JP2006296018A - Non-contact driving device by magnetism, and magnet ring used for the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To perform operation in a clean room or under vacuum where no dust is generated due to non-contact transfer and no gas is also generated. <P>SOLUTION: In the non-contact driving device by magnetism, a driving shaft is respectively fixed to a plurality of arms, a magnet ring is fixed to each driving shaft, and a freely moving magnet ring is bridged in a non-contact state between the respective magnet rings of the respective driving shafts. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a magnetic non-contact drive device intended for use in an air clean room or a vacuum device, and a magnet wheel used therefor.

  Conventionally, as a robot arm drive device, a belt type or a gear type is generally known and adopted. Since the device generates a lot of dust, in order to prevent this, the device is sealed with a case that completely encloses the device, the inside of the case is cleaned by regular maintenance, and grease is replenished. However, grease cannot be used when installed in a vacuum.

Conventionally, a non-contact type magnetic conduction device has been proposed and adopted as a driving device for a conveying device. Also, a magnetic bearing that supports and moves an arm having a hand at the tip in a non-contact manner in a horizontal direction, a horizontal drive unit composed of a linear motor, and a robot that supports and rotates a floating body mounted with the horizontal drive unit in a non-contact manner. Or there is a proposal of a magnetic levitation robot in vacuum.
Patent No. 2949493 JP-A-6-23687 JP-A-4-46781

  The gear-linked type or belt-linked type robot arm has a problem that it cannot be used for manufacturing precision instruments because it generates a large amount of dust and gas in a vacuum apparatus as well as in a clean room.

  Further, the sealing device by the case considered as the above improvement has problems that it not only needs periodic cleaning but also cannot be used in a vacuum where grease cannot be used.

  Although the invention of the robot having no mechanical contact portion is improved in terms of dust generation, there are not only restrictions on the movement of the arm, but also a problem that it is difficult to use in a vacuum due to a large amount of gas generation. There was a point.

  According to the present invention, the number of dust generation sources is remarkably reduced by non-contact magnetic conduction, and smooth conduction (not only constant speed but also acceleration / deceleration is possible) is achieved. In addition, by providing a gas generation prevention layer, the generation of gas (contamination of foreign matter) is reduced as much as possible in vacuum operation, and the cleanliness is remarkably improved, thereby solving the above-mentioned conventional problems.

  Currently, in various industrial fields, with the advancement of technology, the work environment needs to be cleaned, and the level of cleanness is regarded as a problem. Particularly in a conduction system, how much dust generated from the contact portion is reduced depends on the degree of cleanliness.

  In addition to the clean work environment, work in a vacuum is also adopted, and prevention of gas generation as well as prevention of gas generation is regarded as important, but it is still difficult to prevent gas generation completely. For example, gas generation cannot be prevented even after housing for a certain period of time in a vacuum environment. Thus, the inventors have found that if a gas generation preventing layer is provided on the outer wall of an object to be used (shaft, case, magnet ring, etc.), gas generation can be substantially satisfied. As for the said gas generation prevention layer, the stability of the multiple layer is better than the single layer at present.

  That is, in the present invention, the drive shaft is fixed to each of the plurality of arms, the magnet ring is fixed to each drive shaft, and the idle magnet ring is installed in a non-contact manner between the magnet wheels of each drive shaft. The magnetic non-contact drive device is characterized in that the number of idle magnet rings is one or more, and the idle magnet rings have the same outer diameter or different outer diameters.

  Next, another invention is a magnet wheel for a non-contact drive device using magnetism, characterized in that a gas generation prevention layer is provided on the outer peripheral portion of the ring body, and the gas generation prevention layer has a plurality of layers, at least a nickel-based metal. A plating layer and a copper-based metal plating layer are included.

  In the above invention, the gas generation preventing layer is a multilayer (for example, 4 layers), and preferably contains a nickel-based metal plating layer.

  The gas generation is intended to prevent gas emission from the magnet ring and its shaft, so the magnet wheel and its shaft are covered with a gas generation prevention layer. Must also be prevented.

  The magnet ring has a magnet having a constant width parallel to (or at an angle of) the axis of the magnet ring and alternately magnetizing N poles and S poles through a non-magnetic layer. The ring and the idler magnet ring face each other with a minute gap (for example, 0.5 mm or less). The N and S poles of the drive wheel and the idle wheel repel each other and generate a driving force.

  In the above invention, gas generation prevention must be applied to all objects in a vacuum. For example, an arm, a drive shaft, a drive wheel, an idle wheel, an idle wheel shaft, and bearings.

  Since the drive system, the interlocking system, and the arms are made of different materials, it is necessary to provide a suitable gas generation prevention layer.

  Since the present invention is a non-contact magnetic drive device, dust generation in the clean room is remarkably reduced, and there is an effect that it is possible to provide work in the clean room with ultra-low dust generation.

  Further, when the gas generation preventing layer is provided on the outer wall of each part of the driving force transmission mechanism, the gas generation in the vacuum is surely prevented, and an adverse effect due to the gas generation can be prevented.

Since the gas generation preventing layer is an ultrathin layer, the magnetic driving force is not affected. The gas generation prevention treatment has an effect of enabling work in vacuum at, for example, 10 ⁻⁵ Pa.

  In addition, when an abnormal load is applied, the two magnet wheels rotate individually and work as a torque limiter, which has the effect of eliminating any damage to the conductive system.

