JP2006286588A - Microwave or electromagnetic wave irradiator - Google Patents

Microwave or electromagnetic wave irradiator Download PDF

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JP2006286588A
JP2006286588A JP2005132990A JP2005132990A JP2006286588A JP 2006286588 A JP2006286588 A JP 2006286588A JP 2005132990 A JP2005132990 A JP 2005132990A JP 2005132990 A JP2005132990 A JP 2005132990A JP 2006286588 A JP2006286588 A JP 2006286588A
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irradiated object
microwave
irradiated
power distribution
microwaves
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Koichi Mutsuyama
弘一 六山
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CHRONIX Inc
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CHRONIX Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem wherein a conventional microwave or electromagnetic wave irradiator has not uniformly irradiated an irradiated object with microwaves or electromagnetic waves or with a specified power distribution. <P>SOLUTION: A part of the microwaves or electromagnetic waves emitted from a linear antenna is reflected by a reflector to reach the irradiated object and the rest of it directly reaches the irradiated object. By using the interference of waves of the reflection components and the direct components, microwaves or electromagnetic waves can be made to have a uniform or specific power distribution in the irradiated object. The irradiated object is positioned with a cover that is brought into contact with the irradiated object, and it can be always irradiate with a similar power distribution. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、プラズマ発生、化学反応、あるいは物質の加熱用途等に使用する、マイクロ波または電磁波照射装置に関するものである。  The present invention relates to a microwave or electromagnetic wave irradiation apparatus used for plasma generation, chemical reaction, or heating of a substance.

従来のマイクロ波または電磁波照射装置として、例えば図2に示す調理用電子レンジまたは同様の技術を用いた方法が普及している。  As a conventional microwave or electromagnetic wave irradiation apparatus, for example, a method using a microwave oven for cooking shown in FIG.

しかしながら、以上の技術によれば、放射したマイクロ波または電磁波が被照射物に対して均等または使用者の所望する特定の電力分布で到達する様にはなっていない。例えば、図2に示す電子レンジの場合、マイクロ波または電磁波が装置内で乱反射して被照射物に到達した結果、照射効果に予期困難なむらが発生することがあって望ましくない。  However, according to the above technique, the radiated microwave or electromagnetic wave does not reach the irradiated object evenly or with a specific power distribution desired by the user. For example, in the case of the microwave oven shown in FIG. 2, as a result of microwaves or electromagnetic waves being irregularly reflected in the apparatus and reaching the object to be irradiated, unevenness in the irradiation effect may be undesirably generated.

そこで、この発明は、アンテナから放射されたマイクロ波または電磁波を、被照射物に対して平坦または特定の電力分布で照射することのできるマイクロ波または電磁波照射装置を提供することを課題とする。Therefore, an object of the present invention is to provide a microwave or electromagnetic wave irradiation apparatus that can irradiate an object to be irradiated with a microwave or electromagnetic wave with a flat or specific power distribution.

上記課題を解決すべく、本発明は、放物線の断面形状を有する反射器と、前記放物線の焦点を含む位置に固定されたマイクロ波または電磁波の放射アンテナと、被照射物を前記反射器に対する特定の位置に密着または通過させる機構を備えたことを特徴とする。  In order to solve the above problems, the present invention provides a reflector having a parabolic cross-sectional shape, a microwave or electromagnetic radiation antenna fixed at a position including the focal point of the parabola, and an object to be irradiated with respect to the reflector. It is characterized in that it is provided with a mechanism for closely contacting or passing through.

本発明によれば、アンテナから放射されたマイクロ波または電磁波が、その一部は反射器で反射して被照射物に到達し、他の一部は直接被照射物に到達する。これらの反射成分と直接成分との波の干渉を利用し、被照射物におけるマイクロ波または電磁波の電力を平坦または特定の分布とすることができる。また、マイクロ波または電磁波は、多くとも1回の反射で被照射物に到達するので、予期しない乱反射を回避できる。  According to the present invention, a part of the microwave or electromagnetic wave radiated from the antenna is reflected by the reflector and reaches the irradiated object, and the other part reaches the irradiated object directly. By utilizing wave interference between these reflection components and direct components, the power of microwaves or electromagnetic waves in the irradiated object can be made flat or have a specific distribution. In addition, since microwaves or electromagnetic waves reach the irradiated object with at most one reflection, unexpected irregular reflection can be avoided.

