JP2006299321A - Method for producing differential thickness plating, and apparatus for producing differential thickness plating used therefor - Google Patents

Method for producing differential thickness plating, and apparatus for producing differential thickness plating used therefor Download PDF

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JP2006299321A
JP2006299321A JP2005120572A JP2005120572A JP2006299321A JP 2006299321 A JP2006299321 A JP 2006299321A JP 2005120572 A JP2005120572 A JP 2005120572A JP 2005120572 A JP2005120572 A JP 2005120572A JP 2006299321 A JP2006299321 A JP 2006299321A
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plating
hoop
thickness
differential thickness
plating solution
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JP4654748B2 (en
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Toshihiro Yamamoto
敏広 山本
Tsukasa Nishi
宰 西
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for producing differential thickness plating regarding hoop plating, e.g., for a terminal material in an electronic component or the like, where, particularly, parts having different thickness are formed in the same hoop, and to provide a low cost differential thickness plating method coping with reliability in a contact part and the request for different plating thickness such as rust prevention, and to provide the production apparatus therefor. <P>SOLUTION: In the method for producing plating, a production apparatus is used, which comprises: an anode electrode 12; a hoop-shaped sheet 20 to be formed into a cathode electrode arranged opposite to it; masks 21 formed so as to cover the same leaving first and second exposed parts 20a, 20b; and spargers 22 each having an opening 22a corresponding to each of the exposed part 20a, 20b. The flow rate of a plating liquid 10a abutted against the exposed parts 20a, 20b is controlled, and the parts having different plating thickness are easily formed. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は電子部品等に用いられる端子材等のフープめっきに係るものであり、特にめっき厚の異なる部位を同一フープ内に形成する差厚めっきの製造方法および製造装置に係るものである。   The present invention relates to hoop plating of terminal materials and the like used for electronic components and the like, and particularly relates to a manufacturing method and manufacturing apparatus for differential thickness plating in which portions having different plating thicknesses are formed in the same hoop.

近年、電子機器の小型・薄型・軽量化に伴い、これらに用いられる電気音響変換器の端子についても小型化、薄型化、軽量化、高実装化することが必要となり、製品性能面でもその部品に使用されるめっきの多様化と高機能めっきが強く望まれている。代表的なめっき方法として膜厚の異なるめっき膜を形成するいわゆる差厚めっきによる製造方法について図3の概念図により説明する。   In recent years, as electronic devices have become smaller, thinner, and lighter, the terminals of electroacoustic transducers used in these devices have also to be reduced in size, thickness, weight, and mounting. There is a strong demand for diversification of plating and high-performance plating used in the field. As a typical plating method, a manufacturing method by so-called differential thickness plating for forming plating films having different film thicknesses will be described with reference to the conceptual diagram of FIG.

同図によると、1は陰極となるフープ状の金属帯であり、2は対向して設けられた陽極であり、高電流密度部2aと、低電流密度部2bを有している。   According to the figure, reference numeral 1 denotes a hoop-shaped metal band that becomes a cathode, 2 denotes an anode provided oppositely, and has a high current density portion 2a and a low current density portion 2b.

3は前記フープ状の金属帯1および陽極2が浸漬されるめっき液4を満たしためっき槽である。   3 is a plating tank filled with a plating solution 4 in which the hoop-shaped metal strip 1 and the anode 2 are immersed.

以上のように構成しためっき槽においては、陰極となるフープ状の金属帯1と陽極体2間の電流密度の差から、高電流密度部2a部分に対応するフープ状の金属帯1上のめっき層1aの厚みは厚く、低電流密度部2bに対応するフープ状の金属帯1上のめっき層1aのめっき厚は薄く形成され、本従来技術においては、高電流密度部2a部分と低電流密度部2b部分の境界部分を傾斜して設けているので、この境界部分においてはめっき厚は順次厚みを連続的に変化する形にめっきは形成されている。   In the plating tank configured as described above, the plating on the hoop-shaped metal strip 1 corresponding to the high current density portion 2a is obtained from the difference in current density between the hoop-shaped metal strip 1 serving as the cathode and the anode body 2. The thickness of the layer 1a is thick, and the plating layer 1a on the hoop-shaped metal strip 1 corresponding to the low current density portion 2b is formed thin. In this conventional technique, the high current density portion 2a and the low current density portion are formed. Since the boundary portion of the portion 2b is provided to be inclined, the plating is formed in such a manner that the plating thickness successively changes in thickness at this boundary portion.

