JP2006281170A - Ultrasonic vibration unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent electrodes formed on piezoelectric ceramic as a vibration source from being easily short-circuited by liquid in an ultrasonic vibration unit used for an atomization device for instance. <P>SOLUTION: The piezoelectric ceramics 29 is provided with first and second electrodes 39a and 39b on opposing surfaces. On one end side of the piezoelectric ceramics 29, a plate 31 to be vibrated having many micropores 41 is partially piled up. Insulating elastic plates 35a and 35b are piled on the piezoelectric ceramics 29 so as to substantially cover the first and second electrodes 39a and 39b. The piezoelectric ceramics 29 is pressed from the above of the elastic plate 35a and 35b, and the entire piezoelectric ceramics 29 is covered with first and second case members 37a and 37b. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an ultrasonic vibration unit, and more particularly to an improvement of an ultrasonic vibration unit suitable for use in an atomizing device for atomizing a liquid such as water or a chemical solution.

  Conventionally, for example, a configuration shown in FIG. 17 is known as an atomizing device that atomizes a liquid such as water or a chemical using an ultrasonic vibration unit.

  That is, for example, water 3 is stored in the inner lower part of the liquid storage unit 1 that also serves as the apparatus main body, and one side of the ultrasonic vibration unit 7 is supported on the support member 5 provided on the upper inner side of the liquid storage unit 1 to be made of a sponge or the like. A conical column-shaped supply unit 9 that supplies water 3 in the liquid storage unit 1 upward is extended from the inner bottom of the liquid storage unit 1 to the ultrasonic vibration unit 7. Japanese Patent No. 2599844 (Patent Document 1) is of this type.

  For example, as shown in FIGS. 18A and 18B, the ultrasonic vibration unit 7 has a vibration plate 15 partially overlapped and fixed to one end of a rectangular plate-shaped piezoelectric ceramic 13 having electrodes 11a and 11b formed on opposite surfaces. The terminals 11a and 17b (not shown in FIG. B) are connected to the electrodes 11a and 11b, and a large number of small holes 19 are formed through the vibrating plate 15 in the thickness direction. The piezoelectric ceramic 13 is covered with a halved insulating case 23 (both not shown in FIG. A) via a chip-like support 21 made of a body.

  The small hole 19 of the vibration plate 15 is fine, and is not shown in FIG. 18A and exaggerated in FIG.

In such an ultrasonic vibration unit 7, the case 23 is fixed to the support member 5 as shown in FIG. 17, and a predetermined AC drive voltage is applied to the electrodes 11 a and 11 b via the terminals 17 a and 17 b to apply to the piezoelectric ceramic 13. A length (spread) vibration is generated, the vibration plate 15 is vibrated based on this vibration, and the water 3 supplied from the lower part of the liquid storage unit 1 to the vibration plate 15 by the supply unit 9 is passed through a large number of small holes 19. Are atomized and sent to the outside. In addition, the code | symbol 25 in FIG. 17 is a stopcock which plugs up the entrance / exit of the water 3. FIG.
Japanese Patent No. 2599844

  However, in the above-described ultrasonic vibration unit 7, the piezoelectric ceramic 13 is simply sandwiched by the half-shaped insulating case 23, so that water is supplied from the lower part of the liquid storage unit 1 to the vibration plate 15 by the supply unit 9. Further, the mist sent out from the water 3 and the many small holes 19 easily enters the case 23 and easily adheres to the periphery of the thin piezoelectric ceramic 13.

  For this reason, there is a possibility that the electrodes 11a and 11b of the piezoelectric ceramic 13 are short-circuited by attached water or the like, and a solution is desired from the viewpoint of maintaining and improving driving efficiency and safety.

  The present invention has been made to solve such a problem, and it is difficult for a liquid to be short-circuited between electrodes of piezoelectric ceramics as a vibration source, and it is easy to maintain and improve driving efficiency and ensure safety. The purpose is to provide.

  In order to solve such a problem, the first configuration of the ultrasonic vibration unit of the present invention is a plate-like shape having first and second electrodes on the first and second surfaces facing each other in the thickness direction. A piezoelectric ceramic, a vibration plate disposed so as to partially or directly overlap one end side of the piezoelectric ceramic, and substantially the entire surface of at least first and second surfaces of the piezoelectric ceramic. And an insulating elastic body that covers at least one of the first or second electrode is disposed between the back surface of the case and the first or second surface of the piezoelectric ceramic. Features.

  The first configuration of the ultrasonic vibration unit according to the present invention includes a plate-like piezoelectric ceramic having first and second electrodes on the first and second surfaces facing each other in the thickness direction, and the piezoelectric A vibrating plate disposed so as to partially or directly protrude from one end side of the ceramic, and a case that covers substantially the entire surface of at least the first and second surfaces of the piezoelectric ceramic. A frame-like or annular insulating elastic body surrounding at least one of the first or second electrodes is disposed between the back surface of the case and the first or second surface of the piezoelectric ceramic. Features.

  The first configuration of the ultrasonic vibration unit according to the present invention includes a plate-like piezoelectric ceramic having first and second electrodes on the first and second surfaces facing each other in the thickness direction, and the piezoelectric A vibrating plate disposed so as to partially or directly protrude from one end side of the ceramic, and a case that covers substantially the entire surface of at least the first and second surfaces of the piezoelectric ceramic. A conductive elastic body is disposed on at least one of the first or second electrode, and at least one of the conductive elastic body and the electrode on the side where the conductive elastic body is disposed or the other electrode. It is characterized in that one side is covered with an insulator.

  The first configuration of the ultrasonic vibration unit according to the present invention includes a plate-like piezoelectric ceramic having first and second electrodes on the first and second surfaces facing each other in the thickness direction, and the piezoelectric A vibrating plate disposed so as to partially or directly protrude from one end side of the ceramic, and a case that covers substantially the entire surface of at least the first and second surfaces of the piezoelectric ceramic. An insulating elastic body is disposed between the case and the piezoelectric ceramic or the vibration plate on the piezoelectric ceramic vibration plate arrangement side.

  Further, in the first configuration of the present invention, the case is formed of at least two members divided in the thickness direction of the piezoelectric ceramic, and the piezoelectric ceramic is narrowed by the two members of the case via an elastic body. A held configuration is also possible.

