is not energized, the magnet is a mover. 12 rises and moves to one side position side to stop the movement. The blocking port 7d at this time is blocked, and the flow of the fluid 8 stops between the second branch channel 7c and the third branch channel 7e of the first channel 7.

That is, when the fluid 8 is not supplied to the fluid input / output means 20, it is possible to cut off the fluid 8 by turning off the coil 15, thereby reducing power consumption.
Further, when the mover is lowered and is in the other one-sided position when no current is applied, by applying a predetermined current to the coil 15, the magnet 12 as the mover is brought into one-sided position as shown in FIG. Ascending force to raise is generated and the mover rises.
Then, the convex part 13a pushes up the sheet member 10, the blocking port 7d is indirectly blocked, and the flow of the fluid 8 in the first flow path 7 is blocked.
In the fluid blocking mechanism 6 of the fluid supply mechanism 1 of the present invention, the convex portion 13a of the first magnet yoke 13 that is a part of the mover pushes up the sheet member 10 to indirectly block the blocking port 7d. However, as a modification, the sheet member 10 may not be used, and the projection 13a may directly block the blocking port 7d as shown in FIG.

However, if the shape of the tip of the convex portion 13a at this time is a flat shape shown in FIG. 11A, the magnet 12 is inclined. And since there exists a possibility that the convex part 13a becomes diagonal and cannot interrupt | block the cutoff port 7d completely, as shown to FIG. 11B, the convex part 13a front end is formed in circular arc shape, and the cutoff port 7d is formed. It may be designed to block directly.
In the embodiment of the present invention, the actuator 11 according to the second embodiment is used for the fluid blocking mechanism 6. However, the first embodiment in which the mover is located at the center position when no power is supplied. These actuators may be used.

Further, as shown in FIG. 2, a fluid input / output means 20 comprising a pump is disposed downstream of the fluid blocking means 6 of the fluid 8 flowing in the direction of arrow L. As shown, the left side of one side is connected to the third partial flow path 7e of the first flow path 7.
In addition, a pump chamber 21 having a predetermined volume is formed on the lower surface side of the flow path forming plate 9 where the right end portion of the third branch flow path 7e is formed, and one end side of the pump chamber 21 is the first flow path 7. And a second flow path 23 connected to the power generation cell of the fuel cell, for example, which is the external device 22 through the output port 4.

In such a fluid input / output means 20, as shown in FIG. 8, a pump chamber 21 is formed in a portion where the convex portion 13 a of the actuator 11 faces on the lower side of the flow path forming plate 9. The lower side is shielded by a thin diaphragm 24 having elasticity, so that the fluid 8 does not leak into the housing 2.
The tip of the convex portion 13a of the first magnet yoke 13 is fixed to the diaphragm 24 with an adhesive or the like, and the magnet 12, which is a mover, vibrates, so that the portion of the diaphragm 24 in which the pump chamber 21 is formed moves up and down. It vibrates and the internal pressure of the pump chamber 21 changes.

Further, the pump chamber 21 has a suction port 7f through which the fluid 8 can be sucked from the third branch channel 7e of the first channel 7 and a drain 8 from which the fluid 8 sucked into the pump chamber 21 can be discharged into the second channel 23. An outlet 7g is formed.
A first check valve 25 is vertically movable in a portion of the pump chamber 21 where the suction port 7f is formed, and the fluid 8 is sucked into the pump chamber 21 from the third branch flow path 7e. When the internal pressure in the chamber 21 rises, the first check valve 25 shields the suction port 7f and prevents the fluid in the pump chamber 21 from flowing back into the third branch flow path 7e.
A second check valve 26 for preventing the fluid 8 discharged to the second flow path 23 from flowing back into the pump chamber 21 moves up and down in the second flow path 23 in the portion where the discharge port 7g is formed. Arranged freely.

The operation of the fluid input / output means 20 will be described using the actuator 11 according to the first embodiment. First, in the initial state when the coil 15 is not energized, as shown in FIG. The mover magnet 12 is located near the center position on the center line C and stops moving.
The pump chamber 21 in this initial state is filled with the fluid 8.