なお、この出願の発明に関する先行技術文献情報としては、例えば、特許文献1が知られている。
特開昭62−40392号公報
As prior art document information relating to the invention of this application, for example, Patent Document 1 is known.
JP-A-62-40392

しかしながら、電子部品の電極部分等においては、他部品との接触部分を例えば金めっき厚を厚くし、その他の部分で露出される部分は防錆のためのめっきを行うことになる。   However, in the electrode part of an electronic component, the contact part with other parts is made thick, for example, gold plating, and the part exposed at the other part is plated for rust prevention.

このような場合前述の接触部分よりめっき厚を薄くしてコストの上昇を抑える事となるが、めっきを2度実施していれば、本来の目的が阻害されることとなる。   In such a case, the plating thickness is made thinner than the above-mentioned contact portion to suppress an increase in cost. However, if the plating is performed twice, the original purpose is hindered.

また、従来技術に記載した方法では、めっきを精度良く行えるものの電極の陽極2の構造が複雑なものとなり、コスト上昇の一因となる可能性がある。   In addition, although the method described in the prior art can perform plating with high accuracy, the structure of the anode 2 of the electrode becomes complicated, which may contribute to an increase in cost.

本発明は、めっき厚の異なる複数箇所のめっきを、しかもめっき厚の精度を要求される部分とそれほどでもない部分のめっきを同時に処理して、低コストでの差厚めっきの前記課題を解決しようとするものである。   The present invention solves the above-mentioned problem of differential thickness plating at low cost by simultaneously processing plating at a plurality of places having different plating thicknesses, and simultaneously processing plating at a portion requiring accuracy of plating thickness and a portion not so much. It is what.

上記課題を解決するために、本発明の差厚めっきの製造方法は、陽電極と、これに対向して配置された陰電極となる前記フープ状薄板と、このフープ状薄板上を覆い、少なくとも覆われていない第1、第2の露出部を形成するマスクと、この第1、第2の露出部に対応する孔を有するスパージャーとからなり、前記露出部に当接するめっき液流量を制御してめっき厚の異なる部位を形成するものであり、めっき液流量を制御することで第1、第2の露出部のめっき厚を異なるように形成するものである。   In order to solve the above-mentioned problem, a manufacturing method of differential thickness plating according to the present invention includes a positive electrode, the hoop-like thin plate serving as a negative electrode disposed opposite to the positive electrode, and covering the hoop-like thin plate, A mask that forms uncovered first and second exposed portions and a sparger that has holes corresponding to the first and second exposed portions, and controls the flow rate of the plating solution that contacts the exposed portions. Thus, portions having different plating thicknesses are formed, and the plating thicknesses of the first and second exposed portions are formed to be different by controlling the plating solution flow rate.

本発明の請求項2の差厚めっきの製造装置は、請求項1に記載の製造方法に用いる差厚めっきの製造装置であって、少なくとも導電体よりなるフープ状薄板をめっき液から離間して配置し、このフープ状薄板に形成した第1の露出部に向けてめっき液を直接当接させ、所定のめっき厚を得ると共に、めっき液を第2の露出部にも間接的に当接させるめっき液の吹出し部を設けた差厚めっきの製造装置であり、第1の露出部にはめっき液を直接当接させ、第2の露出部には間接的にめっき液を当接させることで、当接するめっき液流量を第1の露出部の方が第2の露出部より多く、しかも確実に前記流量を調節して、第1の露出部には所定の厚みのめっき厚層を第2の露出部には第1の露出部より薄いめっき厚層を形成する差厚めっきの製造装置を提供するものである。   A manufacturing apparatus for differential thickness plating according to claim 2 of the present invention is the manufacturing apparatus for differential thickness plating used in the manufacturing method according to claim 1, wherein a hoop-like thin plate made of at least a conductor is separated from the plating solution. The plating solution is directly brought into contact with the first exposed portion formed on the hoop-like thin plate to obtain a predetermined plating thickness, and the plating solution is also brought into contact with the second exposed portion indirectly. This is a manufacturing apparatus for differential thickness plating provided with a plating solution blow-out portion, in which a plating solution is brought into direct contact with the first exposed portion, and a plating solution is brought into contact indirectly with the second exposed portion. The flow rate of the plating solution in contact with the first exposed portion is larger than that of the second exposed portion, and the flow rate is surely adjusted, and a second plating thick layer having a predetermined thickness is formed on the first exposed portion. The difference thickness plating manufacturing apparatus in which a thin plating thickness layer is formed on the exposed portion of the first exposed portion. It is intended to provide.

