JP2006309022A - Drawing device and drawing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To suppress misregistration between partial image patterns successively drawn in a drawing device. <P>SOLUTION: A predetermined image pattern is drawn on a work 12 mounted on a table 14 by successively drawing partial image patterns according to the respective positions in a conveying direction of the table by a drawing means 30 on the work 12, while the table 14 mounting the work 12 is relatively conveyed with respect to the drawing means 30A in such a manner that a drawing error caused by positional variation of the table 14 on drawing an image pattern on the work 12 mounted on the table by use of the drawing means 30 is eliminated by using preliminarily acquired information of drawing position variation which describes positional variation of the table 14 with respect to the drawing means 30 during conveying the table 14 according to the position in the conveying direction of the table 14. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a drawing apparatus and a drawing method. More specifically, the drawing means sequentially draws a partial image pattern on a work by transferring the table on which the work is placed relative to the drawing means. The present invention relates to a drawing apparatus and a drawing method for drawing a predetermined image pattern on a work.

Conventionally, as an example of a drawing apparatus for drawing an image on a workpiece, an image pattern is exposed on a workpiece made of a photosensitive material by a drawing beam emitted from a drawing head equipped with a DMD (digital micromirror device). A drawing apparatus is known (see Patent Document 1). As such a drawing apparatus, a partial image corresponding to each transfer direction position of the table transferred by the drawing beam while relatively moving the table on which the work is placed with respect to the drawing beam as a drawing means. It is known that a pattern is sequentially drawn on a work placed on the table and a predetermined image pattern is drawn on the work.
JP 2004-001244 A

  Incidentally, there is a demand for the drawing apparatus to draw a circuit pattern that requires high drawing position accuracy, such as a multilayer substrate circuit. In order to accurately draw an image pattern on the workpiece placed on the table in this way, it is required to reduce the amount of deviation of the drawing positions between the partial image patterns.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a drawing apparatus and a drawing method capable of suppressing positional deviation between partial image patterns to be sequentially drawn.

  In the drawing method of the present invention, while the table on which the workpiece is placed is relatively transferred with respect to the drawing means, the drawing means causes the partial image pattern corresponding to each position in the transfer direction of the table to the drawing means to be A drawing method for sequentially drawing on a work placed on a table and drawing a predetermined image pattern on the work, wherein the position variation of the table with respect to the drawing means obtained in the transfer of the table is acquired in advance When drawing an image pattern on the workpiece placed on the table by the drawing means, using drawing position fluctuation amount information indicating a drawing position fluctuation amount corresponding to a position in the transfer direction of the table. It is characterized in that drawing errors due to table position fluctuations are removed.

  In the first drawing method of the present invention, a partial image corresponding to each position in the transfer direction of the table with respect to the drawing means is transferred by the drawing means while the table on which the workpiece is placed is transferred relatively to the drawing means. A drawing method for sequentially drawing a pattern on a work placed on the table and drawing a predetermined image pattern on the work, wherein the table position changes with respect to the drawing means that occur during transfer of the table. The drawing position fluctuation amount information indicating the drawing position fluctuation amount according to the transfer direction position of the table is acquired in advance, and image data used for drawing the partial image pattern used by the drawing means is used as the drawing position fluctuation amount information. The corrected image data is obtained by correcting the drawing position fluctuation amount corresponding to each transfer direction position of the table acquired from When drawing a partial image pattern in image unit, it is characterized in that drawing the partial image pattern using the corrected image data.

  The first drawing apparatus of the present invention includes a table on which a work is placed, a drawing means for drawing on the work placed on the table, and the table relative to the drawing means. A transfer direction position information acquisition means for acquiring transfer direction position information indicating a transfer direction position of the table relative to the drawing means, and the transfer means transfers the table relative to the drawing means. On the other hand, the drawing means sequentially draws the partial image pattern corresponding to each transfer direction position of the table acquired by the transfer direction position information acquisition means on the work placed on the table, and on the work. A drawing apparatus comprising: a drawing control unit that controls to draw a predetermined image pattern, wherein the table of the table obtained by the transfer unit is acquired in advance. A drawing position fluctuation amount storage means for storing drawing position fluctuation amount information indicating a drawing position fluctuation amount indicating the position fluctuation of the table with respect to the drawing means that occurs in feeding in accordance with a position in the transfer direction of the table; and used by the drawing means Image data correction means for correcting the image data used for drawing the partial image pattern so that the drawing position fluctuation amount corresponding to each transfer direction position of the table acquired from the drawing position fluctuation information is offset When the drawing control means draws the partial image pattern by the drawing means, the drawing means uses the corrected image data obtained by the correction of the image data by the image data correction means. Control is performed to draw the partial image pattern.

  The drawing position fluctuation amount information includes the drawing position fluctuation amount in the transfer direction, the drawing position fluctuation amount in the transfer orthogonal direction orthogonal to the transfer direction and parallel to the transfer plane, and the direction around the transfer plane orthogonal direction orthogonal to the transfer plane. It is also possible to indicate the drawing position fluctuation amount in the rotation direction.

  The first drawing apparatus includes drawing position variation measuring means for measuring the drawing position variation, and when the table is repeatedly reciprocated by the transfer means, the image data correction means is at least once before. It is possible to perform an operation for removing the error component by using the drawing position fluctuation amount measured by the drawing position fluctuation amount measuring means during the reciprocating transfer of the table by the transfer means.

  In the second drawing method of the present invention, a partial image corresponding to each position in the transfer direction of the table with respect to the drawing means is transferred by the drawing means while the table on which the work is placed is transferred relative to the drawing means. A drawing method for sequentially drawing a pattern on a work placed on the table and drawing a predetermined image pattern on the work, wherein the table position changes with respect to the drawing means that occur during transfer of the table. The drawing position fluctuation amount information indicating the drawing position fluctuation amount according to the transfer direction position of the table is acquired in advance, and when the drawing unit draws the partial image pattern, the drawing position fluctuation amount information acquired from the drawing position fluctuation amount information is acquired. The table and the drawing so as to cancel the drawing position fluctuation amount corresponding to the position of the table in the transfer direction when drawing the partial image pattern It is characterized in that for relatively moving the stage.

  The second drawing apparatus of the present invention includes a table on which a work is placed, a drawing means for drawing on the work placed on the table, and the table relative to the drawing means. A transfer direction position information acquisition means for acquiring transfer direction position information indicating a transfer direction position of the table relative to the drawing means, and the transfer means transfers the table relative to the drawing means. On the other hand, the drawing means sequentially draws the partial image pattern corresponding to each transfer direction position of the table acquired by the transfer direction position information acquisition means on the work placed on the table, and on the work. A drawing apparatus comprising: a drawing control unit that controls to draw a predetermined image pattern, wherein the table of the table obtained by the transfer unit is acquired in advance. Drawing position fluctuation amount storage means for storing drawing position fluctuation amount information indicating the drawing position fluctuation amount indicating the position fluctuation of the table with respect to the drawing means that occurs in the feeding in accordance with the transfer direction position of the table, the table, and the drawing A drawing correction moving means for relatively moving the means, and transfer of the table when drawing the partial image pattern obtained from the drawing position variation information when drawing the partial image pattern by the drawing means. A drawing correction control means for controlling the drawing correction moving means so as to cancel the drawing position fluctuation amount corresponding to the direction position by relatively moving the table and the drawing means; It is characterized by.

  The drawing correction control means can move only the drawing means.

  The drawing correction control means can move only the table.

  The drawing position fluctuation amount information includes the drawing position fluctuation amount in the transfer direction, the drawing position fluctuation amount in the transfer orthogonal direction orthogonal to the transfer direction and parallel to the transfer plane, and the transfer plane orthogonal direction orthogonal to the transfer plane. It is possible to indicate the drawing position fluctuation amount in the rotation direction around.

The second drawing apparatus includes drawing position fluctuation measuring means for measuring the drawing position fluctuation, and the drawing correction control means is at least once when the table is repeatedly moved back and forth by the transfer means. The drawing correction moving means may be controlled using the drawing position fluctuation amount measured by the drawing position fluctuation amount measuring means during the reciprocating transfer of the table by the previous transfer means.

  The drawing position fluctuation amount storage means may update drawing position fluctuation amount information stored in the drawing position fluctuation amount storage means each time the table is reciprocated by the transfer means.

  The second drawing apparatus includes a drawing position fluctuation measuring unit that measures a drawing position fluctuation, and measures the drawing position fluctuation by the drawing position fluctuation measuring unit in the forward transfer of the table by the transfer unit. In the transfer of the table in the return path by the transfer means, the drawing means can perform drawing.

  The first drawing apparatus includes drawing position fluctuation amount measuring means for measuring a drawing position fluctuation amount, and the drawing position fluctuation amount measuring means measures the drawing position fluctuation amount in the forward transfer of the table by the transfer means. In the transfer of the table in the return path by the transfer means, the drawing means can perform drawing.