When the coil 15 is energized when the mover is in the initial state, the magnet 12 located near the center position moves to one side position side as shown in FIG. To rise.
As a result, the tip of the convex portion 13a presses the diaphragm 22, the pump chamber 21 is compressed, and the internal pressure rises.
As the internal pressure of the pump chamber 21 increases, the first check valve 25 shields the suction port 7f and the second check valve 26 opens the discharge port 7g.
As a result, the fluid 8 in the pump chamber 21 is discharged from the discharge port 7 g to the second flow path 23 and can be supplied to the external device 22 through the output port 4.

Next, after the fluid 8 in the pump chamber 21 is discharged to the second flow path 23 and the coil 15 is de-energized, the magnet 12 is moved near the center position on the center line C by the magnetic path of the second route E. The movement stops due to suction.
And the internal pressure of the pump chamber 21 falls, the first check valve 25 opens the suction port 7f, and the second check valve 26 shields the discharge port 7g.
As a result, the fluid 8 located in the third branch channel 7 e of the first channel 7 is sucked into the pump chamber 21.

By using the actuator 11 of the first embodiment for the fluid input / output means 20 of the fluid supply mechanism 1 of the present invention, the moving amount of the magnet 12 as the mover can be reduced to half the normal amplitude. The discharge amount of the fluid 8 by one vibration is reduced, but the diaphragm 24 can be vibrated at high speed, and the fluid 8 can be continuously supplied to the external device 22 without being interrupted without being interrupted. .
That is, the supply of the fluid 8 to the external device 22 can be continuously performed without unevenness.
Further, when it is desired to supply a large amount of fluid 8 with a single vibration of the mover, the amplitude of the magnet 12 as the mover is increased by using the actuator 11 of the second embodiment in the relationship of A <B. Thus, it is possible to supply many fluids 8 at a time.

In the description of the embodiment of the present invention, the magnet 12 is described as the mover and the coil 15 is the stator. However, the magnet 12 may be the stator and the coil 15 is the mover.
Further, a pump chamber may be formed on the lower side of the mover so that the internal pressure of the pump chamber 21 decreases when the mover rises, and the internal pressure of the pump chamber 21 increases when the mover descends.

It is an external view of the fluid supply mechanism of this invention. It is a block diagram of FIG. It is principal part sectional drawing of FIG. It is principal part sectional drawing of the actuator concerning this invention. It is a figure explaining operation | movement of an actuator. It is principal part sectional drawing explaining the fluid interruption | blocking means concerning this invention. It is principal part sectional drawing explaining operation | movement of the fluid interruption | blocking means concerning this invention. It is principal part sectional drawing explaining operation | movement of the fluid input / output means concerning this invention. It is principal part sectional drawing explaining operation | movement of the fluid input / output means concerning this invention. It is principal part sectional drawing explaining operation | movement of the fluid input / output means concerning this invention. It is principal part sectional drawing explaining operation | movement of the fluid input / output means concerning this invention. It is the schematic explaining the conventional fluid supply mechanism.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Fluid supply mechanism 2 Case 2a Upper plate 2b Actuator support member 3 Suction joint 4 Discharge joint 5 Storage tank 6 Fluid blocking means 7 First flow path 8 Fluid 9 Flow path forming plate 10 Sheet member 11 Actuator 12 Magnet 13 First magnet yoke 13a Convex portion 15 Coil 20 Fluid input / output means 21 Pump chamber 23 Second flow path 24 Diaphragm 25 First check valve 26 Second check valve

Claims (11)