本発明の請求項3の差厚めっきの製造装置は、請求項2の差厚めっきの製造装置において、隙間が設けられた陽電極と、この陽電極の隙間からめっき液を吹き出す吹出し部を設けたものであり、めっき液の吹出し方向と電極間の方向を略合致させて、めっき形成の安定化を図ったものである。   The manufacturing apparatus for differential thickness plating according to claim 3 of the present invention is the manufacturing apparatus for differential thickness plating according to claim 2, further comprising a positive electrode provided with a gap and a blow-out portion for blowing the plating solution from the gap between the positive electrodes. In this case, the plating solution blowing direction and the direction between the electrodes are substantially matched to stabilize the plating formation.

以上のように本発明の差厚めっきの製造方法は、不連続な位置にめっき厚の異なるめっき層をめっき液流量を制御することで容易に形成できる実用価値の高いものである。   As described above, the manufacturing method of differential thickness plating of the present invention has a high practical value that can easily form plating layers having different plating thicknesses at discontinuous positions by controlling the plating solution flow rate.

以下、本発明の実施の形態を図1〜図2により説明する。   Hereinafter, an embodiment of the present invention will be described with reference to FIGS.

(実施の形態1)
本発明の差厚めっきの製造方法を図1〜図2により説明する。
(Embodiment 1)
The manufacturing method of the differential thickness plating of the present invention will be described with reference to FIGS.

図1は本発明の差厚めっきの製造方法を用いた噴流タイプのめっき装置の一実施の形態の概念図であり、図2は同要部である吹出し装置の吹出し流量とめっき厚の関係を示す相関図である。   FIG. 1 is a conceptual diagram of an embodiment of a jet type plating apparatus using the manufacturing method of differential thickness plating according to the present invention, and FIG. 2 shows the relationship between the blowing flow rate of the blowing apparatus, which is the main part, and the plating thickness. FIG.

同図によると、10はめっき槽であり、11はめっき槽に設けられた吹出し部11aを設けた吹出し装置であり、めっき槽10内の金めっき用のめっき液10aを取り入れて吹出し部11aから後述する陽電極12の隙間12aに向けてめっき液10aを吹き出すものである。なお、図1から理解されるように、めっき液10aはめっき槽10内を吹出し装置11を介して循環することになる。   According to the figure, 10 is a plating tank, 11 is a blowing device provided with a blowing part 11a provided in the plating tank. The plating solution 10a for gold plating in the plating tank 10 is taken in from the blowing part 11a. The plating solution 10a is blown out toward the gap 12a of the positive electrode 12 described later. As can be understood from FIG. 1, the plating solution 10 a circulates in the plating tank 10 through the blowing device 11.

めっき槽10内のめっき液10aは後述する陰電極となるフープ状薄板20(例えば、電子部品の端子に使用されるステンレス鋼板や燐青銅板などのフープ状薄板)の第1露出部20aに対応した位置に隙間12aを設けた陽電極であり、13は陽電極12とフープ状薄板20との間に設けられた遮蔽板である。   The plating solution 10a in the plating tank 10 corresponds to a first exposed portion 20a of a hoop-like thin plate 20 (for example, a hoop-like thin plate such as a stainless steel plate or phosphor bronze plate used for a terminal of an electronic component) to be a negative electrode to be described later. The positive electrode is provided with a gap 12 a at the position, and 13 is a shielding plate provided between the positive electrode 12 and the hoop-like thin plate 20.

