JP2006308566A - Ultrasonic flaw detection method and apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ultrasonic flaw detection method and an apparatus easily handled and capable of speedily acquiring flaw detection images with high resolution and high S/N ratio. <P>SOLUTION: In the ultrasonic flaw detection method, an array-type ultrasonic sensor 101 is moved sequentially from a position 101A, a position 101B to a position 101C by a scanning means 107, while the angle of incidence of ultrasonic waves 108 oscillated from the array-type ultrasonic sensor 101 is being swung to detect flaws inside an object 100 to be inspected by sector scan. Flaw detection images, acquired each time the array type ultrasonic sensor 101 has moved, are shifted while the amount of the array-type ultrasonic sensor is moved, are added or averaged, and formed as visual images as the processing images 103C. Since the focusing effect of the ultrasonic waves 108 is acquired, without having to finely set a depth of focus in the object 100 to be inspected, flaw detection images can be obtained with high resolution at all the depth positions of a flaw detection region and high-accuracy nondestructive inspection can be conducted. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

The present invention relates to an ultrasonic flaw detection method which is a kind of destructive inspection technique, and more particularly to an ultrasonic flaw detection method using an array type ultrasonic sensor and an apparatus therefor.

In the ultrasonic flaw detection method using various structural materials as inspection targets, conventionally, an ultrasonic sensor consisting of a single element is used for transmission and reception of ultrasonic waves, and ultrasonic signals reflected by defects inside the inspection target are used. The defect is detected based on the propagation time and the position of the ultrasonic sensor.

At this time, move the ultrasonic sensor to find the position where the reflected wave from the defect can be obtained, and receive the reflected wave from the bottom surface (distant boundary surface) or surface (closer boundary surface) to be inspected. And the difference between
The dimension of the defect is identified by integrating the material sound velocity (the sound velocity in the material to be inspected).

This method is simple and clear in principle, and is relatively easy to use. Therefore, this method is often used for general defect inspection. However, the ultrasonic reflected wave is measured and the defect is detected only from the reception time of the reflected wave. Since it must be evaluated, a highly accurate inspection requires a skilled inspector and much time is required for measurement.

On the other hand, in recent years, as known as a phased array method, an aperture synthesis method, or the like, a flaw detection method has been developed for imaging and inspecting the inside of an inspection object with high accuracy (for example, see Non-Patent Document 1). .

Here, first, the phased array method uses a so-called array type ultrasonic sensor in which a plurality of piezoelectric vibration elements are arranged, and a wavefront of ultrasonic waves transmitted from each piezoelectric vibration element interferes to form a composite wavefront. Based on the principle of propagation, therefore, the ultrasonic transmission timing of each piezoelectric vibration element is delay-controlled, and by shifting each timing, the incident angle of the ultrasonic wave can be controlled and the ultrasonic wave is focused. Can be made.

In addition, when receiving ultrasonic waves, the reflected ultrasonic waves received by each piezoelectric vibration element are shifted and added to control the reception angle of the ultrasonic waves as in the case of transmission, or the ultrasonic waves are focused and focused. Can be received.

As the phased array method, a linear scan method that linearly scans a piezoelectric vibrator and a sector scan method that changes the transmission and reception directions of ultrasonic waves in a fan shape are generally known. Even in the case of the method, it is possible to scan the ultrasonic wave at high speed without moving the ultrasonic sensor, or to arbitrarily control the incident angle of the ultrasonic wave and the position of the focusing depth without exchanging the ultrasonic sensor. Therefore, it can be said that the technique enables high-speed and high-precision inspection.

On the other hand, in the aperture synthesis method, when the ultrasonic wave is transmitted and the reflected ultrasonic signal is received so that the wave is widely diffused in the inspection object, the position of the defect serving as the sound source of the received reflected ultrasonic wave is the ultrasonic wave. It is based on the principle that it exists on an arc whose center is the position of the piezoelectric vibration element that has transmitted and received and the propagation distance of the reflected ultrasonic wave is the radius. For this reason, the position of the piezoelectric vibration element is changed sequentially. By transmitting and receiving ultrasonic waves, the received waveform at each position is calculated on an electronic calculator and expanded in an arc shape, so that the intersection of the arcs is concentrated at the position where the defect becomes the ultrasonic reflection source, The position of the defect is specified.

In practice, this is a technology that uses the position of the ultrasonic sensor and the ultrasonic waveform signal at that position to perform high-resolution imaging processing on an electronic computer. Are described in Non-Patent Document 1.
Co-authored by Masamasa Kondo, Yoshimasa Ohashi, and Akirou Mimori Digital Signal Processing Series Volume 12 “Digital Signal Processing in Measurements and Sensors” pp. 143-186 May 20, 1993

First of all, in the case of the phased array method in the above prior art, there is an advantage that the ultrasonic incident angle and the focusing position can be arbitrarily controlled by a plurality of piezoelectric vibration elements, and high-speed and high-precision inspection can be performed. Since the focus is only at the focus depth position, the focus is not focused at the unfocused depth position. As a result, the spatial resolution is lowered at the depth position where the focus is not focused. There was a problem.

In addition, in this phased array method, it is necessary to perform ultrasonic scanning while sequentially focusing on all depth positions to be inspected, but there is a limit to the repetition period of ultrasonic transmission and reception at this time. Therefore, it takes a lot of time for the inspection, and there is a problem that it is not realistic.

Furthermore, in this phased array method, it is necessary to perform evaluation by looking at a large number of flaw detection images divided according to the depth of focus, and there has been a problem that evaluation of flaw detection images becomes extremely complicated.

Next, in the case of the aperture synthesis method in the above-described prior art, each waveform of the ultrasonic wave transmission point and reception point is processed on an electronic computer, so that an advantage of high-resolution imaging is possible. On the other hand, in principle, it is necessary to transmit the ultrasonic wave so that it spreads widely, so the intensity (level) of the received ultrasonic wave decreases as the propagation distance of the ultrasonic wave increases. When the object to be inspected is thick and the propagation distance of the ultrasonic wave is long, the intensity of the ultrasonic wave at a point far from the sensor becomes considerably weak. In addition to being difficult, there is a problem that the S / N ratio is lowered due to being easily affected by various noises including electric noise.

Furthermore, this aperture synthesis method requires sophisticated computation processing on an electronic computer, so that computation takes time, and is therefore not suitable for a method for evaluating flaw detection images on site while performing inspection. There was a problem.

An object of the present invention is to provide an ultrasonic flaw detection method and apparatus which can be easily handled and can obtain a flaw detection image with high resolution and high S / N speedily.

  The object is to move the transmission / reception position of the ultrasonic wave by the array type ultrasonic sensor with respect to the inspection object, detect the inspection object by a sector scan method using the array type ultrasonic sensor at the plurality of transmission / reception positions, and This is achieved by an ultrasonic flaw detection method characterized in that each flaw detection result at the transmission / reception position is generated as one image.

