JP2006311443A - Piezoelectric resonance element and component thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a piezoelectric resonance element which has a favorable resonant characteristic not affected by spread vibration, whose electrode construction is simple, and which utilizes a contour slip vibration mode capable of reducing a number of components. <P>SOLUTION: A piezoelectric resonance element 1 has first to fourth electrodes 33 to 36 formed on the first principal surface 2a of a square-shaped piezoelectric plate 2, and separated by a first virtual line that passes through a center and connects middle points of a pair of sides facing each other, and a second virtual line that orthogonally intersects with the first virtual line and connects middle points of the other pair of sides facing each other. A common electrode 37 is formed on a second principal surface 2b so as to face the first to the fourth electrodes 33 to 36 through the piezoelectric plate 2. Different electric potential is supplied with respect to the first and the third electrodes 33, 35 arranged so as to face each other in an oblique direction through the center of the first principal surface, and the second and the fourth electrodes 34, 36 arranged so as to face each other in an oblique direction through the center in order to utilize a contour slip mode. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a piezoelectric resonance element and a piezoelectric resonance component used as a resonator and a bandpass filter, and more particularly to a piezoelectric resonance element and a piezoelectric resonance component using contour slip vibration of a square plate.

  Conventionally, a piezoelectric resonator using contour vibration of a square plate is known as a resonator in the kHz band.

For example, Patent Document 1 below discloses a contour vibration resonator shown in FIG. The contour vibration resonator 101 includes a square plate-like piezoelectric substrate 102. On the upper surface of the piezoelectric substrate 102, arc-shaped saddle-shaped electrodes 103a, 103b, 103c, and 103d divided into four are provided. In the contour vibration resonator 101, the piezoelectric substrate 102 is polarized by applying a DC voltage to the saddle electrodes 103a to 103d. Then, the above polarization, the portion interdigital electrodes 103a~103d are formed, are respectively, functions as a transducer T ₁ through T _4. In use, the transducers T ₁ and T ₃ are positively connected and the transducers T ₂ and T ₄ are reversely connected, so that when the displacement of the transducers T ₁ and T ₃ is expanded or contracted, the transducer T ₂ , T ₄ is in a contracted or elongated state. And by applying an alternating voltage, it is said that the resonance characteristic based on the outline vibration of a square plate will be obtained based on the fluctuation | variation of the said displacement.

On the other hand, the following Patent Document 2 discloses a piezoelectric resonator schematically shown in FIG. In the piezoelectric resonator 121, first to fourth resonance electrodes 123 a to 123 d are formed on an annular piezoelectric plate 122. The resonant electrodes 123a to 123d are formed by forming an electrode on the entire surface of one surface of the ring-shaped piezoelectric plate 122 and then dividing it into four parts. Therefore, the electrodes 123a to 123d are separated so as not to be short-circuited. On the other hand, resonance electrodes 124a to 124d are formed on the lower surface of the piezoelectric substrate 122 in the same manner so as to face the resonance electrodes 123a to 123d. Then, as shown in FIG. 11, the resonance electrodes 123a and 123c facing each other through the center are commonly connected to one terminal, and the resonance electrodes 123b and 123d are commonly connected to the other terminal. . By applying an AC voltage to these terminals, resonance characteristics based on the contour vibration of the annular piezoelectric body 122 can be obtained.
JP-A 64-61112 JP-A-6-61776

  In the contour vibration resonator 101 and the piezoelectric resonator 121 described in Patent Documents 1 and 2, by using the contour vibration, resonance characteristics in a higher frequency range can be used than when the square plate spread vibration is used. .

  However, in the contour vibration resonator 101 described in Patent Document 1, it has been necessary to form the saddle-shaped electrodes 123a to 123d having complicated shapes as described above. In the piezoelectric resonator 121 described in Patent Document 2, after the annular piezoelectric body 122 is formed, four resonance electrodes 123 a to 123 d and 124 a to 124 d are further provided on both surfaces of the annular piezoelectric body 122. It had to be formed so as to face each other accurately.

  That is, in the contour vibration resonator 101 and the piezoelectric resonator 121, the electrode structure has to be complicated, the electrode forming process is complicated, and the cost is high. Also, the circuit configuration for applying a voltage during excitation has to be complicated. That is, the number of contacts between the resonant electrode and the circuit for applying the voltage is relatively large, and the number of parts has to be increased. Therefore, it was not sufficient in terms of reliability.