  Further, in the first configuration of the present invention, the upper case has a window portion that is formed larger in the length direction than the vibration plate and penetrates in the thickness direction, and the vibration plate is a window portion. It is also possible to adopt a configuration in which the arrangement is extended so as to cross the line.

  In the first configuration of the present invention, a configuration is also possible in which the tip of the vibration plate is elastically supported by the case.

  The second configuration according to the ultrasonic vibration unit of the present invention includes a ring plate having first and second electrodes on the first and second surfaces facing each other in the thickness direction, and having a through hole in the center. Piezoelectric ceramic, a vibrating plate disposed directly or indirectly on the first or second surface of the piezoelectric ceramic so as to close the through-hole of the piezoelectric ceramic, and the piezoelectric ceramic And a case covering substantially the entire surface of at least the first and second surfaces, and at least one of the first or second electrode between the back surface of the case and the first or second surface of the piezoelectric ceramic. An insulating elastic body that covers the surface is disposed.

  Moreover, the 2nd structure which concerns on the ultrasonic vibration unit of this invention has a 1st and 2nd electrode in the 1st and 2nd surface which faces in thickness direction, respectively, and has a through-hole in the center part. A ring plate-shaped piezoelectric ceramic, a vibration plate disposed directly or indirectly on the first or second surface of the piezoelectric ceramic so as to close the through-hole of the piezoelectric ceramic, and A case that covers at least substantially the entire surface of the first and second surfaces of the piezoelectric ceramic, and the first or second electrode between the back surface of the case and the first or second surface of the piezoelectric ceramic. An annular insulating elastic body that surrounds at least one of the outer periphery and the inner periphery is disposed.

  Moreover, the 2nd structure which concerns on the ultrasonic vibration unit of this invention has a 1st and 2nd electrode in the 1st and 2nd surface which faces in thickness direction, respectively, and has a through-hole in the center part. A ring plate-shaped piezoelectric ceramic, a vibration plate disposed directly or indirectly on the first or second surface of the piezoelectric ceramic so as to close the through-hole of the piezoelectric ceramic, and And a case covering substantially the entire first and second surfaces of the piezoelectric ceramic, and disposing a conductive elastic body on at least one of the first or second electrode, and the conductive elastic body In addition, at least one of the electrode on the side where the conductive elastic body is disposed or the other electrode is covered with an insulator.

  Moreover, the 2nd structure which concerns on the ultrasonic vibration unit of this invention has a 1st and 2nd electrode in the 1st and 2nd surface which faces in thickness direction, respectively, and has a through-hole in the center part. A ring plate-shaped piezoelectric ceramic, a vibration plate disposed directly or indirectly on the first or second surface of the piezoelectric ceramic so as to close the through-hole of the piezoelectric ceramic, and And a case covering substantially the entire first and second surfaces of the piezoelectric ceramic, and on the side of the piezoelectric ceramic where the vibration plate is disposed, insulating elasticity is provided between the case and the piezoelectric ceramic or the vibration plate. The body is disposed.

  In the second configuration of the present invention, the case is formed of at least two members divided in the thickness direction of the piezoelectric ceramic, and the piezoelectric ceramic is sandwiched between the two members via an elastic body. A configuration is also possible.

  In the first configuration relating to the ultrasonic vibration unit of the present invention having such means, the one end side of the plate-like piezoelectric ceramics having the first and second electrodes on the first and second surfaces, respectively. The vibration plate is disposed so as to be partially or directly superimposed, and the case covers at least substantially the entire first and second surfaces of the piezoelectric ceramic, and the back surface of the case and the piezoelectric ceramic Since an insulating elastic body that covers at least one of the first and second electrodes is disposed between the first and second surfaces, when used in an atomizer or the like, a liquid is formed between the electrodes of the piezoelectric ceramic. It is difficult to be short-circuited, and it is easy to maintain and improve driving efficiency and secure safety. In addition, since at least one of the first or second electrode is covered with an insulating elastic body, the electrode can be protected, and the member covering the electrode is an insulating elastic body. Is preferred.

  In the first configuration of the present invention, a configuration in which a frame-like or annular insulating elastic body surrounding at least one of the first or second electrodes of the piezoelectric ceramic is disposed, or when used in an atomizer or the like The electrodes of the piezoelectric ceramics are not easily short-circuited by the liquid, and it is easy to maintain and improve driving efficiency and to ensure safety. Further, since the member surrounding at least one of the first or second electrodes of the piezoelectric ceramic is an insulating elastic body, it is suitable for holding the piezoelectric ceramic. Further, in addition to the advantages described above, the material consumption of the insulating elastic body is small and inexpensive.

  In the first configuration of the present invention, a conductive elastic body is disposed on at least one of the first or second electrodes of the piezoelectric ceramic, and the conductive elastic body and the conductive elastic body are disposed. Even if it is configured to cover at least one of the other electrode or the other electrode with an insulator, when used in an atomizer, etc., the electrodes of the piezoelectric ceramics are not easily short-circuited by the liquid, improving the maintenance of driving efficiency and ensuring safety Is easy. In addition, since at least one of the first or second electrode is covered with an insulator, the electrode can be protected and a conductive elastic body is disposed on at least one of the first or second electrode of the piezoelectric ceramic. Therefore, it is suitable for holding piezoelectric ceramics.

  In the first configuration of the present invention, in the configuration in which the insulating elastic body is disposed between the case and the piezoelectric ceramic or the vibrating plate on the vibrating plate mounting side of the piezoelectric ceramic, it is used for an atomizer or the like. In this case, in particular, it is possible to reliably prevent a short circuit between the electrodes of the piezoelectric ceramics on the vibrating plate arrangement side where the liquid easily adheres.

  In the first configuration of the present invention, in the configuration in which the case is formed of at least two members divided in the thickness direction of the piezoelectric ceramic, and the piezoelectric ceramic is sandwiched by the insulating elastic body by them, When it is used in an apparatus or the like, it is difficult for the electrodes of the piezoelectric ceramics to be short-circuited by the liquid, and it is easy to maintain and improve driving efficiency and to ensure safety. In addition, assembly is easy, the piezoelectric ceramic can be held at a predetermined position in the case, and the electrodes can be protected.