  The inventor has found that the position variation of the transferred table caused by, for example, the influence of the temperature change of the environment becomes an error factor when the image pattern is drawn on the work by the drawing means. It is a thing.

  In other words, conventionally, when the drawing means sequentially draws the partial image pattern corresponding to each position in the transfer direction of the table to be transferred onto the work placed on the table, the drawing is performed assuming that the position of the table does not change. However, it has been found that the position variation of the table causes an error when drawing on the workpiece. That is, the present inventors have found that a positional deviation occurs between each partial image pattern due to a change in the position of the table after the partial image pattern is drawn by the drawing means until the next partial image pattern is drawn.

  According to the drawing method of the present invention, using the drawing position fluctuation amount information that indicates the drawing position fluctuation amount indicating the position fluctuation of the table with respect to the drawing means generated in the table transfer, which is obtained in advance, according to the position of the table in the transfer direction, Since the drawing error due to the position fluctuation of the table when drawing the image pattern on the work placed on the table by the drawing means is removed, the positional deviation between the partial image patterns can be suppressed. And a higher quality image pattern can be obtained.

  According to the first drawing method and apparatus of the present invention, drawing position fluctuation amount information indicating the drawing position fluctuation amount indicating the position fluctuation of the table with respect to the drawing means generated in the table transfer according to the position in the table transfer direction is acquired in advance. Then, the image data used for drawing the partial image pattern used by the drawing means is corrected so that the drawing position fluctuation amount corresponding to each transfer direction position of the table acquired from the drawing position fluctuation amount information is offset. When the corrected image data is obtained and the partial image pattern is drawn by the drawing means, the partial image pattern is drawn using the corrected image data, so that the positional deviation between the partial image patterns is suppressed. And a higher quality image pattern can be obtained.

  According to the second drawing method and apparatus of the present invention, the drawing position fluctuation amount information indicating the drawing position fluctuation amount indicating the position fluctuation of the table with respect to the drawing means generated in the table transfer in accordance with the position in the table transfer direction is previously stored. When obtaining and drawing a partial image pattern by the drawing means, the drawing position fluctuation amount corresponding to the transfer direction position of the table when drawing the partial image pattern, which is obtained from the drawing position fluctuation amount information, is offset. Since the table and the drawing unit are moved relative to each other, the relative transfer of the workpiece with respect to the drawing unit can be performed more accurately, and the positional deviation between the partial image patterns can be suppressed. A high quality image pattern can be obtained.

  Further, the drawing position fluctuation amount information includes the drawing position fluctuation amount in the transfer direction, the drawing position fluctuation amount in the transfer orthogonal direction orthogonal to the transfer direction and parallel to the transfer plane, and the transfer plane orthogonal direction orthogonal to the transfer plane. If the drawing position fluctuation amount in the surrounding rotation direction is indicated, it is possible to more reliably suppress the positional deviation between the partial image patterns and obtain an image pattern with higher quality.

  Hereinafter, an embodiment of a drawing apparatus for carrying out the drawing method of the present invention will be described. FIG. 1 is a diagram showing a schematic configuration of a drawing apparatus according to an embodiment of the present invention, FIG. 2 is a diagram showing a state in which a reference mark is imaged by a work position information acquisition device described later in a state where position fluctuation does not occur, and FIG. FIG. 4 is a view showing a state in which a reference mark is imaged by the work position information acquisition device in a state where the position change has occurred, FIG. 4 is a view showing the position change of the table in correspondence with the position of the table in the transfer direction, and FIG. It is a figure which shows the method of correct | amending a position variation.

  Although the drawing apparatus 100 according to the present embodiment is different from the workpiece position information acquisition apparatus 200, they are configured to partially share each other.

[Description of schematic configuration of drawing apparatus 100]
Hereinafter, a schematic configuration of the drawing apparatus 100 will be described.

  The drawing apparatus 100 transfers the table 14 relative to the drawing means 30, the table 14 on which the work 12 is placed, the drawing means 30 for drawing on the work 12 placed on the table 14, and the drawing means 30. Drawing by the transfer unit 20, a linear encoder 72 that is a transfer direction position information acquisition unit that acquires transfer direction position information indicating the transfer direction position (position in the Y direction in the figure) of the table 14 with respect to the drawing means 30, and drawing by the transfer unit 20 While transferring the table to the means 30, the drawing means 30 sequentially draws partial image patterns corresponding to the respective positions in the transfer direction acquired by the linear encoder 72 on the work 12 placed on the table 14. 12 is used for drawing a predetermined image pattern, and is used for drawing an image pattern under the control of the drawing control unit 28. And an image data memory 76 which stores the original image data Go to.

  In addition, as the workpiece | work 12, what coated the photosensitive material on the base material for producing the printed wiring board, the glass substrate for a display, the glass substrate for a color filter, etc. can be used.

  The linear encoder 72 includes a linear scale 72A arranged on the installation table 18 and a reading unit 72B arranged on a support table 20B of the transfer unit 20 described later, and indicates the position of the table 14 in the transfer direction. A position signal (represented by symbol p or q in the figure) is output.

  Further, the transfer unit 20 includes a guide 20A that guides the table 14, a support base 20B that supports the table 14, and a drive unit 20C that drives the support base 20B. When the table 14 is transferred by the transfer unit 20, a position change occurs in the table 14, but the position change has reproducibility repeatedly.

  Although the configuration of the drive mechanism is omitted, conventionally known drive mechanisms can be used. For example, as a slide mechanism, a ball rail that moves a moving base on the rail System, air slide system, etc. can be adopted. As the drive force transmission mechanism, cam mechanism, link mechanism, rack / pinion mechanism, ball screw / ball bush mechanism, air slide mechanism, piston / cylinder mechanism, etc. are adopted. can do. In addition, a motor, a hydraulic actuator, a pneumatic actuator, or the like can be employed as the drive source.

  The detailed configuration of the drawing unit 30 will be described later.

  The drawing apparatus 100 further determines a drawing position fluctuation amount indicating a relative position fluctuation of the table 14 with respect to the drawing means 30 generated in the transfer by the transfer unit 20 according to the transfer direction position (p) of the table 14. The drawing position fluctuation amount storage unit 74 for storing the drawing position fluctuation amount information Hb shown below and the original image data Go stored in the image data memory 76 are used as the drawing position fluctuation amount stored in the drawing position fluctuation amount storage unit 74. And an image data correction unit 78 that corrects the drawing position fluctuation amount corresponding to the transfer direction position (p) indicated by the position signal acquired from the information Hb so as to cancel. The partial image pattern is drawn by the drawing means 30 using the corrected image data G1 obtained by correcting the original image data Go by the image data correction unit 78.

  In addition, the drawing apparatus 100 relatively moves the first drawing correction moving unit 82A that relatively moves the table 14 and the drawing unit 30 and the drawing beam emitted from the table 14 and the drawing unit 30 relative to each other. When drawing the partial image pattern acquired from the drawing position fluctuation amount information Hb stored in the drawing position fluctuation amount storage unit 74 when the partial drawing pattern 30 is drawn by the drawing unit 30 and the second drawing correction moving unit 82B. The first drawing correction moving unit 82A and the first drawing correction moving unit 82A are arranged so as to move the table 14 and the drawing means 30 relatively so as to cancel the drawing position fluctuation amount corresponding to the transfer direction position (p) of the table 14. And a drawing correction control unit 84 for controlling the second drawing correction moving unit 82B. Thereby, the partial image pattern can be drawn by the drawing means 30 while relatively moving the table 14 and the drawing means 30 so as to offset the drawing position fluctuation amount.

  The transfer direction position (p) of the table 14 used in the drawing correction control unit 84 can be acquired from the linear encoder 72.

  The first drawing correction moving unit 82A is disposed on the support 20B of the transfer unit 20 to support the table 14, and moves the relative position of the transfer unit 20 and the support 20B. is there. The second drawing correction moving unit 82B moves the position of the drawing beam emitted from the drawing head, which is the drawing means 30. The drawing means may indicate only the drawing beam emitted from the drawing head, or may indicate both the drawing head and the drawing beam emitted from the drawing head. Details of the second drawing correction moving unit 82B will be described later.

[About the direction to cancel the drawing position variation]
The drawing position fluctuation amount indicating the relative position fluctuation of the table 14 with respect to the drawing means 30 generated in the transfer by the transfer unit 20 is the drawing position fluctuation amount δy in the transfer direction (Y direction in the figure), the transfer plane orthogonal to the transfer direction. The drawing position fluctuation amount δx in the transfer orthogonal direction (arrow X direction in the figure) parallel to the (XY plane in the figure), and around the transfer plane orthogonal direction (arrow Z direction in the figure) perpendicular to the transfer plane The drawing position fluctuation amount δθ in the rotation direction (indicated by the arrow θ in the figure), and further, the drawing position fluctuation amount in the direction orthogonal to the rolling plane, the pitching, and the transfer plane (in the arrow Z direction in the figure) can be exemplified.