  The object of the present invention is to simplify the structure of the resonance electrode in view of the current state of the prior art described above, reduce the number of components and improve reliability, and use inexpensive contour vibration. The object is to provide a piezoelectric resonator.

  According to a wide aspect of the present invention, there is provided a piezoelectric plate having first and second main surfaces facing each other, polarized in the thickness direction, and having a square planar shape of the first and second main surfaces. In the first main surface of the piezoelectric plate, a first imaginary line that passes through the center and connects the midpoints of a pair of opposing sides, and another group that is orthogonal to and faces the first imaginary line First to fourth electrodes separated by a second imaginary line connecting the midpoints of the sides of the first and second electrodes of the piezoelectric plate so as to face the first to fourth electrodes through the piezoelectric plate. A common electrode formed on a surface, and among the first to fourth electrodes, the first and third electrodes facing in an oblique direction through the center of the first main surface; The second and fourth electrodes are electrically connected to each other, and different potentials are applied to the first and third electrodes and the second and fourth electrodes. Contour shear vibration mode is configured to be excited I, the piezoelectric resonator element is provided.

  In a specific aspect of the piezoelectric resonator according to the present invention, the common electrode is used as a terminal connected to a ground potential, thereby forming a three-terminal filter.

  In the piezoelectric resonant component according to the present invention, first to fourth electrode lands that are electrically connected to the first to fourth electrodes, respectively, are formed on the upper surface, and the first to fourth electrodes are formed. A case substrate formed so that first to fourth terminal electrodes for electrically connecting the lands to the outside are electrically connected to the first to fourth electrode lands, and an upper surface of the case substrate A piezoelectric resonant element configured according to the present invention mounted with the second main surface side up, and placed on the second main surface of the piezoelectric plate of the piezoelectric resonant element; and A terminal plate having a spring terminal portion that is elastically contacted with the common electrode on the second main surface, and an opening that opens downward, so that the piezoelectric resonant element and the terminal plate are accommodated on the opening side. A case member fixed to the case substrate, and the case member to the case substrate. By constant, wherein the spring terminal portion is elastically contacted with the common electrode.

  In the piezoelectric resonant element according to the present invention, the first to fourth electrodes are formed on the first main surface of the square plate-shaped piezoelectric plate, and the common electrode is formed on the second main surface. In a relatively simple configuration, the contour slip vibration mode can be strongly excited by applying different potentials to the first, third and second, fourth electrodes. Therefore, as will be described later, it is possible to easily provide a resonator and a bandpass filter that are less affected by spreading vibration and that are low-cost and have a small number of components, which are piezoelectric resonance elements using contour sliding mode vibration. It becomes possible.

  Further, in the present invention, when the common electrode is used as a terminal connected to the ground potential, thereby forming a three-terminal filter, the structure is relatively simple and widened according to the present invention. It is possible to provide a piezoelectric filter that is hardly affected by vibration and has excellent filter characteristics.

  A piezoelectric resonance element is mounted on the case substrate from the first main surface side, and a case member having an opening opened downward is surrounded by the case substrate so as to surround the piezoelectric resonance element. In the component, since the piezoelectric resonant element of the present invention is housed inside, the piezoelectric resonant component using the contour sliding vibration mode which is inexpensive and hardly affected by the spread vibration can be provided.

  In particular, since the piezoelectric resonance element has a relatively simple structure, a terminal having a case substrate having first to fourth electrode lands on the upper surface and a spring terminal portion elastically contacted with the common electrode of the piezoelectric resonance element. By using the plate, it is possible to easily configure a structure for electrically connecting the electrodes on both principal surfaces of the piezoelectric resonant element. That is, it is possible to provide a piezoelectric resonant component in which the piezoelectric resonant element is accommodated with a relatively simple structure so as not to disturb the vibration of the piezoelectric resonant element. Therefore, it is possible to reduce the number of parts and the cost of the piezoelectric resonant component using the contour sliding vibration mode.

  FIGS. 1A and 1B are a perspective view and a front sectional view showing a piezoelectric resonant element according to an embodiment of the present invention.

  The piezoelectric resonance element 1 includes a square plate-shaped piezoelectric substrate 2. The piezoelectric substrate 2 is made of piezoelectric ceramics such as lead zirconate titanate ceramics, and is polarized in the thickness direction.

  The piezoelectric substrate 2 has a first main surface 2a and a second main surface 2b facing each other. The planar shapes of the main surfaces 2a and 2b are square.