  In addition to the above-described method, the amount of movement of the transmission / reception position of the ultrasonic wave is grasped, and each flaw detection image is shifted by an amount corresponding to the amount of movement and added or averaged to obtain the one image. It is also achieved by an ultrasonic flaw detection method in addition to generation.

  The object is to transmit and receive a drive signal and a received signal between the array type ultrasonic sensor, an array type ultrasonic sensor, a scanning means for moving an ultrasonic transmission / reception position by the array type ultrasonic sensor, and the array type ultrasonic sensor. Transmission / reception means for changing the focusing position and incident angle of the ultrasonic wave by giving a delay time to the signal, and adding or averaging the ultrasonic transmission / reception results at the plurality of ultrasonic transmission / reception positions by shifting by the amount corresponding to the amount of movement This is achieved by an ultrasonic flaw detection apparatus including a computer for processing and display means for displaying a processing result of the computer as one flaw detection image.

  The purpose is to change the incident angle of the ultrasonic wave with respect to the inspection object using the array type ultrasonic sensor, and to move the installation position of the array type ultrasonic sensor in the inspection object. Is obtained, and the flaw detection image for each installation position is sequentially added and averaged while being shifted by the amount of movement of the array-type ultrasonic sensor.

Here, when adding or averaging the flaw detection images, the inclination angle of each flaw detection image is corrected according to the inclination of the surface of the inspection object that appears when the installation position of the array type ultrasonic sensor in the inspection object is moved. Even if it does in this way, the said objective can be achieved.

In addition, the above object is to change the incident angle of the ultrasonic wave with respect to the inspection object by using a part of the piezoelectric vibration element inside the array type ultrasonic sensor, and sequentially turn the part of the piezoelectric vibration element inside the array type ultrasonic sensor. The ultrasonic transmission / reception position in the inspection object of the array type ultrasonic sensor is moved by switching in order to obtain a flaw detection image sequentially for each ultrasonic transmission / reception position, and the flaw detection image for each ultrasonic transmission / reception position is sequentially acquired. It can also be achieved by adding or averaging images while shifting by the amount of movement of a part of the piezoelectric vibration elements of the array type ultrasonic sensor.

Next, the object is to provide an array type ultrasonic sensor having a plurality of piezoelectric vibration elements, a pulser for supplying a transmission signal to each piezoelectric vibration element of the array type ultrasonic sensor, and each of the array type ultrasonic sensors. A receiver that inputs a reception signal from the piezoelectric vibration element, a delay control unit that sets a different delay time for each of the piezoelectric vibration elements in the transmission signal and the reception signal, and an ultrasonic wave received by the array-type ultrasonic sensor A data recording unit that records waveforms, a sensor moving unit that scans the array type ultrasonic sensor with respect to an inspection target, a scanning control unit that controls the data, and a moving amount that measures the moving amount of the array type ultrasonic sensor A flaw detection image is generated from the waveform recorded by the detection unit and the data recording unit, and a plurality of flaw detection images are added while being shifted by the movement amount measured by the movement amount detection unit of the array type ultrasonic sensor. And computer for image processing, is also achieved by providing a display unit for displaying the inspection image and summing the flaw detection image.

Here, when the computer adds or averages the plurality of flaw detection images, the inclination angle of each flaw detection image indicates the inclination of the surface of the inspection target that appears when the installation position of the array type ultrasonic sensor in the inspection target is moved. It may be a computer that corrects according to the above.

Similarly, the above object is to transmit an array type ultrasonic sensor having a plurality of piezoelectric vibration elements more than the number necessary for operation as an array type ultrasonic sensor, and to each piezoelectric vibration element of the array type ultrasonic sensor. A pulser for supplying a signal; a transmission switching circuit for switching a piezoelectric vibration element to which an output of the pulser is supplied among each piezoelectric vibration element of the array-type ultrasonic sensor; and each piezoelectric vibration element of the array-type ultrasonic sensor A reception signal input from the receiver, a reception switching circuit for switching a piezoelectric vibration element to which the reception signal is supplied to the receiver among the piezoelectric vibration elements of the array type ultrasonic sensor, and a difference for each piezoelectric vibration element A delay control unit for setting the delay time in the transmission signal and the reception signal, a data recording unit for recording the ultrasonic waveform received by the array type ultrasonic sensor, A sensor moving unit that scans the array type ultrasonic sensor with respect to the inspection object, a scanning control unit that controls the sensor moving unit, a movement amount detecting unit that measures the moving amount of the array type ultrasonic sensor, and the data recording unit A computer for image processing that generates a flaw detection image from the recorded waveform and adds or averages a plurality of flaw detection images by shifting each movement amount measured by the movement amount detection unit of the array type ultrasonic sensor, and the flaw detection image and the addition This can also be achieved by providing a display unit that displays the flaw detection image.

According to the present invention, the inside angle of the inspection object is flawed by changing the incident angle of the ultrasonic wave oscillated from the array type ultrasonic sensor, and the installation position of the array type ultrasonic sensor is sequentially moved. By obtaining the image by adding or averaging the flaw detection images obtained at each flaw detection position while shifting the moving amount of the array type ultrasonic sensor, it is possible to obtain the ultrasonic focusing effect without setting the depth of focus finely. As a result, high-resolution flaw detection images can be obtained at almost all depth positions, so high-precision nondestructive inspection can be performed, and random noise can be reduced by adding or averaging flaw detection images. The S / N of the flaw detection image can be improved.

In addition, according to the present invention, a pulsar that transmits a transmission signal and a reception signal are transmitted and received between the array-type ultrasonic sensor including a plurality of piezoelectric vibration elements and the piezoelectric vibration elements of the array-type ultrasonic sensor. A receiver, a delay control unit that performs time control by changing a delay time for each of the piezoelectric vibration elements in the transmission signal and the reception signal, and data that records a waveform in which ultrasonic waves are transmitted and received by the array type ultrasonic sensor A recording unit, a sensor moving unit that scans the array-type ultrasonic sensor, a scanning control unit that controls the sensor, a movement amount detection unit that measures a movement amount of the array-type ultrasonic sensor, and a flaw detection image from the recorded waveform And an image processing unit that adds or averages a plurality of flaw detection images by shifting the movement amount measured by the movement amount detection unit of the array type ultrasonic sensor, and the flaw detection image and the added flaw detection image By providing a display unit for displaying, it is possible to obtain the effect of focusing without ultrasound to finely set the depth of focus, because the flaw detection image is high resolution, and to allow high-precision nondestructive inspection.

As a result, according to the present invention, it has processing content switching means for switching between flaw detection such as linear scan and sector scan, which are conventional flaw detection methods using an array type ultrasonic sensor, and processing of the flaw detection image. Therefore, the same operation as the conventional flaw detection is possible.

