JP2006304029A - Measuring method of strength or frequency of ultra sonic wave - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a measuring method of strength or frequency of an ultra sonic wave capable of accurately measuring the strength or the frequency of the ultra sonic wave. <P>SOLUTION: The method is configured to have the steps of immersing articles 4 having some shapes into liquid 2 which is radiated by an ultra sonic wave, sticking a sensor 5 for detecting an impulse force on the articles 4, converting the impulse force applied to the articles 4 into a voltage through the sensor, and measuring the strength of the ultra sonic wave propagating through the liquid 2. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a method for measuring the intensity or frequency of an ultrasonic wave, and more particularly to a method for accurately measuring the intensity or frequency.

  In recent years, the development of IT (information technology) industry is steadily progressing, and members constituting the equipment supporting these industries are required to have a very high degree of cleaning. In order to achieve this, it is necessary to clean the components using ultrasonic waves and evaluate the cleanliness of the components using ultrasonic waves, and accurately measure and manage the intensity and frequency of these ultrasonic waves. It is essential.

As this type of conventional technology, for example, a technology is known in which a piezoelectric ceramic material is formed into a sheet, the sheet is punched out using a mold, and further fired to create a piezoelectric ceramic piece having front and back surfaces (for example, Patent Document 1). In addition, the rubber feeling of the diaphragm between the casing opening formed so that the diaphragm of the piezoelectric microphone element housed in the casing is exposed to the outside and the diaphragm is raised to a predetermined thickness and filled with silicon rubber. What formed the pressure layer is known (for example, refer patent document 2).
JP 2001-50808 (paragraphs 0020 to 0021, FIGS. 1 and 2) Japanese Patent Laying-Open No. 2003-348695 (paragraphs 0005 to 0011, FIGS. 1 and 2)

  In the current method for measuring the ultrasonic intensity, a piezoelectric element is attached to a glass or metal bar, and vibration applied to the tip of the bar is displayed on a voltmeter. In this method, the vibration sensing rod is greatly changed depending on the immersion position and location (strong part and weak part depending on the wavelength of the ultrasonic wave) in the liquid in which the ultrasonic wave is propagating, and accurate ultrasonic intensity cannot be measured. In addition, there is no specific apparatus for accurately measuring the intensity of the ultrasonic wave propagating through the liquid.

  In addition, in an existing method for measuring the ultrasonic intensity, a piezoelectric element is attached to a glass or metal bar, and vibration applied to the tip of the bar is displayed on a voltmeter. In this method, since the rod that detects vibration is fixed, it depends greatly on the immersion position, the frequency of ultrasonic waves, or the state of the liquid medium (temperature, purity, dissolved oxygen concentration, etc.). Unable to measure the strength. In addition, there is no specific apparatus for measuring the frequency of ultrasonic waves propagating in a liquid at present.

  The present invention has been made in view of such problems, and an object of the present invention is to provide an ultrasonic intensity or frequency measuring method capable of accurately measuring ultrasonic intensity or frequency.

(1) In the invention described in claim 1, an article having a shape is immersed in a liquid irradiated with ultrasonic waves, and a sensor for detecting an impact force is attached to the article, and the impact force applied to the article is measured. It is characterized in that it converts the voltage into a voltage through a sensor and measures the intensity of the ultrasonic wave propagating in the liquid.
(2) In the invention according to claim 2, an article having a shape is immersed in a liquid irradiated with ultrasonic waves, a sensor for detecting a wavelength is attached to the article, and a vibration wavelength applied to the article is detected. And measuring the frequency of the ultrasonic wave that is transmitted through the liquid and propagated in the liquid.
(3) In the invention of claim 3, a sensor for detecting an impact force is attached to an article of a certain shape, the article is placed in a liquid irradiated with ultrasonic waves, and further moved up, down, left and right, The impact force applied to the article is converted into a voltage through a sensor, and the intensity of the ultrasonic wave propagating anywhere in the liquid is measured.
(4) In the invention according to claim 4, a sensor for detecting a vibration wavelength is attached to an article having a certain shape,
This article is placed in a liquid that is irradiated with ultrasonic waves, and further, moving it up, down, left, and right, the impact force applied to this article is converted into voltage through the sensor, and the frequency of the ultrasonic wave that propagates anywhere in the liquid Is measured.