  On the first main surface 2 a of the piezoelectric substrate 2, first to fourth electrodes 3 to 6 are formed. The electrodes 3 to 6 are second imaginary lines connecting the first virtual lines X connecting the midpoints of a pair of opposing sides of the first main surface 2a and the midpoints of the remaining sets of opposing sides. It is separated from the line Y. That is, the first to fourth electrodes 3 to 6 are formed on the first main surface 2a so as not to contact each other. The first to fourth electrodes 3 to 6 have the same shape. In manufacturing, after forming an electrode film on the entire surface of the first main surface 2a, the first to fourth electrodes 3 to 6 can be formed by dividing the electrode film into four as described above.

  But the 1st-4th electrodes 3-6 may be formed separately from the beginning.

  The first electrode 3 and the third electrode 5 are arranged point-symmetrically via the center of the first main surface, that is, the intersection of the virtual lines X and Y. Similarly, the second electrode 4 and the fourth electrode 6 are also arranged point-symmetrically via the center of the first main surface.

  As described above, the first electrode 3 and the third electrode 5 are preferably arranged point-symmetrically via the center of the first main surface, but via the center of the first main surface. It is only necessary to be opposed in an oblique direction. The second electrode 4 and the fourth electrode 6 may also be opposed to each other in an oblique direction with the first main surface as a center, and preferably are point-symmetric via the center of the first main surface as described above. Placed in.

  A common electrode 7 is formed on the second main surface 2 b of the piezoelectric substrate 2. The common electrode 7 is opposed to the first to fourth electrodes 3 to 6 via a piezoelectric plate.

  The first to fourth electrodes 3 to 6 and the common electrode 7 are made of an appropriate conductive material. Examples of such a conductive material include Cu, Al, and alloys thereof. Moreover, it does not specifically limit about the formation method of the 1st-4th electrodes 3-6 and the common electrode 7, It can form by appropriate methods, such as plating, vapor deposition, or sputtering.

  In addition, although the 1st-4th electrodes 3-6 are formed so that it may reach the outer periphery of the 1st main surface 2a, the 1st-4th electrodes 3-6 are 1st main surfaces. It does not need to reach the outer periphery of 2a. The common electrode 7 is not necessarily formed so as to reach the outer peripheral edge of the main surface 2b.

  In the piezoelectric resonant element 1 of the present embodiment, as shown in FIG. 1A, the first and third electrodes 3 and 5 are commonly connected and connected to the first terminal 8. The second and fourth electrodes 4 and 6 are connected in common and connected to the second terminal 9. The common electrode 7 is connected to the third terminal 10.

  Then, by applying an AC electric field from the first and second terminals 8 and 9 and opening the third terminal 10, resonance characteristics using the contour slip vibration mode can be obtained. This will be described with reference to FIGS.

  Consider a moment when a negative potential is applied from the first terminal 8 and a positive potential is applied from the second terminal 9. In that case, electric charges are distributed on the main surface 2a of the piezoelectric plate 2 as shown in a schematic plan view in FIG. In FIG. 2, symbols in which + and − are circled indicate portions where positive or negative charges are distributed. As is apparent from FIG. 2, by applying a positive potential from the first and third electrodes 3 and 5, the piezoelectric plate portion on which the first and third electrodes 3 and 5 are formed has a negative charge. The piezoelectric portion on which the second and fourth electrodes 4 and 6 are formed is positively charged. When the potential applied from the first terminal 8 and the second terminal 9 is reversed, the charge distribution is also reversed. Therefore, the piezoelectric plate 2 vibrates between the vibration state indicated by the one-dot chain line A in FIG. 2 and the opposite vibration state. That is, the contour slip vibration mode is strongly excited.

An example of the resonance characteristics of the piezoelectric resonance element 1 is shown in FIG. Here, as the piezoelectric plate 2, a piezoelectric plate made of PZT-based ceramics having 4.83 × 4.83 × 0.4 mm thickness was prepared. The areas of the first to fourth electrodes 3 to 6 were each 5.546 mm ² , and the common electrode 7 was formed on the entire second main surface 2b of the piezoelectric plate 2. The first to fourth electrodes 3 to 6 and the common electrode 7 were formed by sputtering a Monel alloy (Ni 70% + Cu 30%), and the thickness thereof was 0.2 μm. FIG. 3 shows the resonance characteristics of the piezoelectric resonator element 1 of the above embodiment obtained in this way.