  In the first configuration of the present invention, in the configuration in which the vibration plate extends so as to cross the window provided in the case, the vibration plate can be protected.

  In the first configuration of the present invention, the configuration in which the tip of the vibration plate is elastically supported by the case prevents torsional deformation and deflection deformation of the vibration plate without interfering with vibration of the vibration plate. The effect can also be expected.

  In the second configuration relating to the ultrasonic vibration unit of the present invention, the through-holes of the piezoelectric ceramics are blocked with respect to the ring plate-shaped piezoelectric ceramics having the first and second electrodes on the first and second surfaces, respectively. The vibration plates are arranged so as to be partially or directly overlapped with each other, and at least the first and second surfaces of the piezoelectric ceramic are covered by the case, and the back surface of the case and the first of the piezoelectric ceramic are covered. Alternatively, since an insulating elastic body that covers at least one of the first or second electrode is disposed between the second surface and the second surface, the piezoelectric ceramic electrodes are short-circuited by the liquid when used in an atomizer. It is difficult to maintain and improve driving efficiency and secure safety. In addition, since at least one of the first and second electrodes is covered with an insulating elastic body, the electrode can be protected, and the member covering the electrode is an insulating elastic body. Is preferred.

  In the second configuration of the present invention, even when the annular insulating elastic body surrounding the outer periphery and the inner periphery of at least one of the first or second electrodes of the piezoelectric ceramic is disposed, when used in an atomizer or the like The electrodes of the piezoelectric ceramics are not easily short-circuited by the liquid, and it is easy to maintain and improve driving efficiency and to ensure safety. Moreover, since the annular member surrounding the outer periphery and the inner periphery of at least one of the first or second electrodes of the piezoelectric ceramic is an insulating elastic body, it is suitable for holding the piezoelectric ceramic. Furthermore, in addition to the advantages described above, the material consumption of the insulating elastic body is small and inexpensive.

  In the second configuration of the present invention, a conductive elastic body is disposed on at least one of the first or second electrodes of the piezoelectric ceramic, and the conductive elastic body and the conductive elastic body are disposed. Even if it is configured to cover at least one of the other electrode or the other electrode with an insulator, when used in an atomizer, etc., the electrodes of the piezoelectric ceramics are not easily short-circuited by the liquid, improving the maintenance of driving efficiency and ensuring safety Is easy. In addition, since at least one of the first or second electrode is covered with an insulator, the electrode can be protected and a conductive elastic body is disposed on at least one of the first or second electrode of the piezoelectric ceramic. Therefore, it is suitable for holding piezoelectric ceramics.

  In the second configuration of the present invention, in the configuration in which the insulating elastic body is disposed between the case and the piezoelectric ceramic or the vibrating plate on the vibrating plate mounting side of the piezoelectric ceramic, it is used for an atomizer or the like. In this case, in particular, it is possible to reliably prevent a short circuit between the electrodes of the piezoelectric ceramics on the side of the vibrating plate on which the liquid easily adheres.

  In the second configuration of the present invention, in the configuration in which the case is formed of at least two members divided in the thickness direction of the piezoelectric ceramic and the piezoelectric ceramic is sandwiched by the insulating elastic body by these, When it is used in an apparatus or the like, it is difficult for the electrodes of the piezoelectric ceramics to be short-circuited by the liquid, and it is easy to maintain and improve driving efficiency and to ensure safety. In addition, assembly is easy, the piezoelectric ceramic can be held at a predetermined position in the case, and the electrodes can be protected.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  1 and 2 are a sectional view and an exploded perspective view showing a first configuration of an ultrasonic vibration unit according to the present invention.

  1 and 2, the ultrasonic vibration unit 27 includes a plate-shaped piezoelectric ceramic 29, a vibration plate 31 disposed so as to partially overlap the metal plate, and a metal stacked on the piezoelectric ceramic 29. Terminal plates 33a, 33b made of metal, insulating elastic plates 35a, 35b (first and second insulating elastic bodies) overlaid thereon, and a case 37 covering the whole are configured. For example, an FPC (flexible printed circuit board) may be used as the terminal boards 33a and 33b.

  Piezoelectric ceramics 29 is formed into a thin plate shape that approximates a rectangular shape from a conventionally known ultrasonic piezoelectric material, for example, lead zirconate titanate or a material in which this lead is replaced by molybdenum, and is polarized in the thickness direction. .

  As shown in FIG. 3, the piezoelectric ceramic 29 has a first electrode 39a made of a conductive material such as silver, copper, or nickel on the first surface (upper surface in the drawing) d1 facing in the thickness direction. A similar second electrode 39 b is formed on the second surface (lower surface in the drawing) d 2 with a shape slightly smaller than the outer shape of the piezoelectric ceramic 29.

  The first and second electrodes 39a and 39b are overlapped with terminal plates 33a and 33b having a slightly smaller shape than the first and second electrodes 39a and 39b, and partially extend as lead portions.

  The vibration plate 31 is formed in a rectangular shape with the same width dimension as one end side of the piezoelectric ceramic 29 from a conductive material plate such as nickel material, and is indirectly overlapped with the piezoelectric ceramic 29 via, for example, the first electrode 37a. The tip is fixed and cantilevered by the piezoelectric ceramic 29, and the tip is an open free end.

  It should be noted that the vibration plate 31 can naturally be configured to directly overlap the piezoelectric ceramic 29.

  A plurality of (small number) fine small holes 41 are formed in the vibrating plate 31 in the thickness direction, and these small holes 41 face the diameter of the contact surface (lower surface in the figure) side with the piezoelectric ceramic 29. It is tapered to be larger than the diameter on the surface side. The illustration of the small hole 41 is omitted in FIG. 1 and is exaggerated in FIG.

  Both of the insulating elastic plates 35a and 35b are formed in a thin plate shape having substantially the same shape as the outer shape of the piezoelectric ceramic 29 from an insulating material having good elasticity such as synthetic rubber or elastomer. The first and second electrodes 39a and 39b are superimposed on the opposing surfaces from above the terminal plates 33a and 33b.