20bはフープ状薄板20に設けられた第2の露出部であり、前記第1の露出部20aと第2の露出部20bはいずれも前記フープ状薄板20の表面を第1、第2の露出部20a、20bを除いてマスク21で覆われている。   Reference numeral 20b denotes a second exposed portion provided on the hoop-shaped thin plate 20, and both the first exposed portion 20a and the second exposed portion 20b expose the surface of the hoop-shaped thin plate 20 to the first and second exposed portions. The mask 21 is covered except for the portions 20a and 20b.

22はマスク21に重畳して設けられたスパージャーであり、前記第1、第2の露出部20a、20bに対応した開口22aが設けられている。   A sparger 22 is provided so as to overlap the mask 21, and has an opening 22a corresponding to the first and second exposed portions 20a and 20b.

この開口22aは、めっき槽10内の吹出し装置11の駆動によって吹出し部11aから吹き出しためっき液10aを前記第1、第2の露出部20a、20bに導くためのものである。   The opening 22a is for guiding the plating solution 10a blown from the blowing portion 11a to the first and second exposed portions 20a and 20b by driving the blowing device 11 in the plating tank 10.

なお、特に図示しないが、めっき装置には、スパージャー22、マスク21を装着したフープ状薄板20を吹出し装置11によるめっき液10aの吹き出しにより盛り上がった部分に当接させ、フープ状薄板20の第1、第2の露出部20a、20bにめっき液10aが到達する程度までA方向に下降させる保持下降部を有している。   Although not particularly shown, the hoop-like thin plate 20 equipped with the sparger 22 and the mask 21 is brought into contact with the raised portion of the plating solution 10a by the blow-out device 11 in the plating apparatus. 1. It has a holding and lowering portion that descends in the A direction to the extent that the plating solution 10a reaches the second exposed portions 20a and 20b.

次に、本実施の形態におけるめっき方法について詳述すると、前記保持下降部によって、めっき槽10内のめっき液10aはフープ状薄板20と接触しない程度であって、吹出し装置11の駆動時にスパージャー22の開口22aに吹き出して前記第1、第2の露出部20a、20bに当接するように、フープ状薄板20を下降させる。   Next, the plating method in the present embodiment will be described in detail. The plating solution 10a in the plating tank 10 is not in contact with the hoop-like thin plate 20 by the holding and descending portion, and the sparger is driven when the blowing device 11 is driven. The hoop-like thin plate 20 is lowered so as to blow out into the opening 22a of 22 and come into contact with the first and second exposed portions 20a and 20b.

このとき、陽電極12とフープ状薄板20の間に電圧を印加するとともに、陽電極12の隙間12aを介して吹き上げられためっき液10aは遮蔽板13によって方向を制御され、陽電極12の隙間12aと対峙した第1の露出部20aに直接当接し、第2の露出部20bに関しては遮蔽板13とスパージャー22に導かれ、吹き上げられためっき液10aがスパージャー22の開口22bを経て第2の露出部20bと当接することになり、第1、第2の露出部20a、20b上にめっき層が形成されることになる。   At this time, while applying a voltage between the positive electrode 12 and the hoop-like thin plate 20, the direction of the plating solution 10a blown up through the gap 12a of the positive electrode 12 is controlled by the shielding plate 13, and the gap between the positive electrode 12 The second exposed portion 20b is in direct contact with the first exposed portion 20a opposite to 12a and is guided to the shielding plate 13 and the sparger 22, and the plating solution 10a blown up is passed through the opening 22b of the sparger 22 to form the first exposed portion 20a. Thus, the plating layer is formed on the first and second exposed portions 20a and 20b.

なお、吹き上げられためっき液10aが、前述のごとく直接当接する第1の露出部20a部分において形成されためっき層の厚みは、第2の露出部20bのように遮蔽板13等によって流量が減衰された第2の露出部20bより厚く形成される。これは各露出部20a、20bに当接するめっき液の流量の差によるものと考えられる。   Note that the thickness of the plating layer formed in the first exposed portion 20a where the sprayed plating solution 10a directly contacts as described above is reduced in flow rate by the shielding plate 13 and the like as in the second exposed portion 20b. The second exposed portion 20b is formed thicker. This is considered to be due to the difference in the flow rate of the plating solution in contact with the exposed portions 20a and 20b.