Similarly, according to the present invention, in an inspection using an array type ultrasonic sensor, it is possible to obtain an ultrasonic focusing effect without finely setting the focal depth. As a result, even if the distance from the sensor is long, High resolution flaw detection images can be obtained at all depth positions.

Furthermore, according to the present invention, a high-resolution and high-S / N flaw detection image can be obtained without performing sophisticated computations over time as in the case of the aperture synthesis method. Can be evaluated.

According to the present invention, an ultrasonic focusing effect can be obtained without finely setting the focal depth, so that a high-resolution and high S / N flaw detection image can be obtained quickly with a simple operation. As a result, highly accurate and reliable nondestructive inspection can be performed.

Hereinafter, the ultrasonic flaw detection method and apparatus of the present invention will be described in detail with reference to the illustrated embodiments.

FIG. 1 shows a first embodiment of the present invention. As shown in FIG. 1, an inspection object 100, an array-type ultrasonic sensor 101 that makes an ultrasonic wave incident thereon, a transmission / reception unit 102, a reception signal and a flaw detection image are shown. Display unit 103 for displaying, scanning means control unit 105 for scanning array type ultrasonic sensor 101, movement amount detection unit 106 for detecting the amount of movement of array type ultrasonic sensor 101, and sensor scanning for scanning array type ultrasonic sensor 101 Means 107 is configured.

Here, as shown in the figure, the array type ultrasonic sensor 101 is basically composed of a plurality of piezoelectric vibration elements 104 that generate and receive ultrasonic waves, and is installed on the flaw detection surface of the inspection object 100. Thereafter, an ultrasonic wave 108 is generated by the drive signal supplied from the transmission / reception unit 102, propagates in the inspected object 100, a reflected wave appearing thereby is detected, and the reception signal is transmitted to the transmission / reception unit 102. It works to input.

The transmission / reception unit 102 transmits and receives ultrasonic waves by the array-type ultrasonic sensor 101. For this reason, the computer 102A, the delay time control unit 102B, the pulsar 102C,
A receiver 102D and a data recording unit 102E are provided, and the pulser 102C supplies a drive signal to the array type ultrasonic sensor 101, whereby the receiver 102D processes a reception signal input from the array type ultrasonic sensor 101. ing.

At this time, the computer 102A controls the delay time control unit 102B, the pulsar 102C, the receiver 102D, and the data recording unit 102E so as to obtain necessary operations. First, the delay time control unit 102B includes the pulsar 102C. Both the timing of the drive signal output from the receiver and the input timing of the received signal by the receiver 102D are controlled, so that the operation of the array-type ultrasonic sensor 101 by the phased array method can be obtained.

The operation of the phased array method by the array-type ultrasonic sensor 101 here refers to an operation of transmitting and receiving an ultrasonic wave by controlling the focal depth and the incident angle 109 of the ultrasonic wave 108, and thereby receiving from the receiver 102 </ b> D. A reception signal is supplied to the data recording unit 102E.

Therefore, the data recording unit 102E processes the supplied reception signal and causes the computer 102A to record it as recorded data, whereby the computer 102A synthesizes the waveform obtained by each piezoelectric vibration element according to the delay time. Then, the waveform for each incident angle of each ultrasonic wave is imaged, supplied to the display unit 103, and displayed as a flaw detection image 103B.

At this time, the computer 102A further includes a scanning unit control unit 105 and a movement amount detection unit 1 described later.
In accordance with the operation of 06, a plurality of flaw detection images 103B obtained at the respective positions are added or averaged and displayed on the display hand portion 103 as a processed image 103C.

In addition, the display unit 103 has a function of displaying a flaw detection image as described above and a waveform 103A corresponding to the position of an arbitrary ultrasonic incident angle 103F in the flaw detection image. Note that details of the processing performed by the computer 102A and the operation of the display unit 103 will be described in detail later.

By the way, in FIG. 1, the defect 110 is drawn on the assumption that the defect 110 exists on the bottom surface side of the inspection object 100.
In the flaw detection image 103B and the processed image 103C of 03, an echo by the bottom of the defect on the bottom surface position 103E, a so-called defect corner echo 103K, an echo by the tip of the defect, a so-called tip echo 103J, and an echo by the bottom of the inspection object 100, so-called A bottom surface echo 103I is observed, and simultaneously in the synthesized waveform 103A, reflected waves corresponding to these echoes are observed as a defect corner echo 103K and a defect tip echo 103J.

Therefore, when performing depth sizing of defects on the bottom side in this state, the processed image 1
The bottom surface position 103E and the defect tip echo position 103D in the echo obtained during 03C are used. For this reason, the position control unit included in the scanning unit control unit 105 receives a movement signal composed of a movement speed and a movement amount from the computer 102A, and drives the sensor movement unit 107 based on the movement signal, thereby array type ultrasonic waves. The sensor 101 is moved and the installation position is changed as indicated by the positions 101A, 101B, and 101D.

At this time, although not shown, the sensor moving unit 107 includes a sensor position detecting unit, and the detection signal is supplied to the moving amount detecting unit 106, whereby the moving amount detecting unit 106 is connected to the array type ultrasonic sensor 101. The actual amount of movement is measured. FIG. 1 shows a case where the array-type ultrasonic sensor 101 moves from a position 101A at the start of flaw detection to a position 101C at the end of flaw detection through a position 101B on the way.

The movement amount thus measured is sent from the movement amount detection unit 106 to the computer 102A and used for processing of the flaw detection image. Although details will be described later, in brief explanation, the measured movement amount is the amount of movement at each flaw detection position of the array-type ultrasonic sensor 101, and flaw detection is performed in the computer 102A by this movement amount. It is used for performing addition or averaging by shifting the pixel position of the image.

By the way, the ultrasonic flaw detection apparatus according to this embodiment is not limited to the above-described operation by addition or averaging processing of flaw detection images, but also linear scan and sector scan by a conventional ultrasonic flaw detection apparatus using an array type ultrasonic sensor. Therefore, in order to switch between these operation modes and the operation mode of the above-described flaw detection image addition or averaging processing, in this embodiment, a switch or button type is provided in the display unit 103. Processing content switching means 103L
As a result, the processing contents by the software of the computer 102A can be switched.

Next, the operation of the array type ultrasonic sensor 101 in this embodiment will be described with reference to FIG. 2. As described above, the array type ultrasonic sensor 101 is composed of an array of a plurality of piezoelectric vibration elements 104. These piezoelectric vibration elements 104 are driven by electrical signals supplied from the transmission / reception unit 102 and are vibrated by the piezoelectric effect to emit ultrasonic waves 108. At this time, each piezoelectric vibration element 104 The supplied electrical signal 201 is given an independent time delay by a delay time control unit 102B in the transmission / reception unit 102.