  Further, since the number of parts to be maintained is reduced, there is an effect that the maintenance cycle is remarkably increased (10 times or more than the conventional one). In addition, even if the work environment changes (even if the atmosphere and the vacuum change alternately), there is little effect on the conduction system, and there is an effect that advanced design and construction for changing the work environment are unnecessary. .

  In this invention, a plurality of arms are sequentially connected by drive shafts, magnet rings are fixed to the drive shafts, and idle magnet rings are installed between the magnet wheels of the drive shafts so as to face each other with a minute gap therebetween. A system was constructed.

  That is, the drive shaft fixed to the base end of the arm having the distal end hand is rotatably installed on the distal end portion of the intermediate arm case. The drive shaft is fixed to the base end portion of the intermediate arm case, the drive shaft is rotatably mounted on the tip end portion of the base arm case, and the drive shaft is fixed to the base end portion of the base arm case, A magnet ring was fixed to each drive shaft, and an idle magnet ring was installed between the magnet rings in the same case to complete the drive system of the present invention.

  In the above, three arms are described, but the number of arms is not limited. Further, the diameter of the magnet wheel is determined as appropriate, and the rotational speed is the same, and an acceleration or deceleration drive system can be freely incorporated.

  An embodiment of the present invention will be described with reference to FIGS. 1, 2, and 3. A magnet ring 5 in which N poles and S poles are alternately magnetized on the outside of a support pipe 1 made of corrosion-resistant aluminum Fit and fix to.

  The assembly of the drive device using the magnet wheel 5 will be described. The upper end surface of the drive shaft 8 is brought into contact with the lower surface of the base portion of the arm 7 having the hand 6 and fixed with the bolts 9. A support tube 1 to which a magnet ring 5 a is fixed is fixed to the lower end portion of the drive shaft 8, and the drive shaft 8 is rotatably mounted on one end portion of the case 10.

  The rotating shaft 11 is fixed to the other end of the case 10 by a bolt 12, and the magnet rings 5b and 5c are fixed to the support tubes 1 and 1 fixed to the upper and lower portions of the rotating shaft 11, and the rotating shaft 11 is A case 13 is rotatably mounted on one end of the case 13.

  The rotating shaft 14 is fixed to the other end portion of the case 13 with a bolt 16, and the magnet 5 d is fixed to the rotating shaft 14 via the support tube 1.

  Between the magnet rings 5 a and 5 b in the case 10, idle magnet rings 5 e, 5 f and 5 g are interposed to transmit power.

  In the above embodiment, when the drive shaft 14 is rotated by a stepping motor (not shown), the rotation rotates the magnet wheel 5d of the drive shaft 14, and the magnet wheel 5d causes the idle magnet wheels 5h, 5i, 5j. Are rotated sequentially to rotate the magnet wheel 5c, so that the rotating shaft 11 rotates, and the case 10 also rotates accordingly. Further, since the magnet wheel 5c, the rotating shaft 11 and the magnet wheel 5b are rotated, and the magnet wheels 5e, 5f, 5g and 5a are also rotated, the arm 7 is then rotated through the rotating shaft 8. As described above, the hand 6 can cover a wide range around the rotating shaft 14.

  Since the conductive systems are all contactless, the risk of dust generation from the conductive system is extremely small.

  When the magnet ring of the above embodiment is used in a vacuum, a gas generation preventing layer 15 is provided on the outer wall of the magnet ring 5 (FIG. 3 (e)). The gas generation prevention layer 15 is provided by plating a metal that does not generate gas (or very little). For example, nickel plating 3 and copper plating 4 are alternately applied to form four layers. This plating layer is not limited to four layers, but if there are few layers (for example, one layer), there is a risk of gas generation, and if multiple layers (five layers or more) are used, the spacing between adjacent magnet rings becomes wide and the transmission force increases. In general, four layers are used.

(A) The top view which abbreviate | omitted a part of Example of the arm of this invention, (b) The top view which moved the arm similarly. (A) Elongated front view, partly in section, (b) Partly enlarged sectional view. (A) Cross-sectional view of magnet ring, (b) Partial cross-sectional view, (c) Top view when fixed to support tube, (d) Partial cross-sectional view, (e) Gas emission prevention layer FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Support pipe 2 O-ring 3 Nickel plating 4 Copper plating 5, 5a, 5b, 5c, 5d, 5e, 5f, 5g Magnet wheel 6 Hand 7 Arm 8, 11, 14 Rotating shaft 10, 13 Case 15 Gas emission prevention layer

Claims (5)

  A drive shaft is fixed to each of a plurality of arms, a magnet ring is fixed to each drive shaft, and a free magnet ring is installed in a non-contact manner between each magnet wheel of each drive shaft. By non-contact drive device.   The non-contact driving device using magnetism according to claim 1, wherein the number of idle magnet rings is one or more.   The non-contact driving device using magnetism according to claim 1 or 2, wherein the idle magnet wheels have the same outer diameter or different outer diameters.   A magnet wheel for a non-contact driving device using magnetism, wherein a gas generation prevention layer is provided on the outer periphery of the ring body.   5. The magnet wheel for a non-contact drive device by magnetism according to claim 4, wherein the gas generation preventing layer comprises a plurality of layers and includes at least a nickel-based metal plating layer and a copper-based metal plating layer.

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