(1) According to the first aspect of the present invention, a sensor for detecting an impact force (specifically, an acceleration sensor, an AE sensor, etc.) is attached to an article that receives the impact force of an ultrasonic wave, and the intensity of the ultrasonic wave is measured. By doing so, it is possible to increase the area that receives the impact force of ultrasonic waves, and it is possible to measure the intensity of ultrasonic waves more accurately. In addition, the ultrasonic intensity can be measured more accurately by placing the sensor directly in the liquid.
(2) According to the invention described in claim 2, a sensor for detecting an impact force (specifically, an acceleration sensor, an AE sensor, etc.) is attached to an article that receives the impact force of an ultrasonic wave, and the frequency of the ultrasonic wave is measured. By doing so, it becomes possible to increase the area of the impact force of ultrasonic waves, and the frequency of ultrasonic waves can be measured more accurately.
(3) According to the third aspect of the invention, a sensor (specifically, an acceleration sensor or an AE sensor) that senses an impact force is attached to an article that receives an ultrasonic impact force and is moved up, down, left, or right. By measuring the intensity of the ultrasonic wave, it is possible to increase the area receiving the impact force of the ultrasonic wave, and the ultrasonic intensity can be measured more accurately. In addition, since the sensor is directly placed in the liquid and the measurement is performed while moving the sensor vertically and horizontally, the ultrasonic intensity can be measured more accurately. This is particularly effective when the ultrasonic frequency is low.
(4) According to the invention described in claim 4, a sensor (specifically, an acceleration sensor, an AE sensor, or the like) that senses an impact force is attached to an article that receives an ultrasonic impact force, and is vertically and horizontally By measuring the frequency of the ultrasonic wave while moving, it is possible to increase the area that receives the impact force of the ultrasonic wave, and the frequency of the ultrasonic wave can be measured more accurately. In addition, since the sensor is directly placed in the liquid and the measurement is performed while moving the sensor vertically and horizontally, the ultrasonic frequency can be measured more accurately. This is particularly effective when the ultrasonic frequency is low.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a block diagram showing an embodiment of the present invention. In the figure, 1 is a container, 2 is a liquid stored in the container 1, and 3 is an ultrasonic oscillator provided at the bottom of the container 1. The oscillation frequency of the ultrasonic oscillator 3 is, for example, about several tens kHz to several hundreds kHz. Reference numeral 4 denotes, for example, a stainless steel plate, and 5 denotes a sensor attached to a predetermined position of the plate 4.

  As the sensor 5, for example, a sensor capable of detecting an ultrasonic frequency or an ultrasonic impact force is used, and specifically, an acceleration sensor, an AE sensor, or the like is used. As the sensor itself, an existing sensor such as a piezo element can be used. Reference numeral 6 denotes an operation unit connected to the ultrasonic oscillator, and 7 denotes a knob attached to the operation unit 6. By turning the knob 7, the impact force of the ultrasonic oscillator 3 can be varied. Reference numeral 13 denotes a start button for transmitting ultrasonic waves. Since the frequency is fixed, no means for changing the frequency is attached.

  Reference numeral 8 denotes a signal line for taking out a signal from the sensor 5, and the tip of the signal line enters an amplifier 9. The amplifier 9 amplifies the signal from the sensor 5. The output of the amplifier 9 enters the oscilloscope 11 through the signal line 10, and the detection signal is displayed on the screen 11a. The operation of the apparatus configured as described above will be described as follows.

  First, the sensor 5 is attached to a plate (plate) 4 having a predetermined size. As described above, an acceleration sensor or an AE sensor is used as the sensor type. Then, the plate is immersed in the liquid 2 containing the liquid with the sensor 5 attached to the plate 4. Then, the start button 13 of the operation unit 6 is pressed. As a result, the ultrasonic oscillator 3 starts to oscillate. Since the plate 4 has a large area, it is possible to increase the area that receives the impact force of ultrasonic waves. For this reason, a large impact force is applied to the sensor 5, the impact force can be sensed with high sensitivity, and the ultrasonic intensity can be measured more accurately. Here, by placing the sensor 5 directly in the liquid 2, the ultrasonic intensity can be measured more accurately.