Therefore, the wavefront 202 of the ultrasonic wave emitted from each piezoelectric vibrating element 104 interferes, thereby forming a synthetic wavefront 203. As a result, the ultrasonic wave can be focused at an arbitrary depth position 204,
The incident angle 205 of the ultrasonic wave can be controlled. In this embodiment, the focal depth setting method at this time is considered in consideration of the plate thickness of the inspection object 100, or the bottom surface of the inspection object 100 or more. The focal point is set at a deeper position, so that the diffusion attenuation of the ultrasonic wave, which is a problem when the aperture synthesis method is applied, can be suppressed, and the flaw detection is performed at a high S / N even when the propagation distance of the ultrasonic wave is long. To be able to.

At this time, in order to obtain the flaw detection image 103B, the incident angle 205 of the ultrasonic wave
Is changed at a predetermined pitch over a range 109 used for flaw detection. The pitch of the incident angle 205 of the ultrasonic wave at this time can be arbitrarily set when flaw detection is performed. However, since this angle pitch depends on the time resolution set by the delay time control unit 102B, flaw detection is performed with an angle pitch greater than the minimum time resolution that can be set by the delay time control unit 102B.

Next, a specific delay time control method at this time will be described with reference to FIG.
Here, focusing on a certain distance with reference to the center directly below the array type ultrasonic sensor 101,
The delay time pattern 300 when an ultrasonic incident angle of 10 ° to 170 ° used for flaw detection is set at a pitch of 10 ° is shown as an example. The element number at this time is an array type ultrasonic sensor. 101, the element at one end of the piezoelectric vibration element 104, here the element at the left end in FIGS. 1 and 2, is No.1. Accordingly, the piezoelectric vibration element 1
When M is 04, the element number of the element at the right end is No.M.

The range of the angle 10 ° → the angle 80 ° indicated by the broken line is the angle 1 at the lower left of FIG.
This is a delay time pattern for focusing in the range of 0 ° → angle 80 °, the solid line is directly under the center of the array type ultrasonic sensor, and the range of angle 100 ° → angle 170 ° indicated by the alternate long and short dash line is the right side of FIG. This is a delay time pattern in which the focal point is focused in the range of an angle of 100 ° to an angle of 170 ° downward. In this way, by focusing the ultrasonic wave 108 at an arbitrary position, the diffusion of the ultrasonic wave, which was a weak point of the aperture synthesis method Attenuation can be prevented.

Therefore, such a delay time pattern 300 is calculated by the computer 102A of FIG. 1 and transmitted to the delay time control unit 102B, and control is performed so that the ultrasonic wave 108 can be transmitted and received. A scanning method in which the angle is continuously swung while the focusing distance is constant is called a sector scanning method.

Next, the processing of the flaw detection image executed by the computer 102A will be described in detail with reference to FIG. 4 and FIG. 5. First, FIG. 4 schematically shows the contents of the flaw detection image processing in the computer 102A. Now, it is assumed that the array type ultrasonic sensor 101 is moved horizontally by the movement amount X [m] from the position of the flaw detection image 400 obtained at the flaw detection start position 101A. At this time, if the recording range of the flaw detection image is kept the same, the image is displaced. Therefore, the movement amount detection unit 1
The misalignment is corrected using the measurement value of 06.

Now, when the sensor movement amount is X [m], if a deviation corresponding to Δ [pixel] occurs in the flaw detection image of the display unit 103, in this case, as shown in the following (formula 1), Δ It is shifted by [pixel] and added. Here, G (i, j) is the pixel value at the pixel address (i, j) of the processed image 403, and g _n (i, j) is the pixel at the pixel address (i, j) of the nth flaw detection image. Is the value of

At this time, in FIG. 4, three flaw detection images 400 and 40 are shown as an example for showing the contents of the processing.
1 and 402 are added to obtain a processed image 403. When the defect is evaluated, as shown in the processed image 403 with hatching, The processing is performed in the area 404 in which the same number of flaw detection images are processed. The reason is that when addition or averaging is performed, the signal intensity of the pixel is increased in the area 403 having the same processing number and the area having a different processing number. Because it is different.

On the other hand, FIG. 5 shows the contents described in FIG. 4 together with the actual flaw detection situation. In the flaw detection image 501, the (1) -th flaw detection image 501A is the flaw detection start position. 1
This is a flaw detection image at 01A. Hereinafter, the (i) flaw detection image corresponds to the flaw detection position 101B, and the (n) th flaw detection image corresponds to the flaw detection position 401C. It can be seen that n flaw detection images 501 are obtained.

This example shows a case where the surface on which the array-type ultrasonic sensor 101 of the inspection object 100 is installed is parallel to the bottom surface, that is, the inspection object 100 is a part of a flat plate material or a tube material. In these flaw detection images, an echo 103I from the bottom surface is obtained immediately below the installation position of the array type ultrasonic sensor, and when there is a defect from the bottom surface side, a defect corner echo 103K is obtained.
In addition, the defect tip echo 103J is observed.

Therefore, as shown in FIG. 4, the flaw detection image 501 composed of these images is shifted by the number of pixels corresponding to the amount of movement of the array ultrasonic sensor 101 and added or averaged to obtain a processed image 502. . The processed image 502 is characterized in that bottom echoes 103I having substantially the same intensity can be obtained in the portions added or averaged the same number of times as shown between two broken lines.

At this time, the echo 103K and the defect corner echo 103J at the defect tip are selectively left as signals of the true defect position by superimposing the wavefronts of the ultrasonic waves incident from various angles. Is displayed on the display means 103 and used for checking the defect position and evaluating the defect depth. This will be described in more detail later.

Next, FIG. 6 shows the processing according to the second embodiment of the present invention. In this case, the range of the flaw detection image that becomes the flaw detection region is set in advance in the entire scanning region of the array-type ultrasonic sensor 101, and the flaw detection image. In the case of flaw detection with the size determined, the flaw detection image obtained at each flaw detection position using the movement amount of the array-type ultrasonic sensor 101 detected by the movement amount detection unit described above is used for flaw detection. A flaw detection image is obtained by shifting the number of pixels corresponding to the amount of movement of the array type ultrasonic sensor 101 within the range of the image and superimposing them.

Therefore, in the second embodiment, since the flaw detection image is the same region at all positions from the flaw detection start position (1) to the flaw detection end position (n), the movement of the array type ultrasonic sensor 101 is changed. There is no need to shift the image in accordance with the amount. For this reason, the flaw detection images 601A, 601B, 6
The processed image 502 can be obtained simply by adding or averaging 01C. Therefore, the processing content in this case can be expressed by the following (formula 2). However, (Equation 2) represents the case of addition.

The characteristics of the flaw detection image in this case are the same as those in the first embodiment, and the defect tip echo 103K and the defect corner echo 103J are true by superimposing the wavefronts of ultrasonic waves incident from various angles. Only the signal of the defect position remains selectively.