  That is, the elastic plates 35a and 35b are formed in a size that protrudes from the first and second electrodes 39a and 39b of the piezoelectric ceramic 29, and covers the electrodes 39a and 39b.

  The case 37 is composed of first and second case members 37 a and 37 b formed in a frame shape from an insulating synthetic resin, and has the same storage inner shape as the outer shape of the piezoelectric ceramic 29.

  The first case member 37a (upper side in the figure) has a depth to which a part of the first elastic plate 35a and the vibration plate 31 is fitted, and the second case member 37b (lower side in the figure) is the second The elastic plate 35 b and the piezoelectric ceramic 29 have a depth to fit, and a part of the first case member 37 is cut away for the vibration plate 31 extending from the piezoelectric ceramic 29.

  In the figure, the first case member 37a is clearly thinner than the second case member 37b, but the piezoelectric ceramic 29 and the vibration plate 31 are about 1 mm or thinner, so that the case is commercialized. The thickness dimension in appearance is almost the same.

  The first and second case members 37a and 37b are fixed and integrated by an appropriate means such as an adhesive with the opening end surfaces overlapped so that the piezoelectric ceramics 29 is slightly pressed from above the elastic plates 35a and 35b. In addition, the entire piezoelectric ceramic 29 is covered so that the vibration plate 31 protrudes.

  Therefore, the entire first and second electrodes 39a and 39b are hidden between the back surfaces of the first and second case members 37a and 37b and the first and second surfaces d1 and d2 of the piezoelectric ceramic 29. Thus, the first and second electrodes 39a and 39b are covered with the elastic plates 35a and 35b in a pressure-contact manner, and are waterproofly sealed by the elastic plates 35a and 35b.

  That is, the elastic plates 35a and 35b have a short circuit preventing function for preventing a short circuit between the first and second electrodes 39a and 39b due to adhesion of water or the like.

  Further, the piezoelectric ceramic 29 is sandwiched between the first and second case members 37 a and 37 b via the elastic plates 35 a and 35 b and is held at a predetermined position of the case member 37.

  When an ultrasonic voltage of 20 Vp-p, for example, at 133 KHz is applied to the piezoelectric ceramic 29 through the terminal plates 33a and 33b, such an ultrasonic vibration unit 27 is operated as shown in FIG. Vibrates in the length direction (arrows in FIG. 3), so that a vibration wave is generated in the vibration plate 31 whose end is supported by the piezoelectric ceramic 29.

  In FIG. 4, for easy understanding, the vibration form of the vibration plate 31 is schematically shown exaggeratedly.

  As described above, the ultrasonic vibration unit 27 of the present invention has the first and second electrodes 39a and 39b on the first and second surfaces d1 and d1 which are opposing surfaces in the thickness direction of the piezoelectric ceramic 29. It is formed in a shape slightly smaller than the outer shape of the ceramic 29, and the vibration plate 31 is partially overlapped and fixed to one end side of the piezoelectric ceramic 29, and its tip is set as an open free end. Insulating elastic plates 35a and 35b are formed on the first and second surfaces d1 and d1 of the piezoelectric ceramic 29 so that the entire first and second electrodes 39a and 39b are hidden. The first and second case members 37a and 37b are covered so as to press the piezoelectric ceramics 29 from above the elastic plates 35a and 35b, and the vibrating plate 31 is covered with the first plate. Beauty second case member 37a, and has a configuration which projects from the junction of 37b.

  Therefore, the elastic plates 35a, 35b in the first and second case members 37a, 37b are sealed in a waterproof manner, so that water or the like hardly contacts the first and second electrodes 39a, 39b. A short circuit between the first and second electrodes 39a and 39b is prevented.

  Moreover, the first and second electrodes 39a and 39b are elastically formed between the first and second surfaces d1 and d2 of the piezoelectric ceramic 29 and the first and second case members 37a and 37b. Since it is largely covered by the plates 35a and 35b, the short-circuit prevention function functions reliably.

  In the first configuration described above, the elastic plates 35a and 35b exhibiting the function of preventing a short circuit are plate-like covering the entire first and second electrodes 39a and 39b. However, the present invention is not limited to this. .

  For example, as shown in FIGS. 5 and 6, instead of the plate-like elastic plates 35a and 35b, the first and second surfaces formed smaller than the first and second surfaces d1 and d2 of the piezoelectric ceramic 29 are used. Insulating elastic frames 43a and 43b (third and fourth elastic bodies) having a rectangular frame surrounding the electrodes 39a and 39b are disposed, and the first and second surfaces d1 and d2 of the piezoelectric ceramic 29 are arranged. A configuration in which the first and second case members 37a and 37b are interposed between the back surfaces of the first and second case members 37a and 37b is also possible.

  The other configuration is the same as the configuration of FIGS. 1 and 2 described above, and the elastic frames 43a and 43b are also formed of the same material as the elastic plates 35a and 35b, and between the first and second electrodes 39a and 39b. The short circuit prevention function is demonstrated.

  Even in such a configuration, the outer circumferences of the first and second electrodes 39a and 39b formed on the piezoelectric ceramic 29 are the first and second surfaces d1 and d2 of the piezoelectric ceramic 29 and the first and second cases. Since waterproof sealing is performed by the elastic frames 43a and 43b pressed against the back surfaces of the members 37a and 37b, a short circuit between the first and second electrodes 39a and 39b is prevented, and the elastic frame 43a 43b is not a plate shape but a frame shape, and its material consumption is small and inexpensive.

  In this embodiment, since the first and second electrodes 39a and 39b are rectangular, the insulating elastic frames 43a and 43b surrounding the first and second electrodes 39a and 39b are also provided. For example, when the first and second electrodes 39a and 39b are circular, the insulating elastic frames 43a and 43b surrounding the first and second electrodes 39a and 39b are used. Can also have an annular shape.

  Further, as shown in FIG. 7, in addition to the plate-like elastic plates 35a and 35b, the first and second case members are provided on the protruding side of the vibration plate 31 of the first and second case members 37a and 37b. A configuration in which thin insulating elastic bars 45a and 45b (fifth and sixth elastic bodies) are press-contacted between the end faces of 37a and 37b and the vibration plate 31 is also possible.