図4にマイクロ波または電磁波の反射成分の経路について示す。電磁界の振幅は、アンテナから反射点までは距離の2乗に反比例して減衰し、反射点から被照射物までは平面波となり減衰せずに到達する。その結果、被照射物の中央付近では電力が大きく、周辺部分では電力が小さい分布となる。前記反射成分の電磁界の位相は、被照射物のある面において等しくなる。FIG. 4 shows the path of the reflected component of the microwave or electromagnetic wave. The amplitude of the electromagnetic field attenuates in inverse proportion to the square of the distance from the antenna to the reflection point, and reaches from the reflection point to the irradiated object as a plane wave without being attenuated. As a result, power distribution is large near the center of the object to be irradiated and power is small in the peripheral portion. The phase of the electromagnetic field of the reflection component is equal on the surface on which the object is irradiated.

図5にマイクロ波または電磁波の直接到達成分の経路について示す。電磁界の振幅は、アンテナから被照射物までの距離の2乗に反比例して減衰し、被照射物上の位置によって異なる値となる。前記直接成分の電磁界の位相は、アンテナから被照射物までの距離に比例し、被照射物上の位置によって異なる値となる。FIG. 5 shows the path of the direct component of microwaves or electromagnetic waves. The amplitude of the electromagnetic field attenuates in inverse proportion to the square of the distance from the antenna to the irradiated object, and varies depending on the position on the irradiated object. The phase of the electromagnetic field of the direct component is proportional to the distance from the antenna to the irradiated object, and takes a different value depending on the position on the irradiated object.

図6に示す様に、被照射物の位置においては、前記反射成分と前記直接成分との波動が重ね合わされ干渉が発生する。この干渉の分布は、マイクロ波または電磁波の波長、放物線の頂点から焦点までの距離、反射器から被照射物までの距離と角度によって決定する。放物線の形状は、放物線の頂点と焦点までの距離より一義的に決定される。As shown in FIG. 6, at the position of the irradiated object, the wave of the reflection component and the direct component are superimposed and interference occurs. The distribution of interference is determined by the wavelength of the microwave or electromagnetic wave, the distance from the top of the parabola to the focal point, and the distance and angle from the reflector to the irradiated object. The shape of the parabola is uniquely determined from the distance between the apex of the parabola and the focal point.

例えば、図7はマイクロ波の波長を120mm、放物線頂点とアンテナとの距離を46mm、アンテナと被照射物との距離を290mmとし、非照射物に照射されるマイクロ波の電力分布を計算した結果である。合成電力は、前記反射成分または直接成分だけしか利用できない場合に比べて平坦な分布を有し、電力の値も大きい。For example, FIG. 7 shows the result of calculating the power distribution of the microwave irradiated to the non-irradiated object, assuming that the wavelength of the microwave is 120 mm, the distance between the parabola apex and the antenna is 46 mm, and the distance between the antenna and the irradiated object is 290 mm. It is. The combined power has a flat distribution and a large power value as compared with the case where only the reflection component or the direct component can be used.

図8は別の例で、マイクロ波の波長を120mm、放物線頂点とアンテナとの距離を61mm、アンテナと被照射物との距離を290mmとしたときの電力分布の理論値である。合成電力は、被照射物上の2箇所に極大点を持つ分布を有する。FIG. 8 shows another example, which is a theoretical value of the power distribution when the wavelength of the microwave is 120 mm, the distance between the parabola apex and the antenna is 61 mm, and the distance between the antenna and the irradiated object is 290 mm. The combined power has a distribution having maximum points at two locations on the irradiated object.

被照射物を反射器開口部の特定の位置に密着または通過させるための機構によって、反射器と被照射物との位置関係が保たれ、前記干渉の分布を常に一定に保つ効果がある。The positional relationship between the reflector and the irradiated object is maintained by the mechanism for bringing the irradiated object into close contact with or passing through a specific position of the reflector opening, and there is an effect that the interference distribution is always kept constant.

この発明の一実施形態を、図1に示す。反射器本体1は金属製であり、放物線柱形状の反射面7と、平面状の上蓋2及び底蓋3を備え、内部は空洞となっている。  One embodiment of the present invention is shown in FIG. The reflector main body 1 is made of metal and includes a parabolic columnar reflecting surface 7, a planar upper lid 2 and a bottom lid 3, and the inside is hollow.