Next, an application example of this technique will be described with reference to FIG. 7. First, FIG. 7 shows an object to be inspected as a test object, for example, a steel flat plate by using a drill (a tool for drilling). Then, a plurality of holes called drill holes were artificially provided at positions with different depths (thickness directions), and a specimen 700 that was artificially regarded as a defect was used. In this case, a flaw detection image and a plurality of flaw detection images were added. The processing image is shown. At this time, as drill hole 700A, (1), (2), (3), (4)
Are provided.

Here, since the sector scan is performed by setting the ultrasonic incident angle 700C of the array-type ultrasonic sensor 101 within the range of the angle 10 ° to the angle 100 °, the single flaw detection image 701 at the sensor position 101B is displayed. In this case, echoes by the drill holes (4) are not observed, but echoes 701A and bottom surface echoes 701B corresponding to the drill holes (1) to (3) are observed.

In addition, here, the focal point of the ultrasonic wave by the array-type ultrasonic sensor 101 is set to a position somewhat deeper than the bottom surface 700B, so that in the single flaw detection image 701, the drill hole echo 701C by the ultrasonic wave reflected from the bottom surface is the second. The bottom surface echo 701D is observed as an echo, and also as a second bottom surface by the ultrasonic wave that has been reciprocated twice in the test body 700. In this embodiment, the effect of focusing the ultrasonic wave is demonstrated. ing.

In addition, in this single flaw detection image 701, it can also be seen that all echoes have an arc shape with the ultrasonic wave incident position 101B as the center point, and the drill hole echoes 701A are all actual drill hole dimensions. It can also be seen that the bottom echo 701B is observed only in the region immediately below the sensor.

Next, such a single image is obtained by adding the array type ultrasonic sensor 101 between the flaw detection start position 101A and the flaw detection end position 101C, and a processed image 702 is obtained. In this processed image 702, the flaw detection start is started. Each flaw detection image between the position 101A and the flaw detection end position 101C is visualized by ultrasonic waves incident at various angles as viewed from the drill holes (1), (2), (3), and (4). .

As a result, echoes from drill holes exist in many single images and remain combined, but echoes from other parts appear only in a specific single image. The same principle as that of the aperture synthesis method in which the image is thinned by the squeezing is performed. Therefore, as shown in the image 702 after processing, echoes in the entire flaw detection image are S / S.
N will be obtained well.

At this time, as described above, the focus of the array type ultrasonic sensor 101 is set to the bottom surface 700B.
Since it is set at a deeper position, the drill hole echo 701C due to bottom surface reflection is also focused. As a result, a flaw detection image in which the second echo is observed is obtained even in the processed image 702. Similarly, since the intensity of the first drill hole echo 702A and the second drill hole echo 702C is approximately the same, as a result of focusing the ultrasonic wave at a position deeper than the bottom surface 700B, the position is deeper than the bottom surface. It can be seen that there is no decrease in strength due to the diffusion attenuation of the ultrasonic wave, and this point also demonstrates the effect of the defect inspection method according to the present invention.

Next, the processing procedure in the first and second embodiments of the present invention described above will be described with reference to FIG. The process shown in FIG. 8 is executed by a predetermined program installed in the computer 102A.

Therefore, the computer 102A first sets the flaw detection range, the focal depth of the array type ultrasonic sensor, and the ultrasonic incident angle range in the transmission / reception unit 102, and then starts flaw detection (S800). next,
The ultrasonic sensor 101 is installed on the inspection object (S801), and thereafter, the sector scan is performed by changing the incident angle of the ultrasonic wave (S802), and then the waveform at the incident angle of each ultrasonic wave is transmitted / received by the transmitting / receiving unit 10
2 is recorded and imaged (S803). Then, it is checked whether or not all the flaw detections in the flaw detection range have been completed.

First, if not completed, the array type ultrasonic sensor 101 is moved to the next position by the scanning means 107 (S804), and the processing of S802 and S803 is repeated n times, that is, until the flaw detection at all positions is completed ( S805). Thus, the entire flaw detection range, that is, flaw detection start position 101A.
When the flaw detection in the range from the flaw detection end position 101C is completed, the recorded flaw detection images are respectively shifted or added or averaged by the movement amount of the array type ultrasonic sensor 101 (S806), and then the flaw detection obtained by addition or averaging is performed. The result is displayed on the display unit 103 (S807), and the process is terminated (S808).

Here, in the case of the second embodiment described in FIG. 6, that is, the array type ultrasonic sensor 101.
In the case where individual flaw detection images are configured in consideration of the movement amount, the addition or averaging is performed as it is without shifting the flaw detection images in the processing of S806. The processing at this time is also performed by the computer 102.
Executed by A.

As a result, the processing image 502 shown in FIG. 5 and the processing image 602 shown in FIG. 6 are displayed on the display unit 103. Accordingly, the above is the first processing procedure according to the first embodiment of the present invention. is there.

By the way, as a processing procedure according to the embodiment of the present invention, there is a processing procedure in which a flaw detection image is added or averaged and displayed each time processing of a flaw detection image is recorded. Therefore, next, the processing in this case will be described with reference to FIG.

The processing shown in FIG. 9 is also executed by the computer 102A. In this case as well, first, the flaw detection range, the focal depth of the array type ultrasonic sensor, and the ultrasonic incident angle range are set in the transmission / reception unit 102. After that, the flaw detection is started (S900). Next, the ultrasonic sensor 101 is installed on the inspection object (S901), and after this, when the sector scan is performed by changing the incident angle of the ultrasonic wave (S902), the waveform at the incident angle of each ultrasonic wave is then transmitted. Recording and imaging by the receiving unit 102 (S903).

Next, each recorded flaw detection image is shifted or added or averaged by the amount of movement of the array-type ultrasonic sensor 101 (S906), and then the flaw detection result obtained by the addition or averaging is displayed on the display unit 103 (S907). ).

Here, it is checked whether or not all flaw detection in the flaw detection range has been completed.
The array type ultrasonic sensor 101 is moved to the next position by the scanning means 107 (S904), and S9.
The process from 02 to S907 is repeated n times, that is, until the flaw detection at all positions is completed (S9).
05). Then, the entire flaw detection range, that is, flaw detection start position 101A to flaw detection end position 101
When the flaw detection up to C is completed, the process is terminated (S908).

Accordingly, the processing image 502 of FIG. 5 and the processing image 602 of FIG. 6 are also displayed on the display unit 103 at this time, and thus this is the second processing procedure according to the embodiment of the present invention.
Compared with the case of the first procedure shown in FIG. 4, according to the second processing procedure, the flaw detection images are sequentially added or averaged and displayed as an image, so that the inspector can process the flaw detection work at any time during the flaw detection operation. image
(Processed image 502 and processed image 602) can be monitored, and therefore, a flaw can be detected while confirming the work status.