  This configuration is also the same as the configuration of FIGS. 1 and 2 described above, and the elastic rods 45a and 45b are also made of the same material as the elastic plates 35a and 35b, and between the first and second electrodes 39a and 39b. Demonstrate short circuit prevention function.

  In such a configuration, the side of the vibration plate 31 fixed to the piezoelectric ceramic 29 is waterproofly sealed between the first and second case members 37a and 37b and the vibration plate 31 by the elastic bars 45a and 45b. Therefore, entry of water or the like into the case 37 is prevented, and a short circuit between the first and second electrodes 39a and 39b is prevented.

  If the elastic rods 45a and 45b are used in addition to the elastic plates 35a and 35b, a higher short-circuit prevention function can be secured. However, the insulating elastic plates 35a and 35b are omitted and only the elastic rods 45a and 45b are short-circuited. There is an advantage that a prevention function can be secured.

  Further, although not shown in the figure, in the configuration of FIG. 7, the first and second case members 37 a and 37 b on the vibrating plate 31 side are connected to the mating portion (side) of the first and second electrodes 39 a and 39 b. The insulating elastic rods 45a and 45b are interposed between the extending end and the first and second surfaces d1 and d2 of the piezoelectric ceramic 29 from the side on the diaphragm 31 side. In this way, it is possible to adopt a structure in which the piezoelectric ceramic 29 is pressed into a waterproof seal, and the same effect can be obtained with such a structure.

  In the first configuration, the case 37 including the above-described halved first and second case members 37 a and 37 b is not limited to a shape covering only the piezoelectric ceramic 29.

  For example, as shown in FIGS. 8 to 10, a case 47 having a window portion 49 by first and second case members 47 a and 47 b integrally extended from a portion covering only the piezoelectric ceramic 29 in a U-shape. And the vibrating plate 31 is protruded from the piezoelectric ceramic 29 so as to cross the window portion 49, and the protruding application portion of the vibrating plate 31 is extended to the leading ends of the first and second case members 47a and 47b. A configuration in which the elastic pieces 51 are elastically sandwiched between the sides is also possible.

  In the ultrasonic vibration unit 27 having such a configuration, the vibration plate 31 protrudes from the piezoelectric ceramics 29 so as to cross the window portion 49, and the protrusion application portions of the vibration plate 31 are the first and second cases. The members 47a and 47b are elastically clamped by the insulating elastic piece 51 at the extended end sides thereof, so that it is difficult for other members and the like to inadvertently come into contact with the vibration plate 31, and stable operation can be easily ensured. It becomes possible.

  In addition, as shown in FIG. 16 described above, even if the columnar supply unit 9 is in pressure contact with the vibration plate 31, large deformation of the vibration plate 31 is suppressed, and the supply unit 9 for the vibration plate 31 is suppressed. The pressure contact state is ensured satisfactorily, and there is an advantage that a reliable atomization operation can be secured.

  Of course, the protruding first application portion of the vibration plate 31 is arranged with a slight gap between the first and second case members 47a and 47b so that the elastic piece 51 is omitted. Even if the portion is not disposed between the first and second case members 47a and 47b, it is possible to prevent other members and the like from coming into contact with the vibration plate 31 inadvertently.

  In the first configuration described above, the elastic plates 35a and 35b, the elastic frames 43a and 43b, and the elastic rods 45a and 45b are provided on one of the first and second surfaces d1 and d2 of the piezoelectric ceramic 29. Even if any one of them is provided, the object of the present invention can be achieved.

  In the above-described embodiment, a metal material is used as the terminal plates 33a and 33b and the terminal plates 33a and 33b are covered with the insulating elastic plates 35a and 35b. For example, a conductive elastic body may be used as the terminal plates 33a and 33b, and a terminal plate made of the conductive elastic body may be coated with an insulating material instead of the elastic plates 35a and 35b, for example.

  Further, the case 37 may be made of metal as long as it can prevent a short circuit between the first and second electrodes 39a and 39b of the piezoelectric ceramic 29. In this case, the case 37 exhibits a heat dissipation effect. Can do.

  Next, a modification of the first configuration of the ultrasonic vibration unit according to the present invention will be described with reference to the cross-sectional view of FIG.

  In the ultrasonic vibration unit 27 described above, the terminal plates 33a and 33b provided on the piezoelectric ceramic 29 are illustrated as extending from the end surface of the case 37 to the outside. However, in this modification, the upper and lower surfaces of the case 37 are illustrated. Are provided with terminals 33c and 33d.

  The terminals 33c and 33d have a rivet shape with a bowl-shaped curved top surface. The terminal 33c is disposed in a through hole formed in the first case member 37a so that the terminal 33d can move back and forth. It is disposed in a through hole formed in the second case member 37b so as to be able to advance and retract.

  A helical spring 100a made of a conductive member is compacted between the bottom center portion of the terminal 33c and the first electrode 39a, and the bottom center portion of the terminal 33d and the second electrode 39b In between, the helical spring 100b which consists of an electroconductive member is crimped.

  By these helical springs 100a and 100b, electrical connection between the first electrode 39a and the terminal 33c and electrical connection between the second electrode 39b and the terminal 33d are achieved.

  Further, an elastic frame 43a is disposed between the first case member 37a and the piezoelectric ceramic 29, and an elastic frame 43b is disposed between the second case member 37b and the piezoelectric ceramic 29. The piezoelectric ceramics 29 are elastically held by elastic frames 43a and 43b.

  Even in such a configuration, the outer circumferences of the first and second electrodes 39a and 39b formed on the piezoelectric ceramic 29 are the first and second surfaces d1 and d2 of the piezoelectric ceramic 29 and the first and second cases. Since waterproof sealing is performed by the elastic frames 43a and 43b pressed against the back surfaces of the members 37a and 37b, a short circuit between the first and second electrodes 39a and 39b is prevented, and the elastic frame 43a is prevented. 43b is not a plate shape but a frame shape, and its material consumption is small and inexpensive.

  Next, the 2nd structure of the ultrasonic vibration unit for atomizers which concerns on this invention is demonstrated.

  12 and 13 are a cross-sectional view and an exploded perspective view showing a second configuration of the ultrasonic vibration unit for an atomizer according to the present invention.