An input port through which a predetermined fluid can be sucked from outside and input, fluid input / output means capable of inputting the fluid from the input port into an internal flow path and outputting the fluid from the output port to the outside, and the fluid input / output A fluid blocking means capable of blocking the flow of the fluid sucked into the flow path by means, and an actuator capable of driving the fluid input / output means and the fluid blocking means,
The actuator includes a magnet having different magnetic poles magnetized on one and the other surfaces, and a coil having a coil yoke disposed with a predetermined gap from the outer peripheral end surface of the magnet,
By energizing the coil, either the magnet side or the coil side becomes a movable element that can vibrate with an amplitude of a predetermined dimension, and either one becomes a stator,
In an initial state when the coil is not energized, the magnetic flux of the magnet acts on the coil yoke, and at least the mover is positioned near the center position in the thickness direction of the stator and stops moving. When the coil is energized, at least the mover located in the vicinity of the center position is moved up in one direction or lowered in the other direction with a movement amount half the amplitude. Fluid supply mechanism.   The fluid input / output means in the initial state has at least the mover positioned in the vicinity of the center position. When the coil is energized in the initial state, the mover moves in at least one direction from the vicinity of the center position. The fluid supply mechanism according to claim 1, wherein the fluid can be sucked into the flow path from the input port, or the fluid in the flow path can be output from the output port.   The fluid blocking means in the initial state is such that at least the mover is located at one side position in the thickness direction of the stator and the flow of the fluid is blocked, and the coil is energized in the initial state. The movable element moves from the one one-side position to the other one-side position so that the fluid whose flow has been blocked flows in the flow path. Or the fluid supply mechanism of 2.   A first channel through which the fluid sucked from the input port flows is formed between the input port and the fluid blocking means, and the fluid flowing in the first channel is formed in the first channel. 4. A blocking port capable of blocking the flow of the gas is formed, and the blocking port can be blocked by at least the movable element moving from the other one side position to the one one side position. The fluid supply mechanism described.   The blocking opening is formed in a round hole shape, and the movable element has an arc-shaped convex portion that can shield the blocking port, and the blocking port can directly shield the blocking port. The fluid supply mechanism according to claim 4, wherein   A sheet member having a predetermined thickness and having a gap of a predetermined dimension is disposed at the lower portion of the blocking opening, and the tip of the convex portion of the mover moving in the one direction presses the sheet member. The fluid supply mechanism according to claim 4, wherein the blocking port is blocked indirectly through the sheet member.   In the fluid input / output means, a pump chamber having a predetermined volume formed in a part of the flow path is formed, and when the mover is at least near the center position in the initial state when the coil is not energized, 3. The fluid according to claim 1, wherein when the coil is energized, the mover moves in at least one direction by a movement amount that is half the amplitude, and the internal pressure of the pump chamber increases. Supply mechanism. The pump chamber is connected at one end to a first flow path connected to the input port and at the other end is connected to a second flow path connected to the output port. A suction port capable of sucking the fluid from the flow path and a discharge port capable of discharging the fluid sucked into the pump chamber to the second flow path;
The suction port is provided with a first check valve that can shield the suction port, and the discharge port prevents the fluid supplied to the second flow path from flowing back into the pump chamber. A second check valve of
When the coil in the initial state is energized, the mover moves in the one direction by the half movement amount, the internal pressure of the pump chamber rises, and the first check valve shields the suction port. The fluid supply mechanism according to claim 7, wherein the second check valve opens the discharge port, and the fluid is supplied from the pump chamber to the second flow path. After energizing the coil, the first check valve shields the pump chamber and the second check valve opens the pump chamber.
When the coil is not energized, the mover moves to the vicinity of the center position, the internal pressure of the pump chamber decreases, the first check valve opens the pump chamber and the second check valve. The fluid supply mechanism according to claim 8, wherein a valve shields the pump chamber, and the fluid in the first flow path is sucked into the pump chamber.   The pump chamber has an elastically deformable diaphragm, the movable element is attached to the diaphragm, and the internal pressure of the pump chamber is variable by movement of the movable element. The fluid supply mechanism according to any one of 7 to 9. The fluid supply mechanism according to claim 10, wherein a convex portion formed on the movable element is fixed to the diaphragm, and the diaphragm is elastically deformable by the vibration of the movable element.

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