Next, a third embodiment of the present invention will be described with reference to FIG. Where this third
A feature of the embodiment is that an array type ultrasonic sensor 1000 in which a larger number of piezoelectric vibration elements 104 than the number of piezoelectric vibration elements 104 necessary for operation as an original array type sensor are arranged is used. Accordingly, the transmission / reception unit 102 is provided with a transmission cut-off switching circuit 1001A and a reception switching circuit 1001B. In FIG. 10, illustration of a part of connection lines from each of the piezoelectric vibrating elements 104 to the transmission cut-off switching circuit 1001A and the reception switching circuit 1001B is omitted.

In this embodiment, by using such an array-type ultrasonic sensor 1000, movement (scanning) of the ultrasonic transmission position and reception position by the array-type ultrasonic sensor required from the start to the end of flaw detection is possible. 1 is obtained only by electrical switching of elements in the array-type ultrasonic sensor 1000. Therefore, here, the scanning means 107 in the embodiment of FIG. 1 is unnecessary, and scanning is performed accordingly. The means control unit 105 and the movement amount detection unit 106 are also unnecessary, but the other configurations are the same as those in the embodiment of FIG.

Such an ultrasonic scanning method by electrical switching of the piezoelectric vibrating element 104 is called an electronic scanning method. Therefore, according to the embodiment shown in FIG. Since it can be performed inside the ultrasonic sensor 1000, the mechanical sensor moving means required in the first and second embodiments is not necessary, and the inside of the inspection object 100 is kept with the array ultrasonic sensor 1000 fixed. Flaw detection becomes possible, and as a result, higher-speed scanning is possible.

Next, the operation of the third embodiment will be described. First, the array type ultrasonic sensor 10
00 is set in the flaw detection range of the inspection object 100. At this time, it is installed so that the element at the extreme end of the piezoelectric vibration element 104 comes to the flaw detection start position in the flaw detection range. Then, transmission of the ultrasonic wave 108 is performed using an arbitrary number of elements necessary for operation as an original array type sensor, such as the number of elements used in one flaw detection from the most extreme element, for example, 16 elements and 32 elements. Perform echo reception.

Now, assuming that the number of elements at this time is 16, for example, here, at least one piezoelectric vibration element 104 is shifted inside the array type ultrasonic sensor 1000, and 16 elements used for one flaw detection. The piezoelectric vibration element 104 is used to generate an ultrasonic wave 108 as described above, perform transmission and reception of ultrasonic waves, and generate a flaw detection image by the computer 102A. Repeat until n times to obtain n flaw detection images.

Next, the n flaw detection images are shifted by the shifted element at each flaw detection position, and the flaw detection images are added or averaged. Here, the number of elements that move for each flaw detection can be arbitrarily determined. For example, if it is desired to obtain a more detailed flaw detection image, it is sufficient to move one element at a time to acquire as many flaw detection images as possible, and if a certain level of detail is sufficient, move by two or more multiple elements. What is necessary is to carry out flaw detection.

The n flaw detection images obtained in this way are shifted or added or averaged by the number of pixels of the flaw detection image corresponding to the element movement amount moved for each flaw detection. The element movement amount at this time is calculated on the assumption that the element interval (pitch) of the piezoelectric vibrators of the array ultrasonic sensor 1000 is known. Here, the method for adding or averaging the flaw detection images in the third embodiment is as follows.
Since the method is the same as the method described in the first and second embodiments described above, description thereof is omitted here.

Next, the implementation procedure in the third embodiment will be described with reference to FIG. 11. First, the transmitter / receiver 102 uses the flaw detection range, the focal depth of the array type ultrasonic sensor 1000, and the piezoelectric used for one flaw detection. The flaw detection is started by setting the number of vibration elements and the ultrasonic incident angle range (S11).
00). Next, the ultrasonic sensor 1000 is installed on the inspection object 100 (S1101), and the sector scan is performed by changing the incident angle of the ultrasonic wave (S702), and the waveform at the incident angle of each ultrasonic wave is recorded and the computer 102A is recorded. To form an image (S1103).

First, when the flaw detection of all flaw detection ranges has not been completed, a plurality of (for example, 16) piezoelectric vibration elements 104 used for flaw detection inside the array type ultrasonic sensor 1000 are transmitted to the transmission switching circuit 1001A. Then, the reception switching circuit 1001B switches to the piezoelectric vibration element used for the next flaw detection to move the ultrasonic wave transmission and reception positions (S1104), and repeats the sector scan and imaging n times until the entire flaw detection is completed (S1105).

When the flaw detection is completed for all flaw detection ranges, each flaw detection image recorded by the computer 102A is shifted or added by the amount of movement of the piezoelectric vibration element 104 inside the array type ultrasonic sensor 1000 (S1106). . However, in this case as well, as described with reference to FIG. 6, when individual flaw detection images are formed in consideration of the movement amount of the array type ultrasonic sensor 101, addition or averaging is performed without shifting the flaw detection images. . Then, the result is displayed on the display unit 103 (S1107), and the flaw detection is finished (S1108).

Further, as a processing procedure of this embodiment, there is a procedure of adding and averaging one after another every time flaw detection images are recorded, which will be described with reference to FIG. First, the flaw detection range, the focal depth of the array-type ultrasonic sensor, and the ultrasonic incident angle range are set, and flaw detection is started (S1200). Next, an ultrasonic sensor is installed on the inspection object (S1201), a sector scan is performed by changing the incident angle of the ultrasonic wave (S1202), the waveform at the incident angle of each ultrasonic wave is recorded, and an image is obtained by the computer 102A. (S1203).

When there are two or more flaw detection images, the computer 102A adds or averages by shifting the moving amount of the piezoelectric vibration element inside the array type ultrasonic sensor (S1206), and displays it on the display unit (S1108).

On the other hand, if the flaw detection in the flaw detection range of all flaw detection images has not been completed, the piezoelectric vibration element 104 used for flaw detection inside the array type ultrasonic sensor 1000 is transferred to the next by the transmission switching circuit 1001A and the reception switching circuit 1001B. The piezoelectric transducer 104 used for flaw detection is switched to move the transmission / reception position of ultrasonic waves (S1204), and sector scanning and imaging are performed until all flaw detection is completed.
Repeated times (S1205). Then, when the flaw detection is completed for all flaw detection ranges, the flaw detection is terminated (S1208).

Incidentally, in the first to third embodiments described above, the array type ultrasonic sensor is linearly moved by being applied to a planar inspection object, or the piezoelectric vibration element inside the array type ultrasonic sensor is used. Although the embodiment has been described in which the inspection is carried out by moving the ultrasonic transmission and reception positions by switching the above, as the fourth embodiment of the present invention, the portion to be inspected extends in the circumferential direction of the pipe An embodiment suitable for a curved surface or a complicated shape as described above will be described with reference to FIG.