  The type of drawing position variation stored in the drawing position variation storage 74 as the drawing position variation information Hb, the type of drawing position variation to be canceled by the image data correction unit 78, or the first drawing correction moving unit As the types of drawing position fluctuation amounts that are canceled out by the control by the drawing correction control section 84 of the second drawing correction moving section 82B, all or a part of the various drawing position fluctuation amounts is adopted. Can do.

  Note that the drawing position fluctuation amount δθ can be a rotation angle around the axis orthogonal to the transfer plane passing through the center position in the table surface (the arrow Z direction in the figure).

  In addition, the positional fluctuation in the transfer direction (Y direction in the figure) is caused by the position signal output from the linear encoder 72 deviating from the true value due to, for example, the temperature change of the scale 72 of the linear encoder 72 or the distortion due to the change with time. This is what happens. In such a case, even if the table 14 is controlled to be transported by the same distance per unit time, if the table is transported based on the scale 72 without performing correction, the table 14 is transported by exactly the same distance per unit time. Can not be made.

  Further, the drawing position fluctuation amount δθ in the rotation direction around the transfer plane orthogonal direction axis can be divided into the component of the drawing position fluctuation amount δy in the transfer direction and the drawing position fluctuation amount δx in the transfer orthogonal direction. Two types of drawing position fluctuation amounts δx, δy are obtained by distributing the drawing position fluctuation amount δθ into the drawing position fluctuation amount δy and the drawing position fluctuation amount δx with the same effect as the cancellation of the types of drawing position fluctuation amounts δx, δy, δθ. It can also be obtained by using.

  When canceling the drawing position fluctuation amounts δx, δy, δθ, the first drawing correction moving unit 82A is an alignment stage that can align in the x, y, θ directions (nominal model number: CMX, THK) or the like can be used. Further, in order to cancel various kinds of drawing position fluctuation amounts, the first drawing correction moving unit is combined by combining a plurality of the alignment stages or a moving means using a conventionally known piezoelectric element or the like. 82A can be configured. In addition, as the drawing correction moving unit 82B, it is possible to employ a drawing component similar to the above.

[Configuration of Work Position Information Acquisition Device 200]
Hereinafter, the configuration of the workpiece position information acquisition apparatus 200 will be described. Note that the same reference numerals are used for the constituent elements of the drawing apparatus 100 described above.

The workpiece position information acquisition device 200 includes a table 14 on which the workpiece 12 is placed,
An image pickup unit 226 that picks up an image on the table 14, a transfer unit 20 that transfers the table 14 relative to the image pickup unit 226, and transfer direction position information that indicates a transfer direction position (p) of the table 14 with respect to the image pickup unit 226. A linear encoder 72 that is a transfer direction position information acquisition unit to be acquired, a table reference mark 214 provided on the relatively transferred table 14, and a work reference mark 212 provided on a work placed on the table 14. Table imaging information and workpiece imaging information obtained by imaging at different timings by the imaging unit 226, and the transfer indicated by the position information of the table 14 in the transfer direction at the time of imaging the table reference mark and the workpiece reference mark acquired by the linear encoder 72 The position of the workpiece 12 relative to the table 14 based on the direction position (p). And a work position information acquisition unit 230 for acquiring work position information Jw indicating a.

Further, the workpiece position information acquisition apparatus 200 obtains an imaging position fluctuation amount δ indicating a positional fluctuation of the table 14 that occurs in the relative transfer of the table 14 with respect to the imaging unit 226 and is acquired in advance in the transfer direction position (p ) And a workpiece position acquisition storage unit 232 for storing imaging position variation amount information Hs shown in correspondence with
An imaging position variation δ corresponding to the table transfer direction position (p) obtained from the linear encoder 72 at the time of imaging the table reference mark, obtained from the imaging position variation information Hs, and a workpiece reference obtained from the imaging position variation information Hs. Using the imaging position fluctuation amount δ corresponding to the transfer direction position (p) of the table 14 obtained from the linear encoder 72 at the time of mark imaging, an error component included in the work position information caused by the difference between the imaging position fluctuation amounts is obtained. And a workpiece position acquisition calculation unit 234 that performs an offset calculation. As a result, it is possible to obtain corrected workpiece position information JJw from which the error component due to the position fluctuation of the table 14 included in the workpiece position information Jw acquired by the workpiece position information acquisition unit 230 is removed.

  The workpiece position acquisition calculation unit 234 acquires the imaging position fluctuation amount δ corresponding to the transfer direction position (p) of the table 14 obtained from the linear encoder 72 at the time of imaging the table reference mark from the imaging position fluctuation amount information Hs. An imaging position variation information acquisition unit 234A that acquires an imaging position variation δ corresponding to the transfer direction position (p) of the table 14 obtained from the linear encoder 72 at the time of imaging the workpiece reference mark from the imaging position variation information Hs, and each imaging And an error cancellation operation unit 234B that performs an operation for canceling an error component included in the work position information caused by the difference between the position fluctuation amounts.

  In addition, the workpiece position information acquisition apparatus 200 includes a first workpiece position acquisition moving unit 238A, which is a workpiece position acquisition moving unit that relatively moves the table and the imaging unit, and a second workpiece position acquisition. When the table reference mark is imaged, the moving unit 238B and the table 14 so as to cancel the imaging position fluctuation amount corresponding to the position (p) in the table transfer direction at the time of table reference mark imaging acquired from the imaging position fluctuation amount information Hs. Position change corresponding to the transfer direction position (p) of the table 14 at the time of imaging the workpiece reference mark acquired from the imaging position variation amount information Hs at the time of imaging the workpiece reference mark. The first work position acquisition moving unit 238A, the second warp so as to relatively move the table 14 and the imaging unit 226 so as to cancel the amount. And a work position obtaining control unit 242 for controlling the click position acquisition for a mobile unit 238B. Thereby, the workpiece position information Jw acquired by the workpiece position information acquisition unit 230 can be made to have the error component due to the position fluctuation of the table 14 removed. That is, the workpiece position information acquisition unit 230 can obtain corrected workpiece position information JJw and output the information.

  The corrected workpiece position information JJw is transferred to and stored in the corrected workpiece position information storage unit 244.

[About the direction to offset the imaging position variation]
In the same manner as described in the drawing apparatus 100 described above, as the imaging position fluctuation amount indicating the relative position fluctuation of the table 14 with respect to the imaging unit 226 generated in the transfer by the transfer unit 20, position fluctuation amounts in various directions are given. Can do.

  The type of imaging position variation stored in the workpiece position acquisition storage unit 232 as imaging position variation information, the type of imaging position variation removed by the workpiece position acquisition computing unit 234, or the first workpiece position acquisition As the types of imaging position fluctuation amounts to be canceled by the control of the workpiece position acquisition control unit 242 of the movement unit 238A and the second workpiece position acquisition movement unit 238B, the various position fluctuations described above as the drawing position fluctuation amounts. All or part of the quantity can be employed.

  Note that the imaging position fluctuation amount δθ can be a rotation angle around the axis perpendicular to the transfer plane (in the direction of arrow Z in the drawing) passing through the center position in the table surface.

  Further, since the imaging position fluctuation amount δθ in the rotation direction around the transfer plane orthogonal direction can be divided into a component of the imaging position fluctuation amount δy in the transfer direction and an imaging position fluctuation amount δx in the transfer orthogonal direction, there are three types. Two types of imaging in which the imaging position fluctuation amount δθ is divided into the imaging position fluctuation amount δy and the imaging position fluctuation amount δx, the same effect as when the position fluctuation is canceled using the imaging position fluctuation amounts δx, δy, and δθ. The position fluctuations can be canceled using the position fluctuation amounts δx and δy.

  Further, in order to cancel the imaging position fluctuation amounts δx, δy, δθ, the above-described alignment stage (nominal model number: CMX, manufactured by THK) or the like may be employed as the first workpiece position acquisition moving unit 238A. it can. Further, when canceling various types of imaging position fluctuation amounts, the first work position can be obtained by combining a plurality of the alignment stages or combining a moving unit using a conventionally known piezo element, air cylinder, or the like. The acquisition moving unit 238A can be configured. In addition, as the second workpiece position acquisition moving unit 238, one using the same components as described above can be used.

  The first work position acquisition moving unit 238A may be the same as the first drawing correction moving unit 82A.

[Operation of Work Position Information Acquisition Device 200]
Next, the operation of the workpiece position information acquisition apparatus 200 will be described. FIGS. 2 (a1) to 2 (a5) are diagrams illustrating a state in which the table is moved and each reference mark is imaged without causing a change in position, and FIGS. 2 (b1) to 2 (b5) are imaged at that time. It is a figure which shows the visual field of a part. FIGS. 3 (a1) to 3 (a5) are diagrams showing a state in which the table is moved while the position is changed, and each reference mark is imaged without correcting the position change. FIGS. 3 (b5) is a diagram showing the field of view of the imaging unit at that time. In the following description, the table imaging information and the workpiece imaging information are also simply referred to as imaging information.