  12 and 13, the ultrasonic vibration unit 53 is arranged so as to partially overlap the piezoelectric ceramic 57 so as to close the through-hole 55 and the ring-plate-shaped piezoelectric ceramic 57 having the through-hole 55 in the center. The disc-shaped vibrating plate 59, the insulating elastic plates 61a and 61b (seventh and eighth elastic bodies) overlaid thereon, and the case 63 covering the whole are configured.

  The piezoelectric ceramic 57 is formed in the shape of a thin ring plate from the same material as the piezoelectric ceramic 29 of FIG. 1 and is polarized in the thickness direction.

  The piezoelectric ceramic 57 has a first electrode 65a made of a conductive material such as silver, copper, or nickel on the first surface d1 facing in the thickness direction, and a second second surface similar to the second surface d2. The electrodes 65b are each formed in an annular band shape that is slightly smaller than the width of the piezoelectric ceramic 57, and a terminal plate (not shown) is in electrical contact with the first and second electrodes 65a and 65b as appropriate. Overlapped in state.

  The vibration plate 59 is made of, for example, a conductive material plate such as nickel material, and is indirectly overlapped and fixed to the piezoelectric ceramic 57 via, for example, the second electrode 65 a, but directly overlaps the piezoelectric ceramic 57. The configuration is naturally possible, and the minute small holes 67 are formed in the same manner as the above-described vibrating plate 31.

  The elastic plates 61a and 61b are both formed from a resilient material similar to the elastic plates 35a and 35b described above into a ring plate shape substantially the same as the shape and width of the piezoelectric ceramic 57, and the first and second electrodes made of water or the like. This prevents a short circuit between 65a and 65b, and is superimposed on the first and second electrodes 65a and 65b on both opposing surfaces of the piezoelectric ceramic 57.

  That is, the elastic plates 61a and 61b are formed in a shape that is larger in diameter and protrudes than the first and second electrodes 65a and 65b of the piezoelectric ceramic 57, and cover the entire first and second electrodes 65a and 65b. Yes.

  The case 63 is formed by combining first and second case members 63 a and 63 b formed from an insulating synthetic resin in a ring shape and a half shape in the same manner as the case 37 described above, and has the same outer shape as the piezoelectric ceramic 57. It has a storage shape with a concave cross section.

  The first case member 63a (upper side in the figure) has a depth to which the piezoelectric ceramic 57 and the elastic plate 61a are fitted, and the second case member 63b (lower side in the figure) has a depth to which the elastic plate 61b is fitted. A part is notched for the vibration plate 59 that closes the through hole 55 of the piezoelectric ceramic 57.

  In the figure, the first case member 63a is shown to be thicker than the second case member 63b. However, when the product is commercialized, the thickness dimension in appearance is substantially the same as in the above-described embodiment. It is.

  The first and second case members 63a and 63b are fixed and integrated by an appropriate means such as an adhesive, with the opening end faces being overlapped with each other so as to slightly press the piezoelectric ceramic 57 from above the elastic plates 61a and 61b. At the same time, the entire piezoelectric ceramic 57 is covered so that the vibration plate 59 protrudes.

  Therefore, between the back surfaces of the first and second case members 63a and 63b and the first and second surfaces d1 and d2 of the piezoelectric ceramic 57, the first and second electrodes 65a and 65b are elastic plates. Covered with 61a and 61b, the elastic plates 61a and 61b exhibit a short-circuit preventing function for preventing a short circuit between the first and second electrodes 65a and 65b due to adhesion of water droplets.

  The piezoelectric ceramic 57 is sandwiched between the first and second case members 63a and 63b via the elastic plates 61a and 61b, and is held at a predetermined position of the case member 63.

  Also in such an ultrasonic vibration unit 53, for example, when an AC voltage of 20 Vp-p at 133 KHz is applied to the piezoelectric ceramic 57, the piezoelectric ceramic 57 vibrates in the radial direction. The plate 59 vibrates in the axial direction, and the liquid supplied to one surface of the vibration plate 59 is atomized through the small holes 67.

  As described above, the second configuration of the ultrasonic vibration unit 53 according to the present invention is the first on the first and second surfaces d1 and d1 that are the opposing surfaces of the ring-plate-shaped piezoelectric ceramics 57 having the through holes 55. The second electrode 65a, 65b is formed in a shape slightly smaller than the width shape of the piezoelectric ceramic 57, and a vibrating plate 59 in which a large number of small holes 67 are formed is partially overlapped with the piezoelectric ceramic 57 and penetrates therethrough. The hole 55 is closed, and elastic plates 61a and 61b are stacked on the first and second surfaces d1 and d1 of the piezoelectric ceramic 57 so as to cover the first and second electrodes 65a and 65b. The case members 63a and 63b cover the elastic plates 61a and 61b so as to slightly press the piezoelectric ceramic 57, and the vibration plate 59 is exposed to the through hole 55. You have me.

  Therefore, the elastic plates 61a and 61b in the first and second case members 63a and 63b are waterproofly sealed, and a short circuit between the first and second electrodes 65a and 65b is prevented.

  Moreover, the first and second electrodes 65a and 65b are disposed between the first and second surfaces d1 and d2 of the piezoelectric ceramic 57 and the first and second case members 63a and 63b by the elastic plates 61a and 61b. Since it is largely covered and pressed, the short circuit prevention function functions reliably.

  Also in the second configuration, the elastic plates 61a and 61b exhibiting the short-circuit preventing function are not limited to a plate shape that largely covers the entire first and second electrodes 65a and 65b.

  For example, as shown in FIGS. 14 and 15, the outer and inner circumferences of the first and second electrodes 65a and 65b formed with a smaller diameter than the outer shape of the piezoelectric ceramic 57 instead of the plate-like elastic plates 61a and 61b. A pair of large and small insulating elastic rings 69a and 69b (9th and 10th elastic bodies) are disposed to surround the first and second surfaces d1 and d2 of the piezoelectric ceramic 57 and the first and second surfaces. A configuration in which the case members 63a and 63b are interposed between the back surfaces of the case members 63a and 63b is also possible.

  The other configurations are the same as the configurations of FIGS. 12 and 13 described above, and the elastic rings 69a and 69b are also made of the same material as the elastic plates 61a and 61b. In FIG. Illustration is omitted.