Here, in such a case, as in the embodiment of FIG. 1, a flaw detection image is obtained by mechanically scanning the surface shape of the inspection object, and an array as in the embodiment of FIG. The surface shape of the ultrasonic sensor itself may be the same shape as the object to be inspected, but here, the case of the former will be described in detail. Therefore, in this embodiment as well, the apparatus configuration is the same as that in FIG. 1, except that the moving direction of the array type ultrasonic sensor 101 by the scanning means 107 is curved as shown in FIG. It is only a point that is in a curved direction along the surface of the inspection object 1300.

In FIG. 13, a curved surface inspection object 1300 is a cross-sectional view of a pipe member such as a pipe as viewed from the longitudinal direction. In this case, the first flaw detection image (1) 1301A is
This is a flaw detection image measured at the flaw detection start position (1) 1302A, and the i th flaw detection image (i) 13
01B is the flaw detection position (i) 1302B, and the nth flaw detection image (n) 1301C is the flaw detection position (n) 130.
2C respectively, and as a result of sector scanning at each position and flaw detection,
The obtained n flaw detection images 1301 are shown.

In this example, since an inspection object having a curved surface shape such as piping is assumed, the surface on which the array type ultrasonic sensor 101 is installed is substantially parallel to the bottom surface.
When the echo 103I from the bottom surface is obtained immediately below the installation position of 01 and there is a defect from the bottom surface side at this time, the defect corresponds to the position where the respective defects 1304A and 1304B exist. Corner echoes 1303A and 1303B and defect tip echo 1303C
And 1303D are observed.

Therefore, these images are used as the movement amount of the array type ultrasonic sensor 101, for example, the position 1300A.
The addition or averaging process is performed while shifting by the number of pixels corresponding to the amount of movement from to the position 1300B. Here, the difference from the first and second embodiments is that the inspection object 1300 has a curved surface shape. As a result, when processing an image, it is necessary to correct the influence of this shape. For this reason, in this embodiment, the computer 102A has the surface shape data of the inspection object 1300 measured in advance, or the movement amount detection unit 106 has the angle measurement function of the array-type ultrasonic sensor 101. By doing so, image rotation correction at the time of addition (or averaging) of flaw detection images is performed.

Specifically, the computer A shifts the flaw detection image from the flaw detection start position by the amount of movement of the center position of the array-type ultrasonic sensor 101, or rotates it by the rotation angle from the flaw detection start position and adds or averages it. By performing the conversion, a processed image 1305 whose rotation has been corrected is obtained.

In the processed image 1305, only the signal of the true defect position selectively remains in the defect corner echoes 1303A and 1303B and the defect tip echoes 1303C and 1303D, respectively, by superimposing the wavefronts of the ultrasonic waves incident from various angles. This is used for confirmation of the defect position and evaluation of the defect depth. Further, even when the surface shape is complicated, a flaw detection image can be processed by performing the same processing as described above.

Next, the processing procedure according to the fourth embodiment will be described with reference to FIG.
The flaw detection range, the focal depth of the array type ultrasonic sensor, and the ultrasonic incident angle range are set, and flaw detection is started (S1400). Next, the array type ultrasonic sensor 101 is installed on the inspection target (S140).
1) A sector scan is performed by varying the incident angle of the ultrasonic wave (S1402), and the waveform at the incident angle of each ultrasonic wave is recorded and imaged by the computer 102A (S1403).

First, when the flaw detection in the whole flaw detection range is not completed, the array type ultrasonic sensor 101 is moved along the surface of the inspection object 1300 by the scanning means 107 (S1404).
Sector scanning and imaging are repeated n times until the entire flaw detection is completed (S1405). On the other hand, if the flaw detection of all flaw detection ranges has been completed, each flaw detection image recorded in the computer 102A is
The addition or averaging is performed by shifting from the flaw detection start position 1300A by the amount of movement of the center position of the array-type ultrasonic sensor 101 and rotating by the rotation angle from the flaw detection start position (S14).
06). Then, this result is displayed on the display unit (S1407), and the flaw detection is finished (S1).
408).

As described above, according to the above embodiment, the inside of the inspection object is flawed by changing the incident angle of the ultrasonic wave oscillated from the array-type ultrasonic sensor 101 (sector scan flaw detection), and the array-type ultrasonic wave is sequentially detected. The flaw detection image obtained at each flaw detection position while shifting the installation position of the ultrasonic sensor or the transmission / reception position of the ultrasonic wave and shifting the obtained flaw detection image by the movement amount of the array type ultrasonic sensor 101 or the transmission and reception positions of the ultrasonic wave. Can be added or averaged to form an image, and a flaw detection image can be formed by superimposing ultrasonic waves incident from various angles.

Therefore, according to the above-described embodiment, an ultrasonic focusing effect can be obtained without finely setting the focal depth, and as a result, a high-resolution flaw detection image can be obtained at almost all depth positions. Therefore, nondestructive inspection can be performed with high accuracy.

Further, according to the above embodiment, the sector scan can be performed after the ultrasonic waves are focused from the array-type ultrasonic sensor 101, so that even if the inspection target is thick and the ultrasonic propagation distance is long, the Since the diffusion attenuation of the sound wave can be suppressed, the diffusion attenuation of the ultrasonic wave, which has been a problem of the aperture synthesis method, can be cleared, and the S / N of the flaw detection image can be improved. By adding or averaging the flaw detection images Since random noise such as electric noise can be reduced, the S / N of the flaw detection image can be improved.

Furthermore, according to the above embodiment, the processing amount on the computer 102A can be reduced by using a simple method such as addition or averaging for the time required for processing the flaw detection image, and a long time is required for processing. Therefore, it is possible to evaluate a defect quickly after acquiring a high-resolution and high S / N flaw detection image even at the inspection site.