  First, the operation of acquiring the position of the workpiece 12 relative to the table 14 when the position of the table 14 does not change when the table 14 is transferred by the transfer unit 20 will be described. The position variation of the table 14 includes an error in the transfer direction position (p) read by the linear encoder 72.

  As shown in FIG. 2A1, the transfer direction position read by the linear encoder 72 when the table 14 is located at the initial position is p1. When the table 14 is located at the initial position, nothing is visible in the field of view of the imaging unit 226 as shown in FIG.

  Next, as shown in FIG. 2 (a2), when the table 14 is transferred by the transfer unit 20 and the transfer direction position read by the linear encoder 72 is p2, the table reference mark is captured by the imaging unit 226. The table reference mark 214A, which is one of 214, is imaged to obtain imaging information S (p2) shown in FIG. 2 (b2).

  Next, as shown in FIG. 2A3, when the table 14 is transferred by the transfer unit 20 and the transfer direction position read by the linear encoder 72 is p3, the workpiece reference mark is captured by the imaging unit 226. The workpiece reference mark 212A, which is one of 212, is imaged to obtain imaging information S (p3) shown in FIG. 2 (b3).

  Further, as shown in FIG. 2A4, when the table 14 is transferred by the transfer unit 20 and the transfer direction position read by the linear encoder 72 is p4, the workpiece reference mark 212 is captured by the imaging unit 226. The workpiece reference mark 212C, which is one of the two, is imaged to obtain imaging information S (p4) shown in FIG. 2 (b4).

  Finally, as shown in FIG. 2 (a5), when the table 14 is transferred to the end of the transfer unit 20, the transfer direction position read by the linear encoder 72 becomes pe. Further, when the table 14 is located at the end, nothing is visible in the field of view of the imaging unit 226 as shown in FIG.

  According to the imaging information S (p2) captured when the transfer direction position acquired by the linear encoder 72 is p2, the table reference mark 214A is positioned at the reference position Q at the center of the field of view of the imaging unit 226.

  Further, according to the imaging information S (p3) captured when the transfer direction position acquired by the linear encoder 72 is p3, the workpiece reference mark 212A is x3 in the X direction and y3 in the Y direction from the reference position Q of the imaging unit 226. It's off.

  Further, according to the imaging information S (p4) captured when the transfer direction position acquired by the linear encoder 72 is p4, the workpiece reference mark 212C is x4 in the X direction and y4 in the Y direction from the reference position Q of the imaging unit 226. It's off.

  Therefore, the distance LY3 from the table reference mark 214A to the workpiece reference mark 212A in the Y direction can be obtained by the formula: LY3 = (p3-p2) -y3. A distance LX3 from the table reference mark 214A to the workpiece reference mark 212A in the X direction can be obtained by an expression: LX3 = x3.

  Further, the distance LY4 from the table reference mark 214A to the workpiece reference mark 212C in the Y direction can be obtained by the formula: LY4 = (p4-p3) -y4. A distance LX4 from the table reference mark 214A to the workpiece reference mark 212C in the X direction can be obtained by an expression: LX4 = x4.

  When the position change of the table 14 due to the transfer of the transfer unit 20 does not occur, the position of the work 12 with respect to the table 14 can be obtained as described above.

Here, when the position change of the table 14 occurs due to the transfer of the transfer unit 20, for example, the following imaging information including the error of the position change is obtained by the same operation as described above. In the imaging information S (p2) ′ captured when the transfer direction position acquired in step p2 is p2, the table reference mark 214A is shifted by γ2 from the reference position Q at the center of the field of view of the imaging unit 226.

  Further, in the imaging information S (p3) ′ captured when the transfer direction position acquired by the linear encoder 72 is p3, the workpiece reference mark 212A is x3 in the X direction and y3 in the Y direction from the reference position Q of the imaging unit 226. What has been shifted is further shifted by γ3.

  Further, in the imaging information S (p4) ′ captured when the transfer direction position acquired by the linear encoder 72 is p4, the workpiece reference mark 212C is x4 in the X direction and y4 in the Y direction from the reference position Q of the imaging unit 226. What has been shifted is further shifted by γ4.

  The positional shifts γ2, γ3, and γ4 are caused by the positional fluctuation amount of the table 14 being different at the time of imaging when the transfer direction positions are p2, p3, and p4.

  On the other hand, the imaging position variation information acquired in advance by measurement and stored in the workpiece acquisition storage unit 232 corresponds to the transfer direction position (p) of the table 14 acquired by the linear encoder 72, and the X direction of the table 14. , Y direction, and θ direction position variation amounts are shown.

[Measurement of position variation]
Measurement of the imaging position fluctuation amount stored in the workpiece acquisition storage unit 232 as the imaging position fluctuation amount information by the imaging position fluctuation amount measuring unit, and drawing position fluctuation stored in the drawing position fluctuation amount storage unit 74 as drawing position fluctuation amount information The measurement of the amount by the drawing position variation measuring means can be performed as follows.

  That is, one reference scale Sk extending in the transfer direction (Y direction) is arranged on each side of the X direction on the table 14, and the table 14 is transferred by the transfer unit 20, and the above two images are captured by the imaging unit 226. Based on the data acquired in correspondence with the transfer direction position (p) acquired by the linear encoder 72, the value obtained by reading the scale of the reference scale, the positional fluctuation amount in the X direction corresponding to the transfer direction position (p), The position fluctuation amount in the Y direction and the position fluctuation amount in the θ direction can be acquired.

  In addition, the position variation amount can be measured by a method using a laser side lengther. That is, the corner cubes are arranged one by one on both sides in the X direction on the table 14, and the table 14 is transferred by the transfer unit 20 while one corner cube is used as a target of the laser side length device. After acquiring the value corresponding to the transfer direction position (p) acquired by the linear encoder 72, the transfer acquired by the linear encoder 72 using the other corner cube as the target of the laser side length measuring device. Obtained in correspondence with the direction position (p), and based on these two types of position information, the position variation amount in the X direction, the position variation amount in the Y direction, and the θ direction direction according to the transfer direction position (p). A positional variation amount can be acquired.

  The measurement of the position fluctuation amount can be employed for the measurement of the drawing position fluctuation amount in the drawing apparatus and the imaging position fluctuation amount in the work position information acquisition apparatus.

  As a method for measuring the position variation amount in the drawing apparatus, the table on which the workpiece is placed is transferred to the drawing means 30, and the workpiece is moved in correspondence with the transfer direction position (p) acquired by the linear encoder 72. A plurality of test pattern images are drawn on the top by the drawing means 30. Based on the drawing state of a plurality of test pattern images drawn on the workpiece, the position fluctuation amount of the table is acquired in correspondence with the transfer direction position (p), and according to the transfer direction position (p). The positional fluctuation amount in the X direction, the positional fluctuation amount in the Y direction, and the positional fluctuation amount in the θ direction can be acquired.

  The imaging position fluctuation amount δ indicated by the imaging position fluctuation amount information obtained by the above-described method is the table 14 acquired by the linear encoder 72 as shown in FIGS. 4 (a), (b), and (c). The imaging position fluctuation amount δx in the X direction, the imaging position fluctuation amount δy in the Y direction, and the imaging position fluctuation amount δθ in the θ direction according to the transfer direction position (p). Here, it can be seen that the positional deviation γ2 is such that the position of the table 14 is changed by the position fluctuation amount xp2 in the X direction, the position fluctuation amount yp2 in the Y direction, and the position fluctuation amount θp2 in the θ direction at the transfer direction position p2. . If such a relationship is expressed in the form of a function, it can be expressed as γ2 = Fp2 (xp2, yp2, θp2). Similarly, γ3 = Fp3 (xp3, yp3, θp3) and γ4 = Fp4 (xp4, yp4, θp4) can be expressed.

The θ component is divided into an X component and a Y component, and is used for offsetting an error component, for example, as indicated by a function of the form of γ2 = Fp2 (xp2 ′, yp2 ′) indicated by an XY2 direction component. In order to obtain the position of the workpiece with respect to the table 14, the imaging information S (p2) ′ including the position variation of the table 14 due to the transfer of the transfer unit 20 in FIG. 4, the imaging information S (p3) ′, the imaging The information S (p4) ′ is stored in a state that does not include the position fluctuation, that is, the imaging information S (p2), the imaging information S (p3), and the imaging information S (FIG. 3 before the positional deviations γ2, γ3, and γ4 occur. After returning to the state of p4), it can be obtained by the method described above.