上蓋2の、放物線の焦点に相当する位置に穴6が開けられ、焦点を含む位置に約1/4波長の線状アンテナ4が取り付けられる。放物線の頂点とアンテナとの距離は46mm、アンテナと被照射物との距離は290mmとなっている。コネクタ5は、上蓋2外部に取り付けられ、上蓋2を貫通して、線状アンテナに結合される。A hole 6 is formed in the upper lid 2 at a position corresponding to the focal point of the parabola, and a linear antenna 4 having a wavelength of about ¼ wavelength is attached to the position including the focal point. The distance between the apex of the parabola and the antenna is 46 mm, and the distance between the antenna and the irradiated object is 290 mm. The connector 5 is attached to the outside of the upper lid 2, passes through the upper lid 2, and is coupled to the linear antenna.

本体の空洞の開口面にはガラス製のカバー8が取り付けられる。カバー8の厚さは約3mmで、照射するマイクロ波の波長120mmに対して充分に薄い。A glass cover 8 is attached to the opening surface of the cavity of the main body. The cover 8 has a thickness of about 3 mm, and is sufficiently thin with respect to the wavelength 120 mm of the microwave to be irradiated.

「実施形態の効果」
この実施形態によれば、コネクタ5から給電された波長120mmのマイクロ波は、線状アンテナ4から本体1の空洞内に放射され、その一部は放物線柱壁7で反射後カバー8を透過して被照射物9に到達し、他の一部はカバー8を透過して直接的に被照射物9に到達し、被照射物の位置においてマイクロ波の干渉を起こし電力の分布を発生させる。
"Effect of the embodiment"
According to this embodiment, a microwave having a wavelength of 120 mm fed from the connector 5 is radiated from the linear antenna 4 into the cavity of the main body 1, and a part of the microwave passes through the cover 8 after reflection by the parabolic column wall 7. The other part of the light passes through the cover 8 and directly reaches the irradiated object 9, causing microwave interference at the position of the irradiated object and generating a power distribution.

この電力の分布は、図6に示す様に、前記反射成分または直接成分だけしか利用できない場合に比べて平坦な分布を有し、電力の値も大きい。カバー8は充分に薄く、電力分布に対してはほとんど影響を与えない。As shown in FIG. 6, this power distribution has a flat distribution and a large power value as compared with the case where only the reflection component or the direct component can be used. The cover 8 is sufficiently thin and has little influence on the power distribution.

カバー8を被照射物に密着させることによって、被照射物の位置決めが行われ、常に同様の電力分布にて照射を行うことができる。面積の広い被照射物に対しては、カバー8に沿って密着したまま平行移動させながらマイクロ波を照射することができる。またカバー8は、被照射物が誤って本体内部に入り込んでアンテナや反射面を破損することを防止する効果もある。By bringing the cover 8 into close contact with the irradiated object, the irradiated object is positioned, and irradiation can always be performed with the same power distribution. Microwaves can be irradiated to an object to be irradiated having a large area while being translated along the cover 8 in close contact. The cover 8 also has an effect of preventing the irradiated object from entering the main body and damaging the antenna and the reflecting surface.

「他の実施形態」
図1の実施形熊では、電力分布が平坦となるように本体及びアンテナ位置の寸法を決定していたが、他の実施形態では、寸法を変更し、例えば照射電力分布に2つまたはそれ以上の数の極大点を持つようにしてもよい。また図1の実施形態では、被照射物を反射器開口部の特定の位置に密着または擦過させる機構としてガラス製のカバー8を採用していたが、他の実施形態では、樹脂または他の絶縁体または他の誘電体の材料としてもよい。また、カバー8の形状は被照射物の性質に応じて、格子状または網状または外枠のみの形状等としてもよい。
"Other embodiments"
In the embodiment bear of FIG. 1, the dimensions of the main body and the antenna position are determined so that the power distribution is flat, but in other embodiments, the dimensions are changed, for example, two or more in the irradiation power distribution. You may make it have the number of local maximum points. In the embodiment of FIG. 1, the glass cover 8 is used as a mechanism for closely contacting or rubbing the irradiated object to a specific position of the reflector opening. However, in other embodiments, resin or other insulation is used. It may be a body or other dielectric material. Further, the shape of the cover 8 may be a lattice shape, a net shape, or a shape of only the outer frame, depending on the properties of the irradiated object.