  As is apparent from FIG. 3, it can be seen that a large response P due to contour slip vibration is obtained in the vicinity of 640 kHz. On the other hand, in the vicinity of 430 kHz, there is a response E that seems to be due to spreading vibration. As is apparent from FIG. 3, it can be seen that the response due to the spread vibration is sufficiently smaller than the response due to the contour slip vibration. Therefore, according to the present embodiment, it is possible to easily provide a piezoelectric resonance element using the contour slip vibration mode by forming a relatively simple electrode structure that is hardly affected by the spread vibration.

  That is, in the piezoelectric resonator using the conventional contour sliding mode shown in FIGS. 10 and 11, the electrode structure is complicated and the electrical connection at the time of driving is complicated. In the resonance element, as described above, the piezoelectric resonance using the contour slip vibration mode having a good resonance characteristic that is hardly affected by the spread vibration only by forming the plurality of electrodes 3 to 7 having a relatively simple structure. An element can be provided.

  In addition, with the same structure as the conventional piezoelectric resonator element using the spread vibration mode in which excitation electrodes are formed on both sides of a square piezoelectric plate, good resonance characteristics cannot be obtained using contour slip vibration. Please point out. That is, FIG. 12 shows the resonance when an AC electric field is applied by using the same piezoelectric ceramic and the same size piezoelectric plate as the piezoelectric resonant element of the above embodiment, forming electrodes with a thickness of 0.2 μm on both sides, and applying an AC electric field. Show properties. As is clear from FIG. 12, a large response based on spreading vibration is obtained in the vicinity of 435 kHz. On the other hand, a contour slip vibration response is observed in the vicinity of 640 kHz, but it can be seen that the response is smaller than the spread vibration. Therefore, in a conventional piezoelectric resonator using the spread vibration mode in which electrodes are formed on both sides of a square plate-like piezoelectric plate, good resonance characteristics due to the contour slip mode cannot be obtained.

  On the other hand, in the above embodiment, the square plate-like piezoelectric plate 2 is used, the first to fourth electrodes 3 to 6 and the common electrode 7 are formed and electrically connected as described above. Good resonance characteristics based on the contour sliding vibration mode can be obtained.

  FIG. 4 is a perspective view of a piezoelectric filter as a second embodiment of the present invention, and FIG. 5 is a diagram showing the filter characteristics.

  The piezoelectric filter 21 includes the same piezoelectric plate 2 as in the first embodiment, first to fourth electrodes 3 to 6, and a common electrode 7. In driving, the first to fourth electrodes 3 to 6 are electrically connected in the same manner as the piezoelectric resonance element 1 of the first embodiment. The difference is that the third terminal 10 connected to the resonance electrode 7 is connected to the ground potential, and the characteristic as a filter is obtained. Therefore, in the structure of the piezoelectric filter 21 of the second embodiment, the same parts as those of the first piezoelectric filter 1 are denoted by the same reference numerals, and the description of the first embodiment is omitted. I decided to.

  As described above, in the piezoelectric filter 21 of the present embodiment, the common electrode 7 is connected to the ground potential, and is used as a three-terminal filter.

  In the piezoelectric resonant element of the first embodiment having the resonance characteristics shown in FIG. 3, the third terminal was connected to the ground potential, and the piezoelectric filter 21 of the second embodiment was produced. FIG. 5 shows the filter characteristics of the piezoelectric filter thus manufactured.

  As is apparent from FIG. 5, it can be seen that good filter characteristics based on the contour slip mode are obtained in the vicinity of 640 kHz. In addition, the response based on the spreading vibration mode appears in the vicinity of 435 kHz, but it is sufficiently smaller than the response based on the contour slip mode, and therefore a good filter characteristic that is not easily affected by the response based on the spreading vibration mode can be obtained. I understand.

  As is apparent from FIGS. 4 and 5, in the present invention, by connecting the third terminal 10 to the ground potential, a good filter characteristic using the contour sliding vibration mode is obtained with a relatively simple structure. You can see that

  Next, an embodiment of a piezoelectric resonant component in which the first and second embodiments are housed in a case will be described.

  6 and 7 are an exploded perspective view and a front sectional view of a piezoelectric resonant component that houses the piezoelectric resonant element of the first embodiment.

  The piezoelectric resonant component 31 has a rectangular plate-like case substrate 32. The case substrate 32 is made of an appropriate insulating material such as alumina or synthetic resin.