  The signal thus sensed by the sensor 5 enters the amplifier 9 through the signal line 8, is amplified to a predetermined magnitude by the amplifier 9, and is input to the oscilloscope 11 through the signal line 10. On the screen 11a of the oscilloscope 11, the waveform of the impact force detected by the sensor 5 is displayed. The operator can know the magnitude of the impact force by viewing this waveform. Here, when the impact force is small, the size of the ultrasonic oscillator 3 can be increased by turning the knob 7 of the operation unit 6. As a result, since the impact force of the sensor 5 is increased, the impact force can be sensed with high sensitivity.

  Further, according to the present invention, the area for detecting the frequency can be increased by sticking the sensor 5 capable of measuring the ultrasonic frequency to the plate, and the ultrasonic frequency can be measured more accurately. can do. Then, by directly putting the sensor 5 in the liquid 2, it becomes possible to sense the frequency more accurately.

  According to the present invention, by attaching the sensor 5 to a plate and measuring the intensity of the ultrasonic wave while moving the sensor 5 up and down, left and right, it is possible to increase the area that receives the impact force of the ultrasonic wave. Ultrasonic intensity can be measured. In addition, since the sensor 5 is placed directly in the liquid and the measurement is performed while moving the sensor 5 up and down, left and right, the intensity of the ultrasonic wave can be measured more accurately. This is particularly effective when the ultrasonic frequency is low.

  In addition, according to the present invention, a sensor that senses an impact force (specifically, an acceleration sensor, an AE sensor, or the like) is attached to an article that receives the impact force of an ultrasonic wave, By measuring the frequency, it is possible to increase the area that receives the impact force of the ultrasonic wave, and the ultrasonic frequency can be measured more accurately. In addition, since the sensor is directly placed in the liquid and the measurement is performed while moving the sensor vertically and horizontally, the ultrasonic frequency can be measured more accurately. This is particularly effective when the ultrasonic frequency is low.

  FIG. 2 is a diagram showing an example of a frequency observation waveform. The vertical axis is intensity, and the horizontal axis is time. It can be seen that the amplitude is about 5V. In the figure, λ is a wavelength. FIG. 3 is a diagram showing a waveform example of the impact force. The vertical axis is intensity, and the horizontal axis is frequency.

  Thus, according to the present invention, it is possible to grasp the state in the ultrasonically vibrating liquid, which is suitable for measuring, for example, the cleaning ability of the liquid used for cleaning the article.

  In the above-described embodiment, the case where a sensor is attached to a plate (plate) is taken as an example, but the present invention is not limited to this. For example, when a liquid is put into a beaker and washed, A sensor can be attached to the inner surface of the beaker. The sensor can be attached to a material into which a liquid such as metal or resin is placed. In addition, various types of liquid such as water and solvent can be used as the type of liquid to be placed in the container.

It is a block diagram which shows one embodiment of this invention. It is a figure which shows the example of an observation waveform of a frequency. It is a figure which shows the example of an observation waveform of an impact force.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Container 2 Liquid 3 Ultrasonic oscillator 4 Board 5 Sensor 6 Operation part 7 Knob 8 Signal line 9 Amplifier 10 Signal line 11 Oscilloscope 11a screen 13 Start button

Claims (4)

Immerse an article of a certain shape in the liquid irradiated with ultrasonic waves,
Furthermore, a sensor for detecting the impact force is attached to this article,
The impact force applied to this article is converted into voltage through the sensor,
Measuring the intensity of ultrasonic waves propagating in liquids,
A method for measuring the intensity of ultrasonic waves. Immerse an article of a certain shape in the liquid irradiated with ultrasonic waves,
In addition, a sensor for detecting the wavelength is attached to this article.
The vibration wavelength applied to this article is converted through a sensor,
Measuring the frequency of ultrasonic waves propagating in a liquid,
A method for measuring the frequency of ultrasonic waves. A sensor that detects impact force is attached to an article of a certain shape,
Put this article in a liquid that has been irradiated with ultrasonic waves,
While moving this up and down, left and right, the impact force applied to this article is converted into voltage through the sensor,
Measure the intensity of ultrasonic waves that propagate anywhere in the liquid,
A method for measuring the intensity of ultrasonic waves. A sensor that detects the vibration wavelength is attached to an article of a certain shape,
Put this article in a liquid that has been irradiated with ultrasonic waves,
While moving this up and down, left and right, the impact force applied to this article is converted into voltage through the sensor,
Measure the frequency of ultrasonic waves propagating anywhere in the liquid,
A method for measuring the frequency of ultrasonic waves.

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