図2は吹出し装置11の吹出し流量とめっき層の厚みの相関を示すものであり、第1の露出部20aで所定のめっき厚を必要とする場合、めっき液の吹出し流量を制御して、第1の露出部20aへの当接流量を制御することで所定のめっき厚を得ると共に、第2の露出部20bにおいてはこのめっき厚以下のめっき層で形成されることになる。   FIG. 2 shows the correlation between the blowing flow rate of the blowing device 11 and the thickness of the plating layer. When a predetermined plating thickness is required at the first exposed portion 20a, the flow rate of the plating solution is controlled to A predetermined plating thickness is obtained by controlling the flow rate of contact with one exposed portion 20a, and the second exposed portion 20b is formed with a plating layer equal to or less than this plating thickness.

従って、上記実施の形態においては、接触部分のようにめっき厚の厚い部分とより薄いめっき層で許容される部分(例えば、金属端子における他部品との接触やはんだ付け部分等のめっき厚みを要求される部分とその他の防錆上の保護部分等)の形成を同一めっき処理の中で行うことが可能となる。   Therefore, in the above embodiment, a part having a thick plating thickness and a part allowed by a thinner plating layer such as a contact part (for example, contact with other parts in a metal terminal or a plating thickness of a soldering part, etc. are required. And other rust-preventing protective portions, etc.) can be formed in the same plating process.

なお、上記実施の形態の説明においては、めっき厚を必要とする部分とそれ以下のめっき厚で良い部分を有する部材について説明したが、最小のめっき厚を必要とする部分を第2の露出部で設定することで、第1の露出部側のめっき厚をより厚くすることも可能である。   In the description of the above embodiment, a member having a portion requiring a plating thickness and a portion having a smaller plating thickness is described. However, a portion requiring the minimum plating thickness is a second exposed portion. By setting at, it is also possible to increase the plating thickness on the first exposed portion side.

また、本実施の形態においては、吹出し装置11をめっき槽10内に設けるものとして説明したが、めっき槽10外に設けパイプ等により吹出し部11aとめっき液10aの取り入れ口を設けたり、めっき液10aの補充液槽を他に設けても良いものである。   Moreover, in this Embodiment, although demonstrated as what provided the blowing apparatus 11 in the plating tank 10, it provided outside the plating tank 10, the intake part 11a and the intake of the plating solution 10a were provided by the pipe etc., or plating solution Another replenisher tank 10a may be provided.

本発明は、めっき必要部分に当接するめっき液流量を制御することで、めっき厚の異なるめっき層を同一めっき槽内で同時に形成する事を可能とするものであり、複数のめっき厚を必要とする部材において、少なくとも1ヶ所のめっき厚を所定のものとし、他のめっき部分においては、前記所定の厚み以下又は以上のめっき厚で許容される部材のめっき方法として広く使用されるものである。   The present invention is capable of simultaneously forming plating layers having different plating thicknesses in the same plating tank by controlling the flow rate of the plating solution in contact with the plating-necessary portion, and requires a plurality of plating thicknesses. In the member to be used, at least one plating thickness is set as a predetermined one, and in other plating portions, it is widely used as a plating method of a member allowed with a plating thickness equal to or less than the predetermined thickness.

本発明の差厚めっきの製造方法を用いた噴流タイプのめっき装置の一実施形態の概念図The conceptual diagram of one Embodiment of the jet type plating apparatus using the manufacturing method of differential thickness plating of this invention 同要部である吹出し装置の吹出し流量とめっき厚の関係を示す相関図Correlation diagram showing the relationship between the blowout flow rate and plating thickness of the blowout device, which is the main part 従来の差厚めっきによる製造方法を説明するめっき装置の概念図Conceptual diagram of plating equipment explaining the conventional manufacturing method using differential thickness plating

符号の説明Explanation of symbols

10 めっき槽
10a めっき液
11 吹出し装置
11a 吹出し部
12 陽電極
20 フープ状薄板
20a 第1の露出部
20b 第2の露出部
21 マスク
22 スパージャー
22a 開口
DESCRIPTION OF SYMBOLS 10 Plating tank 10a Plating solution 11 Blowing apparatus 11a Blowing part 12 Positive electrode 20 Hoop-like thin plate 20a 1st exposed part 20b 2nd exposed part 21 Mask 22 Sparger 22a Opening

Claims (3)