It is a block diagram which shows 1st Embodiment of the ultrasonic testing method and ultrasonic testing apparatus by this invention. It is a schematic diagram for demonstrating operation | movement of one Embodiment of the ultrasonic flaw detection method and ultrasonic flaw detection apparatus by this invention. It is explanatory drawing which shows an example of the delay time pattern given to the piezoelectric vibration element of the array type ultrasonic sensor in the 1st Embodiment of this invention. It is a schematic diagram for demonstrating the addition or averaging process of the flaw detection image in the 1st Embodiment of this invention. It is explanatory drawing which shows an example of the addition or averaging process of a flaw detection image by the 1st Embodiment of this invention. It is explanatory drawing which shows another example of the addition or averaging process of a flaw detection image by the 1st Embodiment of this invention. It is explanatory drawing which shows an example of the flaw detection image display obtained by the 1st Embodiment of this invention. It is a flowchart for demonstrating the 1st example of the process sequence by the 1st Embodiment of this invention. It is a flowchart for demonstrating the 2nd example of the process sequence by the 1st Embodiment of this invention. It is a block diagram which shows 2nd Embodiment of the ultrasonic testing method and ultrasonic testing apparatus by this invention. It is a flowchart for demonstrating the 1st example of the process sequence by the 2nd Embodiment of this invention. It is a flowchart for demonstrating the 2nd example of the process sequence by the 2nd Embodiment of this invention. It is explanatory drawing which shows an example of the addition or averaging process of a flaw detection image by the 3rd Embodiment of this invention. It is a flowchart for demonstrating an example of the process sequence by the 3rd Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100, 1000: Inspection object 101: Array type ultrasonic sensor 101A: Flaw detection start position 101B: Flaw detection position 101C: Flaw detection end position 102: Transmission / reception part 102A: Computer 102B: Delay time control part 102C: Pulser (pulse generator)
102D: Receiver (receiving circuit unit)
102E: Data recording unit 103: Display unit 103A: Waveform of arbitrary ultrasonic incident angle 103B: Flaw detection image 103C: Processed image 103D: Defect tip position 103E: Bottom surface position 103F: Arbitrary ultrasonic incident angle in the flaw detection image 103I: Bottom echo 103J: Defect tip echo 103K: Defect corner echo 103L: Processing content switching means 104: Piezoelectric vibration element 105: Scanning means control part 106: Movement amount detection part 107: Scanning means 108: Ultrasound 109: Ultrasonic incident angle Swing width 110: Defect

Claims (10)

Move the ultrasonic transmission / reception position by the array type ultrasonic sensor for the inspection target,
Detecting the inspection object by a sector scan method using the array type ultrasonic sensor at a plurality of the transmission / reception positions,
An ultrasonic flaw detection method characterized in that each flaw detection result at a plurality of transmission / reception positions is generated as one image.   In Claim 1, grasping | ascertaining the amount of movement of the transmission / reception position of the said ultrasonic wave, shifting each said flaw detection image by the amount corresponding to the said amount of movement, adding or averaging, and producing | generating one said image A characteristic ultrasonic flaw detection method. An array-type ultrasonic sensor;
Scanning means for moving an ultrasonic transmission / reception position by the array type ultrasonic sensor;
A transmission / reception means for exchanging a drive signal and a reception signal with the array type ultrasonic sensor and changing a focusing position and an incident angle of the ultrasonic wave by giving a delay time to the drive signal;
A computer that adds or averages the ultrasonic transmission / reception results at a plurality of ultrasonic transmission / reception positions by shifting the ultrasonic transmission / reception results by an amount corresponding to the amount of movement;
Display means for displaying the processing result in the computer as one flaw detection image;
Ultrasonic flaw detector equipped with. By changing the incident angle of the ultrasonic wave with respect to the inspection object using the array type ultrasonic sensor, and moving the installation position of the array type ultrasonic sensor in the inspection object, a flaw detection image is sequentially obtained for each installation position, An ultrasonic flaw detection method characterized in that the flaw detection image for each installation position is sequentially added and averaged while being shifted by an amount of movement of the array type ultrasonic sensor to form an image. In the invention of claim 4,
When adding or averaging the flaw detection images, the inclination angle of each flaw detection image is corrected according to the inclination of the surface of the inspection object that appears when the installation position of the array ultrasonic sensor in the inspection object is moved. A characteristic ultrasonic flaw detection method. By changing the incident angle of the ultrasonic wave with respect to the inspection object by using a part of the piezoelectric vibration element in the array type ultrasonic sensor, and sequentially switching the part of the piezoelectric vibration element in the array type ultrasonic sensor. When the ultrasonic transmission / reception position of the inspection target of the ultrasonic sensor is moved, a flaw detection image is sequentially acquired for each ultrasonic transmission / reception position , and the flaw detection image for each ultrasonic transmission / reception position is sequentially acquired. An ultrasonic flaw detection method characterized in that images are added or averaged while being shifted by a moving amount of a part of the piezoelectric vibration element of the sensor. An array type ultrasonic sensor having a plurality of piezoelectric vibration elements, a pulser for supplying a transmission signal to each piezoelectric vibration element of the array type ultrasonic sensor, and a reception signal from each piezoelectric vibration element of the array type ultrasonic sensor A receiver for inputting, a delay control unit for setting a different delay time for each of the piezoelectric vibrating elements in the transmission signal and the reception signal, and a data recording unit for recording an ultrasonic waveform received by the array type ultrasonic sensor A sensor moving unit that scans the array type ultrasonic sensor with respect to an inspection target, a scanning control unit that controls the sensor moving unit, a movement amount detection unit that measures a movement amount of the array type ultrasonic sensor, and the data recording For image processing that generates a flaw detection image from the waveform recorded in the unit and adds a plurality of flaw detection images by shifting the movement amount measured by the movement amount detection unit of the array type ultrasonic sensor. If, ultrasonic flaw detection apparatus comprising: a display unit for displaying said flaw detection image and summing the flaw detection image. In the invention of claim 7,
When the computer adds or averages the plurality of flaw detection images, the inclination angle of each flaw detection image depends on the inclination of the surface of the inspection object that appears when the installation position of the array type ultrasonic sensor in the inspection object moves. An ultrasonic flaw detector characterized by being a computer that corrects the error. An array-type ultrasonic sensor having a larger number of piezoelectric vibration elements than the number necessary for operation as an array-type ultrasonic sensor, and a pulser for supplying a transmission signal to each piezoelectric vibration element of the array-type ultrasonic sensor A transmission switching circuit for switching a piezoelectric vibration element to which the output of the pulser is supplied among each piezoelectric vibration element of the array type ultrasonic sensor, and a reception signal from each piezoelectric vibration element of the array type ultrasonic sensor Receiver, a reception switching circuit for switching a piezoelectric vibration element to which a reception signal is supplied to the receiver among the piezoelectric vibration elements of the array-type ultrasonic sensor, and a delay time different for each of the piezoelectric vibration elements. A delay control unit for setting the transmission signal and the reception signal, a data recording unit for recording an ultrasonic waveform received by the array ultrasonic sensor, and the array ultrasonic Sensor moving means for scanning the sensor with respect to the inspection object, a scanning control unit for controlling the sensor, a movement amount detecting unit for measuring the movement amount of the array type ultrasonic sensor, and flaw detection from the waveform recorded by the data recording unit An image processing computer that generates an image and shifts the moving amount measured by the moving amount detection unit of the array-type ultrasonic sensor to add or average a plurality of flaw detection images, and displays the flaw detection image and the added flaw detection image An ultrasonic flaw detector comprising a display unit that performs the above operation. In the invention according to claim 7 or claim 9,
An ultrasonic flaw detection apparatus comprising a processing content switching means for switching between a normal flaw detection operation and a flaw detection operation by the addition processing or averaging processing.