  In order to correct the position variation and acquire the correct position of the workpiece 12 with respect to the table 14, the workpiece position information acquisition apparatus 200 includes two types of methods, a data correction method and a mechanical correction method. Note that these methods can also be applied to acquisition of the position of the work reference mark with respect to the table reference mark when the work 12 is distorted and the reference mark position is deviated from a predetermined position on the work.

[Data correction method]
First, the data correction method will be described.

  The imaging position variation information acquisition unit 234A obtains the imaging position variation δ2 = xp2, yp2, θp2 corresponding to the transfer direction position p2 of the table 14 read by the linear encoder 72 when the table reference mark is imaged. It is acquired from the imaging position variation information Hs (see FIG. 4) stored in advance in H.232. Further, the imaging position variation information acquisition unit 234A captures the imaging position variation corresponding to the imaging direction variation amount δ3 = xp3, yp3, θp3 and the transportation direction position p4 of the table 14 read by the linear encoder 72. The quantities δ4 = xp4, yp4, θp4 are also obtained from the imaging position variation information Hs.

  Next, the error cancellation calculation unit 234B is included in the work position information corresponding to the respective transfer direction positions p2, p3, and p4 acquired by the position information acquisition unit 230 using the respective imaging position fluctuation amounts δ2, δ3, and δ4. The error component is removed.

  In order to remove the error component included in the workpiece position information Jw, for example, as described above, the position that is the error component included in the workpiece position information Jw shown in FIGS. 3B2, 3B3, and 3B4. After correcting the deviations γ2, γ3, and γ4 to return to the state that does not include the error component shown in FIGS. 2B2, B3, and B4, the position of the workpiece 12 with respect to the table table 14 is changed as described above. Get it.

  A method of correcting the positional deviation and returning it to a state not including the error component shown in FIGS. 2B2, 2B3, and 4B4 will be described. For example, when the X component (xp2) and the Y component (yp2) of the imaging position fluctuation amount δ2 (xp2, yp2, θp2) are removed from γ2, which is the positional deviation, the value may be simply subtracted as it is.

  In order to remove the θ component of the imaging position fluctuation amount δ2 (xp2, yp2, θp2), it is preferable to use the following method.

  FIG. 5 is a diagram illustrating a case where the imaging position fluctuation amount in the θ direction is removed. Here, it is assumed that the position fluctuation amount in the X direction and the position fluctuation amount in the Y direction are not considered.

  A quadrangular body 90A indicated by a broken line indicates an ideal position of the table 14 without position variation. The actual position of the table 14 is located at the position of the rectangular body 90B indicated by the solid line rotated by δθ by the rotation in the θ direction.

  A workpiece reference mark 91 indicated by a broken line indicates an ideal position when there is no position variation. The imaging unit (CCD camera) trusts the design position, and the workpiece reference mark 91 is in the field of view of the imaging unit 226. Take a picture so that it is located approximately in the center.

  However, the position of the work reference mark 91 when the image is actually picked up by the image pickup unit 226 due to positional displacement when the work is arranged, position error when the reference mark is processed on the work, deformation of the work, or the like. The position is imaged as being present at the position indicated by the mark 92 (a position different from the ideal position).

  When correcting the positional variation in the rotational direction by δθ of the table 14 from the imaged position of the workpiece reference mark, when the correction value at the ideal position (Xd, Yd) of the workpiece reference mark is obtained, the correction value is shown in the figure ( The correction amount is represented by Δx, Δy), and the correction position of the workpiece reference mark 91 is the position represented by the mark 93.

  On the other hand, the correction value at the actually imaged mark position (Xm, Ym) is the correction amount indicated by (Δx ′, Δy ′) in the figure, and the correction position of the workpiece reference mark 91 is the position indicated by the mark 94. Thus, the rotation of 14 corresponding to δθ can be corrected correctly.

  As described above, by calculating the correction amount based on the actually captured mark position information, even if the position of the reference mark deviates significantly from the design value (ideal value), the correction error can be reduced. Can do.

  By the calculation using the method as described above, the workpiece position information Jw can be corrected to the one in which the error component due to the position fluctuation of the table 14 is removed. In other words, the corrected workpiece position information JJw can be obtained by the workpiece position acquisition calculation unit 234.

  The workpiece position information acquisition apparatus 200 includes a reference scale Sk that is an imaging position fluctuation amount measuring unit that measures the imaging position fluctuation amount. When the table 14 is repeatedly reciprocated by the transfer unit 20, the workpiece position acquisition calculation is performed. The unit 234 may perform an operation for removing the error component using the imaging position fluctuation amount measured using the reference scale Sk when the table 14 is reciprocally transferred by the transfer unit 20 at least once before.

[Machine correction method]
Next, the mechanical correction method will be described.

  The imaging position fluctuation amounts δ2, δ3, and δ4 acquired by the workpiece position acquisition control unit 242 from the imaging position fluctuation amount information Hs corresponding to the transfer direction positions P2, P3, and P4 of the table 14 at the time of imaging each reference mark. The workpiece acquired by the workpiece position information acquisition unit 230 by controlling at least one of the first workpiece position acquisition moving unit 238A and the second workpiece position acquisition moving unit 238B so as to cancel out the minute. The position information Jw is made to have the error component due to the position fluctuation of the table 14 removed. That is, the corrected work position information JJw can be obtained by the work position information acquisition unit 230.

  The corrected workpiece position information JJw obtained by the data correction method and the mechanical correction method is stored in the corrected workpiece position information storage unit 244.

  When the corrected work position information JJw is obtained using the data correction method, the changeover switch 248 in FIG. 1 is turned OFF and the work position information Jw acquired by the work position information acquisition unit 230 is stored in the corrected work position information. Only the corrected workpiece position information JJw acquired by the workpiece position acquisition calculation unit 234 is transferred and stored in the corrected workpiece position information storage unit 244 without being transferred to the unit 244.

  When the corrected workpiece position information JJw is obtained using the mechanical correction method, the changeover switch 248 is turned on and the corrected workpiece position information JJw acquired by the workpiece position information acquisition unit 230 is used as the corrected workpiece position information storage unit. It is transferred to 244 and stored.

  As the table reference mark and the workpiece reference mark, a corner portion of the table or a corner portion of the workpiece can be adopted.

  It should be noted that one of the above two types of methods may be employed for correcting the imaging position variation, or two methods may be combined.

  The workpiece position information acquisition apparatus includes a reference scale Sk that is an imaging position variation measuring unit that measures the imaging position variation, and when the table 14 is repeatedly reciprocated by the transfer unit 20, the workpiece position acquisition control unit 242 is used. However, the workpiece position acquisition moving units 238A and 238B may be controlled using the imaging position fluctuation amount measured using the reference scale Sk when the table 14 is reciprocally transferred by the transfer unit 20 one or more times before. .

  The workpiece position acquisition storage unit 232 may update the imaging position variation information stored in the workpiece position acquisition storage unit 232 every time the table 14 is reciprocated by the transfer unit 20.

  Furthermore, the workpiece position information acquisition apparatus includes a reference scale Sk that is an imaging position fluctuation amount measuring unit that measures an imaging position fluctuation amount, and uses the reference scale Sk in the forward transfer of the table 14 by the transfer unit 20. The fluctuation amount may be measured, and the table reference mark 214 and the workpiece reference mark 212 may be imaged by the imaging unit 226 in the return path of the table 14 by the transfer unit.

[Operation of the drawing apparatus 100]
Next, the operation of the drawing apparatus 100 will be described. FIG. 6 is a diagram showing an image pattern drawn when the table is transferred without causing a position variation, FIG. 7 is a diagram showing an image drawing timing and a table position variation, and FIG. 8 is a diagram showing a position variation. It is a figure which shows the image pattern drawn without having corrected the position fluctuation | variation while the table was moved.

  Note that the image pattern of FIG. 8 is conceptually shown, and does not accurately indicate the state when the image pattern is drawn corresponding to the position variation amount of the table shown in FIG.

  First, an operation of drawing an image pattern on the work 12 placed on the table 14 when the position of the table 14 does not change when the table 14 is transferred by the transfer unit 20 will be described.

  Under the control of the drawing control unit 28, the partial image pattern corresponding to each transfer direction position (q) acquired by the linear encoder 72 was placed on the table 14 by the drawing unit 30 while the table was transferred by the transfer unit 20. Drawing is sequentially performed on the work 12, and a predetermined image pattern is drawn on the work 12. As shown in FIG. 7, the partial image patterns B1, B2, B3, B4 drawn at the transfer direction positions q1, q2, q3, q4 of the table 14 read by the linear encoder 72 are in the X direction as shown in FIG. , Y direction, and θ direction are drawn without any positional deviation.