  On the upper surface of the case substrate 32, first to fourth electrode lands 33 to 36 are formed in the center. The electrode lands 33 to 36 have convex portions 33 a to 36 a that protrude upward. The first to fourth electrode lands 33 to 36 are electrically connected to first to fourth terminal electrodes 37 a to 37 d provided on the side surface of the case substrate 32, respectively.

  The terminal electrodes 37a to 37d may extend from the side surface to the lower surface of the case substrate 32, are formed only on the lower surface, and are electrically connected to the first to fourth electrode lands 33 to 36 on the upper surface side. It may be.

  The electrode lands 33 to 36 and the terminal electrodes 37a to 37d are connected by connection conductive portions 38a to 38d, but may be connected to the electrode lands 33 to 36 by other conductive paths such as through-hole conductors. Good.

  On the other hand, the piezoelectric resonance element 1 is mounted on the case substrate 32 with the second main surface 2b side of the piezoelectric plate 2 facing upward. In this case, the convex portions 33a to 36a are arranged so that the convex portions 33a to 36a of the electrode lands 33 to 36 are in contact with the first to fourth electrodes 3 to 6, respectively.

  Accordingly, the first to fourth electrodes 3 to 6 are respectively connected to the first to fourth terminals only by mounting the piezoelectric resonance element 1 on the case substrate 32 with the second main surface 2b side up. The electrodes 37a to 37d are electrically connected.

  On the other hand, a terminal plate 39 is disposed above the piezoelectric resonant element 1. The terminal plate 39 has a spring terminal portion 39a protruding downward. The lower end of the spring terminal portion 39 a is in contact with the common electrode 7. The case base 40 constituting the case is joined to the upper surface of the case substrate 32 so as to surround the terminal plate 39 and the piezoelectric resonator 1 in the opening 40a opened downward. Bonding is performed using an appropriate bonding agent such as a piezoelectric adhesive.

  In this case, the distance from the opening 40a of the case material 40 to the top surface 40b of the opening is selected so that the spring terminal portion 39a of the terminal plate 39 is elastically contacted with the common electrode 7. That is, in the state where the piezoelectric resonance element 1 and the terminal plate 39 having the spring terminal portion 39a are housed and the case material 40 is fixed to the case substrate 32, the spring terminal portion 39a receives an external force and elastically contacts the common electrode 7. Thus, the distance is slightly smaller than the sum of the thickness of the terminal plate 39 and the thickness of the piezoelectric resonant element 2.

  Therefore, when the case material 40 is joined to the case substrate 32 and assembled, the piezoelectric resonant element 1 has the protrusions 33a to 36a of the first to fourth electrode lands 33 to 36 and the protrusions 33a to 36a in the internal space Z. Since the spring terminals 39a of the terminal plate 39 are respectively supported in a point contact manner, the vibration in the contour sliding mode is not easily affected by the support structure. That is, it is possible to provide a piezoelectric resonant component that can suppress the influence of the resonance characteristics due to the support structure, has good resonance characteristics, and uses the contour slip mode with a small number of components.

  8 and 9 are an exploded perspective view and a front sectional view of a piezoelectric resonant component using the piezoelectric filter according to the second embodiment. Here, a terminal plate 51 is used instead of the terminal plate 39 in the exploded perspective view shown in FIG. The terminal plate 51 includes a rectangular plate-shaped flat plate portion 51a, a spring terminal portion 51b, and connection pieces 51c and 51d. The connection pieces 51c and 51d are extended downward from a pair of opposing sides of the flat plate portion 51a. The spring terminal portion 51b is configured in the same manner as the spring terminal portion 39a.

  On the other hand, the case substrate 52 is formed in the same manner as the case substrate 32 of FIG. 6 except that the terminal electrodes 53a and 53b are provided. The terminal electrodes 53a and 53b are formed so as to extend from the approximate center of the pair of side surfaces of the case substrate 52 facing each other to the upper surface. The terminal electrodes 53a and 53b are terminal electrodes connected to the ground potential, and are electrically connected to the connection pieces 51c and 51d of the spring terminal plate 51 described above.

  Since the other configuration of the piezoelectric resonant component 54 is the same as that of the piezoelectric resonant component 31, the same parts are denoted by the same reference numerals, and the description thereof is omitted.

  Also in this embodiment, the piezoelectric resonant element 1 is mounted on the case substrate 52 with the second main surface 2b side of the piezoelectric plate 2 facing upward, the spring terminal plate 51 and the case material 40 are attached from above, and the case material 40 Can be easily assembled by bonding them to the upper surface of the case substrate 52 using a bonding agent such as an adhesive. In this case, the connection pieces 51c and 51d of the terminal plate 51 are joined to the terminal electrodes 53a and 53b. Therefore, by connecting the terminal electrodes 53a and 53b as the third terminals to the ground potential, it is possible to operate as a piezoelectric resonant component incorporating the piezoelectric filter of the second embodiment.