  Even in such a configuration, the outer and inner peripheries of the first and second electrodes 65a and 65b formed on the piezoelectric ceramic 57 are the same as the first and second surfaces d1 and d2 of the piezoelectric ceramic 57. 2 is sealed waterproofly by the elastic rings 69a and 69b pressed between the two back surfaces of the case members 63a and 63b, so that a short circuit between the first and second electrodes 65a and 65b is prevented. Since the elastic rings 69a and 69b are loop-shaped, their material consumption is small and inexpensive.

  Also, as shown in FIG. 16, in addition to the ring-plate-like elastic plates 61a and 61b (see FIG. 12), the first and second case members 63a and 63b are provided on the through hole 55 side. The ring-shaped insulating elastic rings 71a and 71b (eleventh and twelfth elastic bodies) may be interposed between the end surfaces of the case members 63a and 63b and the vibration plate 59 so as to be in pressure contact with each other. .

  The other structure is the same as that of FIG. 12 and FIG. 13 mentioned above, and the elastic rings 71a and 71b are also formed from the same material as the elastic plates 61a and 61b.

  Even in such a configuration, in addition to the short-circuit preventing function of the elastic plates 61a and 61b, the first and second case members 63a are formed on the through hole 55 side of the piezoelectric ceramic 57, that is, the vibration plate 59 side by the elastic rings 71a and 71b. 63b and the vibration plate 59 are sealed in a waterproof manner, so that a short circuit between the first and second electrodes 65a and 65b is prevented.

  In addition, if the elastic rings 71a and 71b are used in addition to the elastic plates 61a and 61b, a higher short-circuit prevention function can be secured, but the elastic plates 61a and 61b are omitted and only the elastic rings 71a and 71b are used to prevent the short-circuit. There is an advantage that can be secured.

  Further, although not shown, in the configuration of FIG. 16, a part of the first and second case members 63a and 63b is located on the through hole 55 side and further inside the first and second electrodes 65a and 65b. A configuration in which the elastic rings 71a and 71b are interposed and press-contacted with the piezoelectric ceramic 57 is also possible, and a similar effect can be obtained with such a configuration.

  Also in the second configuration, either one of the elastic plates 61a and 61b and the elastic rings 69a, 69b, 71a, and 71b is arranged on one of the first and second surfaces of the piezoelectric ceramic 57. It goes without saying that the object of the present invention can be achieved even if it is provided.

  By the way, when the ultrasonic vibration units 27 and 53 according to the present invention are used in an atomizing device for spraying a liquid such as water 3 or a chemical solution, depending on the type of the liquid, the small holes 41 formed in the vibration plates 31 and 59, While it is necessary to variously change the inner diameter and the formation density of 65, the small holes 41 and 65 are too fine to be easily understood by the naked eye, and it is difficult to determine what kind of liquid the ultrasonic vibration units 27 and 53 are for.

  Therefore, the cases 37 and 63 are provided with a display that can be changed according to the type of the vibrating plates 31 and 59, or can be visually confirmed according to the type of the vibrating plates 31 and 59. It is useful.

  In addition, the ultrasonic vibration units 27 and 53 according to the present invention can be used as vibration sources for various apparatuses and applications such as when powder is scattered.

It is sectional drawing which shows embodiment about the 1st structure which concerns on the ultrasonic vibration unit of this invention. It is a disassembled perspective view of the ultrasonic vibration unit shown in FIG. It is sectional drawing which shows the state except the case in the ultrasonic vibration unit shown in FIG. It is a figure explaining operation | movement of the ultrasonic vibration unit shown in FIG. It is sectional drawing which shows another embodiment in the 1st structure which concerns on the ultrasonic vibration unit of this invention. FIG. 6 is an exploded perspective view of the ultrasonic vibration unit shown in FIG. 5. It is sectional drawing which shows another embodiment in the 1st structure which concerns on the ultrasonic vibration unit of this invention. FIG. 6 is a cross-sectional view showing still another embodiment in the first configuration relating to the ultrasonic vibration unit of the present invention. It is a perspective view of the ultrasonic vibration unit shown in FIG. It is a top view of the ultrasonic vibration unit shown in FIG. It is sectional drawing which shows another modification in the 1st structure which concerns on the ultrasonic vibration unit of this invention. It is sectional drawing which shows embodiment about the 2nd structure which concerns on the ultrasonic vibration unit of this invention. It is a disassembled perspective view of the ultrasonic vibration unit shown in FIG. It is sectional drawing which shows another embodiment in the 2nd structure which concerns on the ultrasonic vibration unit of this invention. It is a disassembled perspective view of the ultrasonic vibration unit shown in FIG. It is sectional drawing which shows another embodiment in the 2nd structure which concerns on the ultrasonic vibration unit of this invention. It is a schematic sectional drawing which shows the atomization apparatus used as the reference of this invention. It is the top view and sectional drawing which show the conventional ultrasonic vibration unit.

Explanation of symbols

1 Liquid storage part (device main body)
3 Water (liquid)
5 Support members 7, 27, 53 Ultrasonic vibration unit 9 Supply section 11a, 11b Electrodes 13, 29, 57 Piezoelectric ceramics 15, 31, 59 Vibrated plates 17a, 17b, 33c, 33d Terminals 19, 41, 67 Small holes 21 Support portions 23, 37, 47, 63 Case 25 Stop plugs 33a, 33b Terminal plate 35a Elastic plate (first elastic body)
35b Elastic plate (first elastic body)
37a, 47a, 63a 1st case member 37b, 47b, 63b 2nd case member 39a, 65a 1st electrode 39b, 65b 2nd electrode 41, 67 Small hole 43a Elastic frame (3rd elastic body)
43b Elastic frame (fourth elastic body)
45a Elastic bar (fifth elastic body)
43b, 69b Insulating elastic rod (sixth insulating elastic body)
49 Window portion 51 Insulating elastic piece 55 Through hole 61a Elastic plate (seventh elastic body)
61b Elastic plate (8th elastic body)
69a Elastic ring (9th elastic body)
69b Elastic ring (tenth elastic body)
71a Elastic ring (eleventh elastic body)
71b Elastic ring (12th elastic body)
100a, 100b Spring d1 First surface d2 Second surface