  On the other hand, when the position fluctuation occurs in the table 14 when the table 14 is transferred by the transfer unit 20, the drawing position fluctuation amount δ1 (x1, y1,...) At each of the transfer direction positions q1, q2, q3, q4. The drawing means 30 and the table are equivalent to θ1), the drawing position fluctuation amount δ2 (x2, y2, θ2), the drawing position fluctuation amount δ3 (x3, y3, θ3), and the drawing position fluctuation amount δ4 (x4, y4, θ4). Misalignment occurs between the two. As a result, as shown in FIG. 8, each of the partial image patterns B1, B2, B3, and B4 is drawn in a state where a positional deviation has occurred on the workpiece.

  In order to correct each of the partial image patterns by correcting the drawing position variation, the drawing apparatus 100 includes three types of methods: a data correction method, a mechanical correction method, and an optical method. Note that the same principle as the correction method for the position variation in the workpiece position information acquisition apparatus 200 described above is used as a method for correctly drawing each partial image pattern by correcting the position variation. it can. It should be noted that one of the above three types of methods may be employed for correcting the drawing position fluctuation, or two or more methods may be combined.

[Data correction method]
The image data correction unit 78 draws the drawing position from the drawing position fluctuation amount information Hb stored in the drawing position fluctuation amount storage unit 74 in correspondence with the transfer direction positions q1, q2, q3, q4 read by the linear encoder 72. The fluctuation amount is acquired, and the original image data Go stored in the image data memory 76 is corrected so that the drawing position fluctuation amount is offset. The partial image pattern is drawn under the control of the drawing control unit 28 using the corrected image data G1 obtained by correcting the original image data Go by the image data correction unit 78. Thereby, each partial image pattern can be drawn in a state as shown in FIG. 6 in which the positional deviations of the partial image patterns B1, B2, B3, and B4 are corrected.

  The drawing apparatus includes a reference scale Sk that is a drawing position variation measuring unit that measures a drawing position variation, and when the table 14 is repeatedly reciprocated by the transfer unit 20, the image data correction unit 234 has 1 The calculation for removing the error component may be performed using the drawing position fluctuation amount measured using the reference scale Sk when the table 14 is reciprocally transferred by the transfer unit 20 more than once.

[Machine correction method]
The drawing correction control unit 84 acquires the drawing position fluctuation amount information Hb stored in the drawing position fluctuation amount storage unit 74 in correspondence with the transfer direction positions q1, q2, q3, q4 read by the linear encoder 72. The first drawing correction moving unit 82A is controlled so as to cancel out the drawing position fluctuation amount. At this time, the partial image pattern is drawn under the control of the drawing control unit 28 using the original image data Go.

  That is, the drawing correction control unit 84 acquires from the drawing position fluctuation amount information Hb stored in the drawing position fluctuation amount storage unit 74, and the transfer direction positions q1, q2, q3, The first drawing correction moving unit 82A is controlled so that the table 14 and the drawing means 30 are relatively moved so as to cancel the drawing position fluctuation amount corresponding to q4. Thereby, each partial image pattern can be drawn in a state as shown in FIG. 6 in which the positional deviations of the partial image patterns B1, B2, B3, and B4 are corrected.

[Optical correction method]
Similar to the mechanical correction method, the drawing correction control unit 84 obtains the drawing position fluctuation acquired from the drawing position fluctuation amount information Hb corresponding to the transfer direction positions q1, q2, q3, and q4 read by the linear encoder 72. The second drawing correction moving unit 82B is controlled so as to cancel out the amount. At this time, the partial image pattern is drawn under the control of the drawing control unit 28 using the original image data Go. At this time, the partial image pattern is drawn under the control of the drawing control unit 28 using the original image data Go.

  The second drawing correction moving unit 82B includes a transparent glass plate 85, a glass frame 86 that supports the glass plate 85, and one end of the glass frame 86, as shown in FIGS. A pin 87 rotatably supported around the transfer direction (arrow Y direction in the figure) and the other end of the glass frame 86 are moved in a direction (arrow Z direction in the figure) perpendicular to the transfer plane (XY plane). An eccentric cam 88 and an electric motor 89 that pivotally supports and rotates the eccentric cam 88 are provided.

  The drawing correction control unit 84 controls the electric motor 89 to rotate the eccentric cam 88, thereby rotating the glass frame 86 in the direction of the arrow Z in the figure and ejecting from the drawing head, which is the drawing means 30. The position of the drawing beam Le to be moved is moved in the X direction in the figure.

  In the above description, the second drawing correction moving unit 82B moves the position of the drawing beam Le emitted from the drawing head, which is the drawing means 30, in the X direction in the figure, but the same mechanism as described above. The position of the drawing beam Le can also be moved in the Y direction in the figure by rotating the glass frame 86 around the arrow X direction in the figure using.

  The drawing correction control unit 84 may move only the drawing unit 30 or move only the table 14.

  The drawing position fluctuation amount information includes the drawing position fluctuation amount in the transfer direction (Y arrow direction in the drawing), the drawing position fluctuation amount in the transfer orthogonal direction (X arrow direction in the drawing) orthogonal to the transfer direction and parallel to the transfer plane, Only the drawing position fluctuation amount in the rotation direction (direction of the arrow θ in the figure) around the direction orthogonal to the transfer plane (direction of the arrow Z in the figure) orthogonal to the transfer plane may be shown. Further, the drawing position variation information is drawn only in the X direction and the Y direction by distributing the drawing position variation amount in the rotation direction (direction of the θ arrow in the figure) to the drawing position variation amounts in the X direction and the Y direction. The position variation amount may be indicated.

  Further, the drawing apparatus 100 is provided with a reference scale Sk which is a drawing position fluctuation measuring means for measuring the drawing position fluctuation, and when the table 14 is repeatedly reciprocated by the transfer unit 20, the drawing correction control unit 84. However, the drawing correction moving unit 82A and / or the drawing correction moving unit 82B is controlled using the drawing position fluctuation amount measured using the reference scale Sk when the table 14 is reciprocated by the transfer unit 20 one or more times before. You may do it.

  Further, the drawing position fluctuation amount storage unit 74 may update the drawing position fluctuation amount information stored in the drawing position fluctuation amount storage unit 74 every time the table 14 is reciprocated by the transfer unit 20.

  Further, it is assumed that the drawing apparatus 100 includes a reference scale Sk that is a drawing position fluctuation measuring unit that measures the drawing position fluctuation, and the drawing position fluctuation using the reference scale Sk in the transfer of the table 14 by the transfer unit 20. The amount may be measured, and drawing may be performed by the drawing means 30 in the transfer of the table 14 in the return path by the transfer unit 20.

[Correction of both workpiece position relative to table and table position fluctuation]
The drawing apparatus 100 can simultaneously correct both the positional deviation of the work 12 with respect to the table 14 and the positional fluctuation of the transported table 14.

  That is, the corrected work position information JJw stored in the corrected work position information storage unit 244 of the work position information acquisition device 200 and the drawing position fluctuation amount stored in the drawing position fluctuation amount storage unit 74 of the drawing apparatus 100. Both of them can correct both the position of the workpiece 12 relative to the table 14 and the position fluctuation of the table 14. As a result, as shown in FIG. 10, the partial images B1, B2, B3, and B4 can be drawn at predetermined correct positions on the workpiece 12 that are shifted from a predetermined position on the table 14. it can.

  If the above method is used, even if the workpiece 12 is distorted, the image pattern can be drawn in an optimal state corresponding to the distortion of the workpiece placed on the table 14.

[Data correction method]
As in the case of correcting only the position fluctuation of the table, the image data correction section 78 corresponds to the transfer direction positions q1, q2, q3, q4 read by the linear encoder 72, and the drawing position fluctuation amount storage section. The original image data Go stored in the image data memory 76 is corrected so as to offset the drawing position fluctuation amount acquired from 74 and the corrected work position information JJw acquired from the corrected work position information storage unit 244. . The partial image pattern is drawn under the control of the drawing control unit 28 using the corrected image data G2 obtained by correcting the original image data Go by the image data correction unit 78. Thereby, each partial image pattern can be drawn in a state as shown in FIG. 6 in which the positional deviations of the partial image patterns B1, B2, B3, and B4 are corrected.

[Machine correction method]
The drawing correction control unit 84 cancels out the drawing position fluctuation amount and the corrected work position information JJw obtained in correspondence with the transfer direction positions q1, q2, q3, and q4 read by the linear encoder 72. In addition, the first drawing correction moving unit 82A is controlled. At this time, the partial image pattern is drawn under the control of the drawing control unit 28 using the original image data Go.

[Optical correction method]
Similar to the mechanical correction method, the drawing correction control unit 84 obtains the drawing position fluctuation amount and the corrected work acquired in correspondence with the transfer direction positions q1, q2, q3, and q4 read by the linear encoder 72. The second drawing correction moving unit 82B is controlled so as to cancel out the position JJw. At this time, the partial image pattern is drawn under the control of the drawing control unit 28 using the original image data Go.