  Accordingly, since the piezoelectric resonant element according to the present invention has only the simple electrode structure as described above by using the contour slip mode, it is housed in a case configured using a case substrate and a case material. It is easy to reduce the number of parts and cost of piezoelectric resonant parts.

(A) And (b) is the perspective view and front sectional drawing of a piezoelectric resonance element in the 1st Embodiment of this invention. FIG. 2 is a schematic plan view for explaining an example of a vibration state and a charge distribution during vibration in the piezoelectric resonant element shown in FIG. 1. The figure which shows the impedance-frequency characteristic of the piezoelectric resonance element of embodiment shown in FIG. The perspective view for demonstrating the piezoelectric filter as a piezoelectric resonance element of the 2nd Embodiment of this invention. The figure which shows the filter characteristic of the piezoelectric filter shown in FIG. The disassembled perspective view of the piezoelectric resonant component as the 3rd Embodiment of this invention. FIG. 7 is a front cross-sectional view of the piezoelectric resonant component shown in FIG. 6. The disassembled perspective view of the piezoelectric resonant component as the 4th Embodiment of this invention. FIG. 9 is a front cross-sectional view after the piezoelectric resonant component shown in FIG. 8 is assembled. The perspective view which shows an example of the conventional outline vibration resonator. The typical top view which shows the other example of the piezoelectric resonator using the conventional contour vibration mode. The figure which shows an example of the impedance characteristic of the square-plate-shaped piezoelectric element using the conventional spreading vibration mode.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Piezoelectric resonance element 2 ... Piezoelectric plate 2a ... 1st main surface 2b ... 2nd main surface 3-6 ... 1st-4th electrode 7 ... Common electrode 8-10 ... 1st-3rd terminal 21 DESCRIPTION OF SYMBOLS ... Piezoelectric filter 31 ... Piezoelectric resonance component 32 ... Piezoelectric substrate 33-36 ... Electrode land 33a-36a ... Convex part 37a-37d ... Terminal electrode 38a-38d ... Connection conductive part 39 ... Terminal board 39a ... Spring terminal part 40 ... Case material 40a ... Opening 51 ... Terminal plate 51a ... Plane portion 51b ... Spring terminal portion 51c, 51d ... Connection piece 52 ... Case substrate 53a, 53b ... Terminal electrode 54 ... Piezoelectric resonance component

Claims (3)

A piezoelectric plate having first and second main surfaces facing each other, polarized in the thickness direction, and having a square planar shape of the first and second main surfaces;
In the first main surface of the piezoelectric plate, a first imaginary line that connects the midpoints of a pair of opposing sides that pass through the center and another set that is orthogonal to and faces the first imaginary line. First to fourth electrodes separated by a second imaginary line connecting the middle points of the sides;
A common electrode formed on the second main surface of the piezoelectric plate so as to face the first to fourth electrodes via the piezoelectric plate;
Of the first to fourth electrodes, the first and third electrodes and the second and fourth electrodes facing each other in an oblique direction through the center of the first main surface are electrically connected to each other. Connected to each other, and different potentials are applied to the first, third and second, fourth electrodes so that the contour slip vibration mode is excited. Piezoelectric resonance element.   The piezoelectric resonant element according to claim 1, wherein the common electrode is used as a terminal connected to a ground potential, thereby forming a three-terminal type filter. First to fourth electrode lands that are electrically connected to the first to fourth electrodes, respectively, are formed on the upper surface, and the first to fourth electrode lands are electrically connected to the outside. A case substrate formed so that the first to fourth terminal electrodes for being electrically connected to the first to fourth electrode lands,
The piezoelectric resonant element according to claim 1 or 2, mounted on the upper surface of the case substrate with the second main surface side facing up,
A terminal plate mounted on the second main surface of the piezoelectric plate of the piezoelectric resonant element and having a spring terminal portion that is elastically contacted with a common electrode on the second main surface;
A case member having an opening opened downward, and a case member fixed to the case substrate so as to accommodate the piezoelectric resonant element and the terminal plate on the opening side;
A piezoelectric resonant component in which the spring terminal is elastically contacted with the common electrode by fixing the case member to a case substrate.

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