Claims (12)

Plate-like piezoelectric ceramics having first and second electrodes on the first and second surfaces facing each other in the thickness direction;
A vibration plate disposed so as to partially or directly overlap one end side of the piezoelectric ceramic;
A case that covers at least substantially the entire surface of at least the first and second surfaces of the piezoelectric ceramic;
In an ultrasonic vibration unit that ultrasonically vibrates the vibration plate based on vibration of the piezoelectric ceramic,
An ultrasonic wave characterized in that an insulating elastic body covering at least one of the first or second electrode is disposed between the back surface of the case and the first or second surface of the piezoelectric ceramic. Vibration unit. Plate-like piezoelectric ceramics having first and second electrodes on the first and second surfaces facing each other in the thickness direction;
A vibration plate disposed so as to partially or directly overlap one end side of the piezoelectric ceramic;
A case that covers at least substantially the entire surface of at least the first and second surfaces of the piezoelectric ceramic;
In an ultrasonic vibration unit that ultrasonically vibrates the vibration plate based on vibration of the piezoelectric ceramic,
Between the back surface of the case and the first or second surface of the piezoelectric ceramic, a frame-like or annular insulating elastic body surrounding at least one of the first or second electrodes is disposed. An ultrasonic vibration unit characterized by that. Plate-like piezoelectric ceramics having first and second electrodes on the first and second surfaces facing each other in the thickness direction;
A vibration plate disposed so as to partially or directly overlap one end side of the piezoelectric ceramic;
A case that covers at least substantially the entire surface of at least the first and second surfaces of the piezoelectric ceramic;
In an ultrasonic vibration unit that ultrasonically vibrates the vibration plate based on vibration of the piezoelectric ceramic,
A conductive elastic body is disposed on at least one of the first or second electrode, and at least one of the conductive elastic body and the electrode on the side where the conductive elastic body is disposed or the other electrode. Ultrasonic vibration unit characterized by covering with an insulator. Plate-like piezoelectric ceramics having first and second electrodes on the first and second surfaces facing each other in the thickness direction;
A vibration plate disposed so as to partially or directly overlap one end side of the piezoelectric ceramic;
A case that covers at least substantially the entire surface of at least the first and second surfaces of the piezoelectric ceramic;
In an ultrasonic vibration unit that ultrasonically vibrates the vibration plate based on vibration of the piezoelectric ceramic,
An ultrasonic vibration unit, wherein an insulating elastic body is disposed between the case and the piezoelectric ceramic or the vibration plate on the vibration plate mounting side of the piezoelectric ceramic. The case is formed of at least two members divided in the thickness direction of the piezoelectric ceramic, and the piezoelectric ceramic is sandwiched between the two members of the case via the elastic body. 5. The ultrasonic vibration unit according to any one of 4 above. The case has a window portion that is formed larger in the length direction than the vibration plate and penetrates in the thickness direction, and the vibration plate is arranged to extend across the window portion. Item 7. The ultrasonic vibration unit according to any one of Items 1 to 6. The ultrasonic vibration unit according to claim 6, wherein a tip end portion of the vibration plate is elastically supported by the case. Ring-plate-shaped piezoelectric ceramics having first and second electrodes on the first and second surfaces facing each other in the thickness direction and having a through hole in the center,
A vibration plate disposed so as to partially or directly overlap the first or second surface of the piezoelectric ceramic so as to close the through hole of the piezoelectric ceramic;
A case that covers at least substantially the entire surface of at least the first and second surfaces of the piezoelectric ceramic;
In an ultrasonic vibration unit that ultrasonically vibrates the vibration plate based on vibration of the piezoelectric ceramic,
An ultrasonic wave characterized in that an insulating elastic body covering at least one of the first or second electrode is disposed between the back surface of the case and the first or second surface of the piezoelectric ceramic. Vibration unit. Ring-plate-shaped piezoelectric ceramics having first and second electrodes on the first and second surfaces facing each other in the thickness direction and having a through hole in the center,
A vibration plate disposed so as to partially or directly overlap the first or second surface of the piezoelectric ceramic so as to close the through hole of the piezoelectric ceramic;
A case that covers at least substantially the entire surface of at least the first and second surfaces of the piezoelectric ceramic;
In an ultrasonic vibration unit that ultrasonically vibrates the vibration plate based on vibration of the piezoelectric ceramic,
Between the back surface of the case and the first or second surface of the piezoelectric ceramic, an annular insulating elastic body surrounding the outer periphery and inner periphery of at least one of the first or second electrodes is disposed. An ultrasonic vibration unit characterized by that. Ring-plate-shaped piezoelectric ceramics having first and second electrodes on the first and second surfaces facing each other in the thickness direction and having a through hole in the center,
A vibration plate disposed so as to partially or directly overlap the first or second surface of the piezoelectric ceramic so as to close the through hole of the piezoelectric ceramic;
A case that covers at least substantially the entire surface of at least the first and second surfaces of the piezoelectric ceramic;
In an ultrasonic vibration unit that ultrasonically vibrates the vibration plate based on vibration of the piezoelectric ceramic,
A conductive elastic body is disposed on at least one of the first or second electrode, and at least one of the conductive elastic body and the electrode on the side where the conductive elastic body is disposed or the other electrode. Ultrasonic vibration unit characterized by covering with an insulator. Ring-plate-shaped piezoelectric ceramics having first and second electrodes on the first and second surfaces facing each other in the thickness direction and having a through hole in the center,
A vibration plate disposed so as to partially or directly overlap the first or second surface of the piezoelectric ceramic so as to close the through hole of the piezoelectric ceramic;
A case that covers at least substantially the entire surface of at least the first and second surfaces of the piezoelectric ceramic;
In an ultrasonic vibration unit that ultrasonically vibrates the vibration plate based on vibration of the piezoelectric ceramic,
An ultrasonic vibration unit, wherein an insulating elastic body is disposed between the case and the piezoelectric ceramic or the vibration plate on the vibration plate mounting side of the piezoelectric ceramic. The case is formed of at least two members divided in the thickness direction of the piezoelectric ceramic, and the piezoelectric ceramic is sandwiched between the two members of the case via the elastic body. 11. The ultrasonic vibration unit according to any one of 11 above.

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