  The plurality of drawing correction methods for accurately drawing the image pattern and the plurality of workpiece position acquisition methods for acquiring the workpiece positions on the table described above may be combined in any way. The present invention is not limited to the combination of the work position acquisition method and one type of drawing correction method, and may combine a plurality of types of work position acquisition methods and a plurality of types of drawing correction methods.

  For example, a reference scale Sk serving as both an imaging position variation measuring unit that measures the imaging position variation and a drawing position variation measuring unit that measures the drawing position variation is provided. In the forward transfer of the table 14 by the transfer unit 20, the reference scale Sk is used, that is, the image position change amount and the drawing position change amount are commonly shown by imaging the reference scale Sk with the image pickup unit 226. While measuring the fluctuation amount, the imaging unit 226 images the table reference mark 214 and the workpiece reference mark 212 to acquire the position of the workpiece 12 with respect to the table 14. Thereafter, in the transfer of the table 14 by the transfer unit 20, the above-described various corrections are performed by the drawing unit 30 based on the position variation information obtained as described above and the position information of the workpiece 12 relative to the table 14. You may make it perform the performed drawing.

[Detailed description of drawing device]
Details of the drawing apparatus 100 according to the above embodiment will be described below.

  As shown in FIG. 1, the drawing apparatus 100 is configured in a so-called flat bed type, and includes a flat table 14 that holds and holds a workpiece 12 that is a drawing target member to be drawn on the surface. Yes. Two guides 20 </ b> A extending along the table moving direction are installed on the upper surface of the thick plate-shaped installation base 18 supported by the four legs 16. The table 14 is arranged so that its longitudinal direction faces the table moving direction, and is supported by the guide 20A so as to be reciprocally movable. The drawing apparatus 100 is provided with a transfer unit 20 for driving the table 14 along the guide 20A.

  A U-shaped gate 22 is provided at the center of the installation table 18 so as to straddle the movement path of the table 14. Each of the end portions of the gate 22 is disposed on both side surfaces of the installation base 18. A drawing unit 24 containing a drawing head constituting the drawing means 30 is provided on one side of the gate 22, and the leading and trailing ends of the work 12 are detected and a reference mark is imaged on the other side. An imaging unit 226 that houses a plurality of CCD cameras (for example, two) is provided. The drawing unit 24 and the imaging unit 226 are each attached to the gate 22 and arranged above the movement path of the table 14.

  In the drawing unit 24, as shown in FIG. 11, a plurality of (for example, eight) drawing means 30 arranged in a substantially matrix of i rows and j columns (for example, 2 rows and 4 columns) are configured. Drawing heads 30A, 30B... Are installed.

  As shown in FIG. 11, the drawing areas 32A, 32... (Hereinafter collectively referred to as the drawing area 32) by the drawing heads 30A, 30B. ) In a rectangular shape having a long side. In this case, the work 12 has strip-shaped drawn areas 34A, 34B,... For each of the drawing heads 30A, 30B,. Is formed.

  Further, each of the drawing heads 30A, 30B,... Arranged in each row is arranged in a column so that the strip-like drawn regions 34 are arranged in the orthogonal direction (arrow X direction in the figure) orthogonal to the transfer direction without any gap. They are arranged so as to be shifted in the direction by a predetermined interval (a natural number times the long side of the drawing area). That is, for example, a portion that cannot be drawn between the drawing area 32A by the drawing head 30A and the drawing area 32B by the drawing head 30B can be the drawing area 32F by the drawing head 30F.

[Schematic configuration of drawing head]
As shown in FIG. 1 and FIG. 12, the drawing means 30 arranges a large number of micromirrors M, which are microscopic light modulation elements, two-dimensionally arranged for light emitted from the light source 38 and emitted through the optical fiber 40. A spatial light modulator is used to perform spatial light modulation by a DMD (digital micromirror device) 36, and a drawing beam Le corresponding to each micromirror M formed according to the light modulation state of each micromirror M is a workpiece. An image is formed on the image 12, and an image pattern, for example, a wiring pattern is drawn on the work 12.

  Each drawing unit 30 includes a digital micromirror device (DMD) 36 as a spatial light modulator that spatially modulates a light beam emitted from the light source 38 and emitted through the optical fiber 40. The DMD 36 is connected to a DMD controller 29 including a data processing unit and a mirror drive control unit.

  The DMD controller 29 controls the angle of the reflection surface of each micromirror to be controlled by the DMD 36 for each of the drawing heads 30A, 30B... Based on the input image data.

  As shown in FIG. 1, bundle-shaped optical fibers 40 respectively drawn from the light sources 38 are arranged on the light incident side of the DMD 36 arranged in each of the drawing heads 30 </ b> A, 30 </ b> B.

  The light source 38 accommodates a plurality of sets of multiplexing modules that combine laser beams emitted from a plurality of semiconductor laser chips and input them to an optical fiber. The optical fiber extending from each multiplexing module is a multiplexing optical fiber that propagates the combined laser beam, and a plurality of optical fibers are bundled into one to form a bundled optical fiber 40.

  As shown in FIG. 12, a mirror 42 that reflects the light emitted from the bundle optical fiber 40 toward the DMD 36 is disposed on the light incident side of the DMD 36 of the drawing unit 30.

  Next, the imaging optical system 59 provided on the light exit side of the DMD 36 of the drawing unit 30 will be described. As shown in FIG. 1, the imaging optical system 59 forms an image of a light source on the work 12, and in order along the optical path from the DMD 36 side to the work 12 side, the lens systems 50, 52. The optical elements of the microlens array 54 and the objective lens systems 56 and 58 are arranged.

  Here, the lens systems 50 and 52 are configured as magnifying optical systems, and the area of the drawing area 32 on the work 12 drawn by the pixel light beam reflected by the DMD 36 is enlarged to a required size. .

  As shown in FIG. 1, the microlens array 54 is formed by integrally forming a plurality of microlenses 60 corresponding to the micromirrors M of the DMD 36 on a one-to-one basis. The pixel light beams 50 and 52 are arranged so as to pass therethrough.

  The entire microlens array 54 is formed in a rectangular flat plate shape, and apertures 62 are integrally disposed in the portions where the microlenses 60 are formed. The aperture 62 forms an aperture stop that is disposed in one-to-one correspondence with each microlens 60.

  The objective lens systems 56 and 58 are configured as, for example, an equal magnification optical system. The work 12 is disposed at a position where the pixel light beam L is imaged through the objective lens systems 56 and 58.

  With the configuration described above, an image pattern can be formed by forming an image of the drawing beam Le, which is the drawing means 30 emitted from the light source 38, on the surface of the workpiece 12.

[Drawing operation of drawing device]
Next, an operation for drawing an image pattern on the workpiece 12 by the drawing apparatus 100 will be described.

  The table 14 on which the workpiece 12 is placed moves at a constant speed from the upstream side to the downstream side in the transfer direction along the guide 20A. When the front end of the workpiece 12 is detected by the imaging unit 226 attached to the gate 22 while the table 14 passes under the gate 22, reading of image data for a plurality of lines is started.

  Then, each of the micro mirrors of the DMD 36 is on / off controlled for each of the drawing heads 30A, 30B,... By the mirror drive control of the DMD controller 29.

  When the light beam emitted from the optical fiber 40 and reflected by the mirror 42 is irradiated to the DMD 36, the laser light reflected when the micromirror of the DMD 36 is in the on state is reflected by the corresponding microlens 60 of the microlens array 54. The image is formed on the drawing surface of the workpiece 12 through a lens system including In this manner, the pixel light beam L emitted from the DMD 36 is turned on / off for each micromirror, and the work 12 is drawn in approximately the same number of pixels (drawing area) as the number of used pixels of the DMD 36.

  Further, by moving the table 14 on which the work 12 is placed at a constant speed, the work 12 is relatively moved in the direction opposite to the table moving direction by the drawing unit 24, and each of the drawing heads 30A, 30B,. A band-shaped drawn area 34 is formed for each time, and an image pattern is drawn on the work 12.

  In other words, the image pattern is formed on the work 12 by irradiating the work 12 with the drawing beam Le generated by performing modulation corresponding to the image pattern to be drawn by the DMD 36.

  When drawing of the work 12 by the drawing unit 24 is completed and the rear end of the work 12 is detected by the imaging unit 226, the table 14 is returned to the origin on the most upstream side in the transfer direction along the guide 20A, and again, It is possible to perform drawing repeatedly by moving the guide 20A from the upstream side to the downstream side in the transfer direction at a constant speed. That is, the drawing of the workpiece 12 by the drawing unit 24 can be performed every time the table 14 is reciprocally transferred by the transfer unit 20.