導電体よりなるフープ状薄板上にめっき厚の異なる部位を形成する差厚めっき方法であって、陽電極と、これに対向して配置された陰電極となる前記フープ状薄板と、このフープ状薄板上を覆い、少なくとも覆われていない第1、第2の露出部を形成するマスクと、この第1、第2の露出部に対応する孔を有するスパージャーとからなり、前記露出部に当接するめっき液流量を制御してめっき厚の異なる部位を形成する差厚めっきの製造方法。 A differential thickness plating method for forming portions having different plating thicknesses on a hoop-like thin plate made of a conductor, the positive electrode, the hoop-like thin plate serving as a negative electrode disposed opposite to the positive electrode, and the hoop-like shape A mask that covers the thin plate and forms at least uncovered first and second exposed portions and a sparger having holes corresponding to the first and second exposed portions. A method for manufacturing differential thickness plating, in which the flow rate of the plating solution in contact is controlled to form portions with different plating thicknesses. 請求項1に記載の製造方法に用いる差厚めっきの製造装置であって、少なくとも導電体よりなるフープ状薄板をめっき液から離間して配置し、このフープ状薄板に形成した第1の露出部に向けてめっき液を直接当接させ、所定のめっき厚を得ると共に、めっき液を第2の露出部にも間接的に当接させるめっき液の吹出し装置を設けた差厚めっきの製造装置。 It is a manufacturing apparatus of differential thickness plating used for the manufacturing method of Claim 1, Comprising: The hoop-like thin plate which consists of an electric conductor at least is arrange | positioned away from plating solution, and the 1st exposed part formed in this hoop-like thin plate A plating apparatus for differential thickness plating provided with a plating solution blowing device for bringing the plating solution into direct contact toward the surface to obtain a predetermined plating thickness and indirectly contacting the plating solution also to the second exposed portion. 隙間が設けられた陽電極と、この陽電極の隙間からめっき液を吹き出す吹出し部を設けた請求項2に記載の差厚めっきの製造装置。 3. The apparatus for producing differential thickness plating according to claim 2, wherein a positive electrode provided with a gap and a blow-out portion for blowing a plating solution from the gap between the positive electrodes are provided.
JP2005120572A 2005-04-19 2005-04-19 Differential thickness plating manufacturing method and differential thickness plating manufacturing apparatus used therefor Expired - Fee Related JP4654748B2 (en)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01212791A (en) * 1988-02-18 1989-08-25 Fujitsu Ltd Device for partially plating strip
JPH0582691A (en) * 1991-09-20 1993-04-02 Nec Kyushu Ltd Partial plating apparatus and leadframe for semiconductor device
JPH09324290A (en) * 1996-06-06 1997-12-16 Matsushita Electron Corp Method for continuously working band-shaped material accompanied with pitch feed and equipment therefor
JPH10226899A (en) * 1997-02-19 1998-08-25 Dainippon Printing Co Ltd Plating method and apparatus therefor
JPH11229181A (en) * 1998-02-10 1999-08-24 Japan Steel Works Ltd:The Method and apparatus for plating inner face of cylinder
JP2002220690A (en) * 2001-01-29 2002-08-09 Dowa Mining Co Ltd Electroplating method and electroplating apparatus
JP2004339534A (en) * 2003-05-13 2004-12-02 Shinko Electric Ind Co Ltd Plating apparatus

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01212791A (en) * 1988-02-18 1989-08-25 Fujitsu Ltd Device for partially plating strip
JPH0582691A (en) * 1991-09-20 1993-04-02 Nec Kyushu Ltd Partial plating apparatus and leadframe for semiconductor device
JPH09324290A (en) * 1996-06-06 1997-12-16 Matsushita Electron Corp Method for continuously working band-shaped material accompanied with pitch feed and equipment therefor
JPH10226899A (en) * 1997-02-19 1998-08-25 Dainippon Printing Co Ltd Plating method and apparatus therefor
JPH11229181A (en) * 1998-02-10 1999-08-24 Japan Steel Works Ltd:The Method and apparatus for plating inner face of cylinder
JP2002220690A (en) * 2001-01-29 2002-08-09 Dowa Mining Co Ltd Electroplating method and electroplating apparatus
JP2004339534A (en) * 2003-05-13 2004-12-02 Shinko Electric Ind Co Ltd Plating apparatus

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