この発明の一実施形態を示す図である。It is a figure which shows one Embodiment of this invention. 従来技術を示す図として、電子レンジの一部分を示す図である。It is a figure which shows a part of microwave oven as a figure which shows a prior art. マイクロ波または電磁波の、非照射物への反射経路を示す図である。It is a figure which shows the reflective path | route to the non-irradiated object of a microwave or electromagnetic waves. マイクロ波または電磁波の、非照射物への直接経路を示す図である。It is a figure which shows the direct path | route to the non-irradiation thing of a microwave or electromagnetic waves. マイクロ波または電磁波の、非照射物位置における干渉を示す図である。It is a figure which shows the interference in the non-irradiated object position of a microwave or electromagnetic waves. 被照射物における電力分布を平坦化した例を示す図である。It is a figure which shows the example which planarized the electric power distribution in a to-be-irradiated object. 被照射物において2つの極大をもつ電力分布とした例を示す図である。It is a figure which shows the example made into the electric power distribution which has two local maximum in a to-be-irradiated object.

符号の説明Explanation of symbols

1 反射器本体
2 上蓋
3 底蓋
4 放物線柱の焦点を含む位置に固定された線状アンテナ
5 高周波同軸コネクタ
6 線状アンテナ及び高周波同軸コネクタを接続するための穴
7 放物線柱形状の反射面
8 カバー
9 被照射物
10 金属筐体
11 導波管またはアンテナ
12 被照射物
13 筐体内で乱反射するマイクロ波または電磁波の模式図
14 アンテナから反射点に向かうマイクロ波または電磁波の模式図
15 反射点
16 反射点から被照射物に向かうマイクロ波または電磁波の模式図
17 アンテナから直接被照射物に向かうマイクロ波または電磁波の模式図
18 異なる経路で到達したマイクロ波または電磁波が重ね合わされる点
19 反射器を経由して被照射物に到達する成分の電力分布
20 アンテナから直接被照射物に到達する成分の電力分布
21 重ね合わせにより平坦化された電力分布
22 反射器を経由して被照射物に到達する成分の電力分布
23 アンテナから直接被照射物に到達する成分の電力分布
24 重ね合わせにより2つの極大を有するようになった電力分布
DESCRIPTION OF SYMBOLS 1 Reflector main body 2 Top cover 3 Bottom cover 4 Linear antenna fixed to the position containing the focus of a parabolic column 5 High frequency coaxial connector 6 Hole for connecting a linear antenna and a high frequency coaxial connector 7 Parabolic column-shaped reflecting surface 8 Cover 9 Object to be irradiated 10 Metal housing 11 Waveguide or antenna 12 Object to be irradiated 13 Schematic diagram of microwaves or electromagnetic waves diffusely reflected in the case 14 Schematic diagram of microwaves or electromagnetic waves from the antenna toward the reflection point 15 Reflection points 16 Schematic diagram of microwaves or electromagnetic waves traveling from the reflection point to the irradiated object 17 Schematic diagram of microwaves or electromagnetic waves traveling directly from the antenna to the irradiated object 18 Point 19 where the microwaves or electromagnetic waves arriving through different paths are superimposed Power distribution 20 of the component that reaches the irradiated object via the power of the component that reaches the irradiated object directly from the antenna Distribution 21 Power distribution flattened by superposition 22 Power distribution 23 of the component that reaches the irradiated object via the reflector 23 Power distribution 24 of the component that reaches the irradiated object directly from the antenna Power distribution that has come to have

Claims (1)

放物線の断面形状を有する反射器と、前記放物線の焦点を含む位置に固定されたマイクロ波または電磁波の放射アンテナと、被照射物を前記反射器に対する特定の位置に密着または通過させる機構を備えたことを特徴とするマイクロ波または電磁波の照射装置。A reflector having a parabolic cross-sectional shape, a microwave or electromagnetic wave radiation antenna fixed at a position including the focal point of the parabola, and a mechanism for closely contacting or passing the irradiated object at a specific position with respect to the reflector. A microwave or electromagnetic wave irradiation device.
JP2005132990A 2005-04-04 2005-04-04 Microwave or electromagnetic wave irradiator Pending JP2006286588A (en)

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Application Number Priority Date Filing Date Title
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JP2005132990A JP2006286588A (en) 2005-04-04 2005-04-04 Microwave or electromagnetic wave irradiator

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JP2006286588A true JP2006286588A (en) 2006-10-19

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Country Link
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