[Generate DMD reset signal]
FIG. 13 is a block diagram showing a processing method of the position in the transfer direction of the table 14 read by the linear encoder 72. The 0.1 μm pitch signal output from the linear encoder 72 in accordance with the transfer of the table 14 is divided into eight equal parts by the eight multiplication circuit and converted to a 0.0125 μm pitch. The DMD controller 29 is controlled by the DMD controller 29 using this signal. However, since the position change in the transfer direction occurs during the transfer of the table 14, the drawing area for drawing the image pattern is divided into, for example, 64 areas (for example, 10 mm intervals). The reset interval for correcting the position variation is adjusted for each region. The reset cycle is created using an NCO (Numerical Controlled Oscillator) circuit. Thereby, the remainder of the pulse can be equally distributed, and the reset interval can be made uniform. The signal created by the NCO circuit is used as a DMD reset signal and input to the DMD control circuit.

The figure which shows schematic structure of the workpiece position information acquisition apparatus of this invention The figure which shows a mode that a reference | standard mark is imaged with the workpiece | work position information acquisition apparatus in the state in which position fluctuation does not arise The figure which shows a mode that a reference | standard mark is imaged by the workpiece position information acquisition apparatus in the state in which the position fluctuation occurred The figure which shows the position fluctuation of the table corresponding to the position of the table transfer direction The figure which shows the technique which corrects the position fluctuation of the rotation direction The figure which shows the state by which each partial image pattern was correctly drawn on the table The figure which shows the drawing timing of each partial image pattern in the graph which shows the position change of a table corresponding to the transfer direction position of a table The figure which shows the state which drawn each partial image pattern, without correcting position variation The figure which shows the structure of the moving means for optical drawing correction | amendment The figure which shows a mode that each image pattern was drawn in the correct position with respect to this workpiece | work on the workpiece | work arrange | positioned shifted | deviated from the predetermined position on a table. The figure which shows a mode that drawing on a work using a plurality of drawing heads Diagram showing the configuration of the drawing head The figure which shows the production | generation process of a DMD reset signal

Explanation of symbols

DESCRIPTION OF SYMBOLS 12 Work 14 Table 20 Conveying means 30 Drawing means 226 Imaging means 212 Work reference mark 214 Table reference mark 100 Drawing apparatus 200 Work position information acquisition apparatus

Claims (13)

While moving the table on which the work is placed relative to the drawing means, the work on which the partial image pattern corresponding to each position in the transfer direction of the table with respect to the drawing means is placed on the table by the drawing means. A drawing method for sequentially drawing up and drawing a predetermined image pattern on the workpiece,
The drawing means uses the drawing position fluctuation amount information indicating the drawing position fluctuation amount indicating the position fluctuation of the table with respect to the drawing means generated in the transfer of the table in advance according to the position of the table in the transfer direction. A drawing method for removing drawing errors caused by position fluctuations of the table when drawing an image pattern on the work placed on the table. While the table on which the workpiece is placed is moved relative to the drawing means, the drawing means places a partial image pattern corresponding to each position in the transfer direction of the table on the drawing means on the table. A drawing method for sequentially drawing up and drawing a predetermined image pattern on the workpiece,
Drawing position fluctuation amount information indicating a drawing position fluctuation amount indicating the position fluctuation of the table with respect to the drawing means generated in the transfer of the table in accordance with a transfer direction position of the table is acquired in advance.
The image data used for drawing the partial image pattern used by the drawing unit is corrected so that the drawing position fluctuation amount corresponding to each transfer direction position of the table acquired from the drawing position fluctuation amount information is offset. To obtain corrected image data,
A drawing method, wherein when the partial image pattern is drawn by the drawing means, the partial image pattern is drawn using the corrected image data. A table on which the workpiece is placed;
Drawing means for drawing on the workpiece placed on the table;
Transfer means for transferring the table relative to the drawing means;
Transfer direction position information acquisition means for acquiring transfer direction position information indicating the transfer direction position of the table with respect to the drawing means;
While transferring the table relative to the drawing unit by the transfer unit, the partial image pattern corresponding to each transfer direction position of the table acquired by the transfer direction position information acquiring unit by the drawing unit is A drawing apparatus comprising drawing control means for sequentially drawing on a work placed on a table and controlling to draw a predetermined image pattern on the work,
Drawing that stores, in advance, drawing position fluctuation amount information that indicates a drawing position fluctuation amount that indicates a position fluctuation of the table with respect to the drawing means that occurs in the transfer of the table by the transfer means, according to a position in the transfer direction of the table. Position variation storage means;
The image data used for drawing the partial image pattern used by the drawing unit is corrected so that the drawing position fluctuation amount corresponding to each transfer direction position of the table acquired from the drawing position fluctuation amount information is offset. Image data correction means, and the drawing control means uses the corrected image data obtained by the correction of the image data by the image data correction means when drawing the partial image pattern by the drawing means. A drawing apparatus, wherein the drawing means controls to draw the partial image pattern.   The drawing position fluctuation amount information includes a drawing position fluctuation amount in the transfer direction, a drawing position fluctuation amount in a transfer orthogonal direction orthogonal to the transfer direction and parallel to the transfer plane, and a transfer plane orthogonal direction orthogonal to the transfer plane. The drawing apparatus according to claim 3, wherein the drawing apparatus indicates a drawing position fluctuation amount in a rotation direction around the.   A drawing position variation measuring unit for measuring the drawing position variation, and when the table is repeatedly reciprocated by the transfer unit, the image data correction unit is configured to transfer the table by the transfer unit at least once before. 5. The drawing apparatus according to claim 3, wherein a calculation for removing the error component is performed using the drawing position fluctuation amount measured by the drawing position fluctuation amount measuring means during the reciprocating transfer. While the table on which the workpiece is placed is moved relative to the drawing means, the drawing means places a partial image pattern corresponding to each position in the transfer direction of the table on the drawing means on the table. A drawing method for sequentially drawing up and drawing a predetermined image pattern on the workpiece,
Drawing position fluctuation amount information indicating the drawing position fluctuation amount indicating the position fluctuation of the table with respect to the drawing means generated in the transfer of the table according to the transfer direction position of the table is acquired in advance.
When drawing the partial image pattern by the drawing means, the drawing position fluctuation amount corresponding to the transfer direction position of the table when drawing the partial image pattern acquired from the drawing position fluctuation amount information is offset. A drawing method characterized by relatively moving the table and the drawing means. A table on which the workpiece is placed;
Drawing means for drawing on the workpiece placed on the table;
Transfer means for transferring the table relative to the drawing means;
Transfer direction position information acquisition means for acquiring transfer direction position information indicating the transfer direction position of the table with respect to the drawing means;
While transferring the table relative to the drawing unit by the transfer unit, the partial image pattern corresponding to each transfer direction position of the table acquired by the transfer direction position information acquiring unit by the drawing unit is A drawing apparatus comprising drawing control means for sequentially drawing on a work placed on a table and controlling to draw a predetermined image pattern on the work,
Drawing that stores, in advance, drawing position fluctuation amount information that indicates a drawing position fluctuation amount that indicates a position fluctuation of the table with respect to the drawing means that occurs in the transfer of the table by the transfer means, according to a position in the transfer direction of the table. Position variation storage means;
A drawing correction moving means for relatively moving the table and the drawing means;
When the partial image pattern is drawn by the drawing means, the drawing position fluctuation amount corresponding to the transfer direction position of the table when drawing the partial image pattern acquired from the drawing position fluctuation amount information is A drawing apparatus comprising: a drawing correction control unit that controls the drawing correction moving unit so as to cancel the drawing unit by relatively moving the drawing unit.   8. The drawing apparatus according to claim 7, wherein the drawing correction control means moves only the drawing means.   8. The drawing apparatus according to claim 7, wherein the drawing correction control means moves only the table.   The drawing position fluctuation amount information includes a drawing position fluctuation amount in the transfer direction, a drawing position fluctuation amount in a transfer orthogonal direction orthogonal to the transfer direction and parallel to the transfer plane, and a transfer plane orthogonal direction orthogonal to the transfer plane. The drawing apparatus according to claim 7, wherein the drawing apparatus indicates a drawing position fluctuation amount in a rotation direction around.   The drawing position variation measuring means for measuring the drawing position variation amount is provided, and when the table is repeatedly reciprocated by the transfer means, the drawing correction control means is one or more times before the table by the transfer means. 11. The drawing correction moving means is controlled by using the drawing position fluctuation amount measured by the drawing position fluctuation amount measuring means during the reciprocating transfer of the drawing position. Drawing device.   The drawing position fluctuation amount information stored in the drawing position fluctuation amount storage means is updated each time the drawing position fluctuation amount storage means reciprocates the table by the transfer means. Item 12. The drawing device according to any one of Items 3, 4, 5, 7, 8, 9, 10, and 11.   A drawing position fluctuation measuring means for measuring the drawing position fluctuation quantity; the drawing position fluctuation measuring means is measured by the drawing position fluctuation measuring means in the forward transfer of the table by the transfer means; and the table by the transfer means is measured. The drawing apparatus according to any one of claims 3, 4, 5, 7, 8, 9, 10, 11, and 12, wherein drawing is performed by the drawing means during the return path transfer.

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