JP2006290630A6 - - Google Patents

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Publication number
JP2006290630A6
JP2006290630A6 JP2005046859A JP2005046859A JP2006290630A6 JP 2006290630 A6 JP2006290630 A6 JP 2006290630A6 JP 2005046859 A JP2005046859 A JP 2005046859A JP 2005046859 A JP2005046859 A JP 2005046859A JP 2006290630 A6 JP2006290630 A6 JP 2006290630A6
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005046859A
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Japanese (ja)
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JP2006290630A (en
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Priority to JP2005046859A priority Critical patent/JP2006290630A/en
Priority claimed from JP2005046859A external-priority patent/JP2006290630A/en
Publication of JP2006290630A publication Critical patent/JP2006290630A/en
Publication of JP2006290630A6 publication Critical patent/JP2006290630A6/ja
Pending legal-status Critical Current

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JP2005046859A 2005-02-23 2005-02-23 Processing method of glass using laser Pending JP2006290630A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005046859A JP2006290630A (en) 2005-02-23 2005-02-23 Processing method of glass using laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005046859A JP2006290630A (en) 2005-02-23 2005-02-23 Processing method of glass using laser

Publications (2)

Publication Number Publication Date
JP2006290630A JP2006290630A (en) 2006-10-26
JP2006290630A6 true JP2006290630A6 (en) 2006-12-28

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ID=37411613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005046859A Pending JP2006290630A (en) 2005-02-23 2005-02-23 Processing method of glass using laser

Country Status (1)

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JP (1) JP2006290630A (en)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4734569B2 (en) * 2006-07-12 2011-07-27 国立大学法人長岡技術科学大学 Processing method of glass material
JP5197586B2 (en) 2007-05-25 2013-05-15 浜松ホトニクス株式会社 Cutting method
JP5608444B2 (en) * 2010-07-01 2014-10-15 武二 新井 Manufacturing method of glass microlens array
JP5574866B2 (en) 2010-07-26 2014-08-20 浜松ホトニクス株式会社 Laser processing method
WO2012014710A1 (en) 2010-07-26 2012-02-02 浜松ホトニクス株式会社 Laser processing method
JP5693074B2 (en) 2010-07-26 2015-04-01 浜松ホトニクス株式会社 Laser processing method
US8828260B2 (en) 2010-07-26 2014-09-09 Hamamatsu Photonics K.K. Substrate processing method
CN103025478B (en) 2010-07-26 2015-09-30 浜松光子学株式会社 Base plate processing method
CN103025477B (en) 2010-07-26 2015-05-06 浜松光子学株式会社 Method for manufacturing semiconductor device
JP5653110B2 (en) 2010-07-26 2015-01-14 浜松ホトニクス株式会社 Chip manufacturing method
CN103026486B (en) 2010-07-26 2016-08-03 浜松光子学株式会社 The manufacture method of mediator
WO2012014720A1 (en) 2010-07-26 2012-02-02 浜松ホトニクス株式会社 Laser processing method
WO2012014709A1 (en) 2010-07-26 2012-02-02 浜松ホトニクス株式会社 Laser processing method
JP5702556B2 (en) * 2010-07-26 2015-04-15 浜松ホトニクス株式会社 Laser processing method
CN103026497B (en) 2010-07-26 2016-08-03 浜松光子学株式会社 The manufacture method of absorbing substrate and for manufacturing the manufacture method of its finishing die
KR101917401B1 (en) 2010-11-30 2018-11-09 코닝 인코포레이티드 Methods of forming high-density arrays of holes in glass
JP5942558B2 (en) * 2012-04-13 2016-06-29 並木精密宝石株式会社 Microcavity formation method
JP2016070900A (en) * 2014-10-02 2016-05-09 セイコーエプソン株式会社 Manufacturing method of magnetic measuring device, manufacturing method of gas cell, magnetic measuring device and gas cell
TW201704177A (en) 2015-06-10 2017-02-01 康寧公司 Methods of etching glass substrates and glass substrates
WO2017038075A1 (en) * 2015-08-31 2017-03-09 日本板硝子株式会社 Method for producing glass with fine structure
US10410883B2 (en) 2016-06-01 2019-09-10 Corning Incorporated Articles and methods of forming vias in substrates
US10134657B2 (en) 2016-06-29 2018-11-20 Corning Incorporated Inorganic wafer having through-holes attached to semiconductor wafer
US10794679B2 (en) 2016-06-29 2020-10-06 Corning Incorporated Method and system for measuring geometric parameters of through holes
US11078112B2 (en) 2017-05-25 2021-08-03 Corning Incorporated Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same
US10580725B2 (en) 2017-05-25 2020-03-03 Corning Incorporated Articles having vias with geometry attributes and methods for fabricating the same
US11554984B2 (en) 2018-02-22 2023-01-17 Corning Incorporated Alkali-free borosilicate glasses with low post-HF etch roughness
JP7230650B2 (en) 2019-04-05 2023-03-01 Tdk株式会社 Inorganic material substrate processing method, device, and device manufacturing method
JP7116926B2 (en) * 2019-04-23 2022-08-12 日本電気硝子株式会社 Glass plate manufacturing method, glass plate, and glass plate assembly
JP7028418B2 (en) * 2020-04-27 2022-03-02 株式会社Nsc A method for manufacturing a glass substrate having a through hole and a method for manufacturing a display device.
CN111799169B (en) * 2020-07-17 2024-05-28 绍兴同芯成集成电路有限公司 Process for processing TGV by combining femtosecond laser with HF wet etching
CN114988711A (en) * 2022-06-08 2022-09-02 广东工业大学 Forming method for assisting glass patterning through preset stress
CN115385578B (en) * 2022-07-29 2023-11-28 惠州市清洋实业有限公司 Chemical perforation manufacturing